CN100447467C - Microvalve integrated in flow passage - Google Patents
Microvalve integrated in flow passage Download PDFInfo
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- CN100447467C CN100447467C CNB2005100863223A CN200510086322A CN100447467C CN 100447467 C CN100447467 C CN 100447467C CN B2005100863223 A CNB2005100863223 A CN B2005100863223A CN 200510086322 A CN200510086322 A CN 200510086322A CN 100447467 C CN100447467 C CN 100447467C
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Abstract
This invention provides one micro valve formed by micro fin in micro flow control field, which comprises micro flow channel and micro fin array structure connected distributed parallel at one angle to flow channel side wall along fin distribution direction flow and positive flow. Due to positive fin resistance force the inverse fin slice generates large resistance to generate flow difference to realize single valve function.
Description
Technical field
The invention belongs to microfluidic control and transport the field, be specifically related to a kind of miniature passive valve that can directly be integrated in the runner.
Background technique
Miniature valve is the critical component in the micro-fluid chip, and the flow direction and the fluid flow that are mainly used in the control fluid are quantitatively controlled, and have played the part of important role in microfluidic analysis chip.Scientific workers are devoted to the research and development of miniature valve for many years always, present visible miniature valve mainly is divided into active valve and passive valves: active valve refers to utilize the actuation force of actuator generation to realize cutting out or handover operation of valve, its main characteristics is that actuation force is stronger, the sealing of valve is better, both can be used for one-way valve and also can be used for switching valve, but thing followed narrow limitation is also very obvious, be that this type of little valve structure on the whole is comparatively complicated, additional volume is bigger, processing and integrated realization difficulty are big, reliability is low, and cost is also higher relatively; Passive valves is meant and need not external driving force, only utilize the variation (as flow direction, flowing pressure etc.) of the parameter of fluid own can realize that the state of valve changes, the volume of this type of little valve reduces greatly, the reliability height, reduced the complexity and the fabricating cost of technology, be easy to microfluid system integrated.Therefore passive valves is little with its volume simple in structure, and technology difficulty and processing cost are low, and the valve body material range of choice is wide, and comparative advantages such as reliability height become the main direction that is used for the little valve research of microfluidic analysis chip.
Summary of the invention
The invention provides a kind of miniature passive valve that directly is integrated in runner inside, characteristics such as this miniature valve has simple in structure, and is novel, and preparation process is simple.
Technology contents of the present invention: a kind of miniature valve structure that is integrated in the runner, it comprises runner and is connected some little scale structure on the runner sidewall that little scale is parallel to each other arranges, and becomes certain inclination angle with the runner sidewall.Be forward flow along flowing of scale arragement direction, the resistance that the scale convection cell produces is less, is the opening direction (postive direction) of miniature valve.Be reverse flow against flowing of scale arragement direction, the resistance that the scale convection cell produces is very big, is the closing direction (in the other direction) of miniature valve, and the little scale that is integrated on the runner sidewall is the biomimetic features of similar shark fins.
Little scale structure parallel arrangement is on the sidewall of runner, and wherein, every group of little scale on the runner sidewall is and interts or symmetry arrangement.
Runner is into the diffusing tube structure or the column structure of certain cone angle, and micro channel can be cuboid, cylindrical body, cone, prism, taper platform etc.
Technique effect of the present invention: the present invention utilizes chemosynthesis or MEMS micro fabrication to process some similar lepidiod microstructures on the runner sidewall of micro-fluid chip, scale can be divided into movable and not movable two classes, when fluid flowed along the direction of scale, the resistance that the scale convection cell produces was very little; And against the scale direction, the resistance that the scale convection cell produces is very big, has therefore just realized the effect of one-way valve by the flow resistance that changes the passage positive and negative direction, has controlled the flow direction of liquid stream.The processing technology of this little scale is simple, can be integrated with most microfluid system, and saved cost and be easy to and produced in enormous quantities.
Description of drawings
Below in conjunction with accompanying drawing, the present invention is made detailed description.
Miniature movable scale valve integrated in Fig. 1 micro passage is overlooked arrangement mode one;
The movable scale valve of integrated micro is overlooked arrangement mode two in Fig. 2 cone or the circular cone bench-type micro passage;
The miniature fixedly scale of Fig. 3 inside microchannels valve is overlooked arrangement mode three;
Fig. 4 have certain angle diffusion runner internal fixation scale overlook arrangement mode;
The silica-based processing process of the miniature movable scale valve of Fig. 5;
The silica-based processing process two of the miniature movable scale valve of Fig. 6;
The technological process of the miniature fixedly scale of Fig. 7;
The little method of molding of Fig. 8 prepares the technological process of miniature movable scale valve;
The fixedly technological process of scale of the little method of molding preparation of Fig. 9.
Embodiment
The invention provides a series of miniature valves of forming by little scale structure 1, miniature valve comprises micro channel 5 and is connected miniature scale structure 1 on the runner sidewall, little scale 1 parallel to each other arranging, and become certain inclination angle with the runner sidewall, the resistance that produces along the direction scale convection cell of scale is little, and produce bigger resistance against the direction scale convection cell of scale, thus produced forward and reverse difference in flow, realized the function of valve.
Embodiment one: valve body comprises micro channel 5 and is connected the miniature movable scale structure 1 of the parallel arrangement on its sidewall, micro channel can be a column structure, also can be into the diffusing tube structure of certain cone angle, shown in figure two, little scale 1 will be arranged along the direction of diffusion, and miniature here movable scale 1 has played the effect of valve block, the inertia that fluid inside is catered in the opening and closing of scale 1 flows, when fluid when the direction of scale 1 flows, resistance is very little, it is smooth and easy to flow; When fluid was mobile against the direction of scale 1, scale 1 opened on the contrary, and the distance of runner narrows down, and has increased reverse disturbance simultaneously, and reverse flow is reduced, and the flow of forward can play the effect of one-way valve greater than reverse flow.
Embodiment two: valve body comprises micro channel 5 and is connected miniature fixedly scale structure 1 on its vertical sidewall, fixedly scale can be the structure of similar shark fins, it also can be the sheet structure of fixing, little scale structure is parallel to each other arranges, wherein, every group of little scale on the runner sidewall interts or symmetry arrangement each other.Shown in figure three; Micro channel 5 can be a column; Micro channel 5 two sides also can have a certain degree, (flow of dispersal direction is big to form diffusing tube runner 5, scale will be arranged shown in figure four along the direction of diffusion, fixedly the main effect of scale is to reduce disturbance along flow direction as far as possible, increase disturbance against flow direction, thereby changed the flow resistance characteristic of micro channel, increased efficient.Therefore the flow that valve inlet 3 enters has produced the net flow of forward greater than from exporting 4 flows that flow out, and can play the effect of one-way valve.
Whether the miniature valve based on the MEMS processes among the present invention can movable according to its scale, adopts following method preparation respectively:
One, the silica-based preparation method of miniature movable scale valve:
(1), shown in Fig. 5 (a), the method deposit layer of oxide layer 8 of thermal oxidations or CVD are adopted on silicon chip 7 surface, as the mask of subsequent etching;
(2), shown in Fig. 5 (b), carry out the photoetching first time with 1 pair of mask plate through step (1) silica 8, the method for dry method or wet etching etches the planimetric map of little scale valve arrangement;
(3), shown in Fig. 5 (c), little scale 1 of anisotropic dry etch and micro channel structure 5 on silicon chip 7;
(4), shown in Fig. 5 (d), adopt method deposit one deck silica or the silicon nitride 9 on the microstructure that etches of CVD, protective side wall is not corroded in follow-up etching reaction;
(5), shown in Fig. 5 (e), the silica of dry anisotropic etching bottom surface or silicon nitride 9;
(6), shown in Fig. 5 (f), the SF6 isotropic etching is emptied the silicon below the thin beam and is made it unsettled;
(7), shown in Fig. 5 (g), the remaining oxide layer in total surface is all eroded;
(8), shown in Fig. 5 (h), glass 10 photomask surfaces etch shallow slot with the method for dry method or wet etching, make bonding after whole little scale structure unsettled;
(9), shown in Fig. 5 (i), glass and silicon chip are aimed at bonding and are formed valve body structure;
(10), shown in Fig. 5 (j), the silicon chip back side is with dry method or wet etching;
(11), shown in Fig. 5 (k), last photoetching, dry method or wet etching go out the through hole 11 that is connected with the external fluid pipeline.
Or adopt another kind of silica-based preparation method to make miniature movable suspension scale valve:
(1) shown in Fig. 6 (a), selects S0I silicon chip 13 (promptly layer of oxide layer 12 being arranged) for use in the position of silicon chip certain depth;
(2), shown in Fig. 6 (b), photoetching, etch the planar graph of little valve arrangement;
(3), shown in Fig. 6 (c), erode oxygen buried layer, scale structure suspends.
(4), shown in Fig. 6 (d), go out shallow slot in the surface etching of glass sheet 10 or other patch material;
(5), shown in Fig. 6 (e), glass and silicon chip are aimed at bonding and are formed valve body structure;
Two, the miniature not silica-based preparation method of movable scale structure:
(1), shown in Fig. 7 (a), silicon chip surface adopts the method deposited oxide layer 8 of thermal oxidation or CVD, as the mask of subsequent etching;
(2), shown in Fig. 7 (b), with mask 1 pair of silica photoetching, etch the planar graph of little valve arrangement through step (1);
(3), shown in Fig. 7 (c), anisotropic etching goes out to react runner and miniature fixedly scale structure;
(4), shown in Fig. 7 (d), the corrosion of the oxide layer of silicon chip surface is removed;
(5), shown in Fig. 7 (e), glass sheet is aimed at bonding and is formed valve body structure with silicon chip;
Three, little molding methods prepares movable little scale structure:
(1) shown in Fig. 8 (a), preparation mould 14; Mould preparation method comprises that employing thick resist lithography technology prepares SU-8 rubber moulding tool, adopts the LIGA technology to prepare metal mold, adopts silicon micromachining technique to prepare silicon mould;
(2) adopting polymer as Fig. 8 (b) is the pump body structure material, utilize the described mould of step (1), adopt the microscopic model technology to prepare the little scale polymer or the plastic construction 15 of three-dimensional structure, the method that the microscopic model technology is processed little scale structure comprises molded method, vacuum hot-pressing and LIGA technology;
(3) shown in Fig. 8 (c), little valve arrangement 15 of materials such as stripping mould formation polymer;
(4) shown in Fig. 8 (d), adopt polymer, glass or silicon chip as last case chip, on substrate, erode away microflute respectively, can adopt wet method or dry etching, polymer matrix film adopts little method of molding, and hot-pressing methods etc. prepare shallow slot in corresponding position, its surface;
(5) shown in Fig. 8 (e), Fig. 8 (f), case chip 10 is aimed at bonding form valve body structure with construction layer, can adopt polymer-bound or direct bonding method.
Four, adopt the fixing little scale structure of molding methods preparation:
(1), shown in Fig. 9 (a), the preparation mould 14, the material of mould can be a silicon, optical resist, polymer, metal etc.;
(2), shown in Fig. 9 (b), adopting polymer is the pump body structure material, utilize the described mould of step (1), adopt the microscopic model technology to prepare the little scale polymer or the plastic construction 15 of three-dimensional structure, the method that the microscopic model technology is processed little scale structure comprises molded method, vacuum hot-pressing and LIGA technology;
(3) shown in Fig. 9 (c), the stripping mould forms little scale structure.
(4) shown in Fig. 9 (d), form valve body structure with the cover plate bonding.
Claims (4)
1, a kind of miniature valve that is integrated in the runner, it comprises runner and is connected some little scale structure on the runner sidewall that little scale is parallel to each other arranges, and becomes certain inclination angle with the runner sidewall, along flowing of scale arragement direction, be the opening direction of miniature valve for forward flow; Against flowing of scale arragement direction for reverse flow, be the closing direction of miniature valve, it is characterized in that: the little scale that is integrated on the runner sidewall is the biomimetic features of similar shark fins.
2, the miniature valve that is integrated in the runner as claimed in claim 1, it is characterized in that: every group of little scale on the runner sidewall interts or symmetry arrangement.
3, the miniature valve that is integrated in the runner as claimed in claim 1, it is characterized in that: runner is into the diffusing tube structure or the column structure of certain cone angle.
4, the miniature valve that is integrated in the runner as claimed in claim 3, it is characterized in that: the runner that is connected with little scale is cuboid, cylindrical body, cone, prism or taper platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100863223A CN100447467C (en) | 2005-08-31 | 2005-08-31 | Microvalve integrated in flow passage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100863223A CN100447467C (en) | 2005-08-31 | 2005-08-31 | Microvalve integrated in flow passage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1924417A CN1924417A (en) | 2007-03-07 |
| CN100447467C true CN100447467C (en) | 2008-12-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2005100863223A Expired - Fee Related CN100447467C (en) | 2005-08-31 | 2005-08-31 | Microvalve integrated in flow passage |
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Families Citing this family (12)
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| CN103006184B (en) * | 2013-01-16 | 2014-06-04 | 广州大学 | Nozzle with orifices switchable at two ends |
| DE102018105566B4 (en) * | 2018-03-12 | 2023-03-23 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Flexible outlet valve |
| CN108757408A (en) * | 2018-06-28 | 2018-11-06 | 广州大学 | A kind of Valveless piezoelectric pump |
| CN108927233A (en) * | 2018-09-06 | 2018-12-04 | 广州大学 | A kind of no external force controls the microfluidic chip structure and preparation method thereof of unidirectional liquid transporting |
| CN110056694A (en) * | 2019-05-31 | 2019-07-26 | 深圳市宗泰电机有限公司 | Non-return valve |
| CN111828692B (en) * | 2020-08-11 | 2021-09-10 | 中国水利水电科学研究院 | Differential pressure runner air valve for preventing water hammer and water hammer preventing method |
| CN112196776A (en) * | 2020-10-04 | 2021-01-08 | 长春工业大学 | Novel valveless piezoelectric pump of fish bone-imitated bluff body |
| CN112240281B (en) * | 2020-10-16 | 2022-11-29 | 长春工业大学 | Composite piezoelectric pump with built-in sickle-shaped cavity |
| CN112984144A (en) * | 2021-01-25 | 2021-06-18 | 郑英翻 | Vertical scale type anti-spalling ball valve |
| CN112873840A (en) * | 2021-02-04 | 2021-06-01 | 西湖大学 | 3D printing nozzle, 3D printing nozzle assembly and 3D printing method |
| CN113058666B (en) * | 2021-03-17 | 2023-02-07 | 广西科技大学 | Micro-fluidic chip for detecting Alzheimer disease related protein NOD-like receptor 3 |
| CN113437393A (en) * | 2021-07-30 | 2021-09-24 | 中国科学院工程热物理研究所 | Cold drawing structure, battery cold drawing and battery thermal management system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4223019C1 (en) * | 1992-07-13 | 1993-11-18 | Fraunhofer Ges Forschung | Electromechanical valveless microminiature pump - has membrane actuator for applying oscillation perpendicular to fluid flow and anisotropic structure e.g. mfd by etching of silicon wafer. |
| DE29917547U1 (en) * | 1999-10-05 | 2000-01-05 | Armand Gunter | Single-flow flow device with piezo element or membrane |
| US20030185692A1 (en) * | 2002-03-27 | 2003-10-02 | Institute Of High Performance Computing | Valveless micropump |
| US20030235504A1 (en) * | 2002-06-20 | 2003-12-25 | The Regents Of The University Of California | Magnetohydrodynamic pump |
-
2005
- 2005-08-31 CN CNB2005100863223A patent/CN100447467C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4223019C1 (en) * | 1992-07-13 | 1993-11-18 | Fraunhofer Ges Forschung | Electromechanical valveless microminiature pump - has membrane actuator for applying oscillation perpendicular to fluid flow and anisotropic structure e.g. mfd by etching of silicon wafer. |
| DE29917547U1 (en) * | 1999-10-05 | 2000-01-05 | Armand Gunter | Single-flow flow device with piezo element or membrane |
| US20030185692A1 (en) * | 2002-03-27 | 2003-10-02 | Institute Of High Performance Computing | Valveless micropump |
| US20030235504A1 (en) * | 2002-06-20 | 2003-12-25 | The Regents Of The University Of California | Magnetohydrodynamic pump |
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| Publication number | Publication date |
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| CN1924417A (en) | 2007-03-07 |
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Granted publication date: 20081231 Termination date: 20110831 |