CN100495084C - Filter and color filter production method - Google Patents
Filter and color filter production method Download PDFInfo
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- CN100495084C CN100495084C CNB2007101465754A CN200710146575A CN100495084C CN 100495084 C CN100495084 C CN 100495084C CN B2007101465754 A CNB2007101465754 A CN B2007101465754A CN 200710146575 A CN200710146575 A CN 200710146575A CN 100495084 C CN100495084 C CN 100495084C
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Abstract
The invention is a filter making method, comprising the steps of: first, providing a substrate and forming black matrix on the substrate, where the black matrix has an orifice array; then, forming filter material in the orifices by ink jet printing or other means where the filter material contains solvent and dye mixed with the solvent; then, making heat treatment and reducing solvent evaporation speed when heat treatment is being made to cure the filter material. Thus, the cured filter material has flat surface. And the made filter has uniform chroma and flat surface.
Description
Technical field
The invention relates to a kind of manufacture method of optical filter, and particularly relevant for a kind of manufacturing method of color filters that can promote uniform film thickness degree (thickness uniformity).
Background technology
Configuration by colored filter can make LCD carry out full-colorization demonstration.Recently, a kind of method of utilizing ink jet printing (inkjet printing) to form colored filter is developed.This manufacture method at first forms black matrix on substrate, it has a plurality of openings.Then, carry out ink-jet printing process so that filter (redness, green or blueness etc.) is injected in the opening of black matrix.Continue it,, heat-treat so that filter is dry and curing with the baking or the mode of heating plate (hot plate) heating.
The technology of ink jet printing (Ink-jet printing) can directly be coated filter on the substrate, to make colored filter.Its benefit is, need not utilize mask (mask) or half tone (stencil) promptly can make colored filter.Ink-jet printing technology becomes simple and easy by the making flow process of colored filter, and can not use other acid-base solution relevant issues of deriving because of need.
Fig. 1 is the known diagrammatic cross-section of utilizing the colored filter of ink jet printing mode made.Please refer to Fig. 1, known colored filter 100 comprises substrate 110 and is disposed at black matrix 120 on the substrate 110.Wherein, black matrix 120 has a plurality of opening P, and is filled with filter 130 in the opening P.It should be noted that filter 130 is to utilize the mode of ink jet printing (Ink-jet printing) to insert opening P's.
When inserting filter 130; the dry as yet preceding liquid level regular meeting of ink surpasses the height of black matrix after the ink jet printing; cause filter 130 overflows easily and the problem of mutual union dyeing; regular meeting carries out hydrophobic treatments (hydrophobic treatment) on the therefore black matrix 120, prevents filter 130 mutual union dyeing to improve filter 130 deceiving the surface tension on the matrix 120.Yet as shown in Figure 1, under capillary effect, dried filter 130 can present the not good situation of thickness uniformity coefficient of central protrusion, peripheral recesses.When colored filter 100 has uneven surface, (step coverage) is relatively poor for the step coverage of formed other rete in subsequent manufacturing processes, thereby need add one deck flatness layer (over coat) again on black matrix 120 and filter 130, so that the rete of follow-up formation can have preferable step coverage.In addition, when colored filter 100 is applied in LCD, cause the phenomenon of show image colourity inhomogeneous (mura) easily owing to filter 130 membrane thickness unevenness.Therefore, enjoy a ring of attention in the manufacture process that filter 130 dry thickness evenness afterwards are colored filters 100 always.
Summary of the invention
The invention provides a kind of manufacture method of optical filter, to solve the not good problem of uniform film thickness degree of filter in the colored filter.
The present invention proposes a kind of manufacture method of optical filter.The method may further comprise the steps.At first, provide a substrate, and on substrate, form a black matrix, the opening that wherein black matrix has a plurality of arrayed.Then, form a filter in opening, filter comprise a solvent and with a dyestuff of solvent.Subsequently, carry out a thermal treatment, and slow down thermal treatment when carrying out, the rate of volatilization of solvent is so that filter solidifies.
In one embodiment of the invention, above-mentioned heat-treating for example is earlier filter to be carried out prebake conditions, so that filter is shaped, again filter carried out the back baking, so that filter solidifies.Wherein, prebake conditions for example is (to carry out under as 1～5atm) being higher than the environment of normal pressure.In addition, back baking can be under the environment of normal pressure, be higher than under the environment of normal pressure or be lower than under the environment of normal pressure and carry out.Simultaneously, the technological temperature of prebake conditions for example is between 80 ℃ to 120 ℃, and is preferably 90 ℃.The technological temperature of back baking for example is between 190 ℃ to 250 ℃, and is preferably 230 ℃.
In one embodiment of the invention, above-mentioned prebake conditions is to carry out in a cavity, and the gas that feeds in the cavity comprises the gaseous state constituent of solvent, or comprises a nonreactive gas, for not with the gas of this filter reaction.For instance, the gas that feeds in the cavity comprises air, nitrogen, inert gas and combination thereof.
In one embodiment of the invention, above-mentioned solvent comprise the propylene glycol monomethyl ether ethyl ester (propylene glycol monomethyl ether acetate, PGMEA).
In one embodiment of the invention, the method that forms filter comprises ink jet printing.
In one embodiment of the invention, after the black matrix of formation is on substrate, comprises more black matrix carried out a hydrophobic treatments that wherein hydrophobic treatments comprises plasma process.
In one embodiment of the invention, above-mentioned filter has a flat surfaces after solidifying.
A kind of manufacturing method of color filters may further comprise the steps.At first, provide a substrate.Then, form black matrix on substrate, wherein black matrix has first group of opening of a plurality of arrayed, second group of opening and the 3rd group of opening.Then, form first filter, second filter, the 3rd filter, and first filter, second filter, the 3rd filter comprise solvent and dyestuff respectively in first group of opening, second group of opening and the 3rd group of opening.Afterwards, heat-treat, and slow down thermal treatment when carrying out, the rate of volatilization of solvent is so that first, second and the 3rd filter solidify.
In one embodiment of the invention, above-mentioned first, second and the 3rd filter comprise blueness, green and red filter.
In one embodiment of the invention, above-mentioned thermal treatment is included under the environment that is higher than normal pressure to be carried out.
In one embodiment of the invention, above-mentioned first, second and the 3rd filter have flat surfaces after solidifying.
Because the present invention is carrying out pre-bake step so that in the process that filter is shaped, by the environment that is higher than normal pressure or alternate manner to slow down the rate of volatilization of solvent in the filter, therefore filter still has flowability in the process of solidifying, and makes the filter after the curing have smooth surface and uniform thickness.
Description of drawings
Fig. 1 is the known diagrammatic cross-section of utilizing the colored filter of ink jet printing mode made.
Fig. 2 A to Fig. 2 D illustrates the manufacture method of the color screen of one embodiment of the invention.
Drawing reference numeral:
100: colored filter
110,210: substrate
120,220: black matrix
130,230: filter
200: optical filter
240: nozzle
250: prebake conditions
P: opening
Embodiment
Fig. 2 A illustrates the manufacture method of the optical filter of one embodiment of the invention to Fig. 2 D.The manufacture method of the optical filter of present embodiment comprises the following steps.At first, please provide a substrate 210, and on substrate 210, form black matrix 220 earlier with reference to Fig. 2 A.Black matrix 220 has a plurality of opening P, and each opening P is arranged into an array, and black matrix 220 for example is resin black matrix or metal black matrix.
After forming black matrix 220, for example can carry out hydrophobic treatments, to avoid the situation of filter overflow in the middle of the subsequent technique in black matrix 220 surfaces.Generally speaking, the mode of hydrophobic treatments for example is to carry out a plasma process lyophobic dust is formed at the surface of black matrix 220.
Then, please refer to Fig. 2 B, in a plurality of opening P of black matrix 220, form filter 230.In the present embodiment, the mode that forms filter 230 comprises carries out an ink-jet printing process, so that filter 230 is inserted among the opening P by nozzle 240.Particularly, filter 230 comprises the solvent and the dyestuff of solvent therewith, and wherein solvent for example is propylene glycol monomethyl ether ethyl ester (PGMEA) or other similar solvent, and dyestuff for example is to have dyes in different colors such as redness, green or blueness.
Because hydrophobic treatments has been carried out on black matrix 220 surfaces, when filter 230 was inserted opening P, the interface tension force between filter 230 and black matrix 220 surfaces was bigger.Therefore, the filter 230 of different colours is difficult for overflowing and the situation of mutual union dyeing takes place, and simultaneously, makes filter 230 present central protrusion and the uneven surface (illustrating as Fig. 2 B) of peripheral recesses easily through the black matrix 220 after the hydrophobic treatments.
Then, heat-treat step, and when slowing down heat treatment step and carrying out, the rate of volatilization of solvent.Please refer to Fig. 2 C, heat treatment step for example is earlier filter 230 to be carried out prebake conditions 250, so that filter 230 is shaped.What deserves to be mentioned is that the step of prebake conditions 250 for example is (carry out under as 1～5atm) environment, and the technological temperature of prebake conditions 250 for example is between 80 ℃ to 120 ℃, and preferable technological temperature for example to be about 90 ℃ being higher than normal pressure.
In one embodiment of this invention, prebake conditions 250 can be carried out in a cavity, and in order to increase the pressure in this cavity, present embodiment can adopt the mode that feeds gas so that the pressure in the cavity is higher than normal pressure.The gas that feeds in the cavity can be the gaseous state constituent of solvent, or comprises a nonreactive gas, for not with the gas of these filter 230 reactions.In detail,, for example can feed gas, air, the nitrogen of propylene glycol monomethyl ether ethyl ester in the cavity with present embodiment, or inert gas etc.The present invention can feed not the gas with filter 230 reactions, to improve the gas stagnation pressure (total pressure) in the cavity, also can feed the gaseous state constituent of solvent, to improve the partial pressure (gas partial pressure) of cavity internal solvent, can reach the rate of volatilization that slows down solvent equally.
When carrying out prebake conditions 250 in the cavity that is connected with gas, the pressure of filter that gas is granted 230 can make the speed of solvent evaporates slow down, and the pressure of granting when gas is big more, and then the rate of volatilization of solvent is slow more.Specifically, before filter 230 was not shaped fully, the rate of volatilization of solvent is (comparing with the normal pressure situation) comparatively slowly, makes filter 230 can possess flowability.Therefore, after filter 230 is shaped, can obtain comparatively even curface and thickness (shown in Fig. 2 C) and smooth surface quite uniformly.
In addition, heat treatment step also is included in after the prebake conditions 250, again filter 230 is carried out back baking (not illustrating), with filter 230 bone dries and curing, and forms optical filter 200.Because in prebake conditions 250 steps, the shape of filter 230 is fixing,, do not influence the outward appearance and the smooth degree thereof of filter 230 no matter therefore under which kind of pressure, carry out the back baking procedure.Therefore, back baking can be at normal pressure, be higher than normal pressure or be lower than under the environment of normal pressure and carry out.In addition, the technological temperature of back baking (not illustrating) for example is between 190 ℃ to 250 ℃, and is preferably about 230 ℃, so that solvent evaporates, and form optical filter 200 (shown in Fig. 2 D).
In addition, in other embodiments, can use said method to make colored filter.Wherein, the opening P of black matrix 220 can be first group of opening of arrayed, second group of opening and the 3rd group of opening.When the opening P of black matrix 220 can be for first group of opening of arrayed, second group of opening and the 3rd group of opening, can in each opening, form first filter, second filter, the 3rd filter accordingly.First filter, second filter, the 3rd filter can be blue, green and red filter.And the heat treatment step that is carried out when solidifying first, second and the 3rd filter for example is (to carry out under as 1～5atm) environment, so that first, second and the 3rd filter have flat surfaces after solidifying being higher than normal pressure.
In general, when forming optical filter 200 in the mode of ink jet printing, choice of Solvent often is important problem in the filter 230.For instance, if select the lower material of boiling point as solvent, then solvent evaporates speed is very fast, and the required temperature of therefore dry filter 230 is lower and the process time is also shorter.But, if will make the large colour optical filter, must repeatedly insert the step of filter 230, the filter 230 of then early inserting opening P may be just partly dry before not heat-treating step, and cause manufacture process wayward.In order to improve the problems referred to above, can use a plurality of bull nozzles simultaneously, insert the time of filter 230 with shortening.Yet, but use a plurality of bull nozzles that the cost of process equipment is increased simultaneously.
If use the higher material of boiling point as solvent, solvent evaporates speed is slower, but is difficult for taking place the even problem of uneven drying, therefore need not adopt comparatively expensive bull nozzle and saves equipment cost.Specifically, according to embodiment proposed by the invention, the rate of volatilization of solvent helps to make optical filter 200 that more smooth surface is arranged more slowly.In comparison, for the optical filter 200 of making flat surfaces, the preferred solvents of filter 230 is to adopt the higher material of boiling point.For instance, the boiling point of propylene glycol monomethyl ether ethyl ester is about 145 ℃～146 ℃, promptly belongs to the higher solvent of boiling point, and it can be used as the selected solvent of present embodiment.
In sum, in the manufacture process of colored filter of the present invention, when filter was shaped, the influence that the rate of volatilization of solvent is under pressure and slowing down made dried filter have smooth surface and uniform thickness.Therefore, when colored filter is applied to LCD, the uneven phenomenon of colourity can not take place.In addition, the flatness of the colored filter that manufacture method of the present invention is made is good, has not been required to be the making of subsequent film and carries out the covering of flatness layer, therefore can reduce manufacturing cost and simplifies and make flow process.
Though the present invention discloses with specific embodiment; but it is not in order to limit the present invention; any those skilled in the art; the displacement of the equivalent assemblies of under the prerequisite that does not break away from design of the present invention and scope, having done; or, all should still belong to the category that this patent is contained according to equivalent variations and modification that scope of patent protection of the present invention is done.
Claims (21)
1. the manufacture method of an optical filter, this method comprises:
One substrate is provided;
Form a black matrix on this substrate, wherein should deceive the opening that matrix has a plurality of arrayed;
Form a filter in described opening, this filter comprises a solvent and a dyestuff;
This filter is carried out a prebake conditions, so that this filter is shaped, this prebake conditions is to carry out being higher than under the environment of normal pressure, so that the speed of solvent evaporates is slowed down; And
This filter is carried out a back baking, so that this filter solidifies.
2. the manufacture method of optical filter as claimed in claim 1 is characterized in that: this back baking is to carry out under the environment of normal pressure.
3. the manufacture method of optical filter as claimed in claim 1 is characterized in that: this back baking is to carry out being higher than under the environment of normal pressure.
4. the manufacture method of optical filter as claimed in claim 1 is characterized in that: this back baking is to carry out being lower than under the environment of normal pressure.
5. the manufacture method of optical filter as claimed in claim 1, it is characterized in that: the technological temperature of this prebake conditions is between 80 ℃ to 120 ℃.
6. the manufacture method of optical filter as claimed in claim 1, it is characterized in that: the technological temperature of this prebake conditions is 90 ℃.
7. the manufacture method of optical filter as claimed in claim 1 is characterized in that: the technological temperature of this back baking is between 190 ℃ to 250 ℃.
8. the manufacture method of optical filter as claimed in claim 1 is characterized in that: the technological temperature of this back baking is 230 ℃.
9. the manufacture method of optical filter as claimed in claim 1, it is characterized in that: this prebake conditions is to carry out in a cavity.
10. the manufacture method of optical filter as claimed in claim 9 is characterized in that: feed the gaseous state constituent that the interior gas of this cavity comprises this solvent.
11. the manufacture method of optical filter as claimed in claim 9 is characterized in that: the gas that feeds in this cavity comprises a nonreactive gas, and this nonreactive gas be the gas that does not react with this filter.
12. the manufacture method of optical filter as claimed in claim 11 is characterized in that: the gas that feeds in this cavity is inert gas.
13. the manufacture method of optical filter as claimed in claim 11 is characterized in that: the gas that feeds in this cavity is air or nitrogen.
14. the manufacture method of optical filter as claimed in claim 1 is characterized in that: this solvent comprises the propylene glycol monomethyl ether ethyl ester.
15. the manufacture method of optical filter as claimed in claim 1 is characterized in that: the method that forms this filter comprises ink jet printing.
16. the manufacture method of optical filter as claimed in claim 1 is characterized in that: form should black matrix on this substrate after, also comprise this black matrix carried out a hydrophobic treatments.
17. the manufacture method of optical filter as claimed in claim 16 is characterized in that: this hydrophobic treatments comprises plasma process.
18. the manufacture method of optical filter as claimed in claim 1 is characterized in that: this filter has a flat surfaces after solidifying.
19. a manufacturing method of color filters, this method comprises:
One substrate is provided;
Form a black matrix on this substrate, wherein should have one first group of opening of a plurality of arrayed, one second group of opening and one the 3rd group of opening by black matrix;
Form one first filter, one second filter, one the 3rd filter respectively in this first group of opening, this second group of opening and the 3rd group of opening, this first filter, this second filter and the 3rd filter comprise a solvent and a dyestuff;
This filter is carried out a prebake conditions, so that this filter is shaped, this prebake conditions is to carry out being higher than under the environment of normal pressure, so that the speed of solvent evaporates is slowed down; And
This filter is carried out a back baking, so that this first filter, this second filter and the 3rd filter solidify.
20. manufacturing method of color filters as claimed in claim 19 is characterized in that: this first filter, this second filter and the 3rd filter are respectively blue filter, green filter and red filter.
21. manufacturing method of color filters as claimed in claim 19 is characterized in that: this first filter, this second filter and the 3rd filter have a flat surfaces after solidifying.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101465754A CN100495084C (en) | 2007-08-21 | 2007-08-21 | Filter and color filter production method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101465754A CN100495084C (en) | 2007-08-21 | 2007-08-21 | Filter and color filter production method |
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| CN101101347A CN101101347A (en) | 2008-01-09 |
| CN100495084C true CN100495084C (en) | 2009-06-03 |
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| CNB2007101465754A Expired - Fee Related CN100495084C (en) | 2007-08-21 | 2007-08-21 | Filter and color filter production method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2012098627A (en) * | 2010-11-04 | 2012-05-24 | Dainippon Printing Co Ltd | Method of manufacturing color filter |
| CN105140233B (en) | 2015-07-27 | 2018-05-18 | 深圳市华星光电技术有限公司 | Low temperature polycrystalline silicon array substrate and its manufacturing method, display device |
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