CN100522451C - Method for bonding heating plate for elevated temperature substrate web and heating plate - Google Patents
Method for bonding heating plate for elevated temperature substrate web and heating plate Download PDFInfo
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- CN100522451C CN100522451C CNB2006101563818A CN200610156381A CN100522451C CN 100522451 C CN100522451 C CN 100522451C CN B2006101563818 A CNB2006101563818 A CN B2006101563818A CN 200610156381 A CN200610156381 A CN 200610156381A CN 100522451 C CN100522451 C CN 100522451C
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Abstract
The invention discloses a jointing method and a heating plate used for a heating base material. The method comprises the steps of providing a bearing guide plate, providing a heating lead, and providing a heating guide plate. Two guide plates are respectively provided with a trough to form a receiving space where the heating lead is arranged; furthermore, the two guide plates are respectively provided with a jointing surface for mutual jointing; the two guide plates are jointed into a whole by jointing the bearing guide plate and the heating guide plate in the friction mixing welding manufacture process; furthermore, a lead guide pipe step is provided and used for the extension arrangement of the heating lead, and the operation step that the lead guide pipe is jointed on the bearing guide plate is carried out in the friction mixing welding manufacture process.
Description
Technical field
The present invention relates to a kind of joint method and heating plate of heating plate, relate in particular to and a kind ofly can promote heat conduction efficiency, keep the minimum temperature gradient and reach the heater plate surface temperature uniformly in order to the joint method and the heating plate of the heating plate of intensification base material.
Background technology
Multimedia technology can improve rapidly in the recent period, is indebted to the tremendous progress of semiconductor subassembly or man-machine display device mostly.With regard to display, (Cathode Ray Tube CRT) because of having excellent display quality and its economy, monopolizes monitor market in recent years to cold cathode ray tube always.Yet, for the individual on the table the operation display device environment or see it with the viewpoint of environmental protection, if can be predicted with the trend of saving the energy, cathode-ray tube is because of still existing a lot of problems, so provide solution if single the demand with light, thin, short, little and low consumpting power can't effectively reduce in space utilization and the energy resource consumption.Therefore, have that high image quality, space utilization efficient are good, (Liquid Crystal Display LCD) becomes the main flow in market to the LCD of low consumpting power, advantageous characteristic such as radiationless gradually.
LCD (LCD) can slightly be divided into two kinds of active-matrix formula LCD (Active Matrix LCD) and passive matrix type LCDs (Passive Matrix LCD), and is wherein comparatively extensive with the application of active-matrix formula LCD again.General common active-matrix formula LCD is Thin Film Transistor-LCD (TFT-LCD), and mainly (Thin Film Transistor TFT) controls the state of each pixel electrode, and then reaches the effect of demonstration by thin film transistor (TFT) for it.
The thin film transistor (TFT) array is mainly formed by formed patterning conductor layer of multiple tracks light shield manufacture process and dielectric layer stack.Its roughly manufacture process be steps such as patterning conductor layer must heat up through repeatedly forming sputtering film, photoresistance coating, soft roasting, exposure, exposure back, develops, hard roasting, etching and photoresistance glass on making.Wherein, (be generally the center of glass baseplate) in order to main earlier photoresistance liquid being coated on the glass baseplate that is formed with conductor layer of the light shield manufacture process of definition conductor layer, and by the rotation mode photoresistance liquid is evenly distributed on the glass baseplate, then glass baseplate is placed and carry out soft roasting action on the heating plate, and heat up in the soft back of exposing again, expose after roasting, develop, bake firmly, step, the making of promptly having finished patterning conductor layer like this such as etching and photoresistance are peeled off.
And at present no matter be Thin Film Transistor-LCD manufacturing industry or semiconductor manufacturing industry, all must extensively carry out warming temperature by heating plate, so existing heating plate develops towards high heat-conducting effect and heating large tracts of land direction, yet apply to above-mentioned manufacturing existing heating plate at present and include heating wires usually, it mainly uses the aluminium alloy casting manufacture process that heating wires is coated in the aluminium alloy, again aluminum alloy surface and size are done last process operation, though it has composition surface good, be to reach preferable thermal conductance to distribute but because of its heating wires, the design kenels that adopt circulating type more, so carry out aluminium alloy when casting putting into die, can produce the condensation rate inequality because of the local overcooling district or because of molten aluminium alloy contacts with heater coil, cause that heating plate is inner can to generate gas hole defect, so can influence its heating wires add heat conduction efficiency and the heater plate surface thermal conductance distributes.And adopt high-energy welding manufacture process at aluminium alloy conductor guide wire and heating plate joint more, as laser, electron beam welding etc., easily cause aluminium alloy solid solution vaporization phenomenon and in welding bead, produce gas hole defect, in the time of in being used for vacuum cavity, airtight shortcoming such as bad is just arranged, generally leak hunting through helium, its slip need reach and be less than or equal 1 * 10
-8Torr liter/sec, because of when heater when vacuum cavity internal leakage rate is excessive, will cause heating uniformity to reduce, the efficiency of heating surface is reduced, will influence and make qualification rate and heater life-span, and use is 5.7 * 10
-4Under the following vacuum environment of Pa, many of heating-up temperature scopes are at 100 ℃～500 ℃.
Moreover, see also Fig. 1, existing another heating plate juncture in sheet material is coated on heating wires about the utilization, utilizes the tight group mode of forging and pressing again, reach heating wires P30 and upper and lower hardware P10, P20 fluid-tight engagement effect, however closely assembly needs greatly forging and pressing pressure to the large scale heating plate, and surperficial moulding pressure must reach uniformity, so easily assembly is produced distortion, and the complexity and the difficulty that increase design or make.Except that above-mentioned existing manufacture process, high-energy welding manufacture processes such as using laser welding manufacture process or electron beam is also arranged, yet aluminum alloy material also is easy to generate problem such as gas hole defect at the welding bead place, and can't be used in the vacuum cavity.
Therefore, at above-mentioned existing heating plate juncture, because of the problem of gas residue after flow bad and the solid solution is arranged with the casting manufacture process, influence thermal conductance distribution and conduction efficiency so easily generate gas hole defect, and to forge and press tight group mode the large scale heating plate is had easy increase design or makes complexity or degree of difficulty, engaging again or with high-energy welding manufacture process does not also have qualification rate good and increase the inferior position of equipment investment and integral production cost, so how to redesign a kind of joint method and heating plate of the heating plate in order to the intensification base material, it can make heating plate closely contact with heater coil, reaching airtight covering property and then lifting thermal conductance with low distortion distributes and conduction efficiency, and improve integral production cost and the not good shortcoming of qualification rate, be target of the present invention.
Summary of the invention
In view of above-mentioned prior art problems, the invention provides a kind of joint method and heating plate of the heating plate in order to the intensification base material, be shaped in order to solve with the casting manufacture process, easily cause the defective bad and gas residue generation pore that flows, influence the shortcoming that thermal conductance distribution and conduction efficiency also can't be used for vacuum environment, also overcome simultaneously in the forging and pressing mode or with general welding manufacture process and engage, cause respectively the large scale heating plate easily being increased making complexity or degree of difficulty, and the not good shortcoming that increases with the integral production cost of qualification rate.
For achieving the above object, the invention provides a kind of joint method of the heating plate in order to the intensification base material, it provides a carrying guide plate step earlier, this carrying guide plate is offered a groove and is had a composition surface, moreover, one heating wires step is provided, this heating wires is arranged at the groove of above-mentioned carrying guide plate, provide one to add the thermal conduction plate step, the above-mentioned thermal conduction plate that adds offers a groove and constitutes an accommodation space with the groove of above-mentioned carrying guide plate, and the carrying guide plate also have a composition surface for add thermal conduction plate and engage, again, use the friction stir weld manufacture process to engage and add thermal conduction plate and carrying guide plate operating procedure, to add thermal conduction plate fits mutually with the composition surface of carrying guide plate, and in above-mentioned composition surface utilization stirring-head, carrying out friction stir weld flows to form the joint welding bead composition surface formation plasticity, make to add thermal conduction plate and carry guide plate and be bonded into one, increase the intimate-association state of these a little grooves and heating wires simultaneously, follow-up, one wire guide pipe step is provided, this wire guide pipe is placed in wherein for the heating wires extension, uses friction stir weld manufacture process wire bonds guide wire in carrying guide plate operating procedure.In addition, the present invention also comprises a kind of heating plate in order to the intensification base material.
The invention provides a kind of joint method and heating plate of the heating plate in order to the intensification base material, possess following several point and be better than the existing practice, and increase the effect that showing as described below.
1. the joint method and the heating plate of a kind of heating plate in order to the intensification base material of the present invention, use by the joint method of heating plate of the present invention and the enforcement of heating plate, because its utilization friction stir weld manufacture process engages heating plate, it can be applicable to the heating plate that engages dissimilar metal, and the heating plate that is shaped has the advantage of low deflection.
2. the joint method and the heating plate of a kind of heating plate in order to the intensification base material of the present invention, joint method and heating plate by heating plate of the present invention are implemented utilization, because its utilization friction stir weld manufacture process engages heating plate, and can arrange in pairs or groups and not stay the stirring-head of surplus cellular type, so can propose no backing and the heating plate composition surface that is easy to engage is designed, and can reach equally and hang down deflection and good combining closely property.
3. the joint method and the heating plate of a kind of heating plate in order to the intensification base material of the present invention, joint method and heating plate by heating plate of the present invention are implemented utilization, in stirring-head friction rabbling welding termination process, having a downforce stirs in the surface, when so heating wires is placed in the accommodation space of groove, also increase the intimate-association state of these a little grooves and heating wires, add thermal conduction plate with raising, carrying guide plate and heating wires three's tight contact condition, and then reach best conducting effect, and heater plate surface can evenly be heated up, and be the minimum temperature gradient when keeping constant temperature.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 has heating plate juncture schematic diagram now;
Fig. 2 the present invention is in order to the joint method schematic flow sheet of the heating plate of intensification base material;
The joint schematic diagram of Fig. 3 heating plate of the present invention;
The joint straight line welding bead schematic diagram of Fig. 4 A heating plate of the present invention;
The joint circumference welding bead schematic diagram of Fig. 4 B heating plate of the present invention;
The joint of Fig. 5 heating plate of the present invention is finished schematic diagram;
The reinforcement that applies of contact site, the composition surface system of Fig. 6 heating plate of the present invention engages the welding bead schematic diagram;
Fig. 7 is the reinforcement seam welding road shape schematic diagram of Fig. 6 heating plate;
Composition surface section shape first state of Fig. 8 heating plate of the present invention is finished schematic diagram;
Composition surface section shape second state of Fig. 9 heating plate of the present invention is finished schematic diagram;
The composition surface section shape third state of Figure 10 heating plate of the present invention is finished schematic diagram; And
Composition surface section shape the 4th state of Figure 11 heating plate of the present invention is finished schematic diagram.
Wherein, Reference numeral
The last hardware of P10
Hardware under the P20
The P30 heating wires
S1 is in order to the joint method of the heating plate of intensification base material
Step S10 provides a carrying guide plate
Step S20 provides a heating wires
Step S30 provides one to add thermal conduction plate
Step S40 uses the friction stir weld processing procedure to engage the carrying guide plate and adds the thermal conduction plate operation
Step S50 provides a wire guide pipe
Step S60 uses friction stir weld processing procedure wire bonds guide wire in the operation of carrying guide plate
Step S70 uses friction stir weld processing procedure reinforcement bonding operation
10 heating plates in order to the intensification base material
11 carrying guide plates
111,121 grooves
112,122 composition surfaces
12 add thermal conduction plate
13 wire guide pipes
20 heating wires
30 stirring-heads
The A contact site
The R reinforcement engages welding bead
The specific embodiment
See also Fig. 2, the joint method of a kind of heating plate in order to the intensification base material of the present invention, this joint method S1 in order to the heating plate of intensification base material comprises following steps, and a carrying guide plate (step S10) is provided, one heating wires (step S20) is provided, provide one to add thermal conduction plate (step S30), use the friction stir weld manufacture process to engage the carrying guide plate and add thermal conduction plate and operate (step S40), one wire guide pipe (step S50) is provided, use friction stir weld manufacture process wire bonds guide wire to operate (step S60) and use friction stir weld manufacture process reinforcement bonding operation (step S70) in the carrying guide plate.
Please consult Fig. 2 and Fig. 3 again, the joint method of a kind of heating plate in order to the intensification base material of the present invention, this is in order to the joint method S1 of the heating plate of intensification base material, one carrying guide plate (step S10) is provided earlier, above-mentioned carrying guide plate 11 offers a groove 111, and carrying guide plate 11 also has a composition surface 112, moreover, one heating wires (step S20) is provided, this heating wires 20 is arranged at the groove 111 of above-mentioned carrying guide plate 11, again, provide one to add thermal conduction plate (step S30), this adds thermal conduction plate 12 and offers a groove 121, and constitute an accommodation space with the groove 111 of carrying guide plate 11, and add thermal conduction plate 12 and also have a composition surface 122 for engaging with carrying guide plate 11, again again, use the friction stir weld manufacture process to engage and add thermal conduction plate and carrying guide plate operation (step S40), fitted mutually with the composition surface 122 that adds thermal conduction plate 12 in the composition surface 112 of carrying guide plate 11, and in above-mentioned composition surface 112,122 utilization stirring-heads 30, stirring-head 30 is not for staying surplus cellular type or staying surplus cellular type, carry out friction stir weld and make composition surface 112,122 form plasticity flows to form the joint welding bead, this engages welding bead roughly linearly (shown in Fig. 4 A), curve or circumference (as described later shown in Fig. 4 B), make carrying guide plate 11 and add thermal conduction plate 12 and be bonded into one, provide a downforce because of friction stir weld simultaneously, so heating wires 20 is placed in the groove 111 by said two devices, during 121 accommodation space, also increase this a little grooves 111,121 with the form of combining closely of heating wires 20, follow-up, see also shown in Figure 5, one wire guide pipe (step S50) is provided and uses friction stir weld manufacture process wire bonds guide wire in carrying guide plate operation (step S60), promptly be wire guide pipe 13 to be extended for heating wires 20 be placed in wherein, so promptly finish the making of this heating plate, just joint welding bead herein roughly is circumference as mentioned above shown in Fig. 4 B.
In addition, see also Fig. 6 and Fig. 7, for increasing carrying guide plate 11 and the sealing that adds thermal conduction plate 12, can be in using friction stir weld manufacture process wire bonds guide wire after carrying guide plate operation (step S60), proceed to use friction stir weld manufacture process reinforcement bonding operation (step S70) again, on above-mentioned composition surface 112,122 contact site A utilization friction stir weld manufacture process applies reinforcement and engages welding bead R, carry guide plate 11 and the sealing that adds thermal conduction plate 12 to increase, and these a little reinforcement joint welding bead R can be the line segment shape, irregular curve or closed-loop shape.
Moreover, the joint method of a kind of heating plate in order to the intensification base material of the present invention, this is in order to the joint method S1 of the heating plate of intensification base material, can there be multiple shape on the composition surface 112 of its carrying guide plate 11 and the composition surface 122 that adds thermal conduction plate 12, see also Fig. 8, the composition surface 112 of this carrying guide plate 11 and the composition surface 122 that adds thermal conduction plate 12 roughly are spill and plane engaging respectively for section shape, perhaps, see also Fig. 9, the composition surface 112 of this carrying guide plate 11 and the composition surface 122 that adds thermal conduction plate 12 roughly are engaging of oblique spill and inclined plane shape respectively for section shape, or, see also Figure 10, L-shaped joint is roughly distinguished for section shape in the composition surface 112 of this carrying guide plate 11 and the composition surface 122 that adds thermal conduction plate 12, again or, see also Figure 11, the composition surface 112 of this carrying guide plate 11 and the composition surface 122 that adds thermal conduction plate 12 roughly are the joint of chamfering shape respectively for section shape, certainly remove above-mentioned multiple engagement state, the composition surface 112 of above-mentioned carrying guide plate 11 and the composition surface 122 that adds thermal conduction plate 12 form and engage the relative horizontal planes in welding bead places (the general existing virtual plane that is the level of state) and be arbitrarily angled.
Please consult Fig. 5 again, the present invention also comprises a kind of heating plate 10 in order to the intensification base material, the joint method S1 of its utilization as above-mentioned disclosed a kind of heating plate in order to the intensification base material, one heating plate 10 of institute's bonding and molding in order to the intensification base material, it comprises a carrying guide plate 11, one adds thermal conduction plate 12, one heating wires 20 and a wire guide pipe 13, this carrying guide plate 11 is offered a groove 111, and has a composition surface 112, thermal conduction plate 12 is offered a groove 121 and constitute an accommodation space with the groove 111 of above-mentioned carrying guide plate 11 and add, and add thermal conduction plate 12 and have a composition surface 122 for engaging with carrying guide plate 11, heating wires 20 is arranged at the groove 111 of carrying guide plate 11 again, and wire guide pipe 13 is engaged in carrying guide plate 12 and is placed in wherein for heating wires 20 extensions, and the above-mentioned thermal conduction plate 11 that adds is rectangular, circular, square or polygon, it is rectangular in like manner to carry guide plate 12, circular, square or polygon, in addition, the above-mentioned material that adds thermal conduction plate 11 and carrying guide plate 12 is the light metal material, more specifically, this light metal material is an aluminium alloy, magnesium alloy, titanium alloy or rate of specific gravity perseverance are less than the metal material of 5g/cm3, certain above-mentioned composition surface 112,122 contact site A also applies a reinforcement and engages welding bead R, to increase carrying guide plate 11 and the sealing that adds thermal conduction plate 12.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (19)
1, a kind of joint method of the heating plate in order to the intensification base material is characterized in that the joint method of this heating plate comprises following steps:
One carrying guide plate is provided, and this carrying guide plate is offered a groove, and this carrying guide plate has a composition surface;
One heating wires is provided, and this heating wires is arranged at this groove of this carrying guide plate;
Provide one to add thermal conduction plate, this adds thermal conduction plate offers a groove and constitutes an accommodation space with this groove of this carrying guide plate, and this adds thermal conduction plate and has a composition surface;
Use the friction stir weld manufacture process to engage this carrying guide plate and this and add the thermal conduction plate operation, fitted mutually in this composition surface that this composition surface and this of this carrying guide plate adds thermal conduction plate, and carry out friction stir weld in this composition surface that this composition surface and this of this carrying guide plate adds thermal conduction plate and make this composition surface of this carrying guide plate and these composition surface outer peripheral edges that this adds thermal conduction plate form plasticity to flow and engage welding bead to form, make this carrying guide plate and this add thermal conduction plate and be bonded into one, also increase simultaneously this groove of this carrying guide plate and this groove that this adds thermal conduction plate and the intimate-association state of this heating wires;
One wire guide pipe is provided, and this wire guide pipe is placed in wherein for this heating wires extension; And
Use the friction stir weld manufacture process to engage this wire guide pipe in this carrying guide plate operation.
2, the joint method of the heating plate in order to the intensification base material according to claim 1, it is characterized in that, the friction stir weld manufacture process of using of this method engages this wire guide pipe after this carrying guide plate operating procedure, also comprise and use friction stir weld manufacture process reinforcement bonding operation step, in this composition surface of this carrying guide plate and the contact site on this this composition surface that adds thermal conduction plate apply a reinforcement and engage welding bead, to increase this carrying guide plate and this adds the sealing of thermal conduction plate.
3, the joint method of the heating plate in order to the intensification base material according to claim 1, it is characterized in that this joint method uses a stirring-head to carry out friction stir weld in this composition surface that this composition surface and this of this carrying guide plate adds thermal conduction plate and makes this composition surface of this carrying guide plate and this composition surface that this adds thermal conduction plate form plasticity to flow and engage welding bead to form.
4, the joint method of the heating plate in order to the intensification base material according to claim 2 is characterized in that, it is a line segment that this reinforcement engages welding bead.
5, the joint method of the heating plate in order to the intensification base material according to claim 2 is characterized in that, it is an irregular curve that this reinforcement engages welding bead.
6, the joint method of the heating plate in order to the intensification base material according to claim 2 is characterized in that, it is a closed-loop that this reinforcement engages welding bead.
7, the joint method of the heating plate in order to the intensification base material according to claim 3 is characterized in that this stirring-head is not for staying surplus cellular type or staying surplus cellular type.
8, the joint method of the heating plate in order to the intensification base material according to claim 1 is characterized in that, this engages welding bead roughly linearly or curve.
9, the joint method of the heating plate in order to the intensification base material according to claim 8 is characterized in that this joint welding bead roughly is circumference.
10, the joint method of the heating plate in order to the intensification base material according to claim 1 is characterized in that, rectangular, circular, the square or polygon of this carrying guide plate.
11, the joint method of the heating plate in order to the intensification base material according to claim 1 is characterized in that this adds rectangular, circular, the square or polygon of thermal conduction plate.
12, the joint method of the heating plate in order to the intensification base material according to claim 1 is characterized in that this composition surface that this composition surface of this carrying guide plate and this add thermal conduction plate is for section shape roughly is spill and plane composition surface respectively.
13, the joint method of the heating plate in order to the intensification base material according to claim 1 is characterized in that, this composition surface that this composition surface of this carrying guide plate and this add thermal conduction plate roughly is the composition surface of spill and inclined plane shape respectively for section shape.
14, the joint method of the heating plate in order to the intensification base material according to claim 1 is characterized in that this composition surface that this composition surface of this carrying guide plate and this add thermal conduction plate is for section shape is roughly distinguished L-shaped composition surface.
15, the joint method of the heating plate in order to the intensification base material according to claim 1 is characterized in that, this composition surface that this composition surface of this carrying guide plate and this add thermal conduction plate roughly is the composition surface of chamfering shape respectively for section shape.
16, the joint method of the heating plate in order to the intensification base material according to claim 1 is characterized in that this adds thermal conduction plate and this carrying guide plate is a light metal material part.
17, the joint method of the heating plate in order to the intensification base material according to claim 16 is characterized in that this light metal material is aluminium alloy, magnesium alloy, titanium alloy or the rate of specific gravity perseverance metal material less than 5g/cm3.
18, a kind of heating plate in order to the intensification base material is characterized in that, comprising:
One carrying guide plate, this carrying guide plate is offered a groove and is had a composition surface;
One heating wires, this heating wires are arranged at this groove of this carrying guide plate;
One adds thermal conduction plate, and this adds thermal conduction plate offers a groove and constitute an accommodation space with this groove of this carrying guide plate, and this adds thermal conduction plate and has a composition surface for engaging with this carrying guide plate; And
One wire guide pipe, this wire guide pipe are engaged in this carrying guide plate and are placed in wherein for this heating wires extension.
19, the heating plate in order to the intensification base material according to claim 18, it is characterized in that, this composition surface of this carrying guide plate and the contact site on this this composition surface that adds thermal conduction plate also apply a reinforcement and engage welding bead, to increase this carrying guide plate and this adds the sealing of thermal conduction plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101563818A CN100522451C (en) | 2006-12-29 | 2006-12-29 | Method for bonding heating plate for elevated temperature substrate web and heating plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101563818A CN100522451C (en) | 2006-12-29 | 2006-12-29 | Method for bonding heating plate for elevated temperature substrate web and heating plate |
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| Publication Number | Publication Date |
|---|---|
| CN101209513A CN101209513A (en) | 2008-07-02 |
| CN100522451C true CN100522451C (en) | 2009-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006101563818A Active CN100522451C (en) | 2006-12-29 | 2006-12-29 | Method for bonding heating plate for elevated temperature substrate web and heating plate |
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| CN (1) | CN100522451C (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111266724A (en) * | 2018-12-05 | 2020-06-12 | 杭州三花研究院有限公司 | Method for manufacturing electric heater |
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