CN100402293C - Piezoelectric actuator, ink jet head, and method of manufacturing them - Google Patents

Piezoelectric actuator, ink jet head, and method of manufacturing them Download PDF

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CN100402293C
CN100402293C CN 200510083165 CN200510083165A CN100402293C CN 100402293 C CN100402293 C CN 100402293C CN 200510083165 CN200510083165 CN 200510083165 CN 200510083165 A CN200510083165 A CN 200510083165A CN 100402293 C CN100402293 C CN 100402293C
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piezoelectric
inner electrode
formed
layer
surface
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CN 200510083165
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CN1721184A (en )
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安井基博
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兄弟工业株式会社
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1642Production of nozzles manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1643Production of nozzles manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1646Production of nozzles manufacturing processes thin film formation thin film formation by sputtering
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02Details
    • H01L41/04Details of piezo-electric or electrostrictive devices
    • H01L41/047Electrodes or electrical connection arrangements
    • H01L41/0477Conductive materials
    • H01L41/0478Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/09Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H01L41/0973Membrane type
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
    • H01L41/29Forming electrodes, leads or terminal arrangements
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
    • H01L41/31Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base
    • H01L41/314Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base by depositing piezo-electric or electrostrictive layers, e.g. aerosol or screen printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14266Sheet-like thin film type piezoelectric element

Abstract

本发明提供一种制造工序简单,并可降低成本,同时实现动作的稳定化的压电致动器和喷墨头以及其制造方法。 The present invention provides a simple manufacturing process, and reduce costs, while achieving actuator and an ink jet head and a method of manufacturing a stabilized operation of the piezoelectric actuator. 在金属板(2)和压电层(4)之间设置有兼扩散防止层的内侧电极(3)。 The metal plate (2) and the piezoelectric layer (4) is provided between the inner electrode with a diffusion preventing layer and (3). 采用这种结构,因为可以在一个工序中形成电极兼扩散防止层的层,因此制造工序简单,可以降低制造成本。 With this construction, since it is possible to form an electrode layer and a diffusion preventing layer in one step, the manufacturing process is simple, the manufacturing cost can be reduced. 此外,若形成电极和扩散防止层为二个层的结构,则这些层的物理特性对金属板的弯曲特性存在较大影响。 Further, when forming the electrode and the diffusion prevention layer is a two layer structure, the physical properties of these layers there is a big effect on the bending properties of the metal plate. 由于只使用电极兼扩散防止层的一个层,所以能够使压电致动器的动作稳定。 Since only one layer of the electrode and the diffusion prevention layer, it is possible to make the operation of the piezoelectric actuator is stabilized.

Description

压电致动器和喷墨头以及其制造方法技术领域本发明涉及压电致动器和利用该压电致动器的喷墨头。 The piezoelectric actuator and the ink jet head and a manufacturing method thereof Technical Field The present invention relates to an ink jet head using the piezoelectric actuator and the piezoelectric actuator. 本发明还涉及压电致动器和喷墨头的制造方法。 The present invention further relates to a method of manufacturing the piezoelectric actuator and the ink jet head. 背景技术压电致动器应用于各种用途中。 BACKGROUND OF THE INVENTION The piezoelectric actuator used in various applications. 在本说明书中所述的压电致动器是指:在由若施加电压则变形的材料所形成的层(压电层)的表里两面上形成有电极,通过控制施加在形成于表里两面上的电极之间的电位,而能够控制压电层形状的压电致动器。 In the present specification refers to a piezoelectric actuator: an electrode formed on the opposite surfaces of the layer (piezoelectric layer) of a material is deformed when a voltage is applied to be formed, it is formed by applying to the control table the potential between the electrodes on both sides, it is possible to control the shape of the piezoelectric layer of the piezoelectric actuator. 如果将至少一方的电极分割成多个独立电极,则可以控制施加在压电层的每个部位上的电位差。 If at least one of the electrodes is divided into a plurality of individual electrodes, it is possible to control the potential applied to each portion of the piezoelectric layer is poor. 作为压电致动器的用途之一,已知有驱动在喷墨式打印机中所使用的喷墨头的用途。 As one uses a piezoelectric actuator, there is known the use of an ink jet head in the ink jet printer driver used. 在(日本专利)特开平11-314365号公报、(日本专利)特开平11-334087号公报以及(日本专利)特开2000-94681号公报中揭示了组装有压电致动器的喷墨头的一个例子。 In (Japanese Patent) Laid-Open Patent Publication No. 11-314365, (Japanese Patent) and JP Laid-Open No. 11-334087 (Japanese Patent) Publication Laid-Open No. 2000-94681 discloses an ink jet head incorporating a piezoelectric actuator an example. 喷墨头包括在内部形成有墨水流路的块体以及压电致动器。 An ink jet head comprising forming the ink flow path block in the inside and a piezoelectric actuator. 在块体的内部形成有墨水收容室,在块体的一方的表面上形成有多个凹坑, 在另一方的表面上形成有多个喷嘴。 Block is formed inside the ink storage chamber, a plurality of dimples formed on one surface of the block, a plurality of nozzles are formed on the other surface. 在块体的内部形成有多条墨水流路。 In the interior of the block forming a plurality of ink flow paths. 各墨水流路连通墨水收容室和一个凹坑,还连通一个凹坑和一个喷嘴。 Each ink flow path communicating the ink storage chamber and a pit, and a pit is also a nozzle in communication. 压电致动器重叠在形成有多个凹坑的块体的一个表面上,从而盖在多个凹坑上。 The piezoelectric actuator is superimposed on one surface of the block is formed with a plurality of pits so as to cover a plurality of dimples. 压电致动器包括:当施加电压时变形的压电层、在压电层的表面上形成的外侧电极、以及在压电层的里面形成的内侧电极。 Piezoelectric actuator comprising: a piezoelectric layer deformed when voltage is applied, the outer electrode is formed on the surface of the piezoelectric layer, and an inner electrode formed inside the piezoelectric layer. 压电致动器以在压电层和块体之间隔有内侧电极的状态而重叠。 Piezoelectric actuator state and the spacer block of piezoelectric layers have inner electrode overlap. 外侧电极和内侧电极的至少一方被分割成多个独立电极。 The inner electrode and the outer electrode is divided into at least one of the plurality of individual electrodes. 施加在多个独立电极上的电压可以从施加在其他独立电极上的电压独立来调整。 Voltage is applied to the plurality of individual electrodes may be adjusted independently from the voltage applied to the other individual electrodes. 各个独立电极在向着在块体的上述一方表面上形成的各个凹坑的位置上而形成。 Each of the individual electrodes at a position toward each pit formed on said one surface of the block is formed on. 在块体一方的表面上形成的各个凹坑通过压电致动器而关闭,从而形成压力室。 Each pit formed on the one surface of the block and closed by an actuator piezoelectric, thereby forming a pressure chamber. 该压力室的体积通过压电致动器的变形而变化。 The volume of the pressure chamber is changed by the deformation of the piezoelectric actuator. 如果压电致动器以侵入凹坑内的方式而变形,则压力室的容积减小,收容在压力室内的墨水向着喷嘴而被送出,从而从喷嘴吐出墨水。 If the piezoelectric actuator so as to deform the intrusion pits, the volume of the pressure chamber decreases, the nozzle housing is fed toward the ink pressure chamber, thereby discharging ink from the nozzle. 如果侵入凹坑内的压电致动器恢复成平坦的形状,则压力室容积增大,收容在墨水收容室内的墨水向着压力室而被吸入。 If the pit with the piezoelectric actuator is restored to a flat shape, the pressure chamber volume increases, the pressure storage chamber is drawn toward the ink chamber accommodating ink. 存在这样的方法:即,分别形成块体和压电致动器,然后通过将两者固定来制造喷墨头的方法。 That method, blocks are formed and a piezoelectric actuator and by fixing both ink jet head manufacturing: there is a method. 在(日本专利)特开2000-94681号公报中揭示有这种类型的制造方法。 In (Japanese Patent) Publication Laid-Open No. 2000-94681 has disclosed a manufacturing method of this type. 开发有在各张板上分别形成贯通孔,通过分别将形成有贯通孔的多块板层叠接合来制造块体的方法。 Development has a through-hole formed in the sheets of each panel, respectively formed by a method of producing block through holes are stacked plurality of plates joined. 通过预先调整在各块板上形成的贯通孔的形状和位置,并通过层叠接合多块板,而能够制造出在内部具有墨水收容室和多条墨水流路、并且在一方的表面上形成有多个凹坑而在另一方的表面上形成有多个喷嘴的块体。 By pre-adjusting the shape and position of the through holes formed in the block plates, and joined by laminating a plurality of plates, it is possible to manufacture the ink receiving chamber and having a plurality of ink flow paths therein, and is formed on one surface with a the plurality of blocks has a plurality of pits formed on the surface of nozzles other. 各个墨水流路连通墨水收容室和一个凹坑,还连通一个凹坑和一个喷嘴。 Each of the ink flow path communicating the ink storage chamber and a pit, and a pit is also a nozzle in communication. 开发有通过继续层叠板的过程,来继续进行块体的制造工序,以此来制造压电致动器的方法。 Development has to proceed through the manufacturing process of the block the process continues laminate, thereby producing a piezoelectric actuator. 利用该方法,在形成有多个凹坑的块体表面上,层叠可弯曲的板,使其盖在多个凹坑上。 With this method, a plurality of recesses formed in the surface of blocks of laminated flexible board, so that a plurality of dimples on the cap. 在可弯曲的板的表面上形成电极。 Forming an electrode on the surface of the flexible plate. 接着,在该表面上层叠压电层,最后,在压电层的表面上形成电极。 Subsequently, the laminated piezoelectric layers, and finally, the electrode is formed on the surface of the piezoelectric layer on the surface. 在可弯曲的板的表面上形成的电极成为内侧电极,在压电层的表面上形成的电极成为外侧电极。 Electrodes formed on the surface of the flexible plate becomes inner electrode, an electrode formed on the surface of the piezoelectric layer becomes the outer electrode. 外侧电极和内侧电极的至少一方被分割成多个独立电极。 The inner electrode and the outer electrode is divided into at least one of the plurality of individual electrodes. 各个独立电极在向着在块体表面上形成的各个凹坑的位置上而形成。 Each of the individual electrodes at a position toward each pit formed on the surface of the block is formed. 当采用这种方法时,通过继续层叠的过程而能够制造出喷墨头。 When using this method, the laminating process continues while the ink jet head can be manufactured. 在(日本专利)特开平11-314365号公报以及(日本专利)特开平11-334087号公报中揭示有通过继续层叠的过程来继续在块体上制造压电致动器的方法。 In (Japanese Patent) and JP Laid-Open No. 11-314365 (Patent Japanese) Laid-Open Patent Publication No. 11-334087 discloses a method of manufacturing have continued to the piezoelectric actuator in the process continues through blocks stacked. 若利用通过继续层叠的过程来继续在块体上制造压电致动器的方法,则使得制造工序变得简单。 When utilized to continue the production method of the piezoelectric actuator on a block by laminating the process continues, so that the manufacturing process is simplified. 但另一方面,在可弯曲的板的表面上层叠压电层后,有必要对压电层进行热处理。 On the other hand, in the laminated piezoelectric layer on the surface of the flexible plate, it is necessary for the heat treatment of the piezoelectric layer. 在(日本专利)特开平11-314365号公报的技术中,利用Si02制成可弯曲的板,利用溶胶凝胶法或者飞溅法在其表面上层叠压电层, 然后再进行热处理。 In (Japanese Patent) Publication Laid-Open No. 11-314365 in the art to utilize the bendable plate Si02, sol-gel method or spatter method piezoelectric layer laminated on the surface thereof, and then heat-treated. 在(日本专利)特开平1卜3340S7号公报中,利用溶胶凝胶法、 MOD法(有机金属化合物的热分解法)、飞溅法或者蒸镀法来层叠压电层,然后再对其进行热处理。 In (Japanese Patent) Laid-Open Publication No. 1 Bu 3340S7, sol-gel method, MOD method (thermal decomposition process of the organometallic compound), vapor deposition method or spatter method laminated piezoelectric layers, and then subjected to a heat treatment . 发明内容本发明者反复研究的结果表明,若利用溶胶凝胶法、MOD法、飞溅法或者蒸镀法在可弯曲的板的表面上层叠压电层,然后再进行热处理,则在热处理时压电层会产生收縮,有可能降低压电致动器的性能。 The present inventors repeated studies show summary, if the sol-gel method, MOD method, a vapor deposition method or a spatter laminated piezoelectric layer on the surface of the flexible plate, and then heat-treated, the pressure during the heat treatment layer will produce shrinkage may decrease performance of the piezoelectric actuator. 在收縮的压电层和可弯曲的板之间会产生较大的应力,这会使得压电致动器的性能降低。 Between the piezoelectric layer and the bending plate will have a greater shrinkage stress, which results in performance of the piezoelectric actuator is reduced. 为了形成压电层,开发了下述方法:即,利用载体气体使含有压电材料的微粒群空气溶胶化(使微粒在气体中浮游并与其他微粒分离的状态称为空气溶胶化),将被空气溶胶化的微粒群吹到基板的表面上,在基板上堆积微粒群,通过对堆积的层进行退火而形成压电层,关于这点在(日本专利)特开2001-152360号公报中有所揭示。 To form the piezoelectric layer, the development of the following methods: i.e., using a carrier gas of the aerosol particle group containing a piezoelectric material (the particles suspended in the gas and particle separation with a state of the other is referred aerosol), and of the aerosol particles is blown onto the surface of the substrate of the group, the group microparticles deposited on a substrate, the piezoelectric layer is formed by annealing the deposited layer, in this regard (Japanese Patent) Publication Laid-open No. 2001-152360 It has been revealed. 本发明者们的研究表明,当利用这种方法时,有可能制造出退火时的压电层收縮小、性能高的压电致动器。 The present inventors' studies show that when using this method, it is possible to manufacture the piezoelectric layer during annealing shrinkage, high performance piezoelectric actuator. 在通过继续层叠的过程而在块体上继续制造压电致动器的情况下,通过采用空气溶胶化来堆积包含有压电材料的微粒群并对堆积层进行退火的方法,而能够制造出性能良好的喷墨头。 In the case of manufacturing the piezoelectric actuator continues the process continues by laminating on a block, be deposited through the use of the aerosol comprising a particle group has a piezoelectric material deposited layer and annealing methods, and can be manufactured good performance of the ink jet head. 然而,在进行了实验之后发现并不能得到期待的性能。 However, after conducting experiments to find and it can not be expected performance. 当采用在基板的表面上堆积空气溶胶化的微粒群、对堆积层进行退火的方法时, 虽然期待着能够制造出性能良好的压电致动器,但实际上并不能。 When deposited on a surface of the substrate of the aerosol particle swarm, annealing method deposited layer, while looking forward to good performance can be manufactured a piezoelectric actuator, but not actually. 本发明者的研究结果还表明,在对堆积在基板上的层进行退火而制成压电层的过程中,形成基板的元素在压电层中会发生扩散,结果产生压电致动器的性能下降的现象。 The results also show that the present inventors, in the course of the layer deposited on the substrate by annealing the piezoelectric layer is made in the substrate forming element diffusion occurs in the piezoelectric layer, the resulting piezoelectric actuator performance degradation phenomenon. 即,在对堆积在基板上的层进行退火来制成压电层的过程中,如果形成基板的元素在压电层中不扩散, 则可以制造出性能良好的压电致动器。 That is, in the process of the layer deposited on the substrate by annealing the piezoelectric layer formed in the element if the substrate is not formed in the diffusion of the piezoelectric layer, the good performance can be manufactured a piezoelectric actuator. 如果在退火过程中能够使形成基板的元素在压电层中不扩散,则可以灵活运用将空气溶胶化的微粒群吹到基板的表面上来堆积的方法的优点,从而能够制造出性能良好的压电致动器。 If the element forming substrate can be made in the annealing process is not diffused in the piezoelectric layers, you can utilize the advantages of the surface of the aerosol particle swarm deposited onto the substrate blown method, so that good performance can be manufactured pressure electric actuator.

在本发明中,为了在退火过程中能够使形成基板的元素在压电层中不扩散,可以预先在基板的表面上形成扩散防止层。 In the present invention, the annealing process in order to enable the elements formed in the piezoelectric substrate is not diffusion layer, the diffusion preventing layer may be formed in advance on the surface of the substrate. g卩,将空气溶胶化的微粒群堆积于在表面上形成有扩散防止层的基板上,然后再对其进行退火。 g Jie, of the aerosol particles deposited on the swarm is formed on a substrate with a diffusion preventing layer on the surface, and then subjected to annealing.

当压电层的基板与表面上形成有多个凹坑的块体紧密接触、并由与形成块体的金属同种的金属所形成时,容易维持块体和基板的粘接。 When a plurality of blocks of pits formed in the substrate of the piezoelectric layer is in close contact with the upper surface, formed by the same metal as the metal forming the block, the block is easily maintained and adhered to the substrate. 如果由金属形成基板,则该基板兼作内侧电极,从而不需要在基板上形成内侧电极。 If the substrate is formed of a metal, the substrate also serves as the inner electrode, so that no inner electrode is formed on the substrate. 然而,在基板表面上形成有使与压电层的接触电阻减小的电极有利。 However, the electrodes so that the piezoelectric layer is advantageously reduced contact resistance is formed on the substrate surface.

在本发明中,用于扩散防止的层并不只用作扩散防止,也可以作为减小与压电层的接触电阻的电极来利用。 In the present invention, the diffusion preventing layer for preventing diffusion is not just used, the contact resistance can be reduced as an electrode and the piezoelectric layer utilized. 即,在本发明中,在与块体粘接的金属板(为了增减压力室的体积而必需能够弯曲)的表面上具有能够防止构成该金属板的元素向压电层扩散的功能,同时,选择具有导电性的材料形成内侧电极。 That is, in the present invention, the metal plate and bonded blocks (to increase or decrease the volume of the pressure chamber must be able to bend) can be prevented from having an element constituting the metal plate is diffused into the piezoelectric layer on the surface features, while selecting a material having a conductive inner electrode is formed. 在该内侧电极的表面上堆积含有压电材料的微粒群,对堆积层进行退火。 The surface of the inner electrode deposited particulate group containing piezoelectric material layer is deposited on the annealed.

若采用这种制造方法,则当使堆积层退火而作成压电层时,防止了元素从金属板向压电层扩散,来维持压电层的高性能。 When using such a manufacturing method, when the deposited layer is annealed to make the piezoelectric layer made, it prevents the diffusion of elements from the metal plate to the piezoelectric layer, the piezoelectric layer to maintain high performance. 此外,因为是在金属板上堆积空气溶胶化的微粒群后,再进行退火,所以压电层的收縮小,从而能够维持压电层的性能高。 In addition, because the bulk of the aerosol particle swarm, and then annealing the metal plate, the contraction of the piezoelectric layer is smaller, it is possible to maintain high performance of the piezoelectric layer. 另外,扩散防止层为电极, 因此可以降低与压电层的接触电阻。 Further, the diffusion preventing layer is an electrode, the piezoelectric layer can be reduced contact resistance. 这也可以维持这种压电极的高性能。 This pressure can be maintained high performance of this electrode. 若采用本发明,则可以累加地得到这些效果,能够制造出性能良好的压电致动器。 If the present invention is employed, it may be accumulated to obtain these effects, good performance can be manufactured a piezoelectric actuator.

若采用本发明,则可以制造出通过与喷墨头组合使用来发挥有用性的压电致动器。 When using the present invention, it is possible to manufacture a piezoelectric exert usefulness by the use of the ink jet head and the actuator. 然而,利用本发明制造的压电致动器的用途并不局限于喷墨头。 However, the present invention is fabricated using a piezoelectric actuator is not limited to the use of the ink jet head. 当制造用于其他用途的压电致动器时,也可以利用本发明。 When manufactured for other purposes piezoelectric actuators, the present invention may also be used.

可以分别设置扩散防止层和电极层。 Respectively, may be provided to prevent the diffusion layer and an electrode layer. 在这种情况下,能够在可弯曲的金属板和内侧电极层之间设置扩散防止层。 In this case, can be provided between the diffusion plate and the flexible metal layer prevents the inner electrode layer. 即,能够在可弯曲的金属板和压电层之间设置内侧电极层和扩散防止层这二个层。 That is, the inner electrode layer can be provided and a diffusion preventing layer between these two layers may be of bent sheet metal and the piezoelectric layer. 当在可弯曲的金属板和压电层之间设置这二个层时,由于二个层的物理特性复合而对金属板的弯曲特性存在影响,因此难以使压电致动器的性能得到稳定。 When these two layers disposed between the flexible metal plate and the piezoelectric layer due to the physical properties of the composite layers exist two effects on characteristics of the metal plate is bent, it is difficult to make the performance of the piezoelectric actuator is stabilized . 在本发明中,内侧电极层和扩散防止层公用,不产生这个问题。 In the present invention, the inner electrode layer and the diffusion preventing layer is common, this problem does not occur.

若采用本发明,则由于由合并具有导电性和扩散防止能力的材料而制成内侧电极,所以,内侧电极层可兼作扩散防止层。 According to this invention, since the combined material having conductivity and ability to prevent diffusion of the inner electrode is made, so that the inner electrode layer may serve as a diffusion preventing layer. 不需要分别形成内侧电极层和扩散防止层,使得制造工序简单化,并能够降低制造成本。 Does not require the inner electrode layer are formed and the diffusion preventing layer, such that the manufacturing process be simplified, and the manufacturing cost can be reduced. 此外,当分别形成内侧电极层和扩散防止层时,金属板的弯曲特性很容易变得不稳定,而若采用本发明,则能够使金属板的弯曲特性稳定化。 Further, when the inner electrode layer is formed and a diffusion preventing layer, respectively, the metal plate bending properties easily become unstable, and if the present invention, it is possible to bend the metal plate to stabilize the characteristics. 采用本发明,将空气溶胶化的微粒群堆积在金属板上, 可发挥使堆积的层退火的方法的优点,能够制造出高性能的压电致动器。 According to the present invention, the aerosol particles of a metal plate deposited group, can play a method of depositing the layer is annealed advantages, high performance can be manufactured a piezoelectric actuator.

而且,若采用本发明,则可以接着内部具有墨水流路的块体的制造过程来继续进行压电致动器的制造过程,能够使两者的制造过程流水线化。 Further, if the present invention is employed, the manufacturing process may then have internal blocks the ink flow path to continue the process of manufacturing the piezoelectric actuator, it is possible to make both the manufacturing process of pipelining. 能够高精度地维持具有墨水流路的块体和压电致动器的位置关系。 Possible to accurately maintain the positional relationship between the block and the piezoelectric actuator of an ink flow path.

其中,压电致动器的用途并不仅仅局限于喷墨头。 Wherein the use of the piezoelectric actuator is not limited to the ink jet head. 即,通过改变组装在块体中的结构而能够制造出喷墨头以外的装置。 That is, by changing the assembly of the block body structure can be manufactured devices other than the inkjet head. 在这种情况下, 也能够得到正确定位块体和压电致动器的位置关系的优点。 In this case, the advantage can be obtained and a correct positioning of the block positional relationship of a piezoelectric actuator.

附图说明 BRIEF DESCRIPTION

图1表示的是第一实施例的喷墨头的侧截面图。 FIG 1 is a side sectional view showing an ink jet head of the first embodiment.

图2表示的是压电致动器的制造工序的侧截面图,图2 (A)表示的是可弯曲的金属板与压电室接合的样子,图2 (B)表示的是在金属板上形成有内侧电极的样子,图2 (C)表示的是在内侧电极的表面上层叠有压电层的样子,图2 (D)表示的是在压电层的表面上形成有外侧电极的样子。 FIG 2 is a side sectional view showing a manufacturing process of a piezoelectric actuator, FIG. 2 (A) is represented by a curved metal plate bonded to the piezoelectric chamber way, FIG. 2 (B) is represented by a metal plate like the inner electrode is formed, FIG. 2 (C) is represented by way of the piezoelectric layer is laminated on the surface of the inner electrode, FIG. 2 (D) is represented by the outer electrode is formed on the surface of the piezoelectric layer, look.

图3表示的是成膜装置的简图。 FIG 3 is a schematic diagram showing a film forming apparatus.

图4表示的是第二实施例的喷墨头的侧截面图。 FIG 4 is a side cross-sectional view showing the ink jet head of the second embodiment.

具体实施方式以下,参照图1〜图3来对具体化本发明的第一实施例进行详细说明。 DESCRIPTION OF EMBODIMENTS Hereinafter, with reference to FIG. 1 ~ FIG. 3 of the first embodiment embodying the present invention will be described in detail. 图1表示的是第一实施例的喷墨头10的截面。 FIG 1 shows a cross section of a first embodiment of the ink jet head 10. 喷墨头10具有层叠块体11和压电致动器1的结构。 The inkjet head 10 has a structure laminated block body 11 and the piezoelectric actuator 1. 实际的块体11和压电致动器1向图1的左右方向伸长。 The actual block 11 and the elongated piezoelectric actuator 1 in the lateral direction in FIG. 1. 在图1中只示出了其一部分。 Shown in FIG. 1 only a part thereof. 块体11的整体形成为平板状,其通过依次层叠喷嘴板12、分流板(manifold) 13、流路板14以及压力室板15,并利用环氧树脂等热硬化性粘接剂而使各板12、 13、 14、 15相互接合来制造。 Monolithic body 11 is formed as a flat plate shape, by stacking the nozzle plate 12, manifold (manifold) 13, the flow path plate 14 and the pressure chamber plate 15, and the like using a thermosetting epoxy adhesive so that each plates 12, 13, 14, 15 are joined to manufacture. 喷嘴板12由聚酰亚胺系的合成树脂材料制成,其形成有成为喷射墨水20的喷嘴19的贯通孔。 The nozzle plate 12 is made of a synthetic material such as polyimide-based resin, which is formed to become an ink jet nozzle 19 through hole 20. 在喷嘴板12上以矩阵状的配置图案而形成有多个贯通孔19。 In the nozzle plate 12 arranged in a matrix-like pattern is formed with a plurality of through holes 19. 在图1中,标注字母a、 b…以区别喷嘴。 In Figure 1, denoted by the letters a, b ... to distinguish nozzle. 就省略了字母a、 b…来说明的对象而言,是表示对全部喷嘴共通的。 For the object is omitted letters a, b ... to be described, the nozzle is common to all. 分流板13由不锈钢(SUS430)制成,形成有成为与喷嘴19连通的喷嘴流路18的贯通孔、以及成为墨水收容室22的贯通孔。 Diverter plate 13 made of stainless steel (of SUS430), formed with a through hole 19 communicating with the nozzle of the nozzle flow passage 18, and a through-hole 22 of the ink receiving chamber. 流路板14由相同的不锈钢(SUS430)制成,形成有成为与喷嘴19连通的压力流路17的贯通孔、以及成为与墨水收容室22连通的墨水吸入路21的贯通孔。 Channel plate 14 made of the same stainless steel (of SUS430), formed in communication with the nozzle 19 to become a pressure flow path 17 of the through hole, and a through-hole communicating with the ink suction passage 2221 of the ink receiving chamber. 压力室板15由相同的不锈钢(SUS430)制成,形成有成为压力室16的贯通孔。 A pressure chamber plate 15 made of the same stainless steel (SUS430), formed with a through-hole 16 of the pressure chamber. 压力室16通过墨水吸入路21与墨水收容室22连通,通过压力流路17和喷嘴流路18而与喷嘴19连通。 Communicating the pressure chamber 21 through the ink suction passage 16 and the ink receiving chamber 22, through the pressure of the flow passage 17 and nozzle passage 18 communicates with the nozzle 19. 通过分别将形成有贯通孔的多块板12、 13、 14、 15层叠并接合而制成块体11。 Are respectively formed by the plurality of plates through holes 12, 13, 14, 15 are stacked and joined the block 11 is made. 在块体U的表面上存在着由多个贯通孔16而形成的多个凹坑16。 There are a plurality of dimples 16 are formed by a plurality of through holes 16 in the U block surface. 在块体11的内部具有多条墨水流路F。 Having a plurality of ink flow path inside the block body 11 F. 各墨水流路F连通墨水收容室22和一个凹坑16,还连通一个凹坑16和一个喷嘴19。 Each ink flow path F of the ink storage chamber 22 communicates with a cavity 16, a cavity 16 is also in communication with a nozzle 19. 从墨水收容室22经过墨水吸入路21、压力室16、压力流路17以及喷嘴流路18而与喷嘴19连通的墨水流路F,存在于每个喷嘴19中。 The ink receiving chamber 22 through the ink suction passage 21, pressure chamber 16, the pressure from the flow passage 17 and the nozzle 18 and the nozzle passage 19 communicating with an ink flow path F, 19 present in each nozzle. 在图l中,标注字母a、 b、 c…表示与喷嘴的对应关系。 In Figure l, marked letters a, b, c ... indicates a correspondence relationship of the nozzle. 就省略字母a、 b、 c…说明的对象而言,是表示对全部喷嘴共通的,没有必要标注字母。 In terms of the object letters a, b, c ... description is omitted, is common to all the nozzles, denoted by the letter is not necessary. 墨水收容室22通过图中省略的墨水流路而与存在于块体11之外的墨盒连通。 The ink receiving chamber 22 through the ink flow path not shown being in communication with the outside of the block 11 is present in the ink cartridge. 墨水流路F比较微细,各贯通孔22、 21、 16、 17、 18、 19是通过蚀刻法而形成的。 Relatively fine ink flow path F, the through holes 22, 21, 16, 17, 18, 19 are formed by etching. 各板12〜15利用易蚀刻金属而制成。 The plates 12~15 made using a metal etching easily. 对于层叠在块体11上的压电致动器1来说,其包括:与块体11 的上面粘接并盖在多个凹坑16上的可弯曲的佥属板2、在佥属板2的表面上形成的内侧电极3、在内侧电极3的表面上层叠的压电层4、以及在压电层4的表面上形式的外侧电极5。 For the block in the laminated piezoelectric actuator 11 for 1, comprising: bonding the upper block 11 and a plurality of dimples on the cap 16 Qian bendable metal plate 2, the metal plate in Qian inner electrode 2 formed on the surface 3, the outer electrode 54, and forms on the surface of the piezoelectric layer 4 on the surface of the inner electrode of the laminated piezoelectric layer 3. 外侧电极5被分割成多个独立外侧电极5a、 5b…。 The outer electrode 5 is divided into multiple separate outer electrodes 5a, 5b .... 可弯曲金属板2由不锈钢(SUS430)形成并呈矩形,通过热压粘接而结合在块体11的上面,并覆盖块体11的整个上面。 Bending a metal plate 2 may be formed of stainless steel (of SUS430) and rectangular blocks incorporated in the top 11 by thermocompression bonding, and covers the entire upper block body 11. 一块金属板2 覆盖多个凹坑16的全部。 A metal plate 2 covers all of the plurality of dimples 16. 金属板2通过与构成块体11的分流板13、 流路板14以及压力室盖板15相同的金属材料而制成,从而能够防止将金属板2热压粘接在块体11上时产生的弯曲。 The metal plate 2 by diverter plate 11 constituting the block 13, the flow path plate 14 and the pressure chamber of the same cover 15 is made of a metal material, it is possible to prevent the metal plate 2 in the thermocompression bonding is generated when the block 11 bending. 金属板2适当地薄, 随着压电层4的变形而弯曲。 Suitably the thin metal plate 2, as the deformation of the piezoelectric layer 4 is bent. 如果金属板2变形为浸入凹坑16内,则压力室16的容积减小。 If the deformation of the metal sheet 2 is immersed in the cavity 16, the volume of the pressure chamber 16 is reduced. 收容在压力室16中的墨水向着喷嘴9而被送出,墨水滴20从喷嘴9被吐出。 Contained in the pressure chamber 16 toward the ink nozzle 9 to be sent out, the ink droplet 20 is discharged from the nozzle 9. 若浸入凹坑16中的金属板2恢复成平坦形状,则压力室16的容积增大。 If the dimples 16 is immersed in the metal plate 2 is restored to a flat shape, the volume of the pressure chamber 16 is increased. 收容在墨水收容室22内的墨水向着压力室26而被吸入。 Housed in the ink storage chamber 22 toward the ink pressure chamber 26 is sucked. 在金属板2的表面上,横跨其整个表面而形成有内侧电极3。 On the surface of the metal plate 2 with the inner electrode 3 is formed across the entire surface. 内侧电极3直接与金属板2接触,并通过金属板2而与驱动电路IC (图未示出)的接地极连接。 Inner electrode 3 in direct contact with the metal plate 2, and is connected through a grounded metal plate 2 (not shown) of the drive circuit IC. 内侧电极3被固定在接地电压。 The inner electrode 3 is fixed to the ground voltage. 内侧电极3是通过在金属板2的表面上蒸镀Au而形成的。 The inner electrode 3 is formed by vapor deposition of Au on the surface of the metal plate 2 is formed. 对于Au来说,在后述退火处理阶段中,具有防止金属板2中含有的元素在压电层4中扩散的性质,兼作扩散防止层。 For Au, in the later annealing stages, preventing the elements contained in the metal plate 2 in the piezoelectric properties of the diffusion layer 4 also serves as a diffusion preventing layer. 由Au制成的内侧电极3能够减小与压电层4 的接触电阻。 Inner electrode 3 made of Au is possible to reduce the contact resistance of the piezoelectric layer 4. 压电层4由锆钛酸铅(PZT)等强介电质的压电陶瓷材料制成。 4 is made of lead zirconate titanate (PZT) ferroelectric substance isoelectric piezoelectric layers of piezoelectric ceramic material. 在内侧电极3的整个表面上以均匀的厚度层叠。 Over the entire surface of the inner electrode 3 laminated to a uniform thickness. 压电层4通过空气溶胶沉积法而制成,然后再通过退火处理以及分极处理而完成。 The piezoelectric layer 4 formed by the aerosol deposition method, and then through the polarization process and an annealing process is completed. 在压电层4的表面上具有多个独立外侧电极5。 Having a plurality of individual electrodes 5 on the outer surface of the piezoelectric layer 4. 各个独立外侧电极5a、 5b…被设置在与各个压力室16a、 16b…对应的位置上。 Each separate outer electrodes 5a, 5b ... are provided at positions corresponding to the respective pressure chambers 16a, 16b ... on. 图4表示的是独立外侧电极5a形成于向着压力室16a的结合位置上,独立外侧电极5b形成于向着压力室16b的结合位置上。 FIG 4 shows a separate outer electrode 5a is formed on the bonding position toward the pressure chamber 16a, the outer electrode 5b formed on independent binding position toward the pressure chamber 16b. 各独立外侧电极5a、5b… 分别独立地与驱动电路IC连接。 Each independently of the outer electrode 5a, 5b ... are independently connected to the driving circuit IC. 驱电路IC独立地进行控制,将驱动电压施加或者不施加在每个独立外侧电极5a、 5b…上。 Drive circuit IC are independently controlled, the driving voltage is applied or not applied to each individual outer electrodes 5a, 5b .... 对制造喷墨头10的方法进行说明。 A method for manufacturing an ink jet head 10 will be described. 首先,蚀刻喷嘴板12,形成了成为喷嘴19的贯通孔。 First, the etching of the nozzle plate 12, a through hole is formed to become the nozzle 19. 此外,蚀刻分流板13,形成了成为墨水收容室22和喷嘴路18的贯通孔。 In addition, the manifold 13 is etched to form the ink receiving chamber 22 to become the nozzle passage 18 and through holes. 然后,蚀刻流路板14,形成了成为墨水吸入路21和压力流路17的贯通孔。 Then, the flow passage plate 14 is etched to form a suction passage 21 becomes an ink flow path and a pressure in the through hole 17. 再蚀刻压力室板15,形成了成为压力室16的贯通孔。 Then etching the pressure chamber plate 15, a pressure chamber is formed to become the through hole 16. 接着,通过在层叠它们的状态下接合而形成块体11。 Next, the block 11 is formed by bonding in a laminated state thereof. 然后,如图2 (A)所示,将由不锈钢制成的可弯曲金属板2紧靠在块体11的上面并通过热压粘接进行接合,通过金属板2来封闭各压力室16。 Then, as shown in FIG 2 (A), the stainless steel will be made of bent sheet metal 2 immediately above the block body 11 and joined by thermocompression bonding, the pressure chambers 16 is closed by the metal plate 2. 其次,如图2 (B)所示,在可弯曲金属板2的表面上形成兼作扩散防止层的内侧电极3。 Next, FIG. 2 (B), the inner electrode 3 is formed also serves as the diffusion preventing layer on the surface of the metal plate 2 can be bent. 内侧电极3通过蒸镀法例如将Au作成薄膜而制成。 Inner electrode 3 made of Au, for example, a thin film made by vapor deposition. 其次,如图2 (C)所示,利用空气溶胶沉积法(AD法)形成压电层4。 Next, FIG. 2 (C) shown by the aerosol deposition method (AD method) of the piezoelectric layer 4 is formed. 图3表示的是用于形成压电层4的成膜装置30的简图。 FIG 3 is a diagram showing a film forming apparatus 30 for forming the piezoelectric layer 4 of. 成膜装置30包括:使材料粒子M在载体气体中分散而形成空气溶胶Z的空气溶胶发生器31,以及从喷嘴37喷出空气溶胶Z并使其附着(堆积)在金属板2上的成膜箱35。 Film-forming apparatus 30 comprises: the material particles M are dispersed in a carrier gas in the aerosol Z in the aerosol generator 31 is formed, and discharged from the nozzles 37 and allowed to attach the aerosol Z (stacking) to the metal plate 2 membrane cassette 35. 空气溶胶发生器31具有在内部可以收容材料粒子M的空气溶胶室32、以及安装在空气溶胶室32中用于使空气溶胶室32弯曲的加振装置33。 The aerosol generator 31 may have an internal storage of the aerosol chamber 32 the material particles M, and installed in the aerosol chamber 32 to the aerosol chamber 32 is vibrated bending apparatus 33. 空气溶胶室32通过导入管34与用于导入载体气体的储气瓶B连接。 Aerosol chamber 32 via inlet pipe 34 for introducing a carrier gas cylinder with B. 导入管34的前端位于空气溶胶室32内部的底面附近,被埋入到材料粒子M中。 Introduced near the bottom surface inside the aerosol chamber 32 is located in the distal tube 34, it is embedded in the material particles M. 作为载体气体例如可以使用氦、氩、氮等惰性气体或者空气、氧等。 May be used as the carrier gas, for example helium, argon, nitrogen, or inert gas such as air, oxygen or the like. 成膜箱35包括:用于安装块体11和与其固定的金属板2的平台36,以及设置在平台36的下方的喷射喷嘴37。 Forming box 35 comprises: a platform for mounting the block 11 and secured thereto a metal plate 36 2, and a spray nozzle 37 disposed below the platform 36. 喷射喷嘴37通过空气溶胶供给管38与空气溶胶室32连接,空气溶胶室32内的空气溶胶Z 通过空气溶胶供给管38而被供给到喷射喷嘴37。 The injection nozzle 37 and the supply pipe 38 connected to the aerosol chamber 32 via an aerosol, the aerosol Z in the aerosol chamber 32 is supplied to the spray nozzle 37 through the aerosol supply pipe 38. 此外,真空泵P通过粉体回收装置39与成膜箱35连接,能够使其内部减压。 Moreover, the powder recovery device 39 through the vacuum pump P is connected to the film formation tank 35, so that the interior can be reduced. 当利用成膜装置30形成压电层4时,将固定着金属板2的块体11 设置成金属板2朝向下方的姿势。 When forming the piezoelectric layer 4, a metal plate fixed to the block 2 is 11 provided downward the metal plate 2 using the film formation apparatus 30 posture. 接着,将材料粒子M投入到空气溶胶室32的内部。 Next, the material particles M into the interior chamber 32 of the aerosol. 作为材料粒子M,例如可以使用锆钛酸铅(PZT)等发挥压电效果的材料。 As the material particles M, eg, may be used as lead zirconate titanate (PZT) material of the piezoelectric effect played. 另外,从储气瓶B导入载体气体,在该气体压力下使材料粒子M 飞舞。 Further, the carrier gas is introduced from the cylinder B, enable flying material particles M in the gas pressure. 同时,利用加振装置33使空气溶胶室32弯曲,使材料粒子M 和载体气体混合,产生空气溶胶Z。 Meanwhile, using the vibrator means 33 of the aerosol chamber 32 is bent, the material particles M and the carrier gas mixture to produce the aerosol Z. 通过利用真空泵P使成膜箱35内减压,使得在空气溶胶室32和成膜箱35之间产生差压。 By using a vacuum pump P so that the film formation under reduced pressure tank 35, such that a differential pressure between the aerosol chamber 32 and the deposition tank 35. 利用差压使空气溶胶室32内的空气溶胶Z以高速从喷射喷嘴37喷出。 Using a differential pressure of the aerosol Z in the aerosol chamber 32 is ejected at high speed from the injection nozzle 37. 喷出的空气溶胶Z中包含的材料粒子M与金属板2冲突而堆积,从而形成压电层4。 Z ejected aerosol contained particles conflicting material M 2 and the metal plate stacked, so that the piezoelectric layer 4 is formed. 接着,为了得到必要的压电特性,对形成的压电层4进行退火处理。 Next, in order to obtain the necessary piezoelectric properties of the piezoelectric layer 4 is annealed. 这时,因为在压电层4和金属板2之间,横跨整个表面设置有兼作扩散防止层的内侧电极3,所以可以防止可弯曲的金属板2中所含有的Fe等金属元素向压电层4扩散。 In this case, since between the piezoelectric layer 4 and the metal plate 2, is provided across the entire surface of the inner electrode also serves as a diffusion preventing layer 3, it is possible to prevent Fe or the like of the metal plate 2 can be bent metal element contained in the press- diffusion layer 4. 其次,如图2 (D)所示,在各压电层4的上面形成有多个独立外侧电极5a、 5b…。 Next, FIG. 2 (D), the outer electrodes are formed with a plurality of independent 5a, 5b ... upper surface of each of the piezoelectric layer 4. 在形成多个独立外侧电极5a、 5b…时,例如在压电层4的整个区域上形成导体膜后,可以利用光刻、蚀刻法而形成给定图形,或者也可以直接通过丝网印刷在压电层4的上面形成。 After 5a, 5b ..., for example a conductive film is formed over the entire area of ​​the piezoelectric layer 4 are formed a plurality of separate outer electrodes may be formed using a photolithography, an etching process for a given pattern, or may be by screen printing directly the piezoelectric layer 4 is formed thereon. 然后,将比通常的墨水喷射动作时还要强的电场施加在独立外侧电极5a、 5b…和内侧电极3之间,在厚度方向对两电极间的压电层4 进行分极。 Then, normal ink ejection operation than Shihai stronger electric field is applied in a separate outer electrodes 5a, 5b ... and between the inner electrode 3, the piezoelectric layer between two electrodes polarization 4 in the thickness direction. 通过上述动作制成压电致动器1和喷墨头10。 The piezoelectric actuator 1 and the inkjet head 10 by the above operation is made. 接着,对以上结构的喷墨头10的作用和效果进行说明。 Next, operation and effects of the ink jet head 10 of the above structure will be described. 在进行印刷时,配合印刷图形来选择施加电压的独立外侧电极。 During printing, with the printed pattern is selected independently of the outer electrode applied voltage. 将给定的驱动信号从驱动电路IC施加在所选择的独立外侧电极上,将高电压施加在所选择的独立外侧电极上,将电场施加在压电层4的分极方向(厚度方向)上。 Given drive signal is applied to the outer electrode independently selected, a high voltage is applied to the outer electrode independently selected, applying an electric field in the polarization direction (thickness direction) of the piezoelectric layer 4 from the driving circuit IC . 这样,压电层4在与选择的独立外侧电极对应的位置上,在厚度方向膨胀,同时,在面方向收縮。 Thus, the piezoelectric layer 4 at a position corresponding to the selected independent of the outer electrode, the expansion in the thickness direction, while shrinkage in the plane direction. 因此,在与选择的独立外侧电极对应的位置上,压电层4和金属板2变形,在压力室16 —侧形成凸起(单表面波度(unimorph)变形)。 Accordingly, at a position corresponding to the outer electrode independently of the selection, the deformation of the piezoelectric layer 2 and the metal plate 4, the pressure chamber 16 - Side projection is formed (single waviness (unimorph) modification). 因此,压力室16的容积减小,墨水20的压力升高,从喷嘴19喷出墨水20。 Thus, the volume of the pressure chamber 16 decreases, the pressure of the ink 20 is increased, the ink 20 is ejected from the nozzles 19. 然后, 当外侧电极5返回到与内侧电极3相同的电位时,压电层4和金属板2 恢复到原来的形状,从而压力室16的容积也恢复到原来的容积,因此从墨水收容室22吸入墨水20。 Then, when the outer electrode 5 returns to the same potential of the inner electrode 3, the piezoelectric layer 4 and the metal plate 2 returns to its original shape, so that the volume of the pressure chamber 16 also returns to its original volume, and therefore the ink receiving chamber 22 from inhalation ink 20. 当在金属板2和压电层4之间存在扩散防止层和内侧电极两个层时,由于这二个层的物理特性分别对金属板2的弯曲特性存在影响, 所以难以使弯曲动作稳定。 When present between the metal plate 2 and the piezoelectric layer 4 and the diffusion preventing layer two inner electrode layers, since the physical properties of these two layers respectively present on the impact properties of the metal plate 2 is bent, it is difficult to stabilize the bending operation. 但是,在第一实施例的喷墨头10中,在金属板2和压电层4之间只存在兼作扩散防止层的内侧电极3的单一层。 However, in the ink jet head 10 of the first embodiment, between the metal plate 2 and the piezoelectric layer 4 exists only serves to prevent diffusion of the internal electrode layer 3 of a single layer. 因此,可以将内侧电极3 (兼作扩散防止层)的物理特性对金属板2 的弯曲特性的影响抑制在最小限度,从而能够使压电致动器1的动作稳定。 Accordingly, the inner electrode 3 (serving as diffusion preventing layer) on the physical properties of the bending properties of the metal plate 2 is minimized, thereby enabling operation of the piezoelectric actuator 1 can be stabilized. 如上所述,釆用第一实施例,将兼作扩散防止层的内侧电极3设置在金属板2和压电层4之间。 Between 2 and the piezoelectric layer 4 as described above, preclude a first embodiment, the inner electrode serving as diffusion preventing layer 3 provided on the metal plate. 采用这种结构,因为可以在一个工序过程中作成电极兼扩散防止层的层,因此制造工序简单,能够降低制造成本。 With this construction, since the diffusion layer and the electrode can be made preventing layer in a process step, the manufacturing process is simple, the manufacturing cost can be reduced. 以下,列举实验例来进一步对本发明进行说明。 Hereinafter, experimental examples to further include the present invention will be described. <实验例1>(1) 成膜工序使用不锈钢(SUS430)金属板2和平均粒子直径为0.3〜1.0//m 的PZT微粒。 <Experimental Example 1> (1) film formation step using a stainless steel (of SUS430) plate 2 and the average particle diameter of the PZT particles 0.3~1.0 // m. 在成膜装置中使用图3所示的装置。 Use of the device shown in FIG. 3 in the film forming apparatus. 利用飞溅法在金属板2的表面上形成由Pt构成的内侧电极3。 Splash method using the inner electrode 3 composed of Pt is formed on the surface of the metal plate 2. 利用表面粗糙度计来测定段差的结果为内侧电极的厚度大约为1.5;/m, 在设置有内侧电极3的金属板2上,设定喷嘴开口为0.4mmX10mm, 成膜箱内压力为200Pa,空气溶胶室内压力为30000Pa,载体气体种类为He,气体流量为4.0L/min,喷嘴37和金属板2之间的距离为10〜 20mm的条件,来进行空气溶胶的吹附,形成压电膜4。 The results measured for the thickness of the stepped inner electrode is about 1.5 with a surface roughness meter; / m, with a metal plate provided on the inner electrode 3 is 2, the nozzle opening is set to 0.4mmX10mm, deposition tank pressure is 200Pa, the aerosol chamber is 30000 Pa pressure, carrier gas type is He, gas flow rate of 4.0L / min, 10~ 20mm conditions of a distance between the nozzle 37 and the metal plate, the aerosol is blown to form the piezoelectric film 4. 利用表面粗糙度计来测定段差的结果为压电膜4的厚度大约为8//m。 Level difference measured result of the thickness of the piezoelectric film 4 is approximately 8 // m using a surface roughness meter. (2) 退火处理接着,对形成的压电膜4进行退火处理。 (2) annealing process Next, the piezoelectric film 4 is formed is annealed. 将形成压电膜4的金属板2放入马费炉(亇7卜工业株式会社制的FPIOO)内,以300。 The metal plate 2 is formed into a piezoelectric film 4 maffei oven (7 Ma Bu Kogyo Co., Ltd. FPIOO) inside, 300. C/h的速率升温至850'C。 Rate C / h the temperature was raised to 850'C. 在85(TC下保持30分钟后,通过自然冷却使炉内的温度冷却至室温,取出金属板2。2.试验在压电膜上使用粘接性树脂带来进行掩蔽,在有效面积3.6mm2以上的范围内,蒸镀Au来形成外侧电极。接着,在所施加电场为3181cV/cm 下进行分极处理。这样制造出压电致动器。利用强介电质测定器(TFANALYZER2000, AiXACT公司制), 将电压施加在压电致动器上并测定静电电容,测定残留分极(Pr)和抗电场(Ec)。<比较例1>除了不形成由Pt构成的内侧电极外,其它均与第一实施例相同而形成压电膜,并进行试验,所加电场为400kV/cm。 <比较例2>使用氧化铝板代替金属板。在氧化铝板上使用Pt膏(田中贵金属工业制),形成厚度为8^m的膏层,通过在1300'C下煅烧而形成内侧电极。在形成内侧电极的氧化铝板上,利用与第一实施例相同的方法而形成压电膜,并进行试验。所加电场为329k After maintaining at 85 (the TC 30 minutes, and the temperature of the furnace was cooled by natural cooling to room temperature, remove the metal plate 2.2. Test Using an adhesive resin on the piezoelectric film caused by masking, the effective area of ​​3.6mm2 within the above range, Au vapor deposition to form the outer electrode. then, the applied electric field to perform the polarization treatment at 3181cV / cm. Thus manufactured piezoelectric actuator. ferroelectric substance using the measuring device (TFANALYZER2000, AiXACT company Ltd.), and applying a voltage to measure the capacitance of the piezoelectric actuator, measuring the residual polarization (Pr) and the coercive electric field (Ec). <Comparative Example 1> except that the inner electrode is made of Pt is formed outside other both the same as the first embodiment, the piezoelectric film is formed, and the test, the applied electric field to 400kV / cm. <Comparative Example 2> alumina plate instead of the metal plate using a Pt paste (manufactured by Tanaka Precious metals) in an alumina plate, a thickness of the paste layer 8 ^ m, is formed by the inner electrode 1300'C calcined in an alumina plate forming an inner electrode, a piezoelectric film is formed by using the same method as the first embodiment, and tested. the applied electric field 329k V/cm。 <比较例3>使用氧化铝板代替金属板。在氧化铝板上使用Au膏(田中贵金属工业制,TR1533),形成厚度为8;/m的膏层,通过在850。C下煅烧而形成内侧电极。在形成内侧电极的氧化铝板上,利用与第一实施例相同的方法而形成压电膜,并进行试验。所加电场为286kV/cm。(结果和考察)实施例和比较例的实验结果表示在下表中。<table>table see original document page 17</column></row> <table>当在不锈钢(SUS430)板2上设置有Pt的内侧电极3的情况下(实施例1),和当使用在压电层4中不含扩散元素的氧化铝板的情况下(比较例2、 3),显示出相同的压电特性。与其相对,在不锈钢板2上不设置内侧电极3的情况下(比较例1 ),不锈钢板2中所包含的Fe元素或者Cr元素在压电层4中扩散,压电层4的抗电场上升,Pr/Ec值大幅度降低。由于这样,通过在不锈钢板2上设置内侧电极3,可以防止 V / cm <Comparative Example 3> alumina plate instead of the metal plate using Au paste (Tanaka Precious Metals Ltd., TR1533) on an alumina plate having a thickness of 8;.. / M of the paste layer, by calcination at 850.C the inner electrode is formed in the inner electrode is formed of an alumina plate using the same as the first embodiment of the method of forming the piezoelectric film, and tested. the electric field of 286kV / cm. (results and Discussion) Examples and Comparative Examples experimental results of Examples shown in the following table. <table> table see original document page 17 </ column> </ row> <table> if the setting inner electrode with Pt 3 on the plate 2 in a stainless steel (of SUS430) (embodiment Example 1), and a case where the piezoelectric layer 4 used in the alumina containing no diffuser plate element (Comparative Example 2, 3), exhibit the same piezoelectric characteristics corresponding thereto, are not provided on the inner side of the stainless steel plate 2 When the electrode 3 (Comparative Example 1), a stainless steel plate 2 Fe element contained in the piezoelectric element or Cr diffusion layer 4, the coercive electric field of the piezoelectric layer 4 is increased, Pr / Ec value is significantly reduced. Since such by providing a stainless steel plate on the inner electrode 23 can be prevented 锈钢板2中所含有的Fe元素或者Cr元素向压电膜4扩散。其次,参照图4详细说明第二实施例。以下,只说明与第一实施例不同的方面。从图4中可看出,在二实施例中,将内侧电极3分割成多个独立内侧电极3a、 3b…来取代共通化内侧电极3。各独立内侧电极3被设置在与各压力室16对应的位置上。图4表示的是在向着压力室i6a的位置上形成独立内侧电极3a,在向着压力室16b的位置上形成独立电极3b。 Fe element contained in the stainless steel plate 2 or Cr element diffused into the piezoelectric film 4. Next, a second embodiment in detail with reference to FIG. Hereinafter, the first embodiment described only various aspects may be seen from FIG. 4 that, in the second embodiment, the inner electrode 3 is divided into a plurality of individual inner electrodes 3a, 3b ... instead of the common electrode 3 are each independently of the inner electrode 3 is disposed inside at a position corresponding to the pressure chambers 16 on. FIG. 4 shows 3a, 3b are formed individual electrodes in the pressure chamber 16b toward the position of the inner electrode is formed at a position independent of the pressure chamber toward the i6a. 各独立内侧电极3a、 3b…分别独立地与驱动电路IC连接。 Each independently inner electrode 3a, 3b ... are independently connected to the driving circuit IC. 驱动电路IC独立地进行控制将驱动电压施加或者不施加在每个独立内侧电极3a、 3b…上。 Driver circuit IC controlled independently of the driving voltage is applied or not applied 3a, 3b ... inner electrode on each individual. 在第二实施例中,压电层4也被分割成多个独立压电层4a、 4b…。 In the second embodiment, the piezoelectric layer 4 is divided into a plurality of separate piezoelectric layers 4a, 4b .... 各独立压电层4被设置在与各压力室16对应的位置上。 Each independently of the piezoelectric layer 4 is disposed at a position corresponding to the pressure chambers 16 on. 图4表示独立压电层4a形成于向着压力室16a的位置上,独立压电层4b形成于向着压力室16b的位置上。 4 shows a separate piezoelectric layer 4a is formed on the pressure chamber 16a toward the upper position, independent of the piezoelectric layer 4b is formed on a position toward the pressure chamber 16b. 各独立压电层4a、 4b…层叠在各独立内侧电极3a、 3b…的表面上。 Each independently of the piezoelectric layers 4a, 4b ... are stacked on, 3b ... of the inner surface of each individual electrode 3a. 当从与金属板2正交的方向看时,各独立压电层4a、 4b…分别包含在各独立内侧电极3a、 3b…中。 When viewed from a direction perpendicular to the metal plate 2, each independently of the piezoelectric layers 4a, 4b ... are contained in each separate inner electrode 3a, 3b ... of. 更准确地说,各独立压电层4a、 4b…包含在从各个独立内侧电极3a、 3b…向内侧偏离20Wm (等于第二实施例的独立压电层4a、 4b的厚度)的形状中。 More specifically, each individual piezoelectric layers 4a, 4b ... contained in the shape of the individual deviates from the inner electrode 3a, 3b ... 20 Wm inward (equal to separate the piezoelectric layer of the second embodiment, the thickness 4a 4b) of. 当各独立压电4a、 4b…包含在从各个独立内侧电极3a、 3b…向内侧偏离至少等于独立压电层4a、 4b…的厚度的形状中时,不论是否在图4的水平方向扩散,都可以防止金属板2的元素向独立压电层4a、 4b…中扩散。 When each individual piezoelectric 4a, 4b ... contained in the shape of the individual inwardly offset from the inner electrode 3a, 3b ... of the piezoelectric layer is at least equal independent 4a, 4b ... in thickness, whether or diffusion in the horizontal direction in FIG. 4, possible to prevent diffusion of the elemental metal plate 2 to separate the piezoelectric layers 4a, 4b ... in. 通过实验可以看出,优选独立压电层4a、 4b…的轮廓比独立内侧电极3a、 3b…的轮廓更向内侧偏离20〜500^m。 Experiments can be seen, preferably independently piezoelectric layer 4a, 4b ... contour 3a, 3b ... of 20~500 ^ m contour deviates more inward than the inner electrode independently. 如果偏离等于独立压电层4a、 4b…的厚度20i/m以上,则可以防止金属板2的元素向独立压电层4a、 4b…中扩散;如果小于500^m,则可以在独立压电层4a、 4b…上确保必要的面积。 If the deviation is equal to the thickness of the piezoelectric layer independently 4a, 4b ... a 20i / m or more, it is possible to prevent the diffusion of the elemental metal plate 2 to separate the piezoelectric layers 4a, 4b ...; if less than 500 ^ m, may be in a separate piezoelectric layers 4a, 4b to ensure the necessary area on .... 在第二实验例中,外侧电极5也被分割成多个独立外侧电极5a、 5b…。 In the second experimental example, the outer electrode 5 is also divided into a plurality of separate outer electrodes 5a, 5b .... 在第二实施例中,驱动IC独立地进行控制而将驱动电压施加或者不施加在每个独立内侧电极3a、 3b…上。 In the second embodiment, the driver IC can be controlled independently and applies a driving voltage is applied or not on each of the individual inner electrodes 3a, 3b .... 另外,驱IC也独立地进行控制而将驱动电压施加或者不施加在每个独立外侧电极5a、 5b…上。 Further, the drive IC can be controlled independently of the driving voltage is applied or not applied outside of each of the individual electrodes 5a, 5b ... the. 与此不同,也可以取代其而将多个独立外侧电极5a、 5b…维持在共同电位。 Unlike this, which may be substituted and a plurality of separate outer electrodes 5a, 5b ... is maintained at a common potential. 在这种情况下,也可以作为一个共同的外侧电极5来取代被分割成多个的独立外侧电极5a、 5b…。 In this case, it can be used as a common outer electrode 5 instead divided into a plurality of separate outer electrodes 5a, 5b .... 在第二实施例中,将压电层4分割成多个独立压电层4a、 4b…, 独立压电层4a、 4b的间隔形成空间。 In the second embodiment, the piezoelectric layer 4 is divided into a plurality of individual piezoelectric layers 4a, 4b ..., separate spacer piezoelectric layers 4a, 4b forming space. 也可以使用一个共同的压电层4 来取代它。 You can also use a common piezoelectric layer 4 to replace it. 在这种情况下,元素从不锈钢板2向位于独立内侧电极3a、 3b…的间隔的上方的压电层4中扩散,压电性能降低。 In this case, the element 2 located in a separate inner electrode 3a, 4 in the diffusion intervals over the piezoelectric layer 3B ... to the piezoelectric performance decreases from the stainless steel plate. 但因为在位于独立内侧电极3a、 3b…的间隔上方的压电层中,不需要压电效果,因此没有特别的问题。 However, because 3a, 3B ... piezoelectric layer above the spacer located in a separate inner electrode, the piezoelectric effect is not required, so no particular problem. 对于本发明的内侧电极来说,只要具有导电性并能够防止金属板中所含有的元素扩散即可,例如在金属板含有的元素为铁、铝、铬、 钴、锰、钼或者钨的情况下,优选使用包含选自Au、 Pt、 Ti、 Ag-Pd 合金、Ag-Pt合金、Rh、 In、 La、 Nd、 Nb、 Sb、 Th、 W、 Ca、 Sr、 Mg 和它们的氧化物中的一或者二种以上。 For the case where the inner electrode of the present invention, as long as having conductivity and to prevent the diffusion of elements can be contained in the metal plate, for example, as elemental metal plate containing iron, aluminum, chromium, cobalt, manganese, molybdenum or tungsten lower, preferably selected from the group containing Au, Pt, Ti, Ag-Pd alloy, Ag-Pt alloy, Rh, in, La, Nd, Nb, Sb, Th, W, Ca, Sr, Mg, and oxides thereof one or two kinds or more. 例如,可以是上述元素中的任何一种所形成的金属薄膜,或者也可以是上述元素的氧化物薄膜。 For example, a metal thin film may be any one of these elements being formed, or may be oxide thin film of the above elements. 作为氧化物薄膜优选使用La卜xSrxMn03(LSMO)、 (La,—xSrx)(Ga卜yMgy)03 —6(LSGM)、铟-锡氧化物(ITO)、 SrRu03(SRO)、 La2—xSrxCo04(LSCO) 等。 La oxide film is preferably used as the BU xSrxMn03 (LSMO), (La, -xSrx) (Ga BU yMgy) 03 -6 (LSGM), indium - tin oxide (ITO), SrRu03 (SRO), La2-xSrxCo04 (LSCO ) Wait. 内侧电极的厚度优选为0.1;/m〜5^m,通过使厚度在0.1i/m以上而可以很好地遮断元素从金属板向压电层的扩散,另外,通过使厚度在5/zm以下而能够阻止对金属板弯曲的影响,达到不影响压电致动器的动作的程度。 Thickness of the inner electrode is preferably 0.1; / m~5 ^ m, by making the thickness of 0.1i / m or more and can be well blocked diffusion of elements from the metal plate to the piezoelectric layer, in addition, by making the thickness of 5 / zm the following is possible to prevent the influence on the bending of a metal plate, to the extent not affect the piezoelectric actuator operation. 对于本发明的压电致动器来说,由于实现微细的墨水流路,所以当层叠在通过层叠多块金属板而制造的块体上时特别有用。 The piezoelectric actuator of the present invention, since to achieve a fine ink flow path, so that when the body is particularly useful in the stacked block by laminating a plurality of metal plates manufactured. 通过将压电层设置在由与块体热膨胀系数接近的同种金属构成的金属板上,而能够使压电致动器和块体牢固接合。 By the piezoelectric layer provided on a metal plate made of the same metal block heat expansion coefficient close to the body, and the piezoelectric actuator and secure engagement block. 内侧电极优选相对于多个压力室16共同使用,但如图4所示,也可以被分割为多个独立内侧电极。 Preferably the inner electrode with respect to the common use of a plurality of pressure chambers 16, but as shown in Figure 4, may be divided into a plurality of separate inner electrode. 各独立内侧电极可防止构成金属板的元素向层叠在其上方的独立压电层扩散。 Each individual element of the metal constituting the inner electrode plate is prevented from diffusing in a separate layer above it to the piezoelectric laminate. 当考虑横方向的扩散时, 优选独立内侧电极从独立压电层向外侧伸出压电层的厚度以上。 When considering the transverse direction of diffusion, or more preferably independently inner electrode thickness of the piezoelectric layer protrudes from the piezoelectric layer to the outside independently. 若独立内侧电极从独立压电层向外侧伸出压电层的厚度以上,则即使元素在横方向扩散,也能够防止构成金属板的元素向独立压电层扩散。 If independent from the inner electrode projects outwardly more independent piezoelectric layer thickness of the piezoelectric layer, even if the diffusion of elements in the transverse direction, it is possible to prevent diffusion of elements constituting the metal plate to separate the piezoelectric layer. 在使用共同的压电层和共同的内侧电极的情况下,为了防止位于共同压电层的轮廓附近的压电层的压电性能降低,最好共同内侧电极从共同压电层向外侧伸出压电层的厚度以上。 In the case of using a common piezoelectric layer and a common inner electrode, to prevent deterioration of piezoelectric performance of the piezoelectric layer located on a common contour in the vicinity of the piezoelectric layer, a common inner electrode preferably extends outwardly from a common piezoelectric layer the thickness of the piezoelectric layer above. 即使元素在横方向扩散, 也可防止构成金属板的元素向压电层中扩散。 Even if an element diffusion in the transverse direction, the metal plate can be prevented from diffusing elements constituting the piezoelectric layer. 本发明的技术范围不受上述实施例所限制,例如,可包含在下述的本发明的技术范围中。 Technical scope of the present invention is not limited by the above embodiments, for example, it may be included in the technical scope of the invention described below. 另外,本发明的技术范围可普及至均等的范围。 Further, the technical scope of the present invention may be equal to the popularity of the range. (1) 在上述实施方式中,虽然是利用蒸镀法形成内侧电极3,但是内侧电极的形成方法并不局限于上述实施方式。 (1) In the above embodiment, although the inner electrode is formed by an evaporation method 3, the method of forming the inner electrode is not limited to the above embodiments. 例如,可以使用飞溅、电镀、涂装或者印刷导电性膏后再煅烧的方法等形成。 For example, use may be formed splashes, electroplating, painting or printing a conductive paste and then calcining the like. (2) 在上述实施方式中,使用不锈钢(SUS430)形成构成块体11的各板13、 14、 15以及金属板2,但块体和金属板的材料不局限于上述实施方式,也可以使用SUS304、 42A合金等来形成。 (2) In the above-described embodiment, stainless steel (of SUS430) formed in each plate 13 comprising blocks 11, 14, 15 and the metal plate 2, but the bulk material and the metal plate is not limited to the above embodiments, may also be used SUS304, 42A to form the alloy.

Claims (17)

  1. 1. 一种压电致动器,其特征在于,包括: 可弯曲的金属板; 在所述金属板的表面上形成的内侧电极; 层叠在所述内侧电极的表面上当施加电压时产生变形的压电层;以及在所述压电层的表面上形成的外侧电极,其中, 所述压电层是由对含有压电材料的微粒群的堆积层进行退火处理后的层所形成, 所述内侧电极是由防止构成所述金属板的元素向所述压电层扩散的材料所形成, 所述内侧电极包含有多个独立内侧电极, 所述压电层具有多个独立压电层, 各个独立压电层层叠在各个独立内侧电极的表面上, 当从与所述金属板正交的方向看时,各个独立压电层包含在从各个独立内侧电极向内侧偏离等于独立压电层厚度之距离的区域之中。 1. A piezoelectric actuator, comprising, comprising: a flexible metal plate; inner electrode is formed on the surface of the metal plate; stacked on the surface of the inner electrode is deformed when a voltage is applied fooled a piezoelectric layer; and an outer electrode formed on a surface of the piezoelectric layer, wherein the piezoelectric layer is formed by the deposited layer after layer of particle groups containing piezoelectric material is annealed, the the inner electrode is formed of a material preventing elements constituting the diffusion of the metal plate to the piezoelectric layer, the inner electrode comprises a plurality of separate inner electrode, a piezoelectric layer having a plurality of individual piezoelectric layers, each of independent piezoelectric layer laminated on the surface of the individual inner electrode, when viewed from a direction perpendicular to the metal plate, the individual piezoelectric layers included in the inner electrode deviates from the individual independent piezoelectric layer thickness equal to the inner side of area from among.
  2. 2. 如权利要求1所述的压电致动器,其特征在于: 所述金属板含有选自铁、铝、铬、钴、锰、钼和钨中的一种或者二种以上的元素;所述内侧电极含有选自Au、 Pt、 Ti、 Ag-Pd合金、Ag-Pt合金、Rh、 In、 La、 Nd、 Nb、 Sb、 Th、 W、 Ca、 Sr、 Mg以及它们的氧化物中的一种或者二种以上。 The piezoelectric actuator as claimed in claim 1, wherein: said metal sheet comprises one selected from iron, aluminum, chromium, cobalt, manganese, molybdenum, and tungsten, or two or more kinds of elements; the inner electrode comprises selected from Au, Pt, Ti, Ag-Pd alloy, Ag-Pt alloy, Rh, in, La, Nd, Nb, Sb, Th, W, Ca, Sr, Mg, and oxides thereof one or two or more kinds.
  3. 3. 如权利要求2所述的压电致动器,其特征为在于: 所述内侧电极含有选自La卜xSrxMn03(LSMO)、 (La,—xSrx)(Gai —yMgy)03 — s (LSGM)、铟-锡氧化物(ITO)、 SrRu03(SRO)和La2 — xSrxCo04(LSCO)中的一种或者二种以上的氧化物。 2, 3. The piezoelectric actuator as claimed in claim, characterized in that: said inner electrode comprises elements selected from La Bu xSrxMn03 (LSMO), (La, -xSrx) (Gai -yMgy) 03 - s (LSGM ), indium - tin oxide (ITO), SrRu03 (SRO) and La2 - xSrxCo04 (LSCO) of one or more kinds of oxides.
  4. 4. 如权利要求1所述的压电致动器,其特征在于: 所述内侧电极的厚度为大于等于0.1 wm且小于等于5 wm。 The piezoelectric actuator according to claim 1 actuator, wherein: the thickness of the inner electrode is not less than 0.1 wm or less 5 wm.
  5. 5. —种喷墨头,其特征在于,包括:块体,其内部具有墨水流路,由分别形成有贯通孔的多块板经层叠并接合而形成,并通过在最表面的板上形成多个孔而在表面上形成有多个凹坑,所述多块板的至少一部分由金属形成;可弯曲的金属板,其与所述块体上面接合并盖在所述凹坑上,由与形成所述块体的金属相同的金属形成;形成在所述金属板的表面上的内侧电极;层叠在所述内侧电极的表面上当施加电压时产生变形的压电层;以及形成在所述压电层的表面上的外侧电极,其中, 所述压电层是由对含有压电材料的微粒群的堆积层进行退火处理后的层所形成,所述内侧电极是由防止所述金属板所含有的元素向所述压电层扩散的材料所形成,所述内侧电极具有多个独立内侧电极,所述压电层具有多个独立压电层,各个独立压电层层叠在各个独立内侧电极 5. - kind of the ink jet head, characterized by comprising: a block body, having an ink flow path therein, a plurality of plates are formed with a through hole is formed by laminating and joining, by forming the outermost surface of the plate a plurality of holes are formed on a surface of a plurality of dimples, the plurality of plates of at least a portion formed of a metal; flexible metal plate, which engages the block above the pit lid from formed form the same metal as the block body; forming an electrode on the inner surface of the metal plate; laminated piezoelectric layer is deformed when the surface of the inner electrode taken applied voltage; and forming said outer electrodes on the surface of the piezoelectric layer, wherein the piezoelectric layer is formed by the deposited layer after layer of particle groups containing piezoelectric material is annealed, the inner electrode is formed to prevent the metal plate material contained in the element diffused into the piezoelectric layer is formed, the inner electrode having a plurality of separate inner electrode, a piezoelectric layer having a plurality of piezoelectric layers independently, each individual piezoelectric layer laminated inside the individual electrode 的表面上,当从与所述金属板正交的方向看时,各个独立压电层包含在各个独立内侧电极之中。 On the surface, when viewed from a direction perpendicular to the metal plate, the individual piezoelectric layers included in the individual inner electrodes.
  6. 6. 如权利要求5所述的喷墨头,其特征在于: 所述外侧电极具有多个独立外侧电极,各个独立外侧电极形成在向着在所述块体表面上形成的各个凹坑的位置上。 6. The ink jet head according to claim 5, characterized in that: said outer electrode having a plurality of separate outer electrodes, each outer electrode independently of each pit is formed at a position toward the block formed on the surface .
  7. 7. 如权利要求5所述的喷墨头,其特征在于:各个独立内侧电极形成在向着在所述块体表面上形成的各个凹坑的位置上。 7. The ink jet head according to claim 5, wherein: the individual electrodes are formed at positions inside the respective recesses toward the surface of the block formed on.
  8. 8. 如权利要求7所述的喷墨头,其特征在于: 当从与所述金属板正交的方向看时,各个独立压电层包含在从各个独立内侧电极向内侧偏离等于独立压电层厚度之距离的区域之中。 The inkjet head according to claim 7, wherein: when viewed from a direction perpendicular to the metal plate, the individual piezoelectric layers included in the inner electrode deviates from the individual independent piezoelectric equal to the inside the layer thickness of the region in a distance.
  9. 9. 一种层叠有可弯曲金属板、内侧电极、压电层以及外侧电极的压电致动器的制造方法,其特征在于,包括:在所述金属板的表面上形成所述内侧电极的工序;在所述内侧电极的表面上形成当施加电压时产生变形的所述压电层的工序;以及在所述压电层的表面上形成所述外侧电极的工序,其中, 所述压电层形成工序具有将含有压电材料的微粒群堆积在所述内侧电极的表面上的工序、以及对该堆积层进行退火处理的工序,在所述内侧电极形成工序中,选择防止构成所述金属板的元素向所述压电层扩散的材料来形成所述内侧电极,在所述内侧电极形成工序中,在所述金属板的表面上形成有多个独立内侧电极,在所述压电层形成工序中,形成多个独立压电层, 各个独立压电层层叠在各个独立内侧电极的表面上, 当从与所述金属板正交的方向看时,各个 A laminated metal sheet may be bent, inner electrode, a piezoelectric layer, and a method for manufacturing the outer electrode of the piezoelectric actuator, characterized by comprising: forming electrodes on the inner surface of the metal plate step; formed on a surface of the inner electrode layer of the piezoelectric deformation step is generated when voltage is applied; and forming the electrode on the outer surface of the piezoelectric layer, wherein the piezoelectric layer forming step having a particle group containing a piezoelectric material deposited on the surface of the inner electrode, and a step of the step of annealing the deposited layer, in the step of forming the inner electrode, to prevent the metal constituting the selected diffusion of elements of the material plate to the piezoelectric layer forming the inner electrode, the inner electrode forming step, a plurality of separate inner electrode is formed on a surface of the metal plate, the piezoelectric layer forming step, a plurality of piezoelectric layers independently, each individual piezoelectric layer laminated on the surface of the individual inner electrode, when viewed from a direction perpendicular to the metal plate, each 立压电层包含在各个独立内侧电极之中。 Li piezoelectric layer included in the individual inner electrodes.
  10. 10. 如权利要求9所述的压电致动器的制造方法,其特征在于-所述金属板含有选自铁、铝、铬、钴、锰、钼和钨中的一种或者二种以上的元素;所述内侧电极含有选自Au、 Pt、 Ti、 Ag-Pd合金、Ag-Pt合金、Rh、 In、 La、 Nd、 Nb、 Sb、 Th、 W、 Ca、 Sr、 Mg以及它们的氧化物中的一种或者二种以上。 10. The piezoelectric method according to claim 9 for manufacturing an actuator, characterized in that - the metal sheet comprising one selected from iron, aluminum, chromium, cobalt, manganese, molybdenum, and tungsten, or of two or more element; said inner electrode comprises selected from Au, Pt, Ti, Ag-Pd alloy, Ag-Pt alloy, Rh, in, La, Nd, Nb, Sb, Th, W, Ca, Sr, Mg and their or an oxide of two or more.
  11. 11. 如权利要求10所述的压电致动器的制造方法,其特征在于: 所述内侧电极含有选自Lai—xSrxMn03(LSMO)、 (Lai-xSrx)(Gai —yMgy)03 — s (LSGM)、铟-锡氧化物(ITO)、 SrRu03(SRO)和La2 — xSrxCo04(LSCO)中的一种或者二种以上的氧化物。 11. The piezoelectric method according to claim 10 for manufacturing an actuator, wherein: said inner electrode comprises selected Lai-xSrxMn03 (LSMO), (Lai-xSrx) (Gai -yMgy) 03 - s ( LSGM), indium - tin oxide (ITO), SrRu03 (SRO) and of La2 - one kind xSrxCo04 (LSCO) or two or more kinds of oxides. 200510083165.0权利要求书第4/5页 Page 4/5 200,510,083,165.0 claims
  12. 12. 如权利要求9所述的压电致动器的制造方法,其特征在于:所述内侧电极的厚度为大于等于0.1 //m且小于等于5 //m。 12. The piezoelectric method according to claim 9 for manufacturing an actuator, wherein: the thickness of the inner electrode is not less than 0.1 // m or less 5 // m.
  13. 13. 如权利要求9所述的压电致动器的制造方法,其特征在于: 当从与所述金属板正交的方向看时,各个独立压电层包含在从各个独立内侧电极向内侧偏离等于独立压电层厚度之距离的区域之中。 13. The piezoelectric method according to claim 9 for manufacturing an actuator, wherein: when viewed from a direction perpendicular to the metal plate, the individual piezoelectric layers included in the respective independent from the inner electrode to the inside departing from a distance equal to the thickness of the piezoelectric layer independently in a region.
  14. 14. 一种层叠有在内部形成有墨水流路的块体和压电致动器的喷墨头的制造方法,其中,所述压电致动器层叠有可弯曲的金属板、内侧电极、压电层以及外侧电极,所述制造方法的特征在于,包括:准备至少一部分是金属制的多块板,在多块板的各个上形成贯通孔的工序;层叠并接合多块板而形成所述块体的工序;在所述块体的上面层叠并接合由与形成所述块体的金属相同的金属所形成的可弯曲的所述金属板的工序;在所述金属板的表面上形成所述内侧电极的工序; 在所述内侧电极的表面上形成当施加电压时产生变形的所述压电层的工序;以及在所述压电层的表面上形成所述外侧电极的工序,其中, 所述压电层的形成工序具有将含有压电材料的微粒群堆积在所述内侧电极的表面上的工序、以及对该堆积层进行退火处理的工序,在所述内侧电极形成 14. A method for manufacturing a laminated ink jet head has an ink flow path block and the piezoelectric actuator is formed inside, wherein the piezoelectric actuator is laminated flexible metal plate, the inner electrode, the piezoelectric layer and the outer electrode, characterized in that said manufacturing method, comprising: preparing at least a portion of the plurality of plates are made of metal, a step of forming a through hole on each of the plurality of plates; a plurality of plates are stacked and bonded to form the the step of said block; stacked and joined by a curved step of forming the metal plate of the same metal of the metal body is formed in the upper block of the block; formed on the surface of the metal plate the step of the inner electrode; formed on a surface of the inner electrode layer of the piezoelectric deformation step is generated when voltage is applied; and forming the outer surface of the electrode on the piezoelectric layer, wherein the step of forming the piezoelectric layer has a particle group containing a piezoelectric material deposited on the surface of the inner electrode, and a step of the step of annealing the deposited layer, an electrode is formed on the inner 序中,选择防止构成所述金属板的元素向所述压电层扩散的材料。 Sequence, select the elements constituting the material to prevent diffusion of the metal plate to the piezoelectric layer.
  15. 15.如权利要求得14所述的喷墨头的制造方法,其特征在于-所述内侧电极具有覆盖在所述块体的表面上形成的多个凹坑的大小,所述外側电极具有多个独立外侧电极,所述独立外侧电极形成在向着在所述块体表面上形成的各个凹坑的位置上。 A method as claimed in manufacturing an ink jet head obtained according to claim 14, characterized in that - said inner electrode having a plurality of pits formed in the cover surface of the block size on the outer electrode having a plurality separate outer electrode, the outer electrode independently of each pit is formed at a position toward the block formed on the surface.
  16. 16. 如权利要求14所述的喷墨头的制造方法,其特征在于: 所述内侧电极具有多个独立内侧电极,各个独立内侧电极形成在向着在所述块体表面上形成的各个凹坑的位置上,所述压电层具有多个独立压电层,各个独立压电层层叠在各个独立内侧电极的表面上, 当从与所述金属板正交的方向看时,各个独立压电层包含在各个独立内侧电极之中。 16. The method of manufacturing an ink jet head according to claim 14, wherein: said inner electrode having a plurality of individual inner electrodes, each independently of each pit formed in the inner electrode towards the block formed on the surface position, the piezoelectric layer having a plurality of piezoelectric layers independently, each individual piezoelectric layer laminated on the surface of the individual inner electrode, when viewed from a direction perpendicular to the metal plate, the individual piezoelectric the individual layers included in the inner electrode.
  17. 17. 如权利要求16所述的喷墨头的制造方法,其特征在于: 当从与所述金属板正交的方向看时,各个独立压电层包含在从各个独立内侧电极向内侧偏离等于独立压电层厚度之距离的区域之中。 17. The method of manufacturing an ink jet head according to claim 16, wherein: when viewed from a direction perpendicular to the metal plate, the individual piezoelectric layers included in the inner electrode deviates from the individual is equal to the inside region independent from the thickness of the piezoelectric layer into.
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