CN100489499C - 一种半导体激光吸收光谱气体分析方法及系统 - Google Patents
一种半导体激光吸收光谱气体分析方法及系统 Download PDFInfo
- Publication number
- CN100489499C CN100489499C CNB2007100690365A CN200710069036A CN100489499C CN 100489499 C CN100489499 C CN 100489499C CN B2007100690365 A CNB2007100690365 A CN B2007100690365A CN 200710069036 A CN200710069036 A CN 200710069036A CN 100489499 C CN100489499 C CN 100489499C
- Authority
- CN
- China
- Prior art keywords
- temperature
- semiconductor laser
- working temperature
- interval
- working
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 245
- 238000000862 absorption spectrum Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000004868 gas analysis Methods 0.000 title claims abstract description 10
- 238000010521 absorption reaction Methods 0.000 claims abstract description 127
- 239000007789 gas Substances 0.000 claims description 90
- 238000010438 heat treatment Methods 0.000 claims description 25
- 238000005057 refrigeration Methods 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000013459 approach Methods 0.000 claims description 11
- 238000005265 energy consumption Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 9
- 238000002474 experimental method Methods 0.000 claims description 7
- 238000007710 freezing Methods 0.000 claims description 2
- 230000008014 freezing Effects 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 abstract description 3
- 238000004458 analytical method Methods 0.000 abstract 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 62
- 230000003595 spectral effect Effects 0.000 description 37
- 238000005516 engineering process Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000010408 sweeping Methods 0.000 description 2
- 230000005679 Peltier effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000004861 thermometry Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
谱线 | 中心频率(cm<sup>-1</sup>) | 工作温度区间(℃) | 参考工作温度(℃) | 参考工作电流(mA) |
1 | 6015.67 | 63.7-65 | 65 | 6.53 |
2 | 6026.24 | 41.6-52.5 | 45 | 5.75 |
3 | 6036.61 | 19.9-30.8 | 25 | 5.14 |
4 | 6046.91 | 5-9.2 | 5 | 4.56 |
电流(mA) | 工作温度(℃) | 测得浓度(%) | 浓度误差(%) | 补偿系数K<sub>i,内</sub> |
6.62 | 21 | 1.274 | 1.839 | 0.982 |
6.25 | 22 | 1.268 | 1.359 | 0.987 |
5.87 | 23 | 1.262 | 0.879 | 0.991 |
5.50 | 24 | 1.257 | 0.480 | 0.995 |
5.14 | 25 | 1.251 | 0 | 1 |
4.77 | 26 | 1.246 | -0.400 | 1.004 |
4.40 | 27 | 1.241 | -0.800 | 1.008 |
4.03 | 28 | 1.237 | -1.119 | 1.011 |
3.66 | 29 | 1.232 | -1.518 | 1.015 |
3.29 | 30 | 1.23 | -1.679 | 1.017 |
参考工作温度(℃) | 测得浓度(%) | 误差(%) | 补偿系数K<sub>i,外</sub> |
65 | 1.216 | -2.798% | 1.0288 |
45 | 1.225 | -2.078 | 1.0212 |
25 | 1.251 | 0 | 1 |
5 | 1.282 | 2.478 | 0.9758 |
谱线 | 中心频率(cm<sup>-1</sup>) | 工作温度区间(℃) | 参考工作温度(℃) | 参考工作电流(mA) |
2 | 6026.24 | 41.6-52.5 | 45 | 5.75 |
3 | 6036.61 | 19.9-30.8 | 25 | 5.14 |
4 | 6046.91 | 5-9.2 | 5 | 4.56 |
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2007100690365A CN100489499C (zh) | 2007-05-31 | 2007-05-31 | 一种半导体激光吸收光谱气体分析方法及系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2007100690365A CN100489499C (zh) | 2007-05-31 | 2007-05-31 | 一种半导体激光吸收光谱气体分析方法及系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101122566A CN101122566A (zh) | 2008-02-13 |
CN100489499C true CN100489499C (zh) | 2009-05-20 |
Family
ID=39084993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007100690365A Active CN100489499C (zh) | 2007-05-31 | 2007-05-31 | 一种半导体激光吸收光谱气体分析方法及系统 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100489499C (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6316274B2 (ja) * | 2012-03-27 | 2018-04-25 | テトラ ラバル ホールディングス アンド ファイナンス エス エイ | 物質の濃度を測定するためのセンサ構成 |
CN103543127B (zh) * | 2013-10-30 | 2016-01-27 | 北京航天易联科技发展有限公司 | 气体传感器的检测方法 |
CN105044026A (zh) * | 2015-08-27 | 2015-11-11 | 安徽中科瀚海光电技术发展有限公司 | 基于双光谱吸收线和波形匹配的激光甲烷浓度测量方法 |
CN109141669B (zh) * | 2016-08-09 | 2020-08-07 | 上海禾赛光电科技有限公司 | 基于光谱技术的无线测温方法及装置 |
CN110057551B (zh) * | 2019-04-22 | 2020-09-29 | 河海大学常州校区 | 一种led多芯片模组的光、色性能预测方法 |
CN112304885B (zh) * | 2020-10-29 | 2023-06-13 | 山东省科学院激光研究所 | 一种基于vcsel的自适应多谱线co检测系统及方法 |
CN114199821A (zh) * | 2021-12-07 | 2022-03-18 | 山东微感光电子有限公司 | 通过调节qcl激光器波长匹配不同吸收峰的低功耗控温方法 |
-
2007
- 2007-05-31 CN CNB2007100690365A patent/CN100489499C/zh active Active
Non-Patent Citations (4)
Title |
---|
利用可调谐半导体激光吸收光谱技术对气体浓度的测量. 李宁,王飞,严建华,马增益,岑可法.中国电机工程学报,第25卷第15期. 2005 |
利用可调谐半导体激光吸收光谱技术对气体浓度的测量. 李宁,王飞,严建华,马增益,岑可法.中国电机工程学报,第25卷第15期. 2005 * |
激光原位气体分析仪在高炉过程控制中的应用. 黄伟,王健,熊志才,刘,罡,高书成.冶金自动化,第2006年卷第2期. 2006 |
激光原位气体分析仪在高炉过程控制中的应用. 黄伟,王健,熊志才,刘,罡,高书成.冶金自动化,第2006年卷第2期. 2006 * |
Also Published As
Publication number | Publication date |
---|---|
CN101122566A (zh) | 2008-02-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100489499C (zh) | 一种半导体激光吸收光谱气体分析方法及系统 | |
CN100543457C (zh) | 一种半导体激光吸收光谱气体分析方法 | |
CN101008612B (zh) | 一种半导体激光吸收光谱气体分析方法 | |
US6518562B1 (en) | Apparatus and method of remote gas trace detection | |
CN204086105U (zh) | 一种气体传感器系统 | |
CN101563595B (zh) | 具有温度补偿的样品浓度检测器 | |
Goldenstein et al. | Scanned-wavelength-modulation spectroscopy near 2.5 μm for H 2 O and temperature in a hydrocarbon-fueled scramjet combustor | |
Weidmann et al. | Mid-infrared trace-gas sensing with a quasi-continuous-wave Peltier-cooled distributed feedback quantum cascade laser | |
Goldenstein et al. | Wavelength-modulation spectroscopy near 2.5 μm for H 2 O and temperature in high-pressure and-temperature gases | |
CN101646934A (zh) | 激光式气体分析仪 | |
CN104903703A (zh) | 气体吸收分光装置以及气体吸收分光方法 | |
US20210033528A1 (en) | Gas absorption spectroscopic device | |
CN201063022Y (zh) | 双灵敏度机动车尾气激光遥测装置 | |
CN101841128B (zh) | 激光二极管快速温度调谐的动态波长辨识方法与装置 | |
CN112304885A (zh) | 一种基于vcsel的自适应多谱线co检测系统及方法 | |
Hieta et al. | Spectroscopic measurement of air temperature | |
CN102738694A (zh) | 一种利用f-p干涉仪实现激光稳频的方法 | |
US5926495A (en) | Laser diode pump wavelength sensing and control apparatus and method | |
Nair et al. | MHz mid-infrared laser absorption sensor for carbon monoxide and temperature behind detonation waves | |
RU2694461C1 (ru) | Дистанционный оптический абсорбционный лазерный газоанализатор с длиной волны излучения в области 1,6 мкм (2 варианта), способ его осуществления и оптоволоконный рамановский усилитель для дистанционного оптического абсорбционного лазерного газоанализатора с длиной волны излучения в области 1,6 мкм | |
JP2017101950A (ja) | レーザ式ガス分析計 | |
CN116499713A (zh) | 一种泵浦激光器稳定性测试装置及测试方法 | |
Nair et al. | RF-waveform optimization for MHz-rate DFB laser absorption spectroscopy in dynamic combustion environments | |
CN101672773B (zh) | 一种近红外光谱分析方法及装置 | |
JP2014016313A (ja) | レーザ式ガス分析計 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: JUGUANG SCIENCE AND TECHNOLOGY (HANGZHOU) CO., LTD Free format text: FORMER OWNER: WANG JIAN Effective date: 20090605 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090605 Address after: Hangzhou City, Zhejiang Province, Binjiang District Binhu road 760 Patentee after: Focused Photonics (Hangzhou) Inc. Address before: Hangzhou City, Zhejiang Province, Binjiang District Lake Road 1180 No. 3 Building 2 floor Patentee before: Wang Jian |
|
C56 | Change in the name or address of the patentee |
Owner name: FOCUSED PHOTONICS (HANGZHOU), LTD. Free format text: FORMER NAME: JUGUANG SCIENCE AND TECHNOLOGY (HANGZHOU) CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Hangzhou City, Zhejiang province Binjiang District 310052 shore road 760 Patentee after: Focused Photonics (Hangzhou) Inc. Address before: Hangzhou City, Zhejiang province Binjiang District 310052 shore road 760 Patentee before: Juguang Sci. & Tech. (Hangzhou) Co., Ltd. |