CN100397120C - 包括中空波导和mems反射元件的光路由装置 - Google Patents

包括中空波导和mems反射元件的光路由装置 Download PDF

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Publication number
CN100397120C
CN100397120C CNB2004800078212A CN200480007821A CN100397120C CN 100397120 C CN100397120 C CN 100397120C CN B2004800078212 A CNB2004800078212 A CN B2004800078212A CN 200480007821 A CN200480007821 A CN 200480007821A CN 100397120 C CN100397120 C CN 100397120C
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CN
China
Prior art keywords
light
optical
mems
hollow waveguide
waveguide
Prior art date
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Expired - Fee Related
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CNB2004800078212A
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English (en)
Chinese (zh)
Other versions
CN1764854A (zh
Inventor
R·M·詹金斯
M·E·麦克尼
D·J·库姆斯
J·麦奎兰
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Qinetiq Ltd
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Qinetiq Ltd
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Publication of CN1764854A publication Critical patent/CN1764854A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3598—Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
  • Micromachines (AREA)
  • Use Of Switch Circuits For Exchanges And Methods Of Control Of Multiplex Exchanges (AREA)
CNB2004800078212A 2003-03-22 2004-03-22 包括中空波导和mems反射元件的光路由装置 Expired - Fee Related CN100397120C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0306638.8 2003-03-22
GBGB0306638.8A GB0306638D0 (en) 2003-03-22 2003-03-22 Optical routing device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNA2008100952038A Division CN101334503A (zh) 2003-03-22 2004-03-22 包括中空波导和mems反射元件的光路由装置

Publications (2)

Publication Number Publication Date
CN1764854A CN1764854A (zh) 2006-04-26
CN100397120C true CN100397120C (zh) 2008-06-25

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Family Applications (2)

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CNB2004800078212A Expired - Fee Related CN100397120C (zh) 2003-03-22 2004-03-22 包括中空波导和mems反射元件的光路由装置
CNA2008100952038A Pending CN101334503A (zh) 2003-03-22 2004-03-22 包括中空波导和mems反射元件的光路由装置

Family Applications After (1)

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CNA2008100952038A Pending CN101334503A (zh) 2003-03-22 2004-03-22 包括中空波导和mems反射元件的光路由装置

Country Status (7)

Country Link
EP (1) EP1606658B1 (https=)
JP (1) JP4478145B2 (https=)
CN (2) CN100397120C (https=)
AT (1) ATE550686T1 (https=)
CA (1) CA2518070A1 (https=)
GB (1) GB0306638D0 (https=)
WO (1) WO2004083916A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7499615B2 (en) * 2007-08-01 2009-03-03 Hewlett-Packard Development Company, L.P. System and methods for routing optical signals
US8811778B2 (en) 2007-08-01 2014-08-19 Hewlett-Packard Development Company, L.P. Systems and method for routing optical signals
JP2010210782A (ja) * 2009-03-09 2010-09-24 Ricoh Co Ltd マイクロミラー装置
JP5183575B2 (ja) * 2009-06-10 2013-04-17 日本電信電話株式会社 中空光導波路における磁場を用いた光路長調整方法及び装置
US8885991B2 (en) * 2009-12-21 2014-11-11 Hewlett-Packard Development Company, L.P. Circuit switched optical interconnection fabric
CN102483497B (zh) 2010-01-06 2014-06-04 惠普发展公司，有限责任合伙企业 光学互连件
EP2810383A4 (en) 2012-01-31 2015-08-05 Hewlett Packard Development Co OPTICAL ARCHITECTURES, OPTICAL DISTRIBUTION MATRICES AND METHOD FOR THE PRODUCTION OF OPTICAL STRUCTURES
US20130272651A1 (en) * 2012-04-11 2013-10-17 Terrel Morris Routing optical signals
WO2013154553A1 (en) * 2012-04-11 2013-10-17 Hewlett-Packard Development Company, L.P. Routing optical signals
CN104216052A (zh) * 2013-05-29 2014-12-17 鸿富锦精密工业（深圳）有限公司 光信号传输装置
CN107678098B (zh) 2016-08-01 2019-09-03 华为技术有限公司 光开关和光交换系统
CN114815274B (zh) * 2022-04-28 2023-02-14 厦门大学 一种局部可控近场的光学旋涡生成系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6212314B1 (en) * 1998-07-08 2001-04-03 Lucent Technologies Integrated opto-mechanical apparatus
US6501869B1 (en) * 2000-03-20 2002-12-31 George Mason University Optical switching system
CN1402070A (zh) * 2002-09-30 2003-03-12 华中科技大学 温度不敏感型阵列波导光栅

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5387746A (en) * 1977-01-13 1978-08-02 Nec Corp Optical path changer of hollow waveguide
US6839478B2 (en) * 2001-05-01 2005-01-04 Terraop Ltd. Optical switching system based on hollow waveguides

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6212314B1 (en) * 1998-07-08 2001-04-03 Lucent Technologies Integrated opto-mechanical apparatus
US6501869B1 (en) * 2000-03-20 2002-12-31 George Mason University Optical switching system
CN1402070A (zh) * 2002-09-30 2003-03-12 华中科技大学 温度不敏感型阵列波导光栅

Also Published As

Publication number Publication date
ATE550686T1 (de) 2012-04-15
JP4478145B2 (ja) 2010-06-09
GB0306638D0 (en) 2003-04-30
EP1606658A1 (en) 2005-12-21
CN101334503A (zh) 2008-12-31
EP1606658B1 (en) 2012-03-21
CN1764854A (zh) 2006-04-26
WO2004083916A1 (en) 2004-09-30
CA2518070A1 (en) 2004-09-30
JP2006520925A (ja) 2006-09-14

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Granted publication date: 20080625

Termination date: 20140322