CN100413151C

CN100413151C - Anisotropic conductive sheet, manufacturing method thereof, and product using the same

Info

Publication number: CN100413151C
Application number: CNB2004800339513A
Authority: CN
Inventors: 妹尾浩司; 春田裕一
Original assignee: JSR Corp
Current assignee: ISC Co Ltd
Priority date: 2003-11-17
Filing date: 2004-11-15
Publication date: 2008-08-20
Anticipated expiration: 2024-11-15
Also published as: CN1883081A

Abstract

There is provided an anisotropic conductive sheet capable of surely achieving a predetermined electrical connection even with an object having a very small arrangement pitch of electrodes to be connected, a manufacturing method thereof, and a product using the anisotropic conductive sheet. The anisotropic conductive sheet includes: an insulation sheet made of elastic polymer material having a plurality of conductive path forming through holes extending in the thickness direction; and a conductive path elements arranged as a unitary block with the respective conductive path forming through holes of the insulation sheet. An exposure mask used has a plurality of light transmitting through holes each having a diameter reduced from a first surface toward a second surface and formed according to a pattern corresponding to the pattern of the conductive path elements to be formed. The conductive path forming through holes are formed by applying a laser beam via the light transmitting through holes from the second surface of the exposure mask.

Description

The anisotropic conductive sheet with and manufacture method and its application products

Technical field

The anisotropic conductive sheet that the present invention relates to for example when the electric-examination of carrying out circuit arrangements such as semiconductor integrated circuit is looked into, can be used as connector and use well with and manufacture method and its application products.

Background technology

The anisotropic conductive flexure strip, it is the sheet that only shows conductivity along thickness direction, or have at the sheet that only shows the pressurization conductivity conductive part of conductivity along thickness direction when pressurized along thickness direction, have without soldering or the chimeric device that waits of machinery and just can reach electrical connection closely, thereby absorb the impact of machinery or the speciality that distortion can be carried out soft connection, therefore utilize such speciality, for example at electronic computer, the electronic type digital clock, Electrofax, in the fields such as computer keyboard, can be used as and be used to reach and circuit arrangement, for example tellite and no lead wire circuit chip carrier, the connector of electrical connection each other such as liquid crystal panel and being extensive use of.

In addition, in the electric-examination of circuit arrangements such as tellite and semiconductor integrated circuit is looked into, in order to reach the electrode that is examined that is formed on as on the one side of the circuit arrangement of checking object, check with the lip-deep inspection of circuit substrate being connected with being formed on the electricity of electrode, the inspection that is examined electrode zone and inspection usefulness circuit substrate in electric circuit component is used between the electrode zone, fills the operation of anisotropic conductive flexure strip.

In the past, as such anisotropic conductive flexure strip, known have a variety of structures, for example the spy at patent documentation 1 opens in the clear 51-93393 communique, disclose metallic is evenly dispersed in the elastomer and the anisotropic conductive flexure strip that obtains (below, be referred to as " decentralized anisotropic conductive flexure strip ".), in addition, spy at patent documentation 2 opens in the clear 53-147772 communique, disclose by making conductivity magnetic particle be distributed in the elastomer unevenly, formation is along a plurality of conductions road formation portion of thickness direction extension, with with the insulation division of their mutually insulateds and the anisotropic conductive flexure strip that constitutes (below, be referred to as " partially at type anisotropic conductive flexure strip ".), and then, open in the clear 61-250906 communique the spy of patent documentation 3, disclose between the surface of conduction road formation portion and insulation division, formed ladder partially at type anisotropic conductive flexure strip.

And, because partially at type anisotropic conductive flexure strip, according to having formed conduction road formation portion with the figure of the electrode pattern symmetry of the circuit arrangement that will be connected, therefore compare with decentralized anisotropic conductive flexure strip, even if in assortment spacing with respect to the electrode that will connect, being less circuit arrangement of the distance between centers of adjacent electrode etc., also can reaching on the connection this point of interelectrode electricity with higher reliability, is favourable.

This partially in an example of the method for type anisotropic conductive flexure strip as making, for example, known have a following method.

As shown in figure 45, prepare patrix 80 and the counterdie 85 paired with it, liner 84 via the frame shape disposes in mode respect to one another, thereby form the metal pattern of inner chamber below patrix 80 and between above the counterdie 85, the sheet moulding material is provided in this metal pattern and forms sheet moulding material layer 90, wherein the sheet moulding material is to make the electroconductive particle that shows magnetic be dispersed in the polymer substance that forms elastomer by cured to form in the material and form.At this, the electroconductive particle P that sheet moulding material layer 90 is contained is the state that is dispersed in this sheet moulding material layer 90.

The patrix 80 of above-mentioned metal pattern and counterdie 85, respectively on the

substrate

81,86 that for example constitutes by the ferromagnetism body, has forming face, a plurality of

ferromagnetism body floor

82,87 that this forming face is formed by the corresponding figure of figure that forms portion according to the conduction road with the anisotropic conductive flexure strip that will be shaped, constitute with the

nonmagnetic material layer

83,88 that on the position that forms beyond the position of these

ferromagnetism body layers

82,87, forms, and corresponding

ferromagnetism body layer

82,87 disposes in mode respect to one another.

And, as shown in figure 46, by on patrix 80 and counterdie 85 below for example dispose a pair of electromagnet (figure do not show) thus make its action, on sheet moulding material layer 90, part between the ferromagnetism body layer 87 of the ferromagnetism body layer 82 of patrix 80 and corresponding with it counterdie 85, promptly constitute on the part of conduction road formation portion, intensity works greater than the magnetic field of in addition the part thickness direction along this moulding material layer 90.Its result, be dispersed in the electroconductive particle P in the sheet moulding material layer 90, concentrate on this sheet moulding material layer 90, effect has part than the magnetic field of hard intensity, be the part between the ferromagnetism body layer 87 of the ferromagnetism body layer 82 of patrix 80 and corresponding with it counterdie 85, and then be orientated in the mode of arranging along thickness direction.Then, under this state, by carrying out the cured of sheet moulding material layer 90, as shown in figure 47, manufacturing by a plurality of conductions road of being contained under the state that is orientated in the mode of arranging at electroconductive particle P along thickness direction form portion 91 and with these conduction roads form that the insulation division 92 of portion's 91 mutually insulateds constitutes partially at type anisotropic conductive flexure strip 93.

In addition, in order further to reach reliably and to be connected being electrically connected of object, the formation that forms under the outstanding state of conduction road formation portion has been proposed, as making this inclined to one side method at type anisotropic conductive flexure strip, for example, as shown in figure 48, use is in the forming face of patrix 80 that disposes in mode respect to one another via the liner 84 of frame shape and counterdie 85, ferromagnetism body layer 82, on the position at 87 places, be formed with the recess 82A that is used on the anisotropic conductive flexure strip, forming protuberance, the metal pattern of 87A, by with above-mentioned same method, in metal pattern, form sheet moulding material layer 90, as shown in figure 49, by on patrix 80 and counterdie 85 below for example a pair of electromagnet of configuration (figure do not show) thus make its action, make the electroconductive particle P that is dispersed in the sheet moulding material layer 90, concentrate on the part between the ferromagnetism body layer 87 of the ferromagnetism body layer 82 of patrix 80 and corresponding with it counterdie 85, and then it is orientated in the mode of arranging along thickness direction, under this state, by carrying out the cured of sheet moulding material layer 90, as shown in figure 50, manufacturing forms portion 91 by a plurality of conductions road of being contained under the state that is orientated in the mode of arranging along thickness direction at electroconductive particle P and these conduction roads is formed insulation division 92 formations of portion's 91 mutually insulateds, and conduction road formation portion 91 outstanding from the surface partially at type anisotropic conductive flexure strip 93.In Figure 48 and Figure 49,81 and 86, be the substrate that constitutes by the ferromagnetism body, 83 and 88, be the nonmagnetic material layer that on the position beyond the position that forms

ferromagnetism body layer

82,87, forms.

But, in above-mentioned manufacture method, in order between adjacent conductive road formation portion 91, to guarantee enough insulating properties, the width of insulation division 92, that is, the separating distance b between the adjacent conductive road formation portion 91 must be made as for example more than or equal to 50 μ m.Thereby, under the situation of the minimum product of the disposition interval p that makes conduction road formation portion 91, owing to must guarantee to conduct electricity insulating properties between the road formation portion 91, therefore there is the problem of the anisotropic conductive flexure strip that is difficult to obtain possessing conduction road formation portion 91 with enough conductive characteristics and enough intensity by the width that dwindles conduction road formation portion 91 self.

On the other hand, also know following method, promptly for example on the insulating properties sheet matrix material that constitutes by elastomer, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, form with in the through hole on this conduction road, fill so that thereby electroconductive particle is dispersed in the polymer substance that constitutes elastomer that is cured and form the conduction circuit component material that the mode in the material constitutes, and by carrying out the cured of this conduction circuit component with material, manufacturing will conduct electricity that circuit component is formed on the insulating properties lamellar body and constitute partially at type anisotropic conductive flexure strip (for example, with reference to patent documentation 4.)。

In the manufacture method of such anisotropic conductive flexure strip, form the method for using through hole as on insulating properties sheet matrix material, forming the conduction road, be formed on suitable locational reason from can a plurality of conductions road being formed with through hole with higher productivity, can the following method of illustration, promptly use figure to form the exposure mask of printing opacity with through hole according to the conduction circuit component that will form, by via the printing opacity of this exposure mask through hole irradiating laser, forming a plurality of conductions road with the method for through hole (for example forms, with reference to patent documentation 5), with on the thin metal layer on the one side that is formed on insulating properties sheet matrix material, figure according to the conduction circuit component that will form forms the printing opacity through hole, and pass through via the printing opacity of this thin metal layer through hole irradiating laser, forming the formation of a plurality of conductions road uses the method for through hole (for example, with reference to patent documentation 4, patent documentation 6) etc.

Exposure mask; for example; in a series of operation of making the anisotropic conductive flexure strip; the mask basis material is configured in operation with on the objective table; on the one side of this mask basis material, form the resist layer that according to the rules figure has formed the figure hole then; by this mask basis material etch processes has been formed printing opacity with through hole after; resist layer obtains by peeling off; from the easiness of operation and the viewpoint of the raising of operating efficiency; the exposure mask that obtains is moved with objective table is parallel from operation; and the mode of joining with the one side of the another side of exposure mask and insulating properties sheet matrix material disposes; thereby when the formation printing opacity is used through hole; will be as the face that has formed resist layer; the one side of exposure mask is used (for example, with reference to Figure 51 as coplanar laser illumination.)。In addition, as the method for the printing opacity that forms exposure mask with through hole, the methods such as processing of for example holing, but from being difficult to form printing opacity with reasons such as through holes with fine pitch, preferably utilize by above-mentioned etch processes and form the method for printing opacity with through hole.

Patent documentation 1: the spy opens clear 51-093393 communique

Patent documentation 2: the spy opens clear 53-147772 communique

Patent documentation 3: the spy opens clear 61-250906 communique

Patent documentation 4: the spy opens flat 11-354178 communique

Patent documentation 5: the spy opens flat 09-199208 communique

Patent documentation 6: the spy opens the 2002-196018 communique

So, in recent years, miniaturization or high density distributionization along with electrical article, circuit arrangements such as their employed integrated circuit (IC) apparatus, exist number of electrodes to increase, the assortment spacing of electrode further diminishes and the tendency of densification, obtain with above-mentioned exposure mask partially in type anisotropic conductive flexure strip, in order to reach enough being electrically connected with such circuit arrangement, requirement will be conducted electricity the disposition interval granular of circuit component.

But, under situation, have following problem with the trickle anisotropic conductive sheet of the disposition interval of above-mentioned method manufacturing conduction road formation portion.

Promptly; shown in Figure 51; the printing opacity of the exposure mask 95 that forms with etching method is with through hole 96; because its surface portion of mask basis material is compared with inside; be exposed in the etching solution for a long time; therefore become the shape that diameter diminishes to another side 95B gradually from one side 95A (resist layer formation face) inevitably; taper for example; because the part of laser (representing with chain-dotted line in Figure 51) is by the internal face 96A diffuse reflection of taper; therefore on insulating properties sheet matrix material 97; formation is along with the conduction road that becomes the shape in big footpath from its one side 97A to another side 97B forms with through hole 98; its result; the anisotropic conductive sheet that obtains; for example become on the another side side part of insulating properties lamellar body each conduction circuit component is connected to each other and form, be used under the galvanoscopic situation of circuit arrangement the short circuit each other of conduction circuit component; as a result, existence can not be reached the problem of required electrical connection reliably.

In addition, shown in Figure 52, under the bigger situation of the thickness of insulating properties sheet matrix material 97, in wall thickness by the insulating properties sheet matrix material 97 that is formed by the laser of the irreflexive part of internal face 96A of the taper of printing opacity usefulness through hole 96, formation has the conduction road formation through hole 98 that size directly becomes the shape of the maximum very big 98A of portion, its result, the anisotropic conductive sheet that obtains, though on its one side and another side, be formed with each conduction circuit component with the state of mutually insulated, but in the wall thickness of insulating properties lamellar body, become each very big 98A of portion connected to each other and form, as a result, can not reach required electrical connection reliably.

Such problem, in patent documentation 4 and patent documentation 6 disclosed technology, promptly, on the thin metal layer on the one side that is located at insulating properties sheet matrix material integratedly, form the printing opacity through hole, thereby and use the through hole irradiating laser to form the formation of conduction road via this printing opacity and use under the situation of through hole, also can occur, particularly, more remarkable during smaller or equal to the anisotropic conductive sheet of 200 μ m at the disposition interval of making the conduction circuit component.

In addition, in above-mentioned method, when being manufactured on the anisotropic conductive sheet that forms under the conduction circuit component state outstanding from the two sides of insulating properties lamellar body, following method is arranged, promptly for example use the mask used for printing that has formed opening according to the corresponding figure of configuration figure with the conduction circuit component, filled conductive circuit component material in the opening of mask used for printing, carry out the cured of this conduction circuit component with material, afterwards, by peeling off and remove the method for mask used for printing formation ledge, but in the method, the damaged situation of ledge is arranged, and have the problem that can not form conduction circuit component reliably with required conductivity characteristic.

Summary of the invention

The present invention, in view of above problem is developed into, its 1st purpose even if be the connected body that provides minimum with respect to the disposition interval of the electrode that will connect, also can be reached the anisotropic conductive sheet of required electrical connection reliably.

The 2nd purpose of the present invention can be made the connected body minimum with respect to the disposition interval of the electrode that will connect favourable and reliably even if be to provide, and also can reach the method for the anisotropic conductive sheet of required electrical connection reliably.

The 3rd purpose of the present invention, be to provide and possess above-mentioned anisotropic conductive sheet, and the spacing of the electrode of the circuit arrangement of Lian Jieing is less if any, also can reach the anisotropic conductive connector of required electrical connection reliably to this circuit arrangement, and the method that can make this anisotropic conductive connector favourable and reliably.

The 4th purpose of the present invention, be to provide and possess above-mentioned anisotropic conductive sheet, even and if less as the spacing that is examined electrode of the circuit arrangement of checking object, with respect to the also higher channel check detector of the connection reliability that respectively is examined electrode of this circuit arrangement.

The 5th purpose of the present invention, be to provide and possess above-mentioned anisotropic conductive sheet, even and if less as the spacing that is examined electrode of the circuit arrangement of checking object, also can reach the electric-examination of the circuit arrangement of required electrical connection to this circuit arrangement and look into device.

Anisotropic conductive sheet of the present invention, it is to have to have formed respectively to form along a plurality of conductions road that thickness direction extends with insulating properties lamellar body through hole, that be made of elastomer, each conduction road that is located at this insulating properties lamellar body integratedly forms the anisotropic conductive sheet of using the conduction circuit component in the through hole, it is characterized in that:

The conduction road of described insulating properties lamellar body forms uses through hole, be by use according to the corresponding figure of figure of the conduction circuit component that will form, formed a plurality of printing opacities that diameter diminishes to another side gradually from one side exposure mask respectively, and formed with the through hole irradiating laser from the another side side of this exposure mask printing opacity via this exposure mask with through holes.

In anisotropic conductive sheet of the present invention, preferably conduct electricity circuit component, be that the electroconductive particle that will show magnetic contains with the state along the thickness direction orientation and forms.

In addition, in anisotropic conductive sheet of the present invention, the elastomer that preferably constitutes the insulating properties lamellar body is a silicone rubber.

And then, in anisotropic conductive sheet of the present invention, the circuit component that preferably will conduct electricity is made as the formation that has from the outstanding ledge of at least one face of insulating properties lamellar body, the conduction circuit component, from the outstanding side-prominent part of one side of a face of insulating properties lamellar body, can be made as it and be shaped as diameter from the cardinal extremity to the front end and the taper that diminishes gradually.

Anisotropic conductive sheet volume manufacture method of the present invention is characterized in that having the 1st operation and the 2nd operation, wherein:

The 1st operation be prepare according to the corresponding figure of figure of the conduction circuit component that will form, formed respectively that diameter diminishes to another side gradually from one side, use the exposure mask of through hole along a plurality of printing opacities of thickness direction extension, with this exposure mask, the mode of joining with the one side of this exposure mask and the one side of the insulating properties sheet matrix material that constitutes by elastomer, be configured on the one side of this insulating properties sheet matrix material, by from the another side side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, form and have the insulating properties lamellar body that forms along a plurality of conductions road that thickness direction extends respectively with through hole;

The 2nd operation is to form with in the through hole by each conduction road at this insulating properties lamellar body, filling is dispersed in by the polymer substance that becomes elastomer after solidifying electroconductive particle and forms the conduction circuit component material that forms in the material, form with forming conduction circuit component material layer in the through hole on each conduction road of insulating properties lamellar body, by carrying out the cured of this conduction circuit component, form the conduction circuit component that is located at integratedly on this insulating properties lamellar body with material layer.

In the manufacture method of anisotropic conductive sheet of the present invention, preferably, use the particle that shows magnetic as conducting electricity circuit component with the electroconductive particle in the material;

Work along the thickness direction that is formed on the conduction circuit component material layer on the insulating properties lamellar body by making magnetic field, make and be dispersed in the conduction circuit component is used material layer along this conduction circuit component with the electroconductive particle in the material layer thickness direction orientation, under this state, by conducting electricity circuit component, form the conduction circuit component with the cured of material layer.

In addition, preferably by a plurality of printing opacities through hole irradiating laser, form a plurality of conductions road formation through hole together via exposure mask.

And then, preferably by under the state on the one side that exposure mask is configured in the insulating properties lamellar body, directly described conduction circuit component is used in the through hole with the printing opacity of through hole and exposure mask with the conduction road formation that material is filled in the insulating properties lamellar body, thereby form conduction circuit component material layer, and carry out this conduction circuit component cured with material layer, it is outstanding and be that diameter is from the cardinal extremity to the front end and the conduction circuit component of the side-prominent part of one side of the shape that diminishes gradually to foreign side to form the one side that has from the insulating properties lamellar body.

In addition, the manufacture method of anisotropic conductive sheet of the present invention, it is a method of making the anisotropic conductive sheet, the anisotropic conductive sheet has to have formed respectively and forms along a plurality of conductions road that thickness direction extends with insulating properties lamellar body through hole, that be made of elastomer, with form with the conduction circuit component in through hole with each conduction road that is located at this insulating properties lamellar body from the outstanding state of at least one face of this insulating properties lamellar body, integratedly, it is characterized in that:

Preparation according to the corresponding figure of figure of the conduction circuit component that will form, formed the exposure mask of a plurality of printing opacities that diameter diminishes to another side gradually from one side, that extend along thickness direction respectively, and had following operation, that is: with through holes

Be produced on and formed ledge at least one face of the insulating properties sheet matrix material that constitutes by elastomer and form duplexer with resin bed, the mode that described exposure mask is joined with the one side of this exposure mask and the one side of this duplexer is configured on the one side of this duplexer, by from the another side side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, on the insulating properties sheet matrix material of duplexer, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, simultaneously on the ledge of duplexer forms with resin bed, form respectively and form a plurality of ledges formation through holes that extend along thickness direction continuously with through hole with each conduction road, thus, at least one face that is formed on the insulating properties lamellar body is provided with ledge and forms the once-combined body that forms with resin bed;

Form the inner space of using through hole by the conduction road that comprises the insulating properties lamellar body at once-combined body, and the ledge that ledge forms with resin bed forms the conduction circuit component shaping of the inner space of using through hole with in the space, filling becomes the conduction circuit component material that forms in the polymer substance formation material of elastomer after making electroconductive particle be dispersed in curing, be shaped with forming conduction circuit component material layer in the space at the conduction circuit component, by carrying out the cured of this conduction circuit component with material layer, form the conduction circuit component, thus, formation is shaped the conduction circuit component that a plurality of conduction circuit components are located at once-combined body integratedly with the secondary complex that forms in the space;

By dissolving and remove the ledge formation resin bed of secondary complex, form from the ledge of the outstanding conduction circuit component of at least one face of insulating properties lamellar body.

In the manufacture method of anisotropic conductive sheet of the present invention, preferably as the elastomer that constitutes the insulating properties lamellar body, use silicone rubber, form the resin bed formation material of using resin bed as constituting ledge, use polyvinyl alcohol, at this moment, as polyvinyl alcohol, preferably using average degree of polymerization is 100～5000.

In addition, best thickness with 5～100 μ m forms ledge formation resin bed.

In addition, in the manufacture method of anisotropic conductive sheet of the present invention, preferably, use the particle that shows magnetic as conducting electricity circuit component with the electroconductive particle in the material;

And then, preferably by a plurality of printing opacities through hole irradiating laser, form a plurality of conductions road formation through hole together via exposure mask.

In addition, preferably be used in and formed ledge on the another side of insulating properties sheet matrix material and form duplexer, be formed on and on the another side of insulating properties lamellar body ledge be set and form the once-combined body that forms with resin bed with resin bed;

Under the state on the one side of the insulating properties lamellar body that exposure mask is configured in once-combined body, directly with described conduction circuit component material, being filled in the printing opacity that comprises exposure mask uses the conduction road formation of the inner space of through hole, insulating properties lamellar body to use the inner space of through hole and ledge formation to use the conduction circuit component shaping of the inner space of through hole to use in the space with the ledge formation of resin bed, thereby form conduction circuit component material layer, by carrying out the cured of this conduction circuit component, form the conduction circuit component with material layer;

By removing exposure mask, one end of conduction circuit component is exposed, thereby form diameter from the cardinal extremity to the front end and the side-prominent part of the one side of the shape that diminishes gradually, by dissolving and removing ledge formation resin bed, form simultaneously from the outstanding side-prominent part of another side of the another side of insulating properties lamellar body.

In addition, in the manufacture method of anisotropic conductive sheet of the present invention, preferably laser is produced by the carbon dioxide impulse laser unit.

And then, in the manufacture method of anisotropic conductive sheet of the present invention, preferably as exposure mask, used thickness is 5～100 μ m, in addition, preferably use the opening footpath r1 of one side, with the relative aperture r2/r1 that opens of the opening of another side footpath r2 be 0.2～0.98, the better again relative aperture r2/r1 that opens is 0.2～0.95, is more preferably out relative aperture r2/r1 and is 0.3～0.9, and then, preferably use to constitute by metal.

In this manual, so-called " printing opacity is used the opening footpath of through hole " is under the situation of circle at the section shape of opening, represents the size of its diameter, be under other the situation of shape at the section shape of opening, the printing opacity that expression is adjacent to each other is with the size of the width of arrays of openings direction.

Anisotropic conductive connector of the present invention is characterized in that, the above-mentioned anisotropic conductive sheet that possesses frame plate with opening and dispose and supported by the opening edge portion of this frame plate in the mode of the opening that stops up this frame plate.

Anisotropic conductive connector of the present invention, it uses in order with the state of wafer the electric-examination that is formed on a plurality of integrated circuits on the wafer and carries out this integrated circuit respectively to be looked into, and it is characterized in that:

Possess and be formed on the frame plate that has formed a plurality of openings as the zone all integrated circuits on the wafer of checking object, that configuration is examined electrode accordingly, the a plurality of anisotropic conductive sheets that dispose in the mode of the opening that stops up described frame plate respectively and supported by the opening edge portion of this frame plate, described anisotropic conductive sheet is above-mentioned anisotropic conductive sheet.

Possess with from being formed on the frame plate that has formed a plurality of openings as zone a plurality of integrated circuits of selecting the integrated circuit on the wafer of checking object, that configuration is examined electrode accordingly, the a plurality of anisotropic conductive sheets that dispose in the mode of the opening that stops up described frame plate respectively and supported by the opening edge portion of this frame plate, described anisotropic conductive sheet is above-mentioned anisotropic conductive sheet.

The manufacture method of anisotropic conductive connector of the present invention is characterized in that, has the 1st operation, the 2nd operation and the 3rd operation, wherein:

The 1st operation is to prepare to have formed the frame plate of opening, the opening of this frame plate with and circumference, form the polymer substance that becomes elastomer after solidifying and form material layer, form the cured of material layer by carrying out this polymer substance, form opening edge portion by this frame plate and support the once-combined body that the mode insulating properties sheet matrix material that form, that be made of elastomer with the opening that stops up frame plate forms;

The 2nd operation is by the one side side of a plurality of printing opacities that diameter diminishes to another side gradually from one side from having formed respectively according to the corresponding figure of figure with the conduction circuit component that will form, that extend along thickness direction with the exposure mask of through holes, via the printing opacity of this exposure mask through hole irradiating laser, form opening edge portion by this frame plate support that mode with the opening that stops up frame plate forms, formed and formed the secondary complex that the insulating properties lamellar body with through hole forms along a plurality of conductions road that thickness direction extends respectively;

The 3rd operation is to form with in the through hole by each conduction road at this secondary complex, filling becomes the conduction circuit component material that forms in the polymer substance formation material of elastomer after making electroconductive particle be dispersed in curing, form conduction circuit component material layer, by carrying out this conduction circuit component cured with material layer, formation will conduct electricity conduction circuit component formation that circuit component is located at the insulating properties lamellar body integratedly with the anisotropic conductive sheet that forms in the through hole.

The manufacture method of anisotropic conductive connector of the present invention, it is characterized in that, prepare be formed on as all integrated circuits on the wafer of checking object, configuration be examined electrode the zone or with integrated circuit on being formed on wafer zone a plurality of integrated circuits of selecting, that configuration is examined electrode formed the frame plate of a plurality of openings that extend along thickness direction accordingly respectively, and have the 1st operation, the 2nd operation and the 3rd operation, wherein:

The 1st operation be the opening of this frame plate with and circumference, form the polymer substance that becomes elastomer after solidifying and form material layer, form the cured of material layer by carrying out this polymer substance, form opening edge portion by this frame plate and support respectively the once-combined body that the mode insulating properties sheet matrix material that form, that be made of elastomer with the opening that stops up frame plate forms;

The 2nd operation is by the another side side of a plurality of printing opacities that diameter diminishes to another side gradually from one side from having formed respectively according to the corresponding figure of figure with the conduction circuit component that will form, that extend along thickness direction with the exposure mask of through holes, via the printing opacity of this exposure mask through hole irradiating laser, form opening edge portion by this frame plate and support to have formed respectively and form the secondary complex that a plurality of insulating properties lamellar bodies with through hole form along a plurality of conductions road that thickness direction extends;

In the manufacture method of anisotropic conductive connector of the present invention, preferably, use the particle that shows magnetic as conducting electricity circuit component with the electroconductive particle in the material;

Work along the thickness direction that is formed on the conduction circuit component material layer on the insulating properties lamellar body by making magnetic field, make and be dispersed in the conduction circuit component is used material along this conduction circuit component with the electroconductive particle in the material layer thickness direction orientation, under this state, by conducting electricity circuit component with the cured of material layer, formation will conduct electricity conduction circuit component formation that circuit component is located at the insulating properties lamellar body integratedly with the anisotropic conductive sheet that forms in the through hole.

In addition, in the manufacture method of anisotropic conductive connector of the present invention, be preferably on the one side of flat supporting bracket, the coating polymer substance forms material, this frame plate is left the one side of supporting bracket with its another side and relative mode disposes, simultaneously exposure mask is simultaneously left the one side of this frame plate with it and relative mode disposes, by being pressurizeed in their overlapping backs, inner space at the opening that comprises frame plate, the space between frame plate and the exposure mask and the printing opacity of exposure mask are used in the space with the shaping of the inner space of through hole, the polymer substance that forms the purpose form forms material layer, form the cured of material layer by carrying out this polymer substance, formation will have a plurality of insulating properties sheet matrix materials that ledge forms part and dispose in the mode of the opening that stops up frame plate, and support the once-combined body that the circumference of this insulating properties sheet matrix material forms by the opening edge portion of frame plate;

By from the another side side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, form opening edge portion by this frame plate and be supported on each ledge and form to have formed on the part and form the secondary complex that a plurality of insulating properties lamellar bodies with through hole form along the conduction road of thickness direction extension;

The conduction road that forms part by each ledge at this secondary complex forms with in the through hole, filling becomes the conduction circuit component material that forms in the polymer substance formation material of elastomer after making electroconductive particle be dispersed in curing, form conduction circuit component material layer, by carrying out this conduction circuit component cured with material layer, formation will have the conduction circuit component that is located at the insulating properties lamellar body integratedly from the conduction circuit component of the outstanding side-prominent part of one side of the one side of insulating properties lamellar body and form with the anisotropic conductive sheet that forms in the through hole.

In addition, the manufacture method of anisotropic conductive connector of the present invention, it is a method of making the anisotropic conductive connector, the anisotropic conductive connector has the frame plate that possesses opening, dispose with mode with the opening that stops up this frame plate, and the anisotropic conductive sheet that supports by the opening edge portion of this frame plate, and this anisotropic conductive sheet is to be formed with a plurality of conduction circuit components that extend along thickness direction respectively from the outstanding state of at least one face of the insulating properties sheet matrix material that is made of elastomer, it is characterized in that possessing following operation:

Preparation has formed the supporting bracket of opening, the opening of this supporting bracket with and opening edge portion, form the polymer substance that becomes elastomer after solidifying and form material layer, by carrying out the cured of this polymer substance formation material layer, the opening of frame plate with and opening edge portion, the insulating properties sheet matrix material that formation is made of elastomer, and be produced on and formed ledge at least one face of this insulating properties sheet matrix material and form duplexer with resin bed;

On the one side of this duplexer, to form that diameter diminishes to another side gradually from one side according to the corresponding figure of figure respectively with the conduction circuit component that will form, use the exposure mask of through hole along a plurality of printing opacities of thickness direction extension, the mode of joining with the one side of this exposure mask and the one side of this duplexer disposes, by from the another side side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, on the insulating properties sheet matrix material of duplexer, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, simultaneously on the ledge of duplexer forms with resin bed, form respectively and form a plurality of ledges formation through holes that extend along thickness direction continuously with through hole with each conduction road, thus, be formed on the opening that is located at frame plate with and opening edge portion at least one face of insulating properties lamellar body on ledge be set form the once-combined body that forms with resin bed;

The manufacture method of anisotropic conductive connector of the present invention, it is characterized in that, prepare be formed on as all integrated circuits on the wafer of checking object, configuration be examined electrode the zone or with integrated circuit on being formed on wafer zone a plurality of integrated circuits of selecting, that configuration is examined electrode formed the frame plate of a plurality of openings that extend along thickness direction accordingly respectively, and have following operation:

Each opening of this frame plate with and opening edge portion, form the polymer substance that becomes elastomer after solidifying and form material layer, by carrying out the cured of this polymer substance formation material layer, making is supported insulating properties sheet matrix material that mode with the opening that stops up frame plate forms, that be made of elastomer by the opening edge portion of this frame plate, and at least one face of this insulating properties sheet matrix material, formed ledge and formed the duplexer of using resin bed;

To form that diameter diminishes to another side gradually from one side according to the corresponding figure of figure respectively with the conduction circuit component that will form, use the exposure mask of through hole along a plurality of printing opacities of thickness direction extension, the mode of joining with the one side of this exposure mask and the one side of this duplexer disposes, by from the another side side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, on the insulating properties sheet matrix material of duplexer, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, simultaneously on the ledge of duplexer forms with resin bed, form respectively and form a plurality of ledges formation through holes that extend along thickness direction continuously with through hole with each conduction road, thus, be formed on the opening that is located at frame plate with and opening edge portion at least one face of insulating properties lamellar body on ledge be set form the once-combined body that forms with resin bed;

In the manufacture method of anisotropic conductive connector of the present invention, preferably as the elastomer that constitutes the insulating properties lamellar body, use silicone rubber, form the resin bed formation material of using resin bed as constituting ledge, use polyvinyl alcohol, at this moment, as polyvinyl alcohol, preferably using average degree of polymerization is 100～5000.

In addition, best thickness with 5～100 μ m forms ledge formation resin bed.

In addition, in the manufacture method of anisotropic conductive connector of the present invention, preferably, use the particle that shows magnetic as conducting electricity circuit component with the electroconductive particle in the material;

Work along the thickness direction that is formed on the conduction circuit component material layer on the insulating properties lamellar body by making magnetic field, make and be dispersed in the conduction circuit component is used material layer along this conduction circuit component with the electroconductive particle in the material layer thickness direction orientation, under this state, by conducting electricity circuit component, form the conduction circuit component that is located at the insulating properties lamellar body integratedly and form with the conduction circuit component in the through hole with the cured of material layer.

And then, in the manufacture method of anisotropic conductive connector of the present invention, preferably be produced on and formed ledge on the one side of flat supporting bracket and form stacking material with resin bed, the coating polymer substance forms material on the one side of the one side of this stacking material or exposure mask or on this two sides, thereby form polymer substance and form material layer, frame plate is left the one side of described stacking material with its another side and relative mode disposes, simultaneously exposure mask is simultaneously left the one side of this frame plate with it and relative mode disposes, by being pressurizeed in their overlapping backs, inner space at the opening that comprises frame plate, the space between frame plate and the exposure mask and the printing opacity of exposure mask are used in the space with the shaping of the inner space of through hole, the polymer substance that forms the purpose form forms material layer, by carrying out the cured of this polymer substance formation material layer, form insulating properties sheet matrix material;

By from the another side side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, on insulating properties sheet matrix material, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, simultaneously on ledge forms with resin bed, form respectively and form a plurality of ledges formation through holes that extend along thickness direction continuously with through hole with each conduction road, thus, be formed on the opening that is located at frame plate with and opening edge portion on the another side of insulating properties lamellar body on ledge be set form the once-combined body that forms with resin bed;

With described conduction circuit component material, be filled in the conduction road that comprises the insulating properties lamellar body and form the inner space of using through hole, and the ledge that ledge forms with resin bed forms the conduction circuit component shaping of the inner space of using through hole with in the space, thereby form conduction circuit component material layer, by carrying out the cured of this conduction circuit component, form the conduction circuit component with material layer;

By removing exposure mask, one end of conduction circuit component is exposed, thereby form diameter from the cardinal extremity to the front end and the side-prominent part of the one side of the shape that diminishes gradually, by dissolving and removing ledge formation resin bed, form simultaneously from the outstanding side-prominent part of another side of the another side of insulating properties lamellar body.At this moment, as supporting bracket, preferably use with the identical material of frame plate.

And then in the manufacture method of anisotropic conductive connector of the present invention, preferably laser is produced by the carbon dioxide impulse laser unit.

In addition, as exposure mask, preferably used thickness is 5～100 μ m's, in addition, preferably use the opening footpath r1 of one side, with the ratio r2/r1 of the opening of another side footpath r2 be 0.2～0.98, the better again relative aperture r2/r1 that opens is 0.2～0.95, is more preferably out relative aperture r2/r1 and is 0.3～0.9.And then, preferably use to constitute by metal.

Channel check detector of the present invention, it is characterized in that, possess according to the corresponding figure of the figure that is examined electrode as the circuit arrangement of checking object, having formed the inspection of checking electrode from the teeth outwards uses circuit substrate and is configured in this inspection lip-deep, the above-mentioned anisotropic conductive sheet of circuit substrate or above-mentioned anisotropic conductive connector.

Channel check detector of the present invention, it is characterized in that in order to look into and to use being formed on electric-examination that a plurality of integrated circuits on the wafer carry out this integrated circuit under the state of wafer:

Possess according to the corresponding figure of the figure that is examined electrode that is formed on as all integrated circuits on the wafer of checking object, having formed the inspection of checking electrode from the teeth outwards uses circuit substrate and is configured in lip-deep, the above-mentioned anisotropic conductive connector of this inspection with circuit substrate.

Possess according to from being formed on the corresponding figure of the figure that is examined electrode as a plurality of integrated circuits of selecting the integrated circuit on the wafer of checking object, having formed the inspection of checking electrode from the teeth outwards uses circuit substrate and is configured in lip-deep, the above-mentioned anisotropic conductive connector of this inspection with circuit substrate.

Use in the detector in channel check of the present invention, preferably be made as by the insulating properties sheet, with connect this insulating properties sheet along its thickness direction and extend, according to the flaky connector that constitutes with a plurality of electrode assemblies of checking with the corresponding figure configuration of figure of the inspection electrode of circuit substrate, be configured in the formation on the anisotropic conductive connector.

Device is looked in the electric-examination of circuit arrangement of the present invention, it is characterized in that, possesses above-mentioned channel check detector.

According to anisotropic conductive sheet of the present invention, because insulating properties lamellar body, its each conduction road forms and forms with exposure mask with specific method with through hole, therefore the disposition interval of the conduction circuit component that forms if any is less, also can prevent the conduction circuit component situation connected to each other of adjacency reliably, and each can be conducted electricity circuit component and constitute as element independent of each other, with respect to the minimum connected body of the disposition interval of the electrode that will connect, also can reach required electrical connection reliably.

Manufacture method according to anisotropic conductive sheet of the present invention, owing to will form the exposure mask of a plurality of printing opacities of the shape that diameter diminishes to another side gradually from one side respectively with through holes, the mode of joining with its one side and the one side of insulating properties sheet matrix material disposes, and by from the another side side of this exposure mask via a plurality of printing opacities through hole irradiating laser, a plurality of conductions road that formation has been formed respectively along thickness direction extends forms the insulating properties lamellar body of using through hole, the printing opacity that laser is exposed with the another side of mask vertically shines with respect to the one side of insulating properties sheet matrix material with the opening edge restriction of through hole, so can be on the desired position, the formation of conduction road is formed in the mode that the thickness direction with respect to the insulating properties lamellar body extends into linearity with through hole, its result, need not dwindle himself width of conduction circuit component, just can form a plurality of conduction circuit components that to guarantee insulating properties each other fully with minimum disposition interval, thereby, even if can obtain the connected body minimum reliably, also can reach the anisotropic conductive sheet of required electrical connection reliably with respect to the disposition interval of the electrode that will connect.

And, as long as, therefore can advantageously make required anisotropic conductive sheet owing to carry out the mode that exposure mask joins with its one side and the one side of insulating properties sheet matrix material is disposed such shirtsleeve operation.

In addition, manufacture method according to anisotropic conductive sheet of the present invention, owing to form part with forming ledge in the through hole by the ledge formation that forms at ledge with resin bed, and dissolving and remove this ledge and form mode with resin bed and form and conduct electricity the ledge of circuit component, even if therefore under the minimum situation of the disposition interval of conduction circuit component, can both form ledge reliably for all conduction circuit components with required conductivity characteristic, thereby, even if can obtain the connected body minimum reliably, also can reach the anisotropic conductive sheet of required electrical connection reliably with higher reliability with respect to the disposition interval of the electrode that will connect.

According to anisotropic conductive connector of the present invention, owing to have an above-mentioned anisotropic conductive sheet, even if the therefore connected body minimum with respect to the disposition interval of the electrode that will connect also can be reached required electrical connection reliably.

Manufacture method according to anisotropic conductive connector of the present invention, even if can be reliably and advantageously make the connected body minimum, also can reach the anisotropic conductive connector of required electrical connection reliably with respect to the disposition interval of the electrode that will connect.

In addition, in the opening of framework and opening edge portion, form the anisotropic conductive sheet reliably, wherein the anisotropic conductive sheet has formed a plurality of conduction circuit components with the ledge that has required conductivity characteristic respectively with the state that can guarantee insulating properties each other fully, with minimum disposition interval, thereby, even if can obtain the connected body minimum reliably, also can reach the anisotropic conductive connector of required electrical connection reliably with higher reliability with respect to the disposition interval of the electrode that will connect.

Check testing fixture in a circuit according to the invention with detector and circuit arrangement, this channel check anisotropic conductive connector that contacts with the connecting object thing of detector, possess the conduction circuit component is located at integratedly and form with exposure mask with specific method, the conduction road of insulating properties lamellar body forms with the anisotropic conductive sheet in the through hole, the anisotropic conductive sheet, even if under the less situation of the disposition interval of conduction circuit component, also can prevent the conduction circuit component situation connected to each other of adjacency reliably, and each can be conducted electricity circuit component and constitute as element independent of each other, even if therefore less, also can reach required electrical connection reliably as the spacing that is examined electrode of the circuit arrangement of checking object.

Description of drawings

Fig. 1 is the explanation profile of summary of formation of showing an example of anisotropic conductive sheet of the present invention.

Fig. 2 is the explanation profile of summary of formation of an example of exposure mask used when show making anisotropic conductive sheet of the present invention.

Fig. 3 is illustrated in the explanation profile that has disposed the state of exposure mask on the one side of insulating properties sheet matrix material.

Fig. 4 shows by form the explanation profile that the conduction road forms the formation of the insulating properties lamellar body that obtains with through hole on insulating properties sheet matrix material.

Fig. 5 is that the conduction road that is illustrated in the insulating properties lamellar body forms inside separately with through hole and formed and conduct electricity the explanation profile of circuit component with the state of material layer.

Fig. 6 be show to form the conduction circuit component with an example of the device of material layer, under the reduced atmosphere on the surface of insulating properties lamellar body coating conduct electricity the explanation profile of circuit component with the state of material.

Fig. 7 be show to form the conduction circuit component with an example of the device of material layer, adjust to atmospheric pressure atmosphere, then the conduction circuit component shaping of insulating properties lamellar body with the space in the filled conductive circuit component with the explanation profile of the state of material.

Fig. 8 shows to make parallel magnetic field act on the explanation profile of conduction circuit component with the state on the material layer.

Fig. 9 is other the explanation profile of summary of formation of example of showing anisotropic conductive sheet of the present invention.

Figure 10 is that the conduction road that is illustrated in the insulating properties lamellar body forms to have formed with the inside separately of through hole with the printing opacity of the inside separately of through hole and exposure mask and conducts electricity the explanation profile of circuit component with the state of material layer.

Figure 11 shows to make parallel magnetic field act on the explanation profile of conduction circuit component with the state on the material layer.

Figure 12 is the explanation profile of summary of showing the formation of other example again of anisotropic conductive sheet of the present invention.

Figure 13 is illustrated in the explanation profile that has disposed the state of exposure mask on the one side of insulating properties sheet matrix material of duplexer.

Figure 14 is illustrated in formation conduction road formation through hole on the insulating properties sheet matrix material, has formed the explanation profile of ledge formation with the state of resin bed simultaneously on ledge forms with resin bed.

Figure 15 is illustrated in each conduction circuit component to be shaped with having formed the explanation profile of conduction circuit component with the state of material layer in the space.

Figure 16 shows to make parallel magnetic field act on the explanation profile of conduction circuit component with the state on the material layer.

Figure 17 shows that the integral body that makes the secondary complex that has formed the side-prominent part of one side is immersed in the explanation profile of the state in the solvent.

Figure 18 is the plane graph of summary of formation of showing an example of anisotropic conductive connector of the present invention.

Figure 19 amplifies the explanation profile of showing with the portion that wants of anisotropic conductive connector shown in Figure 180.

Figure 20 shows the explanation profile that has formed the state that supporting bracket, following side liner, frame plate, upper face side liner and exposure mask position that polymer substance forms material layer dispose with matching between side increased pressure board below and the upper face side increased pressure board.

Figure 21 is the inner space that is illustrated in the opening that comprises frame plate, following side liner and go up the inner space of opening separately of side liner and the printing opacity of exposure mask is shaped with in the space with the anisotropic conductive sheet of the inner space of through hole, the polymer substance that has formed the purpose form forms the explanation profile of the state of material layer.

Figure 22 is an explanation profile of showing the formation of the once-combined body that obtains by the cured of carrying out polymer substance formation material layer.

Figure 23 shows by form the explanation profile that the conduction circuit component forms the formation of the secondary complex that obtains with through hole on once-combined body insulating properties sheet matrix material separately.

Figure 24 is that the conduction road formation that is illustrated in the secondary complex has formed the explanation profile of conduction circuit component with the state of material layer with through hole inside separately.

Figure 25 shows to make parallel magnetic field act on the explanation profile of conduction circuit component with the state on the material layer.

Figure 26 amplifies the explanation profile of showing with other the portion that wants of configuration example of anisotropic conductive connector of the present invention.

Figure 27 shows the explanation profile that has formed the state that stacking material, following side liner, frame plate, upper face side liner, exposure mask and mould release film position that polymer substance forms material layer dispose with matching between side increased pressure board below and the upper face side increased pressure board.

Figure 28 is the inner space that is illustrated in the opening that comprises frame plate, side liner and go up the inner space of opening separately of side liner and the printing opacity of exposure mask is shaped with in the space with the anisotropic conductive sheet of the inner space of through hole down, and the polymer substance that has formed the purpose form forms the explanation profile of the state of material layer.

Figure 29 shows by carrying out polymer substance to form the cured of material layer, formed the opening of frame plate and the explanation profile of the state of the insulating properties sheet matrix material that supported by this opening edge portion.

Figure 30 shows by form the explanation profile that the conduction circuit component forms the formation of the secondary complex that obtains with through hole on the insulating properties sheet matrix material separately of once-combined body.

Figure 31 is that the conduction road that is illustrated in the secondary complex forms inside separately with through hole and formed and conduct electricity the explanation profile of circuit component with the state of material layer.

Figure 32 shows to make parallel magnetic field act on the explanation profile of conduction circuit component with the state on the material layer.

Figure 33 shows that the integral body that makes the secondary complex that has formed the side-prominent part of one side is immersed in the explanation profile of the state in the appropriate solvent.

Figure 34 is the explanation profile of the formation of wanting portion of showing an example of wafer inspector of the present invention.

Figure 35 amplifies the explanation profile of showing with channel check of the present invention with the portion that wants of an example of detector.

Figure 36 amplifies the explanation profile of showing with channel check of the present invention with other the portion that wants of configuration example of detector.

Figure 37 is the explanation profile of the formation of wanting portion of other example again of showing wafer inspector of the present invention.

Figure 38 amplifies the explanation profile of showing with channel check of the present invention with the portion that wants of other configuration example again of detector.

Figure 39 is the explanation profile of the formation of wanting portion of other example again of showing wafer inspector of the present invention.

Figure 40 is a plane graph of showing the formation of the wafer for evaluation sheet of making of embodiment.

Figure 41 is a key diagram of showing the position that is examined electrode zone that is formed on the integrated circuit on the wafer for evaluation sheet.

Figure 42 shows the key diagram that is examined electrode that is formed on the integrated circuit on the wafer for evaluation sheet.

Figure 43 is a plane graph of showing the formation of the frame plate of making of embodiment.

Figure 44 amplifies the key diagram of showing with the part of frame plate shown in Figure 43.

Figure 45 is illustrated in the operation of manufacturing anisotropic conductive sheet in the past, has formed the explanation profile of the state of sheet moulding material layer in metal pattern.

Figure 46 shows that electroconductive particle in the sheet moulding material floor concentrates on the explanation profile of state of the part that becomes conduction road formation portion of this sheet moulding material floor.

Figure 47 is the explanation profile of showing partially at the summary of the formation of an example of type anisotropic conductive sheet.

Figure 48 is illustrated in the operation of manufacturing anisotropic conductive sheet in the past, has formed the explanation profile of the state of sheet moulding material layer in metal pattern.

Figure 49 shows that electroconductive particle in the sheet moulding material floor concentrates on the explanation profile of state of the part that becomes conduction road formation portion of this sheet moulding material floor.

Figure 50 is other the explanation profile of showing partially at type anisotropic conductive sheet of summary of formation of particle.

Figure 51 is illustrated in the operation of manufacturing anisotropic conductive sheet in the past, by a plurality of printing opacities through hole irradiating laser, formed the explanation profile of conduction circuit component formation with the state of through hole via the exposure mask on the one side that is configured in insulating properties sheet matrix material.

Figure 52 is illustrated in the operation of manufacturing anisotropic conductive sheet in the past, used as insulating properties sheet matrix material under the situation of the bigger basis material of thickness, by a plurality of printing opacities through hole irradiating laser via the exposure mask on the one side that is configured in insulating properties sheet matrix material, formed the conduction circuit component and formed explanation profile with the state of through hole.

Label declaration

The once-combined body of 10 anisotropic conductive sheet 10A

10B secondary complex 11 conduction circuit components

11A conduction circuit component conducts electricity the circuit component material layer with material 11B

The side-prominent part of the 12A side-prominent part 12B another side of one side

13 ledges form part 15 insulating properties lamellar bodies

16 insulating properties sheet matrix material 16A molecular substances form material layer

The 16B polymer substance forms material layer 17 conduction roads formation through holes

18 ledges form with resin bed 18A ledge formation through hole

19 duplexers, 20 exposure masks

20A one side 20B another side

21 printing opacities are used through hole 23 chambeies

24 mask used for printing, 25,26 electromagnet

The once-combined body of 30 anisotropic conductive connector 30A

30B secondary complex 30C duplexer

31 frame plate 31A openings

31B air ostium 32 supporting brackets

32A stacking material 33 upper face side liners

Side liner below the 33A opening 34

34A opening 35 upper face side increased pressure boards

Side increased pressure board 37 mould release films below 36

S solvent 40 channel check detectors

50 check with circuit substrate 51 inspection electrodes

52 splicing ears, 53 inner distributions

60 wafers 62 are examined electrode

65 wafer mounting tables, 70 flaky connectors

71 insulating properties sheets, 72 electrode assemblies

74 backplate portions of 73 surface electrode portions

75 L of short circuit portion integrated circuits

A is examined electrode zone 80 patrixes

85 counterdies, 81,86 substrates

82,87

ferromagnetism body layer

82A, 87A recess

83,88 nonmagnetic material layers, 84 liner

90 moulding material floor 91 conduction road formation portions

92 insulation divisions 93 are partially at type anisotropic conductive flexure strip

P electroconductive particle 95 exposure masks

95A one side 95B another side

96 printing opacities through hole 96A internal face

97 insulating properties sheet matrix material 97A one side

97B another side 98 conduction roads form uses through hole

The very big portion of 98A

Embodiment

Below, explain example of the present invention.

(anisotropic conductive sheet)

Fig. 1 is the profile of summary of formation of showing an example of anisotropic conductive sheet of the present invention.

This anisotropic conductive sheet 10, by forming conduction circuit component 11 formations of using through hole 17 interior according to having formed to form along a plurality of conductions road that thickness direction extends separately as the corresponding figure of the figure that is examined electrode that is examined circuit arrangement with insulating properties lamellar body 15 through hole 17, that constitute by elastomer and each conduction road of being located at this insulating properties lamellar body 15 integratedly with the connecting object style.

As the elastomer that constitutes insulating properties lamellar body 15, the stable on heating polymer substance that preferably has cross-linked structure.Polymer substance as the operable curable in order to obtain this cross-linked polymer material forms material, can use various materials, as its concrete example, can enumerate silicone rubber, polybutadiene rubber, natural rubber, polyisoprene rubber, Styrene-Butadiene rubber, acrylonitrile-butadiene copolymer rubber equiconjugate polydiene and their hydrogen additive, styrene-butadiene-diene block copolymer rubber, block copolymer rubber and their hydrogen additives such as styrene-isoprene block copolymer, chlorobutadiene, polyurethane rubber, polyesters rubber, epichlorohydrin rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, soft aqueous epoxy rubber etc.Wherein, from the viewpoint of shaping processability and electrical characteristics, preferably silicone rubber.

As silicone rubber, preferably that aqueous silicone rubber is crosslinked or condensation.Aqueous silicone rubber, can be silicone rubber, the additive type of condensed type silicone rubber, contain vinyl, hydroxyl silicone rubber etc. any one.Specifically, can enumerate dimethyl siloxane raw rubber, ethylene methacrylic radical siloxane raw rubber, methyl phenyl vinyl siloxanes raw rubber etc.

Wherein, the aqueous silicone rubber (vinyl contains dimethyl silicone polymer) that contains vinyl, usually, by under the situation of dimethyl vinyl chlorosilane or the existence of dimethyl vinyl alkoxy silane, make dimethyldichlorosilane or hydrolysis of dimethyl dialkoxy silicane and condensation reaction, for example carry out by continue dissolving-precipitation obtain repeatedly can obtain respectively.

In addition, the aqueous silicone rubber that contains vinyl at two ends, by the annular siloxane anionic polymerization that octamethylcy-clotetrasiloxane is such under the situation about existing at catalyst, as short-stopper, for example use the dimethyl divinylsiloxanes, and suitably select other reaction condition (for example, the amount of the amount of annular siloxane and short-stopper) to obtain.At this, as the catalyst of anionic polymerization, can use alkali such as tetramethyl ammonium hydroxide and hydroxide normal-butyl phosphorus or their silanol salting liquid etc., reaction temperature for example is 80～130 ℃.

Such vinyl contains dimethyl silicone polymer, and preferably (what say is polystyrene standard converted weight mean molecule quantity to its molecular weight Mw.Below identical) be 10000～40000.In addition, from the stable on heating viewpoint of the anisotropic conductive sheet 10 that obtains, preferably (what say is the value that polystyrene standard converted weight average molecular weight Mw standardization polystyrene conversion is counted the ratio Mw/Mn of average molecular mass Mn to molecular weight distributing index.Below identical) smaller or equal to 2.

On the other hand, the aqueous silicone rubber (hydroxyl contains dimethyl silicone polymer) that contains hydroxyl, usually, by under the situation of dimethyl hydroxyl chlorosilane or the existence of dimethyl hydroxyl alkoxy silane, make dimethyldichlorosilane or hydrolysis of dimethyl dialkoxy silicane and condensation reaction, for example carry out by continue dissolving-precipitation obtain repeatedly can obtain respectively.

In addition, by under the situation about existing at catalyst with annular siloxane anionic polymerization, as short-stopper, for example can use dimethyl hydroxyl chlorosilane, methyl dihydroxy chlorosilane or dimethyl hydroxyl alkoxy silane etc., and suitably select other reaction condition (for example, the amount of the amount of annular siloxane and short-stopper) also can obtain.At this, as the catalyst of anionic polymerization, can use alkali such as tetramethyl ammonium hydroxide and hydroxide normal-butyl phosphorus or their silanol salting liquid etc., reaction temperature for example is 80～130 ℃.

Such hydroxyl contains dimethyl silicone polymer, and preferably its molecular weight Mw is 10000～40000.In addition, from the stable on heating viewpoint of the anisotropic conductive sheet 10 that obtains, preferably molecular weight distributing index is smaller or equal to 2.

In the present invention, can use above-mentioned vinyl to contain any one party that dimethyl silicone polymer and hydroxyl contain dimethyl silicone polymer, also can and use both.

In addition, under situation about the anisotropic conductive sheet being used for to the detector test that is formed on the integrated circuit on the wafer or ageing test, as elastomer, preferably use the aqueous silicone rubber of additive type solidfied material (below, be called " silicone rubber solidfied material "), and its compression set of 150 ℃ is more preferably smaller or equal to 8% smaller or equal to 10%, and better again is smaller or equal to 6%.When this compression set surpasses 10%, when being repeatedly used the anisotropic conductive sheet that obtains or under hot environment, reusing, on conduction circuit component 11, produce permanent deformation easily, thus, cause confusion on the chain of electroconductive particle of conduction circuit component 11, its result just is difficult to keep required conductivity characteristic.

At this, the compression set of silicone rubber solidfied material can be by with JIS K6249 being the method mensuration of benchmark.

In addition, as the silicone rubber solidfied material, preferably use its 23 ℃, duroscope A hardness is 10～60, and then be more preferably 15～60, particularly preferably 20～60.When this duroscope A hardness less than 10 the time, when pressurized, insulating properties lamellar body 15 easy excessive deformations just are difficult to keep the required insulating properties between the conduction circuit component 11.On the other hand, when this duroscope A hardness surpasses 60, cause suitable distortion in order to give conduction circuit component 11, therefore the distortion or the breakage of object for example appear checking in the plus-pressure that need be applied by sizable load easily.

In addition, as the silicone rubber solidfied material, using duroscope A hardness under the situation of the material beyond the above-mentioned scope, when being repeatedly used the anisotropic conductive sheet that obtains, on conduction circuit component 11, produce permanent deformation easily, thus, cause confusion on the chain of electroconductive particle of conduction circuit component 11, its result just is difficult to keep required conductivity characteristic.

And then, when the anisotropic conductive sheet is used for ageing test, the silicone rubber solidfied material, preferably its duroscope A hardness of 23 ℃ is 25～40.As the silicone rubber solidfied material, using duroscope A hardness is under the situation of above-mentioned scope material in addition, when the anisotropic conductive sheet that will obtain is used in ageing test repeatedly, on conduction circuit component 11, produce permanent deformation easily, thus, cause confusion on the chain of electroconductive particle of conduction circuit component 11, its result just is difficult to keep required conductivity characteristic.At this, the duroscope A hardness of silicone rubber solidfied material can be by with JIS K6249 being the method mensuration of benchmark.

In addition,, preferably use its tearing strength of 23 ℃ for more than or equal to 8kN/m as the silicone rubber solidfied material, better again more than or equal to 10kN/m, be more preferably more than or equal to 15kN/m, good especially more than or equal to 20kN/m.When this tearing strength during, when causing excessive distortion for the anisotropic conductive sheet, cause the reduction of durability easily less than 8kN/m.

At this, the tearing strength of silicone rubber solidfied material can be by with JIS K 6249 being the method mensuration of benchmark.

In addition, as the aqueous silicone rubber of additive type, though can use solidify by the reaction of vinyl and Si-H key and by containing the be coupled material of the liquid type (one one-tenth somatotype) that this two side's polysiloxanes constitutes of vinyl and Si-H, and by the polysiloxanes that contains vinyl and contain in the material of the two-liquid type (binary type) that the polysiloxanes of Si-H coupling constitutes any one, but preferably use the aqueous silicone rubber of additive type of two-liquid type.

In addition, as the aqueous silicone rubber of additive type, preferably using its viscosity of 23 ℃ is 100～1,250Pas's, that better again is 150～800Pas, that good especially is 250～500Pas.When this viscosity during less than 100Pas, at the conduction circuit component material 11A that is used for obtaining conduction circuit component 11 described later, be easy to generate the precipitation of the electroconductive particle in the aqueous silicone rubber of this additive type, can not obtain good storage stability, in addition, when making parallel magnetic field act on the conduction circuit component, can not be orientated in the mode that electroconductive particle is arranged along thickness direction, and be difficult to form the chain of electroconductive particle with uniform state with material layer 11B.On the other hand, when this viscosity surpasses 1, during 250Pas, at the conduction circuit component material 11A that is used for obtaining conduction circuit component 11 described later, because the conduction circuit component that obtains is the higher material of viscosity with material 11A, therefore the conduction circuit component that just is difficult in insulating properties lamellar body 15 forms with forming conduction circuit component material layer 11B in the through hole 17, in addition, even if make parallel magnetic field act on conduction circuit component material layer 11B, electroconductive particle is moved fully, therefore, be difficult to make electroconductive particle to be orientated in the mode of arranging along thickness direction.

The viscosity of the aqueous silicone rubber of this additive type can be measured with Brookfield viscometer.

Form in the material at polymer substance, it is contained be useful on the curing catalysts that makes this polymer substance form material cured.As such curing catalysts, can use organic peroxide, aliphatic acid azo-compound, hydrosilylation catalysts etc.

As the concrete example of being used as the organic peroxide that curing catalysts uses, can enumerate benzoyl peroxide, two two ring benzoyl peroxide, cumyl peroxide, di-tert-butyl peroxide etc.

As the concrete example of being used as the aliphatic acid azo-compound that curing catalysts uses, can enumerate azodiisobutyronitrile etc.

The concrete example of the material that uses as the catalyst that can be used as hydrosilylation reactions; can enumerate chloroplatinic acid with and the material known such as complex of complex, acetyl group acetic acid esters platinum chelate, cyclic diene hydrocarbon and the platinum of complex, three organic (base) phosphines or the phosphate and the platinum of salt, platinum-contain complex, platinum and 1,3 one divinyl tetramethyl disiloxane of unsaturated group siloxanes complex, vinylsiloxane and platinum.

The use amount of curing catalysts can consider that polymer substance forms the kind of the kind of material, curing catalysts, other cured condition is suitably selected, but common, is 3～15 weight portions with respect to polymer substance formation material 100 weight portions.

Conduction circuit component 11, with in elastomer, the mode that the state that electroconductive particle P is orientated in the mode of arranging along thickness direction is contained constitutes, and the chain by this electroconductive particle P forms the conduction road along thickness direction of this conduction circuit component 11.

This conducts electricity circuit component 11, form with material 11A (with reference to Fig. 6) cured by the conduction circuit component with flowability, this conduction circuit component is electroconductive particle P to be dispersed in be cured and the polymer substance that becomes elastomer forms in the material and constitute with material 11A.

Form material as the conduction circuit component with the employed polymer substance of material 11A, can use as the polymer substance of operable curable forms the illustrative material of material in order to obtain constituting the elastomer of insulating properties lamellar body 15.

With material 11A employed electroconductive particle P,,, preferably use the material of demonstration magnetic as the conduction circuit component from the viewpoint that this electroconductive particle P is moved with material 11A at the conduction circuit component according to method described later.Concrete example as the electroconductive particle P of this demonstration magnetic, can enumerate the particle that iron, nickel, cobalt etc. show the metal of magnetic, the perhaps particle of their alloy, the particle that perhaps contains these metals, perhaps these particles are implemented the material of the plating of conductivity good metal such as gold, silver, palladium, rhodium as core particle, on the surface of this core particle, perhaps on core particle, coated conductivity magnetic and this two side's of conductivity good metal material etc.

Wherein, preferably use nickel particles, and implemented the material of the plating of conductivity good metal such as gold or silver on its surface as core particle.

As the method for coating conducting metal on the surface of core particle, do not limit especially, for example can be undertaken by electroless plating.

As electroconductive particle P, under the situation of the material that constitutes at coating conducting metal on the surface of using at core particle, from obtaining the viewpoint of good electrical conductivity, preferably the clad ratio of the conductive metal of particle surface (with respect to the ratio of the coating area of the conductive metal of the surface area of core particle) is more than or equal to 40%, better again is more than or equal to 45%, and good especially is 47～95%.

In addition, the covering amount of conductive metal, 2.5～50 weight % of core particle preferably, better again is 3～45 weight %, is more preferably 3.5～40 weight %, that good especially is 5～30 weight %.

In addition, the particle of electroconductive particle P footpath, 1～500 μ m preferably, better again is 2～400 μ m, is more preferably 5～300 μ m, that good especially is 10～150 μ m.

In addition, the particle of electroconductive particle P directly distributes (Dw/Dn), and preferably 1～10, better again is 1～7, is more preferably 1～5, good especially is 1～4.

By using the electroconductive particle P that satisfies such condition, the anisotropic conductive sheet 10 that obtains is easy to pressurizing and deformation, in addition, in the conduction circuit component 11 of this anisotropic conductive sheet 10, can obtain enough electrically contacting between electroconductive particle P.

In addition, the shape of electroconductive particle P limits especially, but forms in the material on this point can making it be dispersed in polymer substance at an easy rate, preferably spherical, starriness or the bulk that is made of 2 particles of their cohesions.

In addition, the moisture content of electroconductive particle P is preferably less than and equals 5%, and better again is smaller or equal to 3%, is more preferably smaller or equal to 2%, and good especially is smaller or equal to 1%.By using the electroconductive particle P that satisfies such condition, in manufacture method described later, in the time will conducting electricity circuit component usefulness material layer 11B cured, can prevent or be suppressed at the situation of this conduction circuit component reliably with generation bubble in the material layer 11B.

In addition, can suitably use the material that the surface of electroconductive particle P was handled with couplants such as silane coupling agents.By the surface of handling electroconductive particle P with couplant, the cementability of this electroconductive particle P and elastomer improves, its result, and the anisotropic conductive sheet 10 that obtains, reusable durability is higher.

The use amount of couplant, can in the scope that the conductivity of not giving electroconductive particle P impacts, suitably select, but the clad ratio of the couplant on the surface of best conductivity particle P (with respect to the ratio of the coating area of the couplant of the surface area of electroconductive particle) is the amount more than or equal to 5%, better again, above-mentioned clad ratio is 7～100%, be more preferably 10～100%, 20～100% amount that good especially is.

Electroconductive particle P's is proportional with containing of material with respect to polymer substance, the most handy 10～60% with volume fraction, and 15～50% the ratio of being more preferably is used.When this ratio less than 10% the time, can not obtain the less conduction circuit component 11 of resistance value fully.On the other hand, when this ratio surpassed 60%, it is fragile that the conduction circuit component 11 that obtains is easy to become, and can not obtain the elasticity that needs as conduction circuit component 11.

Use among the material 11A at the conduction circuit component, as required, can make it contain inorganic filling materials such as common Cab-O-sil, colloidal state silicon, silicon dioxide gel, aluminium oxide.By making it contain such inorganic filling material, can guarantee the conduction circuit component that the obtains thixotropy of material 11A, its viscosity improves, and, the dispersion stabilization of electroconductive particle P improves, and the intensity of the conduction circuit component 11 handling and obtain of being cured simultaneously improves.

The use amount of this inorganic filling material limits especially, if but use too much, in manufacture method described later, can hinder moving of the electroconductive particle P that realizes by magnetic field significantly, therefore undesirable.

In this anisotropic conductive sheet 10, constitute the insulating properties lamellar body 15 of this anisotropic conductive sheet 10, by use according to form a plurality of printing opacities that diameter diminishes gradually from one side 20A to another side 20B respectively with the corresponding figure of figure through hole 21, conduction circuit component 11 formed each conduction road form use through hole 17 exposure mask 20 (with reference to Fig. 2.), and form with through hole 21 irradiating lasers via this printing opacity from the another side 20B side of this exposure mask 20.

The conduction road of insulating properties lamellar body 15 forms with through hole 17, the shape that has the inner space of the column that formation vertically extends with respect to the one side of this insulating properties lamellar body 15 and another side respectively, and be set as state independent of each other, that is, being formed on the state that this conduction circuit component keeps on each other the mode of enough insulating properties to separate with the conduction circuit component in the through hole 21.

In this anisotropic conductive sheet 10, thick entirely (forming the thickness of the part of conduction circuit component 11), for example preferably more than or equal to 20 μ m, better again is 50～3000 μ m, that good especially is 100～2000 μ m.For example, if this thickness more than or equal to 50 μ m, can obtain having the anisotropic conductive sheet 10 of enough intensity, on the other hand reliably, if this thickness smaller or equal to 3000 μ m, can obtain having the conduction circuit component 11 of required conductivity characteristic reliably.

Above-mentioned anisotropic conductive sheet 10 for example can be made with following mode.

(the 1st operation)

In the 1st operation, at first, prepare shown in Figure 2, according to the corresponding figure of configuration figure of the conduction circuit component 11 that will form, formed the exposure mask 20 of a plurality of printing opacities that diameter diminishes gradually from one side 20A to another side 20B respectively, that extend along thickness direction with through holes 21.

Then, as shown in Figure 3, with this exposure mask 20, the mode of joining with the one side of the one side 20A of this exposure mask 20 and insulating properties sheet matrix material 16 is configured on the one side of the insulating properties sheet matrix material 16 that is made of elastomer, as shown in Figure 4, for example by from the another side 20B side of this exposure mask 20 via a plurality of printing opacities with through hole 21 irradiating lasers, constitute and formed the insulating properties lamellar body 15 that forms along a plurality of conductions road that thickness direction extends with through hole 17 respectively.

As exposure mask 20; can use and pass through etching method; on the mask basis material that for example constitutes by heat conductivity good metal materials such as copper, according to the corresponding figure of configuration figure of the conduction circuit component 11 that will form, formed a plurality of printing opacities with through holes 21.By using the exposure mask 20 that constitutes by metal, in the manufacturing process of anisotropic conductive sheet described later, when directly polymer substance being formed material forming under the state on the one side that this exposure mask 20 is configured in insulating properties lamellar body 15, prevent or suppress thermal expansion by himself exothermicity of this exposure mask 20, thereby can obtain the anisotropic conductive lamellar body 10 of purpose form reliably with high dimension precision.

In addition, as exposure mask 20, preferably use the opening footpath r1 of the printing opacity of its one side 20A with through hole 21, with the printing opacity of another side 20B for example be 0.2～0.98 with the relative aperture r2/r1 that opens of the opening footpath r2 of through hole 21, better again is 0.2～0.95, and being more preferably out relative aperture r2/r1 is 0.3～0.9.Open the exposure mask that relative aperture r2/r1 satisfies above-mentioned scope by use, the laser that can prevent to shine is formed with through hole 17 thereby can obtain separate a plurality of conductions road reliably by the printing opacity of the exposure mask 20 irreflexive situation of internal face of through hole 21.

In addition, the thickness of exposure mask 20 for example preferably uses 5～100 μ m's.

By using above exposure mask 20, basically, having conduction circuit component 11 described later from the anisotropic conductive sheet of the formation of the outstanding side-prominent part 12A of one side of moon lamellar body 15 one side, can form conduction circuit component 11 reliably with required conductivity characteristic.

Form the laser of using through hole 17 as being used on insulating properties sheet matrix material 16, forming the conduction road, for example can utilize the laser that produces by the carbon dioxide pulse laser.

In the 1st operation, in the plane domain of the another side 20B that can pass through at this exposure mask 20, to each of divided a plurality of processing unit areas, repeat in turn to form the mode that a plurality of conductions road forms the processing of using through hole 17 with through hole 21 irradiating lasers by a plurality of printing opacities of handling unit area via one, form insulating properties lamellar body 15, also can be by all printing opacities through hole 21 irradiating lasers via exposure mask 20, form with through hole 17 thereby form all conduction roads together, form insulating properties lamellar body 15.

The illuminate condition of the concrete laser when forming the conduction road and forming with through hole 17 can consider that the polymer substance that constitutes insulating properties sheet matrix material 16 forms kind, thickness and other the structure condition of material and suitably selected.

(the 2nd operation)

In the 2nd operation, at first, as shown in Figure 5, by on the one side of the insulating properties lamellar body 15 that obtains by the 1st operation, be coated with above-mentioned conduction circuit component material, form with through hole 17 inside filled conductive circuit component material separately on the conduction road of insulating properties lamellar body 15, thus, form with through hole 17 inside formation conduction circuit component material layer 11B separately on the conduction road of insulating properties lamellar body 15.

More than, as the method for coating conduction circuit component, can use the method for print processes such as screen printing for example with material 11A.

In addition, in the 2nd operation, as shown in Figure 6, be adjusted to for example smaller or equal to 1 * 10 in the inner space ^-3Atm, preferably 1 * 10 ^-4～1 * 10 ^-5In the chamber 23 of the pressurization atmosphere of atm, form under the state that stops up with the another side side of through hole 17 on conduction road insulating properties lamellar body 15, to conduct electricity circuit component with mask used for printing 24 is coated on the one side of this insulating properties lamellar body 15 with material 11A, afterwards, as shown in Figure 7, thereby preferably reach for example normal pressure, form with filled conductive circuit component material 11A in the through hole 17, thereby formation conduction circuit component material layer 11B on the conduction road by making chamber 23 interior atmosphere press to rise.

According to this method, by making the atmosphere in the chamber 23 press liter, utilize the conduction road of atmosphere pressure and insulating properties lamellar body 15 to form the pressure differential of using the pressure in the through hole 17, can to high-density the conduction circuit component be filled in this conduction road with material 11A and form, therefore can prevent in the conduction circuit component that the obtains situation that produces bubble among the material layer 11B with in the through hole 17.

In addition, form with forming the method for conduction circuit component in the through hole 17 as conduction road with material layer 11B at insulating properties lamellar body 15, replacement is coated with the method for conduction circuit component with material 11A on insulating properties lamellar body 15, can also utilize at first, the conduction road that electroconductive particle P is filled in insulating properties lamellar body 15 forms the inside of using through hole 17, afterwards, the polymer substance that becomes elastomer after solidifying being formed the conduction road that material is filled in insulating properties lamellar body 15 forms with the method in the through hole 17.

Then, as shown in Figure 8, to in forming with through hole 17, the conduction road form the insulating properties lamellar body 15 of conduction circuit component with material layer 11B, be configured between a pair of

electromagnet

25,26, by making this

electromagnet

25,26 actions, parallel magnetic field is worked along the thickness direction of conduction circuit component with material layer 11B, thus, make to be dispersed in the conduction circuit component is used material layer 11B along this conduction circuit component with the electroconductive particle P among the material layer 11B thickness direction orientation.Then, under this state,, form the conduction road separately that is located at insulating properties lamellar body 15 integratedly and form with the conduction circuit component 11 in the through hole 17 by conducting electricity circuit component with the cured of material layer 11B, thereby, obtain the anisotropic conductive sheet 10 of formation shown in Figure 1.

In the 2nd operation, the conduction circuit component can directly carry out under the state that parallel magnetic field is worked, but also can carry out after the effect that makes parallel magnetic field stops with the cured of material layer 11B.

Act on the intensity of conduction circuit component, the size of for example preferably average 0.1～3T (tesla) with the parallel magnetic field of material layer 11B.

The conduction circuit component cured of material layer 11B, can be suitably selected according to the material that uses, for example, to in forming with through hole 17, the conduction road form the insulating properties lamellar body 15 of conduction circuit component with material layer 11B, under the state with the bigger pushing force pressurization of stipulating, can be undertaken by heating.When conducting electricity the cured of circuit component usefulness material layer in this way, as long as on

electromagnet

25,26, heater is set.Concrete pressurized conditions, heating-up temperature and heating time, can consider to constitute the conduction circuit component and wait suitably with the mobile required time of the kind of the polymer substance formation material of material layer 11B etc., electroconductive particle and select.

So, anisotropic conductive sheet 10 according to above-mentioned formation, because insulating properties lamellar body 15, having formed its conduction road with specific method respectively with exposure mask 20 forms with through hole 17, even if therefore under the less situation of the disposition interval of the conduction circuit component 11 that will form, also can prevent the situation that the conduction circuit component 11 of adjacency forms connected to each otherly reliably, the circuit component 11 that each can be conducted electricity constitutes as part independent of each other.

Promptly, by one side 20A with exposure mask 20, dispose in the mode of joining with the one side of insulating properties sheet matrix material 16, then from the another side 20B side irradiating laser of this exposure mask 20, laser is exposed the directly opening edge restriction of less another side 20B side of opening of using through hole 21 with the printing opacity of mask 20, thereby the one side with respect to insulating properties sheet matrix material 16 is vertically shone, therefore conducting electricity the road forms with through hole 17, in the desired position, the state that has the inner space of the column of vertically extending with one side and another side with respect to insulating properties lamellar body 15 is formed, specifically, for example, be that the opening size directly that forms with through hole 17 on the conduction road with the one side side of insulating properties lamellar body 15 is made as a, the opening size directly that the conduction road of another side side is formed with through hole 17 is made as b, when the conduction road that will become the best part on the thickness direction of insulating properties lamellar body 15 forms opening size directly with through hole 17 and is made as c, open relative aperture a/b and be in 0.5～1.5 the scope, perhaps open relative aperture c/a and be the state in 0.5～1.5 the scope.

Thereby, can not dwindle himself width of conduction circuit component 11, and form a plurality of conduction circuit component 11 independent of each other with for example minimum disposition interval smaller or equal to 100 μ m, even if with respect to the minimum connected body of the disposition interval of the electrode that will connect, also can reach required electrical connection reliably.

In addition, because can form the conduction road that in fact has uniform opening footpath with respect to thickness direction forms with through hole 17, therefore under the less situation of the spacing of the conduction circuit component 11 that will form, be not used in the restriction that prevents from conduction circuit component 11 is linked thickness situation, relevant anisotropic conductive sheet of ground formation, the degree of freedom of design improves.

And, as long as carry out the mode that exposure mask 20 joins with the one side of its one side 20A and insulating properties sheet matrix material 16 is disposed, promptly in a series of manufacturing process, after making exposure mask, its such shirtsleeve operation of reversing is got final product, therefore can advantageously make required anisotropic conductive sheet 10 with higher qualification rate.

In anisotropic conductive sheet of the present invention, preferably be made as the formation of conduction circuit component to form from the outstanding mode of at least one face of insulating properties lamellar body.

Fig. 9 is other the explanation profile of summary of formation of example of showing anisotropic conductive sheet of the present invention.This anisotropic conductive sheet 10, being set as conduction circuit component 11 has from the formation of the outstanding side-prominent part 12A of one side of the one side of insulating properties lamellar body 15, the side-prominent part 12A of one side of conduction circuit component 11 is that diameter is from the cardinal extremity to the front end and the shape that diminishes gradually, for example frustum.

The projecting height of the side-prominent part 12A of one side of conduction circuit component 11 preferably more than or equal to 10% size of this one side thickness side-prominent part 12A, anisotropic conductive sheet 10, is more preferably the size more than or equal to 20%.Have the side-prominent part 12A of one side of such projecting height by formation,, therefore can obtain the good electrical conductivity characteristic reliably with less plus-pressure compression conductive circuit component 11 fully just.

In addition, the projecting height of the side-prominent part 12A of one side is preferably less than 100% size of the shortest width (width of front end face) that equals the side-prominent part 12A of this one side, is more preferably the size smaller or equal to 70%.Have the side-prominent part 12A of one side of such projecting height by formation, therefore the situation of not buckling when will this one side side-prominent part 12A pressurization can obtain required conductivity characteristic reliably.

This anisotropic conductive sheet 10 in above-mentioned manufacturing process, can directly carry out the 2nd operation and make by under the state on the one side that exposure mask 20 is configured in insulating properties lamellar body 15.

Specifically, as shown in figure 10, by under the state on the one side that exposure mask 20 is configured in the insulating properties lamellar body 15 that obtains by the 1st operation, directly be coated with above-mentioned conduction circuit component material 11A, form with through hole 17 inside separately and the printing opacity through hole 21 inside filled conductive circuit component material 11A separately of exposure mask 20 on the conduction road of insulating properties lamellar body 15, thus, form on the conduction road of insulating properties lamellar body 15 with through hole 17 inside separately and the printing opacity through hole 21 inside formation conduction circuit component material layer 11B separately of exposure mask 20.

Then, as shown in figure 11, to conduct electricity the insulating properties lamellar body 15 of circuit component usefulness material layer 11B and the duplexer of exposure mask 20 comprising that the conduction road forms to have formed in the space with the shaping of through hole 21 with the printing opacity of through hole 17 and exposure mask 20, be configured in a pair of electromagnet 25, between 26, and by making this

electromagnet

25,26 actions, parallel magnetic field is worked along the thickness direction of conduction circuit component with material layer 11B, thus, the electroconductive particle P that is dispersed among the conduction circuit component usefulness material layer 11B is orientated along the thickness direction of this conduction circuit component with material layer 11B.Then, under this state, by conduct electricity circuit component with the cured of material layer 11B, form be located at integratedly on the insulating properties lamellar body 15, have from the conduction circuit component 11 of the outstanding side-prominent part 12A of one side of the one side of this insulating properties lamellar body 15.

Afterwards, by removing exposure mask 20, obtain the anisotropic conductive sheet 10 of formation shown in Figure 9.

Anisotropic conductive sheet 10 according to this formation, basically, can obtain the same effect of effect that obtains with the anisotropic conductive sheet (formation shown in Figure 1) that is actually smooth face by the two sides, simultaneously because conduction circuit component 11 has diameter from the cardinal extremity to the front end and therefore the side-prominent part 12A of the one side of the shape that diminishes gradually can reach required electrical connection with higher reliability.

Figure 12 is the explanation profile of summary of showing the formation of other example again of anisotropic conductive sheet of the present invention.This anisotropic conductive sheet 10, be set as following formation, promptly have according to the connecting object body, for example be examined the corresponding figure of the figure that is examined electrode of circuit arrangement, formed and formed along a plurality of conductions road that thickness direction extends respectively with insulating properties lamellar body 15 through hole 17, that constitute by elastomer, each conduction road that is located at this insulating properties lamellar body 15 integratedly forms with the conduction circuit component 11 in the through hole 17, and conduction circuit component 11 has from the outstanding ledge 12A in the two sides of insulating properties lamellar body 15, the formation of 12B.

The conduction circuit component 11 of this anisotropic conductive sheet 10, be set as diameter from the cardinal extremity to the front end and the shape that diminishes gradually from the outstanding side-prominent part 12A of one side of the one side of insulating properties lamellar body 15, frustum for example, the another side side-prominent part 12B outstanding from the another side of insulating properties lamellar body 15 is set as for example column.

The side-prominent part 12A of one side of conduction circuit component 11 and projecting height h1, the h2 of the side-prominent part 12B of another side, preferably all be 10% size, be more preferably size more than or equal to 20% more than or equal to the thickness of the anisotropic conductive sheet 10 of the part that forms conduction circuit component 11.The side-prominent part 12A of one side and the side-prominent part 12B of another side that have h1, the h2 of such projecting height by formation with less plus-pressure compression conductive circuit component 11 fully just, therefore can obtain the good electrical conductivity characteristic reliably.

In addition, the projecting height h1 of the side-prominent part 12A of one side is preferably less than 100% the size that equals its shortest width (for example, for the side-prominent part 12A of one side, being the width of front end face), is more preferably the size smaller or equal to 70%.For the projecting height h2 of the side-prominent part 12B of another side, also be same.

The side-prominent part 12A of one side and the side-prominent part 12B of another side that have such projecting height h1, h2 by formation, therefore situation will the side-prominent part 12A of this one side and not buckling during the side-prominent part 12B pressurization of another side can obtain required conductivity characteristic reliably.

(the 1st operation)

In the 1st operation, at first, be produced at least one face of the insulating properties sheet matrix material 16 that constitutes by elastomer, be provided with ledge formation integratedly and use the duplexer 19 of resin bed 18 (with reference to Figure 13.)。In this example, only ledge formation is located on the another side of insulating properties sheet matrix material 16 with resin bed 18.

Form the method for using resin bed 18 as forming ledge, can be coated on the insulating properties sheet matrix material 16 by resin bed being formed material, utilize the method for heating then, perhaps form by resin bed formation material layer transfer printing that will form film like and the method that sticks on the insulating properties sheet matrix material 16 with dried coating film.

Form material as resin bed, the material that preferably has characteristic shown below, as its concrete example, can illustration for example polyvinyl alcohol, polyacrylic acid, polyacrylamide, polyethylene oxide, polyvinylpyrrolidone, polyvinyl lactam, polyamines etc.Wherein, dissolve easily in water the reason of the characteristic that the distortion that the heating during by laser processing causes is less, preferably polyvinyl alcohol from having.

As polyvinyl alcohol, preferably using the weight average degree of polymerization for example is 100～5000, is more preferably 1000～2000.Thus, remove in the operation at resin bed described later, the water that can be used as solvent dissolves reliably and removes.

(requiring characteristic)

(1) perforate that can carry out laser is processed.

(2) do not hinder the curing that polymer substance forms material.

(3) has thermal endurance.

(4) dissolve with ratio with respect to water or solvent more than or equal to 5%.

(5) utilize water or solvent swelling.

Ledge forms the thickness with resin bed 18, and preferably 5～100 μ m for example are more preferably 15～40 μ m.Thus, can dissolve reliably and remove ledge with appropriate solvent and form, and can form the ledge that obtains required conductivity characteristic reliably with resin bed 18.

(the 2nd operation)

In the 2nd operation, as shown in figure 13, dispose in the mode that its one side 20A joins in the one side of duplexer 19 by exposure mask 20 above-mentioned formation, and as shown in figure 14, from the another side 20B side of exposure mask 20 via a plurality of printing opacities with through hole 21 irradiating lasers, on insulating properties sheet matrix material 16, form respectively and form with through hole 17 along a plurality of conductions road that thickness direction extends, form with formation on the resin bed 18 at ledge simultaneously and form the ledge formation through hole 18A that extends along thickness direction continuously with through hole 17 with the conduction road respectively, thus, the another side that is formed on insulating properties lamellar body 15 is provided with ledge and forms once-combined body 10A with resin bed 18.

(the 3rd operation)

In the 3rd operation, at first, as shown in figure 15, by exposure mask 20 is configured in formed the conduction road form form with the state on the one side of the once-combined body 10A of through hole 18A with through hole 17 and ledge under, directly be coated with above-mentioned conduction circuit component material 11A, to conduct electricity circuit component material 11A, be filled in the printing opacity that comprises exposure mask 20 and use the inner space of through hole 21, the conduction road of insulating properties lamellar body 15 forms with the inner space of through hole 17 and ledge formation uses the ledge formation of resin bed 18 to use in the space with each conduction circuit component shaping of the inner space of through hole 18A, thus, be shaped with forming conduction circuit component material layer 11B in the space at the conduction circuit component.

Then, as shown in figure 16, to in being shaped with the space, the conduction circuit component form the conduction circuit component with material layer 11B's, exposure mask 20, insulating properties lamellar body 15 and ledge form the duplexer with resin bed 18, be configured in a pair of electromagnet 25, between 26, and by making this

electromagnet

25,26 actions, parallel magnetic field is worked along the thickness direction of conduction circuit component with material layer 11B, thus, make and be dispersed in the conduction circuit component is used material layer 11B along this conduction circuit component with the electroconductive particle P among the material layer 11B thickness direction orientation, under this state, by conducting electricity the cured of circuit component with material layer 11B, form conduction circuit component 11, and be formed on the conduction circuit component and be shaped and conduct electricity circuit component 11 with having formed in the space, by exposure mask 20, insulating properties lamellar body 15 and ledge form the secondary complex 10B with the duplexer formation of resin bed 18.

In above the 2nd operation and the 3rd operation, forming the formation of conduction road forms with the treatment conditions when the through hole 18A with through hole 17 and ledge, form the treatment conditions when the conduction circuit component is used material layer 11B, and, form the treatment conditions when the conduction circuit component 11, identical with the situation of the anisotropic conductive sheet of making above-mentioned formation shown in Figure 1.

(the 4th operation)

In the 4th operation, by peeling off and remove exposure mask 20 from the one side of secondary complex 10B, one end of conduction circuit component 11 is exposed, thereby form the side-prominent part 12A of one side, under this state, as shown in figure 17, be immersed among the appropriate solvent S by the integral body that makes secondary complex 10B, dissolve then and remove ledge and form with resin bed 18, the other end of conduction circuit component 11 is exposed, thereby form the side-prominent part 12B of another side, so, the anisotropic conductive sheet 10 of formation shown in Figure 12 obtained.

As forming the solvent S that uses resin bed 18 and use in order to remove ledge, must be the material of the characteristic that can not impair the elastomer that constitutes insulating properties lamellar body 15, form etc., can with constitute ledge and form in the relation with the material of resin bed 18 and suitably select.Specifically, for example can enumerate rudimentary alcohol or acetone, formaldehyde, acetic acid, ethyl acetate and their aqueous solution or mixed liquors etc. such as water or methyl alcohol, ethanol, isopropyl alcohol.

Concrete treatment conditions, for example the temperature of solvent and soak time etc. can consider to constitute the ledge formation kind of the material of resin bed 18, thickness, employed solvent types etc. and suitably setting, for example, the temperature of solvent is 60～90 ℃, and soak time is 0.5～24 hour.

So, in the anisotropic conductive sheet 10 that obtains with above-mentioned method, basically, because each conduction road of insulating properties lamellar body 15 forms with through hole 17 and forms with exposure mask 20 with specific method, even if therefore under the less situation of the disposition interval of the conduction circuit component 11 that will form, also can prevent the situation that the conduction circuit component 11 of adjacency forms connected to each otherly, can constitute each conduction circuit component 11 independently of one another.

Promptly, dispose by the mode of joining with the one side of the one side 20A of exposure mask 20 and insulating properties sheet matrix material 16, then from the another side 20B side irradiating laser of exposure mask 20, laser is exposed with the printing opacity of mask 20 with through hole 21, the opening edge restriction of the another side 20B side that the opening footpath is less, thereby one side irradiation vertically actually with respect to insulating properties sheet matrix material 16, therefore conducting electricity the road forms with through hole 17, on the desired position, to have one side and the another side state of the inner space of the column of extension formation vertically actually with respect to insulating properties lamellar body 15.Specifically, can form with following state, promptly, for example the opening size directly that the conduction road of the one side side of insulating properties lamellar body 15 is formed with through hole 17 is made as a, the opening size directly that the conduction road of another side side is formed with through hole 17 is made as b, when the conduction road that will become the best part in the wall thickness of insulating properties lamellar body 15 forms opening size directly with through hole 17 and is made as c, open relative aperture a/b and be in 0.5～1.5 the scope, perhaps open relative aperture c/a and be the state in 0.5～1.5 the scope.Thereby, can not dwindle himself width of conduction circuit component 11, and form a plurality of conduction circuit component 11 independent of each other with for example minimum disposition interval smaller or equal to 100 μ m.

And, by forming ledge formation part in the through hole 18A to use with the ledge formation of resin bed 18 in ledge formation, dissolve then and remove this ledge and form the side-prominent part 12B of another side that forms conduction circuit component 11 with the mode of resin bed 18, even if under the minimum situation of the disposition interval of conduction circuit component 11, for example, if utilize mask used for printing to form the method for ledge, just can not occur ledge peel off and remove mask used for printing when damaged situation, for all conduction circuit components 11, can both form the side-prominent part 12B of another side reliably with required conductivity characteristic.

Thereby, according to the anisotropic conductive sheet 10 that obtains by said method,, also can reach required electrical connection reliably with higher reliability even if for the minimum connected body of the disposition interval of the electrode that will connect.

More than, though when forming the side-prominent part 12A of one side, peel off and remove exposure mask 20,, therefore in fact can not make the side-prominent part 12A of one side damaged owing to peel off exposure mask 20 with the inner face of the taper of through hole 21 along its printing opacity.

In addition, as long as owing to carrying out when the road formation of formation conduction is used through hole 18A with through hole 17 and ledge formation, with exposure mask 20, in this manufacture process, to dispose as the mode of being joined by the one side of the one side 20A of the face of laser radiation and insulating properties sheet matrix material 16, promptly in a series of manufacturing process, after making exposure mask, the simple operations of its counter-rotating is got final product, therefore can enough higher qualification rates advantageously make required anisotropic conductive sheet 10.

And then, owing to can form the conduction road formation through hole 17 that has uniform opening footpath with respect to thickness direction actually, therefore under the less situation of the disposition interval of the conduction circuit component 11 that will form, do not have the relevant restriction of the thickness of the anisotropic conductive sheet of the situation of formation that is used to prevent, the degree of freedom of design improves with conducting electricity circuit component 11 bindings.

Anisotropic conductive sheet of the present invention is not limited to above-mentioned example, can add various changes.

In above-mentioned example, illustrated when making the conduction circuit component from the element of the outstanding formation of the one side (face of laser radiation side) of insulating properties lamellar body, by under the state that has disposed exposure mask, directly be shaped with forming conduction circuit component material layer in the space at the conduction circuit component of the printing opacity that comprises this exposure mask with the inner space of through hole, be cured processing then, and remove exposure mask, form the method for the side-prominent part of one side, also can be produced on and be provided with ledge on the two sides of insulating properties sheet matrix material integratedly and form duplexer with resin bed, dispose by the mode that exposure mask is joined with its one side and the one side of this duplexer, then from the another side side irradiating laser of exposure mask, on forming with resin bed, ledge forms ledge formation through hole, on insulating properties sheet matrix material, form conduction road formation through hole simultaneously, under the state of having removed exposure mask, perhaps under the state that has disposed exposure mask, by directly being shaped with forming conduction circuit component material layer in the space at the conduction circuit component, be cured processing then, dissolving is also removed the side-prominent part formation of one side resin bed, forms the side-prominent part of one side.

In addition, for example, when making the conduction circuit component with the anisotropic conductive sheet of the formation that forms from the outstanding mode in the two sides of insulating properties lamellar body, also can be on the another side of the insulating properties lamellar body that is in the state that has disposed the 1st exposure mask on the one side, the 2nd exposure mask that also will have a formation identical with the 1st exposure mask disposes in the mode of joining with this another side, under the state of any one face of obstruction, by conducting electricity the circuit component material, the conduction road that is filled in the insulating properties lamellar body forms with in the through hole, the printing opacity of the 1st exposure mask printing opacity interior with through hole and the 2nd exposure mask is used in the through hole, form conduction circuit component material layer, by carrying out the cured of this conduction circuit component with material layer, form the conduction circuit component, by removing the 1st and the 2nd exposure mask, form side-prominent part of one side and the side-prominent part of another side.

(anisotropic conductive connector)

Figure 18 is the plane graph of summary of formation of showing an example of anisotropic conductive connector of the present invention, and Figure 19 is that the explanation profile of showing is amplified in the portion that wants of anisotropic conductive connector shown in Figure 180.This anisotropic conductive connector 30, be to be used for to being formed on a plurality of integrated circuits on the wafer, state at wafer carries out the galvanoscopic of this integrated circuit respectively, with be formed on as all integrated circuits on the wafer of checking object, disposed be examined electrode the zone accordingly, have the frame plate 31 that has formed a plurality of opening 31A that extend in the mode that connects thickness direction respectively.On each opening 31A of frame plate 31, dispose anisotropic conductive sheet 10 in the mode of stopping up this opening 31A, the circumference of these anisotropic conductive sheets 10 is supported by the opening edge portion of this frame plate 31, thereby is fixed integratedly.

Anisotropic conductive sheet 10 in this example except having 1 conduction circuit component 11 respectively, has and same formation shown in Figure 9, is the formation that is formed with conduction circuit component 11 on the one side of anisotropic conductive sheet 10 highlightedly.

Material as the frame plate 31 that constitutes anisotropic conductive connector 30, can use metal material, ceramic material, various materials such as resin material, as its concrete example, can enumerate iron, copper, nickel, chromium, cobalt, magnesium, manganese, molybdenum, indium, plumbous, palladium, titanium, tungsten, aluminium, gold, platinum, metals such as silver or will be more than or equal to 2 kinds metallic combination alloy or metal material such as steel alloy together, silicon nitride, carborundum, ceramic materials such as alumina, the reinforced epoxy resin of aromatic series nonwoven fabrics, the reinforced polyimide resin of aromatic series nonwoven fabrics, resin materials such as the reinforced viscose maleimide of aromatic series nonwoven fabrics triazine resin.

In addition, anisotropic conductive connector 30 is being used under the situation of ageing test,, is preferably using coefficient of linear thermal expansion and the identical or close material of coefficient of linear thermal expansion that constitutes as the material of the wafer of checking object as the material that constitutes frame plate 31.Specifically, at the material that constitutes wafer is under the situation of silicon, preferably use coefficient of linear thermal expansion smaller or equal to 1.5 * 10-4/K, particularly, the material of 3 * 10-6～8 * 10-6, as its concrete example, can enumerate metal materials such as constant modulus alloy die alloys such as invar type alloy, constant modulus alloy steel, mistake invar alloy, Kovar alloy, 42 alloys such as invar, the reinforced organic resin material of aromatic series nonwoven fabrics.

In addition, the thickness of frame plate 31 as long as can keep its shape, can keep anisotropic conductive sheet 10 simultaneously, does not limit especially, for example 0.03～1mm, preferably 0.05～0.25mm.

Such anisotropic conductive connector 30 can be made with following mode.

(the 1st operation)

At first, make and be formed on as all integrated circuits on the wafer of checking object, disposed the frame plate 31 that the electrode zone that is examined electrode has formed a plurality of opening 31A accordingly.At this,, for example, can utilize etching method etc. as the method for the opening 31A that forms frame plate 31.

In addition, prepare according to the corresponding figure of configuration figure of the conduction circuit component 11 that will form, formed diameter respectively from one side 20A to another side 20B and gradually part a plurality of printing opacities little, that extend along thickness direction with the exposure mask 20 of through holes 21.

Then, in the flat supporting bracket 32 that constitutes by material with frame plate 31 identical materials (with reference to Figure 20.) one side on, the polymer substance that becomes elastomer after solidifying is formed material, according to being coated with the corresponding figure of figure as the electrode zone of the wafer of checking object, thus, on the desired location on the one side of supporting bracket 32, form polymer substance and form material layer 16B.At this,, preferably use for example stencil printing as the method for coating polymer substance formation material on the one side of supporting bracket 32.According to this method, be easy to form material according to required figure coating polymer substance, and, can be coated with an amount of polymer substance and form material.

Then, as shown in figure 20, the supporting bracket 32 that has formed polymer substance formation material layer 16B is configured on the flat following side increased pressure board 36, on the one side of supporting bracket 32, following side liner 34 via a plurality of opening 34A of the matched shape of flat shape that has formed the anisotropic conductive sheet 10 that has and will form respectively, the mode configuration block frame plate 31 that matches with the position, simultaneously on this frame plate 31, the mode that matches with the position, dispose the upper face side liner 33 of a plurality of opening 33A of the matched shape of flat shape that has formed the anisotropic conductive sheet 10 that has and will form respectively, and then, in the above on the one side of side liner 33, with exposure mask 20 with its one side 20A downward state, in other words, dispose in the mode relative with the one side of upper face side liner 33, via this exposure mask 20 and the mould release film 37 of the film like of suitably using, dispose flat upper face side increased pressure board 35, by being pressurizeed in their overlapping backs, as shown in figure 21, inner space at the opening 31A that comprises frame plate 31, the opening 34A separately of following side liner 34 and upper face side liner 33, the printing opacity of the inner space of 33A and exposure mask 20 is shaped with in the space with the anisotropic conductive sheet of the inner space of through hole 21, and the polymer substance that forms purpose form (form of the anisotropic conductive sheet 10 that will form) forms material layer 16A.

At this, polymer substance forms material layer 16B, can be formed on this two side of one side of the one side of supporting bracket 32 and exposure mask 20, under the situation that is forming polymer substance formation material layer 16B on the one side 20A of exposure mask 20, as long as with on the desired position on the one side 20A of exposure mask 20, polymer substance is formed printing opacity that material layer 16B is filled in exposure mask 20 form with the states in the through hole 21 and get final product.

Forming the anisotropic conductive sheet by configuration block frame plate 31 by this way and 2

liners

33,34 is shaped and uses the space, can form the anisotropic conductive sheet 10 of purpose form reliably, anisotropic conductive sheet 10 situation connected to each other of adjacency can be prevented simultaneously, therefore a plurality of anisotropic conductive sheet 10 independent of each other can be formed reliably.

Afterwards, by carrying out the cured of polymer substance formation material layer 16A, as shown in figure 22, form to have mode that insulating properties sheet matrix material 16 that ledge forms part 13 stops up the opening 31A of frame plates 31 and support and fix the once-combined body 30A that the circumference of this insulating properties sheet matrix material 16 forms by the opening edge portion of frame plate 31.

(the 2nd operation)

In the 2nd operation, as shown in figure 23, by from the another side 20B side of exposure mask 20 via a plurality of printing opacities with through hole 21 irradiating lasers, a plurality of conductions road that formation has been formed respectively along thickness direction extends forms the insulating properties lamellar body 15 of using through hole 17, thus, the mode of this insulating properties lamellar body 15 with the opening 31A that stops up frame plate 31 disposed, form opening edge portion by frame plate 31 and support and fix the secondary complex 30B that the circumference of this insulating properties lamellar body 15 forms.

(the 3rd operation)

In the 3rd operation, as shown in figure 24, by on the one side of the secondary complex 30B that obtains by the 2nd operation, be coated with above-mentioned conduction circuit component material 11A, conduction road at secondary complex 30B forms the inside filled conductive circuit component material 11A separately that uses through hole 17, thus, the inside separately that forms on the conduction road of secondary complex 30B with through hole 17 forms conduction circuit component material layer 11B.

Then, as shown in figure 25, the secondary complex 30B of conduction circuit component with material layer 11B will have been formed, be configured between a pair of

electromagnet

25,26, by making this

electromagnet

25,26 actions, parallel magnetic field is worked along the thickness direction of conduction circuit component with material layer 11B, thus, make to be dispersed in the conduction circuit component is used material layer 11B along this conduction circuit component with the electroconductive particle P among the material layer 11B thickness direction orientation.Then, under this state,, form a plurality of conduction circuit components 11 are located at a plurality of anisotropic conductive sheets 10 that form on the insulating properties lamellar body 15 integratedly by conducting electricity circuit component with the cured of material layer 11B.

Afterwards, by removing exposure mask 20 and supporting bracket 32, obtain as Figure 18 and anisotropic conductive connector 30 shown in Figure 19.

So, anisotropic conductive connector 30 according to above-mentioned formation, form with the anisotropic conductive sheet 10 in the through hole 17 with exposure mask 20 conduction roads that form, insulating properties lamellar body 15 owing to possess conduction circuit component 11 is located at integratedly with specific method, therefore the effect same can be obtained, following effect can also be obtained simultaneously with above-mentioned anisotropic conductive sheet 10.

Promptly, according to above-mentioned anisotropic conductive connector 30, because anisotropic conductive sheet 10 is fixed by frame plate 31, therefore be not easy distortion and operation easily, with as being electrically connected in the operation of the wafer of checking object, can carry out with respect to the contraposition of this wafer at an easy rate and be maintained fixed.

In addition, because each opening 31A of frame plate 31, form accordingly with being formed on as the electrode zone all integrated circuits on the wafer of checking object, that configuration is examined electrode, the anisotropic conductive sheet of going up separately 10 that is configured in this opening 31A can be that area is less, so the formation of each anisotropic conductive sheet 10 is easy to.And, the anisotropic conductive sheet 10 that area is less, even if under the situation of experience thermal process, the absolute magnitude of the thermal expansion of the face direction of this anisotropic conductive sheet 10 is less, therefore by using the coefficient of linear thermal expansion materials with smaller, can limit the thermal expansion of the face direction of anisotropic conductive sheet 10 reliably by frame plate 31 as the material that constitutes frame plate 31.Thereby, even if checking that object is formed in a plurality of integrated circuits on the large-area wafer, and these integrated circuits are carried out also can stably keeping good status of electrically connecting under the situation of ageing test together.

Constitute the anisotropic conductive sheet of anisotropic conductive connector of the present invention, be not limited to above-mentioned such state of on one side, giving prominence to the conduction circuit component and form, also can be made as the state of giving prominence to from the two sides with the conduction circuit component and form.

Figure 26 is that the explanation profile of showing is amplified in other the portion that wants of configuration example of anisotropic conductive connector of the present invention.Constituting each anisotropic conductive sheet 10 of this anisotropic conductive connector 30, is formation shown in Figure 12, promptly is the formation that conduction circuit component 11 forms highlightedly from the two sides of insulating properties lamellar body 15.

This anisotropic conductive connector 30 can be made with following mode.

(the 1st operation)

In the 1st operation, at first, make and be formed on the frame plate 31 that has formed a plurality of opening 31A as the electrode zone all integrated circuits on the wafer of checking object, that configuration is examined electrode accordingly.At this,, for example can utilize etching method etc. as the method for the opening 31A that forms frame plate 31.

And then on the one side of the flat supporting bracket 32 that for example is made of the material with frame plate 31 identical materials, the ledge that forms specific thickness forms with resin bed 18, and cambium layer laminate materials 32A is (with reference to Figure 27 then.)。Specifically, for example, can be coated on the supporting bracket, utilize heating then, perhaps form the material layer transfer printing and the mode that sticks on the one side of supporting bracket 32 forms by the resin bed that will form film like with dried coating film by resin bed being formed material.

Ledge at stacking material 32A forms with on the one side of resin bed 18, according to the corresponding figure of figure as the electrode zone of the wafer of checking object, the polymer substance that becomes elastomer after coating is solidified forms material, thus, on the desired position on the one side of stacking material 32A, form polymer substance and form material layer 16B.

In addition, on another side at the mould release film 37 of sheet, under the state that the mode that exposure mask 20 is joined with it with its another side disposes, on the one side 20A of exposure mask 20, according to the corresponding figure of figure as the electrode zone of the wafer of checking object, the polymer substance that becomes elastomer after coating is solidified forms material, thus, polymer substance is formed on the desired position on material layer 16B is formed on exposure mask 20 with the states in the through hole 21 with the printing opacity that is filled in exposure mask 20 the one side 20A.At this, polymer substance forms material layer 16B, need not be formed on stacking material 32A and exposure mask 20 these two sides, also can only be formed on any one party of stacking material 32A and exposure mask 20.

As the method for coating polymer substance formation material on stacking material 32A and exposure mask 20, for example preferably use stencil printing.According to this method, can form material according to required figure coating polymer substance at an easy rate, and, can be coated with an amount of polymer substance and form material.

Then, as shown in figure 27, the stacking material 32A that has formed polymer substance formation material layer 16B is configured on the flat following side increased pressure board 36, on the one side of stacking material 32A, following side liner 34 via a plurality of opening 34A of the matched shape of flat shape that has formed the anisotropic conductive sheet 10 that has and will form respectively, the position ground configuration block frame plate 31 that matches, simultaneously on the one side of this frame plate 31, the position disposes the upper face side liner 33 of a plurality of opening 33A of the matched shape of flat shape that has formed the anisotropic conductive sheet 10 that has and will form respectively with matching, and then, in the above on the one side of side liner 33, form the exposure mask 20 of material layer 16B and the stacking material of mould release film 37 with having formed polymer substance, with the downward state of the one side 20A of exposure mask 20, in other words, with the state configuration relative with the one side of upper face side liner 33, the flat upper face side increased pressure board 35 of configuration on the one side of the mould release film 37 of this stacking material, by being pressurizeed in their overlapping backs, as shown in figure 28, inner space at the opening 31A that comprises frame plate 31, the opening 34A separately of following side liner 34 and upper face side liner 33, the printing opacity of the inner space of 33A and exposure mask 20 is shaped with in the space with the anisotropic conductive sheet of the inner space of through hole 21, and the polymer substance that forms purpose form (form of the anisotropic conductive sheet 10 that will form) forms material layer 16A.

liners

33,34 is shaped and uses the space, can form the anisotropic conductive sheet 10 of purpose form reliably, the situation that adjacent anisotropic conductive sheet 10 is connected to each other can be prevented simultaneously, thereby a plurality of anisotropic conductive sheet 10 independent of each other can be formed reliably.

Afterwards, as shown in figure 29, by carrying out the cured of polymer substance formation material layer 16A, the mode of the opening 31A of frame plates 31 is stopped up in making with the insulating properties sheet matrix material 16 with ledge formation part 13, support and fix the circumference of this insulating properties sheet matrix material 16 by the opening edge portion of frame plate 31, and exposure mask 20 is set in the one side side of this insulating properties sheet matrix material 16, in the another side side ledge is set simultaneously and forms duplexer 30C with resin bed.

(the 2nd operation)

In the 2nd operation, as shown in figure 30, by from the another side 20B side of the exposure mask 20 of duplexer 30C via a plurality of printing opacities with through hole 21 irradiating lasers, on insulating properties sheet matrix material 16, form respectively and form with through hole 17 along a plurality of conductions road that thickness direction extends, form with formation on the resin bed 18 at ledge simultaneously and form a plurality of ledges formation through hole 18A that extend along thickness direction continuously with through hole 17 with the conduction road respectively, thus, the mode of insulating properties lamellar body 15 with the opening 31A of obstruction frame plate 31 disposed in formation, support and fixing circumference by the opening edge portion of frame plate 31, and on the one side side, be provided with exposure mask 20, on the another side side, be provided with ledge simultaneously and form the once-combined body 30A that uses resin bed 18.

(the 3rd operation)

In the 3rd operation, as shown in figure 31, by on the one side of the once-combined body 30A that obtains by the 2nd operation, be coated with above-mentioned conduction circuit component material, each conduction circuit component that forms the inner space of using through hole 18A with the inner space and the ledge formation of through hole 17 on the conduction road that comprises once-combined body 30A is shaped with filled conductive circuit component material in the space, thus, the conduction circuit component at once-combined body 30A is shaped with forming conduction circuit component material layer 11B in the space.

Then, shown in figure 32, to in being shaped with the space, the conduction circuit component form the once-combined body 30A of conduction circuit component with material layer 11B, be configured between a pair of

electromagnet

25,26, by making this

electromagnet

25,26 actions, parallel magnetic field is worked along the thickness direction of conduction circuit component with material layer 11B, thus, make to be dispersed in the conduction circuit component is used material layer 11B along this conduction circuit component with the electroconductive particle P among the material layer 11B thickness direction orientation.Then, under this state, by conducting electricity the cured of circuit component with material layer 11B, form conduction circuit component 11, thus, formation a plurality of conduction circuit components 11 are located at integratedly the opening that is formed on frame plate 31 with and the conduction road of the insulating properties lamellar body 15 of circumference form with in the through hole 17, and exposure mask 20 is set on the one side side, in the another side side ledge is set simultaneously and forms the secondary complex 30B that forms with resin bed 18.

(the 4th operation)

In the 4th operation, by peeling off and remove exposure mask 20 from the one side of secondary complex 30B, one end of conduction circuit component 11 is exposed, thereby form the side-prominent part 12A of one side, under this state, as shown in figure 33, be immersed among the appropriate solvent S by the integral body that makes secondary complex 30B, thereby dissolving is also removed ledge formation resin bed 18, the other end of conduction circuit component 11 is exposed, thereby form the side-prominent part 12B of another side, thus, obtain anisotropic conductive connector 30 shown in Figure 26.

So, the anisotropic conductive connector 30 that obtains by said method, basically, except obtain with the same effect of above-mentioned anisotropic conductive connector 30, because the side-prominent part 12B of another side of anisotropic conductive sheet 10 is formed by specific method, even if therefore under the minimum situation of the disposition interval of conduction circuit component, the conduction circuit component also all is the element with required conductivity characteristic, thereby, even if with respect to the minimum connected body of the disposition interval of the electrode that will connect, also can reach required electrical connection reliably with higher reliability.

Anisotropic conductive connector of the present invention is not limited to above-mentioned example, can add various changes.

For example also can be on frame plate, with form a plurality of openings accordingly from being formed on as zone a plurality of integrated circuits of selecting among the integrated circuit on the wafer of checking object, that configuration is examined electrode, and dispose the formation of a plurality of anisotropic conductive sheets in the mode of stopping up this each opening.At this, the number of the integrated circuit of selection, the number that is examined electrode that can consider the size of wafer, the number that is formed on the integrated circuit on the wafer, each integrated circuit waits suitably selects for example 16,32,64,128.

In addition, also can be on frame plate, to form single opening, and dispose the formation of single anisotropic conductive sheet in the mode of stopping up this opening.

The anisotropic conductive sheet also can be a formation shown in Figure 1, promptly is the smooth formation in two sides.

In addition, for example, possess when having formed the anisotropic conductive connector of anisotropic conductive sheet of formation of conduction circuit component in manufacturing in the mode outstanding from the two sides of insulating properties lamellar body, can also be by in the above between side liner and the exposure mask, dispose the resin film that for example forms the identical material of material of using resin bed with the formation ledge in the mode of filling, and with they overlapping back pressurizations, inner space at the opening that comprises frame plate, the anisotropic conductive sheet of the inner space of the opening of following side liner and upper face side liner is shaped with in the space, the polymer substance that forms the purpose form forms material layer, then by being cured processing, and from the another side side of exposure mask via printing opacity through hole irradiating laser, forming ledge on resin film and ledge form with resin bed forms and uses through hole, on insulating properties sheet matrix material, form conduction circuit component formation through hole simultaneously, by under the state of having removed exposure mask or disposing under the state of exposure mask, be shaped with forming conduction circuit component material layer in the space at the conduction circuit component, and carry out this conduction circuit component cured with material layer, form the conduction circuit component, by dissolving and removing resin film and ledge formation resin bed, form side-prominent part of one side and the side-prominent part of another side.

(device is looked in the electric-examination of circuit arrangement)

Secondly, to be example, illustrate that device is looked in the electric-examination of circuit arrangement of the present invention as the situation wafer that has formed a plurality of integrated circuits from the inspection of electric aspect, that wafer inspector is implemented.

Figure 34 is the explanation profile of the formation of wanting portion of showing an example of wafer inspector of the present invention, and this wafer inspector is the device that is used for having formed respectively from the inspection of electric aspect the wafer of a plurality of integrated circuits that are examined electrode with overshooting shape.

This wafer inspector, show as amplifying among Figure 35, have on one side (below in Figure 34 and Figure 35 being), according to the corresponding figure of the figure that is examined electrode as the overshooting shape of the wafer of checking object, disposed the inspection circuit substrate 50 of a plurality of inspection electrodes 51, with be configured in this inspection with on one side of circuit substrate 50, by the channel check usefulness detector 40 that constitutes with the anisotropic conductive connector 30 that contact as the wafer of checking object, with on the lower position of detector 40, be provided with the wafer mounting table 65 of mounting in this channel check as the wafer 60 of checking object.Anisotropic conductive connector 30, except constituting the anisotropic conductive sheet of this anisotropic conductive connector, be according to the connecting object body, for example be examined the corresponding figure of the figure that is examined electrode of circuit arrangement, formed respectively outside the formation of a plurality of conduction circuit components 11 that extend along thickness direction, also had the formation identical with parts shown in Figure 19.

On the another side of checking with circuit substrate 50 (above being in the drawings), be formed with a plurality of splicing ears 52 that are connected on the tester according to suitable figure, this each splicing ear 52 is checked the inside distribution 53 of using circuit substrate 50 via this, is connected electrically in each and checks on electrode 51.

As the basis material of checking with circuit substrate 50, so long as have stable on heating material, just do not limit especially, can use as the baseplate material of tellite and the various materials that often use, as its concrete example, can enumerate fiberglass reinforced epoxy resin, fiberglass reinforced polyimide resin, fiberglass reinforced viscose maleimide triazine resin, polyimide resin, the reinforced epoxy resin of aromatic series nonwoven fabrics, the reinforced polyimide resin of aromatic series nonwoven fabrics, resin materials such as the reinforced viscose maleimide of aromatic series nonwoven fabrics triazine resin, ceramic material, glass material, metal core material etc., be applicable under the situation of ageing test, preferably use its coefficient of linear thermal expansion, with the identical or close material of coefficient of linear thermal expansion that constitutes as the material of the wafer of checking object.Specifically, under the situation that wafer is made of silicon, preferably use coefficient of linear thermal expansion smaller or equal to 1.5 * 10 ^- ⁴/ K, particularly, 3 * 10 ^-6～8 * 10 ^-6The material of/K.

In this wafer inspector, carry out the inspection of wafer 60 in the following way.

At first, will be examined the state of electrode 62 with it, and each is examined electrode 62 and is positioned at the mode of checking with under each inspection electrode 51 of circuit substrate 50 and is configured on the wafer mounting table 65 as the wafer 60 of checking object towards the top.Then, for example pressurize downwards by checking with suitable pressue device with circuit substrate 50, the anisotropic conductive sheet 10 of anisotropic conductive connector 30, contact wafer 60 be examined electrode 62, and then become by the state that is examined electrode 62 pressurizations.Thus, the conduction circuit component 11 of anisotropic conductive sheet 10, with according to the projecting height that is examined electrode 62 of wafer 60 mode strain along the thickness direction compression, on the conduction circuit component 11 of this anisotropic conductive sheet 10, being examined between electrode 62 and the inspection usefulness inspection electrode 51 of circuit substrate 50 of wafer 60, form the conduction road of extending along the thickness direction of this anisotropic conductive sheet 10 by electroconductive particle P, its result, the electrical connection of reaching the inspection electrode 51 that is examined electrode 62 and inspection usefulness circuit substrate 50 of wafer 60.Afterwards, when carrying out ageing test, wafer 60 is heated to the temperature of regulation, under this state, this wafer 60 is carried out required electric-examination look into.

According to above-mentioned wafer inspector, the channel check anisotropic conductive connector 30 that contacts with wafer 60 of detector 40, possess conduction circuit component 11 is located at integratedly and form with exposure mask 20 with specific method, the conduction road of insulating properties lamellar body 15 forms with the anisotropic conductive sheet 10 in the through hole 17, this anisotropic conductive sheet 10, even if under the less situation of the disposition interval of conduction circuit component 11, also can prevent conduction circuit component 11 situation connected to each other of adjacency reliably, and with each the conduction circuit component 11 constitute as element independent of each other, even if therefore less, also can reach required electrical connection reliably as the spacing that is examined electrode 62 of the wafer 60 of checking object.

Wafer inspector of the present invention, be not limited to above-mentioned formation, for example, as shown in figure 36, the forming circuit inspection anisotropic conductive connector of detector 40, also can be by parts for example shown in Figure 26, promptly the conduction circuit component 11 of anisotropic conductive sheet 10 constitutes with the parts that form from the outstanding respectively state in the two sides of insulating properties lamellar body 15.

Wafer inspector according to this formation, the channel check anisotropic conductive connector 30 that contacts with wafer 60 of detector 40, possesses anisotropic conductive sheet 10, this anisotropic conductive sheet 10 will have the side-prominent part 12A of one side that possesses required conductivity characteristic respectively and the conduction circuit component 11 of the side-prominent part 12B of another side, being located at integratedly with specific method uses exposure mask 20 to form, the conduction road of insulating properties lamellar body 15 forms with in the through hole 17, so this anisotropic conductive sheet 10, even if under the less situation of the disposition interval of conduction circuit component 11, also can prevent conduction circuit component 11 situation connected to each other of adjacency reliably, and with each the conduction circuit component 11 constitute as element independent of each other, even if therefore less, also can reach required electrical connection more reliably as the spacing that is examined electrode 62 of the wafer 60 of checking object.

Figure 37, it is the explanation profile of the formation of wanting portion of other example again of showing wafer inspector of the present invention, this wafer inspector is to be used for the device that aspect electric inspection has formed the wafer with plane a plurality of integrated circuits that are examined electrode respectively.

This wafer inspector, show as amplifying among Figure 38, have one side (below in Figure 37 and Figure 38 being) go up according to the corresponding figure of the figure that is examined electrode as the wafer of checking object, disposed the inspection circuit substrate 50 of a plurality of inspection electrodes 51, with by being configured in this inspection with the anisotropic conductive connector 30 on one side of circuit substrate 50, the channel check that constitutes with flaky connector 70 on the one side that is configured in this anisotropic conductive connector 30 (below in Figure 37 and Figure 38 being) is with detector 40, with on the lower position of detector 40, be provided with the wafer mounting table 65 of mounting in this channel check as the wafer 60 of checking object.

Check with circuit substrate 50, be with the inspection of Figure 34 and wafer inspector shown in Figure 35 with the identical formation of circuit substrate, anisotropic conductive connector 30, be the conduction circuit component 11 of its anisotropic conductive sheet 10, with what form from the outstanding respectively state in the two sides of insulating properties lamellar body 15.

Flaky connector 70, has soft insulating properties sheet 71, on this insulating properties sheet 71, the electrode assembly 72 that a plurality of metals that extended by the thickness direction along this insulating properties sheet 71 constitute, according to the corresponding figure of checking with the inspection electrode 51 of circuit substrate 50 of figure, promptly with the corresponding figure of the figure that is examined electrode 62, to dispose along the face direction of this insulating properties sheet 71 mode separated from one another as the wafer 60 of checking object.Each electrode assembly 72, to expose the surface electrode portion 73 of the overshooting shape on the surface (below being in the drawings) at insulating properties sheet 71, with the tabular backplate portion 74 of exposing on the back side of insulating properties sheet 71, connect the short circuit portion 75 all-in-one-piece modes connected to each other of extending on ground by thickness direction and constitute along insulating properties sheet 71.

And, flaky connector 70, the mode that lays respectively at its electrode assembly 72 on the conduction circuit component 11 of anisotropic conductive sheet 10 of anisotropic conductive connector 30 disposes.

Insulating properties sheet 71 as flaky connector 70, so long as have the material of the softness of insulating properties, just do not limit especially, for example can use the resin sheet that constitutes by polyimide resin, liquid crystal polymer, polyester, fluorine-type resin etc., above-mentioned resin be soaked sheet that is contained in the cross that fibrage is formed etc.

In addition, the thickness of insulating properties sheet 71 as long as this insulating properties sheet 71 is soft materials, just limits especially, but 10～50 μ m preferably are more preferably 10～25 μ m.

As the metal that constitutes electrode assembly 72, can use nickel, copper, gold, silver, palladium, iron etc., as electrode assembly 72, can be that integral body is made of single metal, also can be to constitute by alloy more than or equal to 2 kinds metal, or will form more than or equal to 2 kinds metal stacking.

In addition; from preventing the oxidation of this electrode part; simultaneously can obtain the less electrode part this point of contact resistance; be preferably on the surface of the surface electrode portion 73 of electrode assembly 72 and backplate portion 74, form stable and metal protective film aspect chemical such as gold, silver, palladium with high conductivity.

The projecting height of the surface electrode portion 73 of electrode assembly 72, from respect to being examined electrode 62 and can reaching stable electrical connection this point of wafer 60, preferably 15～50 μ m are more preferably 20～35 μ m.In addition, the footpath of surface electrode portion 73, though can set according to the size that is examined electrode 62 and the spacing of wafer 60, preferably 30～80 μ m for example are more preferably 30～65 μ m.

The footpath of the backplate portion 74 of electrode assembly 72, as long as it is bigger than the footpath of short circuit portion 75, and, little the getting final product of disposition interval than electrode assembly 72, but as possible, preferably bigger footpath, thus, with respect to the conduction circuit component 11 of the anisotropic conductive sheet 10 of anisotropic conductive connector 30, also can reach stable electrical connection reliably.In addition, the thickness of backplate portion 74, enough high from intensity, and can obtain the good this point of durability repeatedly, preferably 20～50 μ m are more preferably 35～50 μ m.

The footpath of the short circuit portion 75 of electrode assembly 72, from obtaining higher intensity this point fully, preferably 30～80 μ m are more preferably 30～65 μ m.

Flaky connector 70 for example can be made with following mode.

Promptly, the preparation stacking material that stacked metal level forms on insulating properties sheet 71, insulating properties sheet 71 with respect to this stacking material, for example by laser processing, dry ecthing processing etc., according to the corresponding figure of figure of the electrode assembly 72 that will form, form a plurality of through holes that connect along the thickness direction of this insulating properties sheet 71.Then, by this stacking material is implemented lithography process and electroplating processes, in the through hole of insulating properties sheet 71, form the short circuit portion 75 that is attached at integratedly on the metal level, on the surface of this insulating properties sheet 71, form the surface electrode portion 73 that is attached at the overshooting shape in the short circuit portion 75 integratedly simultaneously.Afterwards, remove its part, form backplate portion 74, form electrode assembly 72 then,, obtain flaky connector 70 with this by the metal level of stacking material is implemented photoetching treatment.

According to this wafer inspector, basically, because channel check possesses flaky connector 70 with detector 40, therefore can reach electrical connection with higher reliability, and, the channel check anisotropic conductive connector 30 of the contact wafer 60 of detector 40, possess conduction circuit component 11 is located at integratedly and form with exposure mask 20 with specific method, the conduction road of insulating properties lamellar body 15 forms with the anisotropic conductive sheet 10 in the through hole 17, this anisotropic conductive sheet 10, even if under the less situation of the disposition interval of conduction circuit component 11, also can prevent conduction circuit component 11 situation connected to each other of adjacency reliably, and with each the conduction circuit component 11 constitute as element independent of each other, in each conduction circuit component 11, side-prominent part 12A of one side and the side-prominent part 12B of another side do not have damaged ground, be configured as part with required conductivity characteristic, even if therefore less, also can reach required electrical connection reliably as the spacing that is examined electrode 62 of the wafer 60 of checking object.

Channel check of the present invention is looked into device with the electric-examination of detector and circuit arrangement, is not limited to above-mentioned example, can add various changes.

For example, as the circuit arrangement of checking object, be not limited to form the wafer of a plurality of integrated circuits, also gone for being formed on the testing fixture of the circuit on conductor integrated circuit device, the tellites such as assembly ICMCM such as semiconductor chip, BGA, CSP.

In addition, channel check shown in Figure 35 detector 40, channel check shown in Figure 36 detector 40 and channel check detector 40 shown in Figure 38, each all is to be examined electrode 62 for what be formed on all integrated circuits on the wafer 60, reach electrical connection together, but as shown in figure 39, also can be being examined on the electrode 62 of a plurality of integrated circuits of selecting each integrated circuit that is connected electrically on being formed on wafer 60.The number of the integrated circuit of selecting, the number that is examined electrode that can consider the size of wafer 60, the number that is formed on the integrated circuit on the wafer 60, each integrated circuit waits suitably selects for example 16,32,64,128.

Has such channel check with in the wafer inspector of detector 40, by carrying out repeatedly with channel check detector 40, be connected electrically in being examined on the electrode 62 of a plurality of integrated circuits of selecting each integrated circuit on being formed on wafer 60, check then, afterwards, with channel check detector 40, be connected electrically in being examined on the electrode 62 of a plurality of integrated circuits of from other integrated circuit, selecting, the operation of checking then, the electric-examination that can be formed on all integrated circuits on the wafer 60 is looked into.

Embodiment

Below, specific embodiment of the present invention is described, but the invention is not restricted to following embodiment.

(embodiment 1)

(modulation of material of conduction circuit component)

By to form the aqueous silicone rubber 10g of additive type as polymer substance, be 30% ratio interpolation and mix following electroconductive particle that afterwards, enforcement is modulated conduction circuit component material by the deaeration processing that decompression realizes with volume fraction with material.

As electroconductive particle, use nickel particles to be core particle, and on this core particle with averaged particles footpath 10 μ m, the covering amount with 30 weight % of its weight has coated golden particle by plating.

(making of exposure mask)

(size is 230mm to the mask basis material that constitutes at the copper that by thickness is 18 μ m longitudinally; horizontal size is 230mm) one side on form resist layer; size is 220 μ m longitudinally; horizontal size is that the opening of 75 μ m is transversely to be the spacing of 100 μ m; be the positive film masks that mode that the separating distance of 6.34mm is arranged forms along the longitudinal; be configured on the one side of this mask basis material; carry out exposure-processed then; afterwards; by carrying out development treatment; on resist layer, form the figure hole; afterwards, by one side side, be 45 ℃ etching solution enforcement spraying etch processes of main component in order to iron chloride from this mask basis material; form a plurality of printing opacity through holes; afterwards, by removing resist layer, obtain exposure mask.

The printing opacity through hole of this exposure mask, opening with the one side of forming is to be of a size of 220 μ m longitudinally, laterally be of a size of 75 μ m, the opening of another side is to be of a size of 200 μ m longitudinally, the shape of the inner space of the horizontal roughly truncated rectangular pyramids shape that is of a size of 60 μ m (opening relative aperture is 0.8).In addition, printing opacity is 19650 with the sum of through hole, is transversely to be 100 μ m, is the state of the separating distance arrangement of 6.34mm along the longitudinal.

(manufacturing of anisotropic conductive sheet)

The exposure mask that will obtain in above-mentioned mode, the mode that contacts with the one side of its one side and the insulating properties sheet matrix material that constitutes of the solidfied material that by thickness is the aqueous silicone rubber of additive type of 100 μ m disposes, by using laser machine " Impact L-500 " (Sumitomo heavy-duty machine tool industry (strain) system), use through hole with following condition irradiating laser from the another side side of this exposure mask via a plurality of printing opacities, formation has the insulating properties lamellar body of using through hole respectively along a plurality of conductions road formation of thickness direction perforation and extension.

The conduction road of the one side of insulating properties lamellar body forms uses through hole, it is the roughly truncated rectangular pyramids shape that diameter diminishes to another side gradually from one side, the big or small a in the opening footpath of one side is maximum, and the relative aperture a/b that opens of the big or small b in the big or small a in the opening footpath of one side and the opening footpath of another side is 1.2.

(illuminate condition of laser)

Laser species: TEA-CO ₂

Frequency (per 1 second umber of pulse): 50Hz

Figure (beam width): 0.9 * 1.9mm

Sweep speed (the objective table translational speed of laser machine): 814mm/min

Voltage (excitation voltage): 20kV

Energy density (each unit are volume laser radiation energy): 11J/cm ²

Scanning times: 4 times

Then, reduce pressure 1 * 10 being adjusted into ^-4In the chamber of the atmosphere of atm, on the one side of the insulating properties lamellar body that obtains, the conduction circuit component material of coating modulation, afterwards, the big for example normal pressure by making volume atmosphere pressure rises in the chamber, conduction road at the insulating properties lamellar body forms the inside filled conductive circuit component material separately of using through hole, thus, forms conduction circuit component material layer in each conduction road forms with through hole.

Afterwards, to conduct electricity the road at each and form the insulating properties lamellar body of conduction circuit component usefulness material layer in forming with through hole, be configured between a pair of electromagnet that possesses heater, by making this electromagnet action, one side makes the parallel magnetic field of average 2.2T (tesla) work along the thickness direction of conduction circuit component with material layer, one side is with 100 ℃ of heat treated of carrying out 1 hour, the conduction circuit component is solidified with material layer, form with the conduction circuit component that forms in the through hole thereby form the conduction road that is located at the insulating properties lamellar body integratedly, make the anisotropic conductive sheet of formation shown in Figure 1 with this.Below, this anisotropic conductive sheet is called " anisotropic conductive sheet (A) ".

The anisotropic conductive sheet (A) that obtains, be that thickness is the smooth sheet in two sides of 100 μ m, and be be of a size of longitudinally 200 μ m, the horizontal section that is of a size of 60 μ m roughly the conduction circuit component of tetragonal column form with the spacing assortment of 100 μ m.In addition, the ratio of the electroconductive particle of each conduction circuit component is that volume fraction is 30%.

(embodiment 2)

In embodiment 1, by under the state on the one side that exposure mask is configured in the insulating properties lamellar body, the circuit component that directly will conduct electricity is coated on the another side of exposure mask with material, conduction circuit component formation at the insulating properties lamellar body uses the inside separately of through hole to form conduction circuit component formation material layer with the inside separately of through hole and the printing opacity of exposure mask, by carrying out the cured of this conduction road formation material layer, forming the conduction road formation that is located at the insulating properties lamellar body integratedly uses in the through hole, have from the conduction circuit component of outstanding (one side side) ledge of the one side of insulating properties lamellar body, in addition, similarly to Example 1, make anisotropic conductive sheet with formation shown in Figure 9.Below, this anisotropic conductive sheet is called " anisotropic conductive sheet (B) ".

The anisotropic conductive sheet (B) that obtains is that the spacing assortment of conduction circuit component with 100 μ m formed, and the thickness that forms the part of conduction circuit component is 118 μ m, and the projecting height of conduction circuit component is 18 μ m.In addition, the conduction circuit component is of a size of 200 μ m, the horizontal 60 μ m that are of a size of longitudinally in the wall thickness of insulating properties lamellar body.In addition, the ratio of the electroconductive particle of each conduction circuit component is that volume fraction is 30%.

(embodiment 3)

(resin bed forms the modulation of material)

By to distilled water 285g, add the 15g weight average degree of polymerization and be 2000 pva powder, and with 80 ℃ of stirrings, modulation is that the resin bed that the polyvinyl alcohol water solution of 5 weight % constitutes forms material by the concentration of polyvinyl alcohol.

(manufacturing of anisotropic conductive sheet)

On the another side by the insulating properties sheet matrix material that constitutes at the solidfied material that by thickness is the aqueous silicone rubber of additive type of 100 μ m, the resin bed of coating modulation forms material, and with 40 ℃ of dry coatings, forming thickness is the ledge formation resin bed of 25 μ m, and making is provided with the duplexer that forms with insulating properties sheet matrix material and ledge formation integratedly with resin bed.

Then, by with above-mentioned exposure mask, the mode of joining with its one side and the one side of the insulating properties sheet matrix material of complex disposes, and with laser machine " Impact L-500 " (Sumitomo heavy-duty machine tool industry (strain) system), use through hole with following condition irradiating laser from the another side side of this exposure mask via a plurality of printing opacities, on insulating properties sheet matrix material, form, connect and a plurality of conductions road of extending forms and uses through hole along thickness direction respectively, simultaneously on ledge forms with resin bed, formation forms a plurality of ledges formation through holes that connect and extend along thickness direction continuously with through hole with the conduction road respectively, thus, be formed on and ledge is set on the another side of insulating properties lamellar body forms the once-combined body that forms with resin bed.

Each conduction road forms with through hole and each ledge formation through hole, it all is the roughly truncated rectangular pyramids shape that diameter diminishes to another side gradually from one side, the big or small a in the opening footpath of the one side of insulating properties lamellar body is maximum, and the relative aperture a/b that opens that the big or small a in the opening footpath of the one side of insulating properties lamellar body and ledge form with the big or small b in the opening footpath of the another side of resin bed is 1.2.

(illuminate condition of laser)

Laser species: TEA-CO ₂

Frequency (per 1 second umber of pulse): 50Hz

Figure (beam width): 0.5 * 1.92mm

Sweep speed (the objective table translational speed of laser machine): 1192mm/min

Voltage (excitation voltage): 20kV

Energy density (each unit are volume laser radiation energy): 12J/cm ²

Scanning times: 4 times

Then, by reducing pressure 1 * 10 being adjusted into ^-4The chamber of atmosphere in, using the sealing that constitutes by Viton to form the another side side that forms the usefulness through hole with through hole and ledge with the conduction road that sheet rubber stops up once-combined body, simultaneously exposure mask is configured under the state on the one side of complex, directly on the one side of once-combined body, be coated with conduction circuit component material with mask used for printing, afterwards, make the atmosphere pressure rises in the chamber and reach for example normal pressure, in separately the inner space of the printing opacity that comprises exposure mask with through hole, the conduction road of insulating properties lamellar body forms the inner space separately with through hole, and the ledge that ledge forms with resin bed forms the conduction circuit component shaping of the inner space separately of using through hole with in the space, filled conductive circuit component material, thus, in being shaped with the space, the conduction circuit component forms conduction circuit component material layer.

Afterwards, will the conduction circuit component be shaped with the space separately in formed the once-combined body of conduction circuit component usefulness material layer, by be configured in its one side and another side on, be under the state that supports of the upside increased pressure board that constitutes of the iron of 6mm and downside increased pressure board by thickness respectively, be configured between a pair of electromagnet that possesses heater, by making this electromagnet action, one side makes the parallel magnetic field of average 2.2T work along the thickness direction of conduction circuit component with material layer, simultaneously with 100 ℃ of heat treated of carrying out 1 hour, the conduction circuit component solidified with material layer, be shaped and conduct electricity circuit component with having formed in the space thereby be formed on the conduction circuit component, by exposure mask, insulating properties lamellar body and ledge form the secondary complex with the duplexer formation of resin bed.

Then, by peeling off and remove exposure mask from the secondary complex, form the side-prominent part of one side, under this state, in 80 ℃ the warm water that soaks by the integral body that makes the secondary complex and placed 3 hours, dissolve and remove ledge and form and use resin bed, thus, form the side-prominent part of another side,, make the anisotropic conductive lamellar body of formation shown in Figure 12 with this.Below, this anisotropic conductive sheet is called " anisotropic conductive sheet (C) ".

The anisotropic conductive sheet (C) that obtains, be that the spacing assortment of conduction circuit component with 100 μ m formed, the thickness that forms the part of conduction circuit component is 143 μ m, the projecting height of the side-prominent part of one side of conduction circuit component is 18 μ m, and the projecting height of the side-prominent part of another side is 25 μ m.In addition, the conduction circuit component is of a size of 200 μ m, the horizontal 60 μ m that are of a size of longitudinally in the wall thickness of insulating properties lamellar body.In addition, the ratio of the electroconductive particle of each conduction circuit component is that volume fraction is 30%.

When anisotropic conductive sheet (A) and the anisotropic conductive sheet (B) of embodiment 2 and the anisotropic conductive sheet (C) of embodiment 3 to embodiment 1, when measuring the resistance between the conduction circuit component of adjacency respectively, anisotropic conductive sheet (A), anisotropic conductive sheet (B) and anisotropic conductive sheet (C) all are more than or equal to 1 * 10 ¹⁴Ω has confirmed can guarantee the situation that the state of enough insulating properties forms each other with the conduction circuit component of adjacency.

In addition, when the load with per 1 conduction circuit component is the mode of 5g, along thickness direction anisotropic conductive sheet (A), anisotropic conductive sheet (B) and anisotropic conductive sheet (C) are pressurizeed respectively, and under this state, when measuring the resistance of this conduction circuit component, anisotropic conductive sheet (A), anisotropic conductive sheet (B) and anisotropic conductive sheet (C) all are 60m Ω, have confirmed to obtain the situation of good pressurization conductivity.

(comparative example 1)

In embodiment 1, the state configuration that disposes by the mode that exposure mask is joined with the one side of its another side and insulating properties sheet matrix material, and from the one side side of this exposure mask a plurality of printing opacities through hole irradiating laser via exposure mask, formed conduction circuit component formation through hole, in addition, similarly to Example 1, make the relatively anisotropic conductive sheet of usefulness.

The anisotropic conductive sheet of the relatively usefulness that obtains, be one side the conduction circuit component the conduction circuit component that is shaped as vertical 200 μ m, horizontal 60 μ m, another side be shaped as vertical 240 μ m, horizontal 100 μ m, from a taper (truncated rectangular pyramids shape) that enlarges towards another side.

When anisotropic conductive sheet to the relatively usefulness that obtains, when measuring the resistance between the conduction circuit component of adjacency, be 0.3～10 Ω, confirmed can not obtain between the conduction circuit component of adjacency the situation of enough insulating properties.In addition, when the insulating properties sheet body portion between the conduction circuit component of observing adjacency, confirmed on the another side of anisotropic conductive sheet, the position that exists the conduction circuit component to form connected to each otherly, each conduction circuit component can not be constituted independently of one another, and the galvanoscopic situation of circuit arrangement can not be used for.

(comparative example 2)

In the foregoing description 3, dispose by the mode that exposure mask is joined with the one side of its another side and insulating properties sheet matrix material, and from the one side side of this exposure mask a plurality of printing opacities through hole irradiating laser via exposure mask, on insulating properties sheet matrix material, form conduction circuit component formation through hole, thereby form the insulating properties lamellar body, on the two sides of insulating properties lamellar body, configuration has formed the mask used for printing of opening according to the figure of the conduction circuit component that will form, form the conduction circuit component shaping of the inner space of using through hole with forming conduction circuit component material layer in the space in the inner space of the opening that comprises mask used for printing and the conduction road of insulating properties sheet matrix material, by carrying out the cured of this conduction circuit component material layer, form the conduction circuit component that is located at integratedly on the insulating properties lamellar body, by peeling off and remove mask used for printing, form side-prominent part of one side and the side-prominent part of another side, in addition, make the relatively anisotropic conductive sheet of usefulness similarly to Example 3.

The conduction circuit component of insulating properties lamellar body forms uses through hole, be its one side opening footpath size for the size in the opening footpath of vertical 0.2mm, horizontal 0.06mm, another side for vertical 0.24mm, horizontal 0.1mm, the opening footpath is from a taper (truncated rectangular pyramids shape) that enlarges towards another side, be configured in the mask used for printing on the one side side, thickness is 18 μ m, the size in opening footpath is vertical 200 μ m, horizontal 60 μ m, be configured in the mask used for printing of another side side, thickness is 25 μ m, and the size in opening footpath is vertical 240 μ m, horizontal 100 μ m.

When anisotropic conductive sheet to the relatively usefulness that obtains, when measuring the resistance between the conduction circuit component of adjacency, be 0.3～10 Ω, confirmed can not obtain between the conduction circuit component of adjacency the situation of enough insulating properties.

In addition, when the insulating properties sheet body portion between the conduction circuit component of observing adjacency, confirmed the position that existence conduction circuit component forms connected to each otherly, can not constitute each conduction circuit component independently of one another, in addition, whole about about 0.5% conduction circuit component, side-prominent part of one side or the side-prominent part of another side or this two side have damaged situation.

(embodiment 4)

(making of wafer for evaluation sheet)

As shown in figure 40, at diameter be 8 inches silicon (coefficient of linear thermal expansion 3.3 * 10 ^-6/ K) on the wafer (60) of system, add up to form 393 foursquare integrated circuits that are of a size of 8mm * 8mm separately.Each is formed on the integrated circuit (L) on the wafer (60), as shown in figure 41, has the electrode zone of being examined (A) in the central, be examined on the zone (A) at this, as shown in figure 42,50 vertical (being above-below direction in Figure 42) separately are of a size of 200 μ m, laterally (being left and right directions in Figure 42) be of a size of 50 μ m rectangle be examined electrode (62) with the spacing of 100 μ m transversely assortment become row.In addition, the whole sum that is examined electrode (62) of this wafer (60) is 19650, and all electrodes that are examined all are electrically connected with the common extraction pole (diagram is omitted) of the circumference that is formed on this wafer (60).Below, this wafer is called " wafer for evaluation sheet W1 ".

In addition, on wafer (60), form except 50 of integrated circuit (L) are examined electrode (62) and do not form extraction pole, and each is examined beyond electrode is electrically insulated from each other, with 393 integrated circuits (L) of the same formation of wafer for evaluation sheet W1.The sum that is examined electrode of this wafer integral body is 19650.Below, this wafer is called " wafer for evaluation sheet W2 ".

(manufacturing of anisotropic conductive connector)

(1) making of frame plate:

According to Figure 43 and formation shown in Figure 44, according to following condition, add up to make 40 diameters and be 8 inches frame plate (31), this frame plate have with wafer for evaluation sheet W1 respectively be examined the opening (31A) that 393 anisotropic conductive sheets that electrode zone forms accordingly form usefulness.

The material of this frame plate is 42 alloys (saturation magnetization 1.7Wb/m ², coefficient of linear thermal expansion 6.2 * 10 ^-6/ K), its thickness is 0.06mm.

Each anisotropic conductive sheet forms the opening of usefulness, and its horizontal (being left and right directions in Figure 43 and Figure 44) is of a size of 5000 μ m, and vertically (being above-below direction in Figure 43 and Figure 44) is of a size of 320 μ m.

Form at the anisotropic conductive sheet of adjacency along the longitudinal on the middle position between the opening of usefulness, being formed with diameter is the air ostium (31B) of the circle of 1000 μ m.

(2) making of liner:

According to following condition, make last side liner and time side liner have respectively with the anisotropic conductive sheet shaping usefulness that is examined a plurality of through holes that electrode zone forms accordingly of wafer for evaluation sheet W1.The material of these liners is stainless steel (SUS304), and its thickness is 20 μ m.

With respectively be examined the corresponding through hole of electrode zone, its horizontal 6000 μ m that are of a size of are of a size of 1400 μ m longitudinally.

(3) making of exposure mask:

The mask basis material that constitutes at the copper that by thickness is 18 μ m (is of a size of 230m m longitudinally; the horizontal 230mm that is of a size of) forms resist layer on the one side; size is 220 μ m longitudinally; horizontal size is that the opening of 75 μ m is transversely to be the spacing of 100 μ m; be the positive film masks that mode that the separating distance of 6.34mm is arranged forms along the longitudinal; be configured on the one side of this mask basis material; carry out exposure-processed then; afterwards; by carrying out development treatment; on resist layer, form the figure hole; afterwards, by one side side, be 45 ℃ etching solution enforcement spraying etch processes of main component in order to iron chloride from this mask basis material; form a plurality of printing opacity through holes; afterwards, by removing resist layer, obtain exposure mask.

The printing opacity through hole of this exposure mask, opening with the one side of forming is to be of a size of 220 μ m, the horizontal 75 μ m that are of a size of longitudinally, and the opening of another side is the shape that is of a size of the inner space of 200 μ m, the horizontal truncated rectangular pyramids shape that is of a size of 60 μ m longitudinally.In addition, printing opacity is 19650 with the sum of through hole, is transversely with the spacing of 100 μ m, is the state of the separating distance arrangement of 6.34mm along the longitudinal.

(4) the making example 1 of anisotropic conductive connector:

(making of anisotropic conductive connector (A1)～(A10))

With above-mentioned frame plate, liner, exposure mask, on frame plate, form the anisotropic conductive sheet by following mode.

In aqueous silicone rubber 100 weight portions of additive type, add and mixed conductivity particle 375 weight portions, afterwards, handle modulation conduction circuit component material by the deaeration of implementing to realize by decompression.At this, as electroconductive particle, use nickel particles to be core particle with averaged particles footpath 10 μ m, on this core particle, the covering amount with 30 weight % of its weight has coated golden particle by electroless plating.

In addition, as the aqueous silicone rubber of additive type, use the viscosity of A liquid to be 250Pas, the viscosity of B liquid is the two-liquid type of 250Pas, 150 ℃ permanent compression set of solidfied material is 5%, and the duroscope A hardness of solidfied material is 32, and the tearing strength of solidfied material is the material of 25kN/m.

In addition, the characteristic of the above-mentioned aqueous silicone rubber of additive type is measured according to following mode.

(イ) viscosity of the aqueous silicone rubber of additive type:

Use Brookfield viscometer, measure 23 ± 2 ℃ viscosity.

(ロ) compression set of silicone rubber solidfied material:

The A liquid of the aqueous silicone rubber of additive type of two-liquid type and the B liquid ratio with equivalent is mixed.Then, this mixture is poured in the metal die, after the deaeration of this mixture having been carried out realized by decompression is handled, be cured processing by condition with 120 ℃, 30 minutes, making is that 12.7mm, diameter are the cylinder that the silicone rubber solidfied material of 29mm constitutes by thickness, to this cylinder, carry out regelate with 200 ℃, 4 hours condition.The cylinder that obtains by this way is used as test film, and is the compression set of 150 ± 2 ℃ of benchmark mensuration with JIS K 6249.

The tearing strength of (Ha) silicone rubber solidfied material:

By carry out the cured and the regelate of the aqueous silicone rubber of additive type with the condition identical with above-mentioned (ロ), making thickness is the sheet of 2.5mm.Make meniscate test film by stamping-out from this sheet, and be the tearing strength of 23 ± 2 ℃ of benchmark mensuration with JIS K 6249.

(ニ) duroscope A hardness:

To overlap according to 5 of the sheets made from above-mentioned (Ha) same mode, and with the duplexer that obtains as test film, and be the duroscope A hardness of 23 ± 2 ℃ of benchmark mensuration with JIS K 6249.

(formation of once-combined body)

At first, by mask to print being configured in by thickness is on the back support plate (being of a size of 230mm, the horizontal 230mm of being of a size of longitudinally) that constitutes of 42 alloys of 250 μ m, and the polymer substance that utilizes the print process coating to be made of the aqueous silicone rubber of above-mentioned additive type forms material, overleaf on the one side of supporting bracket, form on the corresponding position of opening of usefulness with the anisotropic conductive sheet of frame plate, form polymer substance and form material layer.Form the mask to print of usefulness as the polymer substance material layer; be mask substrate (being of a size of 230mm, the horizontal 230mm of being of a size of longitudinally) that the iron that by thickness is 150 μ m constitutes, form on the corresponding position of opening of usefulness with the anisotropic conductive sheet of frame plate; formed the mask of a plurality of through holes; each through hole; its horizontal 5800 μ m that are of a size of are of a size of 600 μ m longitudinally.

Then, the back support plate of polymer substance formation material layer will have been formed, being configured in by thickness is on the flat downside increased pressure board that constitutes of the iron of 6mm, on this back support plate, via following side liner and the position ground configuration block frame plate that matches, the while position will be gone up side liner with matching and will be configured on the frame plate, and then, exposure mask is used the bigger one side in opening footpath of through hole with its printing opacity, promptly, forming the mode that one side that printing opacity formed the face of resist layer and last side liner when with through hole joins disposes, on the another side of exposure mask, via mould release film configuration upside increased pressure board, by they are pressurizeed along stacked direction, at shaping filled high polymer material in the space of anisotropic conductive sheet, thereby the polymer substance that forms the purpose form forms material layer.At this, as mould release film, used thickness is 50 μ m, is of a size of Teflon (login trade mark) film of 230mm, the horizontal 230mm of being of a size of longitudinally.

Under this state, by carrying out 90 minutes volume heat treated with 100 ℃ temperature, making polymer substance form material layer solidifies, thereby each peristome at frame plate forms insulating properties sheet matrix material, afterwards, by removing upside increased pressure board, downside increased pressure board and mould release film, obtain once-combined body.

(formation of secondary complex)

Once-combined body by obtaining in the above described manner is configured in CO ₂On the processing objective table of laser machine " Impact L-500 " (Sumitomo heavy-duty machine tool industry (strain) system), and from the another side side of the exposure mask of a side complex with following condition irradiating laser, on the insulating properties sheet matrix material of each peristome that is located at frame plate, form a plurality of conduction circuit components formation through holes, afterwards, by peeling off the back support plate, obtain the secondary complex.

(formation of anisotropic conductive sheet)

With the secondary complex that obtains in the above described manner, be configured on the printing machine table in the chamber of Vacuum printing machine with sheet rubber via sealing, and then, after being configured in above-mentioned mask to print position on the secondary complex, reduce pressure 1 * 10 in the chamber with the Vacuum printing machine with matching ^- ⁴Atm, under this state, be coated with screen printing the conduction circuit component with material after, by making the atmosphere pressure rises in the chamber reach normal pressure, conduction circuit component material is filled in the formation of conduction road uses in the inner space of through hole with the inner space of through hole and the printing opacity of exposure mask, afterwards, by removing mask to print, and roll with rubber and to remove the conductive paste material that remains on the exposure mask, form conduction circuit component material layer.

Afterwards, to in being shaped with the space, the conduction circuit component form the secondary complex of conduction circuit component with material layer, by be configured on its one side and the another side, be under the state that supports of the upside increased pressure board that constitutes of the iron of 6mm and downside increased pressure board by thickness respectively, be configured between a pair of electromagnet that possesses heater, by making this electromagnet action, one side makes the parallel magnetic field of average 2.2T (tesla) work one side 2.3kg/cm along the thickness direction of conduction circuit component with material layer ²Pushing force pressurization, simultaneously with 100 ℃ of heat treated of carrying out 1 hour, electroconductive particle is orientated in the mode of arranging along thickness direction, the conduction circuit component is formed to be solidified with material layer, thereby form and to conduct electricity circuit component and be located at the anisotropic conductive sheet that forms on the insulating properties lamellar body integratedly, with this, make anisotropic conductive connector of the present invention.

If specifically describe the anisotropic conductive sheet of the anisotropic conductive connector that obtains, be exactly each anisotropic conductive sheet, be the horizontal 6000 μ m that are of a size of, be of a size of the sheet of 1400 μ m longitudinally.

On each anisotropic conductive sheet, will with wafer for evaluation sheet W1 be examined corresponding 50 the conduction circuit components of electrode with the spacing of 100 μ m transversely assortment become row, each conducts electricity circuit component, be that thickness is 118 μ m, laterally be of a size of 60 μ m, be of a size of the tetragonal quadrangular shape of section of 200 μ m longitudinally.In addition, be 100 μ m with the thickness of the insulating properties sheet body portion of each conduction circuit component mutually insulated, with respect to the thickness T 2 of conduction circuit component, insulating properties sheet body portion the ratio (T2/T1) of thickness T 1 be 1.18.In addition, the thickness (thickness that two forks are divided) of part each anisotropic conductive sheet, that supported by frame plate is 20 μ m.

According to the above, on 10 frame plates, form the anisotropic conductive sheet respectively, add up to and make 10 anisotropic conductive connectors.Below, with these anisotropic conductive connectors as anisotropic conductive connector (A1)～anisotropic conductive connector (A10).

(the relatively making of the anisotropic conductive connector (B1)～(B10) of usefulness)

In the production process of above-mentioned anisotropic conductive connector (A1)～(A10), exposure mask is used the less another side in opening footpath of through hole with its printing opacity, promptly, form the face of an opposite side that printing opacity has formed the one side of resist layer when with through hole, the mode of joining with the one side of last side liner disposes, and formed once-combined body, in addition, similarly add up to the production process of anisotropic conductive connector (A1)～(A10) and make 10 relatively anisotropic conductive connectors of usefulness.Below, with these anisotropic conductive connectors as anisotropic conductive connector (B1)～anisotropic conductive connector (B10).

If specifically describe the anisotropic conductive sheet of the anisotropic conductive connector (B1)～(B10) of the relatively usefulness that obtains, it is exactly each anisotropic conductive sheet, be the horizontal 6000 μ m that are of a size of, be of a size of the sheet of 1200 μ m longitudinally, will with wafer for evaluation sheet W1 be examined corresponding 50 the conduction circuit components of electrode with the spacing of 100 μ m transversely assortment become row, it is 118 μ m that each conduction circuit component has thickness, horizontal size in the scope of about 70～80 μ m, the section shape of size in the scope of 210～220 μ m longitudinally.In addition, be 100 μ m with the thickness of the insulating properties sheet body portion of each conduction circuit component mutually insulated, be 1.18 with respect to the ratio (T2/T1) of the thickness T 1 of the insulating properties sheet body portion of the thickness T 2 of conduction circuit component.In addition, the thickness (thickness that two forks are divided) of the part that is supported by frame plate of each anisotropic conductive sheet is 20 μ m.

(5) the making example 2 of anisotropic conductive connector:

(making of anisotropic conductive connector (C1)～(C10))

With above-mentioned frame plate, liner, exposure mask, on frame plate, form the anisotropic conductive sheet in the following way.

At first, by with respect to distilled water 285g, add the 15g weight average degree of polymerization and be 2000 pva powder, and stir with 80 ℃, modulation is that the resin bed that the polyvinyl alcohol water solution of 5 weight % constitutes forms material by the concentration of polyvinyl alcohol.

(formation of once-combined body)

Then, (be of a size of 230mm longitudinally by the supporting bracket that constitutes at 42 alloys that by thickness are 250 μ m, laterally be of a size of 230mm) on, the resin bed of coating modulation forms material, and with 40 ℃ of dry coatings, forming thickness is the ledge formation resin bed of 25 μ m, thereby formation duplexer, form with on the one side of resin bed by the ledge that mask used for printing is configured in duplexer, and the polymer substance that is made of the aqueous silicone rubber of above-mentioned additive type with the print process coating forms material, form on the corresponding position of opening of usefulness at anisotropic conductive sheet, form polymer substance and form material layer with frame plate.Form the mask to print of usefulness as the polymer substance material layer; be mask substrate (being of a size of 230mm, the horizontal 230mm of being of a size of longitudinally) that the iron that by thickness is 150 μ m constitutes, form on the corresponding position of opening of usefulness with the anisotropic conductive sheet of frame plate; be formed with the mask of a plurality of through holes; each through hole; its horizontal 5800 μ m that are of a size of are of a size of 600 μ m longitudinally.

In addition, when being 50 μ m by thickness, be of a size of 230mm longitudinally, on the another side of the mould release film that horizontal Teflon (login trade mark) film that is of a size of 230mm constitutes, under the state that the mode that exposed mask is joined with it with its another side disposes, form material by on the one side of exposure mask, being coated with the polymer substance that constitutes by the aqueous silicone rubber of above-mentioned additive type with print process, form on the corresponding position of opening of usefulness at anisotropic conductive sheet with frame plate, polymer substance is formed material layer, form with the state in the through hole with the printing opacity that it is filled in exposure mask.

Afterwards, the duplexer of polymer substance formation material layer will have been formed, being configured in by thickness is on the flat downside increased pressure board that constitutes of the iron of 6mm, on the one side of this duplexer, via the downside pad position ground configuration block frame plate that matches, the while position will be gone up side liner with matching and will be configured on the frame plate, and then, in the above on the one side of side liner, form the exposure mask of material layer and the duplexer of mould release film with having formed polymer substance, use the bigger one side in opening footpath of through hole with the printing opacity of exposure mask, promptly, form the one side that printing opacity has formed resist layer when with through hole, the mode relative with the one side of last side liner disposes, and disposes flat upside increased pressure board on the one side of mould release film, by they are pressurizeed along stacked direction, at shaping filled high polymer material in the space of anisotropic conductive sheet, thereby the polymer substance that forms the purpose form forms material layer.

Under this state, by carrying out 90 minutes volume heat treated with 100 ℃ temperature, making polymer substance form material layer solidifies, thereby in the peristome of each frame plate, form insulating properties sheet matrix material, under the state of having removed upside increased pressure board, downside increased pressure board and mould release film, by it is configured in CO ₂On the processing objective table of laser machine " Impact L-500 " (Sumitomo heavy-duty machine tool industry (strain) system), and from the another side side of exposure mask according to following condition irradiating laser, on the insulating properties sheet matrix material of each peristome that is located at frame plate, form a plurality of conductions road formation through hole that connects and extend along thickness direction respectively, simultaneously on ledge forms with resin bed, formation forms the ledge formation through hole that connects and extend along thickness direction continuously with through hole with the conduction road respectively, afterwards, by peeling off supporting bracket, obtain once-combined body.

(formation of secondary complex)

With the once-combined body that obtains in the above described manner, be configured in sheet rubber via the sealing that constitutes with Viton on the printing machine table in the chamber of Vacuum printing machine, and then, after being configured in above-mentioned mask used for printing position on the once-combined body, reduce pressure 1 * 10 in the chamber with the Vacuum printing machine with matching ^-4Atm, under this state, utilize screen printing be coated with above-mentioned conduction circuit component with material after, by making the atmosphere pressure rises in the chamber reach normal pressure, to conduct electricity the circuit component material, be filled in the printing opacity that comprises exposure mask and use the inner space of through hole, the conduction circuit component that the formation of conduction circuit component uses the ledge of resin bed to form the inner space of using through hole with the inner space and the ledge formation of through hole is shaped and uses in the space, afterwards, by removing mask used for printing, and roll with rubber and to remove the conduction circuit component material that remains on the exposure mask, form conduction circuit component material layer.

Afterwards, to in being shaped with the space, the conduction circuit component form the once-combined body of conduction circuit component with material layer, by be configured on its one side and the another side, be under the state that supports of the upside increased pressure board that constitutes of the iron of 6mm and downside increased pressure board by thickness respectively, be configured between a pair of electromagnet that possesses heater, by making this electromagnet action, one side makes the parallel magnetic field of average 2.2T work one side 2.3kg/cm along the thickness direction of conduction circuit component with material layer ²Pushing force pressurization, simultaneously with 100 ℃ of heat treated of carrying out 1 hour, electroconductive particle is orientated in the mode of arranging along thickness direction, the conduction circuit component is solidified with material layer, thereby forms the conduction circuit component, thus, obtain the secondary complex.

(formation of anisotropic conductive sheet)

Then, by peeling off and remove exposure mask from the secondary complex, form the side-prominent part of one side of conduction circuit component, under this state, be immersed in 80 ℃ the warm water by the integral body that makes the secondary complex and placed 3 hours, dissolving is also removed ledge formation resin bed, thus, form the side-prominent part of another side of conduction circuit component, and form the conduction circuit component to be set up the anisotropic conductive sheet that forms from the outstanding state in the two sides of insulating properties lamellar body, with this, make anisotropic conductive connector of the present invention.

If specifically describe the anisotropic conductive sheet of the anisotropic conductive connector that obtains, each anisotropic conductive sheet is the horizontal 6000 μ m that are of a size of, and is of a size of the sheet of 1400 μ m longitudinally.

On each anisotropic conductive sheet, will with wafer for evaluation sheet W1 be examined corresponding 50 the conduction circuit components of electrode with the spacing of 100 μ m transversely assortment become row, each conducts electricity circuit component, be that thickness is 143 μ m, laterally volume is of a size of 60 μ m, is of a size of the tetragonal quadrangular shape of section of 200 μ m longitudinally.In addition, be 100 μ m with the thickness of the insulating properties sheet body portion of each conduction circuit component mutually insulated, be 1.43 with respect to the ratio (T2/T1) of the thickness T 2 of the conduction circuit component of the thickness T 1 of insulating properties sheet body portion.In addition, the thickness (thickness that two forks are divided) of the part that is supported by frame plate of each anisotropic conductive sheet is 20 μ m.

According to above mode, on 10 frame plates, form the anisotropic conductive sheet respectively, add up to and make 10 anisotropic conductive connectors.Below, with these anisotropic conductive connectors as anisotropic conductive connector (C1)～anisotropic conductive connector (C10).

(the relatively making of the anisotropic conductive connector (D1)～(D10) of usefulness)

In the production process of above-mentioned anisotropic conductive connector (C1)～(C10), do not forming ledge formation resin bed on the one side in supporting bracket, and do not dispose under the state of exposure mask, by shaping filled high polymer material in the space at the anisotropic conductive sheet, thereby the polymer substance that forms the purpose form forms material layer, be cured processing then, form insulating properties sheet matrix material, afterwards, exposure mask is used the less another side in opening footpath of through hole with its printing opacity, promptly, form the face of an opposite side that printing opacity has formed the one side of resist layer when with through hole, the mode of joining with the one side of insulating properties sheet matrix material disposes, then by one side side irradiating laser from exposure mask, form conduction road formation through hole, configuration is according to forming the mask used for printing that has formed opening with the corresponding figure of the figure of through hole with the conduction road on the two sides of insulating properties lamellar body, by forming the conduction circuit component shaping of the inner space of using through hole with forming conduction circuit component material layer in the space in the inner space of the opening that comprises mask used for printing and the conduction road of insulating properties lamellar body, be cured processing then, form the conduction circuit component, by peeling off and remove mask used for printing, form side-prominent part of one side and the side-prominent part of another side, thus, form the conduction circuit component to be set up the anisotropic conductive sheet that forms from the outstanding state in the two sides of insulating properties lamellar body, in addition, similarly add up to the production process of anisotropic conductive connector (C1)～(C10) and make 10 relatively anisotropic conductive connectors of usefulness.Below, with these anisotropic conductive connectors as anisotropic conductive connector (D1)～anisotropic conductive connector (D10).

If specifically describe the anisotropic conductive sheet that is equipped with anisotropy conductive connector (D1)～(D10) of the relatively usefulness that obtains, it is exactly each anisotropic conductive sheet, be the horizontal 6000 μ m that are of a size of, be of a size of the sheet of 1200 μ m longitudinally, and will with wafer for evaluation sheet W1 be examined corresponding 50 the conduction circuit components of electrode with the spacing of 100 μ m transversely assortment become row.In addition, the thickness of part of formation conduction circuit component with anisotropic conductive sheet is in the scope of 133～143 μ m, horizontal size in the wall thickness of insulating properties lamellar body in the scope of about 70～80 μ m, the section shape of size in the scope of 210～220 μ m longitudinally.In addition, be 100 μ m with the thickness of the insulating properties sheet body portion of each conduction circuit component mutually insulated, be 1.18 with respect to the ratio (T2/T1) of the thickness T 2 of the conduction circuit component of the thickness T 1 of insulating properties sheet body portion.In addition, the thickness (thickness that two forks are divided) of the part that is supported by frame plate of each anisotropic conductive sheet is 20 μ m.

(6) inspection circuit substrate:

As baseplate material, use aluminium oxide ceramics (coefficient of linear thermal expansion 4.8 * 10 ^-6/ K), and make the inspection circuit substrate that has formed the inspection electrode according to the corresponding figure of the figure that is examined electrode with wafer for evaluation sheet W1.Circuit substrate is used in this inspection, is the whole rectangle that is of a size of 30cm * 30cm, and it checks electrode, and the horizontal 60 μ m that are of a size of are of a size of 200 μ m longitudinally.Below, should check with circuit substrate to be called " check and use circuit substrate T ".

(evaluation of anisotropic conductive connector)

In the following way, respectively to the anisotropic conductive connector (A1)～(A10) and the anisotropic conductive connector (B1)～(B10) of usefulness relatively, with the anisotropic conductive connector (C1)～(C10) and the anisotropic conductive connector (D1)～(D10) of usefulness relatively, carry out the evaluation of initial stage conductive characteristic.

Promptly, W1 is configured on the testing stand with the wafer for evaluation sheet, the anisotropic conductive connector is connected with its each be examined mode electrode on of conducting position in this wafer for evaluation sheet W1, the position is configured on this wafer for evaluation sheet W1 with matching, to check that the connection that is positioned at this anisotropic conductive connector with its each inspection electrode with circuit substrate T is with the mode on the conductive part, the position is configured on this anisotropic conductive connector with matching, and then, will check and pressurize downwards with the load (being attached to per 1 connection on average is 3g with the load on the conductive part) of 58.95kg with circuit substrate.Then, under room temperature (25 ℃), to check that with circuit substrate T 19650 check the resistance between the extraction pole of electrode and wafer for evaluation sheet W1, as connect resistance with conductive part (below, be called " conducting resistance ") and measure in turn, and calculate conducting resistance is used conductive part less than the connection of 1 Ω ratio.

In addition, W2 is configured on the testing stand with the wafer for evaluation sheet, the anisotropic conductive connector is connected with its each be examined mode electrode on of conducting position in this wafer for evaluation sheet W2, the position is configured on this wafer for evaluation sheet W2 with matching, to check that the connection that is positioned at this anisotropic conductive connector with its each inspection electrode with circuit substrate T is with the mode on the conductive part, the position is configured on this anisotropic conductive connector with matching, and then, will check with circuit substrate T and pressurize downwards with the load of 158kg (be attached to per 1 connection with the load average out to 8g on the conductive part).Then, under room temperature (25 ℃), with 2 resistance of checking between the electrode checking with the adjacency of circuit substrate T, as 2 connections of adjacency with conductive parts (below, be called " conductive part to ") between resistance (below, be called " insulation resistance ") and measure in turn, and calculate insulation resistance more than or equal to the right ratio of the conductive part of 10M Ω.

More than, the result is illustrated in table 1 and the table 2.

(table 1)

(table 2)

As from above the result understood, according to anisotropic conductive connector of the present invention (A1)～(A10) and anisotropic conductive connector (C1)～(C10), even if the spacing of the conduction circuit component of anisotropic conductive sheet is less, also can be used as and between the conduction circuit component of adjacency, to guarantee the anisotropic conductive connector of enough insulating properties and constitute, confirmed to obtain the situation of favorable conductive characteristic simultaneously.In addition, in anisotropic conductive connector (C1)～(C10), having confirmed for all conduction circuit components, all is the element that is formed with side-prominent part of one side and the side-prominent part of another side with required shape.

With respect to this,, confirmed between the conduction circuit component of adjacency, can not obtain the situation of enough insulating properties at the anisotropic conductive connector (B1)～(B10) of usefulness relatively and relatively in the anisotropic conductive connector (D1)～(D10) of usefulness.In addition, when the insulating properties sheet body portion between the conduction circuit component of observing adjacency, confirmed the position that existence conduction circuit component forms connected to each otherly, the situation that the circuit component that each can not be conducted electricity constitutes independently of one another.Particularly, in anisotropic conductive connector (D1)～(D10), confirmed whole about about 0.5% conduction circuit component, one side or two sides of side-prominent part of one side and the side-prominent part of another side have damaged situation.

Claims

1. anisotropic conductive sheet, have to be formed with on it and form along a plurality of conductions road that thickness direction extends with insulating properties lamellar body through hole, that constitute by elastomer, each conduction road that is located at this insulating properties lamellar body integratedly forms with the conduction circuit component in the through hole, it is characterized in that:

The conduction road of described insulating properties lamellar body forms uses through hole, be by use according to the corresponding figure of figure of the conduction circuit component that will form, formed a plurality of printing opacities that diameter diminishes gradually from the one side of joining with the one side of insulating properties sheet matrix material to relative another side exposure mask, and formed with the through hole irradiating laser from above-mentioned another side one side of this exposure mask printing opacity via this exposure mask with through holes.

2. anisotropic conductive sheet as claimed in claim 1 is characterized in that, the conduction circuit component is that the electroconductive particle that will show magnetic contains with the state along the thickness direction orientation and forms.

3. anisotropic conductive sheet as claimed in claim 1 is characterized in that, the elastomer that constitutes the insulating properties lamellar body is a silicone rubber.

4. anisotropic conductive sheet as claimed in claim 1 is characterized in that, the conduction circuit component has from the outstanding ledge of at least one face of insulating properties lamellar body.

5. anisotropic conductive sheet as claimed in claim 4 is characterized in that, the conduction circuit component, from the taper that diameter diminishes from the cardinal extremity to the front end gradually that is shaped as of the outstanding ledge of a face of insulating properties lamellar body.

6. the manufacture method of an anisotropic conductive sheet is characterized in that, has the 1st operation and the 2nd operation, wherein:

The 1st operation be prepare according to the corresponding figure of figure of the conduction circuit component that will form, formed diameter from diminishing gradually to relative another side with one side that the one side of insulating properties sheet matrix material joins, use the exposure mask of through hole along a plurality of printing opacities of thickness direction extension, with this exposure mask, the mode of joining with the above-mentioned one side of this exposure mask and the one side of the insulating properties sheet matrix material that constitutes by elastomer, be configured on the one side of this insulating properties sheet matrix material, by from above-mentioned another side one side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, form and have the insulating properties lamellar body that forms along a plurality of conductions road that thickness direction extends respectively with through hole;

7. the manufacture method of anisotropic conductive sheet as claimed in claim 6 is characterized in that, with the electroconductive particle in the material, uses the particle that shows magnetic as the conduction circuit component;

8. the manufacture method of anisotropic conductive sheet as claimed in claim 6 is characterized in that, by a plurality of printing opacities through hole irradiating laser via exposure mask, forms a plurality of conductions road formation through hole together.

9. the manufacture method of anisotropic conductive sheet as claimed in claim 6, it is characterized in that, by under the state on the one side that exposure mask is configured in the insulating properties lamellar body, directly described conduction circuit component is used in the through hole with the printing opacity of through hole and exposure mask with the conduction road formation that material is filled in the insulating properties lamellar body, form conduction circuit component material layer, and carry out the cured of this conduction circuit component with material layer, it is outwards outstanding to form the one side that has from the insulating properties lamellar body, and the conduction circuit component of the ledge that diameter diminishes from the cardinal extremity to the front end gradually.

10. the manufacture method of an anisotropic conductive sheet, described anisotropic conductive sheet has to be formed with on it and forms along a plurality of conductions road that thickness direction extends with insulating properties lamellar body through hole, that be made of elastomer, with form with the conduction circuit component in through hole with each conduction road that is located at this insulating properties lamellar body from the outstanding state of at least one face of this insulating properties lamellar body, integratedly, the manufacture method of described anisotropic conductive sheet is characterised in that to have following operation:

Preparation according to the corresponding figure of figure of the conduction circuit component that will form, formed diameter respectively from a plurality of printing opacities that will diminish gradually to relative another side with the one side that the one side of insulating properties sheet matrix material is joined, extend along thickness direction exposure mask with through holes;

Be produced on and formed ledge at least one face of the insulating properties sheet matrix material that constitutes by elastomer and form duplexer with resin bed, the mode that described exposure mask is joined with the above-mentioned one side of this exposure mask and the one side of this duplexer is configured on the one side of this duplexer, by from above-mentioned another side one side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, on the insulating properties sheet matrix material of duplexer, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, simultaneously on the ledge of duplexer forms with resin bed, form respectively and form a plurality of ledges formation through holes that extend along thickness direction continuously with through hole with each conduction road, thus, at least one face that is formed on the insulating properties lamellar body is provided with ledge and forms the once-combined body that constitutes with resin bed;

Form the inner space of using through hole by the conduction road that comprises the insulating properties lamellar body at once-combined body, and the ledge that ledge forms with resin bed forms the conduction circuit component shaping of the inner space of using through hole with in the space, filling becomes the conduction circuit component material that forms in the polymer substance formation material of elastomer after making electroconductive particle be dispersed in curing, be shaped with forming conduction circuit component material layer in the space at the conduction circuit component, by carrying out the cured of this conduction circuit component with material layer, form the conduction circuit component, thus, forming the conduction circuit component that a plurality of conduction circuit components are located at once-combined body integratedly is shaped with in the space and the secondary complex that constitutes;

11. the manufacture method of anisotropic conductive sheet as claimed in claim 10, it is characterized in that,, use silicone rubber as the elastomer that constitutes the insulating properties lamellar body, form the resin bed formation material of using resin bed as constituting ledge, use polyvinyl alcohol.

12. the manufacture method of anisotropic conductive sheet as claimed in claim 11 is characterized in that, the use average degree of polymerization is 100～5000 polyvinyl alcohol.

13. the manufacture method of anisotropic conductive sheet as claimed in claim 10 is characterized in that, with the thickness formation ledge formation resin bed of 5～100 μ m.

14. the manufacture method of anisotropic conductive sheet as claimed in claim 10 is characterized in that, with the electroconductive particle in the material, uses the particle that shows magnetic as the conduction circuit component;

15. the manufacture method of anisotropic conductive sheet as claimed in claim 10 is characterized in that, by a plurality of printing opacities through hole irradiating laser via exposure mask, forms a plurality of conductions road formation through hole together.

16. the manufacture method of anisotropic conductive sheet as claimed in claim 10 is characterized in that,

Utilization has formed ledge and has formed duplexer with resin bed on the above-mentioned another side of insulating properties sheet matrix material, be formed on the above-mentioned another side of insulating properties lamellar body ledge to be set and to form the once-combined body that constitutes with resin bed;

By removing exposure mask, one end of conduction circuit component is exposed, thereby form the ledge that diameter diminishes gradually from the cardinal extremity to the front end, by dissolving and removing ledge formation resin bed, form simultaneously from another outstanding ledge of the another side of insulating properties lamellar body.

17. the manufacture method of anisotropic conductive sheet as claimed in claim 6 is characterized in that, laser is produced by the carbon dioxide impulse laser unit.

18. the manufacture method of anisotropic conductive sheet as claimed in claim 6 is characterized in that, as exposure mask, used thickness is 5～100 μ m's.

19. the manufacture method of anisotropic conductive sheet as claimed in claim 6 is characterized in that, as exposure mask, using the relative aperture r2/r1 that opens of the opening footpath r2 of the opening footpath r1 of one side and another side is 0.2～0.98.

20. the manufacture method of anisotropic conductive sheet as claimed in claim 6 is characterized in that, as exposure mask, use is made of metal.

21. anisotropic conductive connector, it is characterized in that, any described anisotropic conductive sheet of the claim 1～5 that possesses frame plate and dispose and support by the opening edge portion of this frame plate in the mode of the opening that stops up this frame plate with opening.

22. an anisotropic conductive connector is used for wafer state the electric-examination that is formed on a plurality of integrated circuits on the wafer and carries out this integrated circuit respectively being looked into, and it is characterized in that:

Possess and be formed on the frame plate that has formed a plurality of openings as the zone all integrated circuits on the wafer of checking object, that configuration is examined electrode accordingly, the a plurality of anisotropic conductive sheets that dispose in the mode of the opening that stops up described frame plate respectively and supported by the opening edge portion of this frame plate, described anisotropic conductive sheet is any described anisotropic conductive sheet of claim 1～5.

23. an anisotropic conductive connector is used for wafer state the electric-examination that is formed on a plurality of integrated circuits on the wafer and carries out this integrated circuit respectively being looked into, and it is characterized in that:

Possess with from being formed on the frame plate that has formed a plurality of openings as zone a plurality of integrated circuits of selecting the integrated circuit on the wafer of checking object, that configuration is examined electrode accordingly, the a plurality of anisotropic conductive sheets that dispose in the mode of the opening that stops up described frame plate respectively and supported by the opening edge portion of this frame plate, described anisotropic conductive sheet is any described anisotropic conductive sheet of claim 1～5.

24. the manufacture method of an anisotropic conductive connector is characterized in that, has the 1st operation, the 2nd operation and the 3rd operation, wherein:

The 1st operation is to prepare to have formed the frame plate of opening, the opening of this frame plate with and circumference, form the polymer substance that becomes elastomer after solidifying and form material layer, form the cured of material layer by carrying out this polymer substance, form that opening edge portion by this frame plate supports insulating properties sheet matrix material that mode with the opening that stops up frame plate forms, that be made of elastomer and the once-combined body that constitutes;

The 2nd operation is to prepare to diminish gradually to relative another side from the one side of joining with the one side of insulating properties sheet matrix material according to having formed diameter respectively with the corresponding figure of figure of the conduction circuit component that will form, use the exposure mask of through hole along a plurality of printing opacities of thickness direction extension, by above-mentioned another side one side from this exposure mask, via the printing opacity of this exposure mask through hole irradiating laser, form opening edge portion by this frame plate and support that mode with the opening that stops up frame plate forms, formed respectively along a plurality of conductions road that thickness direction extends and formed the secondary complex that constitutes with the insulating properties lamellar body of through hole;

The 3rd operation is to form with in the through hole by each conduction road at this secondary complex, filling becomes the conduction circuit component material that forms in the polymer substance formation material of elastomer after making electroconductive particle be dispersed in curing, form conduction circuit component material layer, by carrying out this conduction circuit component cured with material layer, formation will conduct electricity conduction circuit component that circuit component is located at the insulating properties lamellar body integratedly and be formed with in the through hole and the anisotropic conductive sheet of formation.

25. the manufacture method of an anisotropic conductive connector, it is characterized in that, prepare be formed on as all integrated circuits on the wafer of checking object, configuration be examined electrode the zone or with integrated circuit on being formed on wafer zone a plurality of integrated circuits of selecting, that configuration is examined electrode formed the frame plate of a plurality of openings that extend along thickness direction accordingly respectively, and have the 1st operation, the 2nd operation and the 3rd operation, wherein:

The 1st operation be each opening of this frame plate with and circumference, form the polymer substance that becomes elastomer after solidifying and form material layer, form the cured of material layer by carrying out this polymer substance, form that opening edge portion by this frame plate supports respectively insulating properties sheet matrix material that mode with the opening that stops up frame plate forms, that be made of elastomer and the once-combined body that constitutes;

The 2nd operation is to prepare to diminish gradually to relative another side from the one side of joining with the one side of insulating properties sheet matrix material according to having formed diameter with the corresponding figure of figure of the conduction circuit component that will form, use the exposure mask of through hole along a plurality of printing opacities of thickness direction extension, by above-mentioned another side one side from this exposure mask, via the printing opacity of this exposure mask through hole irradiating laser, form opening edge portion by this frame plate and support a plurality of conductions road that has formed respectively along thickness direction extends and form the secondary complex that constitutes with a plurality of insulating properties lamellar bodies of through hole;

26. the manufacture method as claim 24 or 25 described anisotropic conductive connectors is characterized in that, with the electroconductive particle in the material, uses the particle that shows magnetic as the conduction circuit component;

Work along the thickness direction that is formed on the conduction circuit component material layer on the insulating properties lamellar body by making magnetic field, make and be dispersed in the conduction circuit component is used material along this conduction circuit component with the electroconductive particle in the material layer thickness direction orientation, under this state, by conducting electricity circuit component with the cured of material layer, formation will conduct electricity conduction circuit component that circuit component is located at the insulating properties lamellar body integratedly and be formed with in the through hole and the anisotropic conductive sheet of formation.

27. the manufacture method as claim 24 or 25 described anisotropic conductive connectors is characterized in that:

On the one side of flat supporting bracket, the coating polymer substance forms material, this frame plate is simultaneously left the above-mentioned one side of supporting bracket with it and the mode relative with it disposes, simultaneously exposure mask is left the another side relative with its above-mentioned one side of this frame plate with its above-mentioned one side and the mode relative with it disposes, by being pressurizeed in their overlapping backs, inner space at the opening that comprises frame plate, the space between frame plate and the exposure mask and the printing opacity of exposure mask are used in the space with the shaping of the inner space of through hole, form polymer substance and form material layer, form the cured of material layer by carrying out this polymer substance, formation will have a plurality of insulating properties sheet matrix materials that ledge forms part and dispose in the mode of the opening that stops up frame plate, and support the circumference of this insulating properties sheet matrix material and the once-combined body that constitutes by the opening edge portion of frame plate;

By from above-mentioned another side one side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, form opening edge portion by this frame plate and be supported on each ledge and form the conduction road that has formed on the part along the thickness direction extension and form the secondary complex that constitutes with a plurality of insulating properties lamellar bodies of through hole;

The conduction road that forms part by each ledge at this secondary complex forms with in the through hole, filling becomes the conduction circuit component material that forms in the polymer substance formation material of elastomer after making electroconductive particle be dispersed in curing, form conduction circuit component material layer, by carrying out this conduction circuit component cured with material layer, formation will have the conduction circuit component that is located at the insulating properties lamellar body integratedly from the conduction circuit component of the outstanding ledge of the one side of insulating properties lamellar body and form with in the through hole and the anisotropic conductive sheet that constitutes.

28. the manufacture method of an anisotropic conductive connector, described anisotropic conductive connector has the frame plate that possesses opening, dispose with mode with the opening that stops up this frame plate, and the anisotropic conductive sheet that supports by the opening edge portion of this frame plate, and this anisotropic conductive sheet is to be formed with a plurality of conduction circuit components that extend along thickness direction respectively from the outstanding state of at least one face of the insulating properties sheet matrix material that is made of elastomer, the manufacture method of described anisotropic conductive connector is characterised in that to possess following operation:

Preparation has formed the frame plate of opening, the opening of this frame plate with and opening edge portion, form the polymer substance that becomes elastomer after solidifying and form material layer, by carrying out the cured of this polymer substance formation material layer, the opening of frame plate with and opening edge portion, the insulating properties sheet matrix material that formation is made of elastomer, and be produced on and formed ledge at least one face of this insulating properties sheet matrix material and form duplexer with resin bed;

Diameter diminishes to relative another side gradually from the one side of joining with the one side of insulating properties sheet matrix material according to having formed with the corresponding figure of figure of the conduction circuit component that will form in preparation, use the exposure mask of through hole along a plurality of printing opacities of thickness direction extension, on the one side of this duplexer, the mode that this exposure mask is joined with its above-mentioned one side and the one side of this duplexer disposes, by from above-mentioned another side one side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, on the insulating properties sheet matrix material of duplexer, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, simultaneously on the ledge of duplexer forms with resin bed, form respectively and form a plurality of ledges formation through holes that extend along thickness direction continuously with through hole with each conduction road, thus, be formed on the opening that is located at frame plate with and opening edge portion at least one face of insulating properties lamellar body on ledge be set form the once-combined body that constitutes with resin bed;

29. the manufacture method of an anisotropic conductive connector, it is characterized in that, prepare be formed on as all integrated circuits on the wafer of checking object, configuration be examined electrode the zone or with integrated circuit on being formed on wafer zone a plurality of integrated circuits of selecting, that configuration is examined electrode formed the frame plate of a plurality of openings that extend along thickness direction accordingly respectively, and have following operation:

Diameter diminishes to relative another side gradually from the one side of joining with the one side of insulating properties sheet matrix material according to having formed with the corresponding figure of figure of the conduction circuit component that will form in preparation, use the exposure mask of through hole along a plurality of printing opacities of thickness direction extension, the mode that this exposure mask is joined with its above-mentioned one side and the one side of this duplexer disposes, by from above-mentioned another side one side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, on the insulating properties sheet matrix material of duplexer, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, simultaneously on the ledge of duplexer forms with resin bed, form respectively and form a plurality of ledges formation through holes that extend along thickness direction continuously with through hole with each conduction road, thus, be formed on the opening that is located at frame plate with and opening edge portion at least one face of insulating properties lamellar body on ledge be set form the once-combined body that constitutes with resin bed;

30. manufacture method as claim 28 or 29 described anisotropic conductive connectors, it is characterized in that,, use silicone rubber as the elastomer that constitutes the insulating properties lamellar body, form the resin bed formation material of using resin bed as constituting ledge, use polyvinyl alcohol.

31. the manufacture method of anisotropic conductive connector as claimed in claim 30 is characterized in that, the use average degree of polymerization is 100～5000 polyvinyl alcohol.

32. the manufacture method as claim 28 or 29 described anisotropic conductive connectors is characterized in that, with the thickness formation ledge formation resin bed of 5～100 μ m.

33. the manufacture method as claim 28 or 29 described anisotropic conductive connectors is characterized in that, with the electroconductive particle in the material, uses the particle that shows magnetic as the conduction circuit component;

34. the manufacture method as claim 28 or 29 described anisotropic conductive connectors is characterized in that:

Be produced on and formed ledge on the one side of flat supporting bracket and form stacking material with resin bed, the coating polymer substance forms material on the above-mentioned one side of the one side of this stacking material or exposure mask or on this two sides, thereby form polymer substance and form material layer, frame plate is simultaneously left the above-mentioned one side of described stacking material with it and relative mode disposes, simultaneously exposure mask is left the another side relative with its above-mentioned one side of this frame plate with its above-mentioned one side and relative mode disposes, by being pressurizeed in their overlapping backs, inner space at the opening that comprises frame plate, the space between frame plate and the exposure mask and the printing opacity of exposure mask are used in the space with the shaping of the inner space of through hole, form polymer substance and form material layer, by carrying out the cured of this polymer substance formation material layer, form insulating properties sheet matrix material;

By from above-mentioned another side one side of this exposure mask via the printing opacity of this exposure mask through hole irradiating laser, on insulating properties sheet matrix material, form to form along a plurality of conductions road that thickness direction extends respectively and use through hole, simultaneously on ledge forms with resin bed, form respectively and form a plurality of ledges formation through holes that extend along thickness direction continuously with through hole with each conduction road, thus, be formed on the opening that is located at frame plate with and opening edge portion on the another side of insulating properties lamellar body on ledge be set form the once-combined body that constitutes with resin bed;

By removing exposure mask, one end of conduction circuit component is exposed, thereby form diameter from the cardinal extremity to the front end and the ledge that diminishes gradually,, form another ledge of giving prominence to from the another side of insulating properties lamellar body simultaneously by dissolving and remove ledge and form and use resin bed.

35. the manufacture method of anisotropic conductive connector as claimed in claim 34 is characterized in that, as supporting bracket, uses the material with the identical material of frame plate.

36. the manufacture method as any described anisotropic conductive connector in the claim 24,25,28,29 is characterized in that, laser is produced by the carbon dioxide impulse laser unit.

37. the manufacture method as any described anisotropic conductive connector in the claim 24,25,28,29 is characterized in that, as exposure mask, used thickness is 5～100 μ m's.

38. manufacture method as any described anisotropic conductive connector in the claim 24,25,28,29, it is characterized in that, as exposure mask, the ratio r2/r1 that uses the opening footpath r2 of the opening footpath r1 of one side and another side is 0.2～0.98.

39. the manufacture method as any described anisotropic conductive connector in the claim 24,25,28,29 is characterized in that, as exposure mask, use is made of metal.

40. channel check detector, it is characterized in that, possess according to the corresponding figure of the figure that is examined electrode as the circuit arrangement of checking object, any described anisotropic conductive sheet or the described anisotropic conductive connector of claim 21 that the inspection of checking electrode use circuit substrate and is configured in lip-deep, the claim 1～5 of this inspection usefulness circuit substrate have been formed in its surface.

41. a channel check detector, it is for the channel check detector of with wafer state the electric-examination that is formed on a plurality of integrated circuits on the wafer and carries out this integrated circuit being looked into and using, and it is characterized in that:

Possess according to the corresponding figure of the figure that is examined electrode that is formed on as all integrated circuits on the wafer of checking object, having formed the inspection of checking electrode in its surface uses circuit substrate and is configured in lip-deep, the claim 22 described anisotropic conductive connector of this inspection with circuit substrate.

42. a channel check detector is used for wafer state the electric-examination that is formed on a plurality of integrated circuits on the wafer and carries out this integrated circuit being looked into, and it is characterized in that:

Possess according to from being formed on the corresponding figure of the figure that is examined electrode as a plurality of integrated circuits of selecting the integrated circuit on the wafer of checking object, having formed the inspection of checking electrode in its surface uses circuit substrate and is configured in lip-deep, the claim 23 described anisotropic conductive connector of this inspection with circuit substrate.

43. as claim 41 or 42 described channel check detectors, it is characterized in that, will be by the insulating properties sheet, the flaky connector that a plurality of electrode assemblies that extend with connecting this insulating properties sheet along its thickness direction, dispose according to the corresponding figure of figure with the inspection electrode of checking the usefulness circuit substrate constitute is configured on the anisotropic conductive connector.

44. device is looked in the electric-examination of a circuit arrangement, it is characterized in that, possesses any described channel check detector of claim 40～43.