CN100411872C - Ink-jet printing head and its manufacturing method - Google Patents

Ink-jet printing head and its manufacturing method Download PDF

Info

Publication number
CN100411872C
CN100411872C CNB2004100010387A CN200410001038A CN100411872C CN 100411872 C CN100411872 C CN 100411872C CN B2004100010387 A CNB2004100010387 A CN B2004100010387A CN 200410001038 A CN200410001038 A CN 200410001038A CN 100411872 C CN100411872 C CN 100411872C
Authority
CN
China
Prior art keywords
chamber
heating
ink jet
print head
porous material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100010387A
Other languages
Chinese (zh)
Other versions
CN1640671A (en
Inventor
黄启明
胡纪平
刘健群
陈家泰
许法源
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industrial Technology Research Institute ITRI
Original Assignee
Industrial Technology Research Institute ITRI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Industrial Technology Research Institute ITRI filed Critical Industrial Technology Research Institute ITRI
Priority to CNB2004100010387A priority Critical patent/CN100411872C/en
Publication of CN1640671A publication Critical patent/CN1640671A/en
Application granted granted Critical
Publication of CN100411872C publication Critical patent/CN100411872C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The present invention relates to an ink jet printing head and a manufacturing method thereof. The manufacturing method of an ink jet printing head comprises the following procedures: first, a chip and a porous material are provided, a heating layer is formed on the chip, a conducting layer is formed on the heating layer, and a notch is formed in the conducting layer and is used for defining a heating zone; then, a chamber which can store liquid is formed on the heating zone, the chamber has a first side and a second side, the first side is adjacent to the heating zone, the second side is connected with the first side, and an outlet is formed in the second side so that liquid can be jetted from the outlet; finally, the porous material covers the chamber, and liquid flows to the chamber from the porous material.

Description

Ink jet-print head and manufacture method thereof
Technical field
The invention relates to a kind of ink jet-print head and manufacture method thereof, particularly relevant for a kind of ink jet-print head and manufacture method thereof with high drive.
Background technology
Traditional ink jetting structure design 10, as shown in Figure 1, take open ink storing chamber (ink chamber), wherein 11 is liquid backfill runner (feed channel), 12 is heater, 13 for filtering the outside island of ink, 14 is the cross section of hollow out ink container (ink slot), liquid earlier flows to chip front side through ink container thus 14 from chip back, fill up ink storing chamber via dual channel 11 again, device 12 to be heated obtains a potential pulse, and moment produces high heat and generates bubble, via spray nozzle sheet liquid is sprayed, again through dual channel 11 backfills thus.
This kind ink-jet chip needs to make the ink container of a hollow out on chip, ink can be supplemented in the ink runner by ink cartridges, this ink container uses the mode of machining to run through chip, in the process of processing, constantly with hard and tiny Buddha's warrior attendant grains of sand etching chip, easily cause chip to pollute and damage, and it is not high to run through the degree of accuracy of chip, and yield is reduced.In addition, at high-resolution color inkjet printer, on single chip, promptly need three ink hollow slots, and in order to dwindle area of chip, the demand of this ink hollow slots is both narrow and long rectangle, makes the difficulty of this ink hollow slots increase.
This kind ink discharge device spray nozzle sheet of need fitting, the aligning of spray nozzle sheet are fitted to be needed to use the fine registration technology, and chip and spray nozzle sheet need the action of aiming at and fitting in man-to-man mode, also will cause volume production speed to reduce, and improves the required cost of production relatively.
Again, open ink storing chamber is taked in traditional injection structure design, and liquid fills up ink storing chamber via dual channel earlier, and bubble generates after the ink droplet release, again through dual channel backfill thus.The thrust that this kind design is produced when bubble nucleating has small part consumption and ink is being pushed away on the backfill runner of both sides, thrust can't be concentrated on the direction of desiring ink-jet.
In addition, be in the past with organic polymer define the supply runner of height, the liquid of ink storing chamber, and as the adhesion layer between chip and the spray nozzle sheet, this strata compound is subject to, arrives the effect that ink corrodes, ink can be infiltrated between spray nozzle sheet and the polymer or between chip and the polymer gradually, cause adhesion to reduce, even the phenomenon of peeling off (delamination) is arranged.
Fig. 2 shows traditional lateral type (edge shooting) ink jetting structure 20, and wherein 21 is base material, and 22 is the thermal treatment zone, and 23 is runner, and 24 is the ink transmission hole of cover plate, and 25 is cover plate, and 26 is spray orifice; The thrust that this ink jetting structure is produced when bubble generates, have equally part consumption with liquid on the direction that pushes back, cause the drop velocity of injection to reduce; In addition, this kind injection structure is still needed cover plate is processed with generation ink transmission hole, and this cover plate need be aimed at applying with chip.
In addition, use the back reflection type structure in patent US6412918, it need use processing procedures (dry ecthing or wet etching) such as dark etching silicon, and needs higher cost and long processing procedure time.
Summary of the invention
In view of this, the object of the present invention is to provide a kind ofly have low cost, high drive, no sandblast processing procedure (making the processing procedure of ink hollow slots), not to etched lateral type ink jet-print head of Silicon Wafer and manufacture method thereof.
Another object of the present invention is to provide a kind of do not have fully organic ink jet-print head and manufacture method thereof, make structure more corrosion-resistant, and applicable ink material is more extensive.
Another purpose of the present invention is to provide a kind of ink jetting structure with high drive, and it can use the higher liquid of coefficient of viscosity as inkjet materials.
According to the present invention, a kind of manufacture method of ink jet-print head is provided, it comprises the following steps: at first, one chip and a porous material are provided, this porous material is the block that forms via high temperature, high-pressure sinter with metal dust, if the pressure in the manufacturing process is high more, then the slit between the metal dust is just more little, formation one can be filtered the porous block of fluid, therefore can produce the porous material of various different tightness degree via adjusting pressure, the block of different tightness degree, representative pore size difference each other.Then, on chip, form a zone of heating, afterwards, on zone of heating, form a conductive layer, wherein be formed with a breach in the conductive layer, to define a heating region; Then, but form the chamber of a storaging liquid on heating region, its middle chamber has one first side and one second side, and first side and heating region adjacency, and second side is connected with first side, and forms an outward extending outlet on second side, makes liquid from the outlet ejection; At last, cover porous material above chamber, as the barricade of chamber, wherein liquid is to be circulated to chamber from porous material.
In a preferred embodiment, manufacture method more comprises the following steps: to form a conducting wire pattern in conductive layer, so that a pulse voltage signal is conducted to heating region; Before forming conductive layer on the zone of heating, on chip, form a hot barrier layer, wherein hot barrier layer is formed between chip and the zone of heating; Form on zone of heating after the conductive layer, form an insulating barrier on conductive layer, wherein insulating barrier is formed between conductive layer and the chamber; After forming insulating barrier on the conductive layer, form a protective layer on insulating barrier, wherein insulating barrier and heating region overlap on vertical; After forming insulating barrier on the conductive layer, on insulating barrier, form a breach, and on breach, form a Port, wherein the connectivity port is connected with the conducting wire pattern.
In another preferred embodiment, chamber is to utilize a photosensitive polymer to form in the mode of exposure imaging, and photosensitive polymer can be dry film or liquid photoresistance, and porous material is that the mode with hot pressing is affixed on the photosensitive polymer, and photosensitive polymer be as with the adhesion layer of porous material.
In another preferred embodiment, chamber is that the mode with electroforming metal forms, and metal can be nickel, and manufacture method can more comprise the following steps: after forming chamber, form an adhesion layer on nickel, and adhesion layer also can utilize low-melting-point metal to form, for example: terne metal, this alloy melting point is 183 ℃, and can electroforming or the mode of wire mark be formed on the nickel; Again, porous material is that the mode with hot pressing is covered on the adhesion layer, treats that adhesion layer produces after the molten, and cooling can be finished joint movement again.
Will be appreciated that porous material can form by the metal dust high temperature sintering, or form or polymer is formed by the ceramic material sintering.
In another preferred embodiment, manufacture method can more comprise the following steps: to provide a spray nozzle sheet, spray nozzle sheet is affixed on the outlet of second side of chamber.
Again in the present invention, a kind of ink jet-print head is provided, it comprises a base material, one zone of heating, one conductive layer, one chamber, an and porous material layer, wherein zone of heating is arranged on the base material, and have a heating region, in order to atomizing of liquids, conductive layer is arranged on the zone of heating, and has a breach, to expose heating region, chamber is arranged on the conductive layer, and has one first side and one second side, and first side and heating region adjacency, second side is connected with first side, and forms an outward extending outlet on second side, makes liquid from the outlet ejection, the porous material layer is arranged on the chamber, and wherein liquid is to be circulated to chamber from porous material.
In a preferred embodiment, conductive layer forms a conducting wire pattern, so that a pulse voltage signal is conducted to heating region.
In another preferred embodiment, inkjet printing comprises an insulating barrier, a protective layer and a Port first watch, and wherein insulating barrier is between conductive layer and chamber, and protective layer is between insulating barrier and chamber, and Port is arranged on the insulating barrier.
Will be appreciated that chamber can photosensitive polymer or metal form, and ink jet-print head can more comprise an adhesion layer, it is between chamber and porous material layer.
In another preferred embodiment, ink jet-print head can more comprise a spray nozzle sheet and a piezoelectric type vibration film, and wherein spray nozzle sheet is arranged on second side of chamber, and the piezoelectric type vibration film is arranged on the heating region.
Again in the present invention, the manufacture method of another kind of ink jet-print head is provided, it comprises the following steps: at first, one chip, a porous material and a spray nozzle sheet are provided, afterwards, on chip, form a zone of heating, on zone of heating, form a zone of heating, and on zone of heating, form a conductive layer, wherein be formed with a breach in the conductive layer, to define a heating region; Then, on conductive layer, form an adhesion layer, and porous material is set on adhesion layer, but to form the chamber of a storaging liquid, wherein liquid is to be circulated to chamber from porous material, and chamber has one first side and one second side, and first side and heating region adjacency, so that liquid can be positioned on the heating region after flowing to chamber, and second side is connected with first side; At last, the spray nozzle sheet of on second side of chamber, fitting, wherein spray nozzle sheet has a spray orifice.
In another preferred embodiment, adhesion layer is to use photosensitive polymer to form, and porous material was the groove that has proper alignment with the cutter cutting, to form chamber before being set at adhesion layer.
Again in the present invention, another kind of ink jet-print head is provided, it comprises a base material, one zone of heating, one conductive layer, one adhesion layer, one porous material layer, an and spray nozzle sheet, wherein zone of heating is arranged on the base material, and has a heating region, in order to atomizing of liquids, conductive layer is arranged on the zone of heating, and has a breach, to expose heating region, adhesion layer is arranged on the insulating barrier, the porous material layer is arranged on the adhesion layer, and is formed with a chamber in it, and wherein liquid is to be circulated to chamber from porous material, and chamber has one first side and one second side, and first side and heating region adjacency, so that liquid can be positioned on the heating region after flowing to chamber, and second side is connected with first side, spray nozzle sheet is arranged on second side of chamber, and has a spray orifice.
Description of drawings
Fig. 1 is the schematic diagram of known injection structure;
Fig. 2 is the schematic diagram of known lateral type injection structure;
Fig. 3 A-Fig. 5 is the schematic diagram of first embodiment of the manufacture method of ink jet-print head of the present invention, and wherein Fig. 4 B is the right side view of Fig. 4 A, and Fig. 4 C is the vertical view of Fig. 4 A;
Fig. 6 A-Fig. 6 F is the schematic diagram of second embodiment of the manufacture method of ink jet-print head of the present invention;
Fig. 7 is the schematic diagram of variation of second embodiment of the manufacture method of ink jet-print head of the present invention; And
Fig. 8 A-Fig. 8 E is the schematic diagram of the 3rd embodiment of the manufacture method of ink jet-print head of the present invention.
Symbol description:
The 10-ink jetting structure
The 11-runner
The 12-heater
The 13-island
The 14-ink container
The 20-ink jetting structure
The 21-base material
The 22-thermal treatment zone
The 23-runner
The 24-transmission hole
The 25-cover plate
The 26-spray orifice
30,40,40 ', the 50-ink jet-print head
The 31-chip
The hot barrier layer of 32-
The 33-zone of heating
The 331-heating region
The 34-conductive layer
The 341-breach
The 342-conducting wire
The 35-insulating barrier
The 351-breach
The 36-protective layer
The 37-connecting portion
The 38-chamber
The 381-photosensitive polymer
381 '-low-melting-point metal
The 382-outlet
The 383-converging transition
The 39-porous material
The 41-photoresistance
The 42-metal
The 43-gold
The 44-low-melting-point metal
The 51-low-melting-point metal
The 52-porous material
The 53-spray nozzle sheet
The 531-spray orifice
B1, B2-bubble
The specific embodiment
For above and other objects of the present invention, feature and advantage can be become apparent, a preferred embodiment cited below particularly, and cooperate appended diagram, be described in detail below.
First embodiment
Fig. 3 A-Fig. 5 is first embodiment that shows the manufacture method of ink jet-print head 30 of the present invention, in the present embodiment, be to adopt a lateral type ink jet-print head, the collocation porous material is as the usefulness of ink supply, so that an ink jet-print head with high drive to be provided, its processing flow is as follows.
At first, one chip 31 and porous material a 39 (porous material are provided, with reference to figure 5), chip 31 is as base material, and generate a hot barrier layer 32 thereon, as shown in Figure 3A, with as thermal insulation layer, scatter and disappear toward chip 31 directions in order to lower heat, then generate a zone of heating 33 on hot barrier layer 32, shown in Fig. 3 B, regeneration one conductive layer 34 shown in Fig. 3 C, and defines breach 341 (as heating region 331 with gold-tinted processing procedure and etch process on zone of heating 33, with reference to figure 5, that is heating region 331 is defined by conductive layer 34 and zone of heating 33) and conducting wire 342 (with reference to figure 4C), the pulse voltage signal is reached the thermal treatment zone 331, afterwards, make an insulating barrier 35 on conductive layer 34, shown in Fig. 3 D, and formation profile as shown in the figure, so that the function of insulation to be provided, it should be noted on insulating barrier 35, to be formed with a breach 351; Then; 331 tops form a protective layer 36 in the thermal treatment zone; and define profile shown in Fig. 3 E; prevent that the reaction force that is produced when breaking because of bubble from destroying heating region 331, last, generate the external Port 37 of a tool electric conductivity; and define its figure with gold-tinted and etch process; as electrically joining the window that is, shown in Fig. 3 F, promptly finish the basic structure of ink jet-print head 30 with the outside.
Then, on the chip 31 of finishing configuration (shown in Fig. 3 F), directly with the converging transition 383 (with reference to figure 4C) of photosensitive polymer 381 definition chambers (ink storing chamber) 38 with its nozzle (outlet) 382, wherein photosensitive polymer 381 is arranged at chip 31 surfaces via the method for hot pressing (dry film) or rotation coating (liquid photoresistance), thickness is about 20 μ m, and the manufacturing method thereof that develops with gold-tinted, finish graphical definition, shown in Fig. 4 A, Fig. 4 B, Fig. 4 C, wherein 382 is the outlet of being finished.Fit with the mode and the porous material 39 of hot pressing more afterwards, structure is finished as shown in Figure 5.
Know clearly it, the ink jet-print head of finishing by the manufacture method of present embodiment 30, as shown in Figure 5, it comprises base material 31, hot barrier layer 32, zone of heating 33, conductive layer 34, insulating barrier 35, protective layer 36, Port 37, chamber 38, and porous material layer 39, wherein zone of heating 33 has a heating region 331, in order to heating liquid, conductive layer 34 has a breach 341, to expose heating region 331, chamber 38 has one first side 38a and one second side 38b, and the first side 38a and heating region 331 adjacency, the second side 38b is connected with the first side 38a, that is, the second side 38b is positioned at the side of chamber 38, and goes up formation one outward extending outlet 382 in the second side 38b, makes liquid from exporting 382 ejections, porous material layer 39 is arranged on the chamber 38, and wherein liquid is to be circulated to chamber 38 from porous material 39; Though it should be noted in the present embodiment, porous material is to be arranged on the chamber, is not limited to this, also can be arranged on other position of base material, as long as liquid can be circulated to chamber through porous material.
Will be appreciated that ink jet-print head 30 can more comprise a spray nozzle sheet (not shown) and a piezoelectric type vibration film (not shown), and spray nozzle sheet can be arranged on the second side 38b of chamber 38, and the piezoelectric type vibration film is arranged on the heating region 331.
Therefore present embodiment has proposed a kind of injection structure of closed ink storing chamber, and as shown in Figure 5, wherein B1 is the bubble of generation, the drop that B2 goes for ejection; This enclosed construction is to utilize organic polymer to define this sealing ink storing chamber, and produce the outlet of single convergent, this outlet is the injection direction of drop, in case bubble generates, then the thrust that bubble produced can be applied to the injection direction of ink droplet, reach the purpose of high drive, below describe the driving force height that the driving force of present embodiment why can more known ink jet-print head in detail.
In traditional ink-jet chip design, suppose in the generative process of bubble, be V along the backfill runner toward the initial velocity of releasing ink storing chamber because of bubble generates liquid 1, as shown in Figure 1, its behavior can be described in pipe stream (channel) mode, and the inside and outside pressure differential of its ink storing chamber is directly proportional with flow rate of fluid, and relational expression is as follows:
- ∂ P ∂ X ∝ V , Wherein P is a pressure, and X is the runner direction, and V is a speed.
Employed in the present embodiment porous material is as the cover plate of ink storing chamber, the ink storing chamber of this design has only both direction to allow fluid to flow outside ink storing chamber, a direction is the Way out that the drop desire is sprayed, another direction is exactly up to flow out along the porous material direction, will prove exactly now that to flow out suffered resistance ratios along porous material also big under the situation of pipe stream, so the design of present embodiment can generate the injection direction that the thrust that be produced almost is applied to drop with bubble.Suppose that it is V that bubble generates the initial velocity that fluid is up pushed away along porous material 2, according to Darcy ' s law, its pressure differential is directly proportional with the cube sum with the first power of flow velocity, and its relational expression is as follows: - ∂ P ∂ X = μ K V + γρ 2 μ V 3 , Wherein P is a pressure, and X is the runner direction, and V is a speed, and μ is a coefficient of viscosity, and ρ is the density of fluid.
Therefore, the pressure differential when the external and internal pressure difference of use porous material is used pipe stream is greatly, just P 1Much larger than P 2Therefore the pressure of pressure after Fig. 1 bubble produces after this device bubble produces, as shown in Figure 5, therefore most pressure will be stayed in the ink storing chamber, drop is released toward the outlet 382 of second side, that is liquid is not easy along the porous material backflow, so project organization can provide bigger driving force.
Again, below explanation uses porous material can reach the purpose of ink supply really
According to porous interface flow test data, to observe under the positive pressure pressure of difference, deionized water sees through the flow of the hollow slots gained of chip via porous material; Its method is sandblast and has the chip of dry film shape definition and porous material to carry out pressing, but use viscose to be encapsulated on the card casket (liquid reservoir) of storaging liquid it again, and this card casket is connected one pressure controlled steel cylinder can be provided with chip, give according to fixation pressure via computer control, can obtain following result:
1, pressure 0.5kg/cm 2Under
Aperture 10um, flow 24.46cc/min;
Aperture 5um, flow 11.06cc/min;
Aperture 2um, flow 6.38cc/min;
Aperture 0.5um, flow 2.25cc/min;
2, pressure 0.2kg/cm 2Under
Aperture 10um, flow 8.36cc/min;
Aperture 2um, flow 1.38cc/min;
Therefore, when plus-pressure was big, flow was bigger relatively; And under the situation of same pressure, big its relative discharge in its aperture is also bigger, through experiment confirm thus, and really can be via using porous material reach the purpose of ink supply.
As mentioned above, present embodiment is that enclosed ink storing chamber is combined with the ink-jetting style of lateral type, utilize porous to store up black material simultaneously and be used as the media that liquid enters ink storing chamber, and can be by liquid storing tank (ink reservoir) is pressurizeed as the assembly of ink supply, after treating that thermal in the ink storing chamber generates, with direction vertical penetrate of liquid from generating with bubble.So, can exempt sandblast, aim at processing procedures such as pasting spray nozzle sheet, can significantly reduce cost; Can avoid using processing procedures such as dark etching silicon again.
Again, the manufacture method of present embodiment is simply quick, and can fit in the mode (wafer towafer) of full wafer wafer, cuts again, must make the cutting mark at wafer rear in advance before the cutting, so can produce in a large number; Certainly also can before fit, to porous material and wafer cutting, aim at again and fit earlier.
Another advantage of the present invention, promptly be to utilize porous material and photosensitive polymer to form the ink storing chamber of a sealing, and utilize photosensitive polymer to define the height of ink storing chamber, the opening that one converging transition is only arranged on the direction of desire release drop, make and be applied in the thrust that bubble nucleating produced on the direction that ink is released.
Second embodiment
Fig. 6 A-Fig. 6 F is second embodiment that shows the manufacture method of ink jet-print head 40 of the present invention, present embodiment and first embodiment different be in: with metal definition ink storing chamber (chamber 38 ', with reference to figure 6F) with the converging transition of nozzle, fit with porous material 39 again, finish the structure of a no organic matter (no organic), be not afraid of the erosion of ink, can improve the life-span of chip, it was the height that defines ink storing chamber with organic polymer in the past, the effect that ink easily corrodes this layers of polymer deposits yields, ink can infiltrate between spray nozzle sheet and the polymer gradually, or between chip and the polymer, causes polymer to have to peel off the phenomenon of (delamination).The benefit of this structure is to can be applicable to multiple ink or organic solvent, can be applicable to multiple specific use, and for example: traditional desktop printer, biochip, drug delivery, colored filter, fuel nozzle or other special special industry are used.
Step of manufacturing is as follows: on the chip 31 of finishing configuration (shown in Fig. 3 F), mode with the rotation coating, photoresistance (photoresist) 41 is coated on the chip 31 uniformly, through after the exposure imaging, as shown in Figure 6A, thickness is about 40 μ m, and this layer is as the sacrifice layer of electroplating.Afterwards, in the zone that no photoresistance covers, via the mode of electroplating, generate layer of metal nickel (Ni) 42, thickness is about 10 μ m, shown in Fig. 6 B; And then evaporation layer of metal on chip 31 can be used gold (Au) 43, about 1000 dusts of thickness As the adhesion layer (adhesion layer) of metallic nickel and aftermentioned low-melting-point metal 44, shown in Fig. 6 C.Re-plating one deck low-melting-point metal 44, for example: terne metal, this alloy melting point are 183 ℃, thickness is about 10 μ m, shown in 6D figure.Chip 31 is inserted in the solution that can remove this sacrifice layer 41, but do not hurt film on metal level and the chip, the result is shown in Fig. 6 E.Porous material 39 is placed on the chip of finishing plating, utilize low-melting characteristic, to porous material 39 heating and pressurization, force the low-melting-point metal surface that contacts with porous material to produce molten condition, after to be cooled, promptly finish one completely without organic injection structure, shown in Fig. 6 F.
In addition, also can all replace the material that defines ink storing chamber with low-melting-point metal, ink jet-print head 40 as shown in Figure 7 ', wherein 381 ' be low-melting-point metal.Except adopting the method for electroplating this metal, also can adopt the mode of wire mark (screen printing) to reach.
Therefore present embodiment provides one completely without organic liquid drop spray structure, replace this adhesion layer with electroforming metal, and use low-melting metal alloy, carry out pressing with porous material, heating becomes after the molten it, this no organic injection apparatus of promptly finishing to be cooled, the advantage of this structure is that spendable ink solution is more extensive, the life-span of chip improves more.
The 3rd embodiment
Fig. 8 A-Fig. 8 E is the 3rd embodiment that shows the manufacture method of ink jet-print head 50 of the present invention, present embodiment and first embodiment different be in: present embodiment is that porous material is done accurate processing, mode with cutting defines ink storing chamber, again porous material and chip are fitted, and spray nozzle sheet is affixed on the side, finish this special construction.
Step of manufacturing is as follows: at first generate the low-melting-point metal 51 that thickness is about 10 μ m in the mode of electroplating on the chip 31 of finishing wiring, shown in Fig. 8 A.In addition, porous material 52 being made Precision Machining, shown in Fig. 8 B, is that the blade of 30 μ m forms a line with thickness, a feed is processed porous material, finishes the definition of ink storing chamber, and the gained size is as follows: a section is 60 μ m, b section 60 μ m, c section are 80 μ m, and the d section is 70 μ m.In the mode of hot pressing porous material 52 and chip are fitted again afterwards, shown in Fig. 8 C.In addition, earlier the sheet metal gluing of spray orifice will not arranged as yet, and make spray orifice 531 with the mode of Laser Processing again, and sheet metal (spray nozzle sheet) 53 will be affixed on chip sides again, and finish structure shown in Fig. 8 D, stereochemical structure is shown in Fig. 8 E.
As mentioned above, present embodiment not only can provide higher driving force to be suitable for the solution of high coefficient of viscosity, also provides one completely without organic injection apparatus, makes that available ink is more extensive.

Claims (20)

1. the manufacture method of an ink jet-print head comprises:
One base material and a porous material are provided;
On this base material, form a zone of heating;
Form a conductive layer on this base material, wherein this conductive layer can conduct to this zone of heating with an electric current, and this conductive layer defines a heating region with this zone of heating;
But on this heating region, form the chamber of a storaging liquid, wherein this chamber has one first side and one second side, and this first side and this heating region adjacency, and this second side is connected with this first side, and on this second side, form an outlet, make this liquid from this outlet ejection; And
This porous material layer is arranged on the chamber, makes liquid be circulated to this chamber from this porous material.
2. the manufacture method of ink jet-print head according to claim 1, wherein this chamber is to utilize a photosensitive polymer to form in the mode of exposure imaging.
3. the manufacture method of ink jet-print head according to claim 2, wherein this photosensitive polymer is dry film or liquid photoresistance.
4. the manufacture method of ink jet-print head according to claim 1, wherein this porous material is that mode with hot pressing is affixed on this photosensitive polymer, and this photosensitive polymer as with the adhesion layer of this porous material.
5. the manufacture method of ink jet-print head according to claim 1, wherein this chamber forms in the mode of electroforming metal.
6. the manufacture method of ink jet-print head according to claim 5, wherein this metal is a nickel.
7. the manufacture method of ink jet-print head according to claim 5 more comprises:
After forming this chamber, form an adhesion layer on this chamber.
8. the manufacture method of ink jet-print head according to claim 7, wherein this adhesion layer is to form with metal.
9. the manufacture method of ink jet-print head according to claim 7, wherein this adhesion layer is that mode with electroforming or wire mark forms.
10. the manufacture method of ink jet-print head according to claim 7, wherein this porous material is that mode with hot pressing is covered on this adhesion layer, after this adhesion layer produced molten, cooling can be finished joint movement again.
11. an ink jet-print head comprises:
One base material;
One zone of heating is arranged on this base material, and in order to atomizing of liquids;
One conductive layer is arranged on this base material, and can conduct electrical currents to this zone of heating, and this conductive layer and this zone of heating definable one heating region;
One chamber is arranged on this heating region, and has one first side and one second side, wherein this first side and this heating region adjacency, and this second side is connected with this first side, and on this second side, form an outlet, this liquid is sprayed from this outlet;
One porous material layer is arranged on the chamber, and wherein this liquid can pass to this chamber from this porous material laminar flow.
12. ink jet-print head according to claim 11, wherein this chamber forms with photosensitive polymer.
13. ink jet-print head according to claim 11, wherein this chamber is to utilize metal to form.
14. ink jet-print head according to claim 13 more comprises: an adhesion layer, between chamber and this porous material layer that this metal forms.
15. ink jet-print head according to claim 11 more comprises: a spray nozzle sheet is arranged on second side of this chamber.
16. the manufacture method of an ink jet-print head comprises:
One base material, a porous material and a spray nozzle sheet are provided;
On this base material, form a zone of heating;
Form a conductive layer on this base material, wherein this conductive layer can conduct electrical currents to this zone of heating, and this conductive layer and this zone of heating definable one heating region;
On this conductive layer, form an adhesion layer;
This porous material is set on this adhesion layer, but to form the chamber of a storaging liquid, wherein this liquid is to be circulated to this chamber from this porous material, and this chamber has one first side and one second side, and this first side and this heating region adjacency, so that this liquid can be positioned on this heating region after flowing to this chamber, and this second side is connected with this first side; And
This spray nozzle sheet of applying on second side of this chamber, wherein this spray nozzle sheet has more than one spray orifice.
17. the manufacture method of ink jet-print head according to claim 16 more comprises: before forming a conductive layer on this zone of heating, form a hot barrier layer on this base material, wherein this hot barrier layer is formed between this base material and this zone of heating.
18. the manufacture method of ink jet-print head according to claim 16, wherein this adhesion layer is to use photosensitive polymer to form.
19. the manufacture method of ink jet-print head according to claim 16, wherein this porous material was the groove that has proper alignment with the cutter cutting, to form this chamber before being set at this adhesion layer.
20. an ink jet-print head comprises:
One base material;
One zone of heating is arranged on this base material, and has a heating region, in order to atomizing of liquids;
One conductive layer is arranged on this base material, and can conduct current on this zone of heating, and this conductive layer and this this heating region of zone of heating definable;
One adhesion layer is arranged on this conductive layer;
One porous material layer, be arranged on this adhesion layer, and be formed with a chamber in it, wherein this liquid is to pass to this chamber from this porous material laminar flow, and this chamber has one first side and one second side, and this first side and this heating region adjacency, so that this liquid can be positioned on this heating region after flowing to this chamber, and this second side is connected with this first side; And
One spray nozzle sheet is arranged on second side of this chamber, and has a spray orifice at least.
CNB2004100010387A 2004-01-16 2004-01-16 Ink-jet printing head and its manufacturing method Expired - Fee Related CN100411872C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2004100010387A CN100411872C (en) 2004-01-16 2004-01-16 Ink-jet printing head and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2004100010387A CN100411872C (en) 2004-01-16 2004-01-16 Ink-jet printing head and its manufacturing method

Publications (2)

Publication Number Publication Date
CN1640671A CN1640671A (en) 2005-07-20
CN100411872C true CN100411872C (en) 2008-08-20

Family

ID=34866991

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100010387A Expired - Fee Related CN100411872C (en) 2004-01-16 2004-01-16 Ink-jet printing head and its manufacturing method

Country Status (1)

Country Link
CN (1) CN100411872C (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8465659B2 (en) * 2011-01-21 2013-06-18 Xerox Corporation Polymer layer removal on pzt arrays using a plasma etch
WO2016164041A1 (en) * 2015-04-10 2016-10-13 Hewlett-Packard Development Company, L.P. Removing an inclined segment of a metal conductor while forming printheads

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4835553A (en) * 1988-08-25 1989-05-30 Xerox Corporation Thermal ink jet printhead with increased drop generation rate
JPH0531900A (en) * 1992-01-16 1993-02-09 Rohm Co Ltd Heating mechanism
US6412918B1 (en) * 2001-03-08 2002-07-02 Industrial Technology Research Institute Back-shooting inkjet print head

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4835553A (en) * 1988-08-25 1989-05-30 Xerox Corporation Thermal ink jet printhead with increased drop generation rate
JPH0531900A (en) * 1992-01-16 1993-02-09 Rohm Co Ltd Heating mechanism
US6412918B1 (en) * 2001-03-08 2002-07-02 Industrial Technology Research Institute Back-shooting inkjet print head

Also Published As

Publication number Publication date
CN1640671A (en) 2005-07-20

Similar Documents

Publication Publication Date Title
US6322201B1 (en) Printhead with a fluid channel therethrough
US6158846A (en) Forming refill for monolithic inkjet printhead
CN101557938B (en) Liquid ejector having improved chamber walls and preparing method thereof
CN100355573C (en) Ink-jet recording head and mfg. method, and substrate for mfg. ink-jet recording head
US7320513B2 (en) Bubble-ink jet print head and fabrication method thereof
CN104487254B (en) There is the fluid ejection assembly of controlled adhesive joint portion
JP2006130868A (en) Inkjet recording head and its manufacturing method
JPH0623990A (en) Electrothermal conversion-type ink jet printer head
KR101118431B1 (en) Substrate and method of forming substrate for fluid ejection device
US7914123B2 (en) Inkjet printhead and manufacturing method thereof
JP2005231362A (en) Method for manufacturing inkjet print head
JP2007230132A (en) Inkjet recording head
CN101888931A (en) Ink jet head and electrostatic attraction ink jet head
KR20070055129A (en) Method for forming hydrophobic coating layer on surface of nozzle plate of inkjet printhead
CN100411872C (en) Ink-jet printing head and its manufacturing method
CN100418773C (en) Liquid ejection element and manufacturing method therefor
JPH1095119A (en) Liquid discharge head and manufacture thereof
US6238269B1 (en) Ink feed slot formation in ink-jet printheads
US6776915B2 (en) Method of manufacturing a fluid ejection device with a fluid channel therethrough
US6886925B2 (en) Porous back-shooting inkjet print head module and method for manufacturing the same
CN108136776B (en) Fluid ejection apparatus
CN109414929B (en) Termination ring with gapped metal layer
JP2004209708A (en) Inkjet recording head, its manufacturing method, and base for inkjet recording head used for the manufacture
KR100908115B1 (en) Inkjet printhead with ink supply structure through porous medium and its manufacturing method
JPH08142339A (en) Production of liquid jet recording head in ink jet recording apparatus

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080820

Termination date: 20120116