CN100452367C - Semiconductor device packaged into chip size and manufacturing method thereof - Google Patents
Semiconductor device packaged into chip size and manufacturing method thereof Download PDFInfo
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- CN100452367C CN100452367C CNB2005101199598A CN200510119959A CN100452367C CN 100452367 C CN100452367 C CN 100452367C CN B2005101199598 A CNB2005101199598 A CN B2005101199598A CN 200510119959 A CN200510119959 A CN 200510119959A CN 100452367 C CN100452367 C CN 100452367C
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01011—Sodium [Na]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0102—Calcium [Ca]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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Abstract
A semiconductor device includes a semiconductor substrate having an integrated circuit and at least one connection pad, and at least one external connection electrode electrically connected with the connection pad. A first sealing material is provided on the semiconductor substrate around the external connection electrode, each impurity concentration of an Na ion, a K ion, a Ca ion and Cl ion contained in the first sealing material being not greater than 10 ppm. A second sealing material is provided on at least one of a lower surface and a peripheral side surface of the semiconductor substrate, a total impurity concentration of an Na ion, a K ion, a Ca ion and a Cl ion contained in the second sealing material being not smaller than 100 ppm.
Description
Technical field
The present invention relates to a kind of semiconductor device and manufacture method thereof with chip size (chip size) of diaphragm seal.
Background of invention
In the semiconductor device of existing chip size; in order to increase to dust; moisture; the protection effect of the environment of mechanical damage etc.; for example in the open communique 2001-332643 communique of Japan's special permission, disclose; cover the lower surface of semiconductor substrate with first diaphragm seal; this semiconductor substrate has integrated circuit and a plurality of connection pads that are connected with this integrated circuit in the above; cover the upper surface and the peripheral side thereof of semiconductor substrate with second diaphragm seal; the wiring that setting links to each other with connection pads on second diaphragm seal; on the connection pads part of wiring, columnar electrode is set, around the 3rd diaphragm seal covering columnar electrode.In this case, first to the 3rd diaphragm seal is that resin and polyimides are that the organic material of resin etc. forms by epoxy.
Therefore, in the semiconductor device of above-mentioned prior art, owing on second diaphragm seal of upper surface that covers semiconductor substrate and peripheral side thereof, wiring is set, and cover with the 3rd diaphragm seal columnar electrode on the connection pads part be arranged on wiring around, therefore cause wiring to contact, and columnar electrode contact with the 3rd diaphragm seal with second, third diaphragm seal.On the other hand, because as the epoxy of the material of second, third diaphragm seal is that resin and polyimides are the impurity that organic material such as resin contains Na ion, K ion, Ca ion and Cl ion, in case impurity concentration raises, then become and cause wiring and the corrosion of columnar electrode or the reason of short circuit therebetween.In order to prevent this unfavorable condition, need make epoxy as the material of second, third diaphragm seal is that resin and polyimides are that each impurity concentration of Na ion, K ion, Ca ion and Cl ion in the organic material such as resin is low below 10ppm, and the encapsulant expense improves.
Summary of the invention
Thus, the objective of the invention is to, a kind of semiconductor device and manufacture method thereof that can reduce the encapsulant expense is provided.
The invention is characterized in: each impurity concentration that covers by Na ion, K ion, Ca ion and Cl ion on the upper surface of the semiconductor substrate around the columnar electrode is first diaphragm seal that first encapsulant below the 10ppm constitutes, and the total impurity concentration that covers by Na ion, K ion, Ca ion and Cl ion on the peripheral side of the semiconductor substrate and first diaphragm seal is second diaphragm seal that second encapsulant more than the 100ppm constitutes.
According to the present invention, because on the semiconductor substrate around the columnar electrode, covering is by the Na ion, the K ion, the Ca ion, the various impurity concentrations of Cl ion are first diaphragm seal that the following first somewhat expensive encapsulant of 10ppm constitutes, on the peripheral side of the semiconductor substrate and first diaphragm seal, cover by the Na ion, the K ion, the total impurity concentration of Ca ion and Cl ion is second diaphragm seal that above comparatively cheap second encapsulant of 100ppm constitutes, therefore compare with the situation of using the first somewhat expensive encapsulant, partly use comparatively cheap second encapsulant, can reduce the expense of encapsulant.
The semiconductor device of one of technical solution of the present invention is characterised in that, comprise: semiconductor substrate (1), it has the upper surface that is formed with integrated circuit and connection pads (2), and opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface; External connection electrode (9), it is electrically connected with described connection pads (2); First diaphragm seal (10), its be arranged on described external connection electrode (9) around the upper surface of described semiconductor substrate (1) on; Each impurity concentration of the Na ion that contains in described first diaphragm seal (10), K ion, Ca ion and Cl ion is below 10ppm; With second diaphragm seal (12), it is arranged at least on any of the described lower surface of described semiconductor substrate (1) and described peripheral side; The total impurity concentration of the Na ion that contains in described second diaphragm seal (12), K ion, Ca ion and Cl ion is more than 100ppm.
Two semiconductor device of technical solution of the present invention is characterised in that, comprise: the semiconductor substrate of wafer state (1), it has the upper surface that is formed with integrated circuit and a plurality of connection pads (2), and opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface; Diaphragm (5), it has a plurality of opening portions (4) that expose described a plurality of connection pads (2), and is arranged on the described semiconductor substrate (1); A plurality of wirings (8), its with described a plurality of connection pads (2) in one be connected, each has the connection pads part that is formed on the described diaphragm (5); A plurality of external connection electrode (9), it is separately positioned on the described connection pads part of each described wiring (8); First diaphragm seal (10), its be arranged on described each external connection electrode (9) around the described upper surface of described semiconductor substrate (1) on; Each impurity concentration of the Na ion that contains in described first diaphragm seal (10), K ion, Ca ion and Cl ion is below 10ppm; With second diaphragm seal (12), it is arranged on the described lower surface and described peripheral side thereof of described semiconductor substrate (1) at least; The total impurity concentration of the Na ion that contains in described second diaphragm seal (12), K ion, Ca ion and Cl ion is more than 100ppm.
The manufacture method of semiconductor device of the present invention is characterised in that, comprises the steps: that preparation has the upper surface that is formed with a plurality of connection pads (2) and a plurality of integrated circuits, and the semiconductor substrate (1) of the wafer state of opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface; Go up a plurality of wirings (8) that formation has the connection pads part that is electrically connected with above-mentioned connection pads (2) at the semiconductor substrate (1) of described wafer state, and then partly form external connection electrode (9) in above-mentioned each connection pads; On the described upper surface of the described semiconductor substrate (1) around each described external connection electrode (9), first diaphragm seal (10) that formation is made of first encapsulant, each impurity concentration of the Na ion of described first encapsulant, K ion, Ca ion and Cl ion is below 10ppm; Attaching scribing film (27) on the upper surface of above-mentioned the 1st diaphragm seal (10) that is formed at the semiconductor substrate of described wafer state (1) and on the upper surface of said external connection usefulness electrode (9); Connect the semiconductor substrate (1) and described first diaphragm seal (10) of described wafer state, be formed for being separated into a plurality of grooves (28) with Rack of a plurality of semiconductor substrates (1) till the centre of above-mentioned scribing film (27); In described a plurality of grooves (28) and the described lower surface of described semiconductor substrate (1), second diaphragm seal (12) that formation is formed by second encapsulant, the total impurities concentration of the Na ion of described second encapsulant, K ion, Ca ion and Cl ion is more than 100ppm; Described second diaphragm seal (12) that in each described groove (28), forms in the medial cuts of each groove (28) of described Rack; In described a plurality of grooves (28) and the lower surface of the semiconductor substrate (1) of described wafer state forms the 2nd diaphragm seal (12) back or behind described second diaphragm seal (12) that the medial cuts of each groove (28) of described Rack forms, peel off the above-mentioned scribing film (27) on the upper surface of the upper surface of described the 1st diaphragm seal (10) that is attached to the semiconductor substrate (1) that is formed at described wafer state and described external connection electrode (9) in each described groove (28); Be separated into a plurality of semiconductor substrates (1).
The manufacture method of second half conductor means of the present invention is characterised in that to have following step: preparation has the upper surface that is formed with a plurality of connection pads (2) and a plurality of integrated circuits, and the semiconductor substrate (1) of the wafer state of opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface; Go up a plurality of wirings (8) that formation has the connection pads part that is electrically connected with above-mentioned connection pads (2) at the semiconductor substrate (1) of described wafer state, and then partly form external connection electrode (9) in above-mentioned each connection pads; On the upper surface of semiconductor substrate (1) of the described wafer state around described each external connection electrode (9), first diaphragm seal (10) that formation is made of first encapsulant, each impurity concentration of the Na ion of described first encapsulant, K ion, Ca ion and Cl ion is below 10ppm; The described lower surface of the semiconductor substrate (1) of described wafer state is attached on the first scribing film (41); The semiconductor substrate (1) that connects described first diaphragm seal (10) and described wafer state also cuts up to the centre position of the thickness direction of the described first scribing film (41), forms a plurality of grooves (42) thus; Upper surface at described first diaphragm seal (10) attaches the second scribing film (43), peels off the described first scribing film (41) from the described lower surface of the semiconductor substrate (1) of described wafer state; In described a plurality of grooves (42) and the described lower surface of the semiconductor substrate (1) of described wafer state, second diaphragm seal (12) that formation is formed by second encapsulant, the total impurity concentration of the Na ion of the described second diaphragm seal material, K ion, Ca ion and Cl ion is more than 100ppm; Described second diaphragm seal (12) that forms in described each groove (42) with medial cuts at each groove (42) of described Rack is separated into a plurality of semiconductor substrates (1) with the semiconductor substrate (1) of described wafer state.
Description of drawings
Fig. 1 is the profile as the semiconductor device of one embodiment of the present invention.
Fig. 2 is in first example of the manufacture method of semiconductor device shown in Figure 1, at first the profile of Zhi Bei part.
Fig. 3 is a profile of following the operation of Fig. 2.
Fig. 4 is a profile of following the operation of Fig. 3.
Fig. 5 is a profile of following the operation of Fig. 4.
Fig. 6 is a profile of following the operation of Fig. 5.
Fig. 7 is a profile of following the operation of Fig. 6.
Fig. 8 is a profile of following the operation of Fig. 7.
Fig. 9 is a profile of following the operation of Fig. 8.
Figure 10 is a profile of following the operation of Fig. 9.
Figure 11 is a profile of following the operation of Figure 10.
Figure 12 is a profile of following the operation of Figure 11.
Figure 13 is a profile of following the operation of Figure 12.
Figure 14 is a profile of following the operation of Figure 13
Figure 15 is in second example of the manufacture method of semiconductor device shown in Figure 1, the profile of regulation operation.
Figure 16 is a profile of following the operation of Figure 15.
Figure 17 is a profile of following the operation of Figure 16.
Figure 18 is a profile of following the operation of Figure 17.
Figure 19 is a profile of following the operation of Figure 18.
Figure 20 is in the 3rd example of the manufacture method of semiconductor device shown in Figure 1, the profile of regulation operation.
Figure 21 is a profile of following the operation of Figure 20.
Figure 22 is a profile of following the operation of Figure 21.
Figure 23 is a profile of following the operation of Figure 22.
Figure 24 is a profile of following the operation of Figure 23.
Figure 25 is a profile of following the operation of Figure 24.
Figure 26 is a profile of following the operation of Figure 25.
Among the figure: the 1-silicon substrate; The 2-connection pads; The 3-dielectric film; The 5-diaphragm; The 7-substrate metal layer; The 8-wiring; The 9-columnar electrode; 10-first diaphragm seal; The 11-solder ball; 12-second diaphragm seal; 21,22-draws; 27,29-scribing film.
Embodiment
Fig. 1 represents the profile as the semiconductor device of one embodiment of the present invention.This semiconductor device is commonly referred to as CSP (chip size package, chip size packages), and it comprises silicon substrate (semiconductor substrate) 1.At the upper surface of silicon substrate 1 the integrated circuit (not shown) of predetermined function is set, a plurality of connection pads 2 that are made of aluminum-based metal etc. that are connected with integrated circuit are set on the peripheral part in the above.
On the upper surface of the silicon substrate except the middle body of connection pads 21, the dielectric film 3 that is made of silica and silicon nitride etc. is set, the middle body of connection pads 2 exposes by the opening portion 4 that is arranged on the dielectric film 3.Setting is that resin and polyimides are the diaphragm (dielectric film) 5 that resin etc. constitutes by epoxy on dielectric film 3.In this case, with the opening portion 4 corresponding parts of dielectric film 3 on diaphragm 5 on opening portion 6 is set.
The substrate metal layer 7 that setting is made of copper etc. on diaphragm 5.The wiring 8 that is made of copper is set on substrate metal layer 7 whole.The opening portion 4,6 of an end by dielectric film 3 and diaphragm 5 that contains the wiring 8 of substrate metal layer 7 is connected with connection pads 2.On the connection pads part of wiring 8, the columnar electrode (external connection electrode) 9 that is made of the copper that highly is 80～150 μ m is set.
Material to first, second diaphragm seal 10,12 describes below.The material of first, second diaphragm seal 10,12 is that epoxy is that resin, polyimides are that resin, acrylic resin, silicon are that resin, rubber (gom) are that resin, viscose maleimide are any of organic materials such as resin, but because the characteristic that first, second diaphragm seal 10,12 requires respectively is slightly different, therefore suitable material is used in expectation.
That is,, require can not produce the corrosion or the short circuit betwixt of wiring 8 and columnar electrode 9 though first diaphragm seal 10 is the films that are used to increase to the protection effect of the environment of dust, moisture, mechanical damage etc.Thus, as first encapsulant that forms first diaphragm seal 10, adopt the lower more expensive material of each impurity concentration below 10ppm of Na ion, K ion, Ca ion and Cl ion.In addition; in the manufacturing of semiconductor device, with semiconductor layer and each impurity concentration that comprises dielectric film 3 that the conductive layer of connection pads 2 forms and the Na ion in the diaphragm 5, K ion, Ca ion and Cl ion in clean room (clean room) below 10ppm.
On the other hand, though second diaphragm seal 12 is the films that are used to increase especially for the protection effect of mechanical damage, therefore not too need to make the wiring 8 that contains substrate metal layer 7 and the corrosion of columnar electrode 9 or short circuit therebetween not to produce.Thus, as second encapsulant that is used to form second diaphragm seal 12, the higher material of the total impurity concentration of Na ion, K ion, Ca ion and Cl ion is also passable, and can adopt and amount to impurity concentration is the higher comparatively cheap material of the above degree of 100ppm.
In addition; in order to relax first, second diaphragm seal 10,12 and stress of causing different with the thermal coefficient of expansion between the silicon substrate 1; usually can in first, second encapsulant, sneak into silica filler etc.; in this case; because desired characteristic is slightly different respectively for first, second encapsulant 10,12, therefore expects that mixed volume is suitable.
That is to say,, therefore need high reliability, preferably with the less side of difference of the thermal coefficient of expansion of silicon substrate 1 because first diaphragm seal 10 covers the silicon substrate 1 that contains wiring 8 and columnar electrode 9.Thus, as first encapsulant that is used to form first diaphragm seal 10, adopt the mixed volume of silica filler etc. many, the thermal coefficient of expansion (3.5ppm/ ℃) of thermal coefficient of expansion and silicon substrate 1 is close, thermal coefficient of expansion is the material below 20ppm/ ℃.
On the other hand; because second diaphragm seal 12 is the films that cover the lower surface of the peripheral side of silicon substrate 1, dielectric film 3, diaphragm 5 and first diaphragm seal 10 and silicon substrate 1; therefore do not need first diaphragm seal, 10 such high reliabilities; for fear of owing to sneak into silica filler etc. and make it become too hard and break easily, the material that preferred use ratio first diaphragm seal 10 is softer.For this reason, as second encapsulant that forms second diaphragm seal 12, the mixed volume of employing silica filler etc. is less, thermal coefficient of expansion is the material more than 20ppm/ ℃.
As above result, first diaphragm seal 10 by ionic impurity concentration be below the 10ppm, thermal coefficient of expansion is that the first somewhat expensive encapsulant below 20ppm/ ℃ forms.Second diaphragm seal 12 by ionic impurity concentration be more than the 100ppm, thermal coefficient of expansion is that comparatively cheap second encapsulant more than 20ppm/ ℃ forms.Thereby, compare with the situation of using the first somewhat expensive encapsulant, partly use comparatively cheap second encapsulant, just can reduce the expense of encapsulant.
(first example of manufacture method)
First example to the manufacture method of as shown in Figure 1 semiconductor device describes below.At first; as shown in Figure 2; the dielectric film 3 that the connection pads 2 that is made of aluminum-based metal etc. is set on the silicon substrate 1 of wafer state, constitutes by silica and silicon nitride etc. and be that resin and polyimides are the diaphragm 5 that resin constitutes, and the part exposed by the opening portion 4,6 that is formed on dielectric film 3 and the diaphragm 5 of the middle body of preparation connection pads 2 by epoxy.
In the above-mentioned explanation, on the silicon substrate 1 of wafer state, forming the integrated circuit that forms predetermined function on the zone of each semiconductor device, connection pads 2 respectively be formed on the corresponding region in integrated circuit be electrically connected.In addition, as shown in Figure 2, the zone shown in the symbol 21 is and corresponding zone, first stroke of road (dicingstreet) that the zone shown in the symbol 22 is and corresponding zone, second stroke of road.In this case, second stroke of road 22 is the corresponding zones of middle body on the Width with first stroke of road 21.
Then, as shown in Figure 3, on the entire upper surface of the diaphragm 5 of the upper surface of the connection pads 2 that the opening portion 4,6 that comprises by dielectric film 3 and diaphragm 5 exposes, form substrate metal layer 7.In this case, the copper layer that substrate metal layer 7 also can be just forms by plated by electroless plating, the perhaps copper layer that also can just form by sputter also forms the layer of copper layer by sputter on the thin layer of the titanium that forms by sputter etc.
Then, pattern (pattern) forms and electroplates etchant resist 23 on the upper surface of substrate metal layer 7.In this case, form opening portion 24 forming in the plating etchant resists 23 in the regional corresponding part with wiring 8.Afterwards, by the plating that substrate metal layer 7 is carried out as the copper of electroplating current path, form wiring 8 on the upper surface of the substrate metal layer 7 in the opening portion 24 of electroplating etchant resist 23.Then, peel off plating etchant resist 23.
Then, as shown in Figure 4, pattern forms and electroplates etchant resist 25 on the upper surface of the substrate metal layer 7 that comprises wiring 8.In this case, form opening portion 26 forming in the plating etchant resist 25 on the regional corresponding part with columnar electrode 9.Then, by the metallide that substrate metal layer 7 is carried out as the copper of electroplating current path, form columnar electrode 9 above the connection pads of the wiring 8 in the opening portion 26 of electroplating etchant resist 25 part.Afterwards, peel off and electroplate etchant resist 25, then,, then as shown in Figure 5, only stay the substrate metal layers 7 below the wiring 8 if with the 8 unwanted parts of removing substrate metal layer 7 as mask etching that connect up.
Next; as shown in Figure 6; by silk screen print method, spin-coating method, mouthful pattern coating (die coat) method etc.; comprise columnar electrode 9 and the entire upper surface of 8 the diaphragm 5 of connecting up on form first diaphragm seal 10 that constitutes by first encapsulant, the thickness of this first diaphragm seal 10 is thicker than the height of columnar electrode 9.Therefore, under this state, cover the upper surface of columnar electrode 9 by first diaphragm seal 10.
Then, suitably grind the upper surface side of first diaphragm seal 10 and columnar electrode 9, as shown in Figure 7, expose the upper surface of columnar electrode 9, and, the upper surface of first diaphragm seal 10 of the upper surface that comprises this columnar electrode that exposes 9 is carried out planarization.Here, the reason that the upper surface side of columnar electrode 9 is suitably ground is, because there is deviation in the height of the columnar electrode 9 that forms by metallide, eliminated this deviation thus, makes the height of columnar electrode 9 even.
Then, with structure turned upside down shown in Figure 7, as shown in Figure 8, will comprise columnar electrode 9 the first following diaphragm seal 10 below be attached to the upper surface of the first scribing film 27.Then, as shown in Figure 9,, utilize method of scribing and cutting and laser cutting method etc., fully cutting (fullcut) silicon substrate 1, dielectric film 3, diaphragm 5 and first diaphragm seal 10 along first stroke of road 21.In this case, cut to the centre of the thickness direction of the first scribing film 27.So, the silicon substrate 1 of wafer state is separated into each chip, because each chip is attached on the first scribing film 27, therefore between each chip on comprise the first scribing film 27, promptly with 21 corresponding zones, first stroke of road in form groove 28.
Then, as shown in figure 10, use silk screen print method, spin-coating method, sticking Tu Fa etc., form second diaphragm seal 12 that constitutes by second encapsulant on the entire upper surface of the silicon substrate 1 in comprising groove 28, and make its upper surface planarization.Under this state, be used in the peripheral side that second diaphragm seal 12 that forms in the groove 28 covers silicon substrate 1, dielectric film 3, diaphragm 5 and first diaphragm seal 10.In addition, because silicon substrate 1 is separated into each chip, so silicon substrate 1 may stick up.Also have, the first scribing film 27 extends expansion on its peripheral direction, and the width of groove 28 is enlarged, if applying second encapsulant under this state in groove 28, then fills second encapsulant easily in groove 28.
Then, with structure turned upside down shown in Figure 10, then, peel off the first scribing film 27 after, as shown in figure 11.Under this state, because formation second diaphragm seal 12 between each chip and below each silicon substrate 1, so each chip can be integrated.In addition, shown in symbol 12a, second diaphragm seal 12 that forms in the groove 28 that forms on the first scribing film 27 shown in Figure 10 is outstanding from the upper surface of first diaphragm seal 10.Then, after this protuberance 12a was removed in grinding, as shown in figure 12, the surface of the surface of second diaphragm seal 12 and first diaphragm seal 10 was in same plane.
Then, as shown in figure 13, in the upper surface formation solder ball 11 of columnar electrode 9.Then, the lower surface of second diaphragm seal 12 is attached to the upper surface of the second scribing film 29.Subsequently, as shown in figure 14,, utilize method of scribing and cutting and laser cutting method etc., cut the middle body of the Width of second diaphragm seal 12 that in groove 28, forms fully along second stroke of road 22.Then, peel off the silicon substrate 1 that comprises first, second diaphragm seal 10,12 etc. from the second scribing film 29 after, obtain a plurality of semiconductor devices as shown in Figure 1.
(second example of manufacture method)
Next, second example to the manufacture method of the semiconductor device shown in Fig. 1 describes.In this case, after operation as shown in figure 10, as shown in figure 15,, utilize method of scribing and cutting and laser cutting method etc., cut the middle body of the Width of second diaphragm seal 12 that in groove 28, forms fully, form groove 31 along second stroke of road 22.Under this state, the silicon substrate 1 that will comprise second diaphragm seal, 12 grades by groove 31 is separated into each chip, owing to be attached on the first scribing film 27, so each chip can not scatter.
Next, as shown in figure 16, attaching support membrane 32 on second diaphragm seal 12.Then, with structure turned upside down shown in Figure 16, then, peel off the first scribing film 27 after, as shown in figure 17.Under this state, shown in symbol 12b, second diaphragm seal 12 that forms in the groove 28 that forms on the first scribing film 27 shown in Figure 15 is outstanding from the upper surface of first diaphragm seal 10.Then, after this protuberance 12b is removed in grinding, as shown in figure 18.
Subsequently, as shown in figure 19, in the upper surface formation solder ball 11 of columnar electrode 9.Under this state, the silicon substrate 1 that will comprise first, second diaphragm seal 10,12 etc. is attached on the support membrane 32, is separated into each chip by groove 31.And, then peel off the silicon substrate 1 that comprises first, second diaphragm seal 10,12 etc. from support membrane 32 after, obtain a plurality of semiconductor devices as shown in Figure 1.
(the 3rd example of manufacture method)
Then, the 3rd example to the manufacture method of as shown in Figure 1 semiconductor device describes.In this case, after operation as shown in Figure 7, as shown in figure 20, with the lower surface of silicon substrate 1 be attached to the first scribing film 41 above.Then, as shown in figure 21,, utilize method of scribing and cutting and laser cutting method etc., cut first diaphragm seal 10, diaphragm 5, dielectric film 3 and silicon substrate 1 fully along first stroke of road 21.In this case, cut to the centre position of the thickness direction of scribing film 41.So, though the silicon substrate 1 of wafer state is separated into each chip, but pay on the first scribing film 41 because each chip pastes, therefore between each chip on comprise the first scribing film 41, promptly with in the 21 corresponding zones, first stroke of road form groove 42.
Then, as shown in figure 22, attach the second scribing film 43 on the upper surface of first diaphragm seal 10 on comprise columnar electrode 9.Then, with structure turned upside down shown in Figure 22, then, peel off the first scribing film 41 after, as shown in figure 23.Then, as shown in figure 24, utilize silk screen print method, spin-coating method, mouthful pattern rubbing method etc., form second diaphragm seal 12 that constitutes by second encapsulant on the entire upper surface of the silicon substrate 1 in comprising groove 42, and make its upper surface planarization.
Under this state, be used in the peripheral side that second diaphragm seal 12 that forms in the groove 42 covers silicon substrate 1, dielectric film 3, diaphragm 5 and first diaphragm seal 10.In addition, because silicon substrate 1 is separated into each chip, so silicon substrate 1 is difficult to warpage.In addition, the second scribing film 43 extends expansion in its peripheral direction, and the width of groove 42 is enlarged, and after applying second encapsulant under this state in groove 42, can easily fill second encapsulant in groove 42.
Next, as shown in figure 25,, utilize method of scribing and cutting and laser cutting method etc., cut the middle body of the Width of second diaphragm seal 12 that in groove 42, forms fully along second stroke of road 22.Then, with structure turned upside down shown in Figure 25, afterwards, as shown in figure 26, the lower surface of second diaphragm seal 12 is attached on the upper surface of support membrane 44.Then, peel off scribing film 43 after, identical with situation shown in Figure 180.Because following operation is identical with the situation of second example of above-mentioned manufacture method, therefore omit its explanation.Thus, under the situation of this manufacture method, for example,, therefore do not need to be used to remove the grinding step of this protuberance 12b owing to the protuberance 12b that can not form as shown in figure 17.
Claims (18)
1, a kind of semiconductor device is characterized in that, comprising:
Semiconductor substrate (1), it has the upper surface that is formed with integrated circuit and connection pads (2), and opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface;
External connection electrode (9), it is electrically connected with described connection pads (2);
First diaphragm seal (10), its be arranged on described external connection electrode (9) around the upper surface of described semiconductor substrate (1) on; Each impurity concentration of the Na ion that contains in described first diaphragm seal (10), K ion, Ca ion and Cl ion is below 10ppm; With
Second diaphragm seal (12), it is arranged at least on any of the described lower surface of described semiconductor substrate (1) and described peripheral side; The total impurity concentration of the Na ion that contains in described second diaphragm seal (12), K ion, Ca ion and Cl ion is more than 100ppm.
2, semiconductor device according to claim 1 is characterized in that,
The thermal coefficient of expansion of described first diaphragm seal (10) is below 20ppm/ ℃, and the thermal coefficient of expansion of described second diaphragm seal (12) is more than 20ppm/ ℃.
3, semiconductor device according to claim 1 is characterized in that,
Described second diaphragm seal (12) is arranged on the described lower surface and this two sides of described peripheral side of described semiconductor substrate (1).
4, semiconductor device according to claim 1 is characterized in that,
Described second diaphragm seal (12) also is arranged on the peripheral side of described first diaphragm seal (10).
5, semiconductor device according to claim 1 is characterized in that,
Described external connection electrode (9) is a columnar electrode.
6, semiconductor device according to claim 5 is characterized in that,
As the columnar electrode of described external connection electrode (9), has the height of 80～150 μ m.
7, semiconductor device according to claim 1 is characterized in that,
On described external connection electrode (9), solder ball is set.
8, semiconductor device according to claim 1 is characterized in that,
Also has the wiring (8) that is electrically connected with described connection pads (2) and described external connection electrode (9).
9, semiconductor device according to claim 1 is characterized in that,
Has the diaphragm (5) between described connection pads (2) and described wiring (8).
10, a kind of semiconductor device is characterized in that,
Comprise:
The semiconductor substrate of wafer state (1), it has the upper surface that is formed with integrated circuit and a plurality of connection pads (2), and opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface;
Diaphragm (5), it has a plurality of opening portions (4) that expose described a plurality of connection pads (2), and is arranged on the described semiconductor substrate (1);
A plurality of wirings (8), its with described a plurality of connection pads (2) in one be connected, each has the connection pads part that is formed on the described diaphragm (5);
A plurality of external connection electrode (9), it is separately positioned on the described connection pads part of each described wiring (8);
First diaphragm seal (10), its be arranged on described each external connection electrode (9) around the described upper surface of described semiconductor substrate (1) on; Each impurity concentration of the Na ion that contains in described first diaphragm seal (10), K ion, Ca ion and Cl ion is below 10ppm; With
Second diaphragm seal (12), it is arranged on the described lower surface and described peripheral side thereof of described semiconductor substrate (1) at least; The total impurity concentration of the Na ion that contains in described second diaphragm seal (12), K ion, Ca ion and Cl ion is more than 100ppm.
11, semiconductor device according to claim 10 is characterized in that,
Described second diaphragm seal (12) is arranged on the described lower surface and this two sides of described peripheral side of described semiconductor substrate (1).
12, semiconductor device according to claim 10 is characterized in that,
Described second diaphragm seal (12) also is arranged on the peripheral side of described first diaphragm seal (10).
13, a kind of manufacture method of semiconductor device is characterized in that,
Comprise the steps:
Preparation has the upper surface that is formed with a plurality of connection pads (2) and a plurality of integrated circuits, and the semiconductor substrate (1) of the wafer state of opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface;
Go up a plurality of wirings (8) that formation has the connection pads part that is electrically connected with above-mentioned connection pads (2) at the semiconductor substrate (1) of described wafer state, and then partly form external connection electrode (9) in above-mentioned each connection pads;
On the described upper surface of the described semiconductor substrate (1) around each described external connection electrode (9), first diaphragm seal (10) that formation is made of first encapsulant, each impurity concentration of the Na ion of described first encapsulant, K ion, Ca ion and Cl ion is below 10ppm;
Attaching scribing film (27) on the upper surface of above-mentioned the 1st diaphragm seal (10) that is formed at the semiconductor substrate of described wafer state (1) and on the upper surface of said external connection usefulness electrode (9);
Connect the semiconductor substrate (1) and described first diaphragm seal (10) of described wafer state, be formed for being separated into a plurality of grooves (28) with Rack of a plurality of semiconductor substrates (1) till the centre of above-mentioned scribing film (27);
In described a plurality of grooves (28) and the described lower surface of described semiconductor substrate (1), second diaphragm seal (12) that formation is formed by second encapsulant, the total impurities concentration of the Na ion of described second encapsulant, K ion, Ca ion and Cl ion is more than 100ppm;
Described second diaphragm seal (12) that in each described groove (28), forms in the medial cuts of each groove (28) of described Rack;
In described a plurality of grooves (28) and the lower surface of the semiconductor substrate (1) of described wafer state forms the 2nd diaphragm seal (12) back or behind described second diaphragm seal (12) that the medial cuts of each groove (28) of described Rack forms, peel off the above-mentioned scribing film (27) on the upper surface of the upper surface of described the 1st diaphragm seal (10) that is attached to the semiconductor substrate (1) that is formed at described wafer state and described external connection electrode (9) in each described groove (28);
Be separated into a plurality of semiconductor substrates (1).
14, the manufacture method of semiconductor device according to claim 13 is characterized in that,
In described a plurality of grooves (28) and the described lower surface of the semiconductor substrate (1) of described wafer state, utilize any method in silk screen print method, spin-coating method, mouthful pattern rubbing method to form described second diaphragm seal (12).
15, the manufacture method of semiconductor device according to claim 13 is characterized in that,
Formation has the step of a plurality of grooves (28) of described Rack, make a plurality of grooves (28) arrive the centre position of the thickness direction of the lip-deep described scribing film (27) that is attached to described first diaphragm seal (10) with described Rack, in described a plurality of grooves (28) and the described lower surface of described semiconductor substrate (1) form the step of second diaphragm seal (12) that forms by second encapsulant, make that the part of described second diaphragm seal (12) of formation is given prominence to upward from the surface of described first diaphragm seal (10) described each groove (28) in.
16, the manufacture method of semiconductor device according to claim 16 is characterized in that,
Comprise the steps: peeling off described scribing film (27) afterwards, remove from the part of outstanding described second diaphragm seal (12) in the surface of described first diaphragm seal (10), the surface that makes described first diaphragm seal (10) and described second diaphragm seal (12) is in same plane.
17, a kind of manufacture method of semiconductor device is characterized in that,
Preparation has the upper surface that is formed with a plurality of connection pads (2) and a plurality of integrated circuits, and the semiconductor substrate (1) of the wafer state of opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface;
Go up a plurality of wirings (8) that formation has the connection pads part that is electrically connected with above-mentioned connection pads (2) at the semiconductor substrate (1) of described wafer state, and then partly form external connection electrode (9) in above-mentioned each connection pads;
On the described upper surface of the described semiconductor substrate (1) around each described external connection electrode (9), first diaphragm seal (10) that formation is made of first encapsulant, each impurity concentration of the Na ion of described first encapsulant, K ion, Ca ion and Cl ion is below 10ppm;
Attaching the 1st scribing film (27) on the upper surface of above-mentioned the 1st diaphragm seal (10) that is formed at the semiconductor substrate of described wafer state (1) and on the upper surface of said external connection usefulness electrode (9);
Connect the semiconductor substrate (1) and described first diaphragm seal (10) of described wafer state, form a plurality of grooves (28) till the centre of described the 1st scribing film (27);
In described a plurality of grooves (28) and the described lower surface of described semiconductor substrate (1), second diaphragm seal (12) that formation is formed by second encapsulant, the total impurities concentration of the Na ion of described second encapsulant, K ion, Ca ion and Cl ion is more than 100ppm;
Described the 1st scribing film (27) is peeled off from the semiconductor substrate (1) and described the 1st diaphragm seal (10) of described wafer state;
Attach the 2nd scribing film (29) at the back side of described the 2nd diaphragm seal (12);
Described second diaphragm seal (12) in that the medial cuts of described each groove (28) forms in each described groove (28) forms the groove (31) that arrives described the 2nd scribing film (29);
Described the 2nd scribing film (29) is peeled off from the back side of described the 2nd diaphragm seal (12), obtained a plurality of semiconductor devices separated in described groove (31).
18, a kind of manufacture method of semiconductor device is characterized in that,
Have following step:
Preparation has the upper surface that is formed with a plurality of connection pads (2) and a plurality of integrated circuits, and the semiconductor substrate (1) of the wafer state of opposed lower surface of this upper surface and the peripheral side between described upper surface and described lower surface;
Go up a plurality of wirings (8) that formation has the connection pads part that is electrically connected with above-mentioned connection pads (2) at the semiconductor substrate (1) of described wafer state, and then partly form external connection electrode (9) in above-mentioned each connection pads;
On the upper surface of semiconductor substrate (1) of the described wafer state around described each external connection electrode (9), first diaphragm seal (10) that formation is made of first encapsulant, each impurity concentration of the Na ion of described first encapsulant, K ion, Ca ion and Cl ion is below 10ppm;
The described lower surface of the semiconductor substrate (1) of described wafer state is attached on the first scribing film (41);
The semiconductor substrate (1) that connects described first diaphragm seal (10) and described wafer state also cuts up to the centre position of the thickness direction of the described first scribing film (41), forms a plurality of grooves (42) thus;
Upper surface at described first diaphragm seal (10) attaches the second scribing film (43), peels off the described first scribing film (41) from the described lower surface of the semiconductor substrate (1) of described wafer state;
In described a plurality of grooves (42) and the described lower surface of the semiconductor substrate (1) of described wafer state, second diaphragm seal (12) that formation is formed by second encapsulant, the total impurity concentration of the Na ion of the described second diaphragm seal material, K ion, Ca ion and Cl ion is more than 100ppm; With
Described second diaphragm seal (12) that forms in described each groove (42) in the medial cuts of each groove (42) of described Rack is separated into a plurality of semiconductor substrates (1) with the semiconductor substrate (1) of described wafer state.
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| JP2004270646 | 2004-09-17 | ||
| JP2004270646 | 2004-09-17 | ||
| JP2005100737 | 2005-03-31 |
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| CN105006458A (en) * | 2015-07-16 | 2015-10-28 | 北京工业大学 | Chip packaging structure with package and realization process |
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| JP5536388B2 (en) * | 2009-08-06 | 2014-07-02 | 株式会社テラプローブ | Semiconductor device and manufacturing method thereof |
| JP5603191B2 (en) * | 2010-09-28 | 2014-10-08 | 株式会社テラプローブ | Manufacturing method of semiconductor device |
| CN102169107A (en) * | 2011-01-15 | 2011-08-31 | 博嘉圣（福州）微电子科技有限公司 | Method for realizing contamination failure analysis of chip sodium ions |
| DE102014117594A1 (en) * | 2014-12-01 | 2016-06-02 | Infineon Technologies Ag | Semiconductor package and method for its production |
| CN105405819B (en) * | 2015-11-06 | 2018-12-11 | 通富微电子股份有限公司 | Metallize wafer-level packaging method |
| CN110572909A (en) * | 2019-09-12 | 2019-12-13 | 山东晶导微电子股份有限公司 | LED lighting circuit and chip packaging structure thereof |
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