CN100432799C

CN100432799C - Method for hydrogen ion beam applying to liquid crystal molecule distributing direction

Info

Publication number: CN100432799C
Application number: CNB2005100850933A
Authority: CN
Inventors: 吴邦豪; 萧景文; 陈佑民; 江欣峻; 吴仲文
Original assignee: TTLA; Industrial Technology Research Institute ITRI; Toppoly Optoelectronics Corp; Chunghwa Picture Tubes Ltd; Chi Mei Optoelectronics Corp; Hannstar Display Corp; AU Optronics Corp; Quanta Display Inc
Current assignee: TTLA; Industrial Technology Research Institute ITRI; Chunghwa Picture Tubes Ltd; Chi Mei Optoelectronics Corp; Hannstar Display Corp; AU Optronics Corp; Quanta Display Inc; TPO Displays Corp
Priority date: 2005-07-20
Filing date: 2005-07-20
Publication date: 2008-11-12
Anticipated expiration: 2025-07-20
Also published as: CN1900795A

Abstract

The disclosed method is in use for solving issues of physical destroy caused by using current argon ion direction configuring, and degraded surface of direction configuring film. Using ion beam of containing hydrogen to impact direction configuring film directly, the invention reduces physical destroy, and carries out chemical reaction with direction configuring film to optimize direction configuring quality.

Description

H rays is applied to the method for liquid crystal alignment

Technical field

The present invention is a kind of method of H rays orientation, refers to that especially a kind of H rays is applied to the method for liquid crystal alignment.

Background technology

The tradition liquid crystal alignment is to use argon (Ar) ion beam to reach the orientation effect of both alignment layers, known have many patent documentations to disclose relevant technology, as No. the 4153529th, U.S. Patent number " causing evenly parallel liquid crystal material alignment method and the device (Means and method for inducinguniform parallel alignment of liquid crystal material in a liquidcrystal cell) that is applied to liquid crystal cell ", be ion beam orientation patent the earliest, mainly be applied as inorganic alignment film (comprising carbon), its alignment film thickness is 100-5000A, and ion beam energy is 1-3keV.

Again, as No. the 6020946th, U.S. Patent number " using the dry process (Dry processing for liquid-crystal displays using low enefgy ionbombardment) of low energy ion bombardment liquid crystal display ", this shows to use the patent of ion beam orientation in inorganic alignment film for IBM Corporation, with aforesaid U.S. Patent number No. 4153529 main difference only is the different of alignment film thickness and ion beam energy, the alignment film thickness of this patent is 10-100A, and ion beam energy is 75-200eV.

No. the 5030322nd, U.S. Patent number " the formation oriented film method of liquid crystal indicator (Method offorming orientation film of liquid-crystal display device) ", for Sharp company delivered the patent of ion beam orientation in the organic alignment film in 1991, the material of its organic alignment film comprises Polyimide (PI), polycarbamate (PU) and polyamide (PA) etc.

No. the 5770826th, U.S. Patent number " the ion beam orientation of liquid crystal (Atomic beamalignment ofliquid-crystals) ", for IBM uses ion beam in the patent of organic alignment film (its material is mainly Polyimide), it is below the 200eV with energy limited, thinks and can improve high-energy (＞500eV) the organic alignment layer surface deterioration that causes of Ion Beam Treatment.

No. the 6485614th, U.S. Patent number " the carbon both alignment layers antihunt means of LCD (Method tostabilize a carbon alignment layer for liquid crystal displays) ", for IBM Corporation proposes to need to carry out the patent that hydrogen is handled after the ion beam orientation, mainly be for the outstanding key (dangling bond) of passivation.

No. the 6665033rd, U.S. Patent number " revising the method (Method for forming alignment layer by ion beam surface modification) that forms both alignment layers " by the ion beam surface, this handles about outstanding key passivation program for another piece of writing that IBM proposed, this and No. 6485614 maximum of preceding piece of writing U.S. Patent number different are to think can introduce reactant gas (comprising silicomethane, tetrafluoromethane, nitrogen, oxygen, hydrogen, fluorine) in ion beam, reaches in situ purpose that (in-situ) goes up the outstanding key of passivation.

Please refer to and Figure 1 shows that ar-ion beam impacts the synoptic diagram of both alignment layers, comprise a glass substrate 10, one conductive layer 12 is to be formed on this glass substrate 10, one both alignment layers 14 is to be formed on this conductive layer 12, then utilize an ar-ion beam 16 to impact this both alignment layers 14, but can form physical property and chemical destruction 18 on the surface of this both alignment layers 14.

Yet in the patent documentation of above-mentioned relevant use ar-ion beam orientation, because ar-ion beam do not have chemical reactivity and particle size too conference cause serious physical property to destroy, and then deterioration alignment film surface, have influence on the electrical characteristics of alignment film, easily cause image flicker (Flicker) and image residue problems such as (ImageSticking).And be routine processes repeatedly about No. the 6485614th, the patent No. that IBM Corporation proposed, that is earlier impact the program that alignment film utilizes the outstanding key of hydrogen atom passivation again with ar-ion beam, the patent No. that another piece I BM company is proposed be for No. 6665033 utilize that reactive ion acts on that outstanding key makes be passivation layer (passivation layer).

Summary of the invention

The objective of the invention is to utilize the H rays of smallest particles size to carry out the orientation of liquid crystal molecule, can reduce by this alignment film Surface Physical destruction, and, significantly promote tradition and use the ar-ion beam orientation that the problem of alignment film deterioration in characteristics is arranged by hydrionic chemical activity and alignment film reaction.

In order to reach above-mentioned purpose, the present invention proposes the method that a kind of H rays is applied to liquid crystal alignment, and this method comprises provides an orientation film; Produce a hydrogeneous ion beam; Determine one can adjust incident angle, ion energy and dosage ion bundle; And aim at this orientation film and impact this orientation film with this hydrogeneous ion beam.

Description of drawings

Fig. 1 is the synoptic diagram that existing ar-ion beam impacts both alignment layers;

Fig. 2 is the synoptic diagram that H rays of the present invention impacts both alignment layers; And

Fig. 3 is applied to the method flow diagram of liquid crystal alignment for the H rays of first embodiment of the invention; And

Fig. 4 is the H rays of the embodiment of the invention and the ar-ion beam comparison synoptic diagram to the liquid crystal cell electrical characteristics.

Symbol description:

Glass substrate 10,20

Conductive layer 12,22

Both alignment layers 14,24

Ar-ion beam 16

Physical property and chemical destroy 18

H rays 26

Embodiment

Reach technology, method and the effect that set purpose is taked in order to further specify the present invention, see also following about detailed description of the present invention and accompanying drawing, believe purpose of the present invention, feature and characteristics, go deep into and concrete understanding when getting one thus, yet appended graphic reference and the explanation usefulness of only providing not is to be used for the present invention is limited.

The present invention proposes the minimum and H rays that have a chemical reactivity of a particle size and carries out orientation, reduces the destruction of physical property and produces chemical reaction, goodization orientation character with the alignment film surface.

Please refer to Fig. 2 impacts both alignment layers for H rays of the present invention synoptic diagram, comprise a glass substrate 20, one conductive layer 22 is to be formed on this glass substrate 20, one both alignment layers 24 is to be formed on this conductive layer 22, then utilize a H rays 26 to impact this both alignment layers 24, compared with the prior art, for minimum particle and have high chemical reactivity, make the surface of hydrogen ion bump both alignment layers can't produce the situation generation that outstanding key and physics and chemical are destroyed because of hydrionic.

Please refer to Fig. 3 is applied to liquid crystal alignment for the H rays of first embodiment of the invention method flow diagram, this method is to comprise an orientation film (S100) is provided, wherein this orientation membraneous material is organic material or inorganic material, this organic material can be the Polyimide film, this inorganic material can be the inoranic membrane of carbon containing, produce a hydrogeneous ion beam (S102), wherein in this ion beam contained hydrogen ion to become shunt volume be more than 100 times of other ion component flow summation, determine one can adjust incident angle, ion energy and dosage ion bundle (S104), and aim at this orientation film and impact this orientation film (S106) with this hydrogeneous ion beam.

Please refer to Fig. 4 and contain the electrical characteristics that H rays 26 is directed to LCD alignment, with the comparison synoptic diagram of ar-ion beam 16 for embodiments of the invention are relevant.Film flicker (Flicker) or image residue (Image sticking) easily take place in the LCD that will cause the residual DC voltage of healing big (Residual DC Voltage).The present invention reduces to minimumly because of the H rays that utilizes the smallest particles size destroys the physical property of ionic bombardment, makes the alignment film surface be difficult for having the defective that produces because of ionic bombardment to come the adsorption band electron ion, avoids the problem of residual DC overtension.Because H rays itself has high chemical activity, make that the surperficial bond behind the bump mostly is nonpolar covalent bond again, so also will be of value to the problem that reduces residual DC voltage.

The present invention utilizes the H rays of smallest particles size to do LCD alignment, comprises to be applied to organic and inorganic alignment film.The H rays that the invention has the advantages that minimum material for making clothes size is of value to the physical property destruction of minimizing to alignment film, and then the electrical characteristics of goodization alignment film.Again because the chemical reactivity of hydrogen ion itself can produce reaction, the character of stable alignment film with the alignment film surface.In the design of ion beam board, very little because H rays destroys the physical property on surface, so do not need ion beam energy is limited less than 200eV, so can significantly reduce ion beam and go up the not good problem of easy homogeneity in the low energy ion beam exploitation.

Low physical property is destroyed, the advantage of high chemical reactivity because of H rays has, its bump will cause a series of hydrogenation (hydrogenation), dehydrogenation (dehydrogenation) during alignment film, corroding (erosion) and covalent bond, to form (bond-forming) etc. machine-processed, so will help to produce surperficial bond anisotropy and bring out LCD alignment.

The present invention is the above-mentioned disclosed technology of energy mat really, provides a kind of far different in existing design, may be able to improve whole use value.

Above-mentioned disclosed graphic, explanation only be embodiments of the invention, allly is skillful in this skill person when can doing other all improvement according to above-mentioned explanation, and these change and still belong in the claim that invention spirit of the present invention defines below reaching.

Claims

1. a H rays is applied to the method for liquid crystal alignment, comprises the following steps:

One orientation film is provided;

Produce a hydrogeneous ion beam, it is more than 100 times of other ion component flow summation that the interior contained hydrogen ion of this ion beam becomes shunt volume; And

Aim at this orientation film and impact this orientation film with this hydrogeneous ion beam, with reduce this orientation film surface by this hydrogeneous ion beam impact the back residual DC voltage.

2. H rays according to claim 1 is applied to the method for liquid crystal alignment, and wherein this orientation membraneous material is organic material or inorganic material.

3. H rays according to claim 2 is applied to the method for liquid crystal alignment, and wherein this organic material is the Polyimide film.

4. H rays according to claim 2 is applied to the method for liquid crystal alignment, and wherein this inorganic material is the inoranic membrane of carbon containing.

5. H rays according to claim 1 is applied to the method for liquid crystal alignment, and wherein the step of the hydrogeneous ion beam of this generation one more comprises and determines one can adjust incident angle, ion energy and dosage ion bundle.