CN100397611C - Method for forming conductive structure in low dielectric material layer - Google Patents
Method for forming conductive structure in low dielectric material layer Download PDFInfo
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- CN100397611C CN100397611C CNB021311137A CN02131113A CN100397611C CN 100397611 C CN100397611 C CN 100397611C CN B021311137 A CNB021311137 A CN B021311137A CN 02131113 A CN02131113 A CN 02131113A CN 100397611 C CN100397611 C CN 100397611C
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Abstract
The present invention relates to a method for forming a conductive structure in low dielectric material layer, which comprises: firstly, a first dielectric layer is formed on a substrate; subsequently, a low dielectric material layer is formed on the first dielectric layer, a second dielectric layer is formed on the low dielectric material layer, wherein the first dielectric layer, the low dielectric material layer and the second dielectric layer are formed in a method of original position (In-Situ) sedimentation; then, a micro shadow etching fabrication technology is carried out so as to form an opening which is exposed out of the substrate in the second dielectric layer, the low dielectric material layer and the first dielectric layer; next, a conductive layer is filled in the opening so as to form the conductive structure.
Description
Technical field
The invention relates to a kind of method that forms semiconductor device, and particularly relevant for a kind of method that in low dielectric material layer, forms conductive structure.
Background technology
In semi-conductive manufacture process, between the conductive structure normally with the insulator of dielectric material as the isolate conductive structure.Wherein, conductive structure for example is interconnect (Interconnect), grid or interlayer connector (Plug).Along with the semiconductor device live width is constantly dwindled, the spacing between the adjacent structure is also dwindled thereupon.Therefore utilize dielectric material with material, can postpone by reducing parasitic capacitance and reducing RC as dielectric layer with low-k.And general low dielectric material layer commonly used for example has hydrogeneous silicate (HydrogenSilsesquioxane, HSQ), methylic silicate (Methyl Silsequioxane, MSQ) and organic dielectric materials xylylene po1ymer (Parylene) or the like for example.
And be known in the dielectric layer method that forms conductive structure, on silicon base, deposit after the one dielectric layer earlier, utilize a photoetching process again,, in opening, insert the making that an electric conducting material is promptly finished conductive structure afterwards again in dielectric layer, to form an opening.Particularly, the organic dielectric materials of low-k for example is xylylene po1ymer (Parylene) at present, often is used as the material of dielectric layer.Yet, the organic dielectric materials of low-k being deposited on the silicon base but having a problem with as a dielectric layer time, the organic dielectric materials and the adhesion between the silicon base (Adhesion) that are exactly low-k are good inadequately.In known method, existing research is to be used in to form an adhesion layer between silicon base and the organic dielectric materials to improve both adhesions.
Yet, because the method for the organic dielectric materials of known deposition low-k mostly is to utilize a Low Pressure Chemical Vapor Deposition (LPCVD) or an aumospheric pressure cvd method (APCVD).And the original position (In-Situ) that also can't carry out organic dielectric layer and inorganic dielectric layer in LPCVD board or APCVD board deposits manufacture craft.Therefore, in known method, will make complex manufacturing technologyization in order to form this adhesion layer.
Summary of the invention
Purpose of the present invention is exactly in that a kind of method that forms conductive structure in low dielectric material layer is provided, to improve organic dielectric materials and the relatively poor problem of the adhesion between the silicon base that has low-k in the known method.
Another object of the present invention provides a kind of method that forms conductive structure in low dielectric material layer, has the comparatively complicated shortcoming of manufacture craft to improve known method.
The present invention proposes a kind of method that forms conductive structure in low dielectric material layer, and the method at first forms one first dielectric layer in a substrate.Then, utilize a plasma enhanced chemical vapor deposition board, on first dielectric layer, form a low dielectric material layer, and on low dielectric material layer, form one second dielectric layer, wherein first dielectric layer, low dielectric material layer and second dielectric layer are formed in the mode of an original position (In-Situ) deposition, the step of this board running comprises: one first inorganic reaction gas is fed in the plasma reative cell, to form this first dielectric layer; One organic reaction gas is fed in this plasma reative cell, forming this low dielectric material layer, and when forming this low dielectric material layer, also comprise and mix an inorganic material in this low dielectric material layer; And one second inorganic reaction gas fed in this plasma reative cell, to form this second dielectric layer.Then, carry out a photoetching process,, expose this substrate, afterwards, in this opening, insert a conductive layer, to form a conductive structure in this second dielectric layer, this low dielectric material layer and this first dielectric layer, to form an opening.In the present invention, the material of first dielectric layer and second dielectric layer is respectively an inorganic, and the thickness of second dielectric layer is greater than the thickness of first dielectric layer.Wherein, first dielectric layer is used as the usefulness of an adhesion layer, and second dielectric layer is used as the usefulness of a mask layer, and the material of low dielectric material layer is an organic material.In addition, the present invention more is included in the inorganic material of mixing in the low dielectric material layer of organic material, by with the adhesion between first dielectric layer/second dielectric layer of the low dielectric material layer of promoting organic material and inorganic.In the present invention, the method that forms first dielectric layer, low dielectric material layer and second dielectric layer is utilized a plasma enhanced chemical vapor deposition method, and this plasma enhanced chemical vapor deposition equipment has an input pipe fitting to feed inorganic reaction gas, and another input pipe fitting is to feed organic reaction gas, so that inorganic layer and organic material layer can form in the mode of in-situ deposition, in addition can be when the organic material layers of deposition the doping inorganic material.After forming first dielectric layer, low dielectric material layer and second dielectric layer, on second dielectric layer, form a photoresist layer, and with this photoresist layer is that a mask carries out one first etching process, with patterning second dielectric layer, and forms one first opening.Then, be that a mask carries out one second etching process with the photoresist layer and second dielectric layer, with the patterning low dielectric material layer, and form one second opening.Continuing it, is that a mask carries out one the 3rd etching process with second dielectric layer, with patterning first dielectric layer, and forms one the 3rd opening, and exposes substrate.Afterwards, again in inserting a conductive layer, to form a conductive structure at the 3rd opening.
Because the present invention is formed with a dielectric layer (inorganic) between low dielectric material layer (organic material) and substrate, therefore can improve adhesion between the two.
Because the low dielectric material layer of organic material of the present invention and first dielectric layer/second dielectric layer of inorganic can form in the mode of in-situ deposition, therefore comparatively simplify than known method.
Description of drawings
Fig. 1 is the equipment schematic diagram according to the formation low dielectric material layer of a preferred embodiment of the present invention;
Fig. 2 A to Fig. 2 E is the flow process generalized section that forms conductive structure in low dielectric material layer according to a preferred embodiment of the present invention.
Indicate explanation:
102,104: reative cell 106: carrier gas
108: raw material 110: inorganic reaction gas
112: cooling shaft 114,120: pump
116: coil 118: electrode
126: wafer 128: the magnetic field supply
130: cooler 132,134: radio-frequency power supply supply
142,144: network adaptation 136: heater
200: 202: the first dielectric layers of substrate
204: 206: the second dielectric layers of low dielectric material layer
208: photoresist layer 210,212,214: opening
216: conductive layer
Embodiment
Shown in Figure 1, it illustrates and is the equipment schematic diagram according to the formation low dielectric material layer of a preferred embodiment of the present invention; Shown in Fig. 2 A to Fig. 2 E, it illustrates and is the flow process generalized section that forms conductive structure in low dielectric material layer according to a preferred embodiment of the present invention.
Please earlier with reference to Fig. 2 A, at first form one first dielectric layer 202 in a substrate 200, wherein first dielectric layer 202 is an inorganic layer, and it is used for improving the adhesion between substrate 200 and the follow-up formed organic material layer.In the present embodiment, the material of first dielectric layer 202 for example is silica or silicon nitride, and its thickness for example is 500 dust to 1500 dusts.
Then, on first dielectric layer 202, form a low dielectric material layer 204, wherein low dielectric material layer 204 is an organic material layer, and more comprise in the low dielectric material layer 204 of organic material and be doped with an inorganic material, by low dielectric material layer 204 and the adhesion between first dielectric layer 202 to improve organic material, and the low dielectric material layer 204 of raising organic material and the adhesion between the follow-up inorganic layer that is formed on the low dielectric material layer 204.In the present embodiment, the material of low dielectric material layer 204 for example is the high molecular polymer of low-k, and its thickness for example is 6000 dust to 40000 dusts.
Afterwards, form one second dielectric layer 206 on low dielectric material layer 204, wherein second dielectric layer 206 is an inorganic layer, and the thickness of second dielectric layer 206 is thick than the thickness of first dielectric layer 202, its follow-up usefulness that is used as a mask layer.In the present embodiment, the material of second dielectric layer 206 for example is silica or silicon nitride, and its thickness for example is 2500 dust to 3500 dusts.
In the present invention, first dielectric layer 202, low dielectric material layer 204 and second dielectric layer 206 are formed in the mode of an in-situ deposition, and the method for its formation for example is a plasma enhanced chemical vapor deposition method (PECVD), and the equipment of this plasma enhanced chemical vapor deposition as shown in Figure 1.
Please refer to Fig. 1, the raw material 108 that forms low dielectric material layer 204 is placed in the reative cell 102.Raw material 108 for example is that (bis-benzocyclobuten BCB) waits the Organic Ingredients of other low-k for two-paraxylene (di-para-xylylene) or two-benzocyclobutane in the present embodiment.To be example describing it in detail with the formed low dielectric material layer 204 of two-paraxylene in the present embodiment, but be not in order to limit the present invention.
Then, treat that two-paraxylene 108 is heated (150 degree Celsius approximately) and evaporates into after the gaseous state, the drive that sees through carrier gas 106 just can with pair-gas of paraxylene is sent in the reative cell 104.The temperature of reative cell 104 is about 650 degree Celsius, when the gas of two-paraxylene under the temperature of 650 degree Celsius, just can resolve into monomer (Monomer) form, and form paraxylene (para-xylylene) by the binary form.Afterwards, the paraxylene monomer just can feed in the plasma-reaction-chamber 100 by an input pipe fitting, to carry out deposition reaction.
In this equipment, connect on the pipe fitting of each reative cell many valves are installed, whether with the feeding of control gaseous.In addition, also be connected with another pipeline on the pipe fitting between reative cell 104 and the plasma-reaction-chamber 100, this pipeline is used for useless waste gas is directed in the cooling shaft 112, and wherein cooling shaft 112 is connected with a pump 114, in order to waste gas is evacuated in the cooling shaft 112.Because in a single day paraxylene gas reduce to ambient temperature when following, just can be transformed into macromolecule (Polymer) solid-state form, therefore all must be on each reative cell and pipeline by heater 136 temperature is remained on certain temperature, to avoid xylylene po1ymer (parylene) attached on the tube wall.Simultaneously, when desire is discharged paraxylene waste gas, just can utilize pump 114 to pump it to cooling shaft 112, and the discarded solid-state xylylene po1ymer (parylene) of inciting somebody to action collect.
In this equipment, more comprise and dispose an inorganic reaction gas reaction chamber 110, and the inorganic reaction gas in the reative cell 110 can be imported pipe fitting by another and feeds to plasma-reaction-chamber 100.In the present embodiment, inorganic reaction gas comprises SiH
4, N
2, O
2, NH
3And Ar.
In this this equipment, also comprise a coil 116, a radio-frequency power supply supply 132 that is connected with coil 116 and and be configured in a network adaptation 142 between coil 116 and the radio-frequency power supply supply 132.In addition, also comprise an electrode 118, a radio-frequency power supply supply 134 that is connected with electrode 118 and be configured in electrode 118 and radio-frequency power supply supply 134 between a network adaptation 144.By above-mentioned device, just can in plasma-reaction-chamber 100, produce plasma, make the reacting gas that is fed carry out the plasma enhanced chemical vapor deposition reaction, and film is amassed in Shen on wafer 126.
In addition, more dispose a magnetic field supply 128, providing a magnetic field in plasma-reaction-chamber 100, by to improve the collision frequency of charged particle in the both sides of plasma-reaction-chamber 100.And dispose a cooler 130 in beneath also the comprising of wafer 100, in order to the temperature of control wafer 126, and then the speed of the deposition reaction on the control wafer 126.And dispose a pump 120 under whole plasma reactor 100, so that the pressure in the plasma-reaction-chamber 100 remains on an environment under low pressure.
Therefore, utilize depositing device of the present invention when forming first dielectric layer 202, low dielectric material layer 204 and second dielectric layer 206 (shown in Fig. 2 A), be by an input pipe fitting inorganic reaction gas in the reative cell 110 to be fed to plasma-reaction-chamber 100 earlier, on wafer 126, to form first dielectric layer 202.Afterwards, feed to plasma-reaction-chamber 100 by the Organic Ingredients gas of another input pipe fitting again, on first dielectric layer 202, to form low dielectric material layer 204 low-k in the reative cell 104.When forming low dielectric material layer 204, more can be by feeding inorganic material in the reative cell 110, so that low dielectric material layer 204 is doped with inorganic material.Continue it, again the inorganic reaction gas in the reative cell 110 is fed to plasma-reaction-chamber 100, on low dielectric material layer 204, to form second dielectric layer 206.
Therefore, utilize equipment of the present invention mode with in-situ deposition when forming first dielectric layer 202, low dielectric material layer 204 and second dielectric layer 206 to form, and in the low dielectric material layer 204 of organic material, more can be doped into inorganic material.
Continue it, please continue A, after forming first dielectric layer 202, low dielectric material layer 204 and second dielectric layer 206, on second dielectric layer 206, form a photoresist layer 208 of patterning, expose the predetermined opening part that forms with reference to Fig. 2.
Then, please refer to Fig. 2 B, is that a mask carries out one first etching process with photoresist layer 208, with patterning second dielectric layer 206, and forms one first opening 210.
Afterwards, please refer to Fig. 2 C, continuing with the photoresist layer 208 and second dielectric layer 206 is that a mask carries out one second etching process, with patterning low dielectric material layer 204, and forms one second opening 212.In the present invention, because low dielectric material layer 204 is similarly organic material with photoresist layer 208, therefore when patterning low dielectric material layer 204, photoresist layer 208 can't be resisted the erosion of second etching process fully.Yet, because second dielectric layer 206 that is formed on the low dielectric material layer 204 is an inorganic layer, therefore after photoresist layer 208 is removed in the second etching process process, just can continue second dielectric layer 206 as a mask layer, and second opening 212 can be formed smoothly.
Continuing it, please refer to Fig. 2 D, is that a mask carries out one the 3rd etching process with second dielectric layer 206, with patterning first dielectric layer 202, and forms the 3rd opening 214, and exposes substrate 200.Wherein, because the thickness of second dielectric layer 206 is thick than the thickness of first dielectric layer 202, though first dielectric layer 206 and second dielectric layer 202 equally all are the inorganic layers, but because the thicker event of the thickness of second dielectric layer 206, therefore second dielectric layer 206 still has enough anti-etching abilities so that the 3rd opening 214 can form smoothly.
Then, please refer to Fig. 2 E, in the 3rd opening 214, insert a conductive layer 216, to form a conductive structure.The method of wherein inserting conductive layer 216 in the 3rd opening 214 at first deposits one deck conductive material layer (not illustrating) and fills up the 3rd opening 214 above substrate 200, utilize an etch-back manufacture craft or a cmp manufacture craft to remove unnecessary conductive material layer afterwards again, come out up to second dielectric layer 206.
In the present invention, first dielectric layer 202, low dielectric material layer 204 and second dielectric layer 206 all are the dielectric layers as insulation usefulness, therefore first dielectric layer 202 that is used as adhesion layer all is a dielectric material with second dielectric layer 206 that is used as mask layer 206, just can not influence the insulation effect of dielectric layer.In addition, owing to form first dielectric layer 202 of inorganic between low dielectric material layer 204 of the present invention and the substrate 200, therefore can improve the adhesion between substrate 200 and the low dielectric material layer 204.And the present invention's inorganic material of mixing in low dielectric material layer 204 can make the adhesion between low dielectric material layer 204 and first dielectric layer, 202/ second dielectric layer 206 better.In addition, utilize depositing device of the present invention can to form in the mode of in-situ deposition, therefore can improve the comparatively loaded down with trivial details shortcoming of manufacture craft in the known method to form first dielectric layer 202, low dielectric material layer 204 and second dielectric layer 206.
Comprehensive the above, the present invention has following advantage:
1. because the present invention is formed with a dielectric layer (inorganic) between low dielectric material layer (organic material) and substrate, therefore can improve adhesion between the two.
2. because organic material layer of the present invention and inorganic layer can form in the mode of in-situ deposition, therefore comparatively simplify than known method.
Though the present invention with preferred embodiment openly as above; right its is not in order to limiting the present invention, anyly is familiar with this operator, without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention defines and is as the criterion when looking claims.
Claims (16)
1. method that forms conductive structure in low dielectric material layer is characterized in that: comprising:
In a substrate, form one first dielectric layer;
On this first dielectric layer, form a low dielectric material layer;
Utilize a plasma enhanced chemical vapor deposition board, on this low dielectric material layer, form one second dielectric layer, wherein this first dielectric layer, this low dielectric material layer and this second dielectric layer are formed with an in-situ deposition manufacture craft, and the step of this board running comprises:
One first inorganic reaction gas is fed in the plasma reative cell, to form this first dielectric layer;
One organic reaction gas is fed in this plasma reative cell, forming this low dielectric material layer, and when forming this low dielectric material layer, also comprise and mix an inorganic material in this low dielectric material layer; And
One second inorganic reaction gas is fed in this plasma reative cell, to form this second dielectric layer;
Carry out a photoetching process,, expose this substrate in this second dielectric layer, this low dielectric material layer and this first dielectric layer, to form an opening; And
In this opening, insert a conductive layer, to form a conductive structure.
2. the method that forms conductive structure in low dielectric material layer as claimed in claim 1, it is characterized in that: the material of this first dielectric layer comprises silicon nitride or silica.
3. the method that forms conductive structure in low dielectric material layer as claimed in claim 1, it is characterized in that: the material of this second dielectric layer comprises nitration case or silica.
4. the method that forms conductive structure in low dielectric material layer as claimed in claim 1, it is characterized in that: the material of this low dielectric material layer is an organic material.
5. the method that forms conductive structure in low dielectric material layer as claimed in claim 1, it is characterized in that: the thickness of this second dielectric layer is greater than the thickness of this first dielectric layer.
6. the method that forms conductive structure in low dielectric material layer as claimed in claim 1, it is characterized in that: the thickness of this first dielectric layer is 500 dust to 1500 dusts.
7. the method that forms conductive structure in low dielectric material layer as claimed in claim 1, it is characterized in that: the thickness of this low dielectric material layer is 6000 dust to 40000 dusts.
8. the method that forms conductive structure in low dielectric material layer as claimed in claim 1, it is characterized in that: the thickness of this second dielectric layer is 2500 dust to 3500 dusts.
9. method that forms conductive structure in low dielectric material layer is characterized in that: comprising:
In a substrate, form one first dielectric layer;
On this first dielectric layer, form a low dielectric material layer, and when forming this low dielectric material layer, also comprise and mix an inorganic material in this low dielectric material layer;
On this low dielectric material layer, form one second dielectric layer, utilize a plasma enhanced chemical vapor deposition board, this first dielectric layer, this low dielectric material layer and this second dielectric layer are formed with an in-situ deposition manufacture craft, and the step of this board running comprises:
One first inorganic reaction gas is fed in the plasma reative cell, to form this first dielectric layer;
One organic reaction gas is fed in this plasma reative cell, forming this low dielectric material layer, and when forming this low dielectric material layer, also comprise and mix an inorganic material in this low dielectric material layer; And
One second inorganic reaction gas is fed in this plasma reative cell, to form this second dielectric layer;
On this second dielectric layer, form a photoresist layer;
With this photoresist layer is that a mask carries out one first etching process, with this second dielectric layer of patterning, and forms one first opening;
With this photoresist layer and this second dielectric layer is that a mask carries out one second etching process, with this low dielectric material layer of patterning, and forms one second opening;
With this second dielectric layer is that a mask carries out one the 3rd etching process, with this first dielectric layer of patterning, and forms one the 3rd opening, and exposes this substrate;
Insert a conductive layer at the 3rd opening, to form a conductive structure.
10. the method that forms conductive structure in low dielectric material layer as claimed in claim 9, it is characterized in that: the material of this first dielectric layer comprises silicon nitride or silica.
11. the method that forms conductive structure in low dielectric material layer as claimed in claim 9, it is characterized in that: the material of this second dielectric layer comprises silicon nitride or silica.
12. the method that forms conductive structure in low dielectric material layer as claimed in claim 9, it is characterized in that: the material of this low dielectric material layer is an organic material.
13. the method that forms conductive structure in low dielectric material layer as claimed in claim 9, it is characterized in that: the thickness of this second dielectric layer is greater than the thickness of this first dielectric layer.
14. the method that forms conductive structure in low dielectric material layer as claimed in claim 9, it is characterized in that: the thickness of this first dielectric layer is 500 dust to 1500 dusts.
15. the method that forms conductive structure in low dielectric material layer as claimed in claim 9, it is characterized in that: the thickness of this low dielectric material layer is 6000 dust to 40000 dusts.
16. the method that forms conductive structure in low dielectric material layer as claimed in claim 9, it is characterized in that: the thickness of this second dielectric layer is 2500 dust to 3500 dusts.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021311137A CN100397611C (en) | 2002-10-09 | 2002-10-09 | Method for forming conductive structure in low dielectric material layer |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB021311137A CN100397611C (en) | 2002-10-09 | 2002-10-09 | Method for forming conductive structure in low dielectric material layer |
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| CN1489196A CN1489196A (en) | 2004-04-14 |
| CN100397611C true CN100397611C (en) | 2008-06-25 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US7118968B2 (en) * | 2004-08-17 | 2006-10-10 | Macronix International Co., Ltd. | Method for manufacturing interpoly dielectric |
| DE102004062312B3 (en) | 2004-12-23 | 2006-06-01 | Infineon Technologies Ag | Piezoelectric resonator, e.g. in mobile telephones, has a piezoelectric layer with a first resonance frequency temperature coefficient with a first polarity sign and electrodes |
| CN108807262B (en) * | 2017-05-05 | 2022-04-22 | 联芯集成电路制造(厦门)有限公司 | Method for improving interface between low dielectric material layer and silicon oxynitride layer |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US211061A (en) * | 1878-12-17 | Improvement in fluting-machines | ||
| US6060404A (en) * | 1997-09-05 | 2000-05-09 | Advanced Micro Devices, Inc. | In-situ deposition of stop layer and dielectric layer during formation of local interconnects |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US211061A (en) * | 1878-12-17 | Improvement in fluting-machines | ||
| US6060404A (en) * | 1997-09-05 | 2000-05-09 | Advanced Micro Devices, Inc. | In-situ deposition of stop layer and dielectric layer during formation of local interconnects |
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