CN100401113C - Anti-glare film and image display device - Google Patents

Anti-glare film and image display device Download PDF

Info

Publication number
CN100401113C
CN100401113C CNB2004100871507A CN200410087150A CN100401113C CN 100401113 C CN100401113 C CN 100401113C CN B2004100871507 A CNB2004100871507 A CN B2004100871507A CN 200410087150 A CN200410087150 A CN 200410087150A CN 100401113 C CN100401113 C CN 100401113C
Authority
CN
China
Prior art keywords
film
area
concaveconvex shape
photomask
antiglare film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100871507A
Other languages
Chinese (zh)
Other versions
CN1616992A (en
Inventor
桑原真人
波岡诚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003375300A external-priority patent/JP2005140890A/en
Priority claimed from JP2004023108A external-priority patent/JP4100350B2/en
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Publication of CN1616992A publication Critical patent/CN1616992A/en
Application granted granted Critical
Publication of CN100401113C publication Critical patent/CN100401113C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2059—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam
    • G03F7/2063—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam for the production of exposure masks or reticles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

The present invention relates to an anti-glare film for achieving reduction in irregularities of a screen, without sacrificing glare-shielding property, and a manufacturing method thereof, and to an image display device superior in visibility, using it. In the anti-glare film having minute irregularities on its surface, a region higher than an average height of the irregularities is a projection, a region lower than the average height of the irregularities is a recess, and an individual projection projected area or recess projected area is found. The frequency of the projections or the recesses are found by prescribed are units, and further, the frequency of apparent areas are calculated in the prescribed area units according to (area * frequency). When the frequency of the apparent area of the obtained projection or recess is expressed by a histogram, the anti-glare film is provided in that a peak value appears at a position of 300 um<2> or smaller, and the half-value width of the peak is 60 um<2>or smaller. The anti-glare film is arranged at the visible side of an image display means, such as a liquid crystal panel and the image display device is constituted. The manufacturing method of the antiglare film comprises a lithographic process for forming the recesses and projections on photoresist film formed on a base material by photolithography process; an electrocasting metallic mold production process for producing a metallic mold, by electrocasting metal on the recess and projection surface of the obtained photoresist film so as to transfer recess and projection shape to the metal, and then peeling a metallic plate to which the recess and projection shape is transferred from the photoresist film; and a recess and projection film production process for transferring the recess and projection shape on the surface of the metallic plate to the surface of the film, by using the metallic plate to which the recess and projection shape is transferred as the metallic mold.

Description

Antiglare film and image display device
Technical field
The invention relates to the invention of the antiglare film that can be applied to the optical applications such as light polarizing film in the image display device, particularly when being applied to the high image display device of fineness, be difficult to produce phenomenons such as bright spot, can guarantee the invention of the antiglare film of high visibility.The present invention is also relevant with the image display device that uses this antiglare film.
In addition, the invention relates to the invention of the antiglare film manufacture method aspect of the optical applications such as light polarizing film that are applied in the image display device.Explaining, is the invention about the suitable manufacture method that obtains the specific effective antiglare film in reflectivity curve aspect.
Background technology
With the image display device headed by the liquid crystal indicator, when on its picture display face, injecting extraneous light, can influence its visibility significantly.At purposes aspect such as the video camera of paying attention to aspect the purposes such as the TV of picture quality, PC, use under the high light out of doors, digital camera and aspect the purposes such as reflection-type liquid-crystal display device such as mobile phone of utilizing reflected light to show, prevent that on display device these processing of mirroring light from being common example.About preventing to mirror the processing of light, the no reflection events of utilizing optical multilayer produce to disturb is handled, and comes the scatter incident light line by forming concaveconvex shape from the teeth outwards, and then waters down the so-called non-glare treated that mirrors light and make a world of difference.The former no reflection events is handled the multilayer film that needs to form uniform blooming, therefore exists the high problem of cost.Relative therewith, because the latter's non-glare treated can be by comparatively cheap price realization, and be used to purposes such as large-scale PC and display device.
The film of anti-dazzle property for example, can disperse the uv-hardening resin of filling agent by coating on transparent base, and after drying, irradiation ultraviolet radiation makes hardening of resin, can form method such as concaveconvex shape on the surface of filling agent at random and makes.And, form trickle concaveconvex shape at the film surface that is used for image display device so far, thereby the motion that realizes anti-dazzle property has many.For example: the spy in Japanese Patent Laid Open Publication opens in the 2003-4903 communique, has proposed a kind ofly to have antiglare layer on transparent supporter, and the surface has the antiglare film of concaveconvex shape, and the area of section at each depression position of this antiglare film is at 1,000 μ m 2Below,, have the antiglare film of above-mentioned concaveconvex shape here, be that to utilize on transparent supporter coating to disperse mean particle diameter be the uv-hardening resin of the particle of 0.2～10 μ m, irradiation ultraviolet radiation makes the method for its sclerosis and produced again.
On the other hand, the spy who opens No. 1 communique of flat 6-1685 and Japanese Patent Laid Open Publication the spy of Japanese Patent Laid Open Publication opens in the flat 7-124969 communique, disclosed a side at the uv-hardening resin that makes transparent base with uv-hardening resin layer, with under the state that the film of existing concaveconvex shape is combined closely in advance, utilize this uv-hardening resin layer of ultraviolet ray irradiation, and concaveconvex shape is replicated in method on the uv-hardening resin.But, as the film that has concaveconvex shape in advance, spy in Japanese Patent Laid Open Publication opens in the flat 6-16851 communique, just disclosed the method that on base film, is coated with the resin combination of forming by filling agent and bonding agent, spy in Japanese Patent Laid Open Publication opens in the flat 7-124969 communique, just disclosed the stretch method of inner film of having filled filling agent and the method for sandblast on film afterwards.
In addition, spy in Japanese Patent Laid Open Publication opens in the 2002-365410 communique, disclosed a kind of antiglare film, this is a kind of optical thin film that has formed trickle concaveconvex shape on the surface, on this film surface, inject light in-10 ° direction, the specific relation that the reflected light curve when only observation is from the reflected light on surface satisfies with respect to normal.
Spy in Japanese Patent Laid Open Publication opens in the 2003-177207 communique, disclosed a kind of antireflective film, this be a kind of be the film of prerequisite with the anti-reflection layer that multilayer is set on rough surface, having the average height (Rc) that has formed the contour curve key element is the male and fomale(M﹠F) of 0.1～30 μ m, per 0.01 mm of this male and fomale(M﹠F) 2The number at protrusion position be 1～1,000 resin bed, in this male and fomale(M﹠F), be that 0～5 ° parallel surface accounts for 15～100% with respect to the pitch angle of antireflective film face, 15～100% of this parallel surface, the position forms by protruding.In this patent documentation 3, in order to form this concaveconvex shape, used bottom negative matrix film, but do not disclosed the concrete method for making of this bottom negative matrix film.
Summary of the invention
The problem of solution is wished in invention
Well-known non-glare treated film before utilizing particularly makes filling agent disperse the antiglare film that obtains because during coating, random arrangement filling agent, so the Density Distribution of filling agent, stretching have produced the Density Distribution that has formed concaveconvex shape from the teeth outwards.And, in commercial production, be easy to generate the aggegation of filling agent, produce inhomogeneous in view of the above sometimes.
When the antiglare film in this past is used with high meticulous liquid crystal panel combination,, can produce the demonstration bright spot thereby be difficult to obtain sufficient visibility though reason is indefinite.In order to reduce the Density Distribution of concaveconvex shape, though can reduce the proportional quantity of filling agent, can not obtain sufficient anti-dazzle property this moment, if the proportional quantity of filling agent is too much on the other hand, though can obtain anti-dazzle property, can produce the problem that the diffusion ratio improves, contrast reduces.
On the other hand, be used for the antiglare film of image display device, owing in a pixel, have a plurality of concaveconvex shapes preferable, so the size of the pixel of the image display device that the size of each concaveconvex shape need be used less than hope.And, for the reflection of the light of the concaveconvex shape generation of using such size the most suitableization, need design concavo-convex shape and configuration, but, at this moment, with respect to reflected light, need to consider the geometrical optics key element of each concaveconvex shape generation, and because wave optics key elements such as the interference of the little light that causes of size of concaveconvex shape and diffraction.For example: in the antiglare film that is applied to image display devices such as liquid crystal indicator, plasma display, random arrangement when the concaveconvex shape of number μ m identical size to tens of μ m, can produce because the big or small identical interference that causes and the diffraction of concaveconvex shape, the reflected light that the concaveconvex shape of result on the surface produces is shown in red, shows very strong problems such as reflected light and be created under certain specific reflection angle.
Inventors of the present invention are willing to (claim of priority: special hope 2003-8744 number) 2004-4308 number the spy of Japanese Patent Laid Open Publication, following scheme has been proposed, promptly, through utilizing photo-engraving process on the photoresist layer that forms on the base material, to form the operation of concaveconvex shape, behind electroforming metal on the male and fomale(M﹠F) of the photoresist layer that obtains, from the photoresist layer this metal-stripping, concaveconvex shape on the photoresist layer is replicated in operation on the metal, the sheet metal of subsidiary concaveconvex shape is used as mould, on film surface, duplicate the operation of concaveconvex shape, to produce the method for the antiglare film that has concaveconvex shape on the surface.
The present invention finishes with reference to these actual conditions, and its purpose is not to sacrifice anti-dazzle property, and provides the antiglare film that realizes reducing bright spot on the picture.Another object of the present invention is to use this antiglare film, and providing does not have bright spot, the image display device that visibility is outstanding on the picture.
In addition, the concaveconvex shape that provides a kind of control to form from the teeth outwards is provided another object of the present invention, to produce the method for the outstanding antiglare film of optical characteristics.
Inventors of the present invention are based on this purpose, through studying with keen determination, the Density Distribution that found that the relief region on the film that has formed concaveconvex shape can produce very big influence for the bright spot performance, by it is suitably controlled, just can obtain high performance antiglare film, in addition, the step of going forward side by side has been carried out various researchs, thereby has finished the present invention.And, according to the method that the spy of above-mentioned Japanese Patent Laid Open Publication is willing to 2004-4308 number proposition, carried out research further, found that by the photomask in the operation of research and utilization photo-engraving process formation concaveconvex shape, can obtain high performance antiglare film.
Solve the means of this problem
Promptly, according to the present invention, a kind of antiglare film can be provided, wherein, formed trickle concaveconvex shape in its surface, the zone that is higher than the average height of concaveconvex shape is an elevated regions, the zone that is lower than the average height of concaveconvex shape is a sunk area, try to achieve the projected area of each elevated regions or the projected area of sunk area, utilize the area groove of regulation to try to achieve the frequency of this elevated regions or sunk area,, utilize the area groove of afore mentioned rules to calculate the frequency of apparent area further according to area * frequency, when representing the frequency of area of the elevated regions that obtains or sunk area with histogram, peak value appears at 300 μ m 2Following position, and half spectrum amplitude of its peak value is at 60 μ m 2Below.
Above-mentioned peak value appears at 150 μ m 2Better during following position, and half spectrum amplitude of above-mentioned peak value reaches greater than 10 μ m 2The time preferable.
The reflectivity to from the direction of 20 ° of normal reflection angle deviatings of these antiglare film is being favourable below 0.001%.In addition, to reach below 50% be favourable to 45 ° of reflection visibilitys measuring as the light comb of 1.0mm of the width that uses dark position and bright position.And it is favourable that the aggregate value of the transmission visibility that the width that uses dark position and bright position is measured as 0.125mm, 0.5mm, 1.0mm and four kinds of light combs of 2.0mm reaches more than 200%.In these antiglare film, the diffusion ratio is being favourable below 15%.
And, according to the present invention, can provide the image display device that uses antiglare film, this image display device possesses above-mentioned any antiglare film and image display means, and this antiglare film is configured in looking of image display means and recognizes side.
According to the present invention, provide a kind of surface to have the manufacture method of the antiglare film of concaveconvex shape, it comprises the photoetch operation of utilizing photo-engraving process to form concaveconvex shape on the photoresist film that forms on the base material, electroforming metal on the male and fomale(M﹠F) of the photoresist film that obtains, after duplicating this concaveconvex shape on the metal, peel off the electroforming mould production process that the sheet metal that has duplicated concaveconvex shape is made mould from photoresist film, this sheet metal that has duplicated concaveconvex shape is used as mould, its surperficial concaveconvex shape is copied to the concavo-convex film production process of film surface.Above-mentioned photoetch operation is exposed on photoresist film by having the photomask of two kinds of patterns that vary in size at least, the manufacturing antiglare film of developing then.
In the method, the pattern that on photomask, has formed, the diameter that makes maximum pattern be minimum pattern diameter be favourable below 2 times more than 1.1 times.And, on photomask, formed pattern, making the ratio of the shared respectively total area of at least 2 kinds of patterns that vary in size is favourable in 0.7～1.3 scope.
Above-mentioned exposure through photomask is to utilize having on the position of certain intervals with the photoresist film surface, and having disposed photomask is preferable to carry out proximity lithography.And, the interval between photomask and the photoresist film surface being set at L (μ m), the mean diameter of the pattern of photomask being set at D (μ m), this exposes at L/D 2Value be to be favourable under the condition below 2.8 more than 1.3.
In order to keep the symmetry of translation, photomask can be formed by a plurality of unit elements that are made of the regulation area are arranged.And, the sheet metal that has duplicated concaveconvex shape is used as mould, when this concaveconvex shape of copying surface of film, can make the surface of this metal plate coils at cylinder its male and fomale(M﹠F) as the outside, be used for concavo-convex film production process.
The effect of invention
Antiglare film of the present invention is a kind of film of suitably having controlled surperficial concaveconvex shape, when it being applied to the high image display device of image display device, particularly fineness such as liquid crystal indicator, can prevent effectively that bright spot etc. from hindering the generation of the phenomenon of visibility.So, can show the image that antiglare effect is outstanding, visibility is high.Particularly, make its effect more remarkable by controlling the optical property of film simultaneously.
According to the present invention, can productivity well and repeatability produce the outstanding antiglare film of optical property well.
Description of drawings
Fig. 1 is the oblique view of the surface configuration summary of expression antiglare film.
Fig. 2 is the surface about certain part of antiglare film, the three-dimensional contour map of the altitude curveization of each point.
Fig. 3 is the surface about certain part of antiglare film, with the white zone (projection) of representing to be higher than average height, represents to be lower than the two-dimentional contour map in the zone (depression) of average height with black.
Fig. 4 is that transverse axis represents that (unit is μ m to area the histogram of the frequency of each projection that observes on the antiglare film surface and sunk area demonstration with respect to the curveization of area 2), the longitudinal axis is represented the projection of this area or the frequency (unit is a number) that sunk area shows.
Fig. 5 is the data according to Fig. 4, utilizes area * frequency (μ m of unit 2) example of histogram of the expression longitudinal axis.
Fig. 6 is computing method graphic of half spectrum amplitude of the peak value in the histogram of apparent area of expression projection or sunk area, is 0～200 μ m that enlarges the transverse axis of displayed map 5 2Between histogram.
Fig. 7 is one of manufacture method graphic of representing antiglare film related to the present invention according to each operation with longitudinal sectional drawing.
Fig. 8 is the profile schema diagram that enlarges the part of displayed map 7 (B).
Fig. 9 is an explanation normal reflection rate and the oblique view of the relation of the reflectivity of the angle θ towards the film lopsidedness from the normal reflection direction.
Figure 10 be expression for the normal reflection rate of incident light as R (0), the reflectivity of the angle θ from the normal reflection direction during as R (θ) towards the film lopsidedness, R (θ) as maximum, is accompanied by the increase of θ to R (0), the mode chart of simple situation about reducing.
Figure 11 be used to illustrate the normal reflection angle with to oblique view from the reflectivity of the direction of 20 ° of this angle deviatings.
Figure 12 is expression about the scope of about 640 μ m of vertical about 480 μ m that utilize the antiglare film that example 1 obtains * laterally, and the ground conversion that has levels shows the expanded view of elevation information, the right side laterally expression be the expression progressive series of greys highly.
Figure 13 is about the antiglare film of utilizing example 1 to obtain, and the frequency that each projection that observes on the surface or sunk area occur is with respect to the histogram of the curveization of area.
Figure 14 is the data according to Figure 13, and (unit is μ m to usage frequency * area 2) expression longitudinal axis histogram.
The explanation of symbol:
1 ... the principal plane of antiglare film
2 ... the projecting plane of film
3 ... the projection of film surface (zone that is higher than average height)
4 ... the depression of film surface (being lower than the zone of average height)
5 ... the principal normal of film
6 ... the incident ray direction
7 ... comprise the principal normal of film and the plane of incident ray direction
8 ... the normal reflection direction
9 ... direction from 20 ° of normal reflection angle deviatings
ψ ... incident angle (=normal reflection angle)
11 ... photoresist film forms uses substrate
12 ... photoresist film
13 ... formed the photoresist film of concaveconvex shape
14 ... photomask
15 ... by the exposing light beam behind the photomask
17 ... the metal of electroforming
18 ... the embossing mold
20 ... antiglare film
21 ... transparent base film
22 ... uv-hardening resin or its hardening thing
25 ... the normal direction of antiglare film
26 ... comprise the normal of antiglare film and the plane of incident ray direction
30 ... the incident ray direction
32 ... the normal reflection direction
34 ... direction from the normal reflection direction towards an antiglare film side tilt angle theta
ψ ... incident angle (=normal reflection angle)
θ ... angle of inclination from the normal reflection direction towards the antiglare film side
Embodiment
Below, suitably with reference to accompanying drawing, the present invention is described in further detail.In the accompanying drawings, Fig. 1 is the oblique view of expression antiglare film surface overview.Fig. 2 is the surface about certain part of antiglare film, has drawn the three-dimensional contour map of each point altitude curve.Fig. 3 is the surface about certain part of antiglare film, with the white zone (projection) of representing to be higher than average height, represents to be lower than the two-dimentional contour map in the zone (depression) of average height with black.Fig. 4 is the histogram of the frequency of each projection that observes on the antiglare film surface and sunk area demonstration with respect to the curveization of area.Fig. 5 is the data according to Fig. 4, utilizes area * frequency to represent the example of the histogram of the longitudinal axis.Fig. 6 is the synoptic diagram of half spectrum amplitude computing method of the peak value in the histogram of expression projection or sunk area apparent area, and it is for enlarging 0～200 μ m that has shown Fig. 5 transverse axis 2Between histogram.Fig. 7 is the synoptic diagram of an example of representing the manufacture method of antiglare film related to the present invention according to each operation with longitudinal sectional drawing.Fig. 8 is the profile schema diagram that enlarges the part of displayed map 7 (B).Fig. 9 is an explanation normal reflection rate and the oblique view of the relation of the reflectivity of the angle θ towards the film lopsidedness from the normal reflection direction.Figure 10 be expression for the normal reflection rate of incident light as R (0), the reflectivity of the angle θ from the normal reflection direction during as R (θ) towards the film lopsidedness, R (θ) as maximum, is accompanied by the increase of θ to R (0), the mode chart of the simple situation about reducing of R (θ).Figure 11 be used to illustrate the normal reflection angle with for oblique view from the reflectivity of the direction of 20 ° of this angle deviatings.Figure 12 is expression about the scope of about 640 μ m of vertical about 480 μ m that utilize the antiglare film that example 1 described later obtains * laterally, and the ground conversion that has levels shows the expanded view of elevation information, the right side laterally expression be the expression progressive series of greys highly.Figure 13 is an antiglare film of utilizing example 1 to obtain about being both, and the frequency that each projection that observes on the surface or sunk area occur is with respect to the histogram of the curveization of area.Figure 14 is the data according to Figure 13, the histogram of usage frequency * cartographic represenation of area longitudinal axis.
With reference to Fig. 1, antiglare film of the present invention is described.This antiglare film 20 is for having formed the film of trickle concaveconvex shape 3,4 in its surface, and itself was with well-known anti-dazzle property film was as broad as long in the past.In Fig. 1, the face of the average height of film (being called principal plane) represents that with symbol 1 its projecting plane represents that with symbol 2 rectangular coordinate in the pellicular front is represented with (x, y).And part (projection) the 3 usefulness solid lines that are higher than level represent that the part (depression) 4 that is lower than average height dots.
In the present invention, in the zone that is higher than concavo-convex average height as elevated regions, the zone that is lower than concavo-convex average height as sunk area, calculate the area of each elevated regions or sunk area, utilize the area groove of stipulating to calculate the frequency of this elevated regions or sunk area, and further according to area * frequency, utilize above-mentioned regulation area groove to calculate the frequency of apparent area, when representing the frequency of the elevated regions that obtains or sunk area apparent area with histogram, peak value can appear at 300 μ m 2Following position, and half spectrum amplitude of this peak value can reach 60 μ m 2Below.
In this histogram, the area value that peak value occurs is big more, and relief region is just coarse more.And have 300 μ m 2The elevated regions or the sunk area of area, be equivalent to the circle of the about 10 μ m of radius, when so large-area elevated regions or sunk area have a plurality of the existence, that is, the peak value in above-mentioned histogram appears at greater than 300 μ m 2The position time, the phenomenon of bright spot can increase, and can reduce visibility.Peak value during the frequency of representing elevated regions or sunk area apparent area with histogram is set at and appears at 200 μ m 2Below so appear at 150 μ m 2Below, particularly appear at 100 μ m 2Following position is better.And half spectrum amplitude of the peak value that shows when representing the frequency of elevated regions or sunk area apparent area with histogram is equivalent to the projection of unit area or the distribution of sunk area apparent area.
Antiglare film in the past particularly makes filling agent disperse and in the antiglare film that obtains, the concaveconvex shape of the finely disseminated part of filling agent and filling agent fail to disperse well and aggegation concaveconvex shape partly as can be seen.Under this state, if merely calculate concavo-convex number, in general, the quantity of the concaveconvex shape that the area in the finely disseminated part of filling agent is little is many, and on the other hand, the quantity of the concaveconvex shape that the area that the filling agent aggegation causes is big is few.And, with observations such as optical microscope or contact pin type film thickness gauges, can observe the big concaveconvex shape of area that the filling agent aggegation causes significantly.About the optical property of bright spot etc., can think that the effect of the concaveconvex shape that area like this is big is very big, therefore need a kind of evaluation method of considering the concaveconvex shape area.So, in the present invention, considered the area of concaveconvex shape, according to the distribution of projection or depression apparent area, stipulated the surface structure of antiglare film.
Below, about antiglare film of the present invention, the computing method and the meaning thereof of distribution of the apparent area of elevated regions that it is surperficial or sunk area is described.At first, in the arbitrary region of film surface, measure the height of the each point that constitutes this film surface, calculate the average height of measuring regional integration.Then, be the zone definitions that is higher than mean value elevated regions, sub-average zone definitions is a sunk area.
In Fig. 2 and Fig. 3, represented the height profile of the relief region of antiglare film.Fig. 2 utilizes certain horizontal decomposition degree groove the three-dimensional contour map of the altitude curveization of film surface each point.Fig. 3 is the height of average each point of trying to achieve shown in Figure 2, to be higher than the set of the point of mean value with white, be the elevated regions curveization described in the present invention, with the set of black with sub-average point, i.e. the two-dimentional contour map of the sunk area curveization described in the present invention.For example, in Fig. 3,, calculate each area about the elevated regions that white is represented.Since here can think projection be recessed on separately the short transverse almost symmetry, can calculate its area separately about either party of projection or depression.No matter be elevated regions or sunk area, it is better to meet the necessary condition of stipulating among the present invention.And, not the surface area that calculates projection or sunk area formation, but calculate its projected area.And, in Fig. 2 and Fig. 3, for clear and easy to understand, several relief region have only been represented, in fact will be in containing a plurality of concavo-convex zones the height of gauging surface, calculating the average height of this regional integration, and calculate the area of a plurality of projectioies or sunk area respectively.
Fig. 4 utilizes the area groove of regulation the example of the chart (histogram) of the number of degrees of the individual number curveization of each elevated regions that calculates according to above method or sunk area distribution.Owing to can further calculating apparent area, calculate the interval of area and amassing of frequency from the frequency value that obtains, with frequency as apparent area with respect to the area groove of stipulating.The example of the chart (histogram) that the number of degrees of the frequency curveization of Fig. 5 apparent area that to be the area groove that utilizes afore mentioned rules calculate the chart according to Fig. 4 distribute.
As can be seen in the histogram of number (frequency) curveization of or depression protruding as shown in Figure 4 with respect to the area handle, projection that area is little or sunk area have a plurality of, projection that area is big or sunk area are then seldom, but, aspect optical property, the projection that area is big or the effect of sunk area are very big.So in the present invention, area multiply by frequency, calculates apparent area, and, according to histogram, calculate the distribution of apparent area with its curveization.In this manual, have the half spectrum amplitude (full widthat halfmaximum: be also referred to as half spectrum double amplitude) of the peak value in the histogram of the apparent area that so obtains, be called the distribution of apparent area.At length introduce the computing method of the distribution of this apparent area below.
The height that has formed the film surface of concaveconvex shape can calculate according to the 3D shape of the surfacenesses that instrument detected such as the roughness instrument that uses the non-contact 3-D surface configuration, atomic force microscope (Atomic Force Microscope:AFM), confocal laser point microscope.The horizontal decomposition degree that detector requires at least will be below 5 μ m, and is preferable below 2 μ m, and vertical resolution at least will be below 0.1 μ m, and is preferable below 0.01 μ m.As the roughness instrument of the non-contact 3-D surface configuration that is fit to this detection, the product that U.S. ZygoCorporation is arranged that can enumerate, " the New View 5000 " series that can buy from the ZAIKO (strain) of Japan.Preferable though area of detection is bigger, at least will be at 100 μ m * more than the 100 μ m, and at 400 μ m * preferable more than the 400 μ m.
Specifically, by using above-mentioned detector, can calculate lattice-like and the data each x, y coordinate respective heights that determine in the horizontal decomposition degree of detector shown in Figure 2.Calculate the mean value of all altitude informations, the zone that is higher than mean value is considered as elevated regions, and sub-average zone is considered as sunk area.The concaveconvex shape that obtains like this is transformed to the image of binarization, utilizes image processing software to calculate the area of elevated regions or sunk area.As image processing software, as long as can calculate the quantity of the pictorial element of each elevated regions or sunk area, promptly there is not special qualification, but, in Fig. 4 and example and example described later shown in Figure 5,, used NIH Image as image processing software, calculating meets the quantity of the pictorial element of each projection of image of binarization or sunk area part, to calculate area.NIH Image is the image processing software of a kind of NIH by the U.S. (National Institute of Health) exploitation, with the title of this exploitation mechanism, called after NIH Image.
Then, these areas between maximum area that obtains by Flame Image Process and the minimum area are divided into the degree of 10～100 five equilibriums, calculate and meet between adjacent each area of cutting apart, the projection of area and the number of depression are to obtain frequency.If cutting apart of area is meticulous, frequency can disperse, and is difficult to calculate distribution situation; On the contrary, if cutting apart of area is excessive, owing to the frequency that can only see roughly, and more undesirable.In example and example described later that Fig. 4 and Fig. 5 represent, area is divided into 10 μ m 2At interval.That is, in Fig. 4 and Fig. 5, according to 10 μ m 2The area of interval performance transverse axis, 0 μ m is represented in initial being divided into " 0 " 2Below, the next one is cut apart expression 0 μ m 2To 10 μ m 2Between area, thereafter, for example be expressed as " 50 " part cut apart the expression 40 μ m 2To 50 μ m 2Between area.In following Fig. 6, Figure 10 and Figure 11 of expression histogram, also be identical.
And, in order to obtain the distribution of apparent area, calculate the mean value of each adjacent area and amassing of the number (frequency) that belongs to the protruding of this interval or cave in, as the frequency of apparent area.For example, if according to 10 μ m 2The interval divided area time, be positioned at 20 μ m 2To 30 μ m 2Between (intermediate value is 25 μ m 2) projection or number of depressions be 5, then the frequency of apparent area is 25 μ m 2* 5=125 μ m 2With respect to area value,, make the histogram of apparent area the frequency curveization of the apparent area that obtains.Utilize half spectrum amplitude of the peak value of this histogram, defined the distribution of the apparent area of concaveconvex shape.Be meant the maximal value that obtains " area * frequency " in the histogram as noted above with respect to the peak value in the histogram of " area * frequency " of area, that is,, point out present 20 μ m with the example of Fig. 5 2With 30 μ m 2Between the value cut apart of area.
The computing method of half spectrum amplitude of the peak value in the histogram here, are described according to Fig. 6.Fig. 6 is to be 0～200 μ m about transverse axis 2Between, the figure of the histogram of Fig. 5 expansion.And, in the sensing range of integral body, the longitudinal axis (area * frequency) is shown peaked some P as the expression peak value.From then on put P and draw vertical line A to transverse axis, the intersection point of the straight line of area * frequency=0 of itself and transverse axis as reference point B, by binary some C of peak value line segment PB being drawn the straight line (ray) with transverse axis, minimum value that itself and histogram are intersected and the area between the maximal value are at interval as half spectrum amplitude WH.And, as shown in Figure 6, from the some P histogram that begins to descend of expression peak value when before the half value of peaking, rising once more, be histogram reach the half value of peak value following after, rise once more in the time of will surpassing the half value of peak value, histogram will not surpass the half value of peak value once more, determine to surpass some U, the V of half value at last, utilize the width between the UV, determine half spectrum amplitude WH.When determining half spectrum amplitude WH, the minimum value that the area that the minimum value that ray and histogram are intersected is represented as its cylindricality is cut apart, the maximal value that the area that the crossing maximal value of ray and histogram is represented as its cylindricality is cut apart.That is, in the example that Fig. 6 represents, because at area little a side ray and expression 10 μ m 2With 20 μ m 2Between the cylindricality of area intersect at last, the value of putting U as 10 μ m 2, and, at area big a side ray and expression 140 μ m 2With 150 μ m 2Between the cylindricality of area intersect at last, the value of putting V as 150 μ m 2So,, half spectrum amplitude WH in this example is 140 μ m 2(=150-10).
In the histogram with respect to the area of above-mentioned " area * frequency " that obtains, if half spectrum amplitude of peak value is 0, the area of projection or sunk area is concentrated in 1 point.On the other hand, big if this half spectrum amplitude becomes, represent the distribution very wide (greatly) of the apparent area of each relief region.This half spectrum amplitude is more little, the distribution of the apparent area of each relief region can narrow down (little).
When the distribution of apparent area was wide, projection or sunk area that projection that apparent area is big or sunk area and apparent area are little mixed, though can not determine its reason, can learn that bright spot can become big.And, during the narrowly distributing of apparent area, can learn that the area of projection or sunk area is more concentrated, when using with the meticulous display combinations of height, bright spot can reduce.If the distribution of apparent area, promptly half spectrum amplitude of the peak value in the histogram of the frequency of representing above-mentioned apparent area surpasses 100 μ m 2, bright spot can become greatly, and visibility can obviously reduce.On the other hand, if the distribution of apparent area (half spectrum amplitude of peak value) at 60 μ m 2Below, with almost not observing the phenomenon of bright spot, can obtain good visibility.So particularly in order to improve the visibility in the high display device of fineness, the distribution of this apparent area (half spectrum amplitude of peak value) is set in 100 μ m 2Below be crucial, this half spectrum amplitude reaches 60 μ m 2Below preferable.Half spectrum amplitude of the peak value in the histogram of the frequency of representing apparent area is at 50 μ m 2Below better.But if relief region is regularly arranged, half spectrum amplitude is 0 o'clock, and interference stripes can become obviously, if half spectrum amplitude reaches 10 μ m 2Below, this tendency can appear.So the distribution that the apparent area of projection or sunk area has to a certain degree is preferable, half above-mentioned spectrum amplitude reaches 10 μ m 2More than preferable.
The film that has specific surface configuration among the present invention can utilize arbitrary method to make, for example can utilize following method to make: to have on the embossing mold of suitable surface configuration, under heated state the forming method of pressing thermoplasticity transparent resin film, also can combine closely the coated face of the uv-hardening resin of the transparent base that has been coated with uv-hardening resin and above-mentioned embossing mold, irradiation ultraviolet radiation makes the method for its sclerosis under this state.
As the manufacture method of embossing mold, the method that can enumerate has: for example, utilizing the concaveconvex shape of photo-engraving process formation and the method for superincumbent metal plating (plating) combination is exactly a kind of good method.Specifically, utilization forms photoresist film on base material, implement meticulous exposure in the above, then by developing, on above-mentioned photoresist film, form concaveconvex shape, after the enterprising row metal electroforming of the photoresist film that has formed concaveconvex shape, this metal is stripped down from photoresist film, be made into the sheet metal that has duplicated concaveconvex shape, i.e. the embossing mold.By using this embossing mold, be pressed together on method on this embossing mold at following thermoplasticity transparent resin of heated state, perhaps the coated face of the uv-hardening resin of the transparent base that has been coated with uv-hardening resin and above-mentioned embossing mold are combined closely, irradiation ultraviolet radiation makes the method for uv-hardening resin sclerosis etc. under this state, the antiglare film of surface configuration of regulation that can produce moulding.
So, make the embossing mold by the combination of photo-engraving process and electroforming, and use this mold to make the example of the method for antiglare film according to Fig. 7 explanation.At first, shown in Fig. 7 (A), on the surface of the base material 11 that forms photoresist film, make photoresist film 12.Here the base material 11 of Shi Yonging can use to have an even surface, the material suitably bonding with photoresist film, for example: inorganic transparent base material or metal bases such as copper, stainless steel such as glass, quartz, aluminium oxide.And, the photoresist of coating can be the material with photonasty and suitable exploring degree on base material 11, can use exposed portion to have solubility for developer solution, positive photoresist that is removed after the development or exposed portion sclerosis, be insoluble to developer solution, remove negative photoresist any of unexposed portion by development.For example: linear phenol-aldehyde resin (nonpolaric resin), acrylic resin (acryl resin), styrene and acrylic acid multipolymer (styrene and acryl acidcopolymer), Polyvinylchloride phenol (polyvinyl phenol), poly-(Alpha-Methyl phenol ethylene) alkali soluble resins such as (poly (α-methylvinyl phenol)), with the photosensitive compounds such as compound that contain quinone two nitrine (quinonediazido) base, be dissolved in the positive photoresist constituent that the organic solvent allotment forms, or containing the alkali soluble resin, the light oxygen generating agent, the photoresist of crosslinking chemical etc. is dissolved in the negative photoresist constituent of allocating in the organic solvent.But, in the exposure process of back, utilize proximity lithography to produce diffraction of light in the edge, the development by the back forms and contains circular depression position, is that to utilize positive photoresist be preferable.With reference to Fig. 7, the example of the example of following expression when using positive photoresist.
The degree of depth of the concaveconvex shape that the thickness of the photoresist film 12 that forms on base material 11 can form on the antiglare film surface according to hope and shape etc. are carried out suitable adjustment.The thickness and the purpose deep equality that form, perhaps thick slightly is preferable.As the scope of concrete thickness, more than the purpose degree of depth of concaveconvex shape, the purpose degree of depth of concaveconvex shape is being preferable below+5 μ m.
In order on base material 11, to form photoresist film 12, for example, can adopt well-known suitable methods such as spin rubbing method, infusion process, cylinder rubbing method.Film after the formation,, will implement prebake (preheat) usually in order to remove the solvent that contains in the photoresist.Prebake for example can use heating plate, baking oven etc. to carry out under the temperature about 60～120 ℃ 0.5～10 minute.The sensitivity that the temperature and time of prebake can require according to the kind and the photoresist of photoresist is suitably adjusted.
For the photoresist film 12 that on base material 11, forms like this, shown in Fig. 7 (B), implement meticulous exposure then.In Fig. 7 (B), represented the example that the photomask 14 through two levels carries out meticulous exposure.The photomask of two levels is a kind of for exposure light source, on the substrate of making by transparent glass or quartz etc., formed photomask with transmission position and shading position, the transmissivity of the light of exposure light source at the transmission position is 100% or approaches 100%, and the light from exposure light source can be covered in the shading position, and the transmissivity at the shading position is 0% or near 0%.That specifically can enumerate has: for exposure light source, make the metal mask of light shielding part position with metals such as chromium or by making sensitization such as emulsion make the emulsion at shading position (emulsion) mask etc. on transparency carrier.
Shown in Fig. 7 (B), dispose the photomask 14 of this two level, make the surface of itself and photoresist film 12 have some at interval, carry out proximity lithography.Proximity lithography is to instigate photomask 14 near photoresist film 12, but does not make its tight contact, but certain at interval distance is exposed again.Carry out proximity lithography by the photomask 14 that uses this two levels, edge at the mask pattern of photomask 14 can produce diffraction of light, and making the image blur of photomask 14, the light beam 15 by the transmission position enlarges through the back sides, shading position, produces continuous light amount and distributes.Then, light quantity distribution according to proximity lithography, photoresist film 12 meeting sensitization, by development thereafter, light quantity according to irradiation can change the residual-film thickness degree of photoresist, can form the concaveconvex shape of the distance (being called " exposing clearance " or " closely gap ") that meets between mask pattern, exposure, photomask and the photoresist film etc. on the surface of the photoresist film after the development 12.At this moment, the bore of photomask can have only a kind, but several, and for example the bore combination of 2 kinds or 3 kinds also is effective in order to the making photomask.
The example of in Fig. 7 (B), having represented to use the photomask 14 of two levels to carry out meticulous exposure by proximity lithography, other, utilize through the method that multi-level photomask carries out the method for meticulous exposure, the spatial optical modulation element that changes through the light intensity that can make exposure light source according to the place carries out meticulous exposure, also can obtain identical effect.
Multi-level photomask is different with the photomask of above-mentioned two levels, is a kind of according to the place, and transmissivity can multistage or continually varying photomask.As this multi-level photomask; for example operable have: the photomask plotting unit that utilizes the contour exploring degree of electron ray plotting unit; wavelength according to exposure light; sufficient undersized shading position and transmission position are set; and utilize the shading light part and the area ratio at transmission position to show the photomask of level; utilize electron beam making; after the high-energy light beam sensitization such as laser beam; the material that transmissivity can change is dispersed in the high-octane light beam of irradiation in the mask space on the transparent medium thing; its intensity is changed according to the place; make transmissivity continually varying photomask; and on base material, form as emulsion class material; has photonasty; amount according to irradiates light; the material that optical concentration can change; utilize to change light quantity and makes this material sensitization, and the photomask that optical concentration is changed according to the place.
On the other hand, the spatial optical modulation element that can the light intensity of exposure light source be changed according to the place is that a kind of light of this element of transmission or light intensity of this element reflects of can making produces the element of the variation in space.For example: the configuration that constitutes by liquid crystal cell or digital miniature mirror element (DigitalMicromirror Device:DMD) etc. the optical modulation element of many pixels.When liquid crystal cell is used as spatial optical modulation element, owing to can constitute each pixel of the liquid crystal cell of many pixels according to each, to set transmissivity, so by make from exposure light source, penetrate have space this liquid crystal cell of transmittance of intensity distributions equably, can obtain meeting the intensity distributions of exposure light of the transmissivity of liquid crystal cell pixel, and produce the spatial intensity distribution that can be radiated at the exposure light on the photoresist film.In addition, when DMD is used as spatial optical modulation element, can suitably utilize the angle of inclination of miniature mirror, make the direction reflection of light to photoresist film, and the suitable variation of the reflection of the direction beyond photoresist film, make to change, and can in each pixel, change the reflectivity of unit interval reality by in each pixel, making to the time of the direction reflection of photoresist film.Promptly, by using the DMD reflection to come from the light that the spatial uniform strength of having of exposure light source distributes, the intensity distributions of the exposure light of miniature mirror angle of inclination time can be obtained meeting, and the spatial intensity distributions that is radiated at exposure light on the photoresist film can be produced.
The light source that is used to expose can use the light source of photoresist film 12 sensitization, uses suitable light source according to the kind of photoresist.For example, high-pressure mercury-vapor lamp or extra-high-pressure mercury vapour lamp are used as light source, can use near ultraviolet ray such as the g line that therefrom sends, h line, i line or use the laser that in the wavelength of the bright line that approaches these mercury vapor lamps, has the wavelength of posting a letter.During exposure,, the optics of camera lens class, the mechanical part of mask adjustment (alignment) class can be set between exposure light source and photoresist film as long as in the scope of not damaging effect of the present invention.
On the photoresist film 12 of having implemented meticulous exposure like this, carry out development treatment then, shown in Fig. 7 (C), obtained having formed the photoresist film 13 of concaveconvex shape.Development treatment is, for example, the photoresist film 12 after the exposure that forms on the substrate 11 contact, when using positive photoresist, by removing the position of exposing, the processing of formation concaveconvex shape on photoresist film 12 with the developer solution that meets its kind.About developer solution, can from well-known material, suitably select to use according to the kind of photoresist.After the development treatment, re-use water usually and washed, cure (post bake) after implementing again.By after cure, can promote the intensity of remaining photoresist film, and the associativity of lifting and substrate 11.Curing after this also to have makes unexposed residual film lose photosensitive effect.After cure, for example can use baking oven or heating plate etc., carrying out about 0.5～30 minute under the temperature about 100～200 ℃.
Then, shown in Fig. 7 (D), on the photoresist film 13 that has formed concaveconvex shape, electroforming metal 17 is to be replicated in the lip-deep concaveconvex shape of photoresist film 13 on the metal 17 of electroforming.The metal that is used for electroforming, the metal that can use field of electroplating all the time to use, for example: metals such as nickel, nickel-phosphorus alloy, iron-nickel alloy, chromium, evanohm.The thickness of the metal 17 that the process electroforming forms on photoresist film 13 has no particular limits, and is from the permanance aspect, preferable in 0.05～3 mm left and right sides.When on photoresist film 13, directly carrying out electroforming, before electroforming, need surface conduction processing to photoresist film 13, the processing of this conductionization, for example can adopt and form thickness by evaporation or splash (splitting) is the following metal film of 1 μ m, perhaps adopts the method for plated by electroless plating.When not wishing directly on photoresist film 13, to carry out electroforming, for example, not the concave shape on the photoresist film 13 is replicated on the metal 17 and forms the shape of projection, but wish with photoresist film 13 on concave shape be replicated on the metal 17 same when forming concave shape, for example can adopt the concaveconvex shape that forms on the photoresist film 13 is replicated on the resin, then for the male and fomale(M﹠F) of resin according to above-mentioned method conduction processing, and then the method for carrying out electroforming.
Then, sheet metal 17 after concaveconvex shape on the photoresist film 13 that has formed concaveconvex shape duplicated, strip down from photoresist film 13, after perhaps employing is replicated in the concaveconvex shape on the photoresist film 13 on the resin, and on resin, during the method for electroforming, from resin, sheet metal is stripped down, shown in Fig. 7 (E), promptly become the sheet metal that the surface has formed concaveconvex shape, promptly the embossing mold 18.
The mould 18 of the embossing mold that use obtains, the concaveconvex shape that its surface is formed is replicated on the film, just obtains antiglare film.Reach in the example of (G) expression at Fig. 7 (F), coating uv-hardening resin 22 on transparent base film 21, these uv-hardening resin 22 sides and embossing mold 18 are combined closely, under this state from transparent base film 21 1 side irradiation ultraviolet radiations, make uv-hardening resin 22 sclerosis, with the antiglare film 20 of 22 layers of the ultraviolet hardening resins that obtain on transparent base film 21, having concaveconvex shape.Be not limited only to this example, as mentioned above, utilize under heated state, the transparent resin film of thermoplasticity is pressed together on the method for moulding on the above-mentioned embossing mold 18, can obtain the antiglare film that the surface has formed concaveconvex shape equally.
As (F) of Fig. 7 and (G), coating uv-hardening resin 22 when these uv-hardening resin 22 1 sides are duplicated concaveconvex shape, as uv-hardening resin, can use the kind arbitrarily of selling on the market on transparent base film 21.For example: polyfunctional acrylic esters (pentaerythritoltetraacrylate) such as poly-methylolation third triacrylate (polymethylolpropanetriacrylate), five erythrite tetraacrylate are used separately respectively, perhaps the two or more mixing of these materials are used, and can be the potpourri of " IRUGAKYUA 907 ", " IRUGAKYUA184 " (above be the manufacturing of CHIBASPECIALTYCHEMICALS company), " RUSHIRIN TPO " Photoepolymerizationinitiater initiaters such as (BASF AG's manufacturings) as uv-hardening resin.
On the other hand, during the method for employing concaveconvex shape of mould 18 on the thermoplasticity transparent resin, as the thermoplasticity transparent resin film, so long as it is really transparent, can use material arbitrarily, for example: poly-methyl methacrylate (polymethylmethacrylate), polycarbonate (polycarbonate), polyethylene terephthalate (polyethyleneterephthalate), triacetyl cellulose (triacetylcellulose), the norborene compounds is made film or pressing film etc. as the solvent of the noncrystalline cyclic polyolefin thermoplastic resins such as (polyolefin) of monomer.Transparent base film 21 when using such transparent resin film to also become the use uv-hardening resin that uses above-mentioned explanation.
In the present invention, in photo-engraving process operation, particularly Fig. 7 (B), in the exposure process of expression, used the photomask 14 that has two kinds of patterns that vary in size at least.Said here pattern is meant at least fully each transmission position (opening) or the shading position greater than the size of the wavelength of exposure light.Promptly; be not meant the identical or little size of light wavelength that has with exposure; the photomask plotting unit of the high-resolution of use electron ray plotting unit etc.; be provided with fully transmission position and shading position less than the wavelength of exposure light, the area that utilizes transmission position and shading position is transmission position or shading position during as the level mask, abundant wavelength less than exposure light than the performance level.In the present invention, having the diameter of a circle identical, as the size of pattern with the area of pattern.
When use had the photomask of two levels of pattern of identical size, the concavo-convex shape of utilizing photo-engraving process to form on photoresist film had size much at one.As noted above, consider the size of the pixel in the image display devices such as liquid crystal indicator or plasma display, the pattern magnitude that forms on photoresist film is much at one the time, even utilize electroforming that this concaveconvex shape is replicated on the sheet metal, and then after being replicated on the film, because the size of the concaveconvex shape on the film much at one, and because interference or diffraction between the reflected light, and can produce the tendency that reflected light takes on a red color based on the concaveconvex shape on surface.
In the present invention, owing to use photomask to carry out photoetch with different big or small patterns, and the shape that forms on photoresist film has various sizes, be difficult to produce interference and diffraction of light between the above-mentioned reflected light, also seldom occur the surface concaveconvex shape caused catoptrical paintedly reaches the phenomenon that the reflectivity of the light of specific wavelength uprises under specific angle.
In this photomask, if the difference in size of pattern is too small, can be much at one in the concavo-convex size that the photoresist film surface forms, be difficult to bring into play fully desirable effect of the present invention, on the other hand, if the difference in size of pattern is excessive, the density at figuratum position and patternless position is excessive on photomask, might be difficult to realize uniform anti-dazzle performance.So about the size of the pattern that forms on photomask, full-size (diameter) is preferable below 2 times more than 1.1 times with the ratio of minimum dimension (diameter).The size ratio of pattern is preferable below 1.5 times more than 1.2 times, better below 1.3 times.According to antiglare film application aims display device, the diameter of each pattern is probably preferable in the scope of 1～50 μ m, and is better below 30 μ m more than the 5 μ m.
About the total area of each pattern of on photomask, varying in size, be preferable when the difference between each pattern is not too big.That is, when for example the pattern Y of the pattern X of a certain size and other sizes mixes, preferable in the scope of ratio about 0.7～1.3 of the total area of pattern X and the total area of pattern Y.When three kinds of different patterns of size mix, can be to meet this relation between any two kinds, better when all meeting this between the different pattern of each size and concerning.
Shown in Fig. 7 (B), dispose the photomask 14 of two levels, with the surface of photoresist film 12 certain interval is set, be preferable when carrying out proximity lithography.Proximity lithography is meant, though make photomask 14 and photoresist film 12 approaching, does not combine closely, but certain interval is set to expose.The proximity lithography of the photomask 14 by using this two levels, shown in Fig. 7 (B), edge at the covering pattern of photomask 14 can produce diffraction of light, the imaging meeting of photomask 14 is fuzzy as can be seen, pass through the expansion at the back sides, shading position by the light beam 15 at transmission position, and produce the continuous light amount distribution.Then, distribution according to the light quantity of proximity lithography, make photoresist film 12 sensitization, handle through video picture afterwards, the residual-film thickness degree of the photoresist of corresponding light quantity distribution can change, and can form the concaveconvex shape of the distance (being called " exposing clearance " or " closely gap ") that meets between mask pattern, exposure, photomask and the photoresist film etc. on the surface of the photoresist film after the development 12.
When the photomask of two levels of stating in the use carries out proximity lithography, the interval between photomask and the photoresist film is set at L (μ m), the mean diameter of the pattern of photomask is set at D (μ m), at L/D 2Value be the condition below 2.8 more than 1.3, it is preferable promptly satisfying when exposing under the condition of following formula (1).
1.3≤L/D 2≤2.8 (1)
Shown Fig. 8 of the part of Fig. 7 (B) according to expansion, the relation between the mean diameter D of pattern of interval L between photomask and the photoresist film and photomask has been described.As shown in the drawing, the interval between the surface of photomask 14 and photoresist film 12 is set at L.In the present invention, owing to used the photomask that has two kinds of patterns that vary in size at least, for example,, then the diameter of each pattern is set at D if photomask 14 has three kinds of patterns 1, D 2And D 3The mean diameter D of pattern is weighted the number of the size of these different types of patterns and pattern and the weighted mean value that obtains.Has D shown in Figure 8 1, D 2And D 3During three kinds of patterns of diameter, the integral body of photomask or the number of each pattern in the unit area are respectively N 1Individual, N 2Individual and N 3Individual, then mean diameter D can utilize following formula (2) to calculate.
D = D 1 2 &CenterDot; N 1 + D 2 2 &CenterDot; N 2 + D 3 2 &CenterDot; N 3 N 1 + N 2 + N 3 - - - ( 2 )
The imaging of the light of the trickle opening of transmission diffusion is the index (L/D that dimension D and light wavelength λ according to the interval L between opening and the photoresist film, opening are constituted 2λ) change, interval between opening and the photoresist film hour, the shape of opening almost directly is replicated on the photoresist film, along with the change at the interval between opening and the photoresist film is big, can irradiation be the diffusion light at center with the optical axis on photoresist film.Therefore, if L/D 2Value too small, can be reflected at the exposure image that forms on the photoresist film on the pattern of opening of photomask, energy distributions can change sharp according to opening shape, so form through hole easily on photoresist film, obtains the scattering of light function of antiglare film after can reducing.On the other hand, if L/D 2Value excessive, utilize the light of photomask diffraction to spread, the surface that is difficult in photoresist film forms pattern.According to experiment, can confirm if L/D 2Value in the scope below 2.8 more than 1.3, can form roughly excellent exposure imaging.
And in the above description, according to (A)～(E) of Fig. 7, implement meticulous exposure imaging on photoresist film 12, the film of the concaveconvex shape of formation finally can be made into the antiglare film 20 of continuous compound rate concaveconvex shape on film as master.Therefore, in order to make the photomask 14 that master is used, need to set and cover pattern, this covers pattern and designs for the shape that obtains stipulating among the present invention.The pattern that covers that design is such on overall optical mask 14 is a very operation of trouble, because it is very big to cover the data capacity of pattern, also very big for the burden of mask draught machine, though feasible on the principle, differing is used in the reality surely.So, use and to have designed the pattern that covers that the unit elements (unit cell) is made up of fixed-area constituted, a plurality of unit elements are arranged, and keep the translation symmetry, and the photomask that can cover the photoresist film 12 of integral body is favourable.By adopting this method, can reduce the trouble of covering pattern of the whole photomask 14 of design, also be favourable in industrial aspect.The translational symmetry here is meant is arranging the said units element all around or on certain direction such as oblique.Cover pattern as having disposed, keep the example of its translational symmetry state, that can enumerate has: the state that the barycentric coordinates of each unit elements is configured to the lattice-like of square lattice-like, rectangle lattice-like, rhombohedral crystal trellis, hexagonal cell trellis etc.
In the photomask that has two kinds of patterns that vary in size at least, the kind of pattern is at least two kinds and gets final product, and the upper limit of its kind quantity does not have particular restriction.Just the kind of pattern is many more, and the data capacity when pattern is covered in design is just big more.So aspect practical, the kind of pattern is according to the purpose performance, can suitably be selected from the scope of two kinds, three kinds, four kinds and five kinds one of them for preferable.
As noted above, the sheet metal that has formed concaveconvex shape, be that embossing mold 18 twists on the cylinder, perhaps the state that as required this embossing mold 18 is arranged in a plurality of cylinder surfaces down and roll, and be made into the impression cylinder that the surface has concaveconvex shape, use this impression cylinder, the method for continuous compound rate concaveconvex shape is suitable on film surface.If employing the method can be duplicated concaveconvex shape continuously and expeditiously on large-area film, has very high productivity.
Described as described above, utilize photomask to expose through having at least two kinds of patterns that vary in size, form concaveconvex shape by the photo-engraving process that develops, make mould at its surface electrical ingot metal, and use the method for this mould at the copying surface concaveconvex shape of film, the surface be can produce and trickle concaveconvex shape, anti-dazzle functional and antiglare film that optical property is outstanding formed.At this moment, conditions such as pattern that can be by selective light mask suitably, exposure, exposing clearance, and then control anti-dazzle performance and optical property.
In the present invention, owing to adopted using photo-engraving process to produce concaveconvex shape and be used in combination at its surface electrical ingot metal, to produce mould with trickle concaveconvex shape, and use this mould on film surface, to duplicate the method for concaveconvex shape, can produce the antiglare film that the uniform concaveconvex shape that anti-dazzle performance is exerted an influence distributes and but high-performance ground shows, and productivity is good.Specifically, for example: the reflectivity (normal reflection rate) of normal reflection direction that the normal direction from antiglare film is departed from 5～30 ° the arbitrarily angled light of injecting is set at R (0), when the reflectivity of injecting light of the angle θ towards the antiglare film lopsidedness from the normal reflection direction is set at R (θ), can obtain the simple film that reduces of reflectivity curve of the θ interdependence curveization of a R (θ) at an easy rate.
The notion that this reflectivity curve detects as shown in Figure 9.That is, the normal reflection direction is meant from angle ψ when the normal direction 25 of antiglare film 20 is injected light 30, in containing the plane 26 of this normal 25 and incident ray direction 30, from angle ψ to the direction of the reverse direction reflected light 32 of incident ray direction 30.ψ is an incident angle, also is the normal reflection angle, and strictly speaking, this symbol is a sign.For the reflectivity from the normal reflection direction 32 of the incident ray of incident ray 30 is normal reflection rate R (0).And, when 5 ° angle ψ is injected in setting arbitrarily between 30 °, comprising film normal direction 25 and injecting in the plane 26 of radiation direction 30, on direction 34 according to 20 1 a sides tilt angle theta from normal reflection direction 32 towards antiglare film, detection is for the reflectivity of injecting light, it as R (θ).Make tilt angle theta 0 ° (being the normal reflection direction) to changing between the 90 °-ψ (promptly parallel direction) with pellicular front, measure the reflectivity R (θ) of each tilt angle theta, and with its curveization, the R (θ) during general θ=0 °, i.e. R (0) maximum.The method according to this invention can easily obtain in the chart with respect to the reflectivity R (θ) of this tilt angle theta, has given the film of the simple curve that reduces of θ interdependence of R (θ) as shown in figure 10.
The bright spot of antiglare film can be used to light (backlight) irradiating liquid crystal panel and antiglare film from background by on the meticulous liquid crystal panel of height (panel) antiglare film being set, and the surface of visual examination panel is estimated.In order to estimate bright spot, preferably use the high more liquid crystal panel of fineness, also be easier to find bright spot.As the fineness of panel, preferable when 150ppi (pixel per inch) is above, it is better when above to reach 170ppi.
Antiglare film of the present invention for being preferable 0.001% when following from the reflectivity of the direction of 20 ° of normal reflection angle deviatings, be meant as shown in figure 11 from the direction of 20 ° of normal reflection angle deviatings, being equivalent at above-mentioned Fig. 9 medium dip angle θ is 20 °, departs from 20 ° direction 9 from normal reflection direction 8.Appearing at normal reflection direction 8 from the direction 9 of 20 ° of normal reflection angle deviatings is center coniform, said here being illustrated in for the reflectivity from the direction of 20 ° of normal reflection angle deviatings contained above-mentioned normal 5 and injected in the plane 7 of radiation direction 6, for to the reflectivity of film one lateral deviation from 20 ° direction.
And the width that uses dark position and bright position of this antiglare film is Dinged Time as the light comb Ce of 1.0mm, and 45 ° to reflect visibility preferable when following 50%.45 ° of reflection visibilitys are to measure according to the detection method of the imaging visibility in the reflectometry of stipulating among the JIS K7105.During detection to the incident direction and the reflection direction of the light of test film, according to be defined as 45 ° of JIS.In this JIS, stipulate to comb as light, its dark position is 1: 1 with the width ratio at bright position, and its width is four kinds of 0.125mm, 0.5mm, 1.0mm and 2.0mm, and 45 ° of stipulating in the scope of this specification and claims reflection visibility is for to use the width at dark position and bright position to comb resulting value as the light of 1.0mm.
The width that uses dark position and bright position of this antiglare film is preferable when above 200% as the aggregate value of the transmission visibility of 0.125mm, 0.5mm, 1.0mm and four kinds of light combs of 2.0mm mensuration.The transmission visibility can be measured according to the detection method of the imaging visibility of stipulating in the transmission beam method of stipulating among the identical JIS K 7105.According to the regulation of this JIS, be vertical direction to the direction of light of injecting of test film.And, at this moment, use above-mentioned four kinds of light comb to detect the imaging visibility of stipulating in the transmission beam method respectively, and with these aggregate value as the aggregate value of above-mentioned transmission visibility.
And the diffusion ratio of antiglare film of the present invention is preferable when following 15%.Diffusion value can calculate according to the method for regulation among the JIS K 7105.Diffusion value is for utilizing the value of (diffused transmission rate/all light transmittances) * 100 (%) expression.In antiglare film of the present invention, though the diffusion ratio value of Ce Dinging is generally below 20% in this way, it is 15% preferable when following that the diffusion ratio value reaches, reach 10% o'clock better.If the diffusion ratio value is too high, this antiglare film be applied to display device, particularly during liquid crystal indicator, aspect the viewing angle properties of liquid crystal indicator, owing to observe direction, particularly tilt the low light of contrast that direction more than 60 ° penetrates, can cause the contrast reduction when observe from the front at positive area scattering from its normal slope.
Because the antiglare effect by the antiglare film of the present invention that constitutes shown in above-mentioned is outstanding, improved the bright spot that is occurred when being used in combination well with the meticulous panel of height, so, be installed on the image display device after, its visibility is quite outstanding.When image display device was LCD, this antiglare film can be used as polarizing film and uses.Promptly; polarizing film mostly is by orientation and has adsorbed the stacked film of diaphragm on the single face at least of polyvinyl alcohol (polyvinyl alcohol) polariscope that resin film constituted of iodine or bitintability dyestuff; on the one side of this light polarizing film; stick antiglare film, be polarizing film with anti-dazzle property with above-mentioned concaveconvex shape.And, if the optical thin film of above-mentioned concaveconvex shape with anti-dazzle property uses as the diaphragm antiglare layer of holding concurrently, its male and fomale(M﹠F) is attached to polariscopic one side as the outside, also can become the light polarizing film of anti-dazzle property.Can also on the polarizing film of diaphragm, form the concaveconvex shape of above-mentioned anti-dazzle property on the surface of its single face diaphragm, stacked to be made into the light polarizing film of anti-dazzle property.
Image display device of the present invention is a kind of device that has disposed the antiglare film of the predetermined surface shape with above-mentioned explanation on image display means.Here, being represented as of image display means possesses the liquid crystal cell of having enclosed liquid crystal between upper and lower base plate, by applying voltage the directed state of liquid crystal is changed, with liquid crystal panel for displaying images, what other can also be enumerated has: plasma display, electroluminescence (EL) or Organic Light Emitting Diode (O-LED) display, cathode ray tube (CRT) display etc.And, dispose above-mentioned antiglare film by demonstration side in image display means, also can the composing images display device.At this moment, be the male and fomale(M﹠F) of antiglare film as the outside (look and recognize side).Both can directly be attached to antiglare film the surface of image display means, also can work as when using liquid crystal panel, for example as mentioned above, polarizing film had been attached to the surface of liquid crystal panel as image display means.The image display device that has possessed antiglare film of the present invention, the concaveconvex shape scatter incident light line that can utilize the antiglare film surface to have with fuzzy imaging of mirroring, and has outstanding visibility.
Example
Below, according to example the present invention is described in further detail, but the present invention only is defined in these following examples.In these examples, short of special marking, the % of expression content and use amount is a weight standard.And the evaluation and the assay method of the antiglare film in the following example are as follows.
(calculating of the apparent area of the mensuration of surface configuration and projection or sunk area)
Use non-contact three-dimensional surface configuration and roughness instrument " New View 5010 " (ZygoCorporation manufacturing), in the zone of the about 480 μ m * 640 μ m of antiglare film, measure surface configuration.The horizontal decomposition degree of this detector is 1.18 μ m, and vertical resolution is 0.1 μ m.The mean value of all altitude informations that calculate, utilize image processing software " NIH image " that the zone that is higher than average height (projection) and the zone (depression) that is lower than average height are transformed to the image of binarization, to obtain the area of each projection or sunk area.With 10 μ m 2Groove each area data of obtaining is cut apart, obtain per 10 μ m respectively 2Frequency (number).Then, respectively 10 μ m 2The average area of groove multiply by above-mentioned frequency, obtains per 10 μ m respectively 2The frequency of apparent area.With respect to area value,, be made into the chart (histogram) of the number of degrees distribution of apparent area the frequency curveization of the apparent area that obtains.From this histogram, obtain peak value half spectrum amplitude, be the distribution of apparent area.
(mensuration of the reflectivity of antiglare film)
On the male and fomale(M﹠F) of antiglare film, from tilt 30 ° the light of iodine-tungsten lamp light source of direction cover parallelization for the film principal normal, this light is 3.4 ° solid angle, and measures the angle variation of the reflectivity in the plane with film principal normal and direction of illumination." 3,292 03 luminous energy sensors (optical power sensor) " and " 3292 luminous energy sensors (optical power meter) " that the mensuration of reflectivity has used Yokogawa Motor (strain) to make.
(mensuration of diffusion ratio)
Measure according to JIS K 7105.In order to prevent sample distortion, use the clear binder of optics aspect, and male and fomale(M﹠F) as the surface, it is sticked on the glass substrate afterwards so that mensuration to be provided.
(mensuration of reflection visibility and transmission visibility)
Measure according to JIS K 7105.When measuring the transmission visibility,, used the clear binder of optics to stick on the glass substrate afterwards so that mensuration to be provided in order to prevent the distortion of sample.When measuring the reflection visibility, the transmission visibility is identical with measuring, used and be bonded in sample on glass, but in order to prevent reflection from glass, on the glass of the glass plate of having pasted antiglare film, it is black polymethylmethacrylate (polymethylmethacrylate) plate of 2 mm that water has closely been pasted thickness, injects light from sample (antiglare film) side under this state, to measure.
Example 1
In the zone of 10mm * 10mm, designed unit elements, disposed in this unit elements that to add up to quantity at random be that 512,820 diameter is the opening of 8 μ m, 9 μ m and three kinds of circles of 10 μ m, the mean value of the bee-line between the centre coordinate of each opening is 12.0 μ m.Prepared this unit elements was configured in according to cycle of 10mm the photomask of two levels on the overall region of the 100mm * 100mm on the quartz base plate of 6 inches squares (about 152mm squares).
On the other hand, on the glass substrate of 100mm * 100mm, rotary coating has been mixed the photoresist of the positive type of black pigment, " P70BK " that it answers chemical industry (strain) to make for Tokyo, and make its thickness after prebake reach about 1.1 μ m.The glass substrate of the subsidiary photoresist film that so obtains is placed on 120 seconds on the heating plate that is set at 85 ℃, to carry out prebake.On this photoresist film, place the photomask of above-mentioned making, making exposing clearance is 120 μ m, and by photomask, many light (multi-line) of g line, h line and the i line that penetrates in the extra-high-pressure mercury vapour lamp of irradiation as exposure light source make according to the conversion of g line to reach 240mJ/cm 2, and carry out proximity lithography.The glass substrate of subsidiary photoresist film after the exposure is placed in 23 ℃ 0.5% the sodium hydrate aqueous solution and develops, wash with pure water then.Then, be placed on 20 minutes (afterwards curing) of heating in the baking oven that is heated to 180 ℃, obtained the surperficial resin bed that forms many depressions.
Utilize vapour deposition method, on the resin bed of the subsidiary depression that obtains, form the nickel plated film, to carry out the conduction processing of resin layer surface.Then, on this conductionization treated side, utilize electroforming to form the nickel plated film that thickness is about 0.3mm.On the resin bed of subsidiary depression, adhere under the state of nickel plated film, the inner face of grinding nickel plated film, and then further grind, it is 0.15mm that its thickness is ground, nickel plated film after grinding is peeled off from the resin bed of subsidiary depression, and making becomes the nickel plate that there are a plurality of projectioies on the surface.
In addition, the uv-hardening resin " GRANIC PC806T2 " that big Japanese stamp-pad ink (INK) chemical industry (strain) is made is dissolved in the ethyl acetate, makes concentration reach 50%, to be deployed into coating liquid.This coating liquid is coated on triacetyl cellulose (triacetylcellulose) film, makes dried coating thickness be about 5 μ m, and in 60 ℃ baking oven dry 3 minutes.Then, convex surface at the nickel plate of the subsidiary projection of above-mentioned making is pressed on the rubber cylinder, it is contacted with the coated face of uv-hardening resin, shine the light of the ultraviolet ray etc. of electrodeless type from the tri acetyl cellulose membrane side, make according to h line conversion light quantity to reach 100ml/cm 2, and make above-mentioned uv-hardening resin sclerosis.Tri acetyl cellulose membrane is peeled off from the nickel plate from hardening resin, obtained having the transparent antiglare film that the duplexer of the hardening resin of concaveconvex shape and tri acetyl cellulose membrane constitutes by the surface.
The non-contact three-dimensional surface configuration and the roughometer " New View 5010 " that utilize above-mentioned Zygo Corporation to make, the surface configuration of this antiglare film of mensuration in the zone of about 480 μ m * 640 μ m.The ground conversion that has levels shows the elevation information of this antiglare film, and has obtained data shown in Figure 12.And, utilize above-mentioned method to calculate the area of depression respectively according to this elevation information, obtain the histogram of notch area shown in Figure 13.The maximal value of the notch area that observes at this moment, is about 584 μ m 2, minimum value is about 5 μ m 2, the area when making histogram (groove) at interval is 10 μ m 2Then, calculate frequency * area, obtain the histogram of apparent area shown in Figure 14 according to above-mentioned method.In this histogram, at 40 μ m 2With 50 μ m 2Between the interval in observe peak value (maximal value).Calculate half spectrum amplitude of peak value according to the histogram of apparent area shown in Figure 14, obtain 30 μ m 2, less than 100 μ m 2So the distribution of the apparent area of the concaveconvex shape on this film is very little.
The antiglare film that obtains is placed on the high meticulous liquid crystal panel of 200ppi, from the rear irradiation, with the visual valuation bright spot, the result does not observe bright spot with back of the body illuminator (backlight).And the reflectivity of the normal reflection direction of this antiglare film is 0.92%, is 0.00025% from the normal reflection angle to the reflectivity that departs from 20 ° of directions of film side.
The triacetyl cellulose face of this antiglare film is attached on glass, when detecting the diffusion ratio, the reflection visibility the when width that uses dark position and bright position is injected as 45 ° of the light comb detections of 1.0mm.Its result, diffusion ratio are 8.0%, and the reflection visibility is 44.5%, can confirm that it has low diffusion ratio and prevents the ability that height is mirrored.And, be attached to antiglare film on glass for equal state, use the result of the width at dark position and bright position as the light comb detection transmission visibility of 0.125mm, 0.5mm, 1.0mm and 2.0mm, obtain following numerical value respectively, the aggregate value of these four kinds of transmission visibilitys is 297.4%, can confirm to have very high visibility.
0.125 mm light comb: transmission visibility 70.5%
0.5 mm light comb: transmission visibility 75.0%
1.0 mm light comb: transmission visibility 75.6%
2.0 mm light comb: transmission visibility 76.3%
Add up to 297.4%
Above-mentioned evaluation and determination data in the example 1 in table 1, have been summed up
Example 2
In the zone of 10mm * 10mm, except using being configured to add up at random quantity is 588,069 diameter is the opening of 8 μ m, 9 μ m and three kinds of circles of 10 μ m, the mean value of the bee-line between the centre coordinate of each opening is the unit elements of 11.6 μ m, be configured in according to cycle of 10mm beyond the photomask in the overall region of 100mm * 100mm, other are identical with example 1, to make antiglare film.The distribution results of the apparent area of the depression that evaluation forms on the film surface that obtains is at 60 μ m 2With 70 μ m 2Between the interval in observe the peak value (maximal value) of " area " * " frequency ", half spectrum amplitude of its peak value is 30 μ m 2And, utilize the result of the method visual valuation bright spot identical with example 1, do not observe bright spot.And the optical property of other of this antiglare film is as shown in table 1.
Compare form 1
The antiglare film " AG6 " of selling for Sumitomo Chemical (strain) according to the method identical with example 1, is estimated the result that the apparent area of the projection that forms on its surface distributes, at 20 μ m 2With 30 μ m 2Between the interval in observe peak value, half spectrum amplitude of its peak value is 140 μ m 2Utilize the method visual valuation bright spot identical with example 1 again, the result has observed bright spot.The optical property of other of this antiglare film is as shown in table 1.
Compare form 2
The antiglare film " GH5 " of selling for Sumitomo Chemical (strain) according to the method identical with example 1, is estimated the result that the apparent area of the projection that forms on its surface distributes, at 10 μ m 2With 20 μ m 2Between the interval in observe peak value, half spectrum amplitude of its peak value is greater than 300 μ m 2Utilize the visual valuation bright spot again, the result has observed bright spot.The optical property of other of this antiglare film is as shown in table 1.
Table 1
Figure C20041008715000411
Figure C20041008715000421
Remarks) transmission visibility is 4 kinds a aggregate value.
Example 3
In 10mm * 10mm square zone, designed unit elements, in this unit elements, diameter is that the circular open position of 8 μ m, 9 μ m and 10 μ m has disposed 233 respectively, 624,196,085 and 158,627, the mean value of the distance between the centre coordinate of immediate opening is 15 μ m.Prepared this unit elements according to the 10mm cycle on the overall region of the 100mm * 100mm on the quartz base plate of 6 inches squares (about 152mm squares), be configured to the photomask of two levels of square lattice-like.According to above-mentioned formula (2), the mean diameter that calculates the opening in this photomask is 8.9 μ m.
On the other hand, on 100mm * 100mm square glass substrate, rotary coating has been mixed the positive type photoresist of black pigment, and it answers " P70BK " (trade name) of chemical industry (strain) manufacturing for Tokyo, and makes its thickness after prebake reach about 1.1 μ m.The glass substrate of the subsidiary photoresist film that obtains is placed on 120 seconds on the heating plate that is heated to 85 ℃, to carry out prebake.On this photoresist film, place above-mentioned photomask, and to make exposing clearance be 120pm.By photomask, many light of g line, h line and the i line that penetrates in the extra-high-pressure mercury vapour lamp of irradiation as exposure light source make according to the conversion of g line to reach 240mJ/cm 2Exposure light amount, to carry out proximity lithography.Calculate the L/D that concerns between the exposure distance L of this moment and the mean diameter of opening 2Be 1.51.The glass substrate of subsidiary photoresist film after the exposure is immersed in 80 seconds in 23 ℃ 0.5% the potassium hydroxide aqueous solution,, washs with pure water then to develop.Then, be placed in the baking oven that is heated to 180 ℃ and cure after heating was carried out in 20 minutes, obtained the surperficial photoresist layer that has formed concaveconvex shape.
Utilize vapour deposition method, on the male and fomale(M﹠F) of the photoresist layer of the subsidiary concaveconvex shape that obtains, form the nickel plated film, to carry out the conduction processing of photoresist laminar surface.Then, on this conductionization treated side, utilize electroforming to form the nickel plated film that thickness is about 0.3mm.Adhering on the male and fomale(M﹠F) of photoresist layer under the state of nickel plated film, the inner face of grinding nickel plated film, and then further grind, it is 0.2mm that its thickness is ground, nickel plated film after grinding is peeled off from the photoresist layer, and making becomes the nickel plate that there are a plurality of concaveconvex shapes on the surface.
In addition, the uv-hardening resin constituent " Grandic 806T " (trade name) that big Japanese stamp-pad ink (INK) chemical industry (strain) is made is dissolved in the ethyl acetate, is deployed into concentration and is 50% coating liquid.This coating liquid is coated on the triacetyl cellulose that thickness is 80 μ m (TAC) film, makes dried coating thickness reach 5 μ m, in being set at 60 ℃ exsiccator dry 3 minutes.Then, with rubber cylinder dried film being pressed in above-mentioned making has on the male and fomale(M﹠F) of nickel plate of concaveconvex shape, make ray hardening resin constituent layer become one of nickel plate side, under this state, from high-pressure mercury-vapor lamp, penetrate and intensity is 20mW/Cm from that side irradiation of TAC film 2Light, make according to h line conversion light quantity to reach 200mJ/cm 2, so that the sclerosis of ray hardening resin constituent layer.Then, the TAC film is peeled off from hardening resin and nickel plate, obtained having the transparent antiglare film that the duplexer of the hardening resin of concaveconvex shape and TAC film constitutes by the surface.
The reflected light that the antiglare film that visual observation obtains produces, the result does not find catoptrical bright spot.
The possibility of aspect industry, utilizing
Antiglare film of the present invention is recognized with looking of the image display device headed by the liquid crystal indicator in raising The property aspect is particularly useful.
The antiglare film of making according to the method described above uses the light of photo-engraving process to cover by at random control The size and shape of the pattern in the mould, and at that time conditions of exposure of control although become a kind ofly are Large tracts of land also can have the outstanding film of even, the anti-dazzle performance of quality and optical property. So, This antiglare film is for the anti-dazzle aspect of performance that improves with the various display unit headed by the liquid crystal indicator Useful.

Claims (15)

1. antiglare film, it is characterized by and formed trickle concaveconvex shape in its surface, the zone that is higher than the average height of concaveconvex shape is an elevated regions, the zone that is lower than the average height of concaveconvex shape is a sunk area, try to achieve the projected area of each elevated regions or the projected area of sunk area, utilize the area groove of stipulating to try to achieve the frequency of this elevated regions or sunk area, further according to area * frequency, utilize the area groove of afore mentioned rules to calculate the frequency of apparent area, when representing the frequency of area of the elevated regions that obtains or sunk area with histogram, peak value appears at 300 μ m 2Following position, and half spectrum amplitude of its peak value is at 60 μ m 2Below.
2. antiglare film as claimed in claim 1 is characterized by: this peak value appears at 150 μ m 2Following position.
3. as claim 1 or 2 described antiglare film, it is characterized by: half spectrum amplitude width of this peak value is greater than 10 μ m 2
4. the antiglare film described in any one of claim 1 or 2 is characterized by: its to from the reflectivity of the direction of 20 ° of normal reflection angle deviatings below 0.001%.
5. antiglare film as claimed in claim 1 is characterized by: it is below 50% that 45 ° of detecting for the light comb of 1.0mm of the width that utilizes dark position and bright position reflect visibilitys.
6. as claim 1 or 5 described antiglare film, it is characterized by: the width that utilizes dark position and bright position is more than 200% for the aggregate value of the transmission visibility of 4 kinds of light comb mensuration of 0.125mm, 0.5mm, 1.0mm and 2.0mm.
As claim 1,2 or 5 any one described in antiglare film, it is characterized by: the diffusion ratio is below 15%.
8. image display device, it is characterized by: possess described antiglare film of claim 1 and image display means, this antiglare film is configured in looking of image display means and recognizes side.
9. a surface has the manufacture method of the antiglare film of concaveconvex shape, comprising:
Utilize photo-engraving process on the photoresist film that forms on the base material, form concaveconvex shape the photoetch operation,
Electroforming metal on the male and fomale(M﹠F) of the photoresist film that obtains, after duplicating this concaveconvex shape on the metal, from photoresist film peel off the sheet metal that has duplicated concaveconvex shape make the electroforming mould production process of mould,
This sheet metal that has duplicated concaveconvex shape is used as mould, its surperficial concaveconvex shape is copied to the concavo-convex film production process of film surface,
It is characterized by:
Above-mentioned photoetch operation makes the photoresist film exposure, the manufacturing antiglare film of developing then by having the photomask of two kinds of patterns that vary in size at least.
10. method as claimed in claim 9 is characterized by: formed pattern on photomask, the diameter of the maximum pattern in this pattern is more than 1.1 times below 2 times of diameter of minimum pattern.
11. as claim 9 or 10 described methods, it is characterized by: formed pattern on photomask, the ratio of the shared total area of pattern difference that at least two kinds vary in size in this pattern is in 0.7～1.3 scope.
12. the method described in claim 9 or 10 is characterized by: the exposure by photomask is to utilize having the proximity lithography that has disposed photomask on the position of certain intervals to carry out with the photoresist film surface.
13. the method described in claim 12 is characterized by: the interval between photomask and the photoresist film surface is set at L μ m, the mean diameter of the pattern of photomask is set at D μ m, at L/D 2Value be to expose under the condition below 2.8 more than 1.3.
14. as claim 9,10,13 any one described in method, it is characterized by: photomask is to be rearranged by a plurality of unit elements that are made of the regulation area, to keep the symmetry of translation.
15. the method described in claim 9 is characterized by: the metal plate coils that has duplicated concaveconvex shape on the surface of cylinder, is used for concavo-convex film production process.
CNB2004100871507A 2003-11-05 2004-11-01 Anti-glare film and image display device Expired - Fee Related CN100401113C (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003375300 2003-11-05
JP2003375300A JP2005140890A (en) 2003-11-05 2003-11-05 Anti-glare film and image display device
JP2004023108 2004-01-30
JP2004023108A JP4100350B2 (en) 2004-01-30 2004-01-30 Method for producing antiglare film

Publications (2)

Publication Number Publication Date
CN1616992A CN1616992A (en) 2005-05-18
CN100401113C true CN100401113C (en) 2008-07-09

Family

ID=34797135

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100871507A Expired - Fee Related CN100401113C (en) 2003-11-05 2004-11-01 Anti-glare film and image display device

Country Status (3)

Country Link
KR (2) KR101120386B1 (en)
CN (1) CN100401113C (en)
TW (1) TWI354120B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101952749B (en) * 2008-12-09 2013-07-17 迪睿合电子材料有限公司 Optical body and window material provided with the optical body

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007156132A (en) * 2005-12-06 2007-06-21 Sumitomo Chemical Co Ltd Anti-glare film and image display device
JP2012003026A (en) * 2010-06-16 2012-01-05 Sony Corp Optical body, window material, fitting, and sunlight shading device
CN109270620B (en) * 2018-11-16 2022-07-19 京东方科技集团股份有限公司 Manufacturing method of metal wire grid polarizer and display panel
TWI817475B (en) * 2022-04-29 2023-10-01 元太科技工業股份有限公司 Anti-glare layer and manufacturing method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1144805A (en) * 1997-07-28 1999-02-16 Denso Corp Antidazzle transparent resin molding
JPH11183710A (en) * 1997-12-25 1999-07-09 Toppan Printing Co Ltd Antidazzle hard coating film and its production
JP2002207109A (en) * 2001-10-26 2002-07-26 Dainippon Printing Co Ltd Glare-proof film, polarizing film and transmission type display
JP2003075604A (en) * 2001-09-03 2003-03-12 Nitto Denko Corp Antireflective antidazzle film, method for manufacturing the same, optical element and image display device
CN1414401A (en) * 2001-10-23 2003-04-30 夏普公司 Anti-glare film and its manufacturing method, polarized component and display equipment using the component, and internal diffusion film

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0583765U (en) * 1992-04-10 1993-11-12 旭光学工業株式会社 Pattern division exposure device
JP2002040215A (en) 2000-07-26 2002-02-06 Optrex Corp Method for manufacturing light diffusing film
JP2002196115A (en) 2000-12-22 2002-07-10 Andes Intekku:Kk Reflector and liquid crystal display
JP2003004916A (en) 2001-06-20 2003-01-08 Dainippon Printing Co Ltd Window material of display device, method of manufacturing for the same and display device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1144805A (en) * 1997-07-28 1999-02-16 Denso Corp Antidazzle transparent resin molding
JPH11183710A (en) * 1997-12-25 1999-07-09 Toppan Printing Co Ltd Antidazzle hard coating film and its production
JP2003075604A (en) * 2001-09-03 2003-03-12 Nitto Denko Corp Antireflective antidazzle film, method for manufacturing the same, optical element and image display device
CN1414401A (en) * 2001-10-23 2003-04-30 夏普公司 Anti-glare film and its manufacturing method, polarized component and display equipment using the component, and internal diffusion film
JP2002207109A (en) * 2001-10-26 2002-07-26 Dainippon Printing Co Ltd Glare-proof film, polarizing film and transmission type display

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101952749B (en) * 2008-12-09 2013-07-17 迪睿合电子材料有限公司 Optical body and window material provided with the optical body

Also Published As

Publication number Publication date
CN1616992A (en) 2005-05-18
KR101189305B1 (en) 2012-10-09
KR20050043647A (en) 2005-05-11
TW200516276A (en) 2005-05-16
KR101120386B1 (en) 2012-02-24
KR20110084856A (en) 2011-07-26
TWI354120B (en) 2011-12-11

Similar Documents

Publication Publication Date Title
TW512240B (en) Optically functional sheet and surface light source using the same as well as image display device
TWI738194B (en) Manufacturing method of optical body and optical body
JP3527961B2 (en) Front-light reflective liquid crystal display
CN101004460B (en) Antiglare film and image display
CN100472239C (en) Anti-dizzy optical film and its making method
JP3774616B2 (en) Lighting device and light guide plate manufacturing method
EP2906991B1 (en) Display devices having an antiglare layer providing reduced sparkle appearance
US20060061869A1 (en) Microstructures for producing optical devices, sieves, molds and/or sensors, and methods for replicating and using same
KR20050069907A (en) Display optical films
TWI374315B (en)
CN102770787A (en) Display body and labeled article
TW594202B (en) Mask, substrate with light reflecting film, method for forming light reflecting film, method for manufacturing electro-optical device, electro-optical device, and electronic apparatus
CN108885284A (en) Optical body and light emitting device
US7258908B2 (en) Anti-glare film, method of producing the same, and display equipped with the same
TWI374312B (en) Diffusive reflecting structure and its manufacturing method, and display device using it
TW200402574A (en) Mask, substrate with light reflective film, method for manufacturing light reflective film, liquid crystal display device, and electronic apparatus
JP2005140890A (en) Anti-glare film and image display device
CN113808482A (en) Anti-glare privacy screen for windows or electronic device displays
CN100401113C (en) Anti-glare film and image display device
Wang et al. Study on the optical performance of light guide plate with pyramid-shaped microstructures
JP2003215574A (en) Reflective liquid crystal display
TWI390251B (en) Light control film and the use of its backlight device
TW201202756A (en) Light-transmitting member
KR100971719B1 (en) Method of manufacturing a large scale nano pattern of LGP using photoresist process
JPH11202326A (en) Reflection type liquid crystal display element, and substrate for the reflection type liquid crystal display element

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080709

Termination date: 20131101