CN100498340C - Angular velocity sensor and method for operating the same - Google Patents
Angular velocity sensor and method for operating the same Download PDFInfo
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- CN100498340C CN100498340C CNB200710084384XA CN200710084384A CN100498340C CN 100498340 C CN100498340 C CN 100498340C CN B200710084384X A CNB200710084384X A CN B200710084384XA CN 200710084384 A CN200710084384 A CN 200710084384A CN 100498340 C CN100498340 C CN 100498340C
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Abstract
An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.
Description
Technical field
The present invention relates to a kind of angular-rate sensor and manufacture method thereof.
Background technology
In angular-rate sensor, movable electrode and fixed electorde are arranged on the supporting substrate relative to one another, and detect the angular velocity that is applied based on the variation of distance between movable electrode of following when applying angular velocity and the fixed electorde.
In the angular-rate sensor such as the micro gyroscope sensor of static driven/capacitance detecting type, in the time will detecting angular velocity, between fixed electorde that is used to drive and movable electrode, apply driving voltage, generate electric potential difference thus, and make moving part along a direction vibration parallel with the substrate surface of supporting substrate.During this time, when applying angular velocity, angular velocity detection between movable electrode that provides on the moving part and fixed electorde changes according to the angular velocity that is applied at interval, thus, according to capacitance variations, generate the output corresponding (for example, with reference to U.S. Patent No. 6 with described angular velocity based on interval variation, 151,966).
Yet the interval between two electrodes not only changes by angular velocity, and changes by external acceleration, and also is output based on the capacitance variations owing to the interval variation of described acceleration.This output becomes the noise of gyrosensor, and this ought to detect angular velocity.
Therefore, in order to reduce external acceleration output, prior art has adopted a kind of method, in the method, the ticker of two same shapes is arranged and drives with opposite phase, and the differential output between the capacitance variations of two tickers is derived, and eliminates external acceleration output thus, and only obtains angular velocity output.
Yet in these cases, verified is that described method can't obtain gratifying elimination effect, but generates the output that causes because of external acceleration.Thus, reducing the output that causes because of external acceleration is important problems, and expects a kind of method that is used to solve described problem.
Summary of the invention
In view of the above problems, a purpose of the present disclosure is to provide a kind of angular-rate sensor.Another purpose of the present disclosure provides a kind of method that is used to make described angular-rate sensor.
According to first aspect of the present disclosure, a kind of angular-rate sensor comprises: supporting substrate; And be arranged on first and second tickers on the described supporting substrate.Each ticker comprises moving part and fixed part.The moving part of each ticker has and drives with movable electrode and detection movable electrode.Described moving part is supported on the described supporting substrate movably, is movably so that make described moving part along the surperficial parallel horizontal direction with supporting substrate.The fixed part of each ticker has and drives with fixed electorde and detection fixed electorde.Described fixed part is fixed on the supporting substrate.Described driving is faced described driving movable electrode with fixed electorde, and described detection is faced described detection movable electrode with fixed electorde.First ticker has predetermined structure, and it is symmetrical in the structure of second ticker.The moving part of each ticker have can be by applying driving voltage with fixed electorde and described driving between with movable electrode in described driving along with a part of the direction of vibration vibration of horizontal direction parallel.The described part of the moving part of each ticker can be by Coriolis force along perpendicular to the vibration of the orientation of oscillation of direction of vibration, and described Coriolis force is that the angular velocity by the described part that is applied to described moving part generates.Described detection can change according to the vibration of the described part of described moving part with the electric capacity between the movable electrode with fixed electorde and described detection.Described angular velocity is based on described detection and uses fixed electorde and described detection to detect with the capacitance variations between the movable electrode.Driving in first ticker comprises that with fixed electorde first side drive is with the fixed electorde and the second side drive fixed electorde.Driving in second ticker comprises that with fixed electorde first side drive is with the fixed electorde and the second side drive fixed electorde.First side drive that is applied in first ticker is defined as first driving voltage with the driving voltage of fixed electorde, and second side drive that is applied in second ticker is described first driving voltage with the driving voltage of fixed electorde.Described first driving voltage comprises DC voltage that is defined as the A volt and the alternating voltage that is defined as the B volt, thereby described first driving voltage is described to the A+B volt.Second side drive that is applied in first ticker is defined as second driving voltage with the driving voltage of fixed electorde, and first side drive that is applied in second ticker is described second driving voltage with the driving voltage of fixed electorde.Described second driving voltage comprises DC voltage that is defined as the C volt and the alternating voltage that is defined as the D volt, thereby described second driving voltage is described to the C+D volt.The alternating voltage of described first driving voltage has predetermined phase, and its phase place with the alternating voltage of described second driving voltage is opposite.In the DC voltage in first and second driving voltages at least one controlled according to following manner, that is: first ticker makes moving part vibrate with predetermined phase, described predetermined phase is opposite with the phase place of moving part in second ticker, in the alternating voltage in first and second driving voltages at least one controlled according to following manner, that is: first ticker makes moving part vibrate with predetermined phase, described predetermined phase is opposite with the phase place of moving part in second ticker, perhaps be set in the dutycycle of first and second driving voltages of square wave at least one and be with reference to the central value of square wave dutycycle according to following manner control, that is: first ticker makes moving part vibrate with predetermined phase, and described predetermined phase is opposite with the phase place of moving part in second ticker.
In the sensor, fully eliminated by the output that external acceleration causes, thereby the output that produces because of described acceleration is minimized.
According to second aspect of the present disclosure, a kind of method that is used for the operation angle speed pickup is provided, described angular-rate sensor comprises the supporting substrate and first and second tickers.Each ticker comprises moving part and fixed part.The moving part of each ticker has and drives with movable electrode and detection movable electrode.Described moving part is supported on the described supporting substrate movably, is movably so that make described moving part along the horizontal direction parallel with the supporting substrate surface.The fixed part of each ticker has and drives with fixed electorde and detection fixed electorde.Described fixed part is fixed on the supporting substrate.Described driving is faced described driving movable electrode with fixed electorde, and described detection is faced described detection movable electrode with fixed electorde.First ticker has predetermined structure, and it is symmetrical in the structure of second ticker.The moving part of each ticker have can be by applying driving voltage with fixed electorde and described driving between with movable electrode in described driving along with a part of the direction of vibration vibration of described horizontal direction parallel.The described part of the moving part of each ticker can be by Coriolis force power along perpendicular to the vibration of the orientation of oscillation of direction of vibration, and described Coriolis force is that the angular velocity by the described part that is applied to described moving part generates.Described detection can change according to the vibration of the described part of described moving part with the electric capacity between the movable electrode with fixed electorde and described detection.Described angular velocity is according to detecting with fixed electorde and detecting with the capacitance variations between the movable electrode and detect.Driving in first ticker comprises that with fixed electorde first side drive is with the fixed electorde and the second side drive fixed electorde.Driving in second ticker comprises that with fixed electorde first side drive is with the fixed electorde and the second side drive fixed electorde.First side drive that is applied in first ticker is defined as first driving voltage with the driving voltage of fixed electorde, and second side drive that is applied in second ticker is described first driving voltage with the driving voltage of fixed electorde.Described first driving voltage comprises DC voltage that is defined as the A volt and the alternating voltage that is defined as the B volt, thereby described first driving voltage is described to the A+B volt.Second side drive that is applied in first ticker is defined as second driving voltage with the driving voltage of fixed electorde, and first side drive that is applied in second ticker is described second driving voltage with the driving voltage of fixed electorde.Described second driving voltage comprises DC voltage that is defined as the C volt and the alternating voltage that is defined as the D volt, thereby described second driving voltage is described to the C+D volt, and the alternating voltage of first driving voltage has predetermined phase, and its phase place with the alternating voltage of second driving voltage is opposite.Described method comprises: apply first and second driving voltages by the driving in first and second tickers respectively with fixed electorde and vibrate first and second tickers; Monitoring sensor output under the situation that applies predetermined acceleration; Control at least one in the DC voltage in first and second driving voltages in the following manner, that is: the predetermined central value of the described DC voltage of reference is with described one of them the change scheduled volume in the described DC voltage, control at least one of alternating voltage in first and second driving voltages in the following manner, that is: with reference to the predetermined central value of described alternating voltage, with in the described alternating voltage described one of them change described scheduled volume, perhaps control in the following manner is set at least one in the dutycycle of first and second driving voltages of square wave, that is: with reference to the central value of the dutycycle of described square wave with in the described dutycycle described one of them change described scheduled volume; And when sensor output is minimized, the storage information relevant in storer with described scheduled volume.
In said method, fully eliminated by the output that external acceleration causes, thereby the output that produces because of described acceleration is minimized.
Description of drawings
By the detailed description of making below in conjunction with accompanying drawing, above-mentioned and other purpose of the present invention, feature and advantage will become more apparent.In the accompanying drawings:
Fig. 1 is the planimetric map that gyrosensor is shown;
Fig. 2 is a planimetric map of explaining the mode of operation of sensor when applying driving voltage;
Fig. 3 is the sectional view that the sensor that III-III along the line obtains among Fig. 1 is shown;
Fig. 4 is the block scheme that the sensor circuit in the sensor is shown;
Fig. 5 shows sensor output and adjusts the chart of the relation between the address;
Fig. 6 A shows the chart of the oscillation trajectory of side-to-side vibrations when first voltage equals second voltage, and Fig. 6 B shows the chart of the oscillation trajectory of side-to-side vibrations when first voltage is different from second voltage;
Fig. 7 shows the chart of the output waveform of side-to-side vibrations when side-to-side vibrations has manufacture deviation;
Fig. 8 A and 8B show the view that moves of the sub-center of gravity of side-to-side vibrations;
Fig. 9 A to 9C explains to have under the situation of manufacture deviation the view of the mode of operation of sensor when applying driving voltage at side-to-side vibrations; With
Figure 10 shows the chart of the oscillation trajectory of side-to-side vibrations.
Embodiment
The inventor after deliberation and verified, conventional method can't obtain gratifying elimination effect, but generates the output that causes because of external acceleration.Reason is: the difference during owing to the sub-product finishing of side-to-side vibrations (finish) there are differences aspect driving resonance frequencies.
For instance, as shown in Figure 7, under the situation that the driving resonance frequencies separately (that is the frequency when, amplitude ratio becomes peak point) of side-to-side vibrations there are differences, the intermediate frequency of the driving resonance frequencies separately of side-to-side vibrations is adopted to vibration frequency, drives described ticker with reality.This is because the frequency when the value that obtains of amplitude ratio becomes maximum separately by side-to-side vibrations that adds up is set to vibration frequency.Herein, the VIIA among Fig. 7 represents the amplitude of left ticker, and VIIB represents the amplitude of right ticker, and VIIC represents the phase place of left ticker, and VIID represents the phase place of right ticker.VIIE represents the maximum amplitude ratio of left ticker, and VIIF represents the maximum amplitude ratio of right ticker.VIIG represents driving frequency.Therefore, the vibration frequency of side-to-side vibrations begins skew from driving resonance frequencies separately, and in described vibration frequency, the moving image of the center of gravity in side-to-side vibrations moves with respect to the maximum vibration position, shown in the circle among Fig. 8 A and the 8B.Fig. 8 A shows the moving image of left ticker center of gravity, and Fig. 8 B shows the moving image of right ticker center of gravity.
Therefore, owing to, can't obtain aforesaid gratifying elimination effect below with alleged cause.Mode of operation under the situation that product finishing at side-to-side vibrations there are differences has been shown among Fig. 9 A and the 9B, and will have described described reason in conjunction with these figure.
At first, suppose that acceleration is not applied to the state of ticker.Under the situation that the product finishing of side-to-side vibrations there are differences,, all can show the difference of drive electrode overlapping (overlap margin just) aspect in any definite time.For instance, shown in Fig. 9 A, aspect overlapping, left ticker becomes greater than right ticker.Incidentally, during this time, the electrostatic force that is vertically generated by drive electrode falls into equilibrium state.Herein, in Fig. 9 A, IXA represents the phase differential of left ticker, and IXB represents the phase differential of right ticker.IXC represents in the left ticker overlapping between the drive electrode and moving part, and IXD represents in the right ticker overlapping between the drive electrode and moving part.Before quickening, the lap IXC of left ticker is different from the lap IXD of right ticker.Herein, the static electric power between drive electrode and the moving part is balance in each ticker.
In addition, when shown in Fig. 9 B, to applying acceleration when changing the interval between the drive electrode, so vertical electrostatic force becomes unbalance along the detection side of side-to-side vibrations.Herein, the gap before IXE represents to quicken between drive electrode and the movable electrode, and IXF represents to quicken the gap between rear drive electrode and the movable electrode.When applying acceleration, gap IXE changes into gap IXF.IXG represents the exciting force (that is, the vibration generative power) of left ticker, and IXH represents the exciting force of right ticker.The exciting force IXG of left side ticker is different from the exciting force IXH of right ticker.Therefore, along the detection side of side-to-side vibrations to, aspect exciting force, show difference.Specifically, the exciting force that produces in each ticker is shown by the following formula that provides 1, and its amplitude dissimilates according to the overlapping of drive electrode.Incidentally, electric potential difference between " electric potential difference " expression drive electrode in the formula, and in the prior art, be in the state of opposite phase in AC compounent, applying its DC component between drive electrode respectively is that V1 and its AC compounent are the voltage of V2.
According to this mode, when aspect the exciting force separately of side-to-side vibrations, showing difference, also showing difference aspect the variation of the oscillation trajectory of side-to-side vibrations.For instance, as illustraton of model finding from the sub-oscillation trajectory of side-to-side vibrations shown in Figure 10, when not applying acceleration, the oscillation trajectory separately of side-to-side vibrations is bilaterally symmetric (dotted line in the accompanying drawing), yet when applying acceleration, they become bilateral asymmetric (solid line in the accompanying drawing).Herein, the track of left ticker before the point-like ellipse representation in Figure 10 left side quickens, and the solid line ellipse representation in Figure 10 left side quickens the track of the left ticker in back.The track of right ticker before point-like ellipse representation in Figure 10 right side quickens, and the solid line ellipse representation in Figure 10 right side quickens the track of the right ticker in back.Thus, when having applied acceleration, the track of each ticker is changed.XA represents the differential output between side-to-side vibrations when not applying acceleration, and XB represents the differential output between side-to-side vibrations when applying acceleration.In the case, when having applied acceleration, differential output XA is changed and is differential output XB.Therefore, the differential output of the capacitance variations of side-to-side vibrations changes, and external acceleration output can't be eliminated satisfactorily, and produces the output that is caused by acceleration.
Here it is generates the reason of the output that causes because of external acceleration.Minimizing is an important problems because of the output that external acceleration produces, and expects a kind of method that is used to solve described problem.
In view of the above problems, with regard to capacitive based angular-rate sensor, the function that suppresses to generate the output that is caused by external acceleration because of two ticker products finishing is provided, has wherein suppressed because of the output of external acceleration generation differential output by two tickers.
Illustrated among Fig. 1 (promptly as the micro gyroscope sensor of the static driven/capacitance detecting type of a capacitor type angular-rate sensor that exemplary embodiment was suitable for, abbreviate " gyrosensor " as) illustraton of model, and the state that applies of the driving voltage in the gyrosensor has been shown among Fig. 2.In addition, the sectional view that obtains along the III-III among Fig. 1 has been shown among Fig. 3.The gyrosensor of this embodiment is described with reference to these figure now.
As shown in Figure 1, described gyrosensor 1 is configured to comprise two tickers 3 and 4 that are positioned on the supporting substrate of being made by semiconductor 2.The ticker that is arranged in Fig. 1 drawing left side is left ticker 3, and the ticker on the drawing right side is right ticker 4, and these tickers 3 and 4 are configured to the bilateral symmetrical structure.
The structure of side-to- side vibrations 3 and 4 will be described below.Yet, because the structure of ticker 3 and 4 is identical, thus the structure of left ticker 3 will be described herein, and omitted description to the structure of right ticker 4.
In the following manner will be altogether four fixed electordes that are used to drive 30 be arranged on the center position of left ticker 3 basically, that is: wherein two be set at respectively above and below.Each fixed electorde 30 all has a kind of like this shape, make supported, thereby be fixed on the supporting substrate 2, as shown in Figure 3, and at the inside of outer frame part 39 bifurcated, as shown in Figure 1.In addition, each that is divided in two the part all has main part 30a and broach part 30b.Main part 30a extends towards the core of left ticker 3, it vertically is the vertical direction of drawing, and broach part 30b is arranged on the side surface place of main part 30a according to following state, that is, a plurality of teeth protrude along the direction longitudinally perpendicular to main part 30a.In addition, each fixed electorde 30 is electrically connected to the driving pad 30c that comprises in the outer frame part 39, and applies driving voltage via described driving pad 30c to it.
In the following manner will be altogether eight movable electrodes that are used to drive 31 be arranged on the center position of left ticker 3 basically, that is: they relative with the main part 30a of the fixed electorde 30 that is used to drive and wherein four be set at respectively above with below.Each movable electrode 31 that is used to drive keeps suspended states with respect to supporting substrate 2, as shown in Figure 3, and itself and hammer portion 34 shown in Figure 1 is integrated.In addition, each movable electrode 31 all is configured to comprise main part 31a and broach part 31b.Described main part 31a extends along the vertical direction of left ticker 3 from 34 beginnings of hammer portion, it vertically is the vertical direction of drawing, and broach part 31b is arranged on the side surface place of main part 31a according to following state, specifically, with fixed electorde 30 in broach part 30b facing surfaces place, that is, a plurality of teeth protrude along the direction longitudinally perpendicular to main part 31a.Therefore, the tooth of the broach part 30b of the tooth of the broach part 31b of each movable electrode 31 and respective fixation electrode 30 is alternately arranged with predetermined therebetween interval.
In the following manner will be altogether four fixed electordes 32 that are used for vibration detection be arranged on the fixed electorde 30 that is used to drive and the position outside the movable electrode 31, that is: above two of fixed electorde 32 that are used for vibration detection are set at respectively and below.Each fixed electorde 32 is supported, thereby is fixed on the supporting substrate 2, as shown in Figure 3.In addition, each fixed electorde 32 all is configured to comprise main part 32a and broach part 32b.Described main part 32a extends towards the core of left ticker 3, it vertically is the vertical direction of drawing, and broach part 32b is arranged on a side surface place of the distal portions of main part 32a according to following state, that is, a plurality of teeth protrude along the direction longitudinally perpendicular to main part 32a.In addition, each fixed electorde 32 is electrically connected to the vibration detection pad 32c that comprises in the outer frame part 39, and the electromotive force of this fixed electorde 32 can be measured by vibration detection pad 32c.
In the following manner will be altogether four movable electrodes 33 that are used to drive vibration detection be arranged on the place, both sides of hammer portion 34 basically, that is: the movable electrode 33 that is used to drive vibration detection is relative with the main part 32a of the respective fixation electrode 32 that is used to drive vibration detection, and wherein two be set at respectively above and below.Each movable electrode 33 keeps suspended states with respect to supporting substrate 2, as shown in Figure 3, and itself and hammer portion 34 shown in Figure 1 is integrated.In addition, each movable electrode 33 all is configured to comprise main part 33a and broach part 33b.Described main part 33a extends along the vertical direction of left ticker 3 from 34 beginnings of hammer portion, it vertically is the vertical direction of drawing, and broach part 33b is arranged on the side surface place of main part 33a according to following state, specifically, with fixed electorde 32 in broach part 32b facing surfaces place, that is, a plurality of teeth protrude along the direction longitudinally perpendicular to main part 33a.Therefore, the tooth of the broach part 32b of the tooth of the broach part 33b of each movable electrode 33 and respective fixation electrode 32 is alternately arranged with predetermined therebetween interval.
At the fixed electorde 30 that is used for driving hammer portion 34 is set.This hammer portion 34 is extended, and it vertically is the horizontal direction of drawing, and it keeps suspended state with respect to supporting substrate 2.
Detecting beam 35 is set in the left ticker 3 four jiaos basically.Each detects beam 35 and is made into a cantilever with respect to supporting substrate 2, and is supported on the supporting substrate 2 by the support section 35b that stretches out from a side of outer frame part 39.Thus, each Individual components that constitutes described moving part is supported on the supporting substrate 2.Each detects beam 35 and is electrically connected by support section 35b and the pad 35a that is used for angular velocity detection.Pad 35a that can be by being used for angular velocity detection to the movable electrode 31 that is used to drive, the movable electrode 38 that is used to drive the movable electrode 33 of vibration detection and be used for angular velocity detection applies predetermined voltage.
Each drives beam 36 and is used for connecting movable electrode 33 that is used for vibration detection and the movable electrode 38 that is used for angular velocity detection, and it is configured to comprise that it vertically is a plurality of header portions of drawing vertical direction.In addition, the movable electrode 33 that is used for vibration detection can move by the horizontal direction of a plurality of header portions along drawing.Therefore, described hammer portion 34 integrates and further integrates with the movable electrode 31 that is used to drive with the movable electrode 33 that is used for vibration detection, integrates and can move along the horizontal direction of drawing with hammer portion 34.
In the following manner will be altogether four fixed electordes 37 that are used for angular velocity detection be arranged on the left and right sides of left ticker 3, that is: wherein two be set at respectively above and below.Each fixed electorde 37 is supported, thereby is fixed on the supporting substrate 2, as shown in Figure 3.In addition, each fixed electorde 37 all is configured to comprise main part 37a and broach part 37b.Described main part 37a extends towards the core of left ticker 3, it vertically is the vertical direction of drawing, and broach part 37b is arranged on the side surface place of main part 37a according to following state, that is, a plurality of teeth protrude along the direction longitudinally perpendicular to main part 37a.In addition, each fixed electorde 37 is electrically connected to the angular velocity detection pad 37c that comprises in the outer frame part 39, and the electromotive force that is used for the fixed electorde 37 of angular velocity detection can be measured by angular velocity detection pad 37c.
In the following manner will be altogether two movable electrodes 38 that are used for angular velocity detection be arranged on the both sides of hammer portion 34, that is: they are relative with the respective fixation electrode 37 that is used for angular velocity detection, and wherein each is set on each respective side.Each movable electrode 38 keeps suspended states with respect to supporting substrate 2, as shown in Figure 3, and itself and hammer portion 34 shown in Figure 1, driving beam 36 or the like is integrated.In addition, each movable electrode 38 all is configured to comprise main part 38a and broach part 38b.Described main part 38a is extended, thereby be introduced into lower end position from the upper end position of outer frame part 39, it vertically is the vertical direction of drawing, and broach part 38b is arranged on the side surface place of main part 38a according to following state, specifically, be set at fixed electorde 37 in broach part 37b facing surfaces on, that is: a plurality of teeth protrude along the direction longitudinally perpendicular to main part 38a.Therefore, the tooth of the broach part 37b of the tooth of the broach part 38b of each movable electrode 38 and respective fixation electrode 37 is alternately arranged with predetermined therebetween interval.
Incidentally, right ticker 4 has and left ticker 3 identical structures, and each assembly has the corresponding relation of stating below.Fixed electorde 30 that is used to drive and movable electrode 31 are corresponding to fixed electorde 40 and movable electrode 41.Be used for the fixed electorde 32 of vibration detection and movable electrode 33 corresponding to fixed electorde 42 and movable electrode 43.Hammer portion 34 is corresponding to hammer portion 44, and detection beam 35 is corresponding to detecting beam 45.Drive beam 36 corresponding to driving beam 46, and be used for the movable electrode 37 of angular velocity detection and fixed electorde 38 corresponding to movable electrode 47 and fixed electorde 48.In addition, outer frame part 39 is corresponding to outer frame part 49.In addition, by the reference marker 30 of distributing to left ticker 3 is changed into 40 in the accompanying drawing, can show the main part 40a of each the individual part that constitutes right ticker 4 and the detailed structure of broach part 40b.
Next, use description to drive the gyrosensor 1 of this embodiment and the sensor circuit that detects the detection changes in capacitance of gyrosensor 1.The frame structure of sensor circuit 110 has been shown among Fig. 4, will have described its related content now.
As shown in Figure 4, sensor circuit 110 is configured to comprise driving circuit 120 and angular velocity sensing circuit 130.
Circuit for generating temperature compensated driving voltage 121 is by being formed for being used in the movable electrode 31 of driving and the voltage of 41 vibrations to boosting from the sensor drive power source voltage.In order to drive the movable electrode 31 and 41 that is used to drive, under predetermined amplitude and predetermined frequency, 121 pairs of described circuit for generating temperature compensated driving voltage are boosted by the voltages that the sensor drive power supply generates, and the voltage of preset frequency is exported to the movable electrode 31 and 41 that is used to drive as driving voltage.Specifically, the signal adjustment of the presenting driving voltage that will generate by circuit for generating temperature compensated driving voltage 121 according to the driving voltage that feeds back to by C-V change-over circuit 122 and amplifying circuit 123 and from permanent width of cloth control section 125.
Corresponding sense signals (after this being called " driving the vibration-sensing signal ") is vibrated in movable electrode 31 that described C-V change-over circuit 122 is used to drive from gyrosensor 1 reception and gyrosensor 1 and 41 driving, and makes driving vibration-sensing signal experience voltage transitions.
Described amplifying circuit 123 amplifies by C-V change-over circuit 122 with predetermined gain and carries out driving vibration-sensing signal after the voltage transitions.The driving vibration-sensing signal that is amplified by amplifying circuit 123 is input to permanent width of cloth control section 125 and phase shifter 124.
Described phase shifter 124 is used for adjusting the phase place of driving voltage.As mentioned above, described driving voltage is to be formed according to the driving vibration-sensing signal that feeds back to by circuit for generating temperature compensated driving voltage 121, thus the actual phase place that will be output to the driving voltage of the movable electrode 31 that is used to drive and 41 of the phase deviation of described driving vibration-sensing signal.In order to recover the skew of phase place, must be adjusted into the phase place that drives the vibration-sensing signal consistent with the phase place of driving voltage.For this purpose, proofread and correct the phase place that drives the vibration-sensing signal, consequently, be adjusted based on the phase place that drives the driving voltage that the vibration-sensing signal forms by phase shifter 124.Thus, the frequency of driving voltage is set to fd.
Described permanent width of cloth control section 125 movable electrode 31 that sensing is used to drive from drive the vibration-sensing signal and 41 current amplitude, and be used to proofread and correct described amplitude so that become constant signal to circuit for generating temperature compensated driving voltage 121 outputs.
In addition, angular velocity sensing circuit 130 is used for obtaining sensor output according to the detection signal of gyrosensor 1.Described angular velocity sensing circuit 130 comprise two C-V change-over circuits 131 and 132, two amplifying circuits 133 and 134, differential amplifier circuit 135, sync detection circuit 136, LPF 137 and the zero point/sensitive temperature performance regulator circuit 138.
Two C-V change-over circuits 131 and 132 receive the vibration corresponding sense signals (after this being called " angular velocity sensing signal ") that the time spent generates of doing with the movable electrode 38 that is subjected to being used for angular velocity detection when angular velocity and 48 from this to ticker 3 and 4 respectively, and make angular velocity sensing signal experience voltage transitions.
Amplifying circuit 133 and 134 amplifies by each C-V change-over circuit 131 and 132 with predetermined gain and carries out angular velocity sensing signal after the voltage transitions.Be input to differential amplifier circuit 135 by each amplifying circuit 133 and the 134 angular velocity sensing signals that amplify.
Described differential amplifier circuit 135 is corresponding to the differential multiplying arrangement that is used to generate by the differential output of each amplifying circuit 133 and the 134 angular velocity sensing signals that amplify.The differential output of differential amplifier circuit 135 is input to sync detection circuit 136.The differential output of differential amplifier circuit 135 becomes the AC signal that comprises predetermined migration voltage, and described predetermined migration voltage is DC component.
Based on the phase place of adjusting by phase shifter 124, described sync detection circuit 136 makes in the differential output of differential amplifier circuit 135 with the synchronous component of frequency f d and passes through, thereby to LPF137 output synchronized component.
By in the signal of sync detection circuit 136,137 of described LPF extract the component and the following component of described preset frequency of preset frequency.Owing to make LPF 137 transmit described signal, therefore generation postpones with the filter constants time corresponding of LPF 137.
Even owing in by the signal of LPF 137, also comprise output offset and sensitive temperature characteristic, so the zero point/sensitive temperature performance regulator circuit 138 described output offset of adjustment and temperature characterisitics.By the zero point/sensitive temperature performance regulator circuit 138 adjusted signals are used as sensor output basically.
In addition, in sensor circuit 110, comprise data processing circuit 140.Described data processing circuit 140 comprises EPROM control circuit 141 and EPROM 142.
Described EPROM control circuit 141 and adjustment terminal (trim terminal) (pad) and outside linking to each other, described adjustment terminal is used to connect the chip that wherein forms sensor circuit 110.This EPROM control circuit 141 receives the signal be used for write data from the outside, and from EPROM 142 sense data.In addition, it is carried out will be from the adjustment of the driving voltage of circuit for generating temperature compensated driving voltage 121 output according to the data of being read, to adjustment of the gain of amplifying circuit 123,133 and 134 or the like.This EPROM control circuit 141 is corresponding to the storage area control circuit.Incidentally, described adjustment terminal is covered by the encapsulation (not shown), is used for bonding and encapsulates described sensor circuit 110, and by wiring is bonding they are connected with the outside terminal of described encapsulation.Therefore, can realize sensor circuit 110 and outside being electrically connected by outside terminal.
Described EPROM 142 is corresponding to storage area, and it is stored therein and is used to adjust the data of will be from the data of the driving voltage of circuit for generating temperature compensated driving voltage 121 outputs and being used to adjust the gain of amplifying circuit 123,133 and 134.Herein, as will be from the address of the information of the driving voltage of circuit for generating temperature compensated driving voltage 121 outputs, and described address be stored among the EPROM 142 about the voltage that can reduce acceleration action in described " be used to adjust will from the data of the driving voltage of circuit for generating temperature compensated driving voltage 121 outputs " expression indication.In addition, described EPROM control circuit 141 will reduce the influence of acceleration from the driving voltage of circuit for generating temperature compensated driving voltage 121 outputs whereby according to address stored adjustment among the EPROM 142.
Next, will describe the step of adjusting driving voltage, this step is to carry out as a wherein step of the manufacture process of the gyrosensor 1 of this embodiment.Incidentally, amplifying circuit 123,133 that comprises in driving circuit 120 and the angular velocity sensing circuit 130 and 134 gain-adjusted are to carry out in advance as the preliminary work of adjusting driving voltage, and carry out the adjustment to driving voltage thereafter.
At first, need to create wherein can sense angular speed conventional occasion.For this purpose, generate driving voltage by circuit for generating temperature compensated driving voltage 121.During this time, according to prior art in identical mode, amplitude is equated and the reciprocal signal of phase place is used for side-to- side vibrations 3 and 4, as driving voltage.
Specifically, desired driving voltage is applied to the driving pad 30c that is electrically connected with the fixed electorde 30 that is used to drive, and whereby, drives the gyrosensor 1 of this embodiment.More particularly, as shown in Figure 2, in the middle of four fixed electordes 30 that first power supply 5 is used to drive the ticker 3 left and be positioned at two fixed electordes 30 of a drawing left side on half side apply first voltage (A ± B) [V], and in the middle of four fixed electordes 40 that are used to drive in the ticker 4 to the right and be positioned at right two fixed electordes 40 on half side of drawing and apply first voltage (A ± B) [V].In addition, in the middle of four fixed electordes 30 that second source 6 is used to drive the ticker 3 left and be positioned at right two fixed electordes 30 on half side of drawing apply second voltage (C ± D) [V], and in the middle of four fixed electordes 40 that are used to drive in the ticker 4 to the right and be positioned at two fixed electordes 40 of a drawing left side on half side and apply second voltage (C ± D) [V].
Herein, the magnitude of voltage that described " first voltage (A ± B) [V] " and " second voltage (C ± D) [V] " expression obtains in the following manner, that is, in as the constant voltage A of DC component and C, add to or subtract as the voltage B and the D of the AC compounent of cyclomorphosis.Yet as the symbol of the voltage B of AC compounent ± with as the symbol of the voltage D of AC compounent ± be reciprocal relationship, and first and second voltages become its period migration 180 degree and reciprocal voltages of its phase place.
Under this state, give acceleration along the direction of action (perpendicular to the direction that drives vibrating shaft) of the Coriolis force of side-to-side vibrations son 3 and 4.The technology that is used to give acceleration comprises the method for using driver or the like, uses method of acceleration of gravity or the like.Thus, when employing utilizes the method for acceleration of gravity, preferably, needn't be provided for giving any equipment of acceleration, but can give constant acceleration all the time.
Subsequently, when from gyrosensor 1 output angle speed sensitive signal so that send sensor when output from angular velocity sensing circuit 130, described sensor output is monitored.In addition, when sensor output is just monitored, change will be applied to the driving voltage of left ticker 3 and will be applied to the driving voltage of right ticker 4.In addition, the driving voltage that minimizes sensor output is detected.For instance, can be changed as constant voltage A, the C of DC component with as one of them or both of voltage B, the D of AC compounent in the driving voltage (first and second voltage), but in this embodiment, will the situation that change constant voltage A, C be described.
To describe how to change driving voltage herein.Be changed under the situation about adjusting at driving voltage (first and second voltage), pre-determine the scope of changeable voltage.For instance, under the situation as constant voltage A, the C of DC component in changing driving voltage, adjustable voltage range is 1 to 9V.Have at the driving voltage of gyrosensor 1 under the situation of central value of 5V, for this adjustment, constant voltage A for example can be set to from 5V to 9V (that is, 5+4V) or from 5V to 1V (that is, 5-4V).
Therefore, with regard in first voltage and second voltage at least one, constant voltage A or constant voltage C are become 9V or are become 1V from 5V from 5V.During this time, can adjust driving voltage by only changing constant voltage A or only changing constant voltage C.More preferably, be similar to constant voltage A, constant voltage C can oppositely change with constant voltage A.That is to say, when constant voltage A increases with respect to central value, can change constant voltage C so that it is reduced with respect to central value.For instance, when constant voltage A when 5V becomes 9V, constant voltage C becomes 1V from 5V.In this manner, can obtain double adjustment effect, thus, compare, can strengthen the adjustment effect with only changing constant voltage A.
Therefore, the whole adjustment address of EPROM 142 is by uniformly-spaced dividing, and the address of single division is associated with the change amplitude of constant voltage A and the concentricity value of C.In addition, constant voltage A and C can begin to change from central value by the order of address, and measure the sensor output at the place, address of each division.For example, have in the adjustment address of EPROM 142 under the situation of 10 (from 255 addresses, the 0th address to the), whole address approximately is divided into 8 points, and in the survey sensor output of the place, address of 8 points.Therefore, acquisition adjustment address-sensor output characteristic as shown in Figure 5.In Fig. 5, the purpose value of target output expression sensor zero point output, that is, and the desired value of output at zero point.Final adjustment address is represented in the final address; Therefore, described final address is a determined value.Incidentally, owing to known by experiment or the like that adjusting address-sensor output characteristic is linear relationship basically, sensor output changes according to adjusting sequence of addresses.
Address when subsequently, zero point, output became the purpose value according to described chart calculating.More particularly, as shown in Figure 5, even and the purpose value of sensor zero point output during sensor output vanishing and expression adjust address-sensor output characteristic straight line between immediate address, point of crossing become become address when approaching most zero of when acceleration occurring sensor output.Therefore, this address is written into and stores among the EPROM 142.
Thus, when reading described address in the address stored by EPROM control circuit 141 from EPROM 142, the change amplitude of constant voltage A and the concentricity value of C can make the sensor output that produces be subjected to acceleration action when gyrosensor 1 applies acceleration minimize.
Incidentally, when described amplitude of variation was by equilibrium under the situation of adjusting constant voltage A and C like that shows in place like this, an address was enough to amplitude of variation is stored among the EPROM 142, therefore, can make the memory capacity of EPROM 142 less.
Next, will the driving method of the gyrosensor 1 of this embodiment be described.
The gyrosensor 1 of this embodiment is to drive by applying desired driving voltage to driving pad 30c, and the described fixed electorde that is used to drive 30 is electrically connected with driving pad 30c.Specifically, as shown in Figure 2, in the middle of four fixed electordes 30 that first power supply 5 is used to drive the ticker 3 left and be positioned at two fixed electordes 30 of a drawing left side on half side apply first voltage (A ± B) [V], and in the middle of four fixed electordes 40 that are used to drive in the ticker 4 to the right and be positioned at right two fixed electordes 40 on half side of drawing and apply first voltage (A ± B) [V].In addition, in the middle of four fixed electordes 30 that second source 6 is used to drive the ticker 3 left and be positioned at right two fixed electordes 30 on half side of drawing apply second voltage (C ± D) [V], and in the middle of four fixed electordes 40 that are used to drive in the ticker 4 to the right and be positioned at two fixed electordes 40 of a drawing left side on half side and apply second voltage (C ± D) [V].
During this time, because EPROM control circuit 141 reads address stored among the EPROM 142 so that send this address to circuit for generating temperature compensated driving voltage 121, so be set to wherein to consider to alleviate as previously mentioned the value of the amplitude of variation that begins from central value of the influence of acceleration as the constant voltage A of the DC component in first and second voltages and D.
When this driving voltage is applied to driving pad 30c, 40c, cyclic fluctuation along with the AC compounent of driving voltage, generation is based on the electrostatic attraction of electric capacity, and described electric capacity is to form between fixed electorde 30,40 that is used to drive and movable electrode 31,41.Thus, described driving beam 37,47 is bent, and the movable electrode 31,41 that is used to drive or the like together with hammer portion 34,44 along drawing direction or vibrate left to right.In addition, along with the driving voltage AC compounent changes periodically, movable electrode 31,41 that is used to drive or the like vibrates along the horizontal direction of drawing periodically together with hammer portion 34,44.Because the AC compounent of driving voltage has phases opposite, so side-to-side vibrations vibrates along opposite directions.
During this time, be used for fixed electorde 32,42 broach part 32b, the 42b of vibration detection and overlap margin and the periodic vibration between broach part 33b, the 43b in the movable electrode 33,43 and consistently change, thereby divide the electric capacity that forms to change by these comb teeth parts.Described capacitance variations can be measured according to those pads 32c that is used for vibration detection that is connected with fixed electorde 32,42, the electromotive force of 42c, whereby can monitoring periods the amplitude of vibration.Therefore, according to the described driving voltage of amplitude FEEDBACK CONTROL of periodic vibration, thereby make the amplitude of periodic vibration can become expected value.
When input acceleration under this state, generate Coriolis force, and hammer portion 34,44 and the moving part 38,48 or the like that is used for angular velocity detection are because of the bending that detects beam 35,45 vertical vibration along drawing.
Thus, the interval that is used between broach part 37b, the 47b that broach part 38b, 48b that the movable electrode 38,48 of angular velocity detection comprises and the fixed electorde 37,47 that is used for angular velocity detection comprise changes, and divides the electric capacity that forms to change by these comb teeth parts.Change with changes in capacitance owing to be used for the electromotive force of the fixed electorde 37,47 of angular velocity detection, so can detect angular velocity by measuring electromotive force.
Next, with the advantage of describing based on the gyrosensor 1 of this embodiment.
In this embodiment, as described before, adopt A ± B[V] as first voltage, and adopt C ± D[V] as second voltage, and, adopt when applying acceleration, to make sensor export minimized value with regard to regard to the constant voltage A and C of the DC component of first and second voltages.
Therefore, even when when detecting angular velocity, having applied acceleration, also can alleviate the influence that produces because of acceleration to greatest extent.These will be illustrated according to Fig. 6 A and 6B.
Fig. 6 A and 6B show the illustraton of model of the oscillation trajectory of side-to-side vibrations 3 and 4.Herein, Fig. 6 A shows as the oscillation trajectory under the constant voltage A of the DC component of first and second voltages and the situation that C is set to central value (for example 5V), and Fig. 6 B shows at first and second voltages by the oscillation trajectory under the situation about so being provided with described in the embodiment.In addition, the track of left ticker 3 before the left side of Fig. 6 A shows and adjusts, and the right side of Fig. 6 A shows the adjustment track of right ticker 4 before.The track of left ticker 3 after the left side of Fig. 6 B shows and adjusts, and the right side of Fig. 6 B shows the adjustment track of right ticker 4 afterwards.Track when the point-like ellipse representation among Fig. 6 A and the 6B does not apply acceleration, and the track of solid line ellipse representation when having applied acceleration.In Fig. 6 B, the pecked line ellipse representation is at the track of not carrying out under the situation about adjusting, when having applied acceleration.VIA represents the differential output between side-to-side vibrations 3,4 before adjusting when not applying acceleration, and VIB represents the differential output between side-to-side vibrations 3,4 before adjusting when having applied acceleration.In this case, when having applied acceleration, the track of side-to-side vibrations 3,4 is changed respectively.In addition, differential output changed to VIB from VIA before adjusting.VIC represents the differential output between side-to-side vibrations 3,4 after adjusting when not applying acceleration, and VID represents the differential output between side-to-side vibrations 3,4 after adjusting when having applied acceleration.In this case, when having applied acceleration, the track of side-to-side vibrations 3,4 is changed respectively.In addition, after adjusting, the differential output VID when making the differential output VIC when not applying acceleration and applying acceleration balances each other, that is, the displacement VIE of left ticker 3 and the displacement VIF of right ticker 4 are balanced each other.
Specifically, when being changed when having applied the state of acceleration to the state that does not apply acceleration along the detection side of ticker, it is consistent that side-to- side vibrations 3 and 4 displacement amplitude begin, shown in Fig. 6 B.
Its reason is when having applied acceleration, at any special time, by along the detection side to, be that the vertical direction of drawing is adjusted exciting force, can make the displacement amplitude of moving part (such as hammer portion 34,44 and each movable electrode) consistent along the drawing vertical direction.
That is to say that as described above, be illustrated in each exciting force along the drawing vertical direction that generates in each ticker 3 and 4 by following formula, described formula is:
In addition, the overlapping and gap of the fixed electorde that be used for drive 30 corresponding with drive electrode and movable electrode 31 is that product finishing difference because of side-to- side vibrations 3 and 4 produces.Therefore, the electric potential difference (being the electric potential difference between fixed electorde 30 and the movable electrode 31) that becomes the 3rd parameter that is used for determining exciting force is adjusted, and exciting force is balanced whereby, thereby side-to-side vibrations 3 begins consistent with 4 displacement amplitude.
Therefore, when having applied acceleration, side-to- side vibrations son 3 and 4 displacement amplitude with apply acceleration before those are consistent, and the fluctuation of the differential output of the capacitance variations of side-to- side vibrations sub 3 and 4 becomes and does not exist.Therefore, do like this and can eliminate external acceleration output satisfactorily, and the output that produces because of acceleration is suppressed to as much as possible little.
As mentioned above, according to the gyrosensor 1 of this embodiment, external acceleration output can be eliminated satisfactorily, and is restrained for as much as possible little by the output that acceleration causes.Thus, allow to strengthen the degree of accuracy of sensor.
Previous embodiment has been described to such situation, that is, only will change as driving voltage as the constant voltage A and the C of the DC component in first and second voltages, still can also change voltage B and D as AC compounent.That is to say, can carry out adjustment as the voltage B of AC compounent and at least one among the D by changing.During this time, except that voltage B (perhaps D), voltage D (perhaps B) preferably should oppositely be changed with voltage B (perhaps D).In this manner, can obtain double adjustment effect, thereby obtain better to adjust effect, and setting range can be wideer than only changing voltage B (perhaps voltage D).In addition, though shown that driving voltage is sinusoidal wave situation among the embodiment formerly, driving voltage also can be a square wave.Under the sort of situation, can also adopt the technology of the dutycycle that changes square wave.
Certainly, all or two of technology that can make up the technology that is used for changing constant voltage A and C, change the technology of voltage B and D and change the dutycycle of square wave.Under the situation of described combination, adjusting range diminishes in the following order gradually: (1) changes the technology of constant voltage A and C, and (2) change the technology of voltage B and D, and (3) change the technology of the dutycycle of square wave, thus, can carry out coarse adjustment and fine tuning according to order.For example, under the situation of combination technique (1) and (2), at first carry out coarse adjustment, subsequently by carrying out fine tuning based on the adjustment of technology (2) by adjustment based on technology (1).Therefore, adjustment is fast, and is not vulnerable to the influence because of the acceleration generation.
Formerly the structure of the gyrosensor 1 of embodiment illustrated only is an example, and the present invention can be applied to other known structure usually.In addition, in Fig. 1, the number of teeth that comprises in each fixed electorde and each movable electrode is that schematically nothing it should be noted that exemplary numeral is nonrestrictive.
Above-mentioned openly have a following aspect.
According to first aspect of the present disclosure, a kind of angular-rate sensor comprises: supporting substrate; And be arranged on first and second tickers on the described supporting substrate.Each ticker comprises moving part and fixed part.The moving part of each ticker has and drives with movable electrode and detection movable electrode.Described moving part is supported on the described supporting substrate movably, is movably so that make described moving part along the surperficial parallel horizontal direction with supporting substrate.The fixed part of each ticker has and drives with fixed electorde and detection fixed electorde.Described fixed part is fixed on the supporting substrate.Described driving is faced described driving movable electrode with fixed electorde, and described detection is faced described detection movable electrode with fixed electorde.First ticker has predetermined structure, and it is symmetrical in the structure of second ticker.The moving part of each ticker has a part can vibrating along the direction of vibration with horizontal direction parallel by applying driving voltage in driving with fixed electorde with between driving with movable electrode.The described part of the moving part of each ticker can be by Coriolis force along perpendicular to the vibration of the orientation of oscillation of direction of vibration, and described Coriolis force is that the angular velocity by the described part that is applied to described moving part generates.Detecting with fixed electorde and detection is that vibration according to the described part of moving part changes with the electric capacity between the movable electrode.Described angular velocity is according to detecting with fixed electorde and detecting and detect with the capacitance variations between the movable electrode.Driving in first ticker comprises that with fixed electorde first side drive is with the fixed electorde and the second side drive fixed electorde.Driving in second ticker comprises that with fixed electorde first side drive is with the fixed electorde and the second side drive fixed electorde.First side drive that is applied in first ticker is defined as first driving voltage with the driving voltage of fixed electorde, and second side drive that is applied in second ticker is described first driving voltage with the driving voltage of fixed electorde.Described first driving voltage comprises DC voltage that is defined as the A volt and the alternating voltage that is defined as the B volt, thereby described first driving voltage is described to the A+B volt.Second side drive that is applied in first ticker is defined as second driving voltage with the driving voltage of fixed electorde, and first side drive that is applied in second ticker is described second driving voltage with the driving voltage of fixed electorde.Second driving voltage comprises DC voltage that is defined as the C volt and the alternating voltage that is defined as the D volt, thereby second driving voltage is described to the C+D volt.The alternating voltage of first driving voltage has predetermined phase, and its phase place with the alternating voltage of second driving voltage is opposite.In the DC voltage in first and second driving voltages at least one controlled according to following manner, that is: first ticker makes moving part vibrate with predetermined phase, described predetermined phase is opposite with the phase place of moving part in second ticker, in the alternating voltage in first and second driving voltages at least one controlled according to following manner, that is: first ticker makes moving part vibrate with predetermined phase, described predetermined phase is opposite with the phase place of moving part in second ticker, at least one that perhaps is set in the dutycycle of first and second driving voltages of square wave is to control with reference to the central value of the dutycycle of square wave according to following manner, that is: first ticker makes moving part vibrate with predetermined phase, and described predetermined phase place is opposite with the phase place of moving part in second ticker.
In the sensor, fully eliminated by the output that external acceleration causes, thereby the output that produces because of described acceleration is minimized.
Perhaps, in the DC voltage in first and second driving voltages described one of them can control with following manner, that is: the DC voltage with first driving voltage changes scheduled volume since the central value between the DC voltage of first and second driving voltages, and the DC voltage of second driving voltage is begun to change described scheduled volume from described central value, thereby the DC voltage of first and second driving voltages is changed respectively on the contrary with reference to described central value.In addition, described sensor can also comprise storer, is used for storage and scheduled volume corresponding address; And memorizer control circuit, be used for reading described address, and the driving in first and second tickers applying first and second driving voltages with fixed electorde respectively from storer, described first and second driving voltages are changed described scheduled volume.
Perhaps, in the alternating voltage in first and second driving voltages described one of them can control with following manner, that is: the alternating voltage with first driving voltage changes scheduled volume since the central value between the alternating voltage of first and second driving voltages, and the alternating voltage of second driving voltage is begun to change described scheduled volume from described central value, thereby the alternating voltage of first and second driving voltages is changed respectively on the contrary with reference to described central value.In addition, described sensor can also comprise the storer that is used to store with described scheduled volume corresponding address; And memorizer control circuit, be used for reading described address, and the driving in first and second tickers applying first and second driving voltages with fixed electorde respectively from storer, described first and second driving voltages are changed described scheduled volume.
Perhaps, in the dutycycle in first and second driving voltages described one of them can control with following manner, that is: the dutycycle with first driving voltage changes scheduled volume since the central value between the dutycycle of first and second driving voltages, and the dutycycle of second driving voltage is begun to change described scheduled volume from described central value, thereby the dutycycle of first and second driving voltages is changed respectively on the contrary with reference to described central value.In addition, described sensor can also comprise the storer that is used to store with described scheduled volume corresponding address; And memorizer control circuit, be used for reading described address, and the driving in first and second tickers applying first and second driving voltages with fixed electorde respectively from storer, described first and second driving voltages have been changed described scheduled volume.
Perhaps, the symmetry between first and second tickers can be the L-R symmetry.First ticker is set on the left side of supporting substrate, and second ticker is set on the right side of supporting substrate.First side drive in first ticker is set on the left side of first ticker with fixed electorde, and second side drive in first ticker is set on the right side of first ticker with fixed electorde.First side drive in second ticker is set on the left side of second ticker with fixed electorde, and second side drive in second ticker is set on the right side of second ticker with fixed electorde.
According to second aspect of the present disclosure, a kind of method that is used for the operation angle speed pickup is provided, described angular-rate sensor comprises the supporting substrate and first and second tickers.Each ticker comprises moving part and fixed part.The moving part of each ticker has and drives with movable electrode and detection movable electrode.Described moving part is supported on the described supporting substrate movably, is movably so that make described moving part along the surperficial parallel horizontal direction with supporting substrate.The fixed part of each ticker has and drives with fixed electorde and detection fixed electorde.Described fixed part is fixed on the supporting substrate.Described driving is faced described driving movable electrode with fixed electorde, and described detection is faced described detection movable electrode with fixed electorde.First ticker has predetermined structure, and it is symmetrical in the structure of second ticker.The moving part of each ticker has can be by applying driving voltage in driving with fixed electorde with between driving with movable electrode along a part of the direction of vibration vibration that is parallel to horizontal direction.The described part of the moving part of each ticker can be by Coriolis force along perpendicular to the vibration of the orientation of oscillation of direction of vibration, and described Coriolis force is that the angular velocity by the described part that is applied to described moving part generates.Detecting with fixed electorde and detection is according to the change in oscillation of the described part of described moving part with the electric capacity between the movable electrode.Described angular velocity is according to detecting with fixed electorde and detecting with the capacitance variations between the movable electrode and detect.Driving in first ticker comprises that with fixed electorde first side drive is with the fixed electorde and the second side drive fixed electorde.Driving in second ticker comprises that with fixed electorde first side drive is with the fixed electorde and the second side drive fixed electorde.First side drive that is applied in first ticker is defined as first driving voltage with the driving voltage of fixed electorde, and second side drive that is applied in second ticker is described first driving voltage with the driving voltage of fixed electorde.Described first driving voltage comprises DC voltage that is defined as the A volt and the alternating voltage that is defined as the B volt, thereby described first driving voltage is described to the A+B volt.Second side drive that is applied in first ticker is defined as second driving voltage with the driving voltage of fixed electorde, and first side drive that is applied in second ticker is second driving voltage with the driving voltage of fixed electorde.Described second driving voltage comprises DC voltage that is defined as the C volt and the alternating voltage that is defined as the D volt, thereby second driving voltage is described to the C+D volt, and the alternating voltage of first driving voltage has predetermined phase, and its phase place with the alternating voltage of second driving voltage is opposite.Described method comprises: apply first and second driving voltages by the driving in first and second tickers respectively with fixed electorde and vibrate first and second tickers; Applying monitoring sensor output under the situation of predetermined acceleration; Control in the DC voltage in first and second driving voltages at least one according to following manner, that is: with reference to the predetermined central value of described DC voltage, with described one of them the change scheduled volume in the described DC voltage, control in the alternating voltage in first and second driving voltages at least one according to following manner, that is: with reference to the predetermined central value of alternating voltage, with in the described alternating voltage described one of them change described scheduled volume, perhaps be set in the dutycycle of first and second driving voltages of square wave at least one according to following manner control, that is: with reference to the central value of the dutycycle of square wave, with in the described dutycycle described one of them change described scheduled volume; And when sensor output is minimized, the storage information relevant in storer with described scheduled volume.
In said method, fully eliminated by the output that external acceleration causes, thereby the output that produces because of described acceleration is minimized.
Perhaps, described control can comprise: change at least one of DC voltage in first and second driving voltages with reference to the central value between the DC voltage of first and second driving voltages; And described after at least one in changing described DC voltage changes in the alternating voltage in first and second driving voltages at least one with reference to the central value between the alternating voltage of first and second driving voltages.In addition, described storage can comprise: the scheduled volume corresponding address of the storage and first and second driving voltages in storer.
Perhaps, described control can comprise: change in the DC voltage in first and second driving voltages at least one with reference to the central value between the DC voltage of first and second driving voltages; And described after at least one in changing described DC voltage changes at least one of dutycycle in first and second driving voltages with reference to the central value between the dutycycle of first and second driving voltages.In addition, described storage can comprise: the scheduled volume corresponding address of the storage and first and second driving voltages in storer.
Perhaps, described control can comprise: change in the alternating voltage in first and second driving voltages at least one with reference to the central value between the alternating voltage of first and second driving voltages; And described after at least one in changing described alternating voltage changes at least one of dutycycle in first and second driving voltages with reference to the central value between the dutycycle of first and second driving voltages.In addition, described storage can comprise: the scheduled volume corresponding address of the storage and first and second driving voltages in storer.
Though it is described, it should be understood that the present invention is not limited to preferred embodiment and structure with reference to the preferred embodiments of the present invention.The invention is intended to cover the configuration of various modifications and equivalence.In addition, except preferred various combinations and configuration, comprise more, still less or have only unary other combination and configuration to be also included within the spirit and scope of the present invention.
Claims (19)
1, a kind of angular-rate sensor comprises:
Supporting substrate (2); And
Be arranged on first ticker (3) and second ticker (4) on the described supporting substrate (2), wherein
Each ticker (3,4) comprises moving part (31,34,35,36,38,41,44,45,46,48) and fixed part (30,37,40,47),
The described moving part of each ticker (3,4) (31,34,35,36,38,41,44,45,46,48) has to drive uses movable electrode (31,41) and detection movable electrode (38,48),
Described moving part (31,34,35,36,38,41,44,45,46,48) be supported on movably on the described supporting substrate (2), thereby made described moving part (31,34,35,36,38,41,44,45,46,48) be movably along surperficial parallel horizontal direction with described supporting substrate (2)
The described fixed part of each ticker (3,4) (30,37,40,47) has to drive uses fixed electorde (30,40) and detection fixed electorde (37,47),
Described fixed part (30,37,40,47) is fixed on the described supporting substrate (2),
Described driving with fixed electorde (30,40) in the face of described driving with movable electrode (31,41), and described detection with fixed electorde (37,47) in the face of described detection with movable electrode (38,48),
Described first ticker (3) has predetermined structure, and it is symmetrical in the structure of described second ticker (4),
The moving part (31,34 of each ticker (3,4), 35,36,38,41,44,45,46,48) having can be by using fixed electorde (30,40) and described driving movable electrode (31 in described driving, 41) apply driving voltage between and along with the part (31,34,41 of the direction of vibration of described horizontal direction parallel vibration, 44)
The described moving part (31,34,35,36 of each ticker (3,4), 38,41,44,45,46,48) described part (31,34,41,44) can be by Coriolis force along the orientation of oscillation vibration perpendicular to described direction of vibration, and described Coriolis force is by being applied to described moving part (31,34,35,36,38,41,44,45,46,48) described part (31,34,41,44) angular velocity generates
Described detection is to change according to the vibration of the described part (31,34,41,44) of described moving part (31,34,35,36,38,41,44,45,46,48) with the electric capacity between fixed electorde (37,47) and the described detection usefulness movable electrode (38,48),
Described angular velocity is based on described detection and detects with capacitance variations between fixed electorde (37,47) and the described detection usefulness movable electrode (38,48),
Described driving in described first ticker (3) comprises first side drive fixed electorde (30) and second side drive fixed electorde (30) with fixed electorde (30,40),
Described driving in described second ticker (4) comprises first side drive fixed electorde (40) and second side drive fixed electorde (40) with fixed electorde (30,40),
Described first side drive that is applied in described first ticker (3) is defined as first driving voltage with the driving voltage of fixed electorde (30), and described second side drive that is applied in described second ticker (4) is described first driving voltage with the driving voltage of fixed electorde (40)
Described first driving voltage comprises DC voltage that is defined as the A volt and the alternating voltage that is defined as the B volt, thereby described first driving voltage is described to the A+B volt,
Described second side drive that is applied in described first ticker (3) is defined as second driving voltage with the driving voltage of fixed electorde (30), and described first side drive that is applied in described second ticker (4) is described second driving voltage with the driving voltage of fixed electorde (40)
Described second driving voltage comprises DC voltage that is defined as the C volt and the alternating voltage that is defined as the D volt, thereby described second driving voltage is described to the C+D volt,
The alternating voltage of described first driving voltage has predetermined phase, and its phase place with the alternating voltage of described second driving voltage is opposite, and
In the described DC voltage in described first and second driving voltages at least one is according to following manner control, that is: described first ticker (3) makes described moving part (31,34,35,36,38,41,44,45,46,48) with predetermined phase vibration, the described moving part (31 in described predetermined phase and described second ticker (4), 34,35,36,38,41,44,45,46,48) phase place is opposite, in the described alternating voltage in described first and second driving voltages at least one is according to following manner control, that is: described first ticker (3) makes described moving part (31,34,35,36,38,41,44,45,46,48) with predetermined phase vibration, the described moving part (31 in described predetermined phase and described second ticker (4), 34,35,36,38,41,44,45,46,48) phase place is opposite, at least one that perhaps is set in the dutycycle of described first and second driving voltages of square wave is to control according to following manner with reference to the central value of square wave dutycycle, that is: described first ticker (3) makes described moving part (31,34,35,36,38,41,44,45,46,48) vibrate with predetermined phase, moving part (31 described in described predetermined phase and described second ticker (4), 34,35,36,38,41,44,45,46,48) phase place is opposite.
2, sensor as claimed in claim 1, wherein
In the described DC voltage in described first and second driving voltages described one of them control according to following manner, that is: the DC voltage with described first driving voltage begins to change scheduled volume from the central value between the DC voltage of described first and second driving voltages, and
The DC voltage of described second driving voltage is begun to change described scheduled volume from described central value, thereby the DC voltage of described first and second driving voltages is changed respectively on the contrary with reference to described central value.
3, sensor as claimed in claim 1, wherein
In the alternating voltage in described first and second driving voltages described one of them control according to following manner, that is: the alternating voltage with described first driving voltage begins to change scheduled volume from the central value between the alternating voltage of described first and second driving voltages, and
The alternating voltage of described second driving voltage is begun to change described scheduled volume from described central value, thereby the alternating voltage of described first and second driving voltages is changed respectively on the contrary with reference to described central value.
4, sensor as claimed in claim 1, wherein
In the dutycycle of described first and second driving voltages described one of them control according to following manner, that is: the dutycycle with described first driving voltage begins to change scheduled volume from the central value between the dutycycle of described first and second driving voltages, and
The dutycycle of described second driving voltage is begun to change described scheduled volume from described central value, thereby the dutycycle of described first and second driving voltages is changed respectively on the contrary with reference to described central value.
5, sensor as claimed in claim 2 also comprises:
Storer (142) is used for storage and described scheduled volume corresponding address; And
Memorizer control circuit (141), be used for reading described address from described storer (142), and the fixed electorde (30 of the driving in described first ticker (3) and second ticker (4), 40) apply described first and second driving voltages respectively, described first and second driving voltages are changed described scheduled volume.
6, sensor as claimed in claim 3 also comprises:
Storer (142) is used for storage and described scheduled volume corresponding address; And
Memorizer control circuit (141), be used for reading described address from described storer (142), and the fixed electorde (30 of the driving in described first ticker (3) and second ticker (4), 40) apply described first and second driving voltages respectively, described first and second driving voltages are changed described scheduled volume.
7, sensor as claimed in claim 4 also comprises:
Storer (142) is used for storage and described scheduled volume corresponding address; And
Memorizer control circuit (141), be used for reading described address from described storer (142), and the fixed electorde (30 of the driving in described first ticker (3) and second ticker (4), 40) apply described first and second driving voltages respectively, described first and second driving voltages are changed described scheduled volume.
8, as each described sensor among the claim 1-7, wherein
Symmetry between described first ticker (3) and second ticker (4) is the L-R symmetry,
Described first ticker (3) is set on the left side of described supporting substrate (2), and described second ticker (4) is set on the right side of described supporting substrate (2),
First side drive in described first ticker (3) is set on the left side of described first ticker (3) with fixed electorde (30), and second side drive in described first ticker (3) is set on the right side of described first ticker (3) with fixed electorde (30), and
First side drive in described second ticker (4) is set on the left side of described second ticker (4) with fixed electorde (40), and second side drive in described second ticker (4) is set on the right side of described second ticker (4) with fixed electorde (40).
9, a kind of method that is used for the operation angle speed pickup, described angular-rate sensor comprise supporting substrate (2), first ticker (3) and second ticker (4), wherein each ticker (3,4) comprise moving part (31,34,35,36,38,41,44,45,46,48) and fixed part (30,37,40,47), each ticker (3,4) described moving part (31,34,35,36,38,41,44,45,46,48) have driving movable electrode (31,41) and detection movable electrode (38,48), described moving part (31,34,35,36,38,41,44,45,46,48) be supported on movably on the described supporting substrate (2), thereby made described moving part (31,34,35,36,38,41,44,45,46,48) be movably along surperficial parallel horizontal direction with described supporting substrate (2), the described fixed part (30,37 of each ticker (3,4), 40,47) have driving fixed electorde (30,40) and detection fixed electorde (37,47), described fixed part (30,37,40,47) be fixed on the described supporting substrate (2), described driving fixed electorde (30,40) in the face of described driving movable electrode (31,41), and described detection fixed electorde (37,47) in the face of described detection movable electrode (38,48), described first ticker (3) has predetermined structure, and it is symmetrical in the structure of described second ticker (4), each ticker (3,4) described moving part (31,34,35,36,38,41,44,45,46,48) having can be by using fixed electorde (30,40) and described driving movable electrode (31 in described driving, 41) apply driving voltage between and along with the part (31 of the direction of vibration of described horizontal direction parallel vibration, 34,41,44), each ticker (3,4) described moving part (31,34,35,36,38,41,44,45,46,48) described part (31,34,41,44) can be by Coriolis force along orientation of oscillation vibration perpendicular to described direction of vibration, described Coriolis force is by being applied to described moving part (31,34,35,36,38,41,44,45,46,48) described part (31,34,41,44) angular velocity generates, described detection fixed electorde (37,47) and described detection with movable electrode (38,48) electric capacity between is can be according to described moving part (31,34,35,36,38,41,44,45,46,48) described part (31,34,41,44) vibration changes, and described angular velocity is based on described detection fixed electorde (37,47) and described detection movable electrode (38,48) capacitance variations between detects, driving in described first ticker (3) comprises first side drive fixed electorde (30) and second side drive fixed electorde (30), the fixed electorde (30 of the driving in described second ticker (4) with fixed electorde (30,40), 40) comprise first side drive fixed electorde (40) and second side drive fixed electorde (40), first side drive that is applied in described first ticker (3) is defined as first driving voltage with the driving voltage of fixed electorde (30), and second side drive that is applied in described second ticker (4) is described first driving voltage with the driving voltage of fixed electorde (40), and described first driving voltage comprises DC voltage that is defined as the A volt and the alternating voltage that is defined as the B volt, thereby described first driving voltage is described to the A+B volt, second side drive that is applied in described first ticker (3) is defined as second driving voltage with the driving voltage of fixed electorde (30), and first side drive that is applied in described second ticker (4) is described second driving voltage with the driving voltage of fixed electorde (40), and described second driving voltage comprises DC voltage that is defined as the C volt and the alternating voltage that is defined as the D volt, thereby described second driving voltage is described to the C+D volt, and the alternating voltage of described first driving voltage has predetermined phase, and its phase place with the alternating voltage of described second driving voltage is opposite, and described method comprises:
Apply described first and second driving voltages by the driving in described first ticker (3) and second ticker (4) respectively with fixed electorde (30,40) and vibrate described first ticker (3) and second ticker (4);
Applying monitoring sensor output under the situation of predetermined acceleration;
Control at least one in the DC voltage of described first and second driving voltages in the following manner, that is: the predetermined central value of the described DC voltage of reference is with described one of them the variation scheduled volume in the described DC voltage, control at least one in the alternating voltage of described first and second driving voltages in the following manner, that is: with reference to the predetermined central value of described alternating voltage with in the described alternating voltage described one of them change described scheduled volume, perhaps control in the following manner is set at least one in the dutycycle of described first and second driving voltages of square wave, that is: with reference to the central value of the dutycycle of described square wave with in the described dutycycle described one of them change described scheduled volume; And
When described sensor output is minimized, the storage information relevant in storer (142) with described scheduled volume.
10, method as claimed in claim 9, wherein
In the DC voltage in described first and second driving voltages described one of them control according to following manner, that is: the DC voltage with described first driving voltage begins to change described scheduled volume from the central value between the DC voltage of described first and second driving voltages, and
The DC voltage of described second driving voltage is begun to change described scheduled volume from described central value, thereby the DC voltage of described first and second driving voltages is changed respectively on the contrary with reference to described central value.
11, method as claimed in claim 9, wherein
In the alternating voltage in described first and second driving voltages described one of them control according to following manner, that is: the alternating voltage with described first driving voltage begins to change described scheduled volume from the central value between the alternating voltage of described first and second driving voltages, and
The alternating voltage of described second driving voltage is begun to change described scheduled volume from described central value, thereby the alternating voltage of described first and second driving voltages is changed respectively on the contrary with reference to described central value.
12, method as claimed in claim 9, wherein
In the dutycycle of described first and second driving voltages described one of them control according to following manner, that is: the dutycycle with described first driving voltage begins to change described scheduled volume from the central value between the dutycycle of described first and second driving voltages, and
The dutycycle of described second driving voltage is begun to change described scheduled volume from described central value, thereby the dutycycle of described first and second driving voltages is changed respectively on the contrary with reference to described central value.
13, method as claimed in claim 9, wherein
Described control comprises:
Change at least one in the DC voltage of described first and second driving voltages with reference to the central value between the DC voltage of described first and second driving voltages; And
After in changing described DC voltage at least one, change at least one in the alternating voltage of described first and second driving voltages with reference to the central value between the alternating voltage of described first and second driving voltages.
14, method as claimed in claim 9, wherein
Described control comprises:
Change at least one of DC voltage in described first and second driving voltages with reference to the central value between the DC voltage of described first and second driving voltages; And
Change described DC voltage at least one after, change at least one in the dutycycle of described first and second driving voltages with reference to the central value between the dutycycle of described first and second driving voltages.
15, method as claimed in claim 9, wherein
Described control comprises:
Change at least one of alternating voltage in described first and second driving voltages with reference to the central value between the alternating voltage of described first and second driving voltages; And
Change described alternating voltage at least one after, change at least one in the dutycycle of described first and second driving voltages with reference to the central value between the dutycycle of described first and second driving voltages.
16, method as claimed in claim 10, wherein
Described storage comprises:
The scheduled volume corresponding address of storage and described first and second driving voltages in described storer (142).
17, method as claimed in claim 11, wherein
Described storage comprises:
The scheduled volume corresponding address of storage and described first and second driving voltages in described storer (142).
18, method as claimed in claim 12, wherein
Described storage comprises:
The scheduled volume corresponding address of storage and described first and second driving voltages in described storer (142).
19, as each described method among the claim 9-18, wherein
Symmetry between described first ticker (3) and second ticker (4) is an a left side-right side symmetry,
Described first ticker (3) is set on the left side of described supporting substrate (2), and described second ticker (4) is set on the right side of described supporting substrate (2),
First side drive in described first ticker (3) is set on the left side of described first ticker (3) with fixed electorde (30), and second side drive in described first ticker (3) is set on the right side of described first ticker (3) with fixed electorde (30), and
First side drive in described second ticker (4) is set on the left side of described second ticker (4) with fixed electorde (40), and second side drive in described second ticker (4) is set on the right side of described second ticker (4) with fixed electorde (40).
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| DE102010029630A1 (en) * | 2010-06-02 | 2011-12-08 | Robert Bosch Gmbh | Rotation rate sensor for measuring rotation rate of rotational motion of rotatable body, has detection device and coriolis element that are connected by spring for coupling deflection in oscillation level to oscillation of detection device |
| KR101167446B1 (en) * | 2010-12-31 | 2012-07-20 | 한국기술교육대학교 산학협력단 | Multiaxial angular velocity driving sensor |
| JP5790297B2 (en) * | 2011-08-17 | 2015-10-07 | セイコーエプソン株式会社 | Physical quantity sensor and electronic equipment |
| EP2808295B1 (en) * | 2013-05-31 | 2015-12-30 | Tronics Microsystems S.A. | MEMS-Sensor |
| JP6398348B2 (en) * | 2014-06-12 | 2018-10-03 | セイコーエプソン株式会社 | Functional element, method for manufacturing functional element, electronic device, and moving body |
| JP2017020897A (en) * | 2015-07-10 | 2017-01-26 | セイコーエプソン株式会社 | Physical quantity sensor, electronic apparatus and mobile body |
| JP6562878B2 (en) * | 2016-06-30 | 2019-08-21 | 株式会社東芝 | Angular velocity acquisition device |
| WO2020082204A1 (en) * | 2018-10-22 | 2020-04-30 | 深圳市柔宇科技有限公司 | Flexible electronic apparatus and bending speed detection device therefor |
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