CN100526207C - Mems致动器 - Google Patents
Mems致动器 Download PDFInfo
- Publication number
- CN100526207C CN100526207C CNB2004800141593A CN200480014159A CN100526207C CN 100526207 C CN100526207 C CN 100526207C CN B2004800141593 A CNB2004800141593 A CN B2004800141593A CN 200480014159 A CN200480014159 A CN 200480014159A CN 100526207 C CN100526207 C CN 100526207C
- Authority
- CN
- China
- Prior art keywords
- actuator
- arm member
- switch
- cold arm
- cold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Micromachines (AREA)
- Thermally Actuated Switches (AREA)
Abstract
Description
Claims (51)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US46442303P | 2003-04-22 | 2003-04-22 | |
US60/464,423 | 2003-04-22 | ||
US10/782,708 | 2004-02-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1795140A CN1795140A (zh) | 2006-06-28 |
CN100526207C true CN100526207C (zh) | 2009-08-12 |
Family
ID=36806126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004800141593A Expired - Fee Related CN100526207C (zh) | 2003-04-22 | 2004-04-15 | Mems致动器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100526207C (zh) |
-
2004
- 2004-04-15 CN CNB2004800141593A patent/CN100526207C/zh not_active Expired - Fee Related
Non-Patent Citations (4)
Title |
---|
Design and performance of a double hot arm polysiliconthermal actuator. David M. et al.PROCEEDINGS OF THE SPIE,Vol.3224 . 1997 |
Design and performance of a double hot arm polysiliconthermal actuator. David M. et al.PROCEEDINGS OF THE SPIE,Vol.3224 . 1997 * |
DESIGN AND PERFORMANCE OF A POLYSILICONSURFACE MICROMACHINED MICROENGINE REALIZEDWITH ARRAYS OF ASYMMETRICAL ELECTROTHERMALMICROACTUATORS. KOLESAR E S ET AL.PROCEEDINGS OF THE SPIE,Vol.4407 . 2001 |
DESIGN AND PERFORMANCE OF A POLYSILICONSURFACE MICROMACHINED MICROENGINE REALIZEDWITH ARRAYS OF ASYMMETRICAL ELECTROTHERMALMICROACTUATORS. KOLESAR E S ET AL.PROCEEDINGS OF THE SPIE,Vol.4407 . 2001 * |
Also Published As
Publication number | Publication date |
---|---|
CN1795140A (zh) | 2006-06-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MEMS NETWORKS LIMITED PARTNERSHIP Free format text: FORMER OWNER: SCHINPLER NETWORKS COMPANY Effective date: 20100519 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20100519 Address after: Quebec Patentee after: MEMS GmbH & Co. kg Address before: Quebec Patentee before: Simpler Networks Inc. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090812 Termination date: 20170415 |