CN100479182C - Organic el display and method for manufacturing the same - Google Patents
Organic el display and method for manufacturing the same Download PDFInfo
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- CN100479182C CN100479182C CNB2006100956627A CN200610095662A CN100479182C CN 100479182 C CN100479182 C CN 100479182C CN B2006100956627 A CNB2006100956627 A CN B2006100956627A CN 200610095662 A CN200610095662 A CN 200610095662A CN 100479182 C CN100479182 C CN 100479182C
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Abstract
The invention provides an organic EL display capable of preventing degradation of a service life of each organic EL element; and to provide its manufacturing method. This organic EL display includes: a substrate 12; the plurality of organic EL elements 16 arranged on the substrate 12; insulation members 14 disposed between the adjacent organic EL elements 16; and a first protection layer 18 which is sequentially formed from a region between the lower layer electrode 24 and the function layer 26 of the organic EL element 16 to the surface of the insulation member 14 and composed by containing fluorine.
Description
Technical field
The present invention relates to a kind of organic electroluminescent (Electroluminescence) display.
Background technology
In recent years, the display of organic electroluminescence that is made of OLED (0rganic light Emitting Diode) is just attracted attention.It extensively is used in the display with all goods headed by the display of mobile phone, digital camera.
This existing display of organic electroluminescence possesses and comprises following structure: substrate; Be arranged in a plurality of organic electroluminescent devices on this substrate; Be configured between the adjacent organic electroluminescent device, and be configured to surround the next door of each organic electroluminescent device; Protective layer in order to the lining organic electroluminescent device; And and substrate between form the packing component (base plate for packaging) of confined space.
This organic electroluminescent device has from substrate-side lamination lower electrode successively, comprises the organic layer of luminescent layer and the structure of upper electrode.When electric power was supplied with lower electrode and upper electrode, from lower electrode lateral direction light emission layer injected hole, and from upper electrode lateral direction light emission layer injection electronics, hole and electronics that this is injected into were coupled at luminescent layer again, emit the light of appointment.
This display of organic electroluminescence, the order that is generally according to substrate, lower electrode, next door, organic layer, upper electrode and protective layer forms.
But next door forms the situation of organic layer, electrode for using deposition mask, has by the function that supports deposition mask above it.In addition, do not using deposition mask but utilize the evaporation mode to form the situation of organic layer, electrode, next door itself has the function of deposition mask.Again, form the situation of organic layer etc., have the function that improves the electric insulating quality between adjacent picture element by additive method, for example ink-jet method beyond the evaporation.
[patent documentation 1] TOHKEMY 2005-122924 communique
[patent documentation 2] TOHKEMY 2003-257655 communique
For example serve as reasons in this next door, the organic material of phenolic aldehyde system or propylene resin etc. or the material that contains organic material form.Because organic material is easier to absorb moisture, so in the film forming processing procedure of organic layer or upper electrode, protective layer, the next door absorbs the moisture of outer gas easily.Therefore, for when finishing display of organic electroluminescence, the next door can absorb large quantity of moisture.When this absorbed moisture evaporates because of the change of the internal pressure of display etc., make moisture invade between next door and the protective layer, might arrive organic layer, might reduce the life-span of organic electroluminescent device in this case.
On the other hand, in patent documentation 1, patent documentation 2, proposition will be exposed in the fluoride gas by the surface, next door that resin constitutes the surface in next door, so that the method for next door surface fluorination.
Yet the technology that patent documentation 1, patent documentation 2 are put down in writing only is the technology that surface, resinous next door is fluoridized basically.Therefore, formed the back before fluorination treatment is finished from the next door, after the finishing of display of organic electroluminescence during evaporation, institute's moisture evaporated is invaded between the surface and this surperficial medial region of fluorination treatment by moisture that the next door absorbed, and it is still very high to arrive the possibility of organic layer.In addition, also do not consider to carry out the influence that the fluorination treatment meeting causes organic electroluminescent device.Therefore, the display of organic electroluminescence that has the epoch-making formation of the life-span reduction that can further prevent organic electroluminescent device for demand is a kind of.
Summary of the invention
Display of organic electroluminescence of the present invention has: substrate; Have lower electrode, upper electrode and between this lower electrode and upper electrode, and contain the functional layer of organic luminous layer, and be arranged on a plurality of organic electroluminescent devices on this substrate; Be configured in the insulating component between this adjacent organic electroluminescent device; And form continuously to the surface of this insulating component, and contain the 1st protective layer of fluorine from the zone between this lower electrode and this functional layer.
In addition, display of organic electroluminescence of the present invention is in above-mentioned display of organic electroluminescence, and the 1st protective layer is set at the area thickness between this lower electrode and this functional layer smaller or equal to 10nm.
In addition, display of organic electroluminescence of the present invention is in above-mentioned display of organic electroluminescence, and the 1st protective layer has CH
xF
yThe composition of (0≤x≤1,0.3≤y≤2,1.3≤x+y≤2).
In addition, display of organic electroluminescence of the present invention is in above-mentioned display of organic electroluminescence, and the 1st protective layer is formed on this substrate integral body.
In addition, display of organic electroluminescence of the present invention is in above-mentioned display of organic electroluminescence, and near the thickness of the 1st protective layer this substrate end reduces.
In addition, display of organic electroluminescence of the present invention is in above-mentioned display of organic electroluminescence, also has the 2nd protective layer of this organic electroluminescent device of lining, and the periphery of the 1st protective layer more is positioned at the inboard than the 2nd protective layer periphery.
In addition, display of organic electroluminescence of the present invention is in above-mentioned display of organic electroluminescence, also has, and is configured in the base plate for packaging on this substrate; And between this substrate and this base plate for packaging, forming the encapsulant of the arrange regional that surrounds these a plurality of organic electroluminescent devices, the periphery of the 1st protective layer more is positioned at the inboard than the formation zone of sealing material.
On the other hand, the manufacture method of display of organic electroluminescence of the present invention, comprise: prepare a display base plate, this display base plate has substrate, part and is formed on insulating component on this substrate and at least a portion and is configured in be positioned at this insulating component non-and forms lower electrode on this substrate in zone; Form the 1st protective layer, the 1st protective layer disposes continuously and contains fluorine from the surface of this insulating component to the non-surface that forms this lower electrode in zone that is positioned at this insulating component; And in order to form organic electroluminescent device, and on the 1st protective layer that is positioned on this lower electrode, lamination comprises the functional layer and the upper electrode of organic luminous layer successively.
In addition, the manufacture method of display of organic electroluminescence of the present invention is in the manufacture method of above-mentioned display of organic electroluminescence, and the 1st protective layer will be set at smaller or equal to 10nm between the area thickness between this lower electrode and this functional layer.
In addition, the manufacture method of display of organic electroluminescence of the present invention is in the manufacture method of above-mentioned display of organic electroluminescence, before the formation of the 1st protective layer and/or the moisture containing ratio in the atmosphere when forming be set at smaller or equal to 100ppm.
According to the present invention, because form the 1st protective layer fluorine-containing or that constitute by waterproof material in the surface of insulating component, so when making display of organic electroluminescence, can suppress the situation that insulating component absorbs moisture well.In addition; even be absorbed in the moisture of insulating component; discharge outside in insulating component in the back evaporation of finishing display of organic electroluminescence; enclosed between the 1st protective layer and the insulating component or between the 1st protective layer and the lower electrode, arrived functional layer because discharge so still can suppress this moisture in the moisture of the outside of insulating component.Therefore, significantly the deterioration of inhibit feature layer can realize long-life display of organic electroluminescence.
In addition, according to the present invention, the thickness setting of the 1st protective layer by will be between lower electrode and functional layer is smaller or equal to 10nm, can suppress the situation that the luminous required power consumption of organic electroluminescent device increases fully.
In addition, according to the present invention, by with the 1st protective layer continuously and phase Department be formed on substrate integral body, then have on the 1st protective layer, to be difficult to produce the effect of peeling off.
In addition,, near the substrate end, reduce, then have the internal stress of the 1st protective layer to reduce, and be difficult to peel off the remarkable result of the 1st protective layer by the thickness that makes the 1st protective layer according to the present invention.
In addition; according to the present invention, be positioned at than the 2nd protective layer periphery inside by the periphery that makes the 1st protective layer, can the end regions of the 2nd protective layer be coated on the substrate by the 1st protective layer; even form the 1st protective layer, still can keep the connecting airtight property of the 2nd protective layer to heavens to substrate.Its result can further improve the encapsulation of the 2nd protective layer to organic electroluminescent device.
In addition; according to the present invention; by substrate and base plate for packaging is bonding in addition; do not make the 1st protective layer be coated on the formation zone of the encapsulant of the arrange regional that surrounds organic electroluminescent device; and the periphery that makes the 1st protective layer is positioned at than encapsulant inside also, then can by the 1st protective layer encapsulant be coated on the substrate.Its result can keep the connecting airtight property of encapsulant to substrate to heavens, can hermetic keep the space that is surrounded by between substrate, base plate for packaging and the encapsulant.
In addition; according to the present invention; if the moisture containing ratio before the formation of the 1st protective layer and/or in the atmosphere after the formation of the 1st protective layer is set at smaller or equal to 100ppm; before then can lowering the formation of the 1st protective layer, be absorbed in the amount of moisture of insulating component when forming; its result can more prolong life-span of display of organic electroluminescence.
The accompanying drawing simple declaration
Fig. 1 is the cutaway view of the display of organic electroluminescence of demonstration the 1st example of the present invention.
Fig. 2-1 is for showing the cutaway view of the display base plate of being prepared.
Fig. 2-2 is the cutaway view when forming watertight composition.
Fig. 2-3 is for disposing the cutaway view of mask.
Fig. 2-4 is the cutaway view when forming organic electroluminescent device.
Fig. 2-5 is for showing the cutaway view of made display of organic electroluminescence.
Fig. 3 is the cutaway view of the formation method of demonstration watertight composition.
Fig. 4 is the cutaway view of the variation example of the display of organic electroluminescence of demonstration the 1st example of the present invention.
Fig. 5 is the cutaway view of the display of organic electroluminescence of demonstration the 2nd example of the present invention.
Label declaration
10 display of organic electroluminescence
11 display base plates
12 substrates
14 next doors
The 14a peristome
15 interlayer dielectrics
The 15a recess
16 organic electroluminescent devices
18 watertight compositions
18a lining portion
18b intervention portion
19 protective layers
20 masks
22 hole portions
24 lower electrodes
26 organic layers
28 upper electrodes
30 base plate for packaging
31 encapsulants
Embodiment
(the 1st example)
Display of organic electroluminescence
Referring now to drawing so that the 1st example of display of organic electroluminescence of the present invention to be described.
Display of organic electroluminescence of the present invention 10 shown in Figure 1 has: substrate 12; Be configured on the substrate 12, be formed with the next door 14 of a plurality of peristome 14a as insulating component; Be formed on the organic electroluminescent device 16 in the peristome 14a; Be formed on the surface in next door 14 and constitute on the lower electrode 24 of organic electroluminescent device 16, as the watertight composition 18 of the 1st protective layer; The protective layer 19 of conduct the 2nd protective layer of protection organic electroluminescent device 16; And and substrate 12 between form the base plate for packaging 30 of confined space.
This next door 14 has and prevents adjacent organic electroluminescent device 16 function of short circuit each other.In addition, when forming organic electroluminescent device 16, then has function as the supporter that supports deposition mask by mask evaporation.In addition, next door 14 also can be wideer than the bottom by its top is formed, and make the function that itself has as mask.
The material in next door 14, for example for using photosensitive minus photoresistance, it is mainly formed by the organic material or the organic resin of phenolic aldehyde system or propylene resin etc.Therefore, next door 14 has the character of the moisture of the outer gas of easy absorption.Generally, next door 14 is by existing photolithographic techniques, spin-coating method etc. formed in the past.
Configuration organic electroluminescent device 16 in each peristome 14a of next door 14.Organic electroluminescent device 16 is for being divided into 3 kinds (appending white luminous usefulness according to situation) that emitting red light is used, blue-light-emitting is used and green emitting is used.
This organic electroluminescent device 16, its formation comprises haply, lower electrode 24 (being anodal in this example), upper electrode 28 (being negative pole in this example) and the organic layer 26 as functional layer between between lower electrode 24 and upper electrode 28.In addition, organic electroluminescent device 16 also has the aftermentioned watertight composition 18 between organic layer 26 and lower electrode 24.
Constitute the organic luminous layer of organic electroluminescent device 16, make from lower electrode 24 and upper electrode 28 to be coupled again to hole and the electronics that organic luminous layer is supplied with, the energy of being emitted when being coupled again and luminous with given luminance, and show.
The material of organic luminous layer uses as Alq
3Or anthracene, Zn q
2, Bal q
2, Almq
3, Tb (acac)
3, the passing through energising of DCJTB, C545T, perylene, quinoline a word used for translation ketone dielectric medium, lycid alkene, rhodamine etc. and with the luminous organic material of specified wavelength.In addition, the material of hole transporting layer and electron supplying layer is for using NPB, TPD or Alq
3Deng.
On the other hand, the material of relevant lower electrode 24 and upper electrode 28, at organic electroluminescent device 16 is the actinomorphic situation in top, forms upper electrode 28 by transparent or semitransparent metal material, and forms lower electrode 24 by reflection good metal material.On the other hand, be the actinomorphic situation in bottom at organic electroluminescent device 16, form upper electrode 28 by reflection good metal material, form lower electrode 24 by transparent or semitransparent metal material.Relevant transparent metal material or translucent metal material, metal material and these alloys of use ITO, the Mg that can suit, Ca, Ag, Li etc.In addition, relevant reflection good metal material, use Al, the Cu that can suit, metal material and these alloys of Au, Ag etc.
Then, on the surface in above-mentioned next door 14 watertight composition 18 is set.This watertight composition 18 has the set 18a of lining portion of mode with the top and side in lining next door, and get involved lower electrode 24 in the organic electroluminescent device 16 and the 18b of intervention portion between the organic layer 26, form the formation of phase Department in addition continuously with the 18a of lining portion and the 18b of intervention portion.In addition, in this example, watertight composition 18 is for being coated on substrate 12 integral body, and is formed into the end of substrate 12.
This watertight composition 18 is mainly in order to suppress the layer that next door 14 absorbs the organic layer 26 of the moisture of outer gas and the moisture arrival organic electroluminescent device 16 that inhibition is absorbed.Therefore, watertight composition 18 is for having the character of dialling the branch that anhydrates easily as it.Constituting the contact angle of the material of watertight composition 18 with respect to water, is preferable with 80～120 degree.
The thickness of watertight composition 18 for example is set at 0.5nm～20nm, but at the 18b of intervention portion, is preferable to be set at smaller or equal to 10nm.If this is because the thickness of the 18b of intervention portion during greater than 10nm, though very high to the waterproof action of organic layer 26, because the existence of the 18b of intervention portion, make the resistance of organic electroluminescent device 16 itself increase, and cause power consumption also to increase.
In addition, know that through near the regional A the end of substrate 12 relatively (from the zone of 1 μ m inwards, the end of substrate 12) with after the thickness of watertight composition 18 is for being preferable (with reference to the amplification view of Fig. 1) to have the part that regional A is reduced than near the more close area inside B of regional A the end of substrate 12.Its reason be because when the thickness of watertight composition 18 when regional A reduces, the internal stress of watertight composition 18 also reduces, and can prevent peeling off of watertight composition 18.
Constitute the waterproof material of watertight composition 18, be that resin, vinyl chloride resin etc. have water proofing property for using, and can prevent adjacent organic electroluminescent device 16 short circuit each other, and have the material of suitable insulating properties as fluorine resin, silicon.When forming watertight composition 18, to satisfy CH by fluorine resin
xF
yConsisting of of (0≤x≤1,0.3≤y≤2,1.3≤x+y≤2) is preferable.CF
xOr CH
xF
yFilm has the character that approaches polytetrafluoroethylene.
And, on watertight composition 18, organic electroluminescent device 16, be coated with protective layer 19.This protective layer 19 is not for being subjected to the intrusion of outside moisture in order to protection organic electroluminescent device 16, be that the inanimate matter material by SiN or SiO system etc. forms.Generally, this protective layer 19 is for forming by the film formation technology of existing vacuum vapour deposition, CVD method etc. in the past.
In addition, on the substrate 12 by encapsulant 31 dispose and substrate 12 between formation confined space base plate for packaging 30.Base plate for packaging 30 is not for being subjected to the outside object or the infringement of moisture in order to protection organic electroluminescent device 16.In the situation of the actinomorphic organic electroluminescent device in top, base plate for packaging 30 is for forming by transparent material (for example, glass or polyimide etc.).On the other hand, in the situation of the actinomorphic organic electroluminescent device in bottom, base plate for packaging 30 also can be opaque material.Again, encapsulant 31 is in order to substrate 12 and base plate for packaging 30 is in addition bonding, forms and surrounds the picture element zone.
The manufacture method of display of organic electroluminescence
Secondly, the manufacture method of above-mentioned display of organic electroluminescence is described with reference to the 2nd figure.
(1) at first, shown in Fig. 2-1, prepare to possess: substrate 12, the display base plate 11 that is formed with the next door 14 of a plurality of peristome 14a and is formed on lower electrode 24 in each peristome 14a etc.
The formation of lower electrode 24, for example be the situation that the metal material by ITO, Al etc. constitutes, by existing film in the past form technology, particularly for utilizing vapour deposition method, sputtering method etc., after metal material formed specified film thickness, by the technology that adopts light lithography, etching etc. this is processed as given pattern and forms.In addition, next door 14 is coated photosensitive photoresistance (for example, phenolic aldehyde is that resin, epoxy are resin etc.) on the substrate with appointed thickness for using spin-coating method etc., and after carrying out sensitization on the given pattern, not removing not by the soup etching, part forms simultaneously.
(2) secondly, shown in Fig. 2-2, on 14 upper and lower layers of electrode in next door 24, form watertight composition 18.Watertight composition 18 is in situation about for example being made of fluorine resin, by in the atmosphere of the gas of fluorocarbon system, in chamber, produce high vacuum electricity slurry (pressure: (for example than the bigger pressure of 0.3Pa, 0.31Pa～100Pa)), with the gas in the atmosphere be stacked on the top and side in next door 14 or the lower electrode 24 form.At this moment, notice that the watertight composition 18 on the lower electrode 24 becomes smaller or equal to 10nm.In addition, near the thickness of the watertight composition the end of less ground setting substrate 12 18, as shown in Figure 3, can have in the configuration of the end of substrate 12 and make width behind the mask 21 of the taper that substrate 12 sides reduce, form watertight composition 18 again.
In addition, if after forming next door 14 before forming watertight composition 18 and/or during watertight composition 18 formation, in advance the moisture containing ratio in the chamber is set at words smaller or equal to 100ppm, then before forming watertight composition 18 or when forming, the amounts of moisture that are absorbed in the next door 14 can be suppressed for a small amount of.
(3) then, shown in Fig. 2-3, the mask 20 that possesses corresponding to the hole portion 22 of peristome 14a is contacted with on the next door 14 by watertight composition 18.
(4) secondly, use the evaporation of mask 20, shown in Fig. 2-4, form organic electroluminescent device 16.
Specifically, the vapor deposition source that will have deposition material is configured in the below of mask 20 (with the direction of the opposition side of substrate 12), heats this vapor deposition source so that this deposition material evaporation.The deposition material of evaporation is stacked on the substrate 12 in the peristome 14a for the hole portion 22 by mask 20.Utilize above-mentioned principle lamination organic layer 26 and upper electrode 28 successively.Therefore, deposition material is for using the organic material that constitutes organic layer, the metal material (for example, Ca, Mg, LiF/Al, AlLi etc.) that constitutes upper electrode.
(5) after will being formed on watertight composition 18 by the formed protective layer 19 of inorganic material of SiN system that protects organic electroluminescent device 16 or SiO system etc. by the CVD method; come base plate for packaging 12, organic electroluminescent device 16, protective layer 19 etc. with base plate for packaging 30 again, and finish display of organic electroluminescence 10 (Fig. 2-5).
At this, in the step of above-mentioned (3)～(5), have that temperature by the outside rises or pressure inside change etc., and make the water evaporates that is absorbed in next door 14 and be discharged from the situation in 14 outsides in the next door.Even in this case, in this example,, form watertight composition 18 with phase Department state continuously because 14 surfaces are to the surface of lower electrode 24 from the next door, so the moisture that has suppressed to discharge 14 outsides in the next door arrives the situation of the organic layer 26 of organic electroluminescent device 16.Therefore, can prolong the life-span of display of organic electroluminescence.
More than, according to the 1st example, because the surface of next door 14 forms watertight composition 18, so when making display of organic electroluminescence, can suppress the situation that next door 14 absorbs moisture well.In addition, even being absorbed in the moisture in next door 14 evaporates after finishing display of organic electroluminescence and is thrown into outside this next door 14, but because of the moisture that is thrown into outside the next door 14, enclosed between watertight composition 18 and the next door 14 or between watertight composition 18 and the lower electrode 24, arrived organic layer 26 so can suppress moisture.Therefore, the deterioration of organic layer 26 can be significantly suppressed, long-life display of organic electroluminescence can be realized.
In addition, by being at the thickness setting of the watertight composition 18 between lower electrode 24 and the organic layer 26, can fully suppress the situation of the luminous required power consumption increase of organic electroluminescent device 16 smaller or equal to 10nm.
In addition, by with watertight composition 18 continuously and phase Department be formed on substrate integral body, have and on watertight composition 18, be difficult to produce the effect of peeling off.In addition, according to the present invention, reduce near the substrate end by the thickness that makes watertight composition 18, the internal stress with watertight composition 18 reduces, and is difficult to remarkable result that watertight composition 18 is peeled off.
In addition, according to the present invention, if the moisture containing ratio that will form before the watertight composition 18 and/or form in watertight composition 18 atmosphere afterwards is set at smaller or equal to 100ppm, can lower the amount of moisture that forms before the watertight composition 18, is absorbed in next door 14 when forming, its result can more prolong life-span of display of organic electroluminescence.
In above-mentioned the 1st example,, also can use organic layer and inorganic layer as functional layer though use organic layer 26 as functional layer again.Under this situation, be preferable so that hole injection layer and/or electron injecting layer are made inorganic layer.The material of inorganic layer can exemplify out lithium fluoride, calcirm-fluoride, titanium oxide, nickel oxide, molybdenum oxide, vanadium oxide etc.
In addition, in above-mentioned the 1st example, as shown in Figure 4, the periphery of watertight composition 18 is positioned at than protective layer 19 periphery insides.In the fluorine-containing situation of watertight composition 18; because watertight composition 18 is very not high with the connecting airtight property of other materials; so; as if the words that as Fig. 4, constitute display of organic electroluminescence; can the end regions of protective layer 19 be coated on the substrate 12 by watertight composition 18; even form watertight composition 18, still can keep the connecting airtight property of 19 pairs of substrates of protective layer to heavens.Its result can further improve the encapsulation of 19 pairs of organic electroluminescent devices 16 of protective layer.
In addition, in above-mentioned the 1st example, as shown in Figure 4, can not make watertight composition 18 be coated on the formation zone of encapsulant 31, make the periphery of watertight composition 18 be positioned at inside than encapsulant 31.At this situation, can encapsulant 31 be coated on the substrate 12 by watertight composition 18.Its result can keep the connecting airtight property of 31 pairs of substrates 12 of encapsulant to heavens, can hermetic keep the space that is surrounded by between substrate 12, base plate for packaging 30 and the encapsulant 31.
(the 2nd example)
The display of organic electroluminescence of this example is different with the 1st example, as shown in Figure 5, uses interlayer dielectric 15 to be used as distinguishing the insulating component of adjacent organic electroluminescent device 16.So, even for omitting the formation in next door 14, when forming interlayer dielectric 15 by organic resin because interlayer dielectric 15 absorbs moisture easily, so identical with the 1st example, utilize form watertight composition 18 effectively correspondence this.At this, watertight composition 18 is covered to the surface of interlayer dielectric 15 continuously from the surface of lower electrode 24.
Therefore, interlayer dielectric 15 is not easy to absorb moisture in the manufacture process of display of organic electroluminescence, even interlayer dielectric 15 has absorption moisture, invades organic layer 26 but still can suppress moisture well by watertight composition 18.In addition, next door 14 can be omitted, the formation of display of organic electroluminescence can be simplified.
In addition, because recess 15a is set on interlayer dielectric 15, and with the width setup of recess 15a is that the bottom is wideer than the top of recess 15a, so can separate upper electrode 28 well by recess 15a, can keep the electric insulating quality of 16 of adjacent organic electroluminescent devices well.Again, in the situation that recess 15a is set, though form the 1st protective layer 18 along the inner face of recess 15a, with in the absorption of the moisture that can prevent interlayer dielectric 15 well or on to the viewpoint of the discharge of the moisture of organic layer 26 for preferable.
The invention is not restricted to the above-mentioned the 1st and the 2nd example, only otherwise exceed essential scope of the present invention, can do all improvement and variation.
Claims (12)
1. a display of organic electroluminescence is characterized in that having
Substrate;
Be arranged in a plurality of organic electroluminescent devices on this substrate, this organic electroluminescent device has lower electrode, upper electrode and between described lower electrode and upper electrode, and contains the functional layer that organic luminous layer constitutes;
Be configured in the insulating component between described adjacent organic electroluminescent device; And
The 1st protective layer, the 1st protective layer forms to the surface of described insulating component continuously from the zone between described lower electrode and the described functional layer, and the 1st protective layer contains fluorine.
2. a display of organic electroluminescence is characterized in that having
Substrate;
Be arranged in a plurality of organic electroluminescent devices on this substrate, this organic electroluminescent device has lower electrode, upper electrode and between described lower electrode and upper electrode, and contains the functional layer that organic luminous layer constitutes;
Be configured in the insulating component between described adjacent organic electroluminescent device; And
The 1st protective layer, the 1st protective layer forms to the surface of described insulating component continuously from the zone between described lower electrode and the described functional layer, and the 1st protective layer comprises waterproof material.
3. display of organic electroluminescence as claimed in claim 1 or 2 is characterized in that,
Described the 1st protective layer is smaller or equal to 10nm with the thickness setting in the zone between described lower electrode and the described functional layer.
4. display of organic electroluminescence as claimed in claim 2 is characterized in that,
Described the 1st protective layer contains fluorine.
5. as claim 1 or 4 described display of organic electroluminescence, it is characterized in that,
Described the 1st protective layer has CH
xF
yComposition, in the formula, 0≤x≤1,0.3≤y≤2,1.3≤x+y≤2.
6. display of organic electroluminescence as claimed in claim 1 is characterized in that,
Described the 1st protective layer is formed on described substrate on the whole.
7. display of organic electroluminescence as claimed in claim 6 is characterized in that,
Near the thickness of described the 1st protective layer described substrate end reduces.
8. display of organic electroluminescence as claimed in claim 1 is characterized in that,
The 2nd protective layer that also has the described organic electroluminescent device of lining,
The periphery of described the 1st protective layer more is positioned at the inboard than described the 2nd protective layer periphery.
9. display of organic electroluminescence as claimed in claim 1 is characterized in that also having
Be configured in the base plate for packaging on the described substrate; And
Between described substrate and described base plate for packaging, form the encapsulant of the arrange regional that surrounds described a plurality of organic electroluminescent devices,
The periphery of described the 1st protective layer more is positioned at the inboard than the formation zone of described encapsulant.
10. the manufacture method of a display of organic electroluminescence is characterized in that, comprises following steps
Prepare display base plate, the lower electrode that this display base plate has substrate, is formed on the insulating component on the described substrate portion zone and disposes at least a portion in the zone that does not form described insulating component on the described substrate;
Form the 1st protective layer, the 1st protective layer disposes continuously and contains fluorine from the surface of described insulating component to the surface that is positioned at the described lower electrode on the zone that does not form described insulating component; And
In order to form organic electroluminescent device, and on described the 1st protective layer that is positioned on the described lower electrode, form the functional layer that comprises organic luminous layer, and form upper electrode comprising on the functional layer of organic luminous layer.
11. the manufacture method of display of organic electroluminescence as claimed in claim 10 is characterized in that,
Described the 1st protective layer will be smaller or equal to 10nm between the thickness setting in the zone between described lower electrode and the described functional layer.
12. the manufacture method as claim 10 or 11 described display of organic electroluminescence is characterized in that,
Before the formation of described the 1st protective layer and/or the moisture containing ratio in the atmosphere when forming be set at smaller or equal to 100ppm.
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|---|---|---|---|
| JP2005189695 | 2005-06-29 | ||
| JP2005189695 | 2005-06-29 | ||
| JP2006145736 | 2006-05-25 |
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| CN100479182C true CN100479182C (en) | 2009-04-15 |
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| CN103427026A (en) * | 2012-05-14 | 2013-12-04 | 海洋王照明科技股份有限公司 | Organic light-emitting device and preparation method thereof |
| CN110299471B (en) * | 2019-06-28 | 2021-09-07 | 昆山工研院新型平板显示技术中心有限公司 | Display panel, display device and preparation method of display panel |
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2006
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