CN100495078C - Focal-distance and view-field-adjusting liquid microlens and its production - Google Patents
Focal-distance and view-field-adjusting liquid microlens and its production Download PDFInfo
- Publication number
- CN100495078C CN100495078C CNB2007100206292A CN200710020629A CN100495078C CN 100495078 C CN100495078 C CN 100495078C CN B2007100206292 A CNB2007100206292 A CN B2007100206292A CN 200710020629 A CN200710020629 A CN 200710020629A CN 100495078 C CN100495078 C CN 100495078C
- Authority
- CN
- China
- Prior art keywords
- lens
- liquid
- piezoelectric
- pdms
- radially
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
A liquid micro-lens with focal distance and field being able to be adjusted is prepared as arranging the first circular radial piezoelectric material and the second circular radial piezoelectric material separately on internal wall of lens cone, arranging axial deformation piezoelectric material on the rest part of internal wall on lens cone and setting the first liquid micro-lens and the second liquid micro-lens correspondingly and separately to internal circles of two said piezoelectric materials.
Description
Technical field
What the present invention relates to is the design and the manufacturing process of the adjustable micro lens in a kind of focal length that microfluidic control device, the little Deformation control of elastic body, surface graded treatment technology are combined and visual field, belongs to the technical field that fine manufacturing, process for modifying surface and micro-optic technology intersect.
Background of invention
Along with the demand to portable type camera shot equipment is increasing, the production of the micro-lens module of various mobile phones, notebook, monitor, assembling etc. have formed the specialty industries that huge electronics is made.Therefore the production capacity of the annual mobile phone in the whole world is near 900,000,000 ones, and wherein about about 5.6 hundred million ones is camera mobile phone, for the demand of the pick-up lens of various sizes also very surprising.Micro-lens in the market mainly adopts small-sized glass or plastics to obtain tiny lens by injection moulding process.Then by the optics geometry designs, small-sized camera lens is integrated in the miniature lens barrel of adjustable positions, change the position of camera lens by the installation screw thread of regulating camera lens, perhaps drive the assembly motion of camera lens, finish the purpose of automatic change lens location by linear electric motors.
Owing to change focal length becomes technology and design gradually for miniaturization day by day difficult point by mechanical means, many in the world companies propose a kind of design and relevant patent of liquid travel incognito camera lens of adjustable focal length at present.Patent US6014259,6538823,6545815,6545816,6625351,6665127,6768536,6778328,6829415,6847493,6893877 grades have proposed the design and research device of liquid micro lens.System has proposed to soak into based on electricity electricity little liquid lens and the relevant optical detection system and the design of calibrating installation of the variable curvature/focal length of effect.PHLIPS and VARIOPTIC have released and have utilized electricity to soak into the liquid micro mirror of effect, can regulate the focal length of camera lens in small space.Another kind of design is that ASTART company adopts the diaphragm of piezoelectric to change the curvature direction and the radius of liquid film, thereby obtains the variable focal length characteristic of liquid lens.LUCENT has applied for relevant patent, has proposed to change the focal length that method such as character of surface between the character of surface, electrode of design, the electrode of electrode is regulated the liquid micro lens.All these researchs, the parts of how implementing to focus on the minisize pick-up head that uses on mobile phone, the notebook computer etc. and carrying out simultaneously with curvature are used seldom.Simultaneously, adopt micromachine transmission or linear motor driving to finish the adjustable unifunctional parts of adjustable focal length or visual field and obtained industrialization, but the report of the parts industrialization of regulating simultaneously seldom.Domestic relevant research seldom, by retrieval, the relevant technology of manufacturing of the assembly that the focal length that can know small lens assembly and visual field are adjustable is not seen relevant report with method.
Summary of the invention
Technical matters: the object of the present invention is to provide adjustable micro lens in a kind of focal length and visual field and manufacture method thereof, adjustable when can't realize visual field and camera lens to realize that the mirror group is closely and realize accurate focusing between remote at present micro mirror head mirror group.
Technical scheme: the present invention is a kind of adjustable minisize liquid lens design and manufacture method of focal length and visual field of finishing.Promptly be a kind of PDMS of utilization (dimethyl silicone polymer) thin-film package micro liquid, the design and the manufacturing process of the micro lens that focal length that microfluidic control device, the little Deformation control of elastic body, surface graded treatment technology are combined and visual field are adjustable.And be successfully applied in the manufacture process of mobile phone micro-lens.
The liquid micro lens that focal length of the present invention and visual field are adjustable comprises radially piezoelectric, second annular piezoelectric radially of lens barrel, axial deformation piezoelectric, first liquid lens, second liquid lens, first annular; Wherein, first annular radially piezoelectric, second annular radially piezoelectric lay respectively on the inwall of lens barrel, remainder on the lens barrel inwall is provided with the axial deformation piezoelectric, first annular radially piezoelectric, second annular radially in the interior circle of piezoelectric respectively correspondence be provided with first liquid lens, second liquid lens.First annular radially piezoelectric by first circular arc radially piezoelectric, second circular arc radially piezoelectric, three-arc shape radially piezoelectric, the 4th circular arc radially piezoelectric grading ring institute around the eyeglass form.First liquid lens or second liquid lens are made up of sheet enclosing liquid under PDMS film last slice, the PDMS film.
The manufacture method of the liquid micro lens that focal length of the present invention and visual field are adjustable is:
1). the microcavity with the bonding formation enclosing liquid of sheet under PDMS film last slice, the PDMS film obtains first liquid lens or second liquid lens;
2). with first annular radially piezoelectric, second annular radially piezoelectric surround first liquid lens or second liquid lens respectively;
3). with first annular radially piezoelectric, second annular radially piezoelectric, first liquid lens, second liquid lens are connected with the axial deformation piezoelectric;
4). above connector is assembled in the inwall of lens barrel;
The manufacture method of PDMS microcavity is as follows:
1) manufacturing of PDMS die cavity adopts the method for microfabrication to obtain fine mould,
2) PDMS is injected micro-mould, solidify;
3) PDMS is peeled away from micro-mould;
4) form the microcavity of microfluid at PDMS surface coverage PDMS sheet.
Manufacturing based on the micro lens of PDMS microcavity can be adopted following method:
1) technology that adopts laser/excimer laser to process adopts direct sunshine to shine or laser scanning or substrate method for scanning, obtains microcavity on the PDMS surface;
2) connecting the bonding formation sealing of another layer PDMS sheet and this PDMS layer;
3) liquid is sealed by fluid interface injection microcavity and with PDMS.
Can be under PDMS film last slice, PDMS film the bonding piezoelectric of outside surface of sheet.
Beneficial effect: adopt method of the present invention, obtain adjustable focal length and the adjustable micro mirror module in visual field.After the assembling of finishing module, place object at the front end of camera lens, by the CCD/CMOS image processing ics that is connected with the camera lens module, under the control of computer image treatment software, can obtain the picture of different sharpness and enlargement ratio.Adjustable when can't realize visual field and camera lens to realize that the mirror group is closely and realize accurate focusing between remote at present micro mirror head mirror group.
Description of drawings:
Fig. 1 is the structural representation of the adjustable micro mirror head mirror group in focal length and visual field.Wherein have: lens barrel 1, axial deformation piezoelectric 2, first liquid lens 3, second liquid lens 4, first annular be piezoelectric 5, second annular piezoelectric 6 radially radially.
Fig. 2 is an A-A cross-sectional view among Fig. 1.Wherein have: first circular arc is piezoelectric 51, second circular arc piezoelectric 52, three-arc shape piezoelectric 53, the 4th circular arc piezoelectric 54 radially radially radially radially.
Fig. 3 is the structural representation of liquid lens.Wherein have: sheet 32, enclosing liquid 33 under PDMS film last slice 31, the PDMS film.
Fig. 4 is a kind of manufacturing process that obtains the electrode and the processing layer of PDMS film, wherein has: silicon substrate 7, resist coating 8, mask 9, exposure 10 develops 11, injects PDMS12, peel off PDMS13, the rete 14 of PDMS surface SAM different qualities, the rete and the electrode layer 15 of PDMS sheet surface SAM different qualities.
Fig. 5 wherein has first significant level, 16, the second significant levels, 17, the three significant levels, 18, the four significant levels, 19, the five significant levels 20, electrode 21 for the PDMS film comprises the plane figure of electrode and processing layer.
Embodiment
The embodiment of the micro mirror head mirror group that focal length of the present invention and visual field are adjustable is as follows: 1) utilize the method for fine injection moulding to form the microcavity of microfluid at PDMS or other transparent membranes, concrete manufacturing process as shown in Figure 4, the plane figure of the microcavity of acquisition is as shown in Figure 5; 2) (oxygen is at 100---1500W, and the microwave plasma processing apparatus about vacuum 500Torr is handled 15-60min) pressurization bonding (about pressure 1000Pa) after the general plasma treatment of the bonding employing of PDMS; 3) the PDMS diaphragm seal inlet (about the maximum pressure 10Psi of cavity volume) that will inject cavity volume and cross with syringe liquid or water with oxygen plasma treatment; 4) apply voltage (0-450V) for the piezoelectric membrane (PVDF) of PDMS microcavity outside, apply driving voltage (0-450V) perhaps for former ring piezoelectric ceramics, axial piezoelectric ceramics (PZT), change film curvature (film deformation 0-100um/mm); 5) former ring piezoelectric ceramics, axial piezoelectric ceramics and liquid micro mirror are integrated into shooting micro mirror tube; 6) lens barrel is connected with the detection module of mobile lens.
Minisize liquid lens design that focal length of the present invention and visual field are adjustable and manufacturing are to adopt following scheme to realize:
1) envelope fluid injection body in the PDMS transparent membrane;
2) utilize piezoelectric to change the deformation of transparent membrane to change the shape of little liquid;
3) curvature or the position of micro lens in light path of change micro lens;
4) thus finish the adjustable of focal length and visual field.
Specific embodiments as shown in Figure 1.This liquid micro lens comprises radially piezoelectric 5, second annular piezoelectric 6 radially of lens barrel 1, axial deformation piezoelectric 2, first liquid lens 3, second liquid lens 4, first annular; Wherein, first annular radially piezoelectric 5, second annular radially piezoelectric 6 lay respectively on the inwall of lens barrel 1, remainder on lens barrel 1 inwall is provided with axial deformation piezoelectric 2, first annular radially piezoelectric 5, second annular radially in the interior circle of piezoelectric 6 respectively correspondence be provided with first liquid lens 4, second liquid lens 3.
The manufacturing of PDMS microcavity is as follows: 1) manufacturing of PDMS die cavity adopts the method for microfabrication to obtain fine mould, 2) PDMS is injected micro-mould, solidify; 3) PDMS is peeled away from micro-mould; 4) form the chamber of microfluid at PDMS surface coverage PDMS sheet.
Manufacturing based on the micro lens of PDMS microcavity can be adopted following method: 1) adopt the technology of laser/excimer laser processing, can adopt direct sunshine according to or laser scanning or substrate method for scanning, obtain microcavity on the PDMS surface; 2) connecting the bonding formation sealing of another layer PDMS sheet and this PDMS layer; 3) liquid is sealed by fluid interface injection microcavity and with PDMS.
Rete/lamella/rod that bonding piezoelectric is formed in the outside of PDMS microcavity, by applying voltage to piezoelectric, thereby piezoelectric produces the curvature that distortion changes little liquid lens.
By changing the voltage of piezoelectric, change the drive displacement of piezoelectric, reach the position of change liquid micro mirror in light path.
The liquid micro lens is attached on the optical detection seat, camera lens is applied distortion, finish detection camera lens by control circuit board.
The manufacturing process of the small fluid camera lens that the present invention proposes is as follows: the technology that 1) adopts microfabrication for example IC technology, MEMS technology, micro-cutting technology, laser processing technology obtains the micro-mould of micro-fluid chip at matrix surface; 2) adopt the technology of little injection moulding that PDMS is injected micro-mould; 3) PDMS is peeled off from fine mould; 4) moulding of PDMS and PDMS sheet are carried out strippable bonding, form the die cavity of microfluid; 5) in micro-flow path, inject the solution of different characteristics; 6) solution is discharged the runner of micro-fluid chip; 7) there is not the place of fluid treatment to adopt the protection evaporation or press the method for reflecting to deposit the electrode of one deck conduction on the surface of PDMS sheet; 8) bending of PDMS layer obtained a kind of lens barrel of fixed flow somascope sheet and the two ends of sealing lens barrel with glass or transparent resin sheet; 9) in lens barrel, isolate drop with bubble; 10) control the motion of drop and the bending radius of drop by the conduction of control electrode; 11) lens barrel is connected with the detection module of mobile lens.
The manufacturing process of the fine camera lens that the present invention proposes also comprises following technology: 1) adopt PVDF material or segmentation PVDF material to make lens barrel; 2) adopt fixed electorde on the surface of PVDF material; 3) the PDMS divided thin film end that will comprise liquid is filled in the lens barrel; 4) the lens barrel two ends fix 5 by glass and transparent resin) apply electric field for the PVDF material, change the position and the curvature of PDMS film; 6) lens barrel is connected with the detection module of mobile lens.
The manufacturing process of the fine camera lens that the present invention proposes also comprises following technology: 1) PDMS film that the liquid filling of trace is transparent; 2) adopt piezoceramic material that the PDMS film is applied extraneous mechanical effect; 3) the PDMS film produces the radius-of-curvature that distortion has changed lens under extraneous mechanical effect; 4) liquid lens encapsulation lens barrel; 5) lens barrel is connected with the detection module of mobile lens.
Claims (11)
1. adjustable liquid micro lens of focal length and visual field is characterized in that this liquid micro lens comprises radially piezoelectric (5), second annular piezoelectric (6) radially of lens barrel (1), axial deformation piezoelectric (2), first liquid lens (3), second liquid lens (4), first annular; Wherein, first annular radially piezoelectric (5), second annular radially piezoelectric (6) lay respectively on the inwall of lens barrel (1), remainder on lens barrel (1) inwall is provided with axial deformation piezoelectric (2), first annular radially piezoelectric (5), second annular radially in the interior circle of piezoelectric (6) respectively correspondence be provided with first liquid lens (3), second liquid lens (4).
2. the liquid micro lens that focal length as claimed in claim 1 and visual field are adjustable, it is characterized in that first annular radially piezoelectric (5) by first circular arc radially piezoelectric (51), second circular arc radially piezoelectric (52), three-arc shape radially piezoelectric (53), the 4th circular arc radially piezoelectric (54) grading ring institute around the eyeglass form.
3. the liquid micro lens that focal length as claimed in claim 1 and visual field are adjustable is characterized in that: first liquid lens (3) or second liquid lens (4) are made up of sheet (32) enclosing liquid (33) under PDMS film last slice (31), the PDMS film.
4. the manufacture method of the adjustable liquid micro lens in focal length as claimed in claim 1 and visual field is characterized in that the method for making is:
1). with the microcavity of the bonding formation enclosing liquid of sheet (32) (33) under PDMS film last slice (31), the PDMS film, obtain first liquid lens (3) or second liquid lens (4);
2). with first annular radially piezoelectric (5), second annular radially piezoelectric (6) surround first liquid lens (3) or second liquid lens (4) respectively;
3). with first annular radially piezoelectric (5), second annular radially piezoelectric (6), first liquid lens (3) or second liquid lens (4) are connected with axial deformation piezoelectric (2);
4). above connector is assembled in the inwall of lens barrel (1).
5. the manufacture method of the liquid micro lens that focal length as claimed in claim 4 and visual field are adjustable is characterized in that the manufacture method of PDMS microcavity is as follows:
1) manufacturing of PDMS die cavity adopts the method for microfabrication to obtain fine mould,
2) PDMS is injected micro-mould, solidify;
3) PDMS is peeled away from micro-mould;
4) form the microcavity of microfluid at PDMS surface coverage PDMS sheet.
6. the manufacture method of the liquid micro lens that focal length as claimed in claim 4 and visual field are adjustable is characterized in that adopting following method based on the manufacturing of the micro lens of PDMS microcavity:
1) technology that adopts laser/excimer laser to process adopts direct sunshine to shine or laser scanning or substrate method for scanning, obtains microcavity on the PDMS surface;
2) connecting the bonding formation sealing of another layer PDMS sheet and this PDMS layer;
3) liquid is sealed by fluid interface injection microcavity and with PDMS.
7. the manufacture method of the liquid micro lens that focal length as claimed in claim 4 and visual field are adjustable is characterized in that: the bonding piezoelectric of outside surface of sheet (32) under PDMS film last slice (31), PDMS film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100206292A CN100495078C (en) | 2007-03-16 | 2007-03-16 | Focal-distance and view-field-adjusting liquid microlens and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100206292A CN100495078C (en) | 2007-03-16 | 2007-03-16 | Focal-distance and view-field-adjusting liquid microlens and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101029939A CN101029939A (en) | 2007-09-05 |
| CN100495078C true CN100495078C (en) | 2009-06-03 |
Family
ID=38715397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100206292A Expired - Fee Related CN100495078C (en) | 2007-03-16 | 2007-03-16 | Focal-distance and view-field-adjusting liquid microlens and its production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100495078C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI424211B (en) * | 2009-07-17 | 2014-01-21 | De In Shaw | An integrated apparatus of elastic lens and flexible sensors |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109375298A (en) * | 2018-11-30 | 2019-02-22 | 东莞市谷麦光学科技有限公司 | A kind of liquid lens and preparation method thereof |
| CN110221416A (en) * | 2019-06-28 | 2019-09-10 | Oppo广东移动通信有限公司 | Zoom lens, Zooming method, terminal and computer readable storage medium |
| CN110661954A (en) * | 2019-10-14 | 2020-01-07 | Oppo广东移动通信有限公司 | Camera module and terminal equipment |
| CN113867078B (en) * | 2021-09-30 | 2024-05-28 | 维沃移动通信有限公司 | Camera module and electronic equipment |
| CN114299558B (en) * | 2021-12-31 | 2023-03-28 | 湖北华鑫光电有限公司 | 5P's super wide angle screen fingerprint camera lens down |
| CN114442255B (en) * | 2022-02-21 | 2024-02-09 | 维沃移动通信有限公司 | Lens module and electronic equipment |
-
2007
- 2007-03-16 CN CNB2007100206292A patent/CN100495078C/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| Variable-focus liquid lens for miniature cameras. S. Kuiper et al.APPLIED PHYSICS LETTERS,Vol.85 No.7. 2004 |
| Variable-focus liquid lens for miniature cameras. S. Kuiper et al.APPLIED PHYSICS LETTERS,Vol.85 No.7. 2004 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI424211B (en) * | 2009-07-17 | 2014-01-21 | De In Shaw | An integrated apparatus of elastic lens and flexible sensors |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101029939A (en) | 2007-09-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100495078C (en) | Focal-distance and view-field-adjusting liquid microlens and its production | |
| US7580195B2 (en) | Optical lens and method of manufacturing the same | |
| JP5323704B2 (en) | Small polymer lens | |
| TWI292048B (en) | Variable focus microlens | |
| US8505822B2 (en) | Apparatus and method comprising deformable lens element | |
| US8947784B2 (en) | Variable focus lens having two liquid chambers | |
| CN101950078B (en) | Varifocal double-liquid lens based on inverse piezoelectric effect | |
| TW200813512A (en) | Variable focus zoom lenses | |
| US20090116118A1 (en) | Lens | |
| JP2007128084A (en) | Liquid zoom lens | |
| CN201017048Y (en) | Adjustable focal distance and visual field liquid micro-lens | |
| CN113376720A (en) | Variable focus liquid lens with complex internal cavity surface | |
| KR100847802B1 (en) | Aspheric liquid lens and a method for producing the same | |
| Wang et al. | Compact variable-focusing microlens with integrated thermal actuator and sensor | |
| Wang et al. | Design, fabrication and testing of a micromachined integrated tunable microlens | |
| Yang et al. | Miniaturized variable-focus lens fabrication using liquid filling technique | |
| Park et al. | Multifuctional liquid lens for high-performance miniature cameras | |
| KR20090053838A (en) | Variable focus zoom lenses | |
| Lee et al. | A 4 bit digital liquid lens for variable focal length | |
| Shaw et al. | Design of O-ring driven liquid-filled lens | |
| Lee et al. | Variable focus liquid lens module using direct current electromagnetic driving | |
| Yang et al. | Fabrication of miniaturized variable-focus lens using liquid filling technique | |
| Draheim et al. | 10 Piezoelectrically Actuated Tunable Microlenses | |
| Yang et al. | FABRICATION OF MINIATURIZED VARIABLE-FOCUS LENS USING LIQUID FILLING |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090603 Termination date: 20120316 |