CN100472791C - Imaging element - Google Patents
Imaging element Download PDFInfo
- Publication number
- CN100472791C CN100472791C CNB2006800006887A CN200680000688A CN100472791C CN 100472791 C CN100472791 C CN 100472791C CN B2006800006887 A CNB2006800006887 A CN B2006800006887A CN 200680000688 A CN200680000688 A CN 200680000688A CN 100472791 C CN100472791 C CN 100472791C
- Authority
- CN
- China
- Prior art keywords
- filter
- mentioned
- light
- red
- imaging apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
An imaging element (1) has a filter (2) used to extract specific color components in incident light and a light receiving element (3) for observing the incident light through the filter (2). The filter (2) includes a transparent filter (2W), a yellow filter (2Y) used to extract a yellow component, and a red filter (2R) used to extract a red component.
Description
Technical field
The present invention relates to the balance of look and the good imaging apparatus of reproducibility of look.
Background technology
The picture pick-up device that uses in digital camera and video camera comprised imaging apparatus in the past.Imaging apparatus possesses as a pair of by photo detector and the colour filter with CMOS, CCD etc., thus color image shot.
Photo detector is the parts of output corresponding to the signal of telecommunication of incident light intensity.This photo detector only detects the brightness of incident light, does not carry out the differentiation of the look of incident light.So, in a side of the light incident of each photo detector (below, be also referred to as the incident light side) colour filter is set, from incident light, extract specific colour content.Thus, observe the light of the colour content of extracting by photo detector.In addition, the light that will extract the special color composition from incident light is called " look separation ".
At length say,, be provided as trichromatic red (R), green (G) of light, the colour filter of blue (B) in the incident light side of photo detector.Before arriving photo detector, separated and extract specific light from the incident light of object of observation by the colour filter look.The light that is extracted arrives and the opposed photo detector of each colour filter, is the signal of telecommunication by light-to-current inversion.Thus, obtain the trichromatic output valve (being generally magnitude of voltage) of the light in the incident light.And, synthetic by the output valve that will obtain, can be with object of observation as color image reproduction.
In addition, general colour filter is to utilize developer solution to develop after composition exposure on the photosensitive resin by " photoetching process ", thereby composition forms the pattern that needs.In addition, in using photolithographic exposure machine, there are stepping exposure device, aligning exposure machine, mirror surface projection to aim at exposure machine etc.Under the situation of high pixelation of needs and granular, use the stepping exposure machine.
But, for such imaging apparatus, the requirement raising of many pixelations in recent years and granular of pixel constantly develops.Particularly, pel spacing is broken through 3 μ m and is become about 2 μ m.If become pel spacing and be the trickle pixel about 2 μ m, then the area of each pixel diminishes.Therefore, the light quantity that incides photo detector reduces.As a result, exist the sensitivity of imaging apparatus to reduce the situation of picture element decline (becoming dark image).
As mentioned above, in imaging apparatus in the past, separate, set indigo plant, green, red trichromatic colour filter in the incident light side of photo detector for the light from object of observation being carried out look.The spectral transmission of such indigo plant, green, red trichromatic colour filter one for example shown in Figure 1.In this Fig. 1, transverse axis is represented wavelength, and the longitudinal axis is represented transmissivity.As shown in Figure 1, the apex of blue, green transmissivity becomes the value about 80%.That is, blue, green colour filter reduces so arrive the light quantity of photo detector because transmissivity is lower.As a result, picture element decline (becoming dark image).
And then photo detectors such as CMOS and CCD have the sensitivity district of light wavelength for the broad of about 400nm～1000nm.Particularly, as shown in Figure 2, near the SPD of photo detector (Silicon Photo Diode, the photoelectric receiving diode) wavelength zone of sensitivity 700nm demonstrates higher value.That is, near red wavelength zone (700nm), has high sensitivity.But along with advancing to short wavelength region, sensitivity descends, and (becomes the sensitivity about red half near the 400nm～500nm) at the wavelength zone of indigo plant.
By above explanation as can be known, in the imaging apparatus with indigo plant, green, red trichromatic colour filter, the sensitivity of photo detector is low in the zone of indigo plant.In addition, compare with the transmissivity of red and green colour filter, the transmissivity of blue colour filter is low.
Therefore, in imaging apparatus in the past, compare with red and green, blue reproducibility, look expression power are poor, and existence can not be reproduced the problem of the balance of look closely.
For this problem, for the decline of the light quantity that corresponds to photo detector, having proposed to use the complementary color that is made of blue or green (C), pinkish red (M), yellow (Y) is the technology (for example opening communique 2002-No. 51350 with reference to the spy) of colour filter.
In this technology,, can extract the synthetic light of red (R) and green (G) by using the colour filter of Huang (Y).In addition, by using the colour filter of magenta (M), can extract the synthetic light of red (R) and blue (B).In addition, by using the colour filter of green grass or young crops (C), can extract the synthetic light of green (G) and blue (B).That is, owing to the light of transmission dichromatism in the colour filter of complementary color system, so can improve the optical transmission rate.Thus, can suppress to incide the decline of the light quantity of the incident light in the imaging apparatus.
But, for from transmission extract blue, green, red trichromatic light blue or green, pinkish red, the light that yellow complementary color is colour filter, need carry out complex calculations.
For example, need carry out the calculating of indigo plant=(green grass or young crops+magenta-Huang)/2, green=(green grass or young crops+Huang-magenta)/2, red=(magenta+Huang-green grass or young crops)/2 etc. according to the observation value of each filter.
Fig. 3 is that expression general C, M, the complementary color of Y are the curve chart of the dichroism of colour filter.As mentioned above, in the colour filter of complementary color system, obtain being equivalent to trichromatic observation value by computing.But as shown in Figure 3, each filter of complementary color system makes the also transmission of light in optical wavelength district that should shading.And then each filter of complementary color system answers transmissivity in the wavelength zone of shading to the deviation that exists of all kinds shown in u1, the u2 of Fig. 3, u3.Because this deviation makes to comprise noise contribution in the value of operation result.
Therefore, be in the imaging apparatus of colour filter using complementary color,, compare the problem that exists color reproduction (look separation property) to descend though highly sensitive noise increases with trichromatic colour filter.
Summary of the invention
The present invention makes in view of above-mentioned actual conditions, and its purpose is to provide a kind of colour balance and the good imaging apparatus of color reproduction.
The present invention provides a kind of imaging apparatus in order to solve above-mentioned problem, possesses: filter is used for extracting the specific colour content of incident light; Photo detector is observed above-mentioned incident light via above-mentioned filter; Above-mentioned filter comprises transparent filter, is used to extract the yellow filter of Huang Cheng's branch and the red filter that is used to extract red composition.
Description of drawings
Fig. 1 is the figure of an example that represents the spectral transmission of imaging apparatus in the past.
Fig. 2 is the figure of the relation of the wavelength of the sensitivity (SPD sensitivity) of expression people's visual sensitivity, photo detector, desirable infrared intercepting filter and transmissivity.
Fig. 3 is the figure of dichroism of the colour filter of general C, the M of expression, Y complementary color system.
Fig. 4 is the plane graph of ordered state one example of the filter of the imaging apparatus 1 that relates to of expression the 1st execution mode of the present invention.
Fig. 5 is the cutaway view of an example of the imaging apparatus 1 that relates to of this execution mode of expression.
Fig. 6 is the figure of an example of the spectral transmission of the transparent filter 2W that relates to of this execution mode of expression, yellow filter 2Y, red filter 2R.
Fig. 7 is the figure of an example of the spectral transmission of the apparent blue filter that obtains of the computing of the imaging apparatus 1 that relates to by this execution mode of expression, green filter, red filter.
Fig. 8 is the figure of example that represents the dichroism of imaging apparatus in the past.
Fig. 9 is the cutaway view of an example of the imaging apparatus 9 that relates to of expression the 2nd execution mode of the present invention.
Figure 10 is the cutaway view of an example of the imaging apparatus 11 that relates to of expression the 3rd execution mode of the present invention.
Figure 11 is the figure of the manufacturing process of the imaging apparatus 11 that is used to illustrate that this execution mode relates to.
Figure 12 is the figure of the manufacturing process of the imaging apparatus 11 that is used to illustrate that this execution mode relates to.
Figure 13 is the figure of the manufacturing process of the imaging apparatus 11 that is used to illustrate that this execution mode relates to.
Figure 14 is the figure of manufacturing process that is used for illustrating the imaging apparatus 11 of relevant this execution mode.
Figure 15 is the figure of the manufacturing process of the imaging apparatus 11 that is used to illustrate that this execution mode relates to.
Figure 16 is the plane graph of configuration one example of the photomask 19 of the imaging apparatus 17 that relates to of expression the 4th execution mode of the present invention.
Figure 17 is the front view of ordered state one example of the filter of the imaging apparatus 31 that relates to of expression the 5th execution mode of the present invention.
Figure 18 is the cutaway view of an example of the imaging apparatus 31 that relates to of this execution mode of expression.
Figure 19 is the figure of another example of the imaging apparatus 31 that relates to of this execution mode of expression.
Figure 20 is the figure of an example of the spectral transmission of the compensation filter 2Blk, the transparent filter 2W that relate to of this execution mode of expression, yellow filter 2Y, red filter 2R.
Figure 21 is the figure of an example of the spectral transmission of the apparent blue filter that obtains of the computing of the imaging apparatus 31 that relates to by this execution mode of expression, green filter, red filter.
Figure 22 is the figure of the dichroism of the compensation filter that relates to of this execution mode of expression.
Figure 23 is the figure of the dichroism of the general absorptive-type infrared intercepting filter of expression.
Figure 24 is the cutaway view of an example of the imaging apparatus 39 that relates to of expression the 6th execution mode of the present invention.
Figure 25 is the cutaway view of an example of the imaging apparatus 41 that relates to of expression the 7th execution mode of the present invention.
Figure 26 is the front view of the 1st example of configuration of the photomask 19 of the imaging apparatus 47 that relates to of expression the 8th execution mode of the present invention.
Figure 27 is the cutaway view of the imaging apparatus 47 that relates to of this execution mode of expression.
Figure 28 is the cutaway view of the 2nd example of configuration of the photomask 19 of the imaging apparatus 44 that relates to of this execution mode of expression.
Figure 29 is the figure of the spectral transmission characteristic of the compensation filter that relates to of expression the 9th execution mode of the present invention.
Figure 30 is the figure of the spectral transmission characteristic of the compensation filter that relates to of this execution mode of expression.
Figure 31 is the figure of the dichroism of the compensation filter that relates to of expression the 10th execution mode of the present invention.
Figure 32 is the schematic diagram of the structure of the imaging apparatus that relates to of expression the 11st execution mode of the present invention.
The figure of the notion of the ordered state that Figure 33 is expression when the incident light side is seen colour filter the image pickup part 110 that this execution mode relates to.
Figure 34 A is the figure of an example in the cross section of the image pickup part 110 that relates to of this execution mode of expression.
Figure 34 B is the figure of an example in the cross section of the image pickup part 110 that relates to of this execution mode of expression.
Figure 35 is the figure of the action of the imaging apparatus that is used to illustrate that this execution mode relates to.
Figure 36 is the figure of the variation of expression optical wavelength to the values of human eye.
Figure 37 A is the figure of the manufacture method of the image pickup part 110 that is used to illustrate that the 12nd execution mode of the present invention relates to.
Figure 37 B is the figure that is used to illustrate the manufacture method of image pickup part 110.
Figure 37 C is the figure that is used to illustrate the manufacture method of image pickup part 110.
Figure 37 D is the figure that is used to illustrate the manufacture method of image pickup part 110.
Figure 38 A is the figure that is used to illustrate the manufacture method of image pickup part 110.
Figure 38 B is the figure that is used to illustrate the manufacture method of image pickup part 110.
Figure 38 C is the figure that is used to illustrate the manufacture method of image pickup part 110.
Figure 38 D is the figure that is used to illustrate the manufacture method of image pickup part 110.
Figure 38 E is the figure that is used to illustrate the manufacture method of image pickup part 110.
Figure 39 is the figure of another example of the imaging apparatus that relates to of this execution mode of expression.
Figure 40 is the figure of another example of the imaging apparatus that relates to of this execution mode of expression.
Figure 41 is the schematic diagram of the imaging apparatus structure that relates to of expression the 13rd execution mode of the present invention.
Figure 42 is the figure of the notion of the ordered state when the incident light side is seen colour filter 114 the image pickup part 110T that this execution mode relates to.
Figure 43 A is the cutaway view of the example of the image pickup part 110T that relates to of this execution mode of expression.
Figure 43 B is the cutaway view of the example of the image pickup part 110T that relates to of this execution mode of expression.
Figure 44 is the figure of another example of the image pickup part 110T that relates to of this execution mode of expression.
Figure 45 is the figure that concerns between the wavelength of the sensitivity (SPD sensitivity) of expression people's visual sensitivity, photo detector, desirable infrared intercepting filter and the transmissivity.
Figure 46 is the figure that concerns between the reflective infrared intercepting filter of expression and light wavelength in the absorptive-type infrared intercepting filter and the transmissivity.
Figure 47 is the figure of dichroism of the planarization layer of expression the 1st embodiment of the present invention.
Figure 48 is the figure of the dichroism of the transparent filter 114W, the yellow filter 114Y that relate to of expression the 1st embodiment, red filter 114R, compensation filter 114Blk.
Figure 49 is the figure of the dichroism of the apparent blue filter that obtains of the computing of the imaging apparatus that relates to by the 1st embodiment of expression, green filter, red filter.
Figure 50 is the figure of the dichroism of the transparent resin that relates to of expression the 2nd embodiment of the present invention.
Figure 51 is the figure of the dichroism of the transparent filter 114W, the yellow filter 114Y that relate to of expression the 2nd embodiment, red filter 114R, compensation filter 114Blk.
Figure 52 is the figure of the dichroism of the apparent blue filter that obtains of the computing of the imaging apparatus that relates to by the 2nd embodiment of expression, green filter, red filter.
Figure 53 is the figure of an example of the dichroism of filter F1～F7 of relating to of expression the 14th execution mode of the present invention.
Figure 54 is the figure of the notion of the apparent colour filter that is used to illustrate that this execution mode relates to.
Figure 55 is the front view of an example of the imaging apparatus that relates to of expression the 15th execution mode of the present invention.
Figure 56 is the figure of an example of the dichroism of filter F1～F7 of relating to of this execution mode of expression.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.In addition, give identical mark for identical key element in the following description, and omit its explanation.
＜the 1 execution mode 〉
In the present embodiment, illustrate that the light incident side at photo detectors such as CMOS, CCD is provided with the imaging apparatus that filter layer is observed the colour content of object of observation.
Fig. 4 is the plane graph of an example of ordered state of the filter of the imaging apparatus that relates to of expression present embodiment.Expression is from the example of the state of the filter of light incident side observation in Fig. 4.
Fig. 5 is the cutaway view of an example of the imaging apparatus that relates to of expression present embodiment.Figure 5 illustrates I-I ' cross section of Fig. 4.In addition, be that the situation of CMOS is that example illustrates with the photo detector at Fig. 5, but be also identical under the situation of CCD at photo detector.Below, in other cutaway views of imaging apparatus, also be same structure.
Incident light photo detector 3W is corresponding to transparent filter 2W, via transparent filter 2W observation incident light.
Operational part 4 possesses blue operational part 4B, green operational part 4G, red operational part 4R.Operational part 4 has the function that observation value Dw, Dy according to incident light photo detector 3W, yellow photo detector 3Y, red photo detector 3R obtains blue observation value Db and green observation value Dg.
Blue operational part 4B deducts the observation value Dy by yellow photo detector 3Y observation from the observation value Dw by incident light photo detector 3W observation, obtain blue observation value Db (=Dw-Dy).
Green operational part 4G deducts the observation value Dr by red photo detector 3R observation from the observation value Dy by yellow photo detector 3Y observation, obtain green observation value Dg (=Dy-Dr).
That is, if the look of establishing corresponding to transparent filter 2W, yellow filter 2Y, red filter 2R is respectively white (W), yellow (Y), red (R), then the relational expression of Yi Xia (1) formula and (2) formula is set up.
Blue (B)=white (W)-yellow (Y) ... (1)
Green (G)=yellow (Y)-red (R) ... (2)
In Fig. 5, expression is with yellow filter 2Y and transparent filter 2W is cross-sectional and with yellow photo detector 3Y and the cross-sectional section of incident light photo detector 3W.In addition, with other filters and the cross-sectional section of other photo detectors, also be same structure.
Light incident side at semiconductor substrate 5 is formed with photo detector 3.
On the face of the light incident side of the semiconductor substrate 5 that is formed with photo detector 3, be laminated with planarization layer 6.Thus, can make filter layer 2 form the smooth face that is provided with.As the material of planarization layer 6, can use one or more resin of the resin that contains propylene class or epoxies, polyimide, ammonia ester class, melamine class, polyesters, urea class, phenylethylene etc.
At the light incident side of planarization layer 6, be formed with filter layer 2 corresponding to photo detector 3, in addition,, be laminated with resin bed (transparent planarization layer) 7 at the light incident side of filter layer 2.
At the light incident side of resin bed 7, possesses lenticule 8 corresponding to photo detector 3.
In addition, in the present embodiment, the thickness of each filter layer 2 is respectively 1.4 μ m, and pel spacing (spacing of transparent filter 2W, yellow filter 2Y, red filter 2R) is 2.6 μ m.
In above-mentioned planarization layer 6, be added with ultra-violet absorber.Particularly, planarization layer 6 is formed by the allyl resin of the thermohardening type that has added ultra-violet absorber, and thickness forms 0.3 μ m.It is in order to prevent when utilizing photoetching process to form filter layer 2 from forming the good filter of shape as the halation of the pattern exposure light of the semiconductor substrate 5 of substrate that planarization layer 6 is added ultra-violet absorbers.In addition,, photo-sensitive resin is carried out pattern exposure and development etc. here, make photoresist remain in the regulation position by photoetching process.
In addition, be formed with planarization layer 6 in the present embodiment, but, can omit planarization layer 6 to be purpose with the further attenuate of imaging apparatus.
In addition, in the present embodiment, transparent filter 2W is formed by the photonasty allyl resin (refractive index n=1.55) of alkali soluble type.
In addition, yellow filter 2Y and red filter 2R utilize in the transparent resin (photonasty allyl resin) use in the formation of transparent filter 2W, add the organic pigment of regulation and the coloring phototonus resin that disperses forms.For example, as the organic pigment that in the formation of yellow filter 2Y, uses, can enumerate C.I.Pigment Yellow 150.In addition, can use also that C.I.Pigment Yellow 150 and C.I.Pigment Yellow's 139 mix class pigment.In addition, as the organic pigment that in the formation of red filter 2R, uses, can enumerate the mixing of C.I.Pigment Red 177, C.I.Pigment Red 48:1 and C.I.Pigment Yellow139 etc.In addition, transparent filter 2W also can be formed by the transparent resin that does not add painted thing.
Fig. 6 is the curve chart of expression about an example of the spectral transmission of transparent filter 2W, yellow filter 2Y, red filter 2R.
Fig. 7 is the curve chart of an example of the spectral transmission of the apparent blue filter that obtains about the computing by imaging apparatus 1 of expression, green filter, red filter.If the spectral transmission of the apparent blue filter of imaging apparatus more shown in Figure 71 and green filter and in the past the spectral transmission of blue and green colour filter shown in Figure 1, then the transmissivity of the apparent blue filter of imaging apparatus 1 and green filter has the high feature of transmissivity than in the past blue and green filter.Particularly, the transmissivity height of the transmissivity of apparent blue filter ratio blue filter in the past.Therefore, the indigo plant of the imaging apparatus 1 that present embodiment relates to highly sensitive, colour balance is good.
And then imaging apparatus 1 that the comparison present embodiment relates to and imaging apparatus in the past describe following.
At first, " apparent colour filter " described.
Fig. 8 is the figure of example that represents the dichroism of imaging apparatus in the past.
The dichroism of imaging apparatus in the past think with the sensitivity (Fig. 8 (A)) of photo detector with in the long-pending value equivalence that the transmissivity (Fig. 8 (B)) of the filter of the light incident side configuration of photo detector multiplies each other, as Fig. 8 (C), represent.
Shown in Fig. 8 (B), the transmissivity of the colour filter of the indigo plant in the imaging apparatus in the past is lower than the transmissivity of red and green colour filter.In addition, shown in Fig. 8 (A), the sensitivity in the red and green wavelength zone of the remolding sensitivity of the photo detector in the blue wavelength zone is low.Therefore, if ask remolding sensitivity in imaging apparatus in the past, then (blue/green) is littler than (red/green).Therefore, color reproduction step-down.
With respect to this, the imaging apparatus 1 in the present embodiment possesses transparent filter 2W, yellow filter 2Y, red filter 2R, replaces the colour filter as trichromatic red, green, blue.Therefore, the dichroism of the imaging apparatus in the present embodiment 1 is thought the long-pending value equivalence that multiplies each other respectively with transmissivity with the sensitivity of photo detector and the transparent filter 2W that sets at the light incident side of photo detector, yellow filter 2Y, red filter 2R.The colour filter of the transmissivity BELAND of transparent filter 2W, yellow filter 2Y, red filter 2R and green colour filter height.Thereby, observed under the situation of incident light through transparent filter 2W, yellow filter 2Y, red filter 2R by incident light photo detector 3W, yellow photo detector 3Y, red photo detector 3R, the observation value Db, the Dg that calculate according to its observation value Dw, Dy, Dr can be described as the observed result that obtains by high transmissivity.Particularly, the observation value Db for indigo plant can increase the remolding sensitivity of (blue/green), can improve color reproduction.
And then, in the present embodiment, can obtain blue observation value Db and green observation value Dg by 1 time subtraction process.Thereby, compare with the imaging apparatus of the colour filter that uses complementary color system in the past, computing is oversimplified, can show the bright-coloured look that approaches primary colors.
Then, " noise that dark current brings " described.
Shown in Fig. 8 (C), even photo detector does not have at light can produce faint electric current under the situation of incident yet.Although not having light incident but be called " dark current (dark current) " from the electric current that photo detector flows out like this becomes the reason of noise.Indigo plant in the past, green, red trichromatic colour filter are the light transmissive colour filter that makes the wavelength zone of regulation on dichroism, also have the wavelength zone of shield light.
But, in photo detector, in the wavelength zone of shield light, also produce dark current.Therefore, in the observed result of in the past imaging apparatus, the observed result of the light in making light transmissive wavelength zone, also comprise the noise of dark current, this noise can make color reproduction descend sometimes.
With respect to this, the imaging apparatus 1 that present embodiment relates to carries out subtraction process with the observation value Dw of incident light photo detector 3W and the observation value Dy of yellow photo detector 3Y as described above, the observation value Dy of yellow photo detector 3Y and the observation value Dr of red photo detector 3R are carried out subtraction process, so the value of dark current offsets.Therefore, can from observed result, remove denoising, can improve color reproduction.
Then, " floating of beam split " described.
Shown in Fig. 8 (B), in the spectral transmission of in the past indigo plant, green, red colour filter, low several percentage points of the transmissivity of the trailing edge of the branch light curve of the colour filter of Lan Hehong, the transmissivity of the trailing edge of the branch light curve of green colour filter is high by about 10%.Like this, the trailing edge height is called floating greatly of beam split.
In imaging apparatus in the past, the trailing edge of the branch light curve of green colour filter is present in the wavelength zone of Lan Jihong.In addition, the beam split of green trailing edge is unsteady bigger.Therefore, in green observed result, blue and red colour mixture, the problem that exists green reproducibility to descend.
With respect to this, in the imaging apparatus 1 that present embodiment relates to, the observation value Dy of yellow photo detector 3Y and the observation value Dr of red photo detector 3R are carried out subtraction process, obtain green observation value Dg.Therefore, floating of beam split can be reduced, color reproduction can be improved.
Then, " ultra-violet absorber and infrared absorbent " described.
The photo detector of CMOS and CCD etc. has some sensitivity to the imperceptible ultraviolet range of people.Therefore, filter layer that present embodiment relates to 2 is preferred to be absorbed the following light of 400nm and not to make its transmission, and does not absorb the light of the above wavelength of 400nm and make its transmission.Here, preferably in transparent filter 2W, add light trigger and the curing agent that uses in ultra-violet absorber or the curing, make transparent filter 2W have the ultraviolet radiation absorption function at resin.As ultra-violet absorber, for example can use benzotriazole compound or benzophenone compound, salicylic acid compounds, coumarin kind compound.In addition, in ultra-violet absorber, for example also can add uses such as light stabilizer such as hindered amine compound or quencher.And then suspending to have the functional group of ultraviolet radiation absorption function or it is had at the polymer that is used for the resin that transparent filter 2W forms or monomer or curing agent is taken into base such in the polymer and carries out polymerization.For example, also quinones or anthracene can be imported in the polymer, also the base of ultraviolet-absorbing can be added in the monomer.In addition, so-called suspending is meant that the form with response type absorbent etc. is combined in the molecular resin chain.
Moreover, preferably infrared ray-absorbable compound or infrared absorbent are added in the resin that constitutes transparent filter 2W.For example add in the resin that constitutes transparent filter 2W by the mode of suspending.
Moreover according to present embodiment, filter layer 2 is two pixels by making yellow filter 2Y, makes transparent filter 2W and red filter 2R be respectively the unit that 4 pixels formation looks separate that amounts to of 1 pixel.Therefore, when obtaining blue and green observation value, do not need to reuse yellow data value.That is, in operational part 4, can in a unit, carry out the calculation process of { (in vain)-(Huang) } and { (Huang)-(red) } individually.Thus, can realize the high speed of calculation process.
As described above, the imaging apparatus 1 that present embodiment relates to just can be regarded the imaging apparatus that has possessed high radioparent blue filter and green filter as in appearance by 1 subtraction process, particularly compares with imaging apparatus in the past and has improved blue accuracy of observation.
＜the 2 execution mode 〉
In the present embodiment, the variation of the imaging apparatus 1 that the 1st execution mode is related to describes.In addition, the imaging apparatus 9 that present embodiment relates to is in the imaging apparatus 1 that the 1st execution mode relates to transparent filter 2W and resin bed 7 one to be constituted.In addition, give identical mark, and omit explanation for the part identical with the part that has illustrated.
Fig. 9 is the cutaway view of an example of the imaging apparatus that relates to of expression present embodiment.Fig. 9 is the figure corresponding to I-I ' cross section of Fig. 4.In addition, transparent filter 10W is equivalent to the transparent filter 2W and the resin bed 7 of the 1st execution mode.
The position configuration of the transparent filter 2W that the imaging apparatus 9 that present embodiment relates to relates at the 1st execution mode the part of transparent filter 10W.
Other parts of transparent filter 10W cover the face of the light incident side of yellow filter 2Y and red filter 2R.That is, transparent filter 10W be transparent filter 2W that the 1st execution mode is related to and resin bed 7 as the structure of one, also have effect as transparent planarization layer.
Same with the 1st execution mode, imaging apparatus 9 carries out computing (subtraction) according to observation value Dw, Dy, the Dr of each photo detector 3, obtains blue and green observation value Db, Dg.That is, imaging apparatus 9 carries out computing (subtraction) according to the observation value of each photo detector 3, can think that in appearance (imagination ground) has possessed blue filter and green filter and red filter.
One example of the spectral transmission of the apparent blue filter that obtains about the computing by imaging apparatus 9 and the wavelength 400nm～800nm of green filter and red filter shows the curve same with Fig. 7.
As described above, in the present embodiment, after forming yellow filter 2Y and red filter 2R, form transparent filter 10W to cover each filter.At this moment, transparent filter 10W and transparent planarization layer form with the structure of one.
That is, by carrying out the formation operation of transparent filter 10W and transparent planarization layer simultaneously, the pattern that does not need transparent filter is set individually forms operation, and the manufacture process of imaging apparatus 9 is oversimplified.
Say that at length formed the part of the part configuration of transparent filter 2W as the transparent filter 10W of transparent planarization layer in the 1st execution mode, transparent filter 10W realizes the effect as transparent planarization layer.Therefore, in for example photoetching process etc., can omit the operation of the transparent filter of independent formation.That is, the work of filter that can be by forming dichromatism (yellow, red) just forms the filter of 3 looks, filter can be formed the amount that operation reduces by 1 look.
＜the 3 execution mode 〉
In the present embodiment, the variation of the imaging apparatus that the 1st and the 2nd execution mode is related to describes.
Figure 10 is the cutaway view of an example of the imaging apparatus of the relevant present embodiment of expression.
About the imaging apparatus 11 of present embodiment possesses the lenticule 8 of the imaging apparatus 9 that the 2nd execution mode is related to and the transparent filter 12W of the structure that transparent filter 10W is made of one.Transparent filter 12W also has the function of raising to the optically focused of incident light photo detector 3W, yellow photo detector 3Y, red photo detector 3R.
Below, utilize Figure 11～Figure 15 that the manufacturing process of this imaging apparatus 11 is described.
At first, on the semiconductor substrate 5 that is formed with incident light photo detector 3W, yellow photo detector 3Y, red photo detector 3R, form the planarization layer 6 (Figure 11) that constitutes by transparent resin.Particularly, on the semiconductor substrate 5 that is equipped with photo detector two-dimensionally, with the allyl resin coating fluid of principal component with the rotating speed rotary coating of 2000rpm.Then, undertaken dura materization by the heat treatment of carrying out 200 ℃, forming thickness is the planarization layer 6 of 0.2 μ m.In the coating fluid of allyl resin, use and to have added solid shape than coating fluid for about 3% Coumarins ultra-violet absorber.
In addition, in the forming of the colour filter that constitutes by the coloring phototonus resin, in the pattern exposure of photoresist of checking colors, use ultraviolet ray.When pattern exposure, produce halation sometimes.So,, preferably in planarization layer 6, add ultra-violet absorber in order to prevent halation.In addition, in order to make imaging apparatus 11 attenuation, also can omit planarization layer 6.
Then, utilize photoetching process to form yellow filter 2Y and red filter 2R (Figure 12).
At length say, use two kinds of chromatic photoresist agent (yellow, red) of blend color material in the photonasty allyl resin that can expose, develop, form the yellow filter 2Y and the red filter 2R of about 1 μ m thickness respectively.In addition, the color material of yellow filter 2Y can be used organic pigment C.I.Pigment Yellow 150.The solid shape ratio of the color material (organic pigment) of yellow filter 2Y is about 33%.In addition, the color material of red filter 2R can be used the hybrid pigment of C.I.Pigment Red 177, C.I.Pigment Red 48:1 and C.I.Pigment Yellow 139.The solid shape ratio of the color material of red filter 2R (organic pigment) is about 48%.
Then, rotary coating transparent resin layer on semiconductor substrate 5 makes it cover yellow filter 2Y and red filter 2R.Then, transparent resin layer is carried out hot curing in 3 minutes under 180 ℃, form the planarization layer 12 that comprises transparent filter 12W.Planarization layer 12 uses the material roughly the same with planarization layer 6, forms and utilize for the coating fluid of thick film with the allyl resin of the thermohardening type that has improved solid shape ratio.In addition, the ultra-violet absorber that in allyl resin, contains 2% Coumarins.In addition, planarization layer 12 is about 2 μ m thickness.
And, on planarization layer 12, form the photonasty phenolic resins layer 13 (Figure 13) that can expose, develop.In addition, photonasty phenolic resins layer 13 is the resins with " hot reflux ".So-called hot reflux is meant, is become circle by the heat treatment fusion and be lentiform character under surface tension effects.
Then, photonasty phenolic resins layer 13 is carried out pattern exposure, development, dura mater processing etc., form the photonasty phenolic resins of predetermined pattern.
Then, carry out 200 ℃ heat treated, make photonasty phenolic resins layer 13 liquidation of predetermined pattern.Thus, form the hemispheric lens master mold 13a (Figure 14) of about 0.6 μ m thickness.
Then, by being that mask carries out anisotropic dry-etching, the shape transferred thereon of lens master mold 13a to planarization layer 12, is formed lenticule (Figure 15) with lens master mold 13a.That is, by etching lens master mold 13a is disappeared, but lens master mold 13a becomes the mask to transparent filter 12W, with the hemispheric shape transferred thereon of lens master mold 13a to transparent filter 12W.Thus, form lenticule 8 and transparent filter 12W simultaneously.In addition, dry-etching amount (etch depth) is about 1 μ m.In addition, to become the execution etch depth that arrives its surface be the thickness of 1.2 μ m for yellow filter 2Y and red filter 2R.
As described above, can access the imaging apparatus 11 of the part of transparent filter 12W as lenticule performance function.In addition, because transparent filter 12W and lenticule are integrated, so can make imaging apparatus 11 attenuation.
In addition, in the present embodiment, the transparent filter 12W that will have the effect of transparent planarization film makes lenticular shape, but also can be not form lenticule but the state of transparent filter 12W that keeps having the effect of planarization layer.In the case, in the 3rd operation of Figure 13, behind the transparent filter 12W of formation, do not carry out the later operation of formation of photonasty phenolic resins layer 13.
In addition, as mentioned above, in planarization layer 6, the halation in order to prevent to produce when checking colors the pattern exposure of photoresist preferably adds ultra-violet absorber.
In addition, in transparent filter 12W,, preferably add ultra-violet absorber in order to prevent from the ultraviolet range, to have the generation of noise sensitivity, that ultraviolet ray brings based on photo detector.
As ultra-violet absorber, can enumerate the particulate that constitutes by metal oxides such as cerium oxide or titanium oxide.But, as mentioned above, becoming under the lenticular situation of transfer printing type at transfer printing lens shape, transparent filter 12W on the transparent filter 12W, is under the situation about being made of metal oxide layer at ultra-violet absorber, and inorganic material becomes the foreign matter of optics in the resin of transfer printing lens.Therefore, under the situation of light crested, in the image that obtains by imaging apparatus 11, produce black part.Thereby, preferably use the ultra-violet absorber of dye class.For example, as ultra-violet absorber, can use benzotriazole or benzophenone, triazines, salicylate class, Coumarins, xanthene class, methoxy cinnamic acid compound etc.
In addition, in the 1st～the 3rd execution mode, the background color that also can be used as its allochromatic colour except hyalomere for yellow uses.That is, except hyalomere, yellow also can commonly be comprised in the red portion.In the case, for example when utilizing yellow resin to form yellow filter 2Y, also form yellow filter 2Y, form red filter 2R in the formation position of red filter then in the formation position of red filter.
＜the 4 execution mode 〉
In the present embodiment, reflection that the light that is provided with beyond the incident light that suppresses to incide in the photo detector is caused and diffusion, describe around the imaging apparatus of the photomask of going into (reflection inhibition filter).
Figure 16 is the plane graph of an example of configuration of the photomask of the imaging apparatus that relates to of expression present embodiment.Imaging apparatus 17 shown in Figure 16 possesses the photomask 19 that suppresses reflection of light and transmission at the peripheral part of the valid pixel portion 18 that is provided with filter layer 2 of the light incident side of photo detector.In addition, imaging apparatus 17 has and is used to carry out and the outside electrode part 20 that is made of aluminium etc. that is electrically connected.Do not form photomask 19 in electrode part 20.
As the color material of photomask 19, the resin liquid of organic pigment (mixing of C.I.Pigment Violet 23 and C.I.Pigment Red 177, C.I.Pigment Red 48:1, C.I.Pigment Yellow 139) of for example can having used dispersing and mixing.If be coated with this color material and dura materization, form photomask 19.But color material is not limited to this, also can use other pigment.In addition, also can be individual layer, also can stacked different look.
If such photomask 19 is provided in the peripheral part of the valid pixel portion 18 of imaging apparatus 17, can prevents that then the observed result of imaging apparatus 17 is subjected to The noise.As a result, can improve picture element.
If replenish, then in imaging apparatus in the past, incide sometimes that the light of part becomes veiling glare in the imaging apparatus inscattering beyond the photo detector.If this veiling glare incides in the photo detector, then become noise.In addition, if unwanted light incides the neighboring area of photo detector, then become the reason of noise.
With respect to this, the imaging apparatus 17 that present embodiment relates to disposes the photomask 19 that has the inhibition transmissison characteristic in the visible wavelength district in the part (for example periphery of semiconductor substrate 5) of the effective vent portion periphery and the semiconductor substrate 5 of photo detector.Therefore, utilize photomask 19 to be absorbed into and be mapped to the photo detector light of part in addition.Thus, can prevent that unwanted light such as veiling glare from inciding photo detector.That is, noise can be reduced, the picture element that obtains by imaging apparatus 17 can be improved.
In addition, in the present embodiment, preferably make photomask 19, also have function infrared ray cut except having the function that luminous ray is ended.Particularly, by using black pigments such as carbon blacks, photomask 19 is formed the thickness of 0.8 μ m, realize the ultraviolet cutoff function with the resin liquid of solid shape than 40% mixing.
Moreover, also can be on the photomask 19 that has used black pigments such as carbon black stacked absorption infrared ray and ultraviolet absorbing film.Thus, can prevent to incide infrared ray in the part that is not photo detector and ultraviolet scattering and become veiling glare, the situation of noise takes place.In addition, absorb infrared ray and ultraviolet absorbing film,, then can reduce Master Cost if use the material that has added infrared absorbent and ultra-violet absorber in the transparent resin that in the formation of lenticule 8, uses as this.
In addition, in the present embodiment, be that example is illustrated, but also can in the imaging apparatus that other execution modes relate to, possess photomask 19 and absorbing film with the situation that possesses photomask 19 and absorbing film in the imaging apparatus 1 that relates at the 1st execution mode.In addition, also can in imaging apparatus, only possess photomask 19.In addition, also can in photomask 19, add ultra-violet absorber or infrared absorbent.
＜the 5 execution mode 〉
The imaging apparatus 31 of compensation filter 2Blk has been appended in the present embodiment explanation in the imaging apparatus 1 that the 1st execution mode relates to.
Figure 17 is the front view of an example of the filter ordered state in the imaging apparatus 31 that relates to of expression present embodiment.Figure 18 is the cutaway view of an example of the imaging apparatus 31 that relates to of this execution mode of expression.III-III ' cross section of expression Figure 17 in Figure 18.In addition, in Figure 18, be that the situation of CMOS is that example illustrates with the photo detector, but at photo detector be under the situation of CCD too.Below, in other cutaway views of imaging apparatus, also be same structure.
The imaging apparatus 31 that present embodiment relates to possesses the filter layer 2 of the special color composition that is used for extracting incident light, via the photo detector 3 and the operational part 4 of filter layer 2 observation incident lights.
Compensation filter 2Blk has inhibition transmissison characteristic (low transmissison characteristic) in the visible wavelength district, be at the filter that has transmissison characteristic than the visible wavelength head of district's wavelength side.That is, compensation filter 2Blk has the transmissivity of the region of ultra-red characteristic higher than the transmissivity in visible wavelength district.It is more black when in addition, compensation filter 2Blk is visual.
In the present embodiment, compensation filter 2Blk forms purple (V) and red (R) optical superposition.In addition,, both can form a tablet filter with the color material of having mixed purple color material and red color material as the specific implementation method of optical superposition, also can the filter of purple and red filter is stacked.
Compensation photo detector 3Blk is corresponding to compensation filter 2Blk, via compensation filter 2Blk observation incident light.
Operational part 4 possesses blue operational part 4B, green operational part 4G, red operational part 4R.Operational part 4 has observation value Dw, Dy, Dr, the Dblk according to incident light photo detector 3W, yellow photo detector 3Y, red photo detector 3R, compensation photo detector 3Blk, obtains blue observation value Db, green observation value Dg and the function of the red observation value HDr that compensated.
Red operational part 4R deducts the observation value Dblk that is observed by compensation photo detector 3Blk from the observation value Dr that is observed by red photo detector 3R, obtain the red observation value HDr that compensated (=Dr-Dblk).
In Figure 18, expression is cross-sectional and with red photo detector 3R and the cross-sectional cross section of compensation photo detector 3Blk with compensation filter 2Blk with red filter 2R.For with other filters and the cross-sectional cross section of other photo detectors, also be same structure.
In addition, in Figure 18, represented that the pigment with red pigment and purple is mixed into the compensation filter 2Blk of the individual layer in the transparent resin.But compensation filter 2Blk is not limited to structure shown in Figure 180, so long as realize just can by optical superposition.Here so-called optical is overlapping, and as shown in figure 18, the pigmentary resin of the individual layer of color material (pigment, pigment) that both can be by having mixed different a plurality of looks is realized, also can realize by the lit-par-lit structure of the not homochromy colour filter more than the dichromatism.For example, as shown in figure 19, filter 2V that also can stacked purple and red filter 2R form compensation filter 2Blk.In addition, for look and transmissivity adjusting, also can use the above color material of dichromatism.
Under situation with the colour filter optical superposition more than the dichromatism, the transmissivity of compensation filter 2Blk be the transmissivity of overlapping each colour filter long-pending.Thereby, by overlap to form compensation filter 2Blk with optics, can be produced on the visible wavelength district and have the compensation filter 2Blk that suppresses transmissison characteristic, has transmissison characteristic at the long wavelength side longer than visible wavelength district.
As the organic pigment that in the formation of compensation filter 2Blk, uses, can use for example C.I.Pigment Violet 23 and the mixing that is used for the organic pigment (for example C.I.Pigment Red 177, C.I.Pigment Red 48:1 mix with C.I.Pigment Yellow's 139) of red filter 2R.
About an example of the spectral transmission of the compensation filter 2Blk of such formation and transparent filter 2W, yellow filter 2Y, red filter 2R, as shown in figure 20.
As described above, imaging apparatus 31 carries out computing (subtraction) according to observation value Dw, Dy, Dr, the Dblk of each photo detector, obtain indigo plant, green, by red trichromatic observation value Db, Dg, the HDr that are compensated.In other words, imaging apparatus 31 is by carrying out calculation process, in appearance (imagination ground) can think to have possessed blue filter, green filter, red filter.
Figure 21 is the curve chart of an example of the spectral transmission of the apparent blue filter that obtains about the computing by imaging apparatus 31 of expression, green filter, red filter.If the spectral transmission of the spectral transmission of the apparent blue filter of imaging apparatus more shown in Figure 21 31, green filter, red filter and indigo plant in the past shown in Figure 1, green, red filter then has the transmissivity high feature of the transmissivity of the apparent blue filter of imaging apparatus 31, green filter, red filter than in the past blue and green colour filter.Particularly, the transmissivity height of the transmissivity of apparent blue filter ratio blue colour filter in the past in the wavelength zone of indigo plant.Therefore, in the imaging apparatus 31 that present embodiment relates to, blue is highly sensitive, has improved colour balance.
In addition, the observation value Db of the indigo plant that is obtained by imaging apparatus 31, green observation value Dg, the red observation value HDr that is compensated are that the observation value that deducts respectively in the region of ultra-red calculates.Therefore, the curve of the spectral transmission in apparent blue filter, green filter, the red filter becomes the state that suppresses (to have ended) region of ultra-red in the curve of the spectral transmission of in the past indigo plant, green, red colour filter.Thereby, in the imaging apparatus 31 that present embodiment relates to, can omit infrared intercepting filter, can attenuation.In addition, the situation owing to the red sensitivity that can prevent to have taken place when having set absorptive-type infrared intercepting filter reduces so compare with imaging apparatus in the past, can make red color reproduction good.
In addition, about " apparent colour filter ", " noise that dark current brings ", " floating of beam split ", " ultra-violet absorber and infrared absorbent ", be suitable for and the same discussion of the 1st execution mode.
Below, " dichroism of compensation filter 2Blk " replenished.
Figure 22 is that expression utilizes pigment with the pigment (for example C.I.Pigment Violet 23) of purple and red filter 2R to mix the allyl resin film of thickness 1.4 μ m of dispersion and the curve chart of the dichroism of the compensation filter 2Blk that forms.
The transmissivity of compensation filter 2Blk becomes the roughly the same level (identical or approximate) of transmissivity with the red filter 2R of Figure 20 at the long wavelength side longer than visible wavelength district.
By from the observation value Dr that observes by red photo detector 3R, deducting the observation value Dblk that observes by compensation photo detector 3Blk, the observed result of region of ultra-red can be deleted from the observation value Dr that is observed by red photo detector 3R.In other words, compensation filter 2Blk performance is for the effect of the infrared intercepting filter of red observation value.
Compensation filter 2Blk shown in Figure 22 is different with general absorption-type infrared intercepting filter shown in Figure 23, and near the transmissivity about 600nm～650nm (as the transmissivity of the reality of infrared intercepting filter) is lower.Therefore, can further improve the red look expression power that obtains after the computing (subtraction).
In the present embodiment, the transmissivity of compensation filter 2Blk has 5% with interior poor with the transmissivity of red colour filter shown in Figure 1 in about 400nm～550nm light wavelength district and the wavelength zone more than the 750nm.Thus, can access red observation value HDr influence, that compensated that is not subjected to infrared ray and allochromatic colour thereof, improve red color reproduction.Particularly, the transmissivity of compensation filter 2Blk is kept than low value at about 400nm～630nm as shown in figure 22, rises sharp between 630nm～750nm then, if above 750nm then keep high value.
In addition, in general absorption-type infrared intercepting filter, transmissivity becomes the wavelength of half (50%) near about 630nm.In the infrared intercepting filter of general inorganic multilayer film, the wavelength that transmissivity becomes half is about 750nm.In the compensation filter 2Blk that is formed by purple and red optical superposition, transmissivity becomes the wavelength of half between about 650nm～660nm.In the compensation filter 2Blk that forms by blue or green and red optical superposition, the wavelength that transmissivity becomes half is about 740nm～750nm.
According to above viewpoint, from the viewpoint of the precision that improves red observation value, preferably in compensation filter 2Blk, the wavelength that makes transmission value become the some P of half is comprised in the wavelength zone between 630nm～750nm.In addition, preferably in transparent filter 2W, add ultra-violet absorber.
In the imaging apparatus 31 that present embodiment relates to, ask the red observation value HDr after to compensate with the difference of the observation value Dblk of compensation usefulness by red measured value Dr.Thereby such by making compensation filter 2Blk become Figure 22, the red observation value HDr after can preventing to compensate is subjected to the influence from infrared ray and other coloured light.In addition, can access the good imaging apparatus 31 of red highly sensitive, red color reproduction.
In addition, in the present embodiment, compensation filter 2Blk both can be made of the optical superposition of for example purple and red dichromatism as mentioned above, also can be made of the optical superposition of blue or green and red dichromatism.Form compensation filter 2Blk by making up such dichromatism, can regulate the light transmission that compensates filter 2Blk by the ratio of color material becomes the wavelength location of half, can also carry out the tone joint to the red observation value HDr after the compensation.
In addition, the rising of the transmittance graph of the compensation filter 2Blk in the above near-infrared transmission beam split of tone joint (for example adjusting of gray scale) in the visible wavelength district of compensation filter 2Blk or 700nm or 700nm or the adjusting of the wavelength location that transmissivity becomes half also can be added the organic pigment of other color material or its allochromatic colour, for example purple, blue, green etc. organic pigment is regulated.
In addition, in the imaging apparatus 31 that present embodiment relates to, the observed result deletion of light of region of ultra-red that is not people's viewing area can be able to be accessed the photography result of the vision that approaches the people.
In addition, in the imaging apparatus 31 that present embodiment relates to, the situation of general absorptive-type infrared intercepting filter that has transmissison characteristic shown in Figure 23 with use is different, can relax the absorption of the light of the wavelength zone from 550nm to 560nm.Therefore, can improve red look expression power.
That is, in the imaging apparatus 31 that present embodiment relates to, can regard the imaging apparatus of the indigo plant that possessed high transmission, green, red filter as, particularly compare, can improve blue and red accuracy of observation with imaging apparatus in the past.
In addition, in the present embodiment, use the light of the compensation of imaging apparatus, from the observed result of red pixel, deduct the observed result of this correction, thereby realized the infrared ray absorbing function with pixel with the pixel observation region of ultra-red.In addition, for its allochromatic colour (blue, green), also can have been deducted the observed result of region of ultra-red respectively.As a result, can omit the infrared ray absorbing type infrared intercepting filter in the optical system that is located at camera module in the past, camera can be done very thin.
In addition, in the present embodiment, for yellow, the background color that also can be used as its allochromatic colour except hyalomere uses.That is, except hyalomere, yellow also can be contained in red portion and compensation is used in the look portion.In the case, for example when utilizing yellow resin to form yellow filter 2Y, also form yellow filter 2Y in the formation position of red filter and the formation position of compensation filter.Form red filter 2R in the formation position of red filter then, and form compensation filter 2Blk in the formation position of compensation filter.
＜the 6 execution mode 〉
The imaging apparatus 39 that present embodiment relates to is in the imaging apparatus 31 that the 5th execution mode relates to transparent filter 2W and resin bed 7 one to be constituted, thereby form transparent filter 10W.That is, be equivalent in the imaging apparatus 9 that the 2nd execution mode relates to, form the structure of compensation filter 2Blk.The cutaway view of imaging apparatus 39 as shown in figure 24.Figure 24 is corresponding to III-III ' cross section of Figure 17.
As mentioned above, the imaging apparatus 39 that relates to of present embodiment is with the formation integrated process of transparent filter 10W and transparent smoothing layer.Therefore, in the formation of filter, the pattern that does not need transparent filter is set separately forms operation, and manufacture process is oversimplified.That is, can just constitute four look colour filters, filter can be formed the amount that operation is cut down 1 look by the work that forms three-color filter.
＜the 7 execution mode 〉
The imaging apparatus 41 that present embodiment relates to is in the imaging apparatus that the 6th execution mode relates to transparent filter 10W and lenticule 8 one to be constituted, thereby form transparent filter 12W.That is, be equivalent in the imaging apparatus 11 that the 3rd execution mode relates to, form compensation filter 2Blk.The cutaway view of imaging apparatus 41 as shown in figure 25.Figure 25 is corresponding to III-III ' cross section of Figure 17.
As mentioned above, in the present embodiment, transparent filter 10W and lenticule 8 one are constituted, so can do imaging apparatus 41 thinner.
＜the 8 execution mode 〉
In the present embodiment, the imaging apparatus that relates to the 4th execution mode is identical, and the zone beyond the zone of incident incident light is provided with photomask.
Figure 26 is the front view of the 1st example of configuration of the photomask 19 of the imaging apparatus 47 that relates to of expression present embodiment.Figure 27 represents IV-IV ' cross section of Figure 26.
In photomask 19, can use the compensation filter 2Blk that in the 5th execution mode, illustrates.By using compensation filter 2Blk in photomask 19, the light in visible wavelength district can be ended, can reduce the veiling glare of the frame portion (peripheral part) of imaging apparatus 47.
In addition, except the function that luminous ray is ended, photomask 19 can also possess the function with infrared ray cut.The photomask with luminous ray and infrared ray cut is like this realized than the thickness that 40% resin liquid of having mixed pigment such as carbon black forms 0.8 μ m and for example can use with solid shape.
Figure 28 is the cutaway view of expression about the 2nd example of the configuration of the photomask of the imaging apparatus 44 of this execution mode.
As photomask 15, can use and for example compensate filter 2Blk.That is, photomask 15 can be by the method identical with the formation method of compensation filter 2Blk, use material identical and structure to form with compensating filter 2Blk.In addition, film 16 is at least one the films with infrared ray absorbing function and ultraviolet radiation absorption function.
As mentioned above, the imaging apparatus 44,47 that present embodiment relates in the part (for example periphery of semiconductor substrate 5) of the effective vent portion periphery or the semiconductor substrate 5 of photo detector, has disposed and has had the photomask that suppresses transmissison characteristic in the visible wavelength district.Therefore, utilize photomask to be absorbed into and be mapped to the photo detector light of part in addition.Thus, can prevent that unwanted light such as veiling glare from inciding in the photo detector.That is, noise can be reduced, the picture element that obtains by imaging apparatus can be improved.
In addition, in the present embodiment, be equipped with photomask, but be under the situation of CCD, also can on the wiring position, form photomask at photo detector at the peripheral part of valid pixel portion.
＜the 9 execution mode 〉
Present embodiment is represented the concrete example of the compensation filter 2Blk that the 5th execution mode relates to.
The compensation filter 2Blk that present embodiment relates to is below 5% for the optical transmission rate of wavelength 400nm～550nm, and the wave-length coverage of 50% transmissivity in the spectral transmission characteristic is 620nm～690nm.In addition, the optical transmission rate for wavelength 700nm is 70%.
In general absorptive-type cutoff filter, near the absorption of the beginning light 550nm.Therefore, in the present embodiment,, in the shortest light wavelength, consider 550nm as the rising of the regional transmission of the compensation filter 2Blk of the mechanism that carries out IR-cut.Thereby, the scope that compensates the low transmission (transmissivity is below 5%) of filter 2Blk is made as 400nm～700nm.
The compensation filter 2Blk that present embodiment relates to has transmissison characteristic in order to be used to realize the calculation process of IR-cut function in red sector territory more than wavelength 550nm and the near infrared region.Here, be that the values of the isochrome function of the RGB color specification system that calculates of prerequisite is to become be the shape of peak value towards 700nm decline near the 600nm with people's visual sensitivity.Therefore, the spectral transmission characteristic of compensation filter 2Blk is preferably near the rising 600nm, from becoming the shape of high-transmission rate near the 700nm.Thereby transmissivity becomes 50% wave-length coverage (scope of a half value) and is preferably 620nm～690nm in this spectral transmission characteristic.
Compensation filter 2Blk has inhibition transmissison characteristic (low transmissison characteristic) in the visible wavelength district, look like black (Black) down visual.
In the present embodiment, compensation filter 2Blk is formed by the colored resin composition of each pigment that comprises C.I.Pigment Violet23, C.I.Pigment Yellow 139 at least.In addition, the colored resin composition by each pigment that comprises C.I.Pigment Violet 23, C.I.Pigment Yellow 139, C.I.Pigment Red 254 at least forms.
In the present embodiment, the thickness of each filter is respectively 1.0 μ m～1.1 μ m, and pel spacing (spacing of transparent filter 2W, yellow filter 2Y, red filter 2R, compensation filter 2Blk) is 2.6 μ m.
The compensation filter colored resin composition that uses in the formation of compensation filter 2Blk uses 3 kinds of pigment as follows.
C.I. (Color Index) Pigment Red 254 (following also brief note do R254),
C.I.Pigment Yellow 139 (Y139 made in following also brief note),
C.I.Pigment Violet 23 (V23 made in following also brief note).
In addition, can from these 3 kinds of pigment, remove R254.Moreover, except these 3 kinds of pigment, also, look (transmission peak wavelength) adjusting adds the pigment of other kinds of trace sometimes for using.
These 3 kinds of pigment (R255, Y139, V23) are respectively R254=0～15%, Y139=30～40%, V23=55～65% with respect to compensating the part by weight (%) of filter with colored resin composition.
In addition, the compensation filter also includes resin and solution with colored resin composition as mentioned above except each pigment.For example, in order to disperse for example pigment monomer of Y139, in the Y139 of 7 parts (by weight), include following material.
Allyl resin solution (dividing 20%) Gu form: 40 parts,
Dispersant: 0.5 part,
Cyclohexanone: 23.0 parts.
In addition, in the pigment of the pigment of V23 and R254, also use and be dispersed with identical solution.
The manufacture method of the compensation filter 2Blk of relevant present embodiment then, is described.
The pigment paste of above-mentioned two kinds of Y139 and V23 is prepared by each weight of above-mentioned part by weight.And, will
Y139:14.70 part,
V23:20.60 part,
Allyl resin solution: 14.00 parts,
Acrylic monomers: 4.15 parts,
Initator: 0.7 part,
Sensitizer: 0.4 part,
Cyclohexanone: 27.00 parts,
PGMAC:10.89 part is mixed and formation compensation filter colored resin composition.
Then, utilize the rotary coating machine should compensate filter with the colored resin composition formation of filming, making dry film thickness is 1.1 μ m.
Then, on heating plate, carry out 1 minute drying with 70 ℃.Then, utilize i line stepping exposure device, by forming the mask exposure of 5 μ m pattern of pixels.In addition, exposure sensitivity is 1000mj/cm
2
Then, utilize the organic basic aqueous solution, develop while make semiconductor substrate 5 rotations carry out for 60 seconds in the spray mode.After utilizing pure water to carry out sufficient rinsing, by rotation water got rid of and to take off drying.
Then, on heating plate,, make the pattern of pixels dura materization with 220 ℃ of heat treatments of carrying out 6 minutes.Thus, form the compensation filter of thickness 1.1 μ m.
In addition, fixed packet is contained in each filter carrier with each pigment in colored resin composition, is made of transparent resin or its precursor or their mixture as above-mentioned allyl resin.
Transparent resin is the resin that becomes the transmissivity more than 80% at the whole wavelength zone as the 400nm～700nm of visible region, more preferably becomes the resin of transmissivity more than 90%.
In transparent resin, comprise thermoplastic resin, heat-curing resin and active energy beam cured resin.In addition, in its precursor, comprise by the active energy beam irradiation being cured monomer or the oligomer that generates transparent resin.Transparent resin can form they independent or two or more mixing.
The spectral transmission characteristic of the compensation filter of Zhi Zaoing is represented as shown in Figure 29 like this.That is, the spectral transmission characteristic of the compensation filter 2Blk of present embodiment is, is below 5% for the optical transmission rate of wavelength 400nm～550nm, is more than 70% for the light transmission of wavelength 700nm.In addition, to become the position of the wavelength more than 50% be 620nm～690nm to transmissivity.
Thereby different with general absorptive-type infrared intercepting filter shown in Figure 23, near the transmissivity about 600nm～650nm of the compensation filter 2Blk that present embodiment relates to is low.Therefore, can further improve red look expression power after the computing (subtraction).
In addition, the transmissivity of compensation filter 2Blk is preferably, in the light wavelength district and the wavelength zone more than the 750nm of about 400nm～550nm, have 5% with interior poor with the transmissivity of red colour filter (the red filter that for example has transmission characteristics shown in Figure 1).Particularly,, the red observation value HDr that the quilt of the influence that is not subjected to infrared ray and allochromatic colour thereof compensates can be accessed, red color reproduction can be improved by forming transmission characteristics as shown in Figure 30.
In addition, the dichroism of the compensation filter 2Blk that present embodiment relates to is to suppress transmissivity lower in the wavelength zone of 400～550nm, so the visible light crested.Therefore, can suppress generation for the coloured noise of the imaging apparatus that this compensation filter 2Blk has been installed.
＜the 10 execution mode 〉
Present embodiment is represented another concrete example of the compensation filter 2Blk that the 5th execution mode relates to.
The compensation filter 2Blk that present embodiment relates to is formed by the pigment paste of following structure.In addition, the thickness of compensation filter is 1.1 μ m.
Y139:11.3 part,
R254:4.23 part,
V23:19.77 part.
The dichroism of the compensation filter 2Blk of present embodiment is represented as shown in Figure 31.Being included in the compensation filter with the pigment structure in the colored resin composition is, forms in (pigment V23 and pigment Y139) at the pigment of the 9th execution mode and has appended pigment R254.
In addition, the dichroism of the compensation filter 2Blk that present embodiment relates to is, be transverse axis with light wavelength (nm), be on the curve of spectral transmission characteristic of the longitudinal axis with the optical transmission rate (%) of each wavelength, optical transmission rate for wavelength 400nm～wavelength 550nm is below 5%, is more than 70% for the optical transmission rate of wavelength 700nm.In addition, to become the position of 50% wavelength be 620nm～690nm to transmissivity.
In addition, the dichroism of the compensation filter 2Blk that present embodiment relates to is, owing to suppressing transmissivity lower in the wavelength zone of 400～550nm, so the visible light crested.Therefore, can suppress generation for the coloured noise of the imaging apparatus that this compensation filter 2Blk has been installed.
＜the 11 execution mode 〉
Present embodiment is about making transparent filter have the execution mode of the imaging apparatus of ultraviolet radiation absorption function.The imaging apparatus that present embodiment relates to possesses image pickup part 110 and operational part 120.
Figure 32 is the schematic diagram of the structure of the expression image pickup part 110 that relates to of the 11st execution mode of the present invention and operational part 120, the figure of the notion of the ordered state that Figure 33 is expression when the incident light side is seen colour filter the image pickup part 110.In addition, Figure 34 A and Figure 34 B are respectively V-V ' cutaway view and VI-VI ' cutaway views of the image pickup part 110 among expression Figure 32.
Photo detector 112 is formed on the substrate 111, is to receive that light-to-current inversion is the parts of the signal of telecommunication behind the light.As described later, in the present embodiment, colour filter 114 is formed with transparent filter 114W, yellow filter 114Y, red filter 114R 3 kinds.So for convenience, the photo detector with having received respectively via the light of transparent filter 114W, yellow filter 114Y, red filter 114R is called white photo detector 112W, yellow photo detector 112Y, red photo detector 112R respectively.
Colour filter 114 is the ground parts of formation respectively that adjoin each other on each photo detector 112.In the present embodiment, be formed with transparent filter 114W, yellow filter 114Y, red filter 114R 3 kinds as colour filter 114.In addition, by with yellow filter 114Y as two pixels, transparent filter 114W and red filter 114R are formed 1 unit that look separates as 4 pixels that amount to of 1 pixel respectively.In addition, if transparent filter 114W, yellow filter 114Y, red filter 114R are expressed as W, Y, R ' respectively, for example then form the colour filter 114 of ordered state as shown in Figure 33.
Blue operational part 121B is parts of obtaining the observation value of blue light.Particularly, blue operational part 121B obtains the signal of telecommunication from white photo detector 112W and yellow photo detector 112Y.From the light intensity value of obtaining by white photo detector 112W, deduct the light intensity value of obtaining from yellow photo detector 112Y, obtain the observation value of blue light.
Green operational part 121G is parts of obtaining the observation value of green light.Particularly, green operational part 121G obtains the signal of telecommunication from yellow photo detector 112Y and red photo detector 112R.From the light intensity value of obtaining by yellow photo detector 112Y, deduct the light intensity value of obtaining from red photo detector 112R, obtain the observation value of green light.
Red operational part 121R is parts of obtaining the observation value of red light.Here, the light intensity value that will obtain from red photo detector 112R of red operational part 121R is as the observation value of red light.
Then, utilize the action of the imaging apparatus that this execution mode of flowchart text of Figure 35 relates to.
At first, if from the object of observation irradiates light, then its a part of light incides image pickup part 110 (step S1) as incident light.
Incident light is by lenticule 115 optically focused, and transmissive color filters 114 backs arrive photo detector 112.Here, as colour filter 114, owing to be formed with transparent filter 114W, yellow filter 114Y, red filter 114R, in white photo detector 112W, yellow photo detector 112Y, red photo detector 112R, extract incident light, sodium yellow, the red light (step S2) of having removed purple light respectively.
The light that arrives each photo detector 112 is transformed to the signal of telecommunication, sends (step S3) to operational part 120.Here, with transmission respectively the light of white photo detector 112W, yellow photo detector 112Y, red photo detector 112R send to operational part 120.
Then, obtain the observation value (step S4) of red light, green light, blue light respectively by the operational part 121 of operational part 120.Here, if the intensity level of the incident light that will be obtained by each photo detector, sodium yellow, red light is made as Dw, Dy, Dr respectively, the observation value of trichromatic red light, green light, blue light is made as Db, Dg, Dr respectively, then set up following formula (3), (4).
Db＝Dw—Dy ……(3)，
Dg＝Dy—Dr ……(4)。
Trichromatic data in each pixel of obtaining like this are synthetic, as to make the coloured image of object of observation data (step S5).
As described above, in the image pickup part 110 that present embodiment relates to, to demonstrate transmissivity be 50% value and demonstrate the dichroism of the transmissivity more than 90% for the light of the wavelength more than the 450nm because planarization layer 113 and transparent filter 114W have light for 365nm～420nm wavelength, so can access the measured value of having removed the light of ultraviolet influence in imaging apparatus 20.Colour balance and the good image pickup part 110 of color reproduction thus, can access the observation value of the blue light of the visual sensitivity that approaches the people, so can be provided.
In addition, image pickup part 110 can be realized the granular of pixel by making being used to make light optically focused to be formed on structure on the colour filter 114 to the lenticule 115 on each photo detector 112.Thus, can provide small-sized imaging apparatus.
Moreover the colour filter 114 of image pickup part 110 is owing to comprising yellow filter 114Y and red filter 114R, so can reproduce the coloured image of object of observation according to the light intensity value via transparent filter 114W, yellow filter 114Y, red filter 114R.Thus, with in the past use complementary color be that the camera head of colour filter is compared, can reduce noise, can reproduce the bright-coloured look that approaches primary colors.
If replenish, then the data of blue light shown in above-mentioned (3) formula according to via the intensity level of incident light of transparent filter 114W obtain.Here, according to the kind of imaging apparatus, photo detector 112 exists inhomogeneous in ultraviolet range medium sensitivity.Therefore, contain ultraviolet incident light if photo detector 112 has received, then according to the kind of imaging apparatus, the observed data value that blue light can take place be difficult to reproduce regularly or with the inadequate problem of coupling of people's visual sensitivity.For this problem, if the transparent filter 114W that uses present embodiment to relate to, the observation value of the light of the ultraviolet influence that then can be removed.Therefore, according to the kind of imaging apparatus, can improve the reproducibility and the look expression power of the observation value of blue light.
In addition, because the influence from the halation of substrate of planarization layer 113 when having absorbed pattern exposure when forming colour filter with photoetching process becomes big so can suppress the pixel of colour filter.That is,, halation can be prevented, the good filter of shape can be formed from the exposure light of substrate 111 by in planarization layer 113, adding ultra-violet absorber.
In addition, in the imaging apparatus that present embodiment relates to,, obtain the observation value of blue light by computing according to the signal of telecommunication that obtains via transparent filter 114W and the signal of telecommunication that obtains via yellow filter 114Y.Transparent filter 114W is low transmissivity in short wavelength region, has the riser portions of transmissivity.In addition, transparent filter 114W is high-transmission rate in long wavelength region.Therefore, transparent filter 114W has the roughly spectral transmission curve of S word shape.Here, by making transparent filter 114W have the dichroism curve (more preferably having the dichroism curve that in the optical wavelength district of 390～420nm light transmission becomes 50% value) that in the optical wavelength district of 365～420nm light transmission becomes 50% value, have that the observation value that can make the blue light of obtaining by computing becomes colour balance and reproducibility advantage good, bright-coloured blueness for human eye.
This point is replenished.Figure 36 is the figure of expression corresponding to the values of giving human eye of the variation of the optical wavelength (nm) in R (red), G (green), B (indigo plant) color specification system.As shown in figure 36, the vector values of the B of human eye (indigo plant) has peak value (maximum) near optical wavelength 445nm～450nm.In addition, at the short wavelength side shorter than the optical wavelength that becomes the maximal stimulation value, the optical wavelength that becomes maximal stimulation value half (maximal stimulation value 50% values) is near 420nm～425nm.Therefore, if the transparent filter that uses present embodiment to relate to then can reproduce the blueness bright-coloured to human eye.In addition, as shown in Figure 1, the peak value of the light transmission of blue filter in the past is in the optical wavelength district about 450nm.In addition, the light transmission in the optical wavelength district about 450nm is about 80% (transmissivity is reference measurement with the glass substrate).
In addition, be more than 90% by the light transmission among the 450nm that makes transparent filter 114W, the imaging apparatus that present embodiment relates to can improve blue sensitivity.
In addition, in the present embodiment, utilize and to contain the Coumarins dyestuff with dye strength 5% and form transparent filter 114W, but also can use the material beyond the propylene resin as the allyl resin of ultra-violet absorber.Particularly, also can use and comprise resins such as one or more epoxiess, polyamide-based, phenol phenolic.
In addition, in the present embodiment, the allyl resin that utilization contains the Coumarins dyestuff with dye strength 5% forms transparent filter 114W, but, also can use benzotriazole compound, benzophenone compound, salicylic acid compounds, hindered amine compound etc. as ultra-violet absorber.Moreover, also can use azo dyes, azo metal complex salt dyestuff, anthraquinone dye, bipseudoindoxyl dye, thioindigo color, phthalocyanine dye, diphenylmethane dye, triphenhlmethane dye, xanthene dye, thiazine dye, cation (カ オ チ Application) dyestuff, cyanine dyes, nitro dye, quinoline dye, naphthoquinone dyestuff, oxazine dye etc.In addition, can also use the bifunctional monomer of 1,6-hexanediyl ester or hexanediyl ester, neopentylglycol diacrylate, triethylene glycol diacrylate etc. or the trimethylolpropane triacrylate (photopolymerization monomer of polyfunctional monomer such as trifunctional monomer of ト リ メ チ ロ-Le プ ロ Ha ス Application ト リ ア Network リ レ-ト), pentaerythritol triacrylate, three (2-ethoxy) isocyanates etc. or double trimethylolpropane tetramethyl acrylate, pentaerythrite five/six acrylate.In addition, can also use the Photoepolymerizationinitiater initiater of halogenated methylation pyrrolotriazine derivatives, halogen oxadiazole derivative, imidazoles redundant organism, diphenylhydroxyethanone alkyl ether, anthraquinone derivative, benzanthrone derivative, benzophenone derivates, acetophenone derivs, thioxanthone derivates, benzoic acid ester derivant, acridine derivatives, azophenlyene derivative, titanium derivative etc.Perhaps, also the functional group with ultraviolet-absorbing can be suspended in the polymer of resin or monomer, the curing agent or make polymer have the base that can be taken into and carry out polymerization.For example, also quinones or anthracene can be imported in the condensate, also can add the monomer of base with ultraviolet-absorbing.
In addition,, the dichroism of transparent filter 114W is changed, can be set at a half value (in the dichroism curve, light transmission becomes 50% light wave long value) of short wavelength side if suitably use ultra-violet absorber as described above.Thus, can carry out the selection (approach the look of actual visual sensitivity or with the same look of organic pigment etc.) of look characteristic.
(coming off of pixel)
Here, " coming off of pixel " described.
In recent years, require to surpass the high meticulous CMOS of 6,000,000 pixels or CCD etc.In these high meticulous CMOS or CCD etc., need mostly to use Pixel Dimensions to be lower than the colour filter of 2 μ m * 2 μ m.
But,, produced the problem that colour filter (pixel) comes off easily along with the granular of Pixel Dimensions.Particularly, in the colour filter that uses blue organic pigment, this problem occurs significantly.This is because in the 365nm as the pattern exposure light wavelength, the transmissivity lower (less than 1%) of blue chromatic photoresist agent is not so exposure light can arrive the bottom of blue chromatic photoresist agent.That is, when forming blue colour filter utilizing photoetching process to carry out pattern exposure, the position that should solidify became and solidified deficiency originally.On the other hand, the pattern exposure light of optical wavelength 365nm transmission in photoresist fully (transmissivity 5～10% degree) in red and green material photoresist fully is cured to the bottom of colour filter.Therefore, red and green colour filter is difficult to come off.
Otherwise, prevent coming off of colour filter in order to make chromatic photoresist agent full solidification, just can for the pattern exposure optical transmission rate of 365nm wavelength as long as improve blue chromatic photoresist agent.But, under the situation of the transmissivity in having improved the pattern exposure light wavelength district of blue chromatic photoresist agent, the transmissivity that should reduce as the chromatic photoresist agent of indigo plant in the red and green optical wavelength district of transmissivity rises, and reduces as the look separating property of the colour filter of indigo plant.Therefore, in the imaging apparatus of in the past use indigo plant, green, red filter, have to make look separate the problem of variation corresponding to the transmittance of a plurality of looks.
For this problem, in the imaging apparatus that present embodiment relates to, owing to possess the white filter and the yellow filter of the pattern exposure photocuring of the wavelength of using 365nm, so the phenomenon that can avoid pixel to come off.That is,, can improve the imaging apparatus that look separates so can provide owing to can in the phenomenon of avoiding pixel to come off, obtain blue observation value.
In addition, during the pattern exposure of the colour filter of granular in photo-mask process, have to be subjected to easily from the influence of the halation of substrate and the thick problem of pixel takes place.Therefore, the problem of look irregular and colour mixture exist to take place.
For this problem, in the imaging apparatus that present embodiment relates to, owing in planarization layer 113, added absorbent, so the halation when planarization layer 113 has absorbed pattern exposure from the exposure light of substrate.As a result, the pixel that can suppress the material filter is thick, can form the good filter of shape.As a result, can provide the imaging apparatus that can improve the look separation.
＜the 12 execution mode 〉
In the 12nd execution mode of the present invention, the manufacture method of the image pickup part 110 that the 11st execution mode is related to describes.
Below, utilize Figure 37 A～Figure 37 D, Figure 38 A～Figure 38 E that the manufacture method of the image pickup part 110 of relevant present embodiment is described.
At first, on the substrate 111 that has formed photo detector 112 (being 112W, 112Y) in Figure 37 A, form planarization layer 113 (Figure 37 A).Particularly, utilize the allyl resin that contains the Coumarins dyestuff with dye strength 5% to form planarization layer 113.
Then, on planarization layer 113, form yellow resin bed YL.Yellow resin bed YL adds organic solvent such as for example C.I.Pigment Yellow 139 and cyclohexanone, PGMEA or polymer lacquer, monomer, initator in the photoresist photo-sensitive resin.
Then, utilize grinding M to carry out pattern exposure (Figure 37 B).Here, the part generation photochemical reaction that is exposed, it is insoluble to become alkalescence.
Then, utilize developer solutions such as alkaline solution not removed by light-struck part.Thus, form yellow filter 114Y (Figure 37 C).That is, utilize photoetching process to form yellow filter 114Y here.
In addition, though do not illustrate, form red filter 114R equally.
Then, after forming yellow filter 114Y and red filter 114R, form transparent filter 114W (Figure 37 D).
Then, form the lens jacket LL of transparent resin system.Particularly, by forming lens jacket LL (Figure 38 A) with planarization layer 113 identical materials.
On lens jacket LL, form phenolic resins layer 116 (Figure 38 B).Phenolic resins layer 116 is in order to form at dry-etching described later time control etching speed and the lenticule that obtains intended shape.Therefore, the etching speed of phenolic resins layer 116 is preferably slower than the etching speed of lens master mold 117M.In addition, phenolic resins layer 116 when forming lens master mold 117M described later by hot reflux, the control action of performance hot reflux.
Moreover, on phenolic resins layer 116, form photo-sensitive resin 117 (Figure 38 C).Photo-sensitive resin 117 can be formed by the allyl resin that for example has alkali soluble, photonasty, hot reflux.
Then, by photo-mask process photo-sensitive resin 117 is made the pattern of rectangle.Then, reflux by heat treatment and become round.Thus, form lens master mold 117M (Figure 38 D).
Then, be that mask carries out the dry-etching processing with lens master mold 117M.Thus, on lens jacket LL,, form lenticule 115 (Figure 38 E) via the shape of phenolic resins layer 116 transfer printing lens master mold 117M.
By the method for above explanation, can make image pickup part 110.
In addition, in image pickup part 110,, manufacturing process is oversimplified by making transparent filter 114W and lenticule 115 become identical material and making with transparent filter 114W and lenticule 115 incorporate structures.
Particularly, in the present embodiment, form transparent filter 114W and the lens jacket LL that is used to form lenticule 115 respectively, if but transparent filter 114W is identical material with lenticule 115, then can carry out the operation of Figure 37 D and the operation of Figure 38 A simultaneously.That is, after the operation of Figure 37 C, fill the position that forms transparent filter 114W, and form the lens jacket LL that contains ultra-violet absorber, make it cover red filter 114R and yellow filter 114Y by 1 coating.Then, carry out the formation operation of lenticule 115.Thus, can make as shown in Figure 39 transparent filter 114W and the image pickup part 110A of lenticule 115 integrated structures, manufacturing process is oversimplified.
In addition, as shown in figure 40,, then can further omit manufacturing process if do not form the image pickup part 110B of planarization layer 113.
＜the 13 execution mode 〉
Figure 41 is the schematic diagram of the structure of the imaging apparatus that relates to of expression the 13rd execution mode of the present invention, and Figure 42 is the figure of the notion of the ordered state when the incident light side is seen colour filter 114 the image pickup part 110T that this execution mode relates to.In addition, Figure 43 A and Figure 43 B are respectively VII-VII ' cutaway view and the VIII-VIII ' cutaway views of the image pickup part 110T among Figure 41.
Black photo detector 112Blk will send to red operational part 121R according to the signal of telecommunication that the light that receives obtains.
In addition, the color material of filter 114Blk also can be used the material that has mixed C.I.Pigment Red 255, C.I.Pigment Yellow 139 and C.I.Pigment Violet 23 by way of compensation.
In addition, 1 group of transparent filter 114W, yellow filter 114Y, red filter 114R, compensation filter 114Blk corresponding to 1 pixel.In addition, if transparent filter 114W, yellow filter 114Y, red filter 114R, compensation filter 114Blk are expressed as W, Y, R ', Blk respectively, for example then form the colour filter 114 of ordered state as shown in Figure 42.
Red operational part 121R obtains the signal of telecommunication from red photo detector 112R and black photo detector 112Blk.Thus, according to light intensity value that receives via red filter 114R and the light intensity value that receives via compensation filter 114Blk, obtain the observation value of the red light that is compensated.
According to said structure, be respectively Dw, Dy, Dr, Dblk if establish the light intensity value that obtains by incident light photo detector 112W, yellow photo detector 112Y, red photo detector 112R, if the observation value of the red light that blue light, green light, quilt are compensated is respectively Db, Dg, HDr, then the arithmetic expression shown in following formula (5)～(7) is set up.
Db＝Dw—Dy ……(5)
Dg＝Dy—Dr ……(6)
HDr＝Dr—Dblk?……(7)
That is, the image pickup part 110T that present embodiment relates to is owing to having compensation filter 114Blk, so the red observation value of the infrared ray influence that can be removed.Colour balance and the good imaging apparatus of color reproduction thus, can access the data of the red light of the visual sensitivity that approaches the people, so can be provided.
In addition, by being formed with the imaging apparatus of the present invention of compensation filter 114Blk, can provide except having the effect of eliminating above-mentioned ultraviolet influence, compare the small-sized image pickup element highly sensitive, that color reproduction is good with the imaging apparatus that possesses infrared intercepting filter.
In addition, in the present embodiment, compensation filter 114Blk as shown in figure 44 also can be by for example constituting as the purple filter 114V of the colour filter of purple and the optical superposition of red filter 114R.Purple filter 114V for example can utilize, and C.I.Pigment Violet 23 forms.
(compensation filter)
Here, compensation filter 114Blk is replenished.
(for example the zone in addition of 400nm～700nm) also has high sensitivity to solid-state imager such as CCD or CMOS at people's visible light.Particularly, for having high sensitivity than the wavelength zone of the visible wavelength head of district's long wavelength side (below be called " region of ultra-red ", for example the wavelength zone of 700nm～1100nm).Here, common organic colour filter does not have the light (infrared ray) of region of ultra-red by function.Therefore, the light of (for example long than 700nm long wavelength side) also incides in the photo detector outside people's the visual sensitivity zone, and the look of the object of observation that is obtained by imaging apparatus is different by the look of the object of observation of visualization with the people sometimes.
At this, the wavelength in people's visual sensitivity, the sensitivity of photo detector (SPD sensitivity) and the desirable infrared intercepting filter and the relation of transmissivity, for example shown in Figure 45.If the incident light that will be equivalent to infrared intercepting filter in the wave-length coverage of this oblique line portion shown in Figure 45 ends, then can reproduce the look of the visual sensitivity that approaches the people.In addition, in infrared intercepting filter, two kinds of reflection-type and absorption-types are arranged.The light wavelength in the infrared intercepting filter of reflection-type and the absorption-type infrared intercepting filter and the relation of transmissivity, for example shown in Figure 46.
But, under the situation of utilizing infrared intercepting filter with infrared ray cut, produce following problem.
At first, the problem that exists the miniaturization of imaging apparatus to be difficult to realize.For example, as the technology in the optical system that infrared intercepting filter is inserted into imaging apparatus, can enumerate the spy and open 2000-No. 19322 communiques and the spy opens the technology that proposes in clear 63-No. 73204 communiques.But, in these technology, make it cover the photo detector integral body of CMOS or CCD etc. when inserting infrared intercepting filter.Therefore, because the thickness of infrared intercepting filter, be difficult to realize include the miniaturization of the imaging apparatus of optical system.For example, absorptive-type infrared intercepting filter has the thickness of 1～3mm degree.
In addition, the problem that has the reduction difficulty of manufacturing cost.That is,, infrared intercepting filter need be assembled into the operation in the lens combination, difficulty so the reduction of manufacturing cost becomes using under the situation of colour filter as camera component.
Such problem can solve by utilizing the compensation filter and utilizing computing to eliminate ultrared influence.
In addition, in the imaging apparatus of the colour filter (C, M, Y) that possesses trichromatic colour filter of light (R, G, B) or complementary color system, the problem that the sensitivity of imaging apparatus descends if infrared intercepting filter is used in existence.This is because in the imaging apparatus that has used infrared intercepting filter, all photo detectors have been ended infrared ray.Therefore, the situation of infrared intercepting filter with the light absorption in the visible wavelength district of 550nm～700nm arranged, exist in the problem that the imaging apparatus medium sensitivity that possessed green and red colour filter etc. descends.
For this problem, can be by using transparent filter 114W, yellow filter 114Y, red filter 114R, further going back using compensation filter 114Blk and solve.Promptly, realize by the observation value that comes computing indigo plant, green, red light according to the light intensity value that obtains via transparent filter 114W, yellow filter 114Y, red filter 114R, compensation filter 114Blk, thus do not cause sensitivity just descend can playback light three primary colors.Moreover, because using compensation filter 114Blk, so can only from the observation value of red light, remove ultrared influence.
(the 1st embodiment)
Below, the manufacture method of the solid-state imager that an embodiment of present embodiment is related to describes.
At first, on the semiconductor substrate 111 that is formed with photo detector 112 and photomask, passivating film, rotary coating contains the allyl resin coating fluid of thermohardening type of Coumarins dyestuff with dye strength 5% after, heat-treat and realize dura materization.Thus, form the planarization layer 113 that constitutes by transparent resin.The postdural dichroism of this planarization layer 113 becomes shown in the a1 of Figure 47.In addition, for relatively, with the dye strength of Coumarins dyestuff be 1% and 10% o'clock dichroism be shown in a2 and a3 respectively.
Then, by the method for 3 photo-mask processs, form the colour filter of yellow filter 114Y, red filter 114R, compensation filter 114Blk respectively.Pel spacing is 2.5 μ m.In addition, the configuration of each filter is identical with the example of Figure 42.
Be used to form the chromatic photoresist agent (yellow resin bed YL) of yellow filter 114Y, use C.I.Pigment Yellow 139 as color material, also use and add organic solvents such as cyclohexanone, PGMEA, polymer lacquer, monomer, initator in the photonasty allyl resin structure.
Be used to form the chromatic photoresist agent of red filter 114R, use C.I.Pigment Red177, C.I.Pigment Red 48:1, C.I.Pigment Yellow 139 as color material.Other structures are identical with the situation of yellow filter 114Y.
Be used to form the chromatic photoresist agent of compensation filter 114Blk, use C.I.Pigment Red254, C.I.Pigment Yellow 139, C.I.Pigment Violet 23 as color material.Other structures are identical with the situation of yellow filter 114Y.
Then, the coating allyl resin coating fluid identical with planarization layer 113 makes it become the thickness of 0.8 μ m on colour filter 114.Then, carried out the dura mater processing in 6 minutes, form lens jacket LL by heating down at 200 ℃.Then, be coated with the phenolic resins of 1.0 μ m thickness, form phenolic resins layer 116.This phenolic resins layer 116 has etching control function and hot reflux controlled function.And then coating has the allyl resin (lens master mold material) of alkali soluble, photonasty, thermal fluidity, forms photo-sensitive resin 117.
Then, by having used the photo-mask process of developer solution, photo-sensitive resin 117 (lens master mold material) is formed rectangular patterns.Then, the heat treatment by 200 ℃ is flowed it.Thus, form hemispheric lens master mold 117M.In addition, the gap that can form between the lens master mold by the roughly suitable flow of height 0.45 μ m, one-sided 0.15 μ m is the level and smooth dome lens master mold 117M of 0.35 μ m.
At last, by the dry-etching device, using the mist of fluon class gas C3F8 and C4F8, is mask with lens master mold 117M, carries out etch processes.Thus, form the lenticule 115 in gap between the narrow lens of having eliminated the gap between lens in fact.
In addition, the etch-rate of the allyl resin of Shi Yonging is compared with the resin that constitutes lens master mold 117M in the present embodiment, is 1.2 times etch-rate faster.As the photo-sensitive resin 117 of the base resin of lens master mold 117M, the lenticule that surface roughness is less is processed as narrow gap, can improve the aperture opening ratio of lenticule 115.If make the etch-rate of the resin that constitutes lens master mold 117M identical, then the shape of lenticule 115 can be processed into size, the shape roughly the same with lens master mold 117M with the etch-rate of photo-sensitive resin 117 and lens jacket LL.
In the imaging apparatus of making like this, transparent filter 114W, yellow filter 114Y, red filter 114R, compensation filter 114Blk have dichroism shown in Figure 48.In Figure 48, b1, b2, b3, b4 represent the dichroism of transparent filter 114W, yellow filter 114Y, red filter 114R, compensation filter 114Blk respectively.As shown in figure 48, dichroism curve transmissivity in short wavelength region of each filter is lower, has the riser portions of transmissivity.In addition, transmissivity uprises in long wavelength region.Therefore become roughly S word shape.
In addition, by carrying out the look computing of above-mentioned (5) formula～(7) formula, can access having in appearance the imaging apparatus of indigo plant that dichroism is as shown in Figure 49 arranged, green, red filter.In Figure 49, c1, c2, c3 represent the dichroism of apparent indigo plant, green, red colour filter respectively.
In addition, spectroscopic measurements is following carrying out.
At first, measure the thickness of each colour filter 114 on the photo detector 112 and the thickness (planarization layer 113 and lens jacket LL) of transparent resin.For transparent resin, on the Si substrate, form film, measure its thickness by the film thickness gauge (Sloan corporate system DektakIIA) of contact.
Then, on glass substrate 111, form transparent resin and colour filter 114 with the identical thickness of measuring of thickness, by spectrophotometer (the system U of Hitachi-3400spectrophotometer) measurement beam split.At this moment, be benchmark only with glass substrate (glass substrate that does not have colour filter and transparent resin), only measure the dichroism of colour filter and transparent resin.In addition, the value of transmissivity is that clear glass with refractive index 1.5 is as 100%.
(the 2nd embodiment)
In the present embodiment, use the allyl resin coating fluid that contains the thermohardening type of benzotriazole dyestuff with dye strength 5%, the coating fluid rotary coating is formed planarization layer 113, transparent filter 114W, lens jacket LL.Similarly make imaging apparatus with the 1st embodiment in addition.
Here, contain the dichroism of the transparent resin of benzotriazole dyestuff with dye strength 5%, shown in the d1 of Figure 50.In addition, for relatively, with the dye strength of benzotriazole dyestuff be 1% and 10% o'clock dichroism be shown in d2 and d3 respectively.
In the imaging apparatus of making like this, the dichroism of transparent filter 114W, yellow filter 114Y, red filter 114R, compensation filter 114Blk is respectively shown in e1, the e2 of Figure 51, e3, e4.
In addition, by carrying out the look computing of above-mentioned (5) formula～(7) formula, can access having in appearance the imaging apparatus of the indigo plant that possesses the dichroism shown in Figure 52, green, red filter.In Figure 52, f1, f2, f3 represent the dichroism of apparent blue filter, green filter, red filter respectively.
Like this, change, can set a half value of short wavelength side by the dichroism that makes transparent resin layer (planarization layer 113, transparent filter 114W, lens jacket LL).Therefore, can carry out the look characteristic selection (in fact approach visual sensitivity look or with same look of organic pigment etc.).
In addition, as secondary effect, the pattern exposure light in the time of can preventing by photoetching process formation colour filter reflexes to the halation that substrate produces.Therefore, can form the high colour filter of resolution.
In addition, in the present embodiment, owing to can remove ultrared influence by calculation process by using compensation filter 114Blk, so can omit infrared intercepting filter.
In addition,, can also not consider ultrared influence, use the same method and make the not imaging apparatus of the structure of using compensation filter 114Blk from the viewpoint of the manufacturing of simplifying imaging apparatus.Become the structure of using infrared intercepting filter in the case, but in the photoetching that comprises pattern exposure, development, the advantage that the omission operation of look is processed is gone in twice of colour filter that colour filter that can be by being used to form yellow filter 114Y is arranged and be used to form red filter 114R.Moreover, if make clear filter and lenticule integrated, then can further omit operation.With respect to this,, need 3 times the look of going in order to be formed on the indigo plant of using in the common imaging apparatus, green, red colour filter.
＜the 14 execution mode 〉
The imaging apparatus 201 of present embodiment possesses plural filter at least, possesses: the 1st filter, and the light for the short wavelength side shorter than the 1st wavelength has the inhibition transmissison characteristic, and the light for than the long long wavelength side of the 1st ripple has transmissison characteristic; With the 2nd filter, the light for than the long long wavelength side of the 2nd ripple has transmissison characteristic.In addition, each filter that present embodiment relates to has the inhibition transmissison characteristic in short wavelength region, have transmissison characteristic in long wavelength region.In addition, on dichroism, preferably has the roughly transmittance graph of S word shape.
Light via the 1st filter and the 2nd filter incident is received by the 1st photo detector and the 2nd photo detector respectively, is transformed to the signal of telecommunication.
Particularly, imaging apparatus 201 possesses the 1st wavelength zone that demonstrates 10% following transmissivity in the wavelength zone of 350nm～750nm, and to have in than the 450nm～1100nm wavelength zone of the 1st wavelength head of district's long wavelength region transmissivity be filter F1～filter F7 more than 90%.In addition, the 1st filter and the 2nd filter are the titles of expression relativeness, and filter F1～filter F7 can become the 1st filter and the 2nd filter respectively.
Filter F1～filter F7 is respectively applied for blue light, yellow-green light, sodium yellow, orange-colored light, red light, the infrared light (being expressed as black for convenience) of catching white light (transparent), greening.Say that at length the dichroism of each filter F1～filter F7 is respectively shown in L1～L7 of Figure 53.
In addition, in the present embodiment, colour filter F1, F4, F6 are equivalent to transparent filter 2W, yellow filter 2Y, red filter 2R respectively.
Then, the method for asking the observation value that is used for being reproduced in each filter F1～incident light that filter F7 receives is described.
At first, if light incides in the imaging apparatus 201, then via the 1st some filter and the 2nd filter, by the 1st photo detector and the 2nd photo detector reception incident light of correspondence as filter F1～filter F7.The light that receives is transformed to the signal of telecommunication.
Then, as expression notion among Figure 54, the data value D2 of the light that receives according to the data value D1 of the light that is received by the 1st filter with by the 2nd filter obtains the data value DC of the corresponding wavelength of difference in the light wavelength district that receives with the 1st filter and the 2nd filter.
In other words, the apparent colour filter of the look that the 1st filter is corresponding with the difference of the same wavelength zone separately of the 2nd filter formation.
For example, can access blue observation value Db according to filter F1 (in vain) and filter F4 (Huang).Can access green measured value Dg according to filter F4 (Huang) and filter F6 (red).Can access the data value HDr that is not subjected to the redness that infrared ray influences according to filter F6 (red) and filter F7 (deceiving).
Like this, the trichromatic data value of light can be accessed, the incident light that receives can be reproduced.
Moreover, for example by filter F2 (indigo plant of greening) and filter F3 (yellowish green) are carried out subtraction process, can access the numerical value of the blueness (being intertwined with green blueness) of greening.By the subtraction process of filter F3 (yellowish green), can obtain yellowish green numerical value with filter F4 (Huang).By the subtraction process of filter F4 (Huang), can obtain yellow numerical value with filter F5 (orange).By the subtraction process of filter F5 (orange), can obtain orange numerical value with filter F6 (red).
That is,,, not only reproduced the incident light that receives, can also carry out the extraction of finer look by using two filters that constitute by the 1st filter among filter F1～filter F7 and the 2nd filter according to above-mentioned method.
In addition, in the present embodiment illustration 7 kinds of filter F1～filter F7, but be not limited to this.Promptly, so long as have the 1st wavelength zone that demonstrates the transmissivity below 10% in the wavelength zone of 350nm～750nm and have at the long wavelength region than the 1st wavelength head of district is that transmissivity is the colour filter of the wavelength zone more than 90% in 450nm～1100nm wavelength zone, and present embodiment does not just foreclose it.
In addition, the imaging apparatus 201 that present embodiment relates to can contain the highest proportional colour filter at high proportion by the color material that dry-etching forms in the colour filter, and forms than the colour filter of the low ratio beyond the colour filter at high proportion by photoetching process and to make.
＜the 15 execution mode 〉
In the present embodiment, comprise the transmissivity rising (increase) in different wavelength zones respectively of a plurality of filters of colour filter, compensation filter, transparent filter.
Figure 55 is the front view of an example of the imaging apparatus that relates to of expression present embodiment.In this Figure 55, the example of the state of the filter F1～F7 of the imaging apparatus 210 that expression is seen from light incident side.Filter F1～F7 comprises colour filter, compensation filter, transparent filter.
Photo detector (components of photo-electric conversion) H1～H7 receives incident light via filter F1～F7 respectively, and observation value E1～E7 is exported to operational part 62.
Figure 56 is the curve chart of the example that concerns between the optical wavelength of filter F1～F7 of possessing in the imaging apparatus 210 of expression and the transmissivity.
A plurality of filter F1～F7 that the imaging apparatus 210 that present embodiment relates to possesses have the characteristic that the optical transmission of the short short wavelength side of wavelength WL1～WL7 of the own transmissivity rising part of contrast suppresses respectively, have the light transmissive characteristic of the long wavelength side that wavelength WL1～WL7 of making than the transmissivity rising part of oneself grows.
In imaging apparatus 210, by the light of photo detector (components of photo-electric conversion) H1～H7 observation via filter F1～F7 incident.Observation value E1～E7 separately of operational part 220 input photo detector H1～H7.
Filter F1～F7 has following branch light curve: being low transmissivity in than the short short wavelength region of the transmissivity rising part of oneself, is high-transmission rate at long wavelength region, and transmissivity is with roughly S word shape rising.Filter F1～F7 transmissivity rising in different wavelength zones respectively.
In the present embodiment, filter F1 is transparent filter (a for example water white filter).
Filter F4 is the colour filter of the Huang that uses in the extraction that the Huang Cheng of light divides.
Filter F6 is the red colour filter that uses in the extraction of the red composition of light.
Filter F7 has to suppress light transmissive characteristic, have the compensation filter that makes light transmissive characteristic at the long wavelength side than the visible wavelength head of district in the visible wavelength district.
In the characteristic of optical transmission rate and wavelength, the wavelength WL2 of the transmissivity rising part of filter F2 is between the wavelength WL3 of transmissivity rising part of the wavelength WL1 of transmissivity rising part of filter (transparent filter) F1 and filter F3.For example, make the wavelength WL2 of the transmissivity rising part of filter F2 that the wavelength zone between the wavelength WL3 of the transmissivity rising part of the wavelength WL1 of the transmissivity rising part of filter (transparent filter) F1 and filter F3 is divided into two zones.
In addition, in the characteristic of optical transmission rate and wavelength, the wavelength WL4 of the transmissivity rising part of filter (yellow filter) F4 is between the wavelength WL6 of transmissivity rising part of the wavelength WL3 of transmissivity rising part of filter F3 and filter (red filter) F6.
Equally, the wavelength WL5 of the transmissivity rising part of filter F5 is between the wavelength WL6 of transmissivity rising part of the wavelength WL4 of transmissivity rising part of filter F4 and filter (red filter) F6.
In the characteristic of optical transmission rate and wavelength, make the wavelength WL4 of the transmissivity rising part of filter (yellow filter) F4, at the short wavelength side shorter than the wavelength WL5 of the transmissivity rising part of filter F5, transmissivity increases.For example, wavelength WL4, the WL5 of the transmissivity rising part of filter F4, F5 are divided into 3 zones with the wavelength zone between the wavelength WL6 of the transmissivity rising part of the wavelength WL3 of the transmissivity rising part of filter F3 and filter (red filter) F6.
As mentioned above, operational part 220 among the observation value E1～E7 of the incident light that observes via filter F1～F7, carry out subtraction process via the observation value of the incident light of any two filters observation, obtain observation value with the light of the corresponding wavelength zone of group of these any two filters.
For example, operational part 220 deducts the observation value E4 that observes via filter (yellow filter) F4 from the observation value E1 that observes via filter (transparent filter) F1, the observation value G1 that output is blue.
In addition, for example operational part 220 deducts the observation value E6 that observes via filter (red filter) F6 from the observation value E4 that observes via filter (yellow filter) F4, exports green observation value G2.
In addition, for example operational part 220 deducts the observation value E7 that observes via compensation filter F7 from the observation value E6 that observes via filter (red filter) F6, and the red observation value G3 of infrared ray influence (composition) has been removed in output.
Moreover operational part 220 can be obtained the observation value of finer look by using filter F2, F4～F6.
For example, operational part 220 deducts the observation value E3 that observes via filter F3 from the observation value E2 that observes via filter F2, and output is intertwined with the observation value G4 of green indigo plant.
For example, operational part 220 deducts the observation value E4 that observes via filter (yellow filter) F4 from the observation value E3 that observes via filter F3, export yellowish green observation value G5.
For example, operational part 220 deducts the observation value E5 that observes via filter F5 from the observation value E4 that observes via filter (yellow filter) F4, the observation value G6 that output is yellow.
For example, operational part 220 deducts the observation value E6 that observes via filter (red filter) F6 from the observation value E5 that observes via filter F5, export orange observation value G7.
The transmissivity of filter F1～F7 is preferably, and is more than 90% under the situation of light wavelength for the long wavelength side longer than 750nm.This is for the composition with the light of region of ultra-red ends, and observes the intensity of light component in people's visible wavelength district accurately.
According to the difference of each manufacturer, photo detector (components of photo-electric conversion) H1～H7 there are differences sometimes in the sensitivity of short wavelength region.
In filter (transparent filter) F1 under the situation of additional ultra-violet absorber, the transmissivity that makes filter F1 is that 50% light wavelength is preferably (ultraviolet region) between 350nm～400nm.Thereby the transmissivity that makes filter F1～F7 is 50% light wavelength, is preferably more than the 350nm.
On the other hand, in filter (transparent filter) F1, do not add under the situation of ultra-violet absorber, preferably, it is more than the 400m that the transmissivity of other filters F2～F7 except filter F1 becomes 50% light wavelength, and the transmissivity of filter F1 is that 400nm is more than 90% when above in light wavelength.
Thus, the influence that photo detector H1～H7 is subjected to the poor sensitivity of each manufacturer can be alleviated, blue observation value can be obtained under certain condition.
In addition, people's visual sensitivity is approximately between wavelength 400nm～700nm, and for the sensitivity of regulating the red sector territory and the adjusting of carrying out red observation value, the transmissivity that preferably makes filter F1～F7 is that 50% light wavelength is below the 750nm.
By above discussion, in filter (transparent filter) F1, added under the situation of ultra-violet absorber, preferably, a plurality of filter F1～F7 light transmission in the zone of 350nm～750nm has the value more than 50%, in light wavelength is that light transmission is more than 90% under the situation of the long wavelength side longer than about 750nm.
In addition, in filter (transparent filter) F1, do not add under the situation of ultra-violet absorber, preferably, a plurality of filter F2～F7 except filter F1 are that light transmission has 50% value in the zone of 400nm～750nm in light wavelength, light wavelength for the situation of the long wavelength side longer than about 750nm under light transmission be more than 90%, filter F1 light transmission in the zone of the long wavelength side of growing than 400nm is more than 90%.
In addition, in the present embodiment, also lenticule can be set at the light incident side of filter F1～F7, filter F1 also can be formed by identical transparent resin with lenticule.
As described above, by suitably being chosen in the different filter of dichroism that transmissivity in the different wavelength zones sharply increases (F1～F7) for example, selected filter is configured on the photo detector, carry out computing based on the observation data that obtains by photo detector, thereby, except red (R), green (G), blue (B), can obtain the observation value of other finer colour content.
In addition, the compensation filter that the respective embodiments described above relate to is made by red is mixed with purple dye, can form, and transmissivity becomes 50% when the wavelength of about 660nm.
In addition, make the compensation filter, can access when the wavelength of about 740nm transmissivity and be 50% compensation filter by red is mixed with blue or green pigment.
Industrial applicibility
According to the present invention, can provide colour balance and color reproduction good imaging apparatus.
Claims (29)
1, a kind of imaging apparatus possesses: filter is used for extracting the specific colour content of incident light; Photo detector is observed above-mentioned incident light via above-mentioned filter, it is characterized in that,
Above-mentioned filter comprises:
Transparent filter;
Yellow filter is used for the extraction of yellow composition;
Red filter is used for the extraction of red composition.
2, imaging apparatus as claimed in claim 1 is characterized in that,
Above-mentioned photo detector also possesses:
The incident light photo detector is observed above-mentioned incident light via above-mentioned transparent filter;
Yellow photo detector is observed above-mentioned incident light via above-mentioned yellow filter;
Red photo detector is observed above-mentioned incident light via above-mentioned red filter;
From the observed result that observes by above-mentioned incident light photo detector, deduct the observed result that observes by above-mentioned yellow photo detector, obtain the arithmetic element of blue observed result;
From the observed result that observes by above-mentioned yellow photo detector, deduct the observed result that observes by above-mentioned red photo detector, obtain the arithmetic element of green observed result.
3, imaging apparatus as claimed in claim 1 or 2 is characterized in that,
Also possess the above-mentioned yellow filter of covering and above-mentioned red filter, and form the transparent planarization layer of above-mentioned transparent filter.
4, imaging apparatus as claimed in claim 3 is characterized in that,
Also possess by above-mentioned transparent planarization layer and form, be used for the lenticule of light optically focused to the above-mentioned photo detector.
5, imaging apparatus as claimed in claim 2 is characterized in that,
Above-mentioned transparent filter absorbs ultraviolet ray at the wavelength zone shorter than 400nm.
6, imaging apparatus as claimed in claim 5 is characterized in that,
Above-mentioned transparent filter has following dichroism:
For the light of the arbitrary wavelength in the wavelength zone with 365nm～420nm, light transmission demonstrates 50% value; And during the wavelength more than 450nm, become the light transmission more than 90%.
7, imaging apparatus as claimed in claim 6 is characterized in that,
Above-mentioned transparent filter has following dichroism: for the light of the arbitrary wavelength in the wavelength zone with 390nm～420nm, light transmission demonstrates 50% value; And, become the light transmission more than 90% for the light of the wavelength more than the 450nm.
8, imaging apparatus as claimed in claim 2 is characterized in that,
Above-mentioned transparent filter and above-mentioned yellow filter and above-mentioned red filter in abutting connection with arrangement, form the unit that look separates with clathrate;
The pixel count of above-mentioned yellow filter equates with the total pixel count of above-mentioned transparent filter and above-mentioned red filter.
9, imaging apparatus as claimed in claim 2 is characterized in that,
Above-mentioned filter also possesses and have the compensation filter that suppresses transmissison characteristic, has transmissison characteristic in the wavelength side longer than the visible region in the visible wavelength district.
10, imaging apparatus as claimed in claim 9 is characterized in that,
Above-mentioned photo detector also possesses the compensation photo detector of observing above-mentioned incident light via above-mentioned compensation filter;
Also possess and from the observed result that observes by above-mentioned red photo detector, deduct the observed result that observes by above-mentioned compensation photo detector, obtain the arithmetic element of the red observed result that is compensated.
11, imaging apparatus as claimed in claim 10 is characterized in that,
Above-mentioned compensation filter has the transmissison characteristic with the roughly the same level of above-mentioned red filter in the wavelength side than the visible wavelength head of district.
12, imaging apparatus as claimed in claim 11 is characterized in that,
The light transmission of above-mentioned compensation filter and the light transmission of above-mentioned red filter poor is about 5% scope for the zone of about 400nm～550nm and than the wavelength zone that 750nm grows in optical wavelength;
Above-mentioned compensation filter is in the zone of optical wavelength for about 630nm～750nm, and light transmission demonstrates 50% value.
13, imaging apparatus as claimed in claim 12 is characterized in that,
Above-mentioned compensation filter forms by the optical superposition of polychrome.
14, imaging apparatus as claimed in claim 13 is characterized in that,
Above-mentioned compensation filter forms by the optical superposition of purple and red dichromatism.
15, imaging apparatus as claimed in claim 13 is characterized in that,
Above-mentioned compensation filter forms by the optical superposition of blue or green and red dichromatism.
16, imaging apparatus as claimed in claim 13 is characterized in that,
Above-mentioned compensation filter is stacked a plurality of filter and forming.
17, imaging apparatus as claimed in claim 10 is characterized in that,
Above-mentioned transparent filter, above-mentioned yellow filter and above-mentioned red filter and above-mentioned compensation filter in abutting connection with arrangement, form the unit that look separates with clathrate.
18, imaging apparatus as claimed in claim 10 is characterized in that,
Above-mentioned compensation filter is that the light of 400nm～550nm demonstrates the transmissivity below 5% for wavelength zone;
Demonstrate 50% transmissivity for light with the arbitrary wavelength among wavelength zone 620nm～690nm;
Demonstrate transmissivity more than 70% for the light of wavelength 700nm.
19, imaging apparatus as claimed in claim 18 is characterized in that,
Above-mentioned compensation filter is formed by the colored resin composition of the pigment that comprises C.I.Pigment Violet 23 and C.I.PigmentYellow 139 at least.
20, imaging apparatus as claimed in claim 18 is characterized in that,
Above-mentioned compensation filter is formed by the colored resin composition of the pigment that comprises C.I.Pigment Violet 23 and C.I.PigmentYellow 139 and C.I.Pigment Red 254 at least.
21, as claim 2 or 10 described imaging apparatuss, it is characterized in that,
Possesses the substrate that has disposed above-mentioned photo detector;
Make incident light incide zone on the substrate beyond the zone on the above-mentioned photo detector, be provided with the reflection of light beyond the incident light that is used for suppressing inciding above-mentioned photo detector and the photomask of transmission.
22, imaging apparatus as claimed in claim 21 is characterized in that,
Above-mentioned photomask has the ultraviolet radiation absorption function.
23, imaging apparatus as claimed in claim 22 is characterized in that,
Above-mentioned photomask has the infrared ray absorbing function.
24, imaging apparatus as claimed in claim 23 is characterized in that,
Stacked at least one the film that has in ultraviolet radiation absorption function and the near-infrared absorbing function on above-mentioned photomask.
25, a kind of imaging apparatus receives incident light with a plurality of components of photo-electric conversion via a plurality of filters, it is characterized in that possessing:
The 1st filter, be in above-mentioned a plurality of filter, be included in the filter arbitrarily in above-mentioned a plurality of filter, have the inhibition transmissison characteristic, have transmissison characteristic for light than the long wavelength side of above-mentioned the 1st ripple for the light of the wavelength side shorter than the 1st wavelength;
The 2nd filter, it is another different in above-mentioned a plurality of filter filters with above-mentioned the 1st filter, light for the wavelength side shorter than the 2nd wavelength has the inhibition transmissison characteristic, has transmissison characteristic for light than the long wavelength side of above-mentioned the 2nd ripple, wherein, the short wavelength side of above-mentioned ratio the 2nd wavelength is than the long wavelength side of above-mentioned the 1st ripple;
The 1st components of photo-electric conversion are in above-mentioned a plurality of components of photo-electric conversion, receive incident light via above-mentioned the 1st filter;
The 2nd components of photo-electric conversion are another different with above-mentioned the 1st components of photo-electric conversion in above-mentioned a plurality of components of photo-electric conversion components of photo-electric conversion, receive incident light via above-mentioned the 2nd filter; And
Arithmetic element, observation value to the observation value of the light that observed by above-mentioned the 1st components of photo-electric conversion and the light that is observed by above-mentioned the 2nd components of photo-electric conversion carries out subtraction process, obtains the observation value of the light of the look corresponding with the difference of the wavelength zone of above-mentioned the 1st filter and above-mentioned the 2nd filter.
26, imaging apparatus as claimed in claim 25 is characterized in that,
Above-mentioned the 1st wavelength is the arbitrary wavelength in 350nm～750nm wavelength zone.
27, as claim 25 or 26 described imaging apparatuss, it is characterized in that,
Above-mentioned the 1st filter is that light transmission is the transparent filter more than 90% in the light wavelength territory, wavelength lateral areas longer than 400nm;
Filter in above-mentioned a plurality of filter, that have the characteristic that the optical transmission rate rises in the longest wavelength side is to have the compensation filter that suppresses transmissison characteristic, has transmissison characteristic in the wavelength side than the visible wavelength head of district in the visible wavelength district;
Other filters except above-mentioned compensation filter, be about in the zone of 350nm～750nm in light wavelength, light transmission demonstrates 50% value, is that light transmission demonstrates the value more than 90% under the situation of the wavelength side longer than about 750nm in light wavelength.
28, a kind of camera head possesses: imaging apparatus, detect the light intensity value with specific wavelength district in the incident light; Arithmetic element is reproduced incident light according to the detected light intensity value of above-mentioned imaging apparatus, it is characterized in that,
Above-mentioned imaging apparatus possesses:
Semiconductor substrate;
The components of photo-electric conversion are formed on the above-mentioned semiconductor substrate, are used to receive incident light;
Transparent filter is formed on the above-mentioned components of photo-electric conversion, makes above-mentioned incident light transmission;
Red filter is formed on the above-mentioned components of photo-electric conversion, is used for extracting the red composition of above-mentioned incident light;
Yellow filter is formed on the above-mentioned components of photo-electric conversion, is used for extracting the yellow composition of above-mentioned incident light;
Transparent resin layer covers above-mentioned colour filter and forms; And
Lenticule is formed on the above-mentioned colour filter;
Above-mentioned arithmetic element also possesses:
From the intensity level of the incident light that receives via above-mentioned transparent filter, deduct the intensity level of the incident light that receives via above-mentioned yellow filter and carry out subtraction process, the unit of the value of the blue composition of computing incident light;
From the intensity level of the incident light that receives via above-mentioned yellow filter, deduct the intensity level of the incident light that receives via above-mentioned red filter and carry out subtraction process, the unit of the value of the green composition of computing incident light.
29, camera head as claimed in claim 28 is characterized in that,
Above-mentioned imaging apparatus also possesses the compensation filter of the infrared ray composition that is used for extracting above-mentioned incident light;
Above-mentioned arithmetic element also possesses and deducts the intensity level of the incident light that receives via above-mentioned compensation filter and carry out subtraction process, the unit of the value of the red composition of computing incident light from the intensity level of the incident light that receives via above-mentioned red filter.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005177990 | 2005-06-17 | ||
| JP177990/2005 | 2005-06-17 | ||
| JP215598/2005 | 2005-07-26 | ||
| JP228517/2005 | 2005-08-05 | ||
| JP228518/2005 | 2005-08-05 | ||
| JP326173/2005 | 2005-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101044622A CN101044622A (en) | 2007-09-26 |
| CN100472791C true CN100472791C (en) | 2009-03-25 |
Family
ID=38808999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006800006887A Active CN100472791C (en) | 2005-06-17 | 2006-05-12 | Imaging element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100472791C (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103608704B (en) | 2011-09-14 | 2016-03-16 | 富士胶片株式会社 | Colored radiation-sensitive composition, pattern formation method, colored filter and preparation method thereof and solid state image sensor |
| DE102014111945A1 (en) * | 2014-05-19 | 2015-11-19 | Zentrum Mikroelektronik Dresden Ag | Functional unit with radiopaque agents |
| JP6291048B2 (en) * | 2014-06-24 | 2018-03-14 | マクセル株式会社 | Imaging processing apparatus and imaging processing method |
| CN105181130A (en) * | 2015-07-03 | 2015-12-23 | 中国电子科技集团公司信息科学研究院 | Detector and manufacturing method thereof |
| JP2019016667A (en) * | 2017-07-05 | 2019-01-31 | ソニーセミコンダクタソリューションズ株式会社 | Imaging device and imaging apparatus |
| US10249771B2 (en) * | 2017-07-27 | 2019-04-02 | Visera Technologies Company Limited | Filter collimators and methods for forming the same |
| US11184510B2 (en) * | 2018-04-13 | 2021-11-23 | Panavision International, L.P. | Electronic camera filter |
| CN111584673A (en) * | 2020-05-22 | 2020-08-25 | 成都天马微电子有限公司 | Sensor, method for manufacturing sensor, and electronic device |
-
2006
- 2006-05-12 CN CNB2006800006887A patent/CN100472791C/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN101044622A (en) | 2007-09-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100866718B1 (en) | Imaging element | |
| CN100472791C (en) | Imaging element | |
| CN100505277C (en) | Image pick-up component | |
| CN100440518C (en) | Solid-state imaging device and manufacturing method therefor | |
| CN105408426B (en) | Coloured composition, cured film, colored filter, the manufacture method of colored filter, solid-state imager and image display device | |
| CN106461830B (en) | Infrared sensor, near-infrared absorbing composition, photosensitive polymer combination, compound and its application | |
| CN108474884A (en) | Composition, film, near infrared ray cut-off filter, laminated body, pattern forming method, solid-state imaging element, image display device, infrared sensor and colour filter | |
| CN105074570B (en) | Colour radiation sensitive compositions and its purposes | |
| JP4882182B2 (en) | Solid-state image sensor | |
| JP4835065B2 (en) | Manufacturing method of imaging device | |
| CN106575000B (en) | Photosensitive coloring composition, using its solid photographic device manufacturing method and solid photographic device | |
| CN109642972A (en) | Composition, film, near infrared ray cut-off filter, pattern forming method, laminated body, solid-state imager, image display device, camera model and infrared sensor | |
| CN107614626A (en) | Coloured composition, film, colour filter, pattern formation method, the manufacture method of colour filter, solid-state imaging element and infrared ray sensor | |
| TW201700624A (en) | Curable composition, cured film, infrared ray pass filter, and solid state imaging apparatus | |
| CN106660308A (en) | Laminate, infrared absorption filter, band pass filter, method for manufacturing laminate, kit for forming band pass filter, and image display device | |
| JP2004200360A (en) | Solid-state imaging device and method of manufacturing the same | |
| CN108291989A (en) | Near infrared ray absorbing composition, film, infrared ray cut off filter, solid-state imager, infrared absorbent and compound | |
| JP5124917B2 (en) | Image sensor | |
| JP5200319B2 (en) | Image sensor | |
| JP5028791B2 (en) | Imaging device and imaging apparatus | |
| JP5445643B2 (en) | Image sensor | |
| JP5056709B2 (en) | Manufacturing method of solid-state imaging device | |
| JP2578466B2 (en) | Solid-state imaging device | |
| JP2003222719A (en) | Color filter using organic pigment | |
| JPH0381122B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |