CN100419119C

CN100419119C - Superhard filming mold

Info

Publication number: CN100419119C
Application number: CNB2004100510072A
Authority: CN
Inventors: 简士哲
Original assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Current assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Priority date: 2004-08-04
Filing date: 2004-08-04
Publication date: 2008-09-17
Anticipated expiration: 2024-08-04
Also published as: CN1730721A; JP2006044270A

Abstract

The present invention relates to a mould for molding glass products, which comprises a mould basal body with a molding surface and a super-hard thin film covering on the molding surface, wherein the super-hard thin film is composed of an amorphous carbon nitride basal body and cubic crystal carbon nitride particles which are distributed in the amorphous carbon nitride basal body. The present invention is characterized in that amorphous carbon nitride has lubricating performance, which is favorable to demoulding; the particle diameters of the cubic crystal carbon nitride particles are at the nanometer level and have high hardness, which enhances mechanical strength and hardness. In addition, the super-hard thin film can also prevent the metal elements of the mould basal body from outward diffusing.

Description

Mould with superhard plated film

[technical field]

The present invention relates to a kind of mould that is used for mold pressing opticglass, relate in particular to the mould of a kind of high rigidity and the easy demoulding.

[background technology]

Mould is widely used in the compression molding processing procedure, especially for making the opticglass product, as aspheric surface glass lens, globe lens, prism etc., adopt direct compression molding (Direct Press-molding) but the high-quality opticglass product of technology direct production, and need not subsequent process steps such as polishing, polishing, can enhance productivity greatly and output.But directly compression molding method requires very high for the chemical stability of mould, thermal shock resistance, physical strength, surface flatness etc.So in fact the development of compression molding technology depends primarily on the progress of the material and the technology of die manufacturing of mould.For the mould that is used for compression molding following requirement is arranged generally:

A. when high temperature, has good rigidity, anti-mechanical impact strength and enough hardness;

B. reaching repeatedly under the thermal shocking of rapid heating refrigerative, mould does not crack or is out of shape;

C. chemical reaction does not take place in molding surface and opticglass when high temperature, does not stick glass;

D. high temperature oxidation does not take place in mould;

E. good processability easily is processed into the profile of high precision and high surface finish;

F. cost is low.

Traditional moulds adopts stainless steel or refractory alloy as moulding stock mostly, and high temperature oxidation takes place this mould easily, and particularly under thermal shocking effect repeatedly, grain growth can take place material, thereby glass is cohered in the die surface roughen.

For addressing the above problem, nonmetal and superhard alloy is used to mfg. moulding die.It is reported silicon carbide (SiC), silicon nitride (Si ₃N ₄), titanium carbide (TiC), wolfram varbide (WC) and tungsten-cobalt carbide alloy have been used to make this mould.But above-mentioned various carbide ceramics hardness are very high, are difficult to be processed into needed given configuration, particularly high precision aspheric surface shape.And superhard alloy uses for some time also high temperature oxidation may take place afterwards except that being difficult to processing.

So, be mold base with carbide or superhard alloy, the composite structure mould that its surface is formed with other material coating or coating becomes new developing direction.

United States Patent (USP) the 4th, 685, disclose a kind of composite structure mould that is used for direct compression molding opticglass product No. 948, it adopts high-intensity superhard alloy, carbide ceramics or sintering metal as die matrix, and be formed with iridium (Ir) thin film layer in the mold pressing surface of mould, or the alloy firm layer of Ir and platinum (Pt), rhenium (Re), osmium (Os), rhodium (Rh) or ruthenium (Ru), or Ru thin film layer, or the alloy firm layer of Ru and Pt, Re, Os, Rh.

But, above-mentioned various precious metals or its alloy resource scarcity, the output rareness costs an arm and a leg, and makes this die cost improve greatly; And, carbide or sintering metal are as die matrix, generally be to form, in sintering process, need to add cobalt (Co), nickel (Ni) or molybdenum metallic elements such as (Mo) and participate in sintering, like this as additive by sintering, after the long-time use of mould, the metallic element of these interpolations will diffuse to the outside surface of mould by above-mentioned layer of precious metal, thus the glass material generation chemical reaction that mold pressing forms with desire, change the color of glass, influence the precision of mould and the quality of compression molding glassy product.These shortcomings are unacceptable for the high-precision optical glassy product.

Except that above-mentioned formation noble metal film layer, industry utilizes Plasma Enhanced Chemical Vapor Deposition (PECVD) (Plasma CVD) or thermal chemical vapor deposition method (Thermal CVD) to form silicon carbide or silicon nitride film layer on the die matrix surface in addition, but, this thin film layer sticks together the opticglass product easily when 400 celsius temperatures, make the opticglass product be difficult for the demoulding.

In view of this, provide a kind of chemical stability good, the metallic element that can prevent die matrix is to external diffusion, and it is real in necessary can not stick together the mould of glass during the demoulding.

[summary of the invention]

Be to solve the problems referred to above of prior art, the object of the present invention is to provide a kind of anti-oxidation, physical strength is high, can prevent the metallic element diffusion and the mould of the demoulding easily.

For realizing purpose of the present invention, the invention provides a kind of mould with superhard plated film, it comprises:

Die matrix, its have one with desire the corresponding mold pressing surface of molded product; And be covered in the superhard rete of this mold pressing surface.

This die matrix is by pottery, sintering metal or the manufacturing of superhard alloy material, comprises SiC, Si, Si ₃N ₄, ZrO ₂, Al ₂O ₃, TiN, TiO ₂, TiC, B ₄C, WC, W or WC-Co.

Superhard rete is that the carbon nitride material deposition forms, and comprises that amorphous carbon nitride matrix and cube brilliant carbonitride Particle Distribution are in this amorphous carbon nitride matrix.Described amorphous carbon nitride matrix is a continuous distribution, and a cube brilliant carbonitride particulate is discrete or partial continuous is distributed in wherein, and the particle diameter of cube brilliant carbonitride particulate is a nano level.

Above-mentioned superhard rete can form by the plasma vapor phase deposition deposition.

With respect to prior art, the present invention forms the superhard rete of carbon nitride material on the die matrix mold pressing surface of high rigidity, utilizes the good characteristics of amorphous carbon nitride oilness, makes mould of the present invention in the mold pressing processing procedure, can not stick together the demoulding easily with the opticglass product; And cube brilliant carbonitride particulate extreme hardness, can improve the physical strength of mold pressing surface; In addition, this superhard rete also can prevent the metallic element diffusion of die matrix, thereby avoids glassy product is produced detrimentally affect.

[description of drawings]

Fig. 1 is the synoptic diagram that first embodiment of the invention is used for the mould of mold pressing aspherics glassy product;

Fig. 2 is the synoptic diagram that second embodiment of the invention is used for the mould of molded surface opticglass product.

[embodiment]

The present invention is described in further detail below in conjunction with accompanying drawing.

See also Fig. 1, first embodiment of the invention provides a kind of film benevolence 10 that is used for mold pressing aspherics glassy product, the thin film layer 14 that it comprises a die matrix 12 and is formed at die matrix 12 mold pressing surface.This die matrix 12 can utilize following pottery, sintering metal or superhard alloy to get through the sintering manufacturing for main raw: SiC, Si, Si ₃N ₄, ZrO ₂, Al ₂O ₃, TiN, TiO ₂, TiC, B ₄C, WC, W or WC-Co.The mold pressing surface of die matrix 12 needs corresponding with the shape of the aspherics glassy product for the treatment of mold pressing, i.e. aspheric surface shape.Thin film layer 14 is covered in the mold pressing surface of die matrix 12, it is to be formed by the carbon nitride material deposition, comprise that (Amorphous Carbon Nitride a-CN) reaches cube brilliant carbonitride particulate 17 (Cubic Crystal Carbon Nitride, c-C to amorphous carbon nitride 16 ₃N ₄).Amorphous carbon nitride 16 is successive layerss, can be used as cube matrix that brilliant carbonitride particulate 17 distributes; Thirty years of age prismatic crystal carbonitride particulate 17 is discrete or partial continuous is distributed in the matrix that whole amorphous carbon nitride 16 forms, and its content accounts for 10%～60% (molar percentage) of thin film layer 14 total amounts.The particle diameter of cube brilliant carbonitride particulate 17 is nano levels, preferably in 5～100 nanometer range.And the thickness of thin film layer 14 can be at 1 micron to 100 micrometer ranges.

Certainly, the present invention not only can be used for the mould of mold pressing aspherics glassy product, also can be applicable to the mould of the molded product of other different shapes, different purposes.See also Fig. 2, second embodiment of the invention provides a kind of mould 20 that is used for molded surface opticglass product, and it comprises that one has the die matrix 22 of smooth flat, and is covered in the thin film layer 24 of this smooth flat.This die matrix 22 can utilize following pottery, sintering metal or superhard alloy to get through the sintering manufacturing for main raw: SiC, Si, Si ₃N ₄, ZrO ₂, Al ₂O ₃, TiN, TiO ₂, TiC, B ₄C, WC, W or WC-Co.Thin film layer 24 is to be formed by the carbon material deposition, comprises that (Amorphous Carbon Nitride a-CN) reaches cube brilliant carbonitride particulate 27 (Cubic Crystal Carbon Nitride, c-C to amorphous carbon nitride 26 ₃N ₄).Amorphous carbon nitride 26 is successive layerss, can be used as cube matrix that brilliant carbonitride particulate 27 distributes; Thirty years of age prismatic crystal carbonitride particulate 27 is discrete or partial continuous is distributed in the matrix that whole amorphous carbon nitride 26 forms, and its content accounts for 10%～60% (molar percentage) of thin film layer 24 total amounts.The particle diameter of cube brilliant carbonitride particulate 27 is nano levels, preferably in 5～100 nanometer range.And the thickness of thin film layer 24 can be at 1 micron to 100 micrometer ranges.

In above-mentioned two specific embodiments, die

matrix

12 and 22 is to be prepared from by sintering or other working method,

thin film layer

14 and 24 can pass through plasma vapor phase deposition (Plasma Chemical VaporDeposition) formation of deposits, for example microwave plasma vapour deposition process (Microwave PlasmaChemical Vapor Deposition).Also can adopt the sputtering method deposition.

The present invention's mould 10 (20), its die matrix 12 (22) has high rigidity, the advantage of high mechanical strength, pressure that produces in the time of can bearing hot press moulding and stress.Mold pressing surface is covered by thin film layer 14 (24), and it is formed by being difficult for oxidized carbon nitride material, comprises cube brilliant carbonitride particulate 17 (27) of softer amorphous carbon nitride 16 (26) and high rigidity, because the carbon atom of amorphous carbon nitride 16 (26) contains sp ²Bond makes that its oilness is good, so, the easy demoulding of moulded glass product; Hardness height, the particle diameter of thirty years of age prismatic crystal carbonitride particulate 17 (27) are little, both can strengthen the physical strength of die surface, and the precision of mold pressing surface is improved.In addition, this thin film layer 14 (24) also can stop the metallic element of die matrix 12 (22) to permeate, diffuse to thin film layer 14 (24) outsides, avoids these metallic elements to make the glass variable color, influences the opticglass quality.In sum, the mould with superhard plated film of the present invention have high mechanical strength, anti-oxidant, chemical stability is good and the characteristics of the easy demoulding.

Claims

1. mould with superhard plated film, it comprises: a die matrix, it has a mold pressing surface; And a superhard rete is covered in the mold pressing surface of this die matrix; It is characterized in that: this superhard rete comprises that amorphous carbon nitride matrix and cube brilliant carbonitride Particle Distribution are in this amorphous carbon nitride matrix.

2. the mould with superhard plated film as claimed in claim 1 is characterized in that this die matrix is by SiC, Si, Si ₃N ₄, ZrO ₂, Al ₂O ₃, TiN, TiO ₂, TiC, B ₄C, WC, W or WC-Co make.

3. the mould with superhard plated film as claimed in claim 2 is characterized in that this die matrix is to form through sintering.

4. the mould with superhard plated film as claimed in claim 1 is characterized in that this superhard rete is to form by the plasma vapor phase deposition deposition.

5. the mould with superhard plated film as claimed in claim 1, it is characterized in that this superhard film layer thickness be 1 micron to 100 micrometer ranges.

6. the mould with superhard plated film as claimed in claim 1, the molar percentage that it is characterized in that the brilliant carbonitride particulate of this cube is 10%～60%.

7. the mould with superhard plated film as claimed in claim 1, the particle diameter that it is characterized in that the brilliant carbonitride particulate of this cube is a nano level.

8. the mould with superhard plated film as claimed in claim 7, the particle diameter that it is characterized in that the brilliant carbonitride particulate of this cube is in 5～100 nanometer range.

9. the mould with superhard plated film as claimed in claim 1, the mold pressing surface that it is characterized in that this mould is an aspheric surface.

10. the mould with superhard plated film as claimed in claim 1, the mold pressing surface that it is characterized in that this mould is the plane.