CN100470968C - Pulsed Lasers for Improved Output Beam Quality - Google Patents
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Abstract
用于提高输出光束质量的脉冲激光器,属于激光器技术领域,其特征在于,该激光器包括泵浦源、激光增益介质、可饱和吸收器件、腔镜。通过改变可饱和吸收器件沿径向的损耗,可有效的抑制高阶横模,获得高光束质量的激光输出。具体可通过改变可饱和吸收器件径向的吸收因子,或者在可饱和吸收器件的通光面上的镀变反射率膜等方式实现。本发明具有简单有效、工作稳定可靠的优点,解决了传统技术带来系统复杂性增加和稳定性降低的问题。
A pulsed laser for improving the quality of an output beam belongs to the technical field of lasers, and is characterized in that the laser includes a pump source, a laser gain medium, a saturable absorbing device, and a cavity mirror. By changing the loss of the saturable absorbing device along the radial direction, the high-order transverse mode can be effectively suppressed, and the laser output with high beam quality can be obtained. Specifically, it can be realized by changing the absorption factor in the radial direction of the saturable absorbing device, or plating a variable reflectivity film on the light-transmitting surface of the saturable absorbing device. The invention has the advantages of being simple and effective, stable and reliable in operation, and solves the problems of increased system complexity and decreased stability caused by the traditional technology.
Description
技术领域 technical field
本发明涉及一种激光器,特别涉及一种高光束质量的脉冲激光器,属于激光器技术领域。The invention relates to a laser, in particular to a pulse laser with high beam quality, and belongs to the technical field of lasers.
背景技术 Background technique
脉冲激光在工业加工、信息传输、远程传感等领域发挥了重要的作用。目前,普遍采用调Q技术来得到高峰值功率和持续时间很短的激光脉冲。在很多工业及军事应用中,要求激光输出光束具有较高的光束质量。目前普遍采用光阑选模、特殊稳定腔或非稳腔等措施,而这些措施或者降低激光器效率,或者增加谐振腔复杂性,或者降低系统稳定性。而被动调Q激光器在同样的激光器工作参数下,其输出光束质量优于主动调Q激光器,这主要得益于可饱和吸收器件的动态光阑特性。Pulsed lasers play an important role in industrial processing, information transmission, remote sensing and other fields. At present, Q-switching technology is commonly used to obtain laser pulses with high peak power and short duration. In many industrial and military applications, laser output beams are required to have high beam quality. At present, measures such as diaphragm mode selection, special stable cavity or unstable cavity are generally used, and these measures either reduce the efficiency of the laser, increase the complexity of the resonator, or reduce the stability of the system. However, under the same laser operating parameters, the output beam quality of passively Q-switched lasers is better than that of actively Q-switched lasers, which is mainly due to the dynamic aperture characteristics of saturable absorbing devices.
关于可饱和吸收器件的动态光阑特性对提高激光输出光束质量的作用,在很多光学专业的著作中都有论述(如:蓝信钜,激光技术,科学出版社,第二版,2005,125页)。早在1965年,W.R.Sooy就在理论上分析了可饱和吸收器件的模式选择特性(详见W.R.Sooy,The natural selection of modes in a passive q-switched laser,Applied Physics Letters,v 7,p36-37)。2002年,郑权等人报导了Cr:YAG作为被动调Q元件时的选横模和选纵模的作用(详见郑权,陈颖新,赵岭,钱龙生,可饱和吸收材料Cr:YAG做被动调Q元件时的选模作用,光子学报,第31卷,550-552页)。2006年,Junewen Chen等人报导了各种可饱和吸收材料作为慢Q开关应用时,所表现出来的选横模特性(详见Junewen Chen,Jun-Ting Linand Ou-Yang Mang,Smaller output beam divergence in the slowly opened Q-switch operation,Optical Review,v13,p69-76)。The effect of the dynamic aperture characteristics of saturable absorbing devices on improving the quality of laser output beams has been discussed in many optical professional works (such as: Lan Xinju, Laser Technology, Science Press, second edition, 2005, 125 Page). As early as 1965, W.R. Sooy theoretically analyzed the mode selection characteristics of saturable absorption devices (see W.R. Sooy, The natural selection of modes in a passive q-switched laser, Applied Physics Letters,
此外,采用变反射率镜作为输出耦合镜也具有提高输出光束质量的作用,关于这一点在很多光学专业的著作中也有论述(如:W.克希耐尔著,孙文、江泽文、程国祥译,固体激光工程,科学出版社,2002,243页)。In addition, the use of variable reflectivity mirrors as output coupling mirrors can also improve the quality of the output beam. This point has also been discussed in many optical professional works (such as: written by W. Kirchner, translated by Sun Wen, Jiang Zewen, Cheng Guoxiang , Solid Laser Engineering, Science Press, 2002, 243 pages).
为了进一步提高被动调Q激光器的横模选择特性,本发明提出一种用于提高输出光束质量的脉冲激光器。In order to further improve the transverse mode selection characteristics of the passively Q-switched laser, the present invention proposes a pulsed laser for improving the quality of the output beam.
发明内容 Contents of the invention
本发明的目的是提供一种用于提高输出光束质量的脉冲激光器装置,该激光器具有输出光束质量高,结构简单,工作稳定可靠,实用性强的优点。The object of the present invention is to provide a pulsed laser device for improving the quality of the output beam. The laser has the advantages of high output beam quality, simple structure, stable and reliable operation, and strong practicability.
本发明的特征在于:一种用于提高输出光束质量的脉冲激光器,含有:泵浦源、激光增益介质、可饱和吸收器件、腔镜,所述腔镜至少包括一个后腔镜和一个输出镜;后腔镜对激光高反射;泵浦源的发射谱与激光增益介质的吸收谱匹配;激光增益介质是产生激光输出,且所述可饱和吸收器件对该激光增益介质的发射波长具有可饱和吸收特性的固体激光工作物质;泵浦源发出的泵浦光可直接,或通过耦合装置后入射激光增益介质,该可饱和吸收器件的通光面加工成凹面或凸面,或者可饱和吸收离子的掺杂浓度沿径向改变,其中心掺杂浓度低,边缘掺杂浓度高;输出镜的镀膜对激光波长的透过率是设定的。The present invention is characterized in that: a pulsed laser for improving the output beam quality, comprising: a pump source, a laser gain medium, a saturable absorbing device, and a cavity mirror, and the cavity mirror at least includes a rear cavity mirror and an output mirror The rear cavity mirror is highly reflective to the laser; the emission spectrum of the pump source matches the absorption spectrum of the laser gain medium; the laser gain medium produces laser output, and the saturable absorption device has a saturable emission wavelength for the laser gain medium Solid laser working material with absorption characteristics; the pump light emitted by the pump source can be directly or incident on the laser gain medium after passing through the coupling device. The doping concentration changes along the radial direction, the center doping concentration is low, and the edge doping concentration is high; the transmittance of the coating of the output mirror to the laser wavelength is set.
所述后腔镜可以以光学介质膜的形式镀在激光增益介质朝向泵浦源的端面上,对泵浦光增透,泵浦源所发射的泵浦光可通过光纤耦合,透镜聚焦后入射到激光增益介质上,该激光增益介质朝向输出的通光面上的镀膜对激光波长增透。The rear cavity mirror can be plated on the end surface of the laser gain medium facing the pump source in the form of an optical dielectric film to increase the transmission of the pump light. The pump light emitted by the pump source can be coupled through an optical fiber, and the lens is focused and incident On the laser gain medium, the coating on the light-transmitting surface facing the output of the laser gain medium is anti-transmissive to the laser wavelength.
所述输出镜可以是一种镀在可饱和吸收器件通光面上的反射率沿径向变化的光学薄膜。The output mirror can be an optical thin film coated on the light-transmitting surface of the saturable absorbing device, whose reflectivity changes along the radial direction.
所述可饱和吸收器件的通光面上镀反射率沿径向变化的光学薄膜。The optical film whose reflectivity changes along the radial direction is plated on the transparent surface of the saturable absorbing device.
所述泵浦源是包括半导体激光器、闪光灯在内的各种泵浦源,泵浦方式是包括端面泵浦、侧面泵浦在内的各种泵浦方式。The pumping sources are various pumping sources including semiconductor lasers and flash lamps, and the pumping methods are various pumping methods including end pumping and side pumping.
所述激光器采用包括直腔、折腔、环形腔在内的各种腔型结构。The laser adopts various cavity structures including straight cavity, folded cavity and ring cavity.
所述激光增益介质可以和可饱和吸收器件结合成一种复合介质。The laser gain medium can be combined with a saturable absorption device to form a composite medium.
在所述激光增益介质中可同时掺入激光增益元素和可饱和吸收元素,构成自饱和吸收的激光介质。Laser gain elements and saturable absorption elements can be doped into the laser gain medium at the same time to form a self-saturated absorption laser medium.
所述后腔镜可以是分立的后腔镜。The back cavity mirror may be a separate back cavity mirror.
本发明与现有技术相比,具有以下优点及突出性效果:本发明提出的通过改变可饱和吸收器件径向的吸收因子,或者在可饱和吸收器件的通光面上的镀变反射率膜等方式,来提高输出光束质量的方法,具有简单有效、工作稳定可靠的优势,解决了传统技术带来系统复杂性增加和稳定性降低的问题。Compared with the prior art, the present invention has the following advantages and outstanding effects: the present invention proposes to change the reflectance film by changing the radial absorption factor of the saturable absorbing device, or on the light-transmitting surface of the saturable absorbing device The method of improving the quality of the output beam has the advantages of being simple, effective, stable and reliable, and solves the problems of increasing system complexity and reducing stability caused by traditional technologies.
附图说明 Description of drawings
图1为本发明提供的用于提高输出光束质量的脉冲激光器第一个实施例的结构示意图。FIG. 1 is a schematic structural diagram of a first embodiment of a pulsed laser for improving output beam quality provided by the present invention.
图2为本发明提供的用于提高输出光束质量的脉冲激光器第二个实施例的结构示意图。Fig. 2 is a schematic structural diagram of a second embodiment of a pulsed laser for improving output beam quality provided by the present invention.
图3为本发明提供的用于提高输出光束质量的脉冲激光器第三个实施例的结构示意图。Fig. 3 is a schematic structural diagram of a third embodiment of a pulsed laser for improving output beam quality provided by the present invention.
图4为本发明提供的用于提高输出光束质量的脉冲激光器第四个实施例的结构示意图。Fig. 4 is a schematic structural diagram of a fourth embodiment of a pulsed laser for improving output beam quality provided by the present invention.
图5为本发明提供的用于提高输出光束质量的脉冲激光器第五个实施例的结构示意图。Fig. 5 is a schematic structural diagram of a fifth embodiment of a pulsed laser for improving output beam quality provided by the present invention.
图1~图5中,1—半导体激光器,2—耦合光纤,3—耦合透镜,4—以光学介质膜形式镀在增益介质上的后腔镜,5—激光增益介质,6—通光面加工成凹面的可饱和吸收器件,7—输出镜,8—可饱和吸收元素掺杂浓度沿径向改变的可饱和吸收器件,9—以变反射率膜形式镀在可饱和吸收器件上的输出镜,10—通光面加工成凹面的自饱和吸收的激光介质In Figures 1 to 5, 1—semiconductor laser, 2—coupling fiber, 3—coupling lens, 4—back cavity mirror plated on the gain medium in the form of an optical dielectric film, 5—laser gain medium, 6—optical surface The saturable absorbing device processed into a concave surface, 7—output mirror, 8—the saturable absorbing device whose doping concentration of the saturable absorbing element changes along the radial direction, 9—the output plated on the saturable absorbing device in the form of a variable reflectivity film Mirror, 10—laser medium with self-saturated absorption processed into concave surface
具体实施方式 Detailed ways
图1为本发明提供的用于提高输出光束质量的脉冲激光器的第一个实施例。本发明的思想可以应用于各种腔型的激光器,如直腔、折腔、环形腔等,可采用半导体激光器、闪光灯等各种泵浦源和各种泵浦方式。这里选用直腔和半导体激光器端面泵浦方式只是作为本发明的一个方便说明的实施例。Fig. 1 is the first embodiment of the pulsed laser for improving the output beam quality provided by the present invention. The idea of the present invention can be applied to lasers of various cavity types, such as straight cavity, folded cavity, ring cavity, etc. Various pumping sources and various pumping methods such as semiconductor lasers and flash lamps can be used. Here, the choice of straight cavity and semiconductor laser end-pumping method is only used as a convenient embodiment of the present invention.
第一个实施例中将可饱和吸收器件6的通光面加工成凹面,其两个通光端面镀对激光波长的增透膜。半导体激光器1所发射的泵浦光通过光纤2耦合及透镜3聚焦后入射激光增益介质5。半导体激光器1的发射谱与增益介质5的吸收谱匹配。后腔镜4对泵浦光增透,对激光高反。在该实施例中后腔镜4以光学介质膜的形式镀在增益介质5朝向泵浦的端面上,当然也可以采用分立的后腔镜。激光增益介质5为可以产生激光输出的、且可饱和吸收器件6对其发射波长具有可饱和吸收特性的固态激光工作物质,如Nd:YAG、Yb:YAG、Nd:YVO4、Nd:glass等。激光增益介质5朝向输出的通光面上的镀膜对激光波长增透。前腔镜7的镀膜对激光波长具有一定的透过率。In the first embodiment, the light-passing surface of the saturable absorbing device 6 is processed into a concave surface, and the two light-passing end faces are coated with an anti-reflection film corresponding to the laser wavelength. The pumping light emitted by the
在第一个实施例中,可饱和吸收器件6本身具有动态光阑特性,主要是由于振荡光束在中心轴线附近具有最高强度,从而最先漂白可饱和吸收器件6在轴线中心及附近的位置,而对离轴线较远的位置则因其入射光功率密度低,不易漂白,从而损耗较大,导致高阶横模不易形成振荡,从而改善了输出光束质量。通过将可饱和吸收器件6通光面加工成凹面或凸面,使得其中心吸收弱,边缘吸收强。由于高阶横模的模式半径一般比基横模大,使得高阶横模的吸收比基横模强。因而高阶横模更不易起振,进一步增强了可饱和吸收器件6的动态光阑特性,从而进一步改善了输出光束质量。In the first embodiment, the saturable absorbing device 6 itself has a dynamic aperture characteristic, mainly because the oscillating light beam has the highest intensity near the central axis, so that the position of the saturable absorbing device 6 at and near the center of the axis is first bleached, For the position farther from the axis, because of the low incident light power density, it is not easy to be bleached, so the loss is large, which makes it difficult for the high-order transverse mode to form oscillation, thereby improving the quality of the output beam. By processing the light-passing surface of the saturable absorbing device 6 into a concave surface or a convex surface, the central absorption is weak and the edge absorption is strong. Since the mode radius of the high-order transverse mode is generally larger than that of the fundamental transverse mode, the absorption of the high-order transverse mode is stronger than that of the fundamental transverse mode. Therefore, the high-order transverse mode is less likely to oscillate, which further enhances the dynamic aperture characteristics of the saturable absorbing device 6 , thereby further improving the quality of the output beam.
图2为本发明提供的用于提高输出光束质量的脉冲激光器的第二个实施例,其中,在可饱和吸收器件8中可饱和吸收元素的掺杂浓度沿径向变化,同时其朝向输出的通光面上镀变反射率膜9作为输出镜。将可饱和吸收元素的掺杂浓度设置为中心掺杂高,边缘掺杂低。变反射率膜9为一种径向反射率可变的光学薄膜,一般为中心反射率高,边缘低。考虑到高阶横模的模式半径一般比基横模大,使得高阶横模的环程损耗比基横模高。因而高阶横模不易起振,从而提高输出高光束质量。Fig. 2 is the second embodiment of the pulsed laser for improving the quality of the output beam provided by the present invention, wherein, in the saturable
图3为本发明提供的用于提高输出光束质量的脉冲激光器的第三个实施例,其特征是,可饱和吸收器件6的端面加工成凹面,并且在可饱和吸收器件朝向输出的表面上镀变反射率膜9作为输出镜。因而可饱和吸收器件的选模作用得到进一步增强,从而提高输出高光束质量。Fig. 3 is the third embodiment of the pulsed laser used to improve the output beam quality provided by the present invention. It is characterized in that the end face of the saturable absorbing device 6 is processed into a concave surface, and the surface of the saturable absorbing device facing the output is plated The
图4为本发明提供的用于提高输出光束质量的脉冲激光器的第四个实施例,其特征是,激光增益介质5和可饱和吸收器件6结合成一种复合介质,其实施原理与本发明的第一实施例基本相同。Fig. 4 is the 4th embodiment of the pulsed laser that is used to improve output beam quality that the present invention provides, it is characterized in that,
图5为本发明提供的用于提高输出光束质量的脉冲激光器的第五个实施例,其特征是,在激光增益介质中同时掺入激光增益元素和可饱和吸收元素,构成自饱和吸收的激光介质10,其实施原理与本发明的第一实施例基本相同。Fig. 5 is the fifth embodiment of the pulsed laser used to improve the quality of the output beam provided by the present invention, which is characterized in that laser gain elements and saturable absorption elements are simultaneously mixed in the laser gain medium to form a self-saturated absorption laser The implementation principle of the medium 10 is basically the same as that of the first embodiment of the present invention.
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激光二极管抽运的GaAs被动Q开关Nd:YVO4激光器. 柳强,巩马理,闫平,郭云霄,谢涛,王东生.光学学报,第23卷第3期. 2003 * |
被动Q开关材料的研究进展. 段秀兰,袁多荣,许东,吕孟凯,姜雪宁,王新强,宋春风,王增梅.激光与红外,第31卷第5期. 2001 * |
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