Background technology
The common person of mode who constitutes the film layer structure of bandpass filter at present can be divided into dual mode: a kind of is two-sided optical coating, with the visible light bandpass filter is example, is to plate a ultraviolet light respectively to end (IR cut) plated film by (UV cut) plated film and a far red light on two planes of a glass baseplate; Another kind is the single-side optical plated film, is example with the green glow bandpass filter, then is high low value refraction (refractive) layer that plates tens of layers of uniform thickness on a wherein plane of a glass baseplate.
General by the bandpass filter that two-sided optical coating constituted, not only the total film thickness of accumulating because of the two sides is blocked up influences final penetrance, in addition, also must consider single-side optical dichroism and two-sided synergistic effect, therefore, comparatively complicated when the design film layer structure.
And the bandpass filter of single-side optical plated film can be consulted Fig. 1, and traditional a kind of bandpass filter 1 comprises: a base material 11, be stacked with one first membrane stack 12, one second membrane stack 13 and tertiary membrane heap 14 along a direction X.
This first membrane stack 12 X in the direction is stacked with one and is (0.7332H/0.7332L)
10Film layer structure; This second membrane stack 13 X in the direction is stacked with one and is (1.308H/1.308L)
10Film layer structure; This tertiary membrane heap 14 X in the direction is stacked with one and is (1.4H/1.4L)
10Film layer structure; Wherein, a centre wavelength (λ of this bandpass filter 1
0) be 465nm, H and L equal λ
0/ 4 a high refractor and a forming low-refractive-index layer.
By above stated specification, the film layer structure of this tradition bandpass filter 1 [just, (0.7332H/0.7332L)
10/ (1.308H/1.308L)
10/ (1.4H/1.4L)
10] total film thickness be illustrated in down:
λ
0=465,
In addition, consult Fig. 2, penetration rate spectrum figure by the described membrane stack 12,13,14 of this bandpass filter 1 shows, the effect of this first membrane stack 12 is the wave band of cutoff wavelength greater than 500nm, the effect of this second membrane stack 13 is to increase the penetrance of wavelength less than the 500nm wave band, and the effect of this tertiary membrane heap 14 is the wave band of cutoff wavelength less than 400nm, but borrow described membrane stack 12,13,14 penetrate and cut-off characteristics to form wavelength-filtered between the bandpass filter between the 400nm to 500nm 1.
Consult Fig. 3, penetration rate spectrum figure by this bandpass filter 1 shows, penetrance curve after described membrane stack 12,13,14 stacks is the shake attitude (ripper) that is serious, and because the total film thickness of this bandpass filter 1 is up to about 8000nm, very easily cause white mist phenomenon (scattering phenomenon) and cause its average penetration rate can't maintain more than 80%, therefore, the production cost that not only the increases plated film optics that also seriously influences this bandpass filter 1 divides photosensitiveness.
Therefore, design and can suppress white mist phenomenon with the film layer structure that reaches the good optical dichroism and reduce the production cost of plated film effectively, be current exploitation bandpass filter association area person the direction of effort to be solved.
Description of drawings
Fig. 1 is a cross-sectional schematic, and a kind of traditional bandpass filter is described;
Fig. 2 is the penetration rate spectrum figure before one first, 1 second and one tertiary membrane storehouse of this tradition bandpass filter adds;
Fig. 3 is the penetration rate spectrum figure after first, second and third film stack of this tradition bandpass filter adds;
Fig. 4 is a cross-sectional schematic, and one first preferred embodiment of the bandpass filter of piece capable of reducing coating-plated layers of the present invention is described;
Fig. 5 is the penetration rate spectrum figure of a main film of this first preferred embodiment;
Fig. 6 is the penetration rate spectrum figure of one first coupling film of this first preferred embodiment;
Fig. 7 is the main film of this first preferred embodiment and the penetration rate spectrum figure after the first coupling film stack;
Fig. 8 is the penetration rate spectrum figure of one second coupling film of this first preferred embodiment;
Fig. 9 is the main film of this first preferred embodiment and the penetration rate spectrum figure after the second coupling film stack;
Figure 10 is the main film of this first preferred embodiment, the penetration rate spectrum figure after first and second coupling film stack;
Figure 11 is the penetration rate spectrum figure of a main film of one second preferred embodiment;
Figure 12 is the main film of this second preferred embodiment, the penetration rate spectrum figure after first and second coupling film stack;
Figure 13 is the penetration rate spectrum figure of a main film of one the 3rd preferred embodiment;
Figure 14 is the main film of the 3rd preferred embodiment, the penetration rate spectrum figure after first and second coupling film stack;
Figure 15 is the penetration rate spectrum figure of a main film of one the 4th preferred embodiment;
Figure 16 is the penetration rate spectrum figure of one first coupling film of the 4th preferred embodiment;
Figure 17 is the penetration rate spectrum figure of one second coupling film of the 4th preferred embodiment;
Figure 18 is the main film of the 4th preferred embodiment, the penetration rate spectrum figure after first and second coupling film stack;
Figure 19 is the penetration rate spectrum figure of a main film of one the 5th preferred embodiment;
Figure 20 is the penetration rate spectrum figure of one first coupling film of the 5th preferred embodiment;
Figure 21 is the penetration rate spectrum figure of one second coupling film of the 5th preferred embodiment:
Figure 22 is the main film of the 5th preferred embodiment, the penetration rate spectrum figure after first and second coupling film stack.
Embodiment
Be elaborated below by specific embodiment and accompanying drawing bandpass filter to piece capable of reducing coating-plated layers of the present invention.
Consult Fig. 4, one first preferred embodiment of the bandpass filter of piece capable of reducing coating-plated layers of the present invention, comprise: the main film 3, that a base material 2, is stacked and placed on this base material 2 is folded in the coupling of first between this main film 3 and this base material 2 film 4, and second a coupling film 5 that is stacked and placed on this main film 3.
This main film 3 is stacked with one by this base material 2 in regular turn to the stacked direction Y away from this base material 2 and is (LHxLH)
mFilm layer structure.This main film 3 greater than 80%, respectively is between 40%~60% between in the average penetration rate of one second wave band and a triband in the average penetration rate of one first wave band, is respectively less than 1% in the average penetration rate of one the 4th wave band and one the 5th wave band; Wherein, x equals 2n, and n is a positive integer, m≤6.This second wave band is between this first and the 4th wave band, and this triband is between this first and the 5th wave band, and the wavelength of this second wave band is the wavelength less than this first wave band, and the wavelength of this triband is the wavelength greater than this first wave band.
This first coupling film 4 is stacked with a film layer structure that is 2HLH2LH in regular turn along this stacked direction Y, be greater than 85% in the one first average penetration rate of revising in the wave band, and this first wave band is in this first correction wavelength band.
This second coupling film 5 is stacked with a film layer structure that is L2HL2HL in regular turn along this stacked direction Y, and the average penetration rate of one second correction wave band in this first wave band is greater than 95%.
In the bandpass filter of piece capable of reducing coating-plated layers of the present invention, H and L are respectively thickness and equal λ
0A high-refraction material of/4 and a low refractive material, λ
0Be wavelength between 380nm~1100nm.Be applicable to the λ of this first preferred embodiment of the present invention
0Be wavelength between 445nm~485nm, and 1≤n≤3; In addition, the refractive index (refractive index) that is suitable for this high-refraction material of the present invention is between 2.1 to 2.5, is between 1.3 to 1.5 and be somebody's turn to do the refractive index of hanging down refractive material.
In this first preferred embodiment, and n=1 (just, x=2), m=6, λ
0Wavelength for 465nm; This high-refraction material is titania (TiO
2), this low refractive material is silicon dioxide (SiO
2).
Conclude aforementionedly, in this first preferred embodiment of the present invention, the film layer structure of this base material 2, the first coupling film 4, main film 3 and the second coupling film 5 along this stacked direction Y is in regular turn: base material/2HLH2LH/ (LH2LH)
6/ L2HL2HL/ air.
Consult Fig. 5, show by the penetration rate spectrum figure of the main film 3 of this first preferred embodiment, at λ
0Under the condition for the wavelength of 465nm, the first wave band average penetration rate between 440nm~500nm is greater than 90%; The average penetration rate of second wave band of 428 ± 5nm and the triband of 515 ± 5nm is between 40%~60%; And be less than 1% between the average penetration rate of the 4th wave band between 400nm~420nm and the 5th wave band between 530nm~600nm.
Consult Fig. 6, the penetration rate spectrum figure that is mated film 4 by first of this first preferred embodiment shows, at λ
0Under the condition for the wavelength of 465nm, the first average penetration rate of revising wave band between 440nm~500nm is greater than 95%.In addition, cooperate and consult Fig. 7, show that by the main film 3 of this first preferred embodiment and the penetration rate spectrum figure after 4 stacks of the first coupling film the main effect of this first coupling film 3 is to revise the average penetration rate of first wave band between 440nm~500nm.
Consult Fig. 8, the penetration rate spectrum figure that is mated film 5 by second of this first preferred embodiment shows, at λ
0Under the condition for the wavelength of 465nm, the second average penetration rate of revising wave band between 460nm~480nm is greater than 95%.Other consults Fig. 9, shows that by the main film 3 of this first preferred embodiment and the penetration rate spectrum figure after 5 stacks of the second coupling film main effect of this second coupling film 5 is to revise the average penetration rate of the second correction wave band between 460nm~480nm.
Consult Figure 10, show by the penetration rate spectrum figure after main film 3, the first coupling film 4 and 5 stacks of the second coupling film of this first preferred embodiment, the bandpass filter of this first preferred embodiment piece capable of reducing coating-plated layers of the present invention in this first wave band (just, wavelength between 440nm~500nm) average penetration rate is approximately greater than 95%, and, therefore can filter the wavelength of this first wave band effectively in the penetrance curve steepness height of this second and third wave band.
In addition, the film layer structure of this first preferred embodiment of the present invention [2HLH2LH/ (LH2LH) just,
6/ L2HL2HL] total film thickness be illustrated in down:
λ
0=465,
The total film thickness of this first preferred embodiment of the present invention is compared with this tradition bandpass filter 1 and is significantly reduced about 3000nm, therefore, can suppress white mist phenomenon effectively and then increase penetrance.In addition, compare with traditional bandpass filter 1, each rete of the present invention designs for uniform thickness, therefore helps the processing procedure monitoring in the coating process.
One second preferred embodiment of the bandpass filter of piece capable of reducing coating-plated layers of the present invention is identical with this first preferred embodiment haply, and it does not exist together and only is n=2 (just, x=4).
Therefore, in this second preferred embodiment of the present invention, the film layer structure of this base material 2, the first coupling film 4, main film 3 and the second coupling film 5 along this stacked direction Y is in regular turn: base material/2HLH2LH/ (LH4LH)
6/ L2HL2HL/ air.
Consult Figure 11, show that by the penetration rate spectrum figure of the main film 3 of this second preferred embodiment this second preferred embodiment is at λ
0Under the condition for the wavelength of 465nm and n=2, the first wave band average penetration rate between 445nm~490nm is greater than 80%; The average penetration rate of second wave band of 439 ± 5nm and the triband of 496 ± 5nm is between 40%~60%; And be less than 1% between the average penetration rate of the 4th wave band between 400nm~430nm and the 5th wave band between 510nm~580nm.In addition, consult Fig. 6 again, this first coupling film 4 is greater than 95% in the first average penetration rate of revising wave band between 440nm~500nm; And show that by Fig. 8 this second coupling film 5 is greater than 95% in the second average penetration rate of revising wave band between 460nm~480nm.
Consult Figure 12, show by the penetration rate spectrum figure after main film 3, the first coupling film 4 and 5 stacks of the second coupling film of this second preferred embodiment, the bandpass filter of this second preferred embodiment piece capable of reducing coating-plated layers of the present invention in this first wave band (just, wavelength between 445nm~490nm) average penetration rate is approximately greater than 90%, and, therefore can filter the wavelength of this first wave band effectively in the penetrance curve steepness height of this second and third wave band.
In addition, the film layer structure of this second preferred embodiment of the present invention [2HLH2LH/ (LH4LH) just,
6/ L2HL2HL] total film thickness be illustrated in down:
λ
0=465,
The total film thickness of this second preferred embodiment of the present invention is compared with this tradition bandpass filter 1 and is significantly reduced about 1500nm, therefore, also can suppress white mist phenomenon effectively and then increase penetrance.
One the 3rd preferred embodiment of the bandpass filter of piece capable of reducing coating-plated layers of the present invention is identical with this first preferred embodiment haply, and it does not exist together and only is n=3 (just, x=6).
Therefore, in the present invention's the 3rd preferred embodiment, the film layer structure of this base material 2, the first coupling film 4, main film 3 and the second coupling film 5 along this stacked direction Y is in regular turn: base material/2HLH2LH/ (LH6LH)
6/ L2HL2HL/ air.
Consult Figure 13, show that by the penetration rate spectrum figure of the main film 3 of the 3rd preferred embodiment the 3rd preferred embodiment is at λ
0Under the condition for the wavelength of 465nm and n=3, the first wave band average penetration rate between 450nm~480nm is greater than 80%; The average penetration rate of second wave band of 444 ± 5nm and the triband of 488 ± 5nm is between 40%~60%; And be less than 1% between the average penetration rate of the 4th wave band between 400nm~440nm and the 5th wave band between 500nm~550nm.In addition, consult Fig. 6 again, this first coupling film 4 is greater than 95% in the first average penetration rate of revising wave band between 440nm~500nm; And show that by Fig. 8 this second coupling film 5 is greater than 95% in the second average penetration rate of revising wave band between 460nm~480nm.
Consult Figure 14, show by the penetration rate spectrum figure after main film 3, the first coupling film 4 and 5 stacks of the second coupling film of the 3rd preferred embodiment, the bandpass filter of the present invention's the 3rd preferred embodiment piece capable of reducing coating-plated layers in this first wave band (just, wavelength between 450nm~485nm) average penetration rate is approximately greater than 88%, and, therefore can filter the wavelength of this first wave band effectively in the penetrance curve steepness height of this second and third wave band.
Again, the film layer structure of the present invention's the 3rd preferred embodiment [2HLH2LH/ (LH6LH) just,
6/ L2HL2HL] total film thickness be illustrated in down:
λ
0=465,
The total film thickness of the present invention's the 3rd preferred embodiment is compared with this tradition bandpass filter 1 and is reduced about 100nm, therefore, also can reduce the m value of this main film 3 if desire reduces the total film thickness of the 3rd preferred embodiment, and then suppress white mist phenomenon and reach to increase the penetrance effect.
One the 4th preferred embodiment of the bandpass filter of piece capable of reducing coating-plated layers of the present invention is identical with this first preferred embodiment haply, and it does not exist together and only is λ
0Wavelength.Be applicable to the λ of the present invention's the 4th preferred embodiment
0Be wavelength between 385nm~420nm.In the 4th preferred embodiment, λ
0Wavelength for 400nm.
Consult Figure 15, show that by the penetration rate spectrum figure of the main film 3 of the 4th preferred embodiment the 4th preferred embodiment is at λ
0Under the condition for the wavelength of 400nm, the first wave band average penetration rate between 382nm~430nm is greater than 80%; The average penetration rate of second wave band of 376 ± 5nm and the triband of 437 ± 5nm is between 40%~60%; And be less than 1% between the average penetration rate of the 4th wave band between 350nm~370nm and the 5th wave band between 450nm~500nm.
In addition, consult Figure 16, the first coupling film 4 of the present invention's the 4th preferred embodiment is greater than 85% in the first average penetration rate of revising wave band between 380nm~430nm; And, show that by Figure 17 the second coupling film 5 of the present invention's the 4th preferred embodiment is greater than 95% in the second average penetration rate of revising wave band between 395nm~405nm.
Consult Figure 18, show by the penetration rate spectrum figure after main film 3, the first coupling film 4 and 5 stacks of the second coupling film of the 4th preferred embodiment, the bandpass filter of the present invention's the 4th preferred embodiment piece capable of reducing coating-plated layers in this first wave band (just, wavelength between 382nm~430nm) average penetration rate is approximately greater than 95%, and, therefore can filter the wavelength of this first wave band effectively in the penetrance curve steepness height of this second and third wave band.
One the 5th preferred embodiment of the bandpass filter of piece capable of reducing coating-plated layers of the present invention is identical with this first preferred embodiment haply, and it does not exist together and only is λ
0Wavelength.Be applicable to the λ of the present invention's the 5th preferred embodiment
0Be wavelength between 860nm~940nm.In the 5th preferred embodiment, λ
0Wavelength for 900nm.
Consult Figure 19, show that by the penetration rate spectrum figure of the main film 3 of the 5th preferred embodiment the 5th preferred embodiment is at λ
0Under the condition for the wavelength of 900nm, the first wave band average penetration rate between 830nm~980nm is greater than 80%; The average penetration rate of second wave band of 812 ± 5nm and the triband of 1012 ± 5nm is between 40%~60%; And be less than 1% between the average penetration rate of the 4th wave band between 700nm~790nm and the 5th wave band between 1040nm~1200nm.
In addition, consult Figure 20, the first coupling film 4 of the present invention's the 5th preferred embodiment is greater than 85% in the first average penetration rate of revising wave band between 830nm~980nm; And show that by Figure 21 the second coupling film 5 of the present invention's the 5th preferred embodiment is greater than 95% in the second average penetration rate of revising wave band between 885nm~915nm.
Consult Figure 22, show by the penetration rate spectrum figure after main film 3, the first coupling film 4 and 5 stacks of the second coupling film of the 5th preferred embodiment, the bandpass filter of the present invention's the 5th preferred embodiment piece capable of reducing coating-plated layers in this first wave band (just, wavelength between 830nm~980nm) average penetration rate is approximately greater than 95%, and, therefore can filter the wavelength of this first wave band effectively in the penetrance curve steepness height of this second and third wave band.
The thin portion film layer structure of preferred embodiment of the present invention [2HLH2LH/ (LHxLH) just,
m/ L2HL2HL], λ
0The penetrance of value, total film thickness and each wave band, put in order under tabulate in 1..
Table 1.
Compare down with this bandpass filter 1 of tradition, not only penetrance curve steepness is good for the designed film layer structure that goes out of preferred embodiment of the present invention, and the pairing filter section excessively of each preferred embodiment all can reach the penetrance more than 85%, in addition, the final total film thickness of this first, second and third preferred embodiment of the present invention also is lower than this tradition bandpass filter 1, therefore, can reduce the production cost of plated film and suppress the generation of white mist phenomenon effectively.
Conclude above-mentionedly, the bandpass filter of piece capable of reducing coating-plated layers of the present invention has and can suppress white mist phenomenon with the film layer structure that reaches the good optical dichroism and reduce the production cost of plated film effectively, can reach purpose of the present invention really.