CN100429045C - Constant micro force micro feeder for super pricise grinding of hard brittle material and its control method - Google Patents
Constant micro force micro feeder for super pricise grinding of hard brittle material and its control method Download PDFInfo
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- CN100429045C CN100429045C CNB2006100147849A CN200610014784A CN100429045C CN 100429045 C CN100429045 C CN 100429045C CN B2006100147849 A CNB2006100147849 A CN B2006100147849A CN 200610014784 A CN200610014784 A CN 200610014784A CN 100429045 C CN100429045 C CN 100429045C
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Abstract
The present invention discloses a constant micro force micro feeder for super precise grinding of hard brittle material and its control method, and belongs to the field of hard brittle material processing technology. The constant micro force micro feeder includes one micro feeding platform and one computer. The micro feeding platform includes micro displacement driver, micro displacement sensor and force sensor. The computer, a D/A converter, the micro displacement driver power source and the micro displacement driver constitute a feeding step length channel; and the micro displacement sensor, the force sensor, an amplifier, an A/D converter and the computer constitute a signal monitoring and feeding back channel. The control process includes converting the grinding force signal into voltage signal, converting into digital quantity in the A/D converter for the computer to real-time monitor, sending the feeding step length digital quantity with the computer, converting the digital quantity into analog voltage in the D/A converter and driving the micro displacement driver.
Description
Technical field
The present invention relates to a kind of constant micro force micro-feeding device and control method that realizes the hard brittle material superfine grinding, belong to the hard brittle material Grinding Technology.
Background technology
At present, two kinds of modes are mainly adopted in little feeding of hard brittle material superfine grinding.Mode one: grinding process is implemented on the ultraprecise grinding machine, realizes by the dynamo-electric feed system of the high accuracy of lathe self along emery wheel little feeding radially, and system architecture complexity, manufacturing cost height, this system does not generally have the grinding force feedback function.For fear of the brittle damage of workpiece machining surface, generally want strict restriction along the emery wheel amount of feeding radially during grinding, grinding efficiency is low.Mode two: grinding process is implemented on precision grinder, is realized by the micro-feeding device that is attached on the lathe along emery wheel little feeding radially.It is the advantage of this mode that feed accuracy height, flexible configuration, cost hang down, but this micro-feeding device does not generally have the grinding force feedback function yet, be difficult to effectively avoid the brittle damage of workpiece machining surface when grinding brittle materials, and grinding efficiency is low.Therefore, be necessary to seek feed accuracy height, flexible configuration, cost is low and have the micro-feeding device of grinding force feedback function and the control corresponding method to adapt to the requirement of hard brittle material superfine grinding.
Summary of the invention
The objective of the invention is to propose a kind of constant micro force micro-feeding device and control method that realizes the hard brittle material superfine grinding, this installs flexible configuration, cost is low, feed accuracy is high, and the control method process is simple.
The present invention is realized by following technical proposals: be configured on the precision grinder, a kind of constant micro force micro-feeding device of realizing the hard brittle material superfine grinding, it is characterized in that, comprise micro-feeding platform 1 and computer 10, micro-feeding platform 1 mounted inside micro-displacement driver 2, micro-displacement sensor 3 and power sensor 4, computer 10 links to each other with micro-displacement driver 2 in the micro-feeding platform 1 by D/A converter 6 and micro-displacement driver power supply 5 and constitutes the feeding step-length that the feeding step-length is adjusted passage control micro-feeding platform 1, and micro-displacement sensor 3 and power sensor 4 pass through signal amplifier 7,8 and A/D converter 9 link to each other with computer 10 and constitute signal monitoring and feedback channel and monitor actual grinding force and total feed amount in the grinding process in real time.
Adopt said apparatus to realize the control method of the little feeding of constant micro force, be characterised in that to comprise following process:
The invention has the advantages that, monitor actual grinding force with the power sensor, adjust the feeding step-length of micro-feeding platform according to the grinding force feedback result, actual grinding force is controlled within the grinding force scope of setting, realize the constant micro force grinding, the setting range of system's grinding force control accuracy height, grinding force is adjustable, cost is low, the grinding force control accuracy of system is by the feed accuracy decision of power sensor and micro-feeding platform, can be according to the flexible configuration that requires of actual grinding process, the grinding force control accuracy can reach 0.5N.
Description of drawings
Fig. 1 is apparatus of the present invention composition frame chart.
Among the figure: 1 is micro-feeding platform, 2 is the micro-displacement driver in the micro-feeding platform 1,3 is the micro-displacement sensor in the micro-feeding platform 1,4 is the power sensor in the micro-feeding platform 1,5 is the micro-displacement driver power supply, and 6 is D/A converter, and 7 and 8 is signal amplifier, 9 is A/D converter, and 10 is computer.
Fig. 2 is a control method theory diagram of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is described in detail:
In concrete hard brittle material (as optical glass) superfine grinding process, at first set and be limited to 5N on the grinding force, the total feed amount of micro-feeding platform 1 and initial feeding step-length are respectively 5 μ m and 100nm, pass through D/A converter 6 by computer 10 then, micro-displacement driver power supply 5 and micro-displacement driver 2 control micro-feeding platforms 1 are by the initial feeding step-length feeding of setting and begin grinding process, pass through power sensor 4 by computer 10, signal amplifier 8 and A/D converter 9 be the grinding force of monitoring grinding process in real time, if the grinding force that monitors greater than the grinding force upper limit of setting, then reduces feeding step-length (the feeding step-length of current feeding step-length=0.7 * last feeding circulation) in proportion in next feeding circulation; If the grinding force that monitors is not more than the grinding force upper limit of setting, then in next feeding circulation, keep current feeding step-length constant (being the feeding step-length of current feeding step-length=last feeding circulation).At the end near grinding process, (actual total feed amount is monitored by micro-displacement sensor 3, signal amplifier 7 and A/D converter 9 in real time by computer 10 if the total feed amount of the micro-feeding platform of setting 1 and the difference of actual total feed amount are greater than ε, ε is a very little tolerance, can set in advance at the control software inhouse, ε in this example=20nm) and be not more than the feeding step-length of feeding circulation then is made as current feeding step-length with this difference in next feeding circulation; If the total feed amount of setting and the difference of actual total feed amount are greater than the feeding step-length of last feeding circulation, then according to the feeding step-length of determining at the grinding force of current feeding circulatory monitoring in the next feeding circulation; If the total feed amount of setting and the difference of actual total feed amount are not more than ε, then finish grinding process, in the grinding overall process, grinding force is controlled within the scope of setting, thereby realizes the little feeding of constant micro force of hard brittle material superfine grinding.
Claims (2)
1. constant micro force micro-feeding device of realizing the hard brittle material superfine grinding, it is characterized in that, comprise micro-feeding platform (1) and computer (10), micro-feeding platform (1) mounted inside has micro-displacement driver (2), micro-displacement sensor (3) and power sensor (4), computer (10) links to each other with micro-displacement driver (2) in the micro-feeding platform (1) by D/A converter (6) and micro-displacement driver power supply (5) and constitutes the feeding step-length that feeding step-length adjustment passage is controlled micro-feeding platform (1), micro-displacement sensor (3) links to each other with computer (10) by signal amplifier I (7) and A/D converter (9) and links to each other with computer (10) by signal amplifier II (8) and A/D converter (9) with power sensor (4), and formation signal monitoring and feedback channel are monitored actual grinding force and the total feed amount in the grinding process in real time.
2. one kind is adopted the described device of claim 1, realize the control method of the little feeding of constant micro force of hard brittle material superfine grinding, it is characterized in that comprising following process: the power sensor (4) in the micro-feeding platform (1) converts the grinding force signal to voltage signal, this voltage signal converts digital quantity to by computer (10) monitoring in real time by A/D converter (9) after signal amplifier II (8) amplifies, the digital quantity that the comparative result of the grinding force signal that computer (10) basis monitors and the grinding force upper limit of setting sends the feeding step-length of adjusting micro-feeding platform (1) is no more than the grinding force upper limit of setting to guarantee actual grinding force, this digital quantity converts aanalogvoltage to through D/A converter (6), this aanalogvoltage produces the driving voltage that drives the micro-displacement driver (2) in the micro-feeding platform (1) as the input signal control micro-displacement driver power supply (5) of micro-displacement driver power supply (5), thereby the feeding step-length feeding that control micro-feeding platform (1) sends by computer (10) realizes the constant micro force grinding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100147849A CN100429045C (en) | 2006-07-17 | 2006-07-17 | Constant micro force micro feeder for super pricise grinding of hard brittle material and its control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100147849A CN100429045C (en) | 2006-07-17 | 2006-07-17 | Constant micro force micro feeder for super pricise grinding of hard brittle material and its control method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1887528A CN1887528A (en) | 2007-01-03 |
| CN100429045C true CN100429045C (en) | 2008-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100147849A Expired - Fee Related CN100429045C (en) | 2006-07-17 | 2006-07-17 | Constant micro force micro feeder for super pricise grinding of hard brittle material and its control method |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105563309B (en) * | 2015-11-11 | 2019-04-12 | 华中科技大学 | It is a kind of actively to comply with end effector and its control method for adjustable pitch propeller robot grinding |
| CN108381303B (en) * | 2018-04-13 | 2019-07-09 | 宁波德深机械设备有限公司 | Method for finishing surface |
| CN110640552B (en) * | 2019-09-12 | 2020-11-06 | 大连理工大学 | Processing method of easily-cleaved semiconductor crystal |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3900777A (en) * | 1972-10-28 | 1975-08-19 | Toyoda Machine Works Ltd | Feed control apparatus for a grinding machine |
| CN87215571U (en) * | 1987-11-12 | 1988-10-05 | 西北工业大学 | Accurate locating and microfeeding apparatus for machine tool |
| CN2085702U (en) * | 1990-11-23 | 1991-10-02 | 昆明市联盟机械厂 | Micro-feeding mechanism for universal knife grinder |
| JPH06106465A (en) * | 1992-08-10 | 1994-04-19 | Sumitomo Metal Mining Co Ltd | Polishing method and device thereof |
| CN2178594Y (en) * | 1993-06-15 | 1994-10-05 | 张宝源 | Grinding wheel feed device of surface grinding machine |
| CN1099324A (en) * | 1994-06-10 | 1995-03-01 | 险峰机床厂 | Intelligent feed control system for grinding machines |
-
2006
- 2006-07-17 CN CNB2006100147849A patent/CN100429045C/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3900777A (en) * | 1972-10-28 | 1975-08-19 | Toyoda Machine Works Ltd | Feed control apparatus for a grinding machine |
| CN87215571U (en) * | 1987-11-12 | 1988-10-05 | 西北工业大学 | Accurate locating and microfeeding apparatus for machine tool |
| CN2085702U (en) * | 1990-11-23 | 1991-10-02 | 昆明市联盟机械厂 | Micro-feeding mechanism for universal knife grinder |
| JPH06106465A (en) * | 1992-08-10 | 1994-04-19 | Sumitomo Metal Mining Co Ltd | Polishing method and device thereof |
| CN2178594Y (en) * | 1993-06-15 | 1994-10-05 | 张宝源 | Grinding wheel feed device of surface grinding machine |
| CN1099324A (en) * | 1994-06-10 | 1995-03-01 | 险峰机床厂 | Intelligent feed control system for grinding machines |
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| CN1887528A (en) | 2007-01-03 |
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Granted publication date: 20081029 |