CN100523885C - 制造光学衬底中的结构 - Google Patents

制造光学衬底中的结构 Download PDF

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Publication number
CN100523885C
CN100523885C CNB2005800444849A CN200580044484A CN100523885C CN 100523885 C CN100523885 C CN 100523885C CN B2005800444849 A CNB2005800444849 A CN B2005800444849A CN 200580044484 A CN200580044484 A CN 200580044484A CN 100523885 C CN100523885 C CN 100523885C
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CN
China
Prior art keywords
optical substrate
beams
optical
intersection location
write
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB2005800444849A
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English (en)
Chinese (zh)
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CN101088036A (zh
Inventor
利文特·伯耶克勒
杰罗姆·C·波尔凯
詹姆士·M·巴蒂亚托
大卫·B·斯特高尔
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN101088036A publication Critical patent/CN101088036A/zh
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Publication of CN100523885C publication Critical patent/CN100523885C/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
    • G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02152—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating involving moving the fibre or a manufacturing element, stretching of the fibre

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CNB2005800444849A 2004-12-22 2005-11-04 制造光学衬底中的结构 Expired - Fee Related CN100523885C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/020,894 US7085450B2 (en) 2004-12-22 2004-12-22 Fabrication of structures in an optical substrate
US11/020,894 2004-12-22

Publications (2)

Publication Number Publication Date
CN101088036A CN101088036A (zh) 2007-12-12
CN100523885C true CN100523885C (zh) 2009-08-05

Family

ID=35735317

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005800444849A Expired - Fee Related CN100523885C (zh) 2004-12-22 2005-11-04 制造光学衬底中的结构

Country Status (6)

Country Link
US (1) US7085450B2 (https=)
EP (1) EP1828822A1 (https=)
JP (1) JP2008525848A (https=)
KR (1) KR20070088725A (https=)
CN (1) CN100523885C (https=)
WO (1) WO2006068707A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7864388B2 (en) * 2005-11-17 2011-01-04 Raytheon Company Method and apparatus for recoding holographic diffraction gratings
US7414547B2 (en) * 2006-12-22 2008-08-19 3M Innovative Properties Company Method and system for calibrating a rotary encoder and making a high resolution rotary encoder
WO2010080378A1 (en) * 2008-12-19 2010-07-15 3M Innovative Properties Company Method and system for fabricating nanostructure mass replication tool
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) * 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
KR101361980B1 (ko) * 2012-09-21 2014-02-12 한국과학기술원 광섬유를 증폭 매질로 하는 쳐프 펄스 증폭 시스템의 능동적 보상 시스템
CN103713156B (zh) * 2012-10-09 2016-04-27 原相科技股份有限公司 光学式加速度计
US10024656B2 (en) 2015-04-29 2018-07-17 Honeywell International Inc. System and methods for highly integrated optical readout MEMS sensors
US9803979B2 (en) * 2015-06-26 2017-10-31 Honeywell International Inc. Systems and methods for a time-based optical pickoff for MEMS sensors
EP3290971B1 (en) 2016-09-02 2024-04-10 National Research Council of Canada Automated system for trans-jacket fiber bragg grating inscription and manufacturing
EP3339921A1 (en) * 2016-12-22 2018-06-27 FBGS Technologies GmbH Draw tower grating production method and system
CN108731601B (zh) * 2018-08-17 2019-12-31 桂林电子科技大学 一种空间光路的光栅尺标定装置及标定方法
CN108801158B (zh) * 2018-08-17 2019-12-31 桂林电子科技大学 一种光栅尺标定装置及标定方法
EP3988973B1 (en) * 2020-10-20 2023-10-11 AIP Leibniz-Institut für Astrophysik Method and control system for controlling a process for writing gratings into an optical fiber

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1236896A (zh) * 1999-03-12 1999-12-01 清华大学 采用莫尔条纹振幅模板制造光纤光栅的方法
EP1378770A1 (en) * 2002-07-02 2004-01-07 Intel Corporation Monitoring and correcting Bragg gratings during their fabrication
US20040156586A1 (en) * 2001-03-08 2004-08-12 Bengt Sahlgren System and method for fabricating bragg gratings

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9509874D0 (en) * 1995-05-16 1995-07-12 Univ Southampton Optical waveguide grating
US20010026357A1 (en) * 1996-04-26 2001-10-04 Nikon Corporation Position transducer and exposure apparatus with same
GB2316760A (en) * 1996-08-23 1998-03-04 Univ Southampton Fabricating optical waveguide gratings
US5945261A (en) * 1996-11-19 1999-08-31 Northern Telecom Limited Creation of Bragg reflective gratings in waveguides
US5912999A (en) * 1997-10-02 1999-06-15 Minnesota Mining And Manufacturing Company Method for fabrication of in-line optical waveguide index grating of any length
AUPP209298A0 (en) * 1998-03-02 1998-03-26 Uniphase Fibre Components Pty Limited Grating writing techniques
CA2272008A1 (en) * 1999-05-11 2000-11-11 Francois Trepanier Device and method for recording an interference pattern in a photosensitive medium
DE60016761T2 (de) * 1999-08-02 2005-12-15 Zetetic Institute, Tucson Interferometrische konfokale nahfeld-abtastmikroskopie
US6882477B1 (en) * 1999-11-10 2005-04-19 Massachusetts Institute Of Technology Method and system for interference lithography utilizing phase-locked scanning beams
JP3833448B2 (ja) * 2000-07-05 2006-10-11 株式会社リコー 光ピックアップ方法および装置および光情報処理装置
US6836592B2 (en) * 2000-11-20 2004-12-28 Aculight Corporation Method and apparatus for fiber Bragg grating production
US6904201B1 (en) * 2001-05-09 2005-06-07 Intel Corporation Phase-controlled fiber Bragg gratings and manufacturing methods
US6915044B2 (en) * 2003-07-15 2005-07-05 3M Innovative Properties Company Tunable talbot interferometers for fiber bragg grating writing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1236896A (zh) * 1999-03-12 1999-12-01 清华大学 采用莫尔条纹振幅模板制造光纤光栅的方法
US20040156586A1 (en) * 2001-03-08 2004-08-12 Bengt Sahlgren System and method for fabricating bragg gratings
EP1378770A1 (en) * 2002-07-02 2004-01-07 Intel Corporation Monitoring and correcting Bragg gratings during their fabrication

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Interferometric side-diffraction position monitoring techniquefor writing long fiber Bragg gratings. Chuang, K.P., Wu, L.L., Lai, Y.Lasers and Electro-Optics, 2004. (CLEO). Conference on,Vol.2. 2004 *

Also Published As

Publication number Publication date
EP1828822A1 (en) 2007-09-05
JP2008525848A (ja) 2008-07-17
US7085450B2 (en) 2006-08-01
CN101088036A (zh) 2007-12-12
US20060133728A1 (en) 2006-06-22
WO2006068707A1 (en) 2006-06-29
KR20070088725A (ko) 2007-08-29

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Granted publication date: 20090805

Termination date: 20191104