CN100402293C - Piezoelectric actuator, ink jet head, and method of manufacturing them - Google Patents
Piezoelectric actuator, ink jet head, and method of manufacturing them Download PDFInfo
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- CN100402293C CN100402293C CNB2005100831650A CN200510083165A CN100402293C CN 100402293 C CN100402293 C CN 100402293C CN B2005100831650 A CNB2005100831650 A CN B2005100831650A CN 200510083165 A CN200510083165 A CN 200510083165A CN 100402293 C CN100402293 C CN 100402293C
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- metallic plate
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
- H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14266—Sheet-like thin film type piezoelectric element
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
The invention provides a piezoelectric actuator, an ink jet head, and a method of manufacturing them, wherein a manufacturing process can be simplified, costs can be reduced, and operation can be stabilized. An inner electrode (3) that also functions as a diffusion preventing layer is formed between a metal plate (2) and a piezoelectric layer (4). With this configuration, the layer that functions as both the electrode and the diffusion preventing layer can be formed in a single process, and consequently the manufacturing process can be simplified and manufacturing costs can be reduced. Furthermore, when the electrode and the diffusion preventing layer are a two-layered structure, the materials of these layers combine and strongly influence the bending characteristics of the metal plate. The operation of the piezoelectric actuator can be stabilized by using only one layer that doubles in function as the electrode and as the diffusion preventing layer.
Description
Technical field
The present invention relates to piezo-activator and the ink gun that utilizes this piezo-activator.The invention still further relates to the manufacture method of piezo-activator and ink gun.
Background technology
Piezo-activator is applied in the various uses.Described in this manual piezo-activator is meant: by being formed with electrode if apply in the table of the formed layer of material (piezoelectric layer) that voltage then is out of shape on the two sides, be applied to by control and be formed at the current potential between the electrode on the two sides in the table, and can control the piezo-activator of piezoelectric layer shape.If at least one side's electrode is divided into a plurality of absolute electrodes, then can control the potential difference on each position that is applied to piezoelectric layer.
As one of purposes of piezo-activator, the known purposes that driving employed ink gun in ink-jet printer is arranged.
Open flat 11-314365 communique (Japan Patent) spy, (Japan Patent) spy opens flat 11-334087 communique and (Japan Patent) spy opens an example that has disclosed the ink gun that is assembled with piezo-activator in the 2000-94681 communique.
Ink gun is included in block and the piezo-activator that inside is formed with ink flow path.Be formed with the ink reception room in the inside of block, on a side's of block surface, be formed with a plurality of pits, on the opposing party's surface, be formed with a plurality of nozzles.Be formed with many Chinese sticks current road in the inside of block.Each ink flow path is communicated with ink reception room and a pit, also is communicated with a pit and a nozzle.
Piezo-activator overlaps on the surface of the block that is formed with a plurality of pits, thereby covers on a plurality of pits.Piezo-activator comprises: the piezoelectric layer that is out of shape when applying voltage, the lateral electrode that forms on the surface of piezoelectric layer and the medial electrode that forms in the inside of piezoelectric layer.Piezo-activator is overlapping with the state that is separated with medial electrode between piezoelectric layer and block.At least one side of lateral electrode and medial electrode is divided into a plurality of absolute electrodes.The voltage that is applied on a plurality of absolute electrodes can independently be adjusted from the voltage that is applied on other absolute electrodes.Each absolute electrode is on the position of each pit that forms on the above-mentioned side surface at block and form.
Each pit that forms on block one side's surface is closed by piezo-activator, thereby forms the balancing gate pit.The volume of this balancing gate pit changes by the distortion of piezo-activator.If piezo-activator is out of shape to invade the mode in the pit, then the volume of balancing gate pit reduces, and the ink that is housed in the balancing gate pit is sent towards nozzle, thereby from the nozzle ink that spues.If the piezo-activator in the intrusion pit reverts to smooth shape, then balancing gate pit's volume increases, and the ink that is housed in the ink reception room is inhaled into towards the balancing gate pit.
There is such method: promptly, form block and piezo-activator respectively, then by both fixedly being made the method for ink gun.Opening in the 2000-94681 communique to disclose (Japan Patent) spy has such manufacture method.
Exploitation has form through hole respectively on each plate, by the splice method of incompatible manufacturing block of the polylith flaggy that will be formed with through hole respectively.By being adjusted at the shape and the position of the through hole that forms on each piece plate in advance, and by stacked joint polylith plate, and can produce the block that has ink reception room and many Chinese sticks current road in inside and be formed with a plurality of nozzles being formed with a plurality of pits on a side the surface on the surface the opposing party.Each ink flow path is communicated with ink reception room and a pit, also is communicated with a pit and a nozzle.
Exploitation has by continuing the process of plywood, proceeds the manufacturing process of block, makes the method for piezo-activator with this.Utilize this method, be formed with on the block surface of a plurality of pits, stacked flexible plate covers on a plurality of pits it.On the surface of flexible plate, form electrode.Then, folded piezoelectric layer is last on this upper strata, surface, forms electrode on the surface of piezoelectric layer.The electrode that forms on the surface of flexible plate becomes medial electrode, and the electrode that forms on the surface of piezoelectric layer becomes lateral electrode.At least one side of lateral electrode and medial electrode is divided into a plurality of absolute electrodes.Each absolute electrode is on the position of each pit that is forming on the block surface and form.When adopting this method, can produce ink gun by continuing stacked process.Opening flat 11-314365 communique and (Japan Patent) spy (Japan Patent) spy opens to disclose in the flat 11-334087 communique and has by continuing stacked process continues to make piezo-activator on block method.
If utilize by continuing stacked process continues to make piezo-activator on block method, then make manufacturing process become simple.But then, behind the folded piezoelectric layer in the surperficial upper strata of flexible plate, be necessary piezoelectric layer is heat-treated.
Open in the technology of flat 11-314365 communique (Japan Patent) spy, utilize SiO
2Make flexible plate, utilize sol-gal process or the stacked in its surface piezoelectric layer of the method for splashing, and then heat-treat.
Open in the flat 11-334087 communique (Japan Patent) spy, utilize sol-gal process, MOD method (thermal decomposition method of organo-metallic compound), the method for splashing or vapour deposition method to come stacked piezoelectric layer, and then it is heat-treated.
Summary of the invention
The result that the present inventor studies repeatedly shows, if utilize sol-gal process, MOD method, the method for splashing or vapour deposition method at the folded piezoelectric layer in the surperficial upper strata of flexible plate, and then heat-treat, then piezoelectric layer can produce contraction when heat treatment, might reduce the performance of piezo-activator.Can produce bigger stress between piezoelectric layer that shrinks and flexible plate, this can make the performance of piezo-activator reduce.
In order to form piezoelectric layer, developed following method: promptly, utilize vector gas to make to contain the particulate group aerosolization (particulate is swum and be called aerosolization) of piezoelectric with the state of other separation of particles in gas, to be blown on the surface of substrate by the particulate group of aerosolization, accumulated particles group on substrate, form piezoelectric layer by the layer of piling up is annealed, open in the 2001-152360 communique (Japan Patent) spy about this point and disclose to some extent.
Present inventors studies show that, when utilizing this method, the piezoelectric layer in the time of might producing annealing shrinks the piezo-activator little, that performance is high.Continuing on the block to make under the situation of piezo-activator, pile up particulate group who includes piezoelectric and the method that accumulation horizon is annealed by adopting aerosolization, and can produce well behaved ink gun by continuing stacked process.
Yet, after having carried out experiment, find the performance that can not obtain expecting.During the method for annealing, can produce well behaved piezo-activator, in fact can not though wait in expectation as the particulate group who piles up aerosolization on the surface of adopting, to accumulation horizon at substrate.
Present inventor's result of study also shows, annealing and makes in the process of piezoelectric layer being deposited in layer on the substrate, and the element that forms substrate can spread in piezoelectric layer, and the result produces the phenomenon of the performance decline of piezo-activator.That is,,, then can produce well behaved piezo-activator if form element indiffusion in piezoelectric layer of substrate in that the layer that is deposited on the substrate is annealed and made in the process of piezoelectric layer.If can make the element indiffusion in piezoelectric layer that forms substrate in annealing process, then can apply in a flexible way blows to the particulate group of aerosolization the advantage of the method for piling up on the surface of substrate, thereby can produce well behaved piezo-activator.
In the present invention, in order in annealing process, to make the element indiffusion in piezoelectric layer that forms substrate, can on the surface of substrate, form diffusion in advance and prevent layer.That is, the particulate group of aerosolization is piled up in is formed with from the teeth outwards on the substrate that diffusion prevents layer, and then it is annealed.
When the block that is formed with a plurality of pits on the substrate of piezoelectric layer and the surface closely contacts and when being formed with the metal that forms block metal of the same race, keeps the bonding of block and substrate easily.If form substrate by metal, this substrate double as medial electrode then, thus need on substrate, not form medial electrode.Yet it is favourable to be formed with the electrode that the contact resistance with piezoelectric layer is reduced on substrate surface.
In the present invention, be used to spread the layer that prevents and have more than as diffusion and prevent, also can be used as the electrode that reduces with the contact resistance of piezoelectric layer and utilize.Promptly, in the present invention, have on the surface of the metallic plate bonding with block (for the volume that increases and decreases the balancing gate pit must crooked) and can prevent to constitute the function of the element of this metallic plate to the piezoelectric layer diffusion, simultaneously, the material of selecting to have electric conductivity forms medial electrode.On the surface of this medial electrode, pile up the particulate group of containing piezoelectric, accumulation horizon is annealed.
If adopt this manufacture method, when then making piezoelectric layer, prevented that element from spreading to piezoelectric layer from metallic plate when making accumulation horizon annealing, keep the high-performance of piezoelectric layer.In addition,, anneal again,, thereby can keep the performance height of piezoelectric layer so the contraction of piezoelectric layer is little because be behind the particulate group who piles up aerosolization on the metallic plate.In addition, diffusion prevents that layer from being electrode, therefore can reduce the contact resistance with piezoelectric layer.This also can keep the high-performance of this piezoelectricity utmost point.If adopt the present invention, then can obtain these effects with adding up, can produce well behaved piezo-activator.
If adopt the present invention, then can produce by being used in combination the piezo-activator of bringing into play serviceability with ink gun.Yet, utilize the purposes of the piezo-activator that the present invention makes to be not limited to ink gun.When manufacturing is used for the piezo-activator of other purposes, also can utilize the present invention.
Diffusion can be set respectively prevent layer and electrode layer.In this case, diffusion can be set and prevent layer between flexible metallic plate and medial electrode layer.That is, medial electrode layer and diffusion can be set between flexible metallic plate and piezoelectric layer and prevent this two layers of layer.When these two layers were set between flexible metallic plate and piezoelectric layer, there was influence in the flexural property because the physical characteristic of two layers is compound to metallic plate, therefore is difficult to make the performance of piezo-activator to be stablized.In the present invention, medial electrode layer and diffusion prevent that layer is public, do not produce this problem.
If adopt the present invention, then prevent that the material of ability from making medial electrode owing to have electric conductivity and diffusion by merging, so, but medial electrode layer double as spreads and prevents layer.Do not need to form the medial electrode layer respectively and diffusion prevents layer, make manufacturing process oversimplify, and can reduce manufacturing cost.In addition, when forming medial electrode layer and diffusion respectively and prevent layer, it is unstable that the flexural property of metallic plate is easy to become, and if adopt the present invention, then can make the flexural property stabilisation of metallic plate.Adopt the present invention, the particulate group of aerosolization is deposited on the metallic plate, can bring into play the advantage of the method for the layer annealing that makes accumulation, can produce high performance piezo-activator.
And, if adopt the present invention, then can follow the manufacture process that manufacture process that inside has the block of ink flow path is proceeded piezo-activator, can make both manufacture process pipelinings.Can keep the position relation of block with ink flow path and piezo-activator accurately.
Wherein, the purposes of piezo-activator is not limited only to ink gun.That is, be assembled in the structure in the block and can produce device beyond the ink gun by change.In this case, also can access the advantage of the position relation of correct located block and piezo-activator.
Description of drawings
What Fig. 1 represented is the side cross-sectional view of the ink gun of first embodiment.
What Fig. 2 represented is the side cross-sectional view of the manufacturing process of piezo-activator, what Fig. 2 (A) represented is the appearance that flexible metallic plate engages with the piezoelectricity chamber, what Fig. 2 (B) represented is the appearance that is formed with medial electrode on metallic plate, what Fig. 2 (C) represented is the appearance that is laminated with piezoelectric layer on the surface of medial electrode, and what Fig. 2 (D) represented is the appearance that is formed with lateral electrode on the surface of piezoelectric layer.
What Fig. 3 represented is the sketch of film formation device.
What Fig. 4 represented is the side cross-sectional view of the ink gun of second embodiment.
The specific embodiment
Below, come to be elaborated with reference to Fig. 1～Fig. 3 to specializing the first embodiment of the present invention.
What Fig. 1 represented is the cross section of the ink gun 10 of first embodiment.Ink gun 10 has the structure of stacked block 11 and piezo-activator 1.Actual block 11 and piezo-activator 1 are to the left and right directions elongation of Fig. 1.In Fig. 1, only show its part.
The integral body of block 11 forms tabular, it is by stacking gradually nozzle plate 12, flow distribution plate (manifold) 13, stream plate 14 and pressure chamber plate 15, and utilizes thermosetting bonding agents such as epoxy resin and each plate 12,13,14,15 is bonded with each other and make.
Ink flow path F is finer, and each through hole the 22,21,16,17,18, the 19th forms by etching method.Each plate 12～15 utilizes easy etching metal and makes.
For the piezo-activator 1 that is layered on the block 11, it comprises: with the top bonding of block 11 and cover flexible metallic plate 2 on a plurality of pits 16, the medial electrode 3 that forms on the surface of metallic plate 2, piezoelectric layer stacked on the surface of medial electrode 34 and on the surface of piezoelectric layer 4 lateral electrode 5 of form.Lateral electrode 5 is divided into a plurality of independent lateral electrode 5a, 5b ...
Flexible metallic plate 2 is formed and rectangular by stainless steel (SUS430), by hot pressing bonding be combined in block 11 above, and above covering blocks 11 whole.A metallic plate 2 covers the whole of a plurality of pits 16.Metallic plate 2 is made by the metal material identical with the flow distribution plate 13 that constitutes block 11, stream plate 14 and balancing gate pit's cover plate 15, thus the bending that produces can prevent to be connected on metallic plate 2 thermocompression bonded on the block 11 time.Metallic plate 2 is suitably thin, the bending along with the distortion of piezoelectric layer 4.Immerse in the pit 16 if metallic plate 2 is deformed into, then the volume of balancing gate pit 16 reduces.The ink that is housed in the balancing gate pit 16 is sent towards nozzle 9, and ink droplet 20 is spued from nozzle 9.If the metallic plate 2 that immerses in the pit 16 reverts to even shape, then the volume of balancing gate pit 16 increases.Be housed in ink in the ink reception room 22 towards the balancing gate pit 26 and be inhaled into.
On the surface of metallic plate 2, be formed with medial electrode 3 across its whole surface.Medial electrode 3 directly contacts with metallic plate 2, and is connected with the earthing pole of drive circuit IC (scheming not shown) by metallic plate 2.Medial electrode 3 is fixed on ground voltage.Medial electrode 3 is to form by evaporation Au on the surface of metallic plate 2.For Au, in the aftermentioned annealing in process stage, have the character that the element that prevents to contain in the metallic plate 2 spreads in piezoelectric layer 4, the double as diffusion prevents layer.The medial electrode of being made by Au 3 can reduce the contact resistance with piezoelectric layer 4.
On the surface of piezoelectric layer 4, have a plurality of independent lateral electrodes 5.Each independent lateral electrode 5a, 5b ... be set at and the 16a of each balancing gate pit, 16b ... on the corresponding position.What Fig. 4 represented is that independent lateral electrode 5a is formed on the binding site of the 16a of balancing gate pit, and independent lateral electrode 5b is formed on the binding site of the 16b of balancing gate pit.Each independent lateral electrode 5a, 5b ... be connected with drive circuit IC independently respectively.Crystal drive circuit IC controls independently, driving voltage is applied or be not applied to each independent lateral electrode 5a, 5b ... on.
The method of making ink gun 10 is described.At first, etching nozzle plate 12 has formed the through hole that becomes nozzle 19.In addition, etching flow distribution plate 13 has formed the through hole that becomes ink reception room 22 and nozzle road 18.Then, etching stream plate 14 has formed the through hole that becomes ink inlet passage 21 and pressure stream 17.Etching pressure chamber plate 15 has formed the through hole that becomes balancing gate pit 16 again.Then, form block 11 by under stacked their state, engaging.
Then, shown in Fig. 2 (A), will abut against the top of block 11 by the flexible metallic plate 2 that stainless steel is made and tap into the row joint, seal each balancing gate pit 16 by metallic plate 2 by thermocompression bonded.
Secondly, shown in Fig. 2 (B), on the surface of flexible metallic plate 2, form the medial electrode 3 that the double as diffusion prevents layer.Medial electrode 3 for example makes film with Au by vapour deposition method and makes.
Secondly, shown in Fig. 2 (C), utilize aerosol sedimentation (AD method) to form piezoelectric layer 4.
What Fig. 3 represented is the sketch that is used to form the film formation device 30 of piezoelectric layer 4.Film formation device 30 comprises: material particle M disperseed in vector gas and forms the aerosol generator 31 of aerosol Z, and from nozzle 37 ejection aerosol Z and make it adhere to (accumulation) film forming case 35 on metallic plate 2.
When utilizing film formation device 30 to form piezoelectric layer 4, the block 11 of fixing metallic plate 2 is arranged to the posture of metallic plate 2 towards the below.Then, material particle M is put into the inside of aerosol chamber 32.As material particle M, for example can use the material of performance such as lead zirconate titanate (PZT) piezoelectric effect.
In addition, import vector gas, material particle M is danced in the air from gas bomb B.Simultaneously, utilization adds vibrating device 33 makes 32 bendings of aerosol chamber, and material particle M and vector gas are mixed, and produces aerosol Z.By utilizing vavuum pump P to make decompression in the film forming case 35, make between aerosol chamber 32 and film forming case 35, to produce differential pressure.Utilize differential pressure that the aerosol Z in the aerosol chamber 32 is sprayed from injection nozzle 37 with high speed.The material particle M that comprises among the aerosol Z of ejection conflicts with metallic plate 2 and piles up, thereby forms piezoelectric layer 4.
Then, in order to obtain necessary piezoelectric property, the piezoelectric layer 4 that forms is carried out annealing in process.At this moment,, be provided with the double as diffusion across whole surface and prevent the medial electrode 3 of layer, so the metallic elements such as Fe that can prevent to be contained in the flexible metallic plate 2 are to piezoelectric layer 4 diffusions because between piezoelectric layer 4 and metallic plate 2.
Secondly, shown in Fig. 2 (D), be formed with a plurality of independent lateral electrode 5a, 5b above the piezoelectric layer 4 at each ...Forming a plurality of independent lateral electrode 5a, 5b ... the time, for example after forming electrically conductive film on the whole zone of piezoelectric layer 4, can utilize photoetching, etching method and form given figure, perhaps also can be directly by serigraphy formation on piezoelectric layer 4.
The electric field of also being eager to excel in the time of then, will be than common ink injection action is applied to independent lateral electrode 5a, 5b ... and between the medial electrode 3, two interelectrode piezoelectric layers 4 are carried out split pole at thickness direction.Make piezo-activator 1 and ink gun 10 by above-mentioned action.
Then, effect and the effect to the ink gun 10 of above structure describes.
When printing, cooperate printed pattern to select to apply the independent lateral electrode of voltage.Given driving signal is applied on the selected independent lateral electrode from drive circuit IC, high voltage is applied on the selected independent lateral electrode, electric field is applied in the branch extreme direction (thickness direction) of piezoelectric layer 4.Like this, piezoelectric layer 4 expands at thickness direction on the position corresponding with the independent lateral electrode of selecting, and simultaneously, shrinks in the face direction.Therefore, on the position corresponding with the independent lateral electrode of selecting, piezoelectric layer 4 and metallic plate 2 distortion, 16 1 sides form projection (single morphology (unimorph) distortion) in the balancing gate pit.Therefore, the volume of balancing gate pit 16 reduces, and the pressure of ink 20 raises, from nozzle 19 ejection inks 20.Then, when lateral electrode 5 turned back to the current potential identical with medial electrode 3, piezoelectric layer 4 and metallic plate 2 returned to original shape, thereby the volume of balancing gate pit 16 also returns to original volume, therefore sucked inks 20 from ink reception room 22.
When between metallic plate 2 and piezoelectric layer 4, existing diffusion to prevent layer and two layers of medial electrode, because there is influence in the physical characteristic of these two layers to the flexural property of metallic plate 2 respectively, so be difficult to make flexure operation stable.But, in the ink gun 10 of first embodiment, between metallic plate 2 and piezoelectric layer 4, only exist the double as diffusion to prevent the simple layer of the medial electrode 3 of layer.Therefore, the physical characteristic of medial electrode 3 (double as diffusion prevent layer) can be suppressed at Min. to the influence of the flexural property of metallic plate 2, thereby can make the action of piezo-activator 1 stable.
As mentioned above, adopt first embodiment, the double as diffusion is prevented that the medial electrode 3 of layer is arranged between metallic plate 2 and the piezoelectric layer 4.Adopt this structure, because can make the layer that the double diffusion of electrode prevents layer in an operation process, so manufacturing process is simple, can reduce manufacturing cost.
Below, further the present invention will be described to enumerate experimental example.
＜experimental example 1 〉
(1) film formation process
Using stainless steel (SUS430) metallic plate 2 and mean particle diameter is the PZT particulate of 0.3～1.0 μ m.In film formation device, use device shown in Figure 3.
The utilization method of splashing forms the medial electrode 3 that is made of Pt on the surface of metallic plate 2.Utilize the poor result of the surface roughness meter section of mensuration to be approximately 1.5 μ m for the thickness of medial electrode, on the metallic plate 2 that is provided with medial electrode 3, the setting nozzle opening is 0.4mm * 10mm, film forming case internal pressure is 200Pa, and the aerosol room pressure is 30000Pa, and the vector gas kind is He, gas flow is 4.0L/min, distance between nozzle 37 and the metallic plate 2 is the condition of 10～20mm, and it is attached to carry out blowing of aerosol, forms piezoelectric film 4.Utilize the poor result of the surface roughness meter section of mensuration to be approximately 8 μ m for the thickness of piezoelectric film 4.
(2) annealing in process
Then, the piezoelectric film 4 that forms is carried out annealing in process.The metallic plate 2 that forms piezoelectric film 4 is put into horse expense stove (FP100 of ヤ マ ト Industrial Co., Ltd system), be warming up to 850 ℃ with the speed of 300 ℃/h.After keeping 30 minutes under 850 ℃, make the temperature in the stove be cooled to room temperature by cooling off naturally, take out metallic plate 2.
2. test
On piezoelectric film, use adhesive resin to bring and shelter, at effective area 3.6mm
2In the above scope, evaporation Au forms lateral electrode.Then, be to carry out split pole under the 318kV/cm to handle at applying electric field.Produce piezo-activator like this.
Utilize strong dielectric medium analyzer (TFANALYZER2000, AiXACT corporate system), be applied to voltage on the piezo-activator and measure electrostatic capacitance, measure residual split pole (Pr) and anti-electric field (Ec).
＜comparative example 1 〉
Except not forming the medial electrode that is made of Pt, other is all identical with first embodiment and form piezoelectric film, and tests, and applied field is 400kV/cm.
＜comparative example 2 〉
Use alumina plate to replace metallic plate.Use Pt cream (Tanaka's noble metal industry system) on alumina plate, forming thickness is the cream layer of 8 μ m, forms medial electrode by calcining under 1300 ℃.
Forming on the alumina plate of medial electrode, utilizing the method identical and form piezoelectric film, and testing with first embodiment.Applied field is 329kV/cm.
＜comparative example 3 〉
Use alumina plate to replace metallic plate.(Tanaka's noble metal industry system, TR1533), forming thickness is the cream layer of 8 μ m, forms medial electrode by calcining under 850 ℃ to use Au cream on alumina plate.
Forming on the alumina plate of medial electrode, utilizing the method identical and form piezoelectric film, and testing with first embodiment.Applied field is 286kV/cm.
(result and investigation)
The experimental result of embodiment and comparative example is illustrated in the following table.
| Substrate | Lower electrode | Annealing temperature (℃) time (min) | Apply electric field kV/cm | Pr Ec Pr/Ec μC/cm 2 kV/cm |
| SUS430 SUS430 Al 2O 3 Al 2O 3 | Pt - Pt Au | 850 30 850 30 850 30 850 30 | 318 400 329 286 | 24.9 51.7 0.48 22.4 220 0.10 24.5 60.0 0.41 26.7 49.8 0.54 |
Be provided with under the situation of medial electrode 3 of Pt (embodiment 1) when stainless steel (SUS430) plate 2 and under the situation of using the alumina plate that in piezoelectric layer 4, does not contain diffuse elements (comparative example 2,3), demonstrate identical piezoelectric property.Relative with it, under the situation that medial electrode 3 is not set on the corrosion resistant plate 2 (comparative example 1), Fe element that is comprised in the corrosion resistant plate 2 or Cr element spread in piezoelectric layer 4, and the anti-electric field of piezoelectric layer 4 rises, and the Pr/Ec value reduces significantly.Because like this, by medial electrode 3 is set, can prevent that the Fe element or the Cr element that are contained in the corrosion resistant plate 2 from spreading to piezoelectric film 4 on corrosion resistant plate 2.
Secondly, describe second embodiment in detail with reference to Fig. 4.Below, the aspect different with first embodiment only is described.
As can be seen from Figure 4, in two embodiment, medial electrode 3 is divided into a plurality of independent medial electrode 3a, 3b ... replace commonization medial electrode 3.Each independent medial electrode 3 is set on the position corresponding with each balancing gate pit 16.What Fig. 4 represented is to form independent medial electrode 3a on the position of the 16a of balancing gate pit, is forming absolute electrode 3b on the position of the 16b of balancing gate pit.Each independent medial electrode 3a, 3b ... be connected with drive circuit IC independently respectively.Drive circuit IC controls independently and driving voltage is applied or be not applied to each independent medial electrode 3a, 3b ... on.
In a second embodiment, piezoelectric layer 4 also is divided into a plurality of independent piezoelectric layer 4a, 4b ...Each independent piezoelectric layer 4 is set on the position corresponding with each balancing gate pit 16.Fig. 4 represents that independent piezoelectric layer 4a is formed on the position of the 16a of balancing gate pit, and independent piezoelectric layer 4b is formed on the position of the 16b of balancing gate pit.Each independent piezoelectric layer 4a, 4b ... be layered in each independent medial electrode 3a, 3b ... the surface on.When seeing with the direction of metallic plate 2 quadratures, each independent piezoelectric layer 4a, 4b ... be included in each independent medial electrode 3a, 3b respectively ... in.More precisely, each independent piezoelectric layer 4a, 4b ... be included in from each independent medial electrode 3a, 3b ... depart to the inside in 20 μ m (equal'sing the independent piezoelectric layer 4a of second embodiment, the thickness of 4b) the shape.As each independent piezoelectricity 4a, 4b ... be included in from each independent medial electrode 3a, 3b ... depart to the inside and equal independent piezoelectric layer 4a, 4b at least ... the shape of thickness in the time, no matter in the horizontal direction diffusion of Fig. 4, the element that can prevent metallic plate 2 is to independent piezoelectric layer 4a, 4b ... middle diffusion.By experiment as can be seen, preferred independent piezoelectric layer 4a, 4b ... profile than independent medial electrode 3a, 3b ... profile depart from 20～500 μ m more to the inside.Equal independent piezoelectric layer 4a, 4b if depart from ... thickness 20 μ m more than, the element that then can prevent metallic plate 2 is to independent piezoelectric layer 4a, 4b ... middle diffusion; If less than 500 μ m, then can be at independent piezoelectric layer 4a, 4b ... on guarantee necessary area.
In second experimental example, lateral electrode 5 also is divided into a plurality of independent lateral electrode 5a, 5b ...
In a second embodiment, drive IC is controlled independently and driving voltage is applied or be not applied to each independent medial electrode 3a, 3b ... on.In addition, drive that IC also controls independently and driving voltage applied or be not applied to each independent lateral electrode 5a, 5b ... on.Different therewith, also can replace it and with a plurality of independent lateral electrode 5a, 5b ... maintain common electric potential.In this case, also can be used as a common lateral electrode 5 replaces and is divided into a plurality of independent lateral electrode 5a, 5b ...
In a second embodiment, piezoelectric layer 4 is divided into a plurality of independent piezoelectric layer 4a, 4b ..., the interval of independent piezoelectric layer 4a, 4b forms the space.Also can use a common piezoelectric layer 4 to replace it.In this case, element from corrosion resistant plate 2 to being positioned at independent medial electrode 3a, 3b ... the piezoelectric layer 4 of top at interval in diffusion, piezoelectric property reduces.But because be positioned at independent medial electrode 3a, 3b ... the piezoelectric layer of interval top in, do not need piezoelectric effect, therefore do not have special problem.
For medial electrode of the present invention, as long as have electric conductivity and can prevent in the metallic plate Elements Diffusion that is contained, be under the situation of iron, aluminium, chromium, cobalt, manganese, molybdenum or tungsten for example at the element that metallic plate contains, preferred use to comprise be selected from one in Au, Pt, Ti, Ag-Pd alloy, Ag-Pt alloy, Rh, In, La, Nd, Nb, Sb, Th, W, Ca, Sr, Mg and their oxide or more than two kind.For example, can be any formed metallic film in the above-mentioned element, perhaps also can be the sull of above-mentioned element.Preferably use La as sull
1-xSr
xMnO
3(LSMO), (La
1-xSr
x) (Ga
1-yMg
y) O
3 -δ(LSGM), indium-tin-oxide (ITO), SrRuO
3(SRO), La
2-xSr
xCoO
4(LSCO) etc.
The thickness of medial electrode is preferably 0.1 μ m～5 μ m, by making thickness more than 0.1 μ m and can interdict element well from the diffusion of metallic plate to piezoelectric layer, in addition, by making thickness below 5 μ m and can stop influence, reach the degree of the action that does not influence piezo-activator to the metallic plate bending.
For piezo-activator of the present invention, owing to realize fine ink flow path, so particularly useful on being layered in the block of making by stacked polylith metallic plate the time.By piezoelectric layer being arranged on, and can make piezo-activator and block firm engagement by on the metallic plate that constitutes with the approaching metal of the same race of block thermal coefficient of expansion.
Medial electrode preferably uses jointly with respect to a plurality of balancing gate pits 16, but as shown in Figure 4, also can be split into a plurality of independent medial electrodes.Each independent medial electrode can prevent to constitute the element of metallic plate to stacked independent piezoelectric layer diffusion above it.When considering the diffusion of transverse direction, preferred independent medial electrode stretches out more than the thickness of piezoelectric layer laterally from independent piezoelectric layer.If independent medial electrode stretches out more than the thickness of piezoelectric layer laterally from independent piezoelectric layer,, can prevent that also the element that constitutes metallic plate from spreading to independent piezoelectric layer even then element spreads at transverse direction.
Under the situation of using common piezoelectric layer and common medial electrode, near the piezoelectric property of the piezoelectric layer the profile that prevents to be positioned at common piezoelectric layer reduces, preferably common medial electrode stretches out more than the thickness of piezoelectric layer laterally from common piezoelectric layer.Even element spreads at transverse direction, can prevent that also the element that constitutes metallic plate from spreading in piezoelectric layer.
Technical scope of the present invention is not limited by the foregoing description, for example, can be included in the following technical scope of the present invention.In addition, technical scope of the present invention can be popularized for impartial scope.
(1) in the above-described embodiment, though be to utilize vapour deposition method to form medial electrode 3, the formation method of medial electrode is not limited to above-mentioned embodiment.For example, can use splash, formation such as calcining method again behind plating, application or the printing conductive cream.
(2) in the above-described embodiment, use stainless steel (SUS430) to form each plate 13,14,15 and the metallic plate 2 that constitutes block 11, but the material of block and metallic plate is not limited to above-mentioned embodiment, also can use SUS304,42A alloy to wait and form.
Claims (17)
1. a piezo-activator is characterized in that, comprising:
Flexible metallic plate;
The medial electrode that on the surface of described metallic plate, forms;
Be taken in and produce the piezoelectric layer of distortion when applying voltage in the surface that is layered in described medial electrode; And
The lateral electrode that on the surface of described piezoelectric layer, forms, wherein,
Described piezoelectric layer is formed by the layer that the accumulation horizon to the particulate group of containing piezoelectric carries out after the annealing in process,
Described medial electrode is formed by the material of the element that prevents to constitute described metallic plate to described piezoelectric layer diffusion,
Described medial electrode includes a plurality of independent medial electrodes,
Described piezoelectric layer has a plurality of independent piezoelectric layers,
Each independent piezoelectric layer is layered on the surface of each independent medial electrode,
When seeing, among each independent piezoelectric layer is included in and departs from the zone of the distance that equals independent piezoelectric layer thickness to the inside from each independent medial electrode with the direction of described metallic plate quadrature.
2. piezo-activator as claimed in claim 1 is characterized in that:
Described metallic plate contains a kind of or element more than two kinds in chosen from Fe, aluminium, chromium, cobalt, manganese, molybdenum and the tungsten;
Described medial electrode contains and is selected from a kind of in Au, Pt, Ti, Ag-Pd alloy, Ag-Pt alloy, Rh, In, La, Nd, Nb, Sb, Th, W, Ca, Sr, Mg and their oxide or more than two kinds.
3. piezo-activator as claimed in claim 2 is characterized by and is:
Described medial electrode contains and is selected from La
1-xSr
xMnO
3(LSMO), (La
1-xSr
x) (Ga
1- yMg
y) O
3-δ(LSGM), indium-tin-oxide (ITO), SrRuO
3(SRO) and La
2- xSr
xCoO
4(LSCO) a kind of or oxide more than two kinds in.
4. piezo-activator as claimed in claim 1 is characterized in that:
The thickness of described medial electrode is more than or equal to 0.1 μ m and smaller or equal to 5 μ m.
5. an ink gun is characterized in that, comprising:
Block, its inside has ink flow path, through stacked and engage and form, and is formed with a plurality of pits from the teeth outwards by form a plurality of holes on the most surperficial plate by the polylith plate that is formed with through hole respectively, and at least a portion of described polylith plate is formed by metal;
Flexible metallic plate, its with engage and cover above the described block on described pit, form by the metal identical with the metal that forms described block;
Be formed on the lip-deep medial electrode of described metallic plate;
Be taken in and produce the piezoelectric layer of distortion when applying voltage in the surface that is layered in described medial electrode; And
Be formed on the lip-deep lateral electrode of described piezoelectric layer, wherein,
Described piezoelectric layer is formed by the layer that the accumulation horizon to the particulate group of containing piezoelectric carries out after the annealing in process,
Described medial electrode is by preventing that element that described metallic plate the contains material to described piezoelectric layer diffusion from being formed,
Described medial electrode has a plurality of independent medial electrodes,
Described piezoelectric layer has a plurality of independent piezoelectric layers,
Each independent piezoelectric layer is layered on the surface of each independent medial electrode,
When seeing with the direction of described metallic plate quadrature, each independent piezoelectric layer is included among each independent medial electrode.
6. ink gun as claimed in claim 5 is characterized in that:
Described lateral electrode has a plurality of independent lateral electrodes,
Each independent lateral electrode is formed on towards on the position of each pit that forms on the described block surface.
7. ink gun as claimed in claim 5 is characterized in that: each independent medial electrode is formed on towards on the position of each pit that forms on the described block surface.
8. ink gun as claimed in claim 7 is characterized in that:
When seeing, among each independent piezoelectric layer is included in and departs from the zone of the distance that equals independent piezoelectric layer thickness to the inside from each independent medial electrode with the direction of described metallic plate quadrature.
9. a manufacture method that is laminated with the piezo-activator of flexible metallic plate, medial electrode, piezoelectric layer and lateral electrode is characterized in that, comprising:
On the surface of described metallic plate, form the operation of described medial electrode;
On the surface of described medial electrode, form the operation that when applying voltage, produces the described piezoelectric layer of distortion; And
On the surface of described piezoelectric layer, form the operation of described lateral electrode, wherein,
Described piezoelectric layer forms operation to have lip-deep operation that the particulate group that will contain piezoelectric is deposited in described medial electrode and this accumulation horizon is carried out the operation of annealing in process,
Form in the operation at described medial electrode, select to prevent that the element that constitutes described metallic plate from forming described medial electrode to the material of described piezoelectric layer diffusion,
Form in the operation at described medial electrode, on the surface of described metallic plate, be formed with a plurality of independent medial electrodes,
Form in the operation at described piezoelectric layer, form a plurality of independent piezoelectric layers,
Each independent piezoelectric layer is layered on the surface of each independent medial electrode,
When seeing with the direction of described metallic plate quadrature, each independent piezoelectric layer is included among each independent medial electrode.
10. the manufacture method of piezo-activator as claimed in claim 9 is characterized in that:
Described metallic plate contains a kind of or element more than two kinds in chosen from Fe, aluminium, chromium, cobalt, manganese, molybdenum and the tungsten;
Described medial electrode contains and is selected from a kind of in Au, Pt, Ti, Ag-Pd alloy, Ag-Pt alloy, Rh, In, La, Nd, Nb, Sb, Th, W, Ca, Sr, Mg and their oxide or more than two kinds.
11. the manufacture method of piezo-activator as claimed in claim 10 is characterized in that:
Described medial electrode contains and is selected from La
1-xSr
xMnO
3(LSMO), (La
1-xSr
x) (Ga
1- yMg
y) O
3-δ(LSGM), indium-tin-oxide (ITO), SrRuO
3(SRO) and La
2- xSr
xCoO
4(LSCO) a kind of or oxide more than two kinds in.
12. the manufacture method of piezo-activator as claimed in claim 9 is characterized in that:
The thickness of described medial electrode is more than or equal to 0.1 μ m and smaller or equal to 5 μ m.
13. the manufacture method of piezo-activator as claimed in claim 9 is characterized in that:
When seeing, among each independent piezoelectric layer is included in and departs from the zone of the distance that equals independent piezoelectric layer thickness to the inside from each independent medial electrode with the direction of described metallic plate quadrature.
14. manufacture method that is laminated with the ink gun of the block that is formed with ink flow path in inside and piezo-activator, wherein, described piezo-activator is stacked flexible metallic plate, medial electrode, piezoelectric layer and lateral electrode, and described manufacture method is characterised in that, comprising:
Preparing at least a portion is metal polylith plate, forms the operation of through hole on each of polylith plate;
Stacked and engage the polylith plate and form the operation of described block;
Stacked and engage operation on described block by the formed flexible described metallic plate of metal identical with the metal that forms described block;
On the surface of described metallic plate, form the operation of described medial electrode;
On the surface of described medial electrode, form the operation that when applying voltage, produces the described piezoelectric layer of distortion; And
On the surface of described piezoelectric layer, form the operation of described lateral electrode, wherein,
The formation operation of described piezoelectric layer has lip-deep operation that the particulate group that will contain piezoelectric is deposited in described medial electrode and this accumulation horizon is carried out the operation of annealing in process,
Form in the operation at described medial electrode, select to prevent to constitute the material of the element of described metallic plate to described piezoelectric layer diffusion.
15. get the manufacture method of 14 described ink guns as claim, it is characterized in that:
Described medial electrode has the size of a plurality of pits that form on the surface that covers described block,
Described lateral electrode has a plurality of independent lateral electrodes,
Described independent lateral electrode is formed on towards on the position of each pit that forms on the described block surface.
16. the manufacture method of ink gun as claimed in claim 14 is characterized in that:
Described medial electrode has a plurality of independent medial electrodes,
Each independent medial electrode is formed on towards on the position of each pit that forms on the described block surface,
Described piezoelectric layer has a plurality of independent piezoelectric layers,
Each independent piezoelectric layer is layered on the surface of each independent medial electrode,
When seeing with the direction of described metallic plate quadrature, each independent piezoelectric layer is included among each independent medial electrode.
17. the manufacture method of ink gun as claimed in claim 16 is characterized in that:
When seeing, among each independent piezoelectric layer is included in and departs from the zone of the distance that equals independent piezoelectric layer thickness to the inside from each independent medial electrode with the direction of described metallic plate quadrature.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004206097 | 2004-07-13 | ||
| JP2004206097 | 2004-07-13 |
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| CNB2005100831650A Expired - Fee Related CN100402293C (en) | 2004-07-13 | 2005-07-13 | Piezoelectric actuator, ink jet head, and method of manufacturing them |
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| US (1) | US20060012646A1 (en) |
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| CN111278652A (en) * | 2017-06-22 | 2020-06-12 | 富士胶卷迪马蒂克斯股份有限公司 | Piezoelectric device and method for manufacturing ink jet head |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN1721184A (en) | 2006-01-18 |
| US20060012646A1 (en) | 2006-01-19 |
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