CN100464872C - Electrostatic suction type fluid discharge device, electrostatic suction type fluid discharge method, and plot pattern formation method using the same - Google Patents

Abstract

An electrostatic suction type fluid discharge device applies a drive voltage from a power source to a space between a nozzle and an insulation substrate so as to supply electric charge to a discharge material supplied into the nozzle and discharges the discharge material from a nozzle hole to the insulation substrate. The nozzle hole has a diameter of phi0.01 mum to phi25 mum. The power source is a bipolar pulse voltage inverting to both positive and negative polarities as drive voltage and outputs voltage having frequency of 1 Hz or above.

Description

Electrostatic attraction type fluid delivery device and electrostatic suction-type fluid discharging method and the pattern formation method of describing of using this device

Technical field

The present invention relates to by making conductor fluids such as prepared Chinese ink charged and this fluid is carried out electrostatic attraction, fluid is discharged to electrostatic attraction type fluid delivery device on the object from nozzle.

Background technology

Fluids such as prepared Chinese ink are discharged in the fluid spray regime on the object (recording medium), generally have as ink-jet printer and be put to practical piezoelectricity mode and sensible heat mode etc., but as alternate manner, the fluid that makes discharge in addition is conductor fluid and conductor fluid is applied electric field, the electrostatic attraction mode that it is discharged from nozzle.

As the device for draining fluid (electrostatic attraction type fluid delivery device hereinafter referred to as) of this electrostatic attraction mode, for example disclosed device in 2001-No. 88306 communiques of patent disclosure (open day is April 3 calendar year 2001) of clear 36-No. 13768 communiques of the patent disclosure of Japan's patent gazette (day for announcing is on August 18th, 1961) and Japan's publication communique is arranged.

And, in 2000-No. 127410 communiques of patent disclosure of Japan's publication communique (open day on May 9th, 2005), disclosed nozzle is made the slit, and the pin electrode that stretches out from nozzle is set, thereby discharged the ink discharge device that comprises atomic prepared Chinese ink.For example, flat 8-No. 238774 communiques of the patent disclosure of Japan's publication communique (open day is on September 17th, 1996) disclose the ink discharge device that applies the electrode that voltage uses in the nozzle interior setting.

Here, the fluid that existing electrostatic attraction type fluid delivery device is described is discharged model.

As electrostatic attraction type fluid delivery device, the especially design factor of on-demand electrostatic attraction type fluid delivery device, the electric conductivity of prepared Chinese ink liquid is arranged, and (for example resistivity 10 ⁶～10 ¹¹Ω cm), (for example 0.020～0.040N/m), viscosity (for example 0.011～0.015Pas), applies voltage (electric field) to surface tension.And as applying voltage, the voltage and the distance between nozzle and the opposite electrode that are applied on the nozzle are particularly important.

In the electrostatic attraction type fluid delivery device, utilize the unstability of charged fluid, Figure 32 illustrates its situation.Conductor fluid is statically placed in the uniform electric field, and the electrostatic force that acts on the conductor fluid surface makes the surface unstable, impels growth wire drawing (static wire drawing phenomenon).With at this moment electric field be taken as to nozzle and and the opposed opposite electrode in nozzle partition distance h ground between the electric field E that produces when applying voltage V ₀Physically can derive growth wavelength X at this moment _c(for example " meeting of image electronic informatics, the 17th volume, No. 4,1988, p.185～193 "), and can be represented by the formula.

${\mathrm{\λ}}_c=\frac{2\mathrm{\π\γ}}{{\mathrm{\ϵ}}_0}{E_0}^{-2}\·\·\·\left(1\right)$

Wherein, γ is surface tension (N/m), ε ₀Be the dielectric constant (F/m) of vacuum, E ₀Be electric-field intensity (V/m).At nozzle diameter d (m) less than λ _cThe time, do not grow.That is, formula (2) is for discharging the condition of usefulness.

$d>\frac{{\mathrm{\&lambda;}}_{\mathrm{<figure-callout\; id="2"\; label="c"\; filenames="C200480022260E00531.png,C200480022260E00631.png"\; state="\{\{state\}\}">c</figure-callout>}}}{2}=\frac{\mathrm{\&pi;\&gamma;}}{{\mathrm{\&epsiv;}}_0{{\mathrm{<figure-callout\; id="0"\; label="E"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">E</figure-callout>}}_0}^2}\&CenterDot;\&CenterDot;\&CenterDot;\left(2\right)$

Here, E ₀Be the electric-field intensity (V/m) when supposing parallel flat, and the distance between nozzle and the opposite electrode is taken as h (m), the voltage that is added in nozzle is taken as V ₀, then form formula (3).

${\mathrm{<figure-callout\; id="0"\; label="E"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">E</figure-callout>}}_0=\frac{V_0}{h}\&CenterDot;\&CenterDot;\&CenterDot;\left(3\right)$

Therefore, form formula (4).

$d>\frac{\mathrm{\&pi;\&gamma;}{\mathrm{<figure-callout\; id="2"\; label="h"\; filenames="C200480022260E00531.png,C200480022260E00631.png"\; state="\{\{state\}\}">h</figure-callout>}}^2}{{\mathrm{\&epsiv;}}_0{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">V</figure-callout>}}_0}^2}\&CenterDot;\&CenterDot;\&CenterDot;\left(4\right)$

In the device for draining fluid, in order to form fine Points And lines, general hope will reduce to discharge the diameter of the nozzle of prepared Chinese ink.

Yet current being put to is difficult to reduce nozzle diameter in the device for draining fluid such as practical piezoelectricity mode and sensible heat mode, for example makes and discharges less than the small quantity fluid of 1 p1.This is that the pressure that discharge needs is big more because the nozzle of discharge fluid is fine more.

Device for draining fluid as described above exists drop miniaturization and the conflicting problem of high precision int, is difficult to realize simultaneously both.Its reason is as follows.

Cube being directly proportional of the kinetic energy of giving the liquid that nozzle discharges and droplet radius.Therefore, when making the nozzle miniaturization, the enough kinetic energy of the degree of the air drag the when fine droplets of discharge can not be guaranteed to stand to discharge is subjected to the interference that air trapping etc. causes, and can not wish correctly to hit.And drop is fine more, and surface tension effect is big more, so the vapour pressure of drop uprises, evaporation capacity increases sharply.Therefore, fine droplets causes quality significantly to disappear in circling in the air, the problem of the liquid form that all is hard to keep when existing in the running fire.

Again, discharge model based on the fluid of above-mentioned existing electrostatic attraction type fluid delivery device, according to above-mentioned formula (2), nozzle bore reduces requirement and strengthens the electric-field intensity that discharge needs.And shown in above-mentioned formula (3), electric-field intensity depends on the voltage V that is added on the nozzle ₀With the distance of nozzle and opposite electrode, thus nozzle bore reduce cause driving voltage to raise.

Here, the driving voltage of existing electrostatic attraction type fluid delivery device be more than or equal to 1000V, and is very high, thereby when considering leakage between each spray orifice and interference, is difficult to miniaturization and densification, and when further reducing nozzle bore, the problems referred to above are bigger.The common high price of high-tension power semiconductor and the frequency response that surpass 1000V are low.

The nozzle bore that clear 36-No. 13768 communiques of patent disclosure disclose is 0.127mm, and the nozzle bore scope that 2001-No. 88306 communiques of patent disclosure disclose is that wherein the scope of 100～1000 μ m is preferable for 50～2000 μ m.

About nozzle bore, apply mechanically the typical work condition of existing electrostatic attraction type fluid discharge and calculate slightly, making surface tension is 0.020N/m, electric-field intensity is 10 ⁷V/m, the above-mentioned formula of substitution (1) is calculated, and the wavelength X of then growing c is about 140 μ m.That is,, obtain the value of 70 μ m as limit nozzle bore.That is to say, under the above-mentioned condition, even adopt 10 ⁷The highfield of V/m is during smaller or equal to 70 μ m at nozzle bore, unless take to apply back pressure forcing to form processing such as meniscus, the prepared Chinese ink growth does not take place, thereby think that the electrostatic attraction type fluid is discharged and be false.That is, can think that existence does not take into account the problem of the lower voltage of minute nozzle and driving voltage.

In sum, in the existing device for draining fluid, there is the conflicting problem of nozzle miniaturization and high precision int, is difficult to realize simultaneously both.Especially in electrostatic attraction type fluid delivery device, can think and have the problem of not taking into account nozzle miniaturization and driving voltage lower voltage.

Summary of the invention

The present invention finishes for addressing the above problem, and its purpose is, provides a kind of nozzle miniaturization, small fluid to discharge and hit the electrostatic attraction type fluid delivery device that position high precision int and driving voltage lower voltage all are achieved.

In order to achieve the above object, electrostatic attraction type fluid delivery device of the present invention, apply driving voltage from the driving voltage applying unit toward nozzle and between the discharge member (for example dielectric substrate), fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, the aperture of described nozzle is φ 0.01 μ m～φ 25 μ m; Described driving voltage applying unit output frequency is more than or equal to 1Hz, and the bipolar pulse voltage of positive and negative two polarity upsets, as described driving voltage.

Electrostatic suction-type fluid discharging method of the present invention, between nozzle and discharge member (for example dielectric substrate), apply driving voltage from the driving voltage applying unit, fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, the aperture of described nozzle is φ 0.01 μ m～φ 25 μ m, described driving voltage be frequency more than or equal to 1Hz, and the bipolar pulse voltage of positive and negative two polarity upsets.

, in the electrostatic attraction type fluid delivery device, strengthened in the past, and can think and to take into account nozzle bore miniaturization and driving voltage lower voltage because nozzle bore dwindles the electric-field intensity that causes discharging needs.At this point, in the application's the invention, thereby produce the reducible new experience of driving voltage that internal field discharges when making nozzle bore be the fine diameter of φ 0.01 μ m～φ 25 μ m, by nozzle bore being made above-mentioned scope, realize taking into account nozzle bore miniaturization and driving voltage lower voltage.

In the above-mentioned composition, the driving voltage that is added on the nozzle is the bipolar pulse voltage of frequency more than or equal to positive and negative two polarity upsets of 1Hz, thereby the district enlarges and the driving voltage rising to suppress that drop disperses on the discharge place member that discharge place member charging causes.As a result, can be with the low voltage drive of nozzle and carry out formation brightly to the fine pattern of discharge place member.

Electrostatic attraction type fluid delivery device of the present invention, between nozzle and discharge member (for example dielectric substrate), apply driving voltage from the driving voltage applying unit, fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, the aperture of described nozzle is φ 0.01 μ m～φ 25 μ m; Described driving voltage applying unit is exported the bipolar pulse voltage of positive and negative two polarity upsets as described driving voltage, with respect to the conductivity σ S/m and the DIELECTRIC CONSTANTS of described fluid, output is the voltage of f≤1/ (2 τ) by τ=ε/timeconstant of σ decision and the pass of driving voltage frequency f Hz.

Electrostatic suction-type fluid discharging method of the present invention, apply driving voltage from the driving voltage applying unit toward nozzle and between the discharge member (for example dielectric substrate), fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, the aperture of described nozzle is φ 0.01 μ m～φ 25 μ m; Described driving voltage is the bipolar pulse voltage of positive and negative two polarity upsets, under this voltage, with respect to the conductivity σ S/m and the DIELECTRIC CONSTANTS of described fluid, output is the voltage of f≤1/ (2 τ) by τ=ε/timeconstant of σ decision and the pass of driving voltage frequency f Hz.

, in the electrostatic attraction type fluid delivery device, strengthened in the past, and can think and to take into account nozzle bore miniaturization and driving voltage lower voltage because nozzle bore dwindles the electric-field intensity that causes discharging needs.At this point, in the application's the invention, thereby produce the reducible new experience of driving voltage that internal field discharges when making nozzle bore be the fine diameter of φ 0.01 μ m～φ 25 μ m, by nozzle bore being made above-mentioned scope, realize taking into account nozzle bore miniaturization and driving voltage lower voltage.

In the above-mentioned composition, as the driving voltage that is added on the nozzle, export the bipolar pulse voltage of positive and negative two polarity upsets, this voltage is with respect to the conductivity σ S/m and the DIELECTRIC CONSTANTS of described fluid, output is the voltage of f≤1/ (2 τ) by τ=ε/timeconstant of σ decision and the pass of driving voltage frequency f Hz, thereby can suppress from the rising of the minimum voltage of nozzle discharge, and dwindle drop on the discharge place member district of dispersing, can on discharge place member, form fine pattern brightly.

Electrostatic attraction type fluid delivery device of the present invention, apply driving voltage from the driving voltage applying unit toward nozzle and between the discharge member (for example dielectric substrate), fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, with mobile unit described nozzle and discharge place member are relatively moved toward the direction of both opposed direction quadratures with this simultaneously, the aperture of described nozzle is φ 0.01 μ m～φ 25 μ m; Described driving voltage applying unit output frequency is more than or equal to f Hz, and the bipolar pulse voltage of positive and negative two polarity upsets is as described driving voltage; Also has control module, at least one side of described driving voltage output unit of this unit controls and described mobile unit makes that the driving voltage frequency f Hz of described driving voltage applying unit and the pass of the described relative velocity v μ m/sec that relatively moves are f 〉=5v.

Electrostatic suction-type fluid discharging method of the present invention, apply driving voltage from the driving voltage applying unit toward nozzle and between the discharge member (for example dielectric substrate), fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, with mobile unit described nozzle and discharge place member are relatively moved toward the direction of both opposed direction quadratures with this simultaneously, the aperture of described nozzle is φ 0.01 μ m～φ 25 μ m; As described driving voltage, output frequency is more than or equal to f Hz, and the bipolar pulse voltage of positive and negative two polarity upsets; Also control at least one side of driving voltage frequency and relative moving speed, make that the pass of driving voltage frequency f Hz and the described relative velocity v μ m/sec that relatively moves is f 〉=5v.

, in the electrostatic attraction type fluid delivery device, strengthened in the past, and can think and to take into account nozzle bore miniaturization and driving voltage lower voltage because nozzle bore dwindles the electric-field intensity that causes discharging needs.At this point, in the application's the invention, thereby produce the reducible new experience of driving voltage that internal field discharges when making nozzle bore be the fine diameter of φ 0.01 μ m～φ 25 μ m, by nozzle bore being made above-mentioned scope, realize taking into account nozzle bore miniaturization and driving voltage lower voltage.

Again, as the driving voltage that is added on the nozzle, output frequency is more than or equal to f Hz, and the bipolar pulse voltage of positive and negative two polarity upsets; Also control at least one side of driving voltage frequency and relative moving speed, make that the relative velocity v μ m/sec that relatively moves of nozzle and discharge place member and the pass of driving voltage frequency f Hz are f 〉=5v, thereby the drop that can suppress on the discharge place member disperses, and forms pattern brightly.

Electrostatic attraction type fluid delivery device of the present invention, between nozzle and discharge member (for example dielectric substrate), applying driving voltage from the driving voltage applying unit, fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, with mobile unit described nozzle and discharge place member are relatively moved toward the direction of both opposed direction quadratures with this simultaneously, the aperture of described nozzle is φ 0.01 μ m～φ 25 μ m; Described driving voltage applying unit output is smaller or equal to the bipolar pulse voltage of positive and negative two polarity upsets of 400V, as described driving voltage.

Electrostatic suction-type fluid discharging method of the present invention, between nozzle and discharge member (for example dielectric substrate), apply driving voltage from the driving voltage applying unit, fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, with mobile unit described nozzle and discharge place member are relatively moved toward the direction of both opposed direction quadratures with this simultaneously, the aperture of described nozzle is φ 0.01 μ m～φ 25 μ m; Described driving voltage is the bipolar pulse voltage smaller or equal to positive and negative two polarity upsets of 400V.

, in the electrostatic attraction type fluid delivery device, strengthened in the past, and can think and to take into account nozzle bore miniaturization and driving voltage lower voltage because nozzle bore dwindles the electric-field intensity that causes discharging needs.At this point, in the application's the invention, thereby produce the reducible new experience of driving voltage that internal field discharges when making nozzle bore be the fine diameter of φ 0.01 μ m～φ 25 μ m, by nozzle bore being made above-mentioned scope, realize taking into account nozzle bore miniaturization and driving voltage lower voltage.

Again, the driving voltage that is applied on the nozzle is the bipolar pulse voltage smaller or equal to positive and negative two polarity upsets of 400V, thereby when discharging fluid and forming point on discharge place member, can suppress drop and disperse toward this periphery, can form pattern brightly.

Electrostatic attraction type fluid delivery device of the present invention, utilize electrostatic attraction to make and discharge the fluid ejection of the nozzle of head from fluid because of applying the charged discharge fluid of voltage, hit substrate, thereby form the pattern of describing of discharging fluid at this substrate surface, the fluid ejection of described nozzle, its injection diameter is 0.01～25 μ m, described substrate is a dielectric substrate simultaneously, and have before this dielectric substrate is discharged fluid, remove this insulated substrate surface electric charge remove electric unit, and, the dielectric substrate of removing electricity is carried out the fluid deliverying unit that fluid is discharged with the positive negative bipolar pulse voltage.

According to above-mentioned composition, the fine aperture by 0.01～25 μ m is made in the fluid ejection port footpath (nozzle diameter) of nozzle produces internal field, can utilize the nozzle miniaturization to reduce the driving voltage of discharging.Reduce driving voltage like this, extremely favourable in equipment miniaturization and nozzle densification.Certainly, reduce by making driving voltage, but the driver of the low voltage drive that also the use cost advantage is big.

In the above-mentioned discharge model, discharge the electric-field intensity that needs and depend on concentration of local electric-field intensity, thereby needn't have opposite electrode.That is, do not need opposite electrode can carry out lettering yet, add the free degree that bigger device is formed dielectric substrate etc.And can carry out lettering to thick insulator.

When the said nozzle miniaturization is attached to electric charge on the dielectric substrate in existence, be subjected to the electric field repulsive force of this electric charge, make again and discharge the fine pattern that forms and produce disturbance, produce conversely again and discharge not good enoughly, have the problem that is difficult to form stable fine pattern.

At this point, in the described electrostatic attraction type fluid delivery device, before the dielectric substrate that fluid is discharged, utilize and remove the electric charge that electric unit is removed insulated substrate surface, and the fluid deliverying unit is discharged carrying out fluid except that the dielectric substrate behind the electricity with the positive negative bipolar pulse voltage.Therefore, the dielectric substrate charging can be suppressed again, stable discharge can be carried out again.

In the described electrostatic attraction type fluid delivery device, can constitute the described electric unit pattern in accordance with regulations that removes, carry out removing of dielectric substrate.

According to above-mentioned composition, described design producing data of wishing except that electric hand Duan Nengyu are only removed the position that needs of dielectric substrate accordingly.Therefore, the described electric unit that removes needn't remove electricity to whole dielectric substrate, can use needle-like for example remove dateline such do not need the high-tension electric unit that removes, so can remove the control that electric unit utilize the big low voltage drive device of cost advantage to this.Remove electricity because the part that only needs is implemented again on dielectric substrate, can shorten the time of removing electricity that spends in.

Again, in the described electrostatic attraction type fluid delivery device, the electric-field intensity that when preferably constituting described fluid deliverying unit and discharging with fluid the charge concentration of meniscus portion is produced starts the voltage that applies of electric-field intensity less than the discharge of obtaining by Paschen curve (Paschen's law curve) calculating formula, carries out fluid and discharges.

According to above-mentioned composition, when described fluid deliverying unit is discharged fluid, can suppress to produce gas discharge, the fluid fine droplets that discharge off causes is dispersed toward periphery, can form the picture of distinct fine pattern.

Electrostatic attraction type fluid delivery device of the present invention, utilize electrostatic attraction to make and discharge the fluid ejection of the nozzle of head from fluid because of applying the charged discharge fluid of voltage, hit substrate, thereby form the pattern of describing of discharging fluid at this substrate surface, it is characterized in that, the fluid ejection of described nozzle, its injection diameter is 0.01～25 μ m, simultaneously described substrate is a dielectric substrate, and has in accordance with regulations pattern and award the electric charge of electric charge to the surface of this dielectric substrate and award the unit.

According to above-mentioned composition, the fine aperture by 0.01～25 μ m is made in the fluid ejection port footpath (nozzle diameter) of nozzle produces internal field, can utilize the nozzle miniaturization to reduce the driving voltage of discharging.Reduce driving voltage like this, extremely favourable in equipment miniaturization and nozzle densification.Certainly, reduce by making driving voltage, but the driver of the low voltage drive that also the use cost advantage is big.

In the above-mentioned discharge model, discharge the electric-field intensity that needs and depend on concentration of local electric-field intensity, thereby needn't have opposite electrode.That is, do not need opposite electrode can carry out lettering yet, add the free degree that bigger device is formed dielectric substrate etc.And, also can carry out lettering to thick insulator.

When the said nozzle miniaturization is attached to electric charge on the dielectric substrate in existence, be subjected to the electric field repulsive force of this electric charge, make again and discharge the fine pattern that forms and produce disturbance, produce conversely again and discharge not good enoughly, have the problem that is difficult to form stable fine pattern.

At this point, described electric charge is awarded the unit can be before discharging fluid depiction case, and pattern is in accordance with regulations awarded electric charge to the surface of this dielectric substrate, utilizes this charge pattern, can prevent the pattern perturbation that fluid that minute nozzle is discharged is described and discharge not good enoughly, form stable fine pattern.

For example, make described electric charge award the electric charge that the unit awards polarity for and the opposite polarity polarity of driving voltage, and form the charge pattern of awarding based on the hope of design producing data.Then, by award from this charge pattern just above carry out fluid and discharge, make the electrical field attraction effect of electric charge of awarding, can form fine pattern than distinctness.

Perhaps, making described electric charge award the polarity of the electric charge that the unit awards is the polarity identical with driving voltage polarity, and forms the charge pattern of awarding of the periphery that surrounds the pattern of wishing on dielectric substrate.Then, by award from this hope pattern part that charge pattern surrounds just above carry out fluid and discharge, make and discharge fluid before hitting dielectric substrate, laterally be subjected to awarding the electric field repulsive force of electric charge, allow drop hit, thereby can form this fine pattern more brightly toward focusing on the direction of wishing pattern part.

Again, in the described electrostatic attraction type fluid delivery device, can constitute described electric charge awards the unit and awards electric charge to the dielectric substrate of being made up of photosensitive material, and have the uniform charged unit of the surperficial uniform charged that makes described dielectric substrate and in accordance with regulations pattern laser irradiation is carried out on the surface of the described dielectric substrate of uniform charged, and carry out the electric unit that removes that removes electricity of laser irradiating part position.

According to above-mentioned composition, when forming described electric charge and awarding pattern, especially this electric charge is awarded under the polarity of the pattern situation identical with driving voltage polarity (promptly, making and awarding the hope pattern that charge pattern surrounds is to describe under the situation of pattern area), shine the pattern area of describing that forms by laser, its laser spot diameter can narrow down to about minimum 5 μ m, thereby compares with the electric charge mode of awarding of for example pin electrode etc., can form the higher pattern of precision.

Another electrostatic attraction type fluid delivery device of the present invention, utilize electrostatic attraction to make and discharge the fluid ejection of the nozzle of head from fluid because of applying the charged discharge fluid of voltage, hit substrate, thereby form the pattern of describing of discharging fluid at this substrate surface, the fluid ejection of described nozzle, its injection diameter is 0.01～25 μ m, simultaneously described substrate is a dielectric substrate, and has and can be configured to contact the voltage applying unit of conductive material being made this dielectric substrate of pattern and the conductive part on this dielectric substrate being applied voltage when fluid is discharged.

According to above-mentioned composition, when having the conductive pattern of pattern-making on the dielectric substrate, can make voltage applying unit be configured to contact the conductive part that forms this conductive pattern, one side applies voltage to scheduling portion, and one side is carried out fluid and is discharged.Thus, the intensity of discharging toward charged pattern strengthens, carry out toward the lines of conductive pattern on folded deposited when being connected the lines of conductive pattern, especially effective.

The pattern formation method of describing of the present invention, wherein electrostatic attraction type fluid delivery device utilizes electrostatic attraction to make because of applying the charged discharge fluid of voltage and discharges the fluid ejection of the nozzle of head from fluid, hit substrate, thereby form the pattern of describing of discharging fluid at this substrate surface, the fluid ejection of described nozzle, its injection diameter is 0.01～25 μ m, described substrate is a dielectric substrate simultaneously, and before discharging the fluid discharge, in advance to this dielectric substrate should form the position of describing pattern award polarity with make the opposite polarity electric charge of driving voltage of discharging the charged usefulness of fluid, thereby form charge pattern; Discharge by on described charge pattern, carrying out fluid, form the pattern of describing of discharging fluid.

According to above-mentioned composition, before the discharge fluid is discharged, utilize the opposite polarity electric charge of polarity and driving voltage, form charge pattern at the position identical with describing pattern.Then, by from this charge pattern just above carry out fluid and discharge, make the electrical field attraction effect of electric charge of awarding, thereby can form fine pattern than distinctness.

Again, the pattern formation method of describing of the present invention, it is the pattern formation method of describing of utilizing electrostatic attraction type fluid delivery device, this electrostatic attraction type fluid delivery device utilizes electrostatic attraction to make because of applying the charged discharge fluid of voltage and discharges the fluid ejection of the nozzle of head from fluid, hit substrate, thereby form the pattern of describing of discharging fluid at this substrate surface, it is characterized in that, the fluid ejection of described nozzle, its injection diameter is 0.01～25 μ m, described substrate is a dielectric substrate simultaneously, and before discharging the fluid discharge, award polarity and make the identical electric charge of driving voltage polarity of discharging the charged usefulness of fluid to this dielectric substrate should forming the position of describing pattern in advance, thereby form charge pattern; Form and carry out fluid in the district and discharge by the pattern of describing that surrounds at described charge pattern, form the pattern of describing of discharging fluid.

According to above-mentioned composition, before the discharge fluid is discharged, utilize the polarity electric charge identical to form the charge pattern that the pattern periphery is wished to describe in the position with driving voltage polarity.Then, by the hope of surrounding from this charge pattern describe pattern part just above carry out fluid and discharge, drop is hit toward focusing on the direction of describing pattern part, thereby can be formed this fine pattern more brightly.

Described describing can constitute in the pattern formation method: use the dielectric substrate of being made up of photosensitive material; After making the surperficial uniform charged of described dielectric substrate, to the surface of the dielectric substrate of uniform charged in accordance with regulations pattern carry out the laser irradiation, and carry out the electricity that removes of laser irradiating part position, thereby form described charge pattern.

According to above-mentioned composition, when forming described electric charge and awarding pattern, especially make this electric charge award under the polarity of the pattern situation identical (even award the hope pattern that charge pattern surrounds be to describe under the situation of pattern area) with driving voltage polarity, shine the pattern area of describing that forms by laser, its laser spot diameter can narrow down to about minimum 5 μ m, thereby compare with the electric charge mode of awarding of for example pin electrode etc., can form the higher pattern of precision.

The another pattern formation method of describing of the present invention, it is the pattern formation method of describing of utilizing electrostatic attraction type fluid delivery device, this electrostatic attraction type fluid delivery device utilizes electrostatic attraction to make because of applying the charged discharge fluid of voltage and discharges the fluid ejection of the nozzle of head from fluid, hit substrate, thereby form the pattern of describing of discharging fluid at this substrate surface, the fluid ejection of described nozzle, its injection diameter is 0.01～25 μ m, described substrate is a dielectric substrate simultaneously, and before discharging the fluid discharge, in advance this dielectric substrate is described to distinguish and awarded polarity and make the identical electric charge of driving voltage polarity of discharging the charged usefulness of fluid not forming describe pattern non-, thereby form charge pattern; Pattern is described in formation, even do not stop described fluid discharge is applied voltage at the described non-Qu Shangye of describing.

According to above-mentioned composition, the described non-charge pattern that forms in describing to distinguish forms by continuous fluid at temporary transient position of interrupting discharges the pattern of describing that forms.Like this, on dielectric substrate, supply with in advance with non-and describe to distinguish corresponding charge pattern, distinguish thereby can form non-describing reliably in the mode that does not stop to carry out the fluid discharge to discharge the identical polarity of voltage with fluid.

The another pattern formation method of describing of the present invention, it is the pattern formation method of describing of utilizing electrostatic attraction type fluid delivery device, this electrostatic attraction type fluid delivery device utilizes electrostatic attraction to make because of applying the charged discharge fluid of voltage and discharges the fluid ejection of the nozzle of head from fluid, hit substrate, thereby form the pattern of describing of discharging fluid at this substrate surface, the fluid ejection of described nozzle, its injection diameter is 0.01～25 μ m, described substrate is a dielectric substrate simultaneously, and describe at the 1st of the conductive material that forms this dielectric substrate under the state of pattern, describe an enterprising step of pattern from the 1st and form the 2nd when describing pattern, one in the face of formation the 1st conductive part of describing pattern applies voltage, and one side forms the 2nd and describes pattern.

According to above-mentioned composition, on dielectric substrate, have the 1st of pattern-making when describing pattern, can one apply voltage in the face of forming the 1st conductive part of describing pattern, one side is carried out fluid and is discharged, and strengthens the intensity of describing the discharge on the pattern toward the 1st.Thus, carrying out toward the 1st describing folded apply and during rat tail on the lines of pattern, especially effective.

Can fully understand other purpose of the present invention, feature and advantage by the record shown in following.Below with reference to understanding interests of the present invention in the description of the drawings.

Description of drawings

Fig. 1 is the summary composition diagram of the electrostatic attraction type fluid delivery device of an embodiment of the present invention.

Fig. 2 is the figure that the nozzle electric-field intensity in the discharge model on explanation basis of the present invention is calculated usefulness.

Fig. 3 is the curve map that the dependent The model calculation of nozzle diameter of capillary pressure and static pressure is shown.

Fig. 4 is the curve map that the dependent The model calculation of nozzle diameter of discharge pressure is shown.

Fig. 5 is the curve map that the dependent The model calculation of nozzle diameter of discharging limiting voltage is shown.

Fig. 6 is the curve map that the correlation of the image force that acts in the prerequisite technology of the present invention between charged drop and the substrate and the distance between nozzle and the substrate is shown.

Fig. 7 illustrates in the prerequisite technology of the present invention from the flow of nozzle outflow and the curve map of the The model calculation of the dependency relation that applies voltage.

Fig. 8 illustrates the curve map of obtaining the dependent result of nozzle diameter who discharges starting resistor with experiment method.

Fig. 9 illustrates bipolar pulse voltage formed when describing pattern as the nozzle driving voltage describing the key diagram that the pattern periphery produces the state that fine droplet disperses.

Figure 10 (a) illustrates the oscillogram of an example as the low-frequency pulse voltage of nozzle driving voltage.

Figure 10 (b) is the key diagram of the principle that the generation drop disperses on the dielectric substrate.

Figure 11 illustrates the oscillogram of an example from the driving voltage of power supply output shown in Figure 1.

Figure 12 is the curve map that the relation of the driving voltage frequency of nozzle in the electrostatic attraction type fluid delivery device shown in Figure 1 and minimum discharge voltage is shown.

Figure 13 illustrates the disperse curve map of relation of sector width of the driving voltage frequency of nozzle when describing lines in the electrostatic attraction type fluid delivery device shown in Figure 1 and the drop on the dielectric substrate.

Figure 14 (a) is the oscillogram that illustrates in the electrostatic attraction type fluid delivery device of another embodiment of the present invention as the relation of the discharge material surface current potential of bipolar pulse voltage waveform that is added in the driving voltage on the nozzle drive electrode and spray nozzle front end, and nozzle shown in it is not discharged the situation of the discharge of material.

Figure 14 (b) illustrates in the electrostatic attraction type fluid delivery device of another embodiment of the present invention as the oscillogram of the bipolar pulse voltage waveform that is added in the driving voltage on the nozzle drive electrode with the relation of the discharge material surface current potential of spray nozzle front end, and the situation of the discharge of discharge material takes place nozzle shown in it.

Figure 15 is the key diagram that accumulates the running of the electric charge that drive electrode supplies with in the nozzle of electrostatic attraction type fluid delivery device shown in Figure 1 at the meniscus of spray nozzle front end.

Figure 16 is the key diagram of the discharge of the discharge material of nozzle when the driving voltage that uses shown in Figure 14 (b) is shown and the situation of not discharging.

Figure 17 is the curve map that the relation of driving voltage frequency and minimum discharge voltage in the electrostatic attraction type fluid delivery device shown in Figure 1 is shown.

Figure 18 illustrates in the electrostatic attraction type fluid delivery device shown in Figure 1 the disperse curve map of relation of sector width of drop on the driving voltage frequency and dielectric substrate.

Figure 19 illustrates the curve map that will dye in the electrostatic attraction type fluid delivery device shown in Figure 1 prepared Chinese ink and Yin Nami stick with paste the relation of driving voltage frequency when discharging material and minimum discharge voltage with big frequency range.

Figure 20 is that the summary of the electrostatic attraction type fluid delivery device of the another embodiment of the present invention is formed.

Figure 21 illustrates the disperse curve map of relation of sector width of the drop on the articles holding table sweep speed and dielectric substrate in the electrostatic attraction type fluid delivery device of the another embodiment of the present invention.

Figure 22 illustrates the disperse curve map of relation in district of the driving voltage of the drive electrode that is added in nozzle in the electrostatic attraction type fluid delivery device of the another embodiment of the present invention and the drop on the dielectric substrate.

Figure 23 illustrates the stereogram that the summary of the electrostatic attraction type fluid delivery device of embodiment 5 is formed.

Figure 24 illustrates the stereogram that the summary of the electrostatic attraction type fluid delivery device of embodiment 6 is formed.

Figure 25 is the curve map that the relation of the nozzle diameter of spray nozzle front end portion in the electrostatic attraction type fluid delivery device and the electric-field intensity that the charge concentration in the meniscus portion produces is shown.

Figure 26 illustrates the stereogram that the summary of the electrostatic attraction type fluid delivery device of embodiment 8 is formed.

Figure 27 is the curve map that the relation of the minimum drive voltage that the surface potential that adheres to electric charge and fluid discharge is shown.

Figure 28 illustrates the stereogram that the summary of the electrostatic attraction type fluid delivery device of embodiment 9 is formed.

Figure 29 illustrates the stereogram that the summary of the electrostatic attraction type fluid delivery device of embodiment 10 is formed.

Figure 30 illustrates the stereogram that the summary of the electrostatic attraction type fluid delivery device of embodiment of the present invention 11 is formed.

Figure 31 illustrates the stereogram that the summary of the electrostatic attraction type fluid delivery device of embodiment 12 is formed.

Figure 32 is the figure that the principle of the discharge currents bulk-growth that static wire drawing phenomenon causes in the electrostatic attraction type fluid delivery device is shown.

The specific embodiment

The prerequisite technology

At first, below with reference to description of drawings prerequisite technology of the present invention.The electrostatic attraction type fluid delivery device of prerequisite technology of the present invention is made 0.01 μ m～25 μ m with its nozzle diameter, and available discharge of discharging fluid smaller or equal to the driving voltage control of 1000V.

Here, existing fluid is discharged in the model, and nozzle diameter reduces to involve driving voltage and raises, thereby thinks and can not use the driving voltage smaller or equal to 1000V to discharge fluid, unless implement to supply with other ways such as back pressure to discharging fluid.Yet the result of present inventor's wholwe-hearted research finds out smaller or equal to certain nozzle diameter, and the discharge phenomenon in the discharge model different with existing fluid discharge model takes place.The present invention finishes according to the new experience of this fluid discharge model.

At first, the fluid discharge model that becomes based on the application's prerequisite technology of above-mentioned experience is described.

The nozzle of supposing diameter d (in the following explanation, unless point out specially, all referring to the internal diameter of nozzle) injects conductor fluid, and to be in the height that leaves the infinite slab conductor be that h goes up vertical position.Fig. 2 illustrates this situation.At this moment, suppose that the charge Q of spray nozzle front end induction concentrates on the hemisphere portion of the discharge currents body formation of spray nozzle front end, and represent approx with following formula.

Q＝2πc ₀αV ₀d …(5)

Here, Q is the electric charge of responding in the spray nozzle front end portion (C), ε ₀Be the dielectric constant (F/m) of vacuum, d is nozzle diameter (m), V ₀For being added in the total voltage on the nozzle.α is the proportionality constant that depends on nozzle form etc., gets the value about 1～1.5, but D＜＜be roughly 1 during h (h is the distance (m) between nozzle and the substrate).

When conductive substrates is used as substrate, thinks and respond to image charge Q ' on the opposed locations in substrate opposed to each other with polarity opposite with above-mentioned charge Q with nozzle.When substrate is insulator, on symmetric position, respond to the polarity image charge Q ' opposite equally with charge Q according to the dielectric constant decision.

$E_{\mathrm{loc}}=\frac{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">V</figure-callout>}}_0}{\mathrm{kR}}\&CenterDot;\&CenterDot;\&CenterDot;\left(6\right)$

If the radius of curvature of leading section is R, then can provide the concentrated electric field strength E of spray nozzle front end portion by formula (6) _Loc23 (1970), p.198-210 wherein, k is the proportionality constant that depends on nozzle form etc., gets 1.5～8.5 value, but most cases thinks about 5 (P.J.Birdseye and D.A.Smith, Surface Science).Here, discharge model, suppose R=d/2 in order to simplify fluid.This is equivalent in spray nozzle front end portion conductive ink and swells the hemispheric state that becomes to have the radius of curvature identical with nozzle diameter d because of surface tension.

$P_e=\frac{Q}{S}{E}_{\mathrm{loc}}=\frac{2Q}{\mathrm{\&pi;}{d}^2}{E}_{\mathrm{loc}}\&CenterDot;\&CenterDot;\&CenterDot;\left(7\right)$

Then, think isostasy on the discharge fluid that acts on spray nozzle front end portion.At first, establish that the liquid level of spray nozzle front end portion is long-pending to be S, then static pressure P _eBe formula (7).By formula (5)～formula (7), insert α=1, then can be expressed as formula (8).

$P_e=\frac{4{\mathrm{\&epsiv;}}_0{V}_0}{d}\&CenterDot;\frac{2{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">V</figure-callout>}}_0}{\mathrm{kd}}=\frac{8{\mathrm{\&epsiv;}}_0{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">V</figure-callout>}}_0}^2}{\mathrm{<figure-callout\; id="2"\; label="k\; d"\; filenames="C200480022260E00531.png,C200480022260E00631.png"\; state="\{\{state\}\}">k</figure-callout>}{d}^{}{}^2}\&CenterDot;\&CenterDot;\&CenterDot;\left(8\right)$

$P_s=\frac{4\mathrm{\&gamma;}}{d}\&CenterDot;\&CenterDot;\&CenterDot;\left(9\right)$

On the other hand, the capillary pressure of establishing the discharge fluid of spray nozzle front end portion is P _s, then form formula (9).Wherein, γ is a surface tension.Because the condition of discharging because of electrostatic force is that electrostatic force surpasses surface tension, static pressure P _eWith capillary pressure P _sThe pass be formula (10).

P _a>P _s …(10)

Capillary pressure when Fig. 3 illustrates the nozzle that provides certain diameter d and the relation of static pressure.As the surface tension of discharging fluid, suppose that the discharge fluid is the water (situation of γ=72mN/m).When being added in voltage on the nozzle and being taken as 700V, implicit nozzle diameter is in the situation of 25 μ m, and static pressure surpasses surface tension.In view of the above, ask V ₀During with the concerning of d, formula (11) provides the minimum voltage of discharge.

${\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">V</figure-callout>}}_0>\sqrt{\frac{\mathrm{\&gamma;<figure-callout\; id="2"\; label="kd"\; filenames="C200480022260E00531.png,C200480022260E00631.png"\; state="\{\{state\}\}">kd</figure-callout>}}{2{\mathrm{\&epsiv;}}_0}}\&CenterDot;\&CenterDot;\&CenterDot;\left(11\right)$

At this moment discharge pressure Δ P is

ΔP＝P _e-P _s …(12)

Thereby, form formula (13).

$\mathrm{\&Delta;P}=\frac{8{\mathrm{\&epsiv;}}_0{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">V</figure-callout>}}_0}^2}{k{d}^2}-\frac{4\mathrm{\&gamma;}}{d}\&CenterDot;\&CenterDot;\&CenterDot;\left(13\right)$

To the nozzle of certain diameter d, the dependence of the discharge pressure Δ P when Fig. 4 illustrates and satisfies the discharge condition because of local electric field strength, Fig. 5 then illustrates the dependence of discharging critical voltage (promptly producing the minimum voltage of discharging) Vc.

(suppose V when as can be seen from Figure 4, satisfying the discharge condition because of local electric field strength ₀When=700V, γ=72mN/m) the upper limit of nozzle diameter be 25 μ m.

In the calculating of Fig. 5, as discharging fluid, imagination water (γ=72mN/m) and organic solvent (γ=20mN/m), and suppose the condition of k=5.Distinguish that from this figure when considering the electric field concentration effect of minute nozzle, discharge critical voltage Vc and reduce along with reducing of nozzle diameter, and distinguish that discharging fluid be under the situation of water, when nozzle diameter was 25 μ m, discharging critical voltage Vc was about 700V.

Under the situation that has the electric field consideration method of discharging model, promptly only consider according to the voltage V that is added on the nozzle ₀And during the electric field of the distance h between nozzle and opposite electrode definition,, discharge required voltage and strengthen along with nozzle diameter becomes smallly.

In contrast, as the new discharge model that this prerequisite technology proposes, pay close attention to local electric field strength, then utilize the nozzle miniaturization can reduce the driving voltage of discharge.Reduce driving voltage like this, extremely favourable in equipment miniaturization and nozzle densification.Certainly, reduce by making driving voltage, but the driver of the low voltage drive that also the use cost advantage is big.

In the above-mentioned discharge model, discharge the electric-field intensity that needs and depend on concentration of local electric-field intensity, thereby needn't have opposite electrode.That is, in the existing discharge model, between nozzle and substrate, apply electric field, thereby need be, at the opposition side configuration opposite electrode of nozzle or to make substrate be electric conductivity with respect to dielectric substrate.And configuration is during opposite electrode, that is substrate is when being insulator, and substrate thickness that can usefulness is limited,

In contrast, in the discharge model of the present invention, do not need opposite electrode can carry out lettering yet, add the free degree that bigger device is formed dielectric substrate etc.And can carry out lettering to thick insulator.Charged from the liquid that nozzle is discharged, thereby image force acts between this liquid and the substrate.Fig. 6 illustrates the size of this image force and the dependency relation of the distance that nozzle leaves substrate.

Then, the precision control of described delivery flow is considered in examination.Under the situation of viscous flow, can represent flow Q in the cylindric stream by following Kazakhstan gold Poiseuille's formula.Now suppose columnar nozzle, the flow Q that then flows through the fluid of this nozzle can represent with following formula.

$Q=\frac{\mathrm{\&pi;\&Delta;P}}{\mathrm{\&eta;L}}{d}^4\&CenterDot;\&CenterDot;\&CenterDot;\left(14\right)$

Wherein, η is the viscosity (Pas) of fluid, and L is the length (m) of stream (being nozzle), and d is the diameter (m) of stream (being nozzle), and Δ P is pressure differential (Pa).According to following formula, flow Q is directly proportional with 4 powers of stream radius, thereby for limited flow, it is effective adopting minute nozzle.Discharge pressure Δ P this formula of substitution (14) with formula (13) is obtained can get following formula (15).

$Q=\frac{4\mathrm{\&pi;}{d}^3}{\mathrm{\&eta;L}}(\frac{2{\mathrm{\&epsiv;}}_0{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">V</figure-callout>}}_0}^2}{\mathrm{kd}}-\mathrm{\&gamma;})\&CenterDot;\&CenterDot;\&CenterDot;\left(15\right)$

When this formula is represented to be added to voltage V on the nozzle of diameter d, length L, the discharge of the fluid that flows out from nozzle.Fig. 7 illustrates this situation.The value of using in the calculating is: L=10mm, η=1 (mPas), γ=72 (mN/m).Suppose that now nozzle diameter is the minimum of a value 50 μ m of look-ahead technique.Apply voltage V gradually, then on voltage V=1000V, begin to discharge.The discharge starting resistor that this voltage is equivalent to set forth among Fig. 5.Be right after on the voltage of discharging starting resistor Vc upside, flow sharply rises.During this model calculates, want by with voltage from Vc slightly lifting mode carry out precision control, obtain tiny flow quantity, but as predicting with the figure of semi logarithmic representation, this is impossible, is difficult to realization and is specially smaller or equal to 10 ^-10m ³The small quantity of/s.When adopting the nozzle of certain diameter, determine like that minimum driving voltage suc as formula what (11) provided again.Therefore, look-ahead technique is only limited to like that uses the nozzle of diameter more than or equal to 50 μ m, is difficult to accomplish smaller or equal to 10 ^-10m ³The small discharge rate of/s and smaller or equal to the driving voltage of 1000V.

Distinguish from accompanying drawing, under the situation of the nozzle of diameter 25 μ m, use smaller or equal to the driving voltage of 700V just enough, can be during the nozzle of diameter 10 μ m with controlling smaller or equal to 500V.Use smaller or equal to 300V when also distinguishing the nozzle of diameter 1 μ m and also can.

Above investigation is a situation of considering Continuous Flow, but needs switch, to form point.Set forth this situation below.

Utilize the discharge of electrostatic attraction, its basis is that the fluid of nozzle-end is charged.Charged speed can be thought of as degree by the time constant of dielectric relaxation decision.

$\mathrm{\&tau;}=\frac{\mathrm{\&epsiv;}}{\mathrm{\&sigma;}}\&CenterDot;\&CenterDot;\&CenterDot;\left(16\right)$

In the formula (16), ε is the dielectric constant of fluid, and σ is the conductance (S/m) of fluid.Suppose that the fluid dielectric constant is 10, conductance is 10 ^-6S/m, then τ=1.854 * 10 ^-5Sec.Perhaps, establishing critical frequency is fc, then forms formula (17).The electric field change that contrasts the fast frequency of this fc can not respond, and thinks and can not discharge.Above-mentioned example is estimated:, become about 10kHz as frequency.

$f_c=\frac{\mathrm{\&sigma;}}{\mathrm{\&epsiv;}}\&CenterDot;\&CenterDot;\&CenterDot;\left(17\right)$

Then, consider the capillary reduction that nozzle is interior.Dispose insulator on electrode, and when applying voltage between liquid on dropping onto it and the electrode, find that the liquid and the contact area of insulator increase, i.e. wellability change is good; Be referred to as electricity and soak into (Electrowetting) phenomenon.This effect is also set up in the cylindrical capillary tube shape, is referred to as electrocapillarity (Electrocapillary) sometimes.There is relation of plane down between pressure that the effect of soaking into electricity causes and the physical parameter that applies voltage, capillary form, solution.

$P_{\mathrm{ec}}=\frac{2{\mathrm{\&epsiv;}}_0{\mathrm{\&epsiv;}}_r}{t}\frac{{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="C200480022260E00451.png,C200480022260E00461.png"\; state="\{\{state\}\}">V</figure-callout>}}_0}^2}{d}\&CenterDot;\&CenterDot;\&CenterDot;\left(18\right)$

Wherein, ε ₀Be the dielectric constant of vacuum, ε _rBe the dielectric constant of insulator, t is an insulation thickness, and d is a capillary inner diameter.Water is used as fluid considers, and examination is distinguished under the embodiment situation of calculating above-mentioned patent documentation 1 when calculating the value of this pressure, at most only be 30000Pa (0.3 atmospheric pressure), but under the situation of this prerequisite technology, by at nozzle arranged outside electrode, obtain and be equivalent to 30 atmospheric effects.In view of the above, when using small nozzle, utilize this effect also can carry out fast the fluid of spray nozzle front end portion is supplied with.The dielectric constant of insulator is big more, or its thickness is more little, and this effect is remarkable more.In order to obtain the effect of electrocapillarity, needing strictly be that intermediary is provided with electrode with the insulator, but when pure insulator applied abundant electric field, obtains same effect.

In the above words, the point that should note is: these approximation theories are not such in the past, as electric-field intensity, based on by the voltage V that is added on the nozzle ₀And the electric field of the distance h between nozzle and opposite electrode decision, and be based on the concentration of local electric-field intensity of spray nozzle front end.In this prerequisite technology, importantly Ju Bu highfield and the stream of supplying with fluid have very little electricity and lead.And fluid is originally fully charged on small area.Charged small fluid is during near medium such as substrate or conductor, and image force works, and substrate is vertically circled in the air., among the embodiment, make from being convenient to for this reason, use capillary glass tube, but be not limited thereto.

In sum, in the electrostatic attraction type fluid delivery device of present embodiment, because to be conceived to the new discharge model that proposes in local electric field strength ground, can make the minute nozzle of nozzle diameter 0.01 μ m～25 μ m, and can control with the discharge of discharging fluid smaller or equal to the driving voltage of 1000V.Moreover, the result who investigates according to above-mentioned model is: available driving voltage control smaller or equal to 700V is discharged under the situation of diameter smaller or equal to the nozzle of 25 μ m, and diameter is discharged smaller or equal to 500V with smaller or equal to the driving voltage control of 300V smaller or equal to available respectively under the situation of the nozzle of 1 μ m smaller or equal to the situation and the diameter of the nozzle of 10 μ m.

Fig. 8 illustrates with experiment method and obtains the dependent result of nozzle diameter who discharges critical voltage Vc.Here, as discharging fluid, use Ha リ マ to change into the Yin Nami paste that (strain) makes, and measure with the condition of the 100 μ m of the distance between nozzle and the substrate.Distinguish from Fig. 8,, discharge critical voltage Vc and reduce along with forming minute nozzle, can be than discharged with low-voltage in the past.

As indicated above, the electrostatic attraction type fluid delivery device of present embodiment can make nozzle diameter and driving voltage all reduce, but at this moment compares with existing electrostatic attraction type fluid delivery device, significantly produces following problem.

When on dielectric substrate, carrying out the fluid discharge of electrostatic attraction type fluid delivery device, if have the electric charge that is attached on the dielectric substrate in the operation before fluid is discharged, influenced by the electric field repulsive force of this electric charge, make again and discharge the pattern generating disturbance that forms, it is not good enough to produce discharge again conversely, is difficult to form micro pattern.Be 10 for example in sheet resistance ¹⁵Utilize the simple static that produce such as contact friction on the macromolecular materials such as the polyimides about Ω/sq, propylene, but under dry environment, sheet resistance is 10 ¹⁰Also be easy to generate static on the glass substrate about Ω/sq.

Do not adhere in advance under the situation of electric charge even have on the dielectric substrate, owing to have electric charge in the fluid of on dielectric substrate, discharging and hitting, as DC bias voltage and unipolar pulse voltage, when the unipolarity bias voltage is used as driving voltage, dielectric substrate raises dielectric substrate upper surface current potential because of the electric charge in the fluid of discharging charges.That is,, there is electric charge on the generation substrate, is subjected to the influence of the electric field repulsive force of this electric charge, discharge characteristic and reduce owing on dielectric substrate, form the pattern of discharging fluid.

In fact, on dielectric substrate, form to discharge the pattern of fluid, and this substrate is under the charged to a certain degree situation, shown in following table 1, to distinguish that sheet resistance value is 10 ¹⁵It is 10 that minimum discharge voltage on the polyimides of Ω/sq is higher than sheet resistance value ¹⁰The SUS substrate of the glass substrate of Ω/sq or electric conductor is discharged characteristic and is reduced.Result when above-mentioned table 1 illustrates nozzle diameter and is 1 μ m.

[table 1]

Substrate type	Minimum discharge voltage
		Polyimides (10 15Ω/sq)	330V
Glass (10 10Ω/sq)	148V
		SUS	148V

The electrostatic attraction type fluid delivery device of present embodiment can always stably carry out small fluid and discharge by suppressing to adhere to the surface potential rising that electric charge causes on the dielectric substrate, can form distinct fine pattern.Following embodiment is illustrated this electrostatic attraction type fluid delivery device.

Embodiment 1

As above-mentioned prerequisite technology is illustrated, in the electrostatic attraction type fluid delivery device,, can take into account nozzle bore miniaturization and driving voltage lower voltage by the diameter (nozzle diameter) of spray orifice being made the scope of φ 0.01 μ m～φ 25 μ m.

Can utilize potential difference and the distance between nozzle and discharge place (being the gap) between nozzle and the discharge place member, control the discharge rate of the liquid of the discharge material that becomes nozzle.Potential difference is big more and the gap is more little, can make the electric-field intensity of spray nozzle front end big more basically, thereby control this discharge rate easily.

Yet, in the described electrostatic suction-type fluid discharging method, the above-mentioned problem that has the substrate charging like that.That is, the discharge place member of insulation is carried out liquid when discharging, on nozzle, apply DC bias voltage and unipolar pulse voltage etc.+or-the unipolarity bias voltage is during as driving voltage, the electric charge of discharging in the liquid makes the charging of discharge place member, its surface potential raises.And because the influence that this surface potential raises becomes the nozzle (drive electrode of nozzle interior) of discharge driving force and the potential difference instability between the discharge place member, generation is discharged not good enough.

As a result, stablize discharge, need supply with higher bias voltage (minimum discharge voltage raises) to the drive electrode of nozzle, to guarantee described potential difference, so be difficult to the low voltage drive nozzle in order to use the unipolarity bias voltage.

Therefore, raise in order to suppress this minimum discharge voltage, preferably with the driving voltage of bipolar pulse voltage as nozzle.At this moment, shown in following table 2, compare when distinguishing with use DC bias voltage, minimum discharge voltage reduces.This is equivalent to hit the charged particles of drop of discharge place member, and positive and negative alternately opposite polarity electric charge drops onto on the discharge place member successively, so can simultaneously suppress the charging on the discharge place member, one side is discharged.Like this with bipolar pulse voltage as the driving voltage of nozzle, discharge aspect stable effective improving nozzle.

[table 2]

Voltage application method	Minimum discharge voltage
		DC	330V
Bipolar pulse voltage	163V

Under the situation of bipolar voltage as the driving voltage of nozzle, as shown in Figure 9, when pattern is described in formation to discharge place member, also disperse at the periphery generation fine droplet of describing pattern, cause describing the state of affairs of pattern perturbation.This is owing to following reason.

For example, shown in Figure 30 (a), when formation is used as the driving voltage of nozzle with low-frequency pulse voltage, on as the dielectric substrate 16 of discharge place member, discharge liquid continuously with positive charge.At this moment, shown in Figure 30 (b), on the liquid of drippage, drip liquid thereafter earlier, then two liquid repel on dielectric substrate 16 mutually because same polarity ground is charged, and for example the liquid of back drippage becomes further fine liquid drops, and disperses on dielectric substrate.

Above-mentioned like that, the dispersing of fine droplets for example discharging material when being taken as conductive material and on dielectric substrate 16, describing wiring pattern, to the electrical characteristics generation harmful effect of substrate.

Therefore, in the electrostatic attraction type fluid delivery device of the present invention, further constitute the driving voltage of bipolar pulse voltage as nozzle, the discharge material that suppresses on the discharge place member disperses, and can form the little distinct fine pattern of rendering image disturbance.

Below, the electrostatic attraction type fluid delivery device of detailed description present embodiment.

Fig. 1 is the summary composition diagram of the electrostatic attraction type fluid delivery device of present embodiment.As shown in Figure 1, in the electrostatic attraction type fluid delivery device, the nozzle 11 and the articles holding table 12 that will become drop discharge head dispose opposed to each other.That is, nozzle 11 is configured to leading section towards downside, articles holding table 12 is horizontally set on the downside of nozzle 11.Nozzle 11 is driven by unshowned drive unit, can move toward any direction.For example, nozzle 11 is placed in the 3 dimension mechanical hands that make nozzle 11 independent mobile usefulness.Nozzle 11 and articles holding table 12 are relatively moved get final product, so articles holding table 12 can be the equipment that driven by drive unit and move.

Drive electrode 13 is set in nozzle 11, and connects power supply (driving voltage applying unit) 14 on this drive electrode 13.The discharge material (fluid) 15 that filling liquid is formed in nozzle 11 also, and will be fixed on the articles holding table 12 as the dielectric substrate (discharge place member) 16 of discharge place of discharging material 15.With articles holding table 12 ground connection, thus with dielectric substrate 12 by articles holding table 12 ground connection.The discharge material 15 that utilizes nozzle 11 to discharge forms for example fine wiring pattern on dielectric substrate 16.

Nozzle 11 be in order to discharge ultra tiny liquid, and the stream that low electricity is led is located at the next door of nozzle 11, and perhaps 11 at nozzle is led as low electricity.For this reason, nozzle 11 is good with glass system capillary, but with insulator-coating also can on conductive materials.

The reason that nozzle 11 is taken as glass system based on: can form the spray orifice of several microns degree easily, can be when spray orifice stops up by breaking into pieces under the situation that nozzle-end reproduces new nozzle-end, glass atomizer owing to have cone angle and make unwanted solution move to upside and be not trapped in nozzle-end and cause spray nozzle clogging and be convenient to form flap nozzle etc. because nozzle 11 has the flexibility of appropriateness because of surface tension.

Particularly, the available core glass pipe (trade name: the Na リ シ ゲ GD of joint-stock company-1) make of adding by the capillary drawing machine.When the core glass pipe is added in use, following advantage is arranged.

(1) core side glass is convenient to soak prepared Chinese ink, thereby is convenient to fill prepared Chinese ink.(2) core side glass is hydrophily, and outside glass is hydrophobicity, thereby exists the zone of prepared Chinese ink to be only limited to the degree of internal diameter of the glass of core side in the nozzle-end, and the electric field concentration effect is more remarkable.(3) but the nozzle miniaturization.(4) obtain enough mechanical strengths.

According to the situation on making, the lower limit of nozzle diameter is good with 0.01 μ m; Nozzle diameter higher limit when surpassing surface tension according to electrostatic force shown in Figure 3 is 25 μ m, and be 25 μ m according to the nozzle diameter upper limit when satisfying the discharge condition shown in Figure 4 because of local electric field strength, the higher limit of nozzle diameter with 25 μ m be good, 15 μ m are better.For more effective internal field's concentration effect that utilizes, nozzle diameter is preferably in the scope of 0.01 μ m～8 μ m.In the present embodiment, be set at the scope of φ 0.1 μ m～20 μ m with regard to nozzle diameter.

Nozzle 11 is not limited to capillary, also can be the 2 dimension pattern nozzles that utilize microfabrication to form.When making nozzle 11 be the glass of good forming ability, nozzle 11 can not be used as electrode, thereby in nozzle 11, insert metal wire (for example tungsten line), as drive electrode 13.Also available plating forms drive electrode 13 in nozzle 11.When forming nozzle 11 itself, apply insulating materials thereon with conductive materials.

Drive electrode 13 is configured to be immersed in the discharge material 15 as the liquid of filling in the nozzle 11.Supply with discharge material 15 from not shown supply source.

The running of control device (driving voltage applying unit) the 17 control power supplys of forming by for example computer (driving voltage applying unit) 14.That is, will discharge signal according to this, apply the voltage of impulse waveform from 14 pairs of drive electrodes 13 of power supply from the discharge signal supply power 14 of control device 17.Because this voltage makes the discharge material 15 in the nozzle 11 charged, and discharges from nozzle 11.Figure 11 illustrates a routine described driving voltage.This driving voltage is that polarity is judged to be positive and negative bipolar pulse voltage successively, and its frequency is more than or equal to 1Hz.

As dielectric substrate 16, sheet resistance value is more than or equal to 10 ¹⁰The substrate of Ω/sq gets final product, and except that being made up of macromolecular materials such as polyimides, propylene, polycarbonate, also can be made up of glass under the low-humidity environment etc., and its resistance also conforms with within the above-mentioned scope.

In the above-mentioned composition, at first, the principle of discharging fine liquid from nozzle 11 is described.This discharges principle and considers as follows.In the electrostatic attraction type fluid delivery device,, electric charge is supplied with discharge material 15 from drive electrode 13 by applying driving voltage from 14 pairs of drive electrodes 13 of power supply.Make electric charge pass through the discharge material 15 of nozzle 11 inside, move to the meniscus with electrostatic capacitance 40 of the leading section that is formed on nozzle 11.Then, when the quantity of electric charge of electrostatic attraction type fluid delivery device 40 reached ormal weight, the liquid that carries out from nozzle 11 toward dielectric substrate 16 was discharged.

Then, illustrate in the electrostatic attraction type fluid delivery device from nozzle and will discharge that material 15 is discharged and running when dielectric substrate 16 forms the pattern of wishing.

Utilize drive units such as 3 dimension mechanical hands,, nozzle 11 is carried out 2 dimension drivings toward X-direction and Y direction according to the design producing data of hope.At this moment, again to the position of nozzle 11 control Z-directions, the distance (gap) that makes the front end of nozzle 11 and dielectric substrate 16 is always in the scope of 30～200 μ m.As described clearance measurement unit, can utilize displacement instrument that uses laser or the gap horizontal metroscope that uses laser.

Along with the above-mentioned of nozzle 11 moved, apply bipolar pulse voltage (driving voltage) from the drive electrode 13 of 14 pairs of nozzles of power supply.Thus, in the discharge material 15 in the nozzle 11, electric charge begins to move toward the preceding extreme direction of nozzle 11.So, in the leading section of nozzle 11, on the meniscus 40 of discharging material 15 formation, save electric charge, the electric-field intensity of its periphery is raise.Then, electric-field intensity surpasses to make discharges material 15 when nozzle 11 is discharged the critical point of usefulness, and nozzle 11 will be discharged material 15 discharges, and it is hit on dielectric substrate 16.At this moment,, on drive electrode 13, apply bipolar pulse voltage, thereby the polarity of the liquid of hitting forms positive and negative replacing on dielectric substrate 16 more than or equal to 1Hz as the driving voltage of nozzle 11.The efflux time of hitting for 1 time is smaller or equal to 500msec.

Then, illustrate by the frequency characteristic of describing bipolar pulse voltage operate in of electrostatic attraction type fluid delivery device dielectric substrate 16.

The polyimide substrate (dielectric substrate 16) that is illustrated in Figure 12 go up with Yin Nami stick with paste as discharge material when discharging the driving voltage frequency and the relation of minimum discharge voltage, the disperse relation of sector width of the drop when Figure 13 illustrates the driving voltage frequency and describes lines on dielectric substrate 16.

When drive electrode 13 is applied bipolar pulse voltage as driving voltage, discharge the drop of material 15 and discharge from nozzle 11 with positive voltage that alternately applies and negative voltage respectively.At this moment efflux time changes according to the frequency of bipolar pulse voltage, and a quantity of electric charge of discharging material 15 of hitting on dielectric substrate 16 changes with this efflux time with being directly proportional.

At this moment, reduce the frequency of bipolar pulse voltage, strengthen the quantity of electric charge of per hit for 1 time (1 time discharge), then as shown in figure 12, minimum discharge voltage (the discharge starting resistor of nozzle 11) raises.This is because per quantity of electric charge of hitting for 1 time is when increasing, it is big that the quantity of electric charge of the drop of hitting on dielectric substrate 16 (charge volume of dielectric substrate 16) becomes, potential difference between dielectric substrate 16 and the nozzle 11 is reduced, raise thereby continue to stablize the value of discharging the required voltage that is added to drive electrode 13 (driving voltage).

Promptly, among Figure 12, when the driving voltage frequency is lower than 1Hz, minimum discharge voltage (discharge starting resistor) begins to raise, be lower than under the condition of 1Hz in the driving voltage frequency like this, when being DC bias voltage (DC voltage) as driving voltage, the discharge of nozzle 11 running begins to be subjected to the influence of the charging of dielectric substrate 16.

In fact, as shown in figure 12, can confirm to discharge material to the discharge on the dielectric substrate 16 cause describe the time sharply increase under the condition of driving voltage voltage to frequency 1Hz at the sector width that disperses of the drop on the dielectric substrate 16.Otherwise under the driving voltage frequency was condition more than or equal to 1Hz, the sector width that the drop on the dielectric substrate 16 can be dispersed was suppressed to smaller or equal to 50 μ m, can stably form rendering image well.

In sum, in the electrostatic attraction type fluid delivery device of present embodiment, because will be, can suppress drop on the dielectric substrate 16 that the charging of dielectric substrate 16 causes and disperse that the district enlarges and the driving voltage rising more than or equal to the bipolar pulse voltage of 1Hz as the driving voltage on the drive electrode 13 that is added in nozzle 11.As a result, can utilize the low voltage drive of nozzle 11 and brightly dielectric substrate 16 is formed fine patterns.

Again, in the present embodiment, if the drive electrode 13 of nozzle 11 is applied bipolar pulse voltage as driving voltage, be illustrated, but the driving voltage that needs in the discharge of nozzle 11 be added in the voltage on the drive electrode 13 and the articles holding table 12 that works as opposite electrode between potential difference.Therefore, driving voltage can be the composition that only is added in the voltage on the articles holding table 12, or is added in the voltage and the composition that is added in the resultant voltage (potential difference) of the voltage on the drive electrode 13 of articles holding table 12.

As the bipolar pulse voltage of driving voltage, even if such low waveform of through-rate such as AC also can utilize.

Embodiment 2

Below, another embodiment of the present invention is described with reference to the accompanying drawings.

Figure 14 (a) and Figure 14 (b) are the oscillograms that illustrates as the relation of the surface potential of the discharge material 15 of the waveform of the bipolar pulse voltage that is added in the driving voltage on the drive electrode 13 of nozzle 11 and nozzle 11 front ends, Figure 14 (a) illustrates the situation that nozzle 11 is not discharged the discharge of material 15, and Figure 14 (b) illustrates the situation that this discharge takes place.Figure 15 is the key diagram that the electric charge supplied with from drive electrode 13 in the nozzle 11 accumulates in the running on the meniscus of spray nozzle front end.Figure 16 is the discharge of discharge material 15 of the nozzle 11 the when driving voltage (driving voltage frequency) that uses Figure 14 (b) is shown and the key diagram of the situation of not discharging.Figure 17 is the curve map that the relation of driving voltage frequency and minimum discharge voltage is shown, and Figure 18 illustrates the disperse graph of relation of sector width of drop on driving voltage frequency and the dielectric substrate 16.Figure 19 illustrates the curve map of dyeing prepared Chinese ink and Yin Nami being stuck with paste the relation of driving voltage frequency when discharging material 15 and minimum discharge voltage in big frequency range.In the present embodiment, the explanation of the same section of omission and above-mentioned embodiment only illustrates different parts.

The electrostatic attraction type fluid delivery device of present embodiment has composition shown in Figure 1.In this electrostatic attraction type fluid delivery device, voltage waveform the when drive electrode 13 of nozzle 11 is applied bipolar pulse voltage and the pass that applies the surface potential that the electric charge in the discharge material 15 that accumulates in nozzle 1 front end causes according to this voltage are that Figure 14 (a) or Figure 14 (b) are such.

Promptly, among Figure 14 (a) and (b) and Figure 15, when the drive electrode 13 of nozzle 11 was applied bipolar pulse voltage 101, electric charge drive electrode 13 past nozzle 11 front ends from nozzle 11 inside in discharging material 15 moved, and accumulate this electric charge on the meniscus 40 of nozzle 11 front ends.Thus, surface potential 102 one sides of meniscus are depicted in and become maximum saturation curve on rising current potential 101a and the decline current potential 101b, and one side raises.At this moment, reach the minimum time point of discharging current potential 103 that the driving force that obtains discharge and need is used, the discharge of the discharge material 15 of starting nozzle 11 at the surface potential 102 of meniscus.

Therefore, shown in Figure 14 (a), pulse the surface potential 102 of meniscus do not reach minimum discharge current potential 103 during in overturn under the situation of (applying bucking voltage) such driving voltage frequency, do not produce discharge from the discharge material 15 of nozzle 11.Therefore,, need to strengthen the amplitude of bipolar pulse voltage 101 or reduce the driving voltage frequency, make the positive voltage and the negative voltage application time lengthening separately of bipolar pulse voltage 101 for the discharge of the discharge material 15 that carries out nozzle 11.

Here, the situation that concern reduces the driving voltage frequency, then can set nozzle 11 and have or not discharge according to electrification time constant τ and the positive voltage of bipolar pulse voltage 101 and the magnitude relationship of negative voltage application time T separately by conductivity σ S/m that discharges material 15 and DIELECTRIC CONSTANTS decision.Therefore, shown in Figure 14 (b), set driving voltage frequency f Hz, make application time T greater than electrification time constant τ, soon the driving voltage frequency f is set for and is satisfied f≤1/ (2 τ), thereby can carry out the discharge of the discharge material 15 of nozzle 11.The driving voltage of Figure 16 and Figure 14 (b) (driving voltage frequency) illustrates the discharge of discharge material 15 of nozzle 11 and the situation of not discharging accordingly.

As object lesson, to being stuck with paste as discharging material 15, Yin Nami is discharged to situation on the polyimide substrate (dielectric substrate 16), Figure 17 illustrates the relation of driving voltage frequency and minimum discharge voltage, the disperse relation of sector width of the drop that Figure 18 illustrates driving voltage frequency and dielectric substrate 16.

Among the result of Figure 17, the driving voltage frequency is for approximately more than or equal to 50Hz the time, and minimum discharge voltage raises.Mean that this is for the surface potential 102 that makes meniscus reaches the minimum current potential 103 of discharging, have to make the driving voltage frequency condition that applies voltage (bipolar pulse voltage) increasing.That is, the driving voltage frequency is during more than or equal to 50Hz, does not satisfy the driving frequency condition of f≤1/ (2 τ).

Among the result of Figure 18, distinguish in the driving voltage frequency for more than or equal to the zone of 50Hz the Qu Bianda that disperses of the drop on the dielectric substrate 16, the rendering image disturbance on the dielectric substrate.That is to say,,, need discharge with driving voltage frequency smaller or equal to 50Hz to obtain distinct fine pattern for the drop that suppresses on the dielectric substrate 16 disperses as far as possible.

It is 10 that Figure 19 illustrates conductivity in big frequency range ^-4～-6The dyeing prepared Chinese ink of S/cm and conductivity are 10 ^-7～-9The driving voltage frequency when Yin Nami of S/cm sticks with paste as discharge material 15 and the relation of minimum discharge voltage.That is, Figure 19 is for sticking with paste the curve that the Figure 12 that will represent low-frequency range and the Figure 17 that represents high-frequency range synthesize to Yin Nami.

Preferred range based on the driving voltage frequency f of Figure 19 is 1Hz≤f and f≤1/ (2 τ).

In sum, in the electrostatic attraction type fluid delivery device of present embodiment, the bipolar pulse voltage that the driving voltage frequency f is satisfied f≤1/ (2 τ) is as driving voltage, nozzle 11 is driven, thereby suppress the rising of minimum discharge voltage, and dwindle drop on the dielectric substrate 16 district of dispersing, can on dielectric substrate 16, form distinct fine pattern.

Again, in the present embodiment, if the drive electrode 13 of nozzle 11 is applied bipolar pulse voltage as driving voltage, be illustrated, but the driving voltage that the discharge of nozzle 11 needs be added in the driving voltage on the drive electrode 13 and the articles holding table 12 that works as drive electrode between potential difference.Therefore, driving voltage only can be the composition of the voltage that articles holding table 12 is applied, or is added in the composition of resultant voltage (potential difference) of the voltage of the voltage of articles holding table 12 and drive electrode 13.

As the bipolar pulse voltage of driving voltage, even if such low waveform of through-rate such as AC also can be used.

Embodiment 3

Below, the another embodiment of the present invention is described with reference to the accompanying drawings.The electrostatic attraction type fluid delivery device of present embodiment has composition shown in Figure 20.That is, in the electrostatic attraction type fluid delivery device of present embodiment, drive articles holding table 12, move it with mobile device (mobile unit) 21.Moving direction, translational speed and the mobile timing etc. of control device (control module) 22 control mobile devices 21.Control device 22 is also controlled the applying regularly etc. of magnitude of voltage, driving voltage frequency and driving voltage of the driving voltage that the drive electrode 13 of 14 pairs of nozzles 11 of power supply supplies with.

Figure 21 illustrates the disperse curve map of relation of sector width of the sweep speed of the articles holding table 12 in the electrostatic attraction type fluid delivery device of present embodiment and the drop on the dielectric substrate 16.Figure 21 illustrates Yin Nami is stuck with paste as discharging the discharge experimental result of material 15 when the enterprising line bar of polyimide substrate (dielectric substrate 16) is described.At this moment nozzle diameter is about 1 μ m, and the driving voltage frequency is 50Hz.By articles holding table 12 is moved, carry out relatively moving of nozzle 11 and dielectric substrate 16 (articles holding table 12).

Distinguish among the result of Figure 21: in the scope smaller or equal to 10 μ m/sec, the drop on the dielectric substrate 16 disperses to distinguish and sharply dwindles in sweep speed.This means with the discharge material that when nozzle 11 is discharged next position of hitting point (drop) is to the sector width that disperses of the drop on the offset affect dielectric substrate 16 of the position of the point of hitting on the dielectric substrate 16 (drop).

Therefore, with the perfect condition that sector width is suppressed to the least limit aspect of dispersing of the drop on the dielectric substrate 16 be: be under zero the state to dielectric substrate 16 sweep speeds, be that nozzle 11 is present under the state of the position on the drop of hitting on the dielectric substrate 16, will discharge alternately discharge of material 15 by the positive voltage and the negative voltage of bipolar pulse voltage.Under this state, on the position of nozzle 11 below just, always exist resistance to be lower than to remove electricity to become the roughly drawing section (hitting drop portion) of the peripheral insulation division of 0V (surface of dielectric substrate 16), thereby suppress the charging of hitting the position on the dielectric substrate 16.Therefore, at this moment, suppress the rising of minimum discharge voltage, and the drop that repulsion causes between each drop of the electric charge with identical polar on the inhibition dielectric substrate 16 disperses.

In contrast, a nozzle 11 relatively moves with dielectric substrate 16, one side is discharged the discharge of material 15, and when accelerating its sweep speed (relative velocity), and the drain position that forms from the discharge material 15 of nozzle 11 slightly departs from the state of hitting the position of its front.At this moment, be subjected to current potential and the influence of describing the current potential on the lines on the dielectric substrate 16 again, discharge again, thereby discharge stable the reduction, easy generation is dispersed around discharging material 15 past drain positions on the dielectric substrate 16.

Particularly, among the result shown in Figure 21, be meant that as the drop condition that sector width becomes sweep speed (articles holding table speed) 10 μ m/sec, the driving frequency 50Hz of big critical point of dispersing leaving the front hits the condition of hitting the drop of next electric charge with opposite polarity on the position of position 0.1 μ m.That is, be under the condition of f Hz, discharge sweep speed v μ m/sec in general driven sweep frequency, be that the drop that can reduce on the dielectric substrate 16 disperses smaller or equal to 0.1 μ m by making an interval v/2f.Derive the driving voltage frequency f Hz and the relation of discharging sweep speed v μ m/sec of bipolar pulse voltage from The above results, v/2f≤0.1 μ m then, thereby f 〉=5v.

Above-mentioned condition is good with the scope at 1～10 μ m between the line thickness described and the point.

In sum, in the electrostatic attraction type fluid delivery device of present embodiment, be discharged to dielectric substrate 16 enterprising line bars when describing in the fine droplets that will discharge material 15, with driving voltage frequency f Hz with discharge sweep speed v μ m/sec and set for and satisfy f 〉=5v, thereby the drop that can suppress on the dielectric substrate 16 disperses, and forms distinct fine pattern.

Again, in the present embodiment, if the drive electrode 13 of nozzle 11 is applied bipolar pulse voltage as driving voltage, be illustrated, but the driving voltage that the discharge of nozzle 11 needs be added in the driving voltage on the drive electrode 13 and the articles holding table 12 that works as drive electrode between potential difference.Therefore, driving voltage only can be the composition of the voltage that articles holding table 12 is applied, or is added in the composition of resultant voltage (potential difference) of the voltage of the voltage of articles holding table 12 and drive electrode 13.

As the bipolar pulse voltage of driving voltage, even if such low waveform of through-rate such as AC also can be used.

Again, in the present embodiment, if mobile device 21 moves articles holding table 12, but articles holding table 12 (dielectric substrate 16) and nozzle 11 are relatively moved describing to get final product on dielectric substrate 16, so mobile device 21 moves at least one side in nozzle 11 and the articles holding table 12 to get final product.

Embodiment 4

Below, the another embodiment of the present invention is described with reference to the accompanying drawings.

The electrostatic attraction type fluid delivery device of present embodiment has composition shown in Figure 1.Figure 22 illustrates the disperse curve map of relation in district of driving voltage (bipolar pulse voltage) and drop on the dielectric substrate 16 on the drive electrode 13 that is added in nozzle 11 in the electrostatic attraction type fluid delivery device of present embodiment.

Shown in Figure 22 Yin Nami is stuck with paste as discharge the experimental result that material 15 is discharged and described on polyimide substrate (dielectric substrate 16).At this moment nozzle diameter is about 1 μ m, and to make the driving voltage frequency be 50Hz, and nozzle 11 is 200 μ m/sec with the relative moving speed (sweep speed) of dielectric substrate 16 (articles holding table 12).When discharging under this condition, discharging spacing is 2 μ m, and the spot diameter (hitting liquid-drop diameter) of hitting that nozzle diameter 1 μ m discharges down is about 1 μ m, thereby the state of hitting is a little, but not lines.

Among the result of Figure 22,, sharply enlarge discharging drop on the dielectric substrate 16 of material 15 when the discharging sector width that disperses along with driving voltage (pulse applies voltage) strengthens.This is because hit the drop of the electric charge with identical polar in a large number on same position.That is, when driving voltage uprised, the ejection quantitative change of the discharge material 15 of nozzle 11 was many, and this discharge rate is owing to hit repulsion between the like charges in the drop when hitting on dielectric substrate 16, and the drop district of dispersing is enlarged.When especially driving voltage surpassed 400V, the district of dispersing sharply enlarged.Otherwise driving voltage is during smaller or equal to 400V, and the district of dispersing dwindles relatively.That is to say, be smaller or equal to 400V by making driving voltage, can suppress the discharge that drop disperses toward periphery.At this moment, the lower limit of driving voltage becomes for example minimum discharge voltage.

In sum, in the electrostatic attraction type fluid delivery device of present embodiment, fine liquid is discharged on the dielectric substrate 16 and when forming point, making the driving voltage on the drive electrode 13 that is added in nozzle 11 is smaller or equal to 400V, thereby can on dielectric substrate 16, suppress drop and disperse toward hitting point (hitting drop) periphery, and form distinct fine pattern.

Again, in the present embodiment, if the drive electrode 13 of nozzle 11 is applied bipolar pulse voltage as driving voltage, be illustrated, but the driving voltage that the discharge of nozzle 11 needs be added in the driving voltage on the drive electrode 13 and the articles holding table 12 that works as drive electrode between potential difference.Therefore, driving voltage only can be the composition of the voltage that articles holding table 12 is applied, or is added in the composition of resultant voltage (potential difference) of the voltage of the voltage of articles holding table 12 and drive electrode 13.

As the bipolar pulse voltage of driving voltage, even if such low waveform of through-rate such as AC also can be used.

Again, in the above embodiment, the disperse width of the lines that the not strict influence of sector width describes of drop can be used as and comprises the whole width of describing the useless district of dispersing of drop that pattern area ground enlarges toward its both sides.

Embodiment 5

Figure 23 illustrates the composition of the electrostatic attraction type fluid delivery device of embodiment 5.Shown in the electrostatic attraction type fluid delivery device, dielectric substrate 16 is fixed on the articles holding table 12 of ground connection.As the type of dielectric substrate 16, sheet resistance value is more than or equal to 10 ¹⁰Ω/sq gets final product, and except that macromolecular materials such as polyimides, propylene, polycarbonate were suitable for, the glass under the low-humidity environment etc. also were suitable for.And, corona charging device 30 and fluid are set discharge head (nozzle) 11, make front end and dielectric substrate 16 opposed.

In the corona charging device 30, configured electrodes line 31 and electrode wires 31 is located at the gap electrode 32 of dielectric substrate 16 sides abreast, and then shell electrode 33 is set in the mode of surrounding electrode wires 31.As the material of electrode wires 31, use nickel or the tungsten of about 10～70 μ m in line footpath.Each electrode connects power supply, so that can independently apply voltage.Distance between gap electrode 32 and the dielectric substrate 16 is total to keep constant, and its slit is about 100 μ m～2mm.

Fluid is discharged 11 form to such an extent that the front end aperture is about φ 0.1～20 μ m, and inside has drive electrode 13.On this drive electrode 13, connect power supply 14, be used for independently controlling, and its FREQUENCY CONTROL is become more than or equal to 1Hz with bipolar pulse voltage.Discharge 11 whole inside with discharge material (promptly the discharging fluid) fill fluid of hope.Fluid is discharged in the 11 3 dimension mechanical hand that are placed in its drive.

The running of the electrostatic attraction type fluid delivery device of present embodiment 5 then, is described.At first, by making 30 scannings of 12 pairs of corona charging devices of articles holding table or making 12 scannings of 30 pairs of articles holding tables of corona charging device, allow articles holding table 12 and corona charging device 30 relatively move, and during this relatively moves, remove by the substrate surface of 30 pairs of dielectric substrate 16 of corona charging device.

When dielectric substrate 16 is removed electricity, electrode wires 31 is applied several kilovolts AC (interchange) voltage approximately, corona discharge is occurred in around the electrode wires 31.And, at this moment, by the potential setting of gap electrode 32 is zero volt approximately, can supply with on the dielectric substrate 16 with dielectric substrate 16 on the opposite electric charge of electric charge 50 (being negative electrical charge here) of charging, thereby carry out dielectric substrate 16 except that.

Then, toward the dielectric substrate of removing behind the electricity 16, carry out fluid accordingly with the design producing data of hope and discharge a fluid of 11 and discharge.At this moment, pressing fluid discharges 11 and discharges a sweep speed of 11 with the relative velocity decision fluid of articles holding table 12.Convection cell is discharged a front end of 11 and is done the control of Z axle again, makes the constant clearance that always obtains 30～200 μ m between itself and the dielectric substrate 16.As gap control unit, can utilize the displacement instrument and the slit horizontal metroscope that use laser.

Fluid is discharged in 11, discharges in order to carry out fluid, applies bipolar pulse voltage from 14 pairs of drive electrodes 13 of power supply, thereby is discharging the inner beginning of fluid toward spray nozzle front end direction dislocation charge.Then, one side is accumulated electric charge on the fluid cross-section (being meniscus) of spray nozzle front end portion, one side improves the electric-field intensity of its periphery, and surpasses the time point of the least limit expulsion force that needs at its electric field force, start fluid and discharge, it is hit on dielectric substrate 16.

Fluid is discharged in 11, and in order with bipolar pulse voltage drive electrode 13 to be driven, it is positive and negative alternately charged to make this fluid discharge a fluid of 11 discharges.Therefore, on the dielectric substrate 16, always hit the fluid of the electric charge that has the polarity that suppresses to hit charging a little, can simultaneously suppress the charging on the dielectric substrate 16, simultaneously carry out stable discharge.

In sum, in the composition of the electrostatic attraction type fluid delivery device of present embodiment 5, after utilizing 30 pairs of dielectric substrate 16 of corona charging device to remove electricity in advance, discharge with bipolar pulse voltage driving carrying out fluid, thereby the discharge instability that the charging on the dielectric substrate 16 causes does not take place.Therefore, dispersing in the time of suppressing to discharge again can be carried out the formation that distinct fine pattern is made again.

Embodiment 6

Figure 24 is the composition that the electrostatic attraction type fluid delivery device of embodiment 6 is shown.To the explanation of present embodiment 6 omissions, different parts only is described with above-mentioned embodiment 5 same sections.Use the corona charging device conduct to remove method for electrically in the embodiment 5, but present embodiment 6 is used needle electrodes.

The following describes the composition of the electrostatic attraction type fluid delivery device of Figure 24.In the described electrostatic attraction type fluid delivery device, be provided with except that dateline 34 and fluid with front end and dielectric substrate 16 opposed modes and discharge 11.Remove dateline 34 and be the acicular texture that point diameter is formed the insulating properties of metal system about φ 0.1 μ m～20 μ m or metallizing, and to dielectric substrate 16 set for the gap of pin front end for smaller or equal to 50 μ m.The front end that removes dateline 34 also can be connected on the dielectric substrate 16.Then, remove the power supply 35 that the independent control of connection voltage is used on the dateline 34.To be placed in the 3 dimension mechanical hands that independently drive usefulness except that dateline 34.

Then, illustrate that removing electricity operates.At first, carry out the driving of XY2 dimension to removing dateline 34 accordingly with the design producing data of hope, at this moment one side always keeps smaller or equal to 5 μ m the distance between a front end and the substrate, and the correct front end of one side is supplied with AC voltage, thereby corona discharge takes place.Different to the voltage that applies except that dateline 34 front ends because of point diameter, but as long as the leading section diameter is smaller or equal to φ 5 μ m, amplitude is just can remove basically more than or equal to 400V.Then, by corona discharge produce remove electric charge because of remove between dateline 34 front ends and the dielectric substrate 16 electric field force attached to except that dateline 34 just below.Make except that dateline 34 by one side and to do XY scanning, one side is implemented this electro ultrafiltration that removes, and forms the electric part of removing that adapts to the design producing data of wishing on dielectric substrate 16.

Then, on the part after removing electricity, discharge 11 a discharge fluid by fluid, and form fine pattern.Like this, make in advance accordingly except that dateline 34 with the design producing data and to scan, discharge a stabilized fluid of 11 and discharge thereby can carry out fluid in the design producing district.Remove dateline 34 owing to as the corona charging device of enforcement mode 5, do not need high voltage, can carry out the control of the big low voltage drive device of cost advantage.Owing to only the part that needs on the dielectric substrate 16 is implemented to remove electricity, can shorten again except that the time that spends in the electricity.

In sum, in the composition of the electrostatic attraction type fluid delivery device of present embodiment 6, design producing district to the hope on the dielectric substrate 16, after utilizing needle-like to remove dateline 34 in advance to remove electricity, discharge with bipolar pulse voltage driving carrying out fluid, thereby the discharge instability that the charging on the dielectric substrate 16 causes does not take place.Therefore, dispersing in the time of suppressing to discharge again can be carried out stable fine fluid again and be discharged, and can carry out the formation that distinct fine pattern is made.

In the above-mentioned explanation, remove dateline 34 and fluid and discharge 11 and be subjected to drive respectively, but also can drive them with being integrated again.

Embodiment 7

Fluid is discharged in 11, and electric charge beginning in discharging fluid that alive drive electrode 13 is supplied with is moved toward spray nozzle front end, and one side is stored in spray nozzle front end portion, and one side forms meniscus.Basically to form the diameter of this meniscus with the roughly the same size in the aperture of nozzle.

Then, the formed electric field force of electric charge that accumulates at meniscus surpasses the moment of the driving force of discharging needs, starts fluid and discharges a fluid discharge of 11.That is, the fluid with each nozzle diameter discharged a drive electrode 13 of 11 and supply with, then carry out fluid and discharge more than or equal to the voltage of discharging starting resistor.Particularly, when nozzle diameter was φ 1～10 μ m, discharging starting resistor was about 140V.Then, apply the voltage change greatly, discharge rate is increased along with making, effective to the formation of a large amount of discharges corresponding and large diameter point with high-velocity scanning.

Yet, when applying voltage, might surpass discharge startup electric field in the atmosphere above setting.Particularly, when the electric-field intensity that produces because of the charge concentration of meniscus portion surpassed the discharge of obtaining by following formula (Paschen's law curve calculating formula) and starts electric-field intensity, the possibility height of the discharge that air breakdown causes partly took place at the high electric field of spray nozzle front end portion periphery.In fact, when fluid is discharged, discharge, then produce to discharge fluid and disperse, hit the fine droplet of satellite shape, become picture noise at the fine pattern periphery of hope.

E＝4.03×10 ⁶{1+3.08×10 ^-2/D ^0.54+4.48×10 ^-7/D ^1.41}

E: discharge starts electric-field intensity (V/m)

D: nozzle diameter (m)

Here, in the curve of Figure 25, to applying the situation that voltage is taken as 200V, 340V, 400V, 500V the nozzle diameter of spray nozzle front end portion and the relation of the electric-field intensity that the charge concentration in the meniscus portion produces are shown respectively.The curve of Figure 25 also illustrates the relation of the nozzle diameter of being obtained by above-mentioned Paschen's law curve (Paschen curve) calculating formula and the startup electric-field intensity of discharging simultaneously.

Among described Figure 25, exceed under the condition that the nozzle diameter obtained according to the Paschen's law curve calculating formula-discharge starts the electric-field intensity line chart respectively applying the nozzle diameter of voltage-electric-field intensity line chart, think and discharge in atmosphere when fluid takes place discharges.

So, distinguish from described Figure 25: become the electrostatic attraction type fluid delivery device of the present invention under the condition of nozzle diameter 0.01～25 μ m of object, apply voltage for smaller or equal to 340V, can under the condition of not discharging really, discharge fluid by making.Thus, can not have the stabilized fluid of the phenomenon of dispersing and discharge, can form distinct micro pattern.Also distinguish from described Figure 25: nozzle diameter is used applying voltage and can not follow the fluid of discharge to discharge smaller or equal to 500V for more than or equal to 16 μ m or smaller or equal to 0.25 μ m the time; Nozzle diameter is during more than or equal to 7.4 μ m or smaller or equal to 0.65 μ m, uses applying voltage and can not follow the fluid of discharge to discharge smaller or equal to 400V.

In sum, in the composition of present embodiment 7, by in advance dielectric substrate 16 being removed, and then the electric-field intensity when discharging with fluid is carried out fluid and is discharged less than the voltage that applies that the discharge of obtaining according to the Paschen's law curve calculating formula starts electric-field intensity, dispersing of the past periphery that can suppress discharges causes can form distinct fine pattern.

Moreover, in the above-mentioned embodiment 5～7, discharge bipolar pulse voltage on the drive electrode 13 of 11 inside as driving voltage with being added in fluid, be illustrated, but be the signal voltage and the potential difference that is added in the voltage of articles holding table 12 sides that is added on the inner electrode 210 of head in fact, thereby can only apply the signal of bipolar pulse voltage or a synthetic side and articles holding table side the articles holding table side as the driving force required voltage.Bipolar pulse voltage also is suitable for such low waveforms of through-rate such as AC.

Embodiment 8

Figure 26 illustrates the composition of the electrostatic attraction type fluid delivery device of embodiment 8.In the described electrostatic attraction type fluid delivery device, on the articles holding table 12 of ground connection, dielectric substrate 16 is set.And, with electric charge award 60 and fluid discharge 11 and be arranged to front end and dielectric substrate 16 is opposed.

Electric charge is awarded 60 acicular textures for the insulating properties of the metal system that forms point diameter with φ 0.1～5 μ m or metallizing, and set for needle tip to the gap of dielectric substrate 16 for smaller or equal to 50 μ m.Electric charge is awarded a front end of 60 and can be connected on the dielectric substrate.And electric charge is awarded and 60 is connected and independently carry out the power supply 61 that Control of Voltage is used.Electric charge awarded 61 be placed in the 3 dimension mechanical hands that drive uses.

With front aperture directly is that the mode of φ 1～5 μ m forms fluid and discharges 11, and its inside has drive electrode 13.The power supply 14 that Control of Voltage is used is independently carried out in these drive electrode 13 connections.Whole inside with discharge material (promptly the discharging fluid) filling head of hope.Award 60 identically with electric charge, also fluid is discharged 11 and be placed in and carry out in the 3 dimension mechanical hands that drive uses.

The running of the electrostatic attraction type fluid delivery device of present embodiment 8 then, is described.At first, electric charge is awarded and 60 is carried out XY 2 dimensions accordingly with the design producing data of wishing and drive, but at this moment one side makes electric charge award a front end of 60 and the distance of dielectric substrate 16 diameters always to keep smaller or equal to 5 μ m, one side is awarded a front end supply power of 60 by 61 pairs of electric charges of power supply, and corona discharge is taken place.

It is different because of its point diameter to award the voltage that a front end of 60 applies to electric charge, if but point diameter is smaller or equal to φ 5 μ m, then uses more than or equal to 400V and just can discharge.So, the electric charge of discharge because of electric charge award a front end of 60 and the electric field force between the dielectric substrate 16 attached to the electric charge on the dielectric substrate 16 award 60 below, become and adhere to electric charge 70.

One side is awarded electric charge and 60 is done XY scanning, and one side is implemented this discharge process, thereby forms the charge pattern of awarding based on the hope of design producing data on dielectric substrate 16.Then, one side from by the part of adhering to electric charge 70 pattern-makings just above near fluid discharge 11, the distance on the surface of a front end and dielectric substrate 16 is kept 30～200 μ m, one applies the polarity voltage opposite with adhering to electric charge 70 in the face of drive electrode 13, carrying out fluid discharges, thereby the electrical field attraction of adhering to electric charge 70 works, and can form distinct fine pattern.

Again, as shown in figure 27, the driving voltage when fluid is discharged depends on the surface potential that adheres to electric charge 70, adheres to the quantity of electric charge and increases by making in advance, can reduce driving voltage.

In sum, in the composition of the electrostatic attraction type fluid delivery device of present embodiment 8, before discharging, fluid awards polarity and the opposite polarity electric charge of driving voltage at the position that should describe to dielectric substrate 16 in advance, thereby can reduce driving voltage, and can carry out the formation of the fine pattern making of distinct fine fluid discharge.

Embodiment 9

Figure 28 illustrates the composition of the electrostatic attraction type fluid delivery device of embodiment 9.Explanation to present embodiment 9 is omitted the part identical with above-mentioned embodiment 8 only illustrates different parts.In the present embodiment 9, the device composition is identical with above-mentioned embodiment 8.But, its difference is: under the situation of the electrostatic attraction type fluid delivery device of embodiment 8, it is the opposite polarity electric charge of driving voltage that polarity and fluid are discharged that electric charge is awarded the electric charge that 60 pairs dielectric substrate 16 award, and under the situation of present embodiment 9, in contrast, it is identical to award the driving voltage polarity that polarity and the fluid of electric charge of dielectric substrate 16 discharge.

The running that embodiment 9 is described is as follows.At first, electric charge is awarded and 60 is carried out XY 2 dimensions according to the design producing data of hope and drive, but at this moment programmes, and makes electric charge award 60 front end scanning departs from a few μ m～10 μ m with respect to the design producing point of hope whole peripheral position.Then, one side makes electric charge award front end and the distance between the dielectric substrate 16 of 60 always to keep smaller or equal to 5 μ m, and simultaneously correct front end service voltage makes the corona discharge generation.The voltage that correct front end applies is different because of point diameter, if but point diameter is smaller or equal to φ 5 μ m, uses more than or equal to 400V just to begin discharge basically.

Then, the electric charge of discharge is awarded a front end of 60 and the electric field force between the dielectric substrate 16 attached on the dielectric substrate 16 because of electric charge, becomes and adheres to electric charge 70.By one side electric charge is awarded and 60 do XY scanning, one side is implemented this discharge process, can on dielectric substrate 16, form at last the pattern that surrounds hope periphery adhere to charge pattern.

Then, one side with fluid discharge 11 near charge patterns make the hope of surrounding pattern part just above, and the distance on a front end and dielectric substrate 16 surfaces kept 30～200 μ m, one side applies the polarity voltage identical with adhering to electric charge 70 on this, carry out the fluid discharge.Thus, before the fluid of discharge is hit, laterally be subjected to adhering to the electric field repulsive force of electric charge 70 on dielectric substrate 16, drop hit toward focusing on the direction of wishing pattern part, thereby can be formed its fine pattern more brightly.

In sum, in the composition of present embodiment 9, in advance to dielectric substrate 16 supply with the driving voltage polarity of polarity and fluid discharge identical adhere to electric charge 70, thereby laterally be subjected to adhering to the repulsive force of electric charge 70, suppress to discharge fluid and hit the periphery of wishing point, form pattern more brightly, and by optimizing the position of hitting that this adheres to electric charge 70, can make the line thickness of wishing pattern and the diameter minimum of point.

Embodiment 10

Figure 29 illustrates the composition of the electrostatic attraction type fluid delivery device of embodiment 10.Explanation to present embodiment 10 is omitted the part identical with above-mentioned embodiment 8 and 9 only illustrates different parts.

In the embodiment 10, with the material of photosensitive material as dielectric substrate 16.And, as described dielectric substrate 16 being awarded the unit of electric charge, award head without embodiment 8 and 9 such needle-like electric charges, and with the corona charging device of the whole surperficial uniform charged that can make dielectric substrate 16 etc. evenly electric charge award system's (not shown).

As to the dielectric substrate 16 of whole surperficial uniform charged by wishing that pattern removes the electrical mechanisms of removing of electricity, is provided with laser aid 62.Constitute laser aid 62 with the polygonal mirror that uses in the electro-photographic technology, f θ lens, cylindrical lens etc.

The running of present embodiment 10 then, is described.At first, award system by even electric charge and on dielectric substrate 16, award electric charge equably.When using corona discharge to award the unit, be subjected to the surface potential of the electric charge of confession on the slit Control of Voltage dielectric substrate 16 of available corona charging device, thereby award the quantity of electric charge of wishing as this electric charge.

Then, by evenly awarding dielectric substrate 16 that the photosensitive material of electric charge forms with 62 pairs of laser aids, remove only at the pattern part irradiating laser 63 of hope.At this moment lasing beam diameter can narrow down to about minimum 5 μ m.Therefore, compare with the pin electrode electric charge mode of awarding, can form precision high remove electrical pattern.

Then, identical with embodiment 9, one side is discharged 11 a close hope of awarding electric charge 70 encirclements with fluid and is removed the electrical pattern part, and make the distance on a front end and dielectric substrate 16 surfaces keep 30～200 μ m, one applies and adheres to the voltage of electric charge 70 same polarities in the face of this pattern part, carry out fluid and discharge, thereby laterally accept the electric field repulsive force from adhering to electric charge 70, can distinct formation fine pattern.

In the composition of embodiment 10, use the dielectric substrate 16 of Organophotoreceptor, and be used in combination uniform charged mechanism and laser removes electrical mechanisms, thus can to this dielectric substrate form precision higher remove electrical pattern, can make the discharge fluid not discharge disturbance, accurately hit and removing on the electrical pattern.

Embodiment 11

Figure 30 illustrates the composition of the electrostatic attraction type fluid delivery device of embodiment 11.Explanation to present embodiment 11 is omitted the part identical with above-mentioned embodiment 8 to 10 only illustrates different parts.

The basic composition of the electrostatic attraction type fluid delivery device of embodiment 11 is identical with the composition of the electrostatic attraction type fluid delivery device of embodiment 9.That is, such as shown in Embodiment 9, carry out electric charge shown in Figure 30 with the corona discharge of pin electrode and the contact electrification of fine pattern electrode etc. and supply with.But, 9 pairs of embodiments wish the drafting department periphery award polarity be added in the identical electric charge of voltage of discharging on the fluid, and present embodiment is awarded electric charge to the non-part of describing of wishing drafting department.

The running of present embodiment 11 then, is described.At first, award a unit (available Figure 26 or electric charge shown in Figure 28 award 60 etc.) by electric charges such as corona chargings and will adhere to electric charge 70 in advance and supply on the dielectric substrate 20, utilize this to adhere to electric charge 70 and form the non-pattern of describing of wishing.Then, discharge the pattern of describing of 11 a formation hope again with fluid, be subjected to the electric field repulsive force selectively, can not on dielectric substrate, hit so discharge fluid but at this moment form the non-electric charge 70 that adheres to of describing pattern.Therefore, can form the non-pattern of describing, and the driving voltage that does not make fluid discharge 11 inside stops in gap that describing pattern.

That is, can form by described and adhere to the non-pattern of describing that electric charge 70 forms discharging the position of describing the temporary transient interruption of pattern forms by continuous fluid.

The non-formation condition of describing pattern considers to adhere to the potential difference of surface potential and fluid discharge 11 driving voltages on the dielectric substrate 16 that electric charge 70 causes, when for example dielectric substrate 16 is polyimides, this potential difference is set for less than 330V, then can be formed the non-district of describing.Can also discharge the current potential extent of 11 driving voltage according to the surface potential on the dielectric substrate 16 and fluid, suppress the non-size of describing to distinguish.

In the composition of present embodiment 11, can be by on dielectric substrate 16, supplying with and the non-electric charge of describing to distinguish corresponding pattern in advance by discharging the identical polarity of voltage with fluid, accurately form the non-district of describing, do not discharge 11 and do not stop fluid, can award driving voltage poor of surface potential with head of electric charge 50 by control again, control the non-size of describing to distinguish.

Embodiment 12

Figure 31 illustrates the composition of the electrostatic attraction type fluid delivery device of embodiment 12.Explanation to present embodiment 12 is omitted the part identical with above-mentioned embodiment 8 to 11 only illustrates different parts.

The electrostatic attraction type fluid delivery device of present embodiment 12, its purpose is: the dielectric substrate 16 of conductive pattern 80 with pattern-making is carried out accurately folded on the lines of conductive pattern 80 applied or lines between the fluid of connection usefulness discharge.

In the described electrostatic attraction type fluid delivery device, carry out lines and fold when connecting between deposited or lines, the end configuration public electrode 81 of the conductive pattern 80 of pattern-making on dielectric substrate 16.This public electrode 81 is that electrostatic attraction type fluid delivery device is purchased, and is placed into when dielectric substrate 16 implemented to describe and contacts with the end of conductive pattern 80.Public electrode 81 connects power supply 82, so that can control voltage.

The running of embodiment 12 then, is described.As shown in figure 31, apply voltage, and then convection cell discharges 11 when applying the opposite voltage of polarity and public electrode 81, carry out the fluid discharge in the modes that the conductive pattern 80 of contact public electrode 81 is concentrated from 82 pairs of public electrodes 81 of power supply.

At this moment, the potential difference that public electrode 81 and fluid are discharged between 11 the drive electrode 13 is big more, it is big more to discharge the degree of concentrating on the conductive pattern 80, on describing conductive pattern 80 folded deposited discharge pattern 83 and conductive pattern 80 be connected pattern 84 time especially effective.

When connecting each conductive pattern 80,, preferably strengthen the area of lines lap, the discharge rate of coupling part is slightly strengthened, but can utilize this discharge rate of Control of Voltage that public electrode 81 is applied in order to reduce the contact resistance value of coupling part as far as possible.

In the composition of present embodiment 12,, can discharge, can improve the precision of describing that is connected between lines folded deposited and lines toward concentrated area on the conductive pattern 80 by in advance the conductive pattern 80 that exists on the dielectric substrate 20 being applied voltage.

Moreover, in the above-mentioned embodiment 8 to 12, discharge voltage on the drive electrode 13 of 11 inside as driving voltage with being added in fluid, be illustrated, but be the signal voltage and the potential difference that is added in the voltage of articles holding table 12 sides that is added on the electrode of 11 inside 13 in fact, so the signal aspect of each electrode can be any as the driving force required voltage.And the symbol of driving voltage is positive and negative all can.

Industrial practicality

Can be for the device of describing the conducting wiring pattern in dielectric substrate and ink-jet printer etc.

Claims (15)

1, a kind of electrostatic attraction type fluid delivery device applies driving voltage from the driving voltage applying unit toward nozzle and between the discharge member, and the fluid in the supply nozzle is supplied with electric charge, makes this fluid be discharged to described discharge member from spray orifice, it is characterized in that,

The aperture of described nozzle is φ 0.01 μ m～φ 25 μ m;

Described driving voltage applying unit output frequency is more than or equal to 1Hz, and the bipolar pulse voltage of positive and negative two polarity upsets is as described driving voltage.

2, a kind of electrostatic attraction type fluid delivery device applies driving voltage from the driving voltage applying unit toward nozzle and between the discharge member, and the fluid in the supply nozzle is supplied with electric charge, makes this fluid be discharged to described discharge member from spray orifice, it is characterized in that,

The aperture of described nozzle is φ 0.01 μ m～φ 25 μ m;

Described driving voltage applying unit is exported the bipolar pulse voltage of positive and negative two polarity upsets as described driving voltage, with respect to the conductivity σ S/m and the DIELECTRIC CONSTANTS of described fluid, output is the voltage of f≤1/ (2 τ) by τ=ε/timeconstant of σ decision and the pass of driving voltage frequency f Hz.

3, a kind of electrostatic attraction type fluid delivery device, apply driving voltage from the driving voltage applying unit toward nozzle and between the discharge member, fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, with mobile unit described nozzle and discharge place member are relatively moved toward the direction of both opposed direction quadratures with this simultaneously, it is characterized in that

The aperture of described nozzle is φ 0.01 μ m～φ 25 μ m;

The frequency that described driving voltage applying unit is exported positive and negative two polarity upsets is that the bipolar pulse voltage of f Hz is as described driving voltage;

Also has control module, this control module is controlled at least one side of described driving voltage output unit and described mobile unit, makes that the driving voltage frequency f Hz of described driving voltage applying unit and the pass of the described relative velocity v μ m/sec that relatively moves are f 〉=5v.

4, a kind of electrostatic attraction type fluid delivery device, apply driving voltage from the driving voltage applying unit toward nozzle and between the discharge member, fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, with mobile unit described nozzle and discharge place member are relatively moved toward the direction of both opposed direction quadratures with this simultaneously, it is characterized in that

The aperture of described nozzle is φ 0.01 μ m～φ 25 μ m;

The output of described driving voltage applying unit smaller or equal to the bipolar pulse voltage of positive and negative two polarity upsets of 400V as described driving voltage.

5, a kind of electrostatic suction-type fluid discharging method applies driving voltage from the driving voltage applying unit toward nozzle and between the discharge member, and the fluid in the supply nozzle is supplied with electric charge, makes this fluid be discharged to described discharge member from spray orifice, it is characterized in that,

The aperture of described nozzle is φ 0.01 μ m～φ 25 μ m;

Described driving voltage be frequency more than or equal to 1Hz, and the bipolar pulse voltage of positive and negative two polarity upsets.

6, a kind of electrostatic suction-type fluid discharging method applies driving voltage from the driving voltage applying unit toward nozzle and between the discharge member, and the fluid in the supply nozzle is supplied with electric charge, makes this fluid be discharged to described discharge member from spray orifice, it is characterized in that,

The aperture of described nozzle is φ 0.01 μ m～φ 25 μ m;

Described driving voltage is the bipolar pulse voltage of positive and negative two polarity upsets, with respect to the conductivity σ S/m and the DIELECTRIC CONSTANTS of described fluid, output is the voltage of f≤1/ (2 τ) by τ=ε/timeconstant of σ decision and the pass of driving voltage frequency f Hz.

7, a kind of electrostatic suction-type fluid discharging method, apply driving voltage from the driving voltage applying unit toward nozzle and between the discharge member, fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, with mobile unit described nozzle and discharge place member are relatively moved toward the direction of both opposed direction quadratures with this simultaneously, it is characterized in that

The aperture of described nozzle is φ 0.01 μ m～φ 25 μ m;

Described driving voltage applying unit output frequency is f Hz, and the bipolar pulse voltage of positive and negative two polarity upsets is as described driving voltage;

At least one side of control driving voltage frequency and relative moving speed makes that the pass of described driving voltage frequency f Hz and the described relative velocity v μ m/sec that relatively moves is f 〉=5v.

8, a kind of electrostatic suction-type fluid discharging method, apply driving voltage from the driving voltage applying unit toward nozzle and between the discharge member, fluid in the supply nozzle is supplied with electric charge, make this fluid be discharged to described discharge member from spray orifice, with mobile unit described nozzle and discharge place member are relatively moved toward the direction of both opposed direction quadratures with this simultaneously, it is characterized in that

The aperture of described nozzle is φ 0.01 μ m～φ 25 μ m;

Described driving voltage is the bipolar pulse voltage smaller or equal to positive and negative two polarity upsets of 400V.

9, a kind of electrostatic attraction type fluid delivery device utilizes electrostatic attraction to make because of applying the charged discharge fluid of voltage and hits substrate from the fluid ejection of the nozzle of fluid discharge head, thereby forms the pattern of describing of discharging fluid at this substrate surface, it is characterized in that,

The fluid ejection of described nozzle, its injection diameter are 0.01～25 μ m, and described substrate is a dielectric substrate simultaneously, and has

Before this dielectric substrate is discharged fluid, remove this insulated substrate surface electric charge remove electric unit; And

With the positive negative bipolar pulse voltage, the dielectric substrate of removing electricity is carried out the fluid deliverying unit that fluid is discharged.

10, the electrostatic attraction type fluid delivery device described in claim 9 is characterized in that,

The described electric unit pattern in accordance with regulations that removes carries out removing of dielectric substrate.

11, the electrostatic attraction type fluid delivery device described in claim 9 is characterized in that,

The electric-field intensity that when described fluid deliverying unit is discharged with fluid the charge concentration of meniscus portion is produced starts the voltage that applies of electric-field intensity less than the discharge of obtaining by Paschen opisometer formula, carries out fluid and discharges, and Paschen opisometer formula is:

E＝4.03×10 ⁶{1+3.08×10 ^-2/D ^0.54+4.48×10 ^-7/D ^1.41}

E: discharge starts electric-field intensity (V/m)

D: nozzle diameter (m).

12, the electrostatic attraction type fluid delivery device described in claim 11 is characterized in that,

Described fluid deliverying unit uses the voltage that applies smaller or equal to 340V to carry out the fluid discharge.

13, the electrostatic attraction type fluid delivery device described in claim 11 is characterized in that,

The fluid ejection of described nozzle, its injection diameter are 16 μ m～25 μ m or 0.01 μ m～0.25 μ m;

Described fluid deliverying unit uses the voltage that applies smaller or equal to 500V to carry out the fluid discharge.

14, the electrostatic attraction type fluid delivery device described in claim 11 is characterized in that,

The fluid ejection of described nozzle, its injection diameter are 7.4 μ m～25 μ m or 0.01 μ m～0.65 μ m;

Described fluid deliverying unit uses the voltage that applies smaller or equal to 400V to carry out the fluid discharge.

15, a kind of electrostatic suction-type fluid discharging method utilizes electrostatic attraction to make because of applying the charged discharge fluid of voltage and hits substrate from the fluid ejection of the nozzle of fluid discharge head, thereby forms the pattern of describing of discharging fluid at this substrate surface, it is characterized in that,

The fluid ejection of described nozzle, its injection diameter are 0.01～25 μ m, and described substrate is a dielectric substrate simultaneously, and

Before this dielectric substrate is discharged fluid, remove the electric charge of this insulated substrate surface,

With the positive negative bipolar pulse voltage, the dielectric substrate of removing electricity is carried out fluid discharge.

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