CN100507328C - High-temperature-resisting quick-opening-closing high-flow air-exhaust diaphragm valve - Google Patents
High-temperature-resisting quick-opening-closing high-flow air-exhaust diaphragm valve Download PDFInfo
- Publication number
- CN100507328C CN100507328C CNB2006100807092A CN200610080709A CN100507328C CN 100507328 C CN100507328 C CN 100507328C CN B2006100807092 A CNB2006100807092 A CN B2006100807092A CN 200610080709 A CN200610080709 A CN 200610080709A CN 100507328 C CN100507328 C CN 100507328C
- Authority
- CN
- China
- Prior art keywords
- breath
- upper shed
- holding
- gas tank
- main gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012528 membrane Substances 0.000 claims description 33
- 230000004888 barrier function Effects 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 7
- 239000013013 elastic material Substances 0.000 claims description 6
- 229920001971 elastomer Polymers 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
- 229920006351 engineering plastic Polymers 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 51
- 238000000034 method Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Images
Landscapes
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100807092A CN100507328C (en) | 2006-05-11 | 2006-05-11 | High-temperature-resisting quick-opening-closing high-flow air-exhaust diaphragm valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100807092A CN100507328C (en) | 2006-05-11 | 2006-05-11 | High-temperature-resisting quick-opening-closing high-flow air-exhaust diaphragm valve |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101070917A CN101070917A (en) | 2007-11-14 |
CN100507328C true CN100507328C (en) | 2009-07-01 |
Family
ID=38898269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100807092A Expired - Fee Related CN100507328C (en) | 2006-05-11 | 2006-05-11 | High-temperature-resisting quick-opening-closing high-flow air-exhaust diaphragm valve |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100507328C (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104150431A (en) * | 2013-05-14 | 2014-11-19 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Gas intake system and substrate processing device |
CN104235043B (en) * | 2013-06-19 | 2016-08-10 | 株式会社神户制钢所 | Compressor |
CN104019250B (en) * | 2014-06-03 | 2016-03-30 | 太原理工大学 | The anti-suction Protective valve of a kind of mine pneumatic submersible pump |
-
2006
- 2006-05-11 CN CNB2006100807092A patent/CN100507328C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101070917A (en) | 2007-11-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: FINETEK CO., LTD. Free format text: FORMER OWNER: WU DINGGUO Effective date: 20141127 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20141127 Address after: Self Tucheng Industrial Area No. 16 Taiwan North Street Chinese Patentee after: Finetek Co., Ltd. Address before: Xinzhuang County, Taiwan, Taipei, China Patentee before: Wu Dingguo |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090701 Termination date: 20180511 |
|
CF01 | Termination of patent right due to non-payment of annual fee |