CN100394450C - Spin valve giant magnet resistor and magnetic head sensor of bank-note tester with said giant magnet resistor - Google Patents
Spin valve giant magnet resistor and magnetic head sensor of bank-note tester with said giant magnet resistor Download PDFInfo
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- CN100394450C CN100394450C CNB021476950A CN02147695A CN100394450C CN 100394450 C CN100394450 C CN 100394450C CN B021476950 A CNB021476950 A CN B021476950A CN 02147695 A CN02147695 A CN 02147695A CN 100394450 C CN100394450 C CN 100394450C
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Abstract
The present invention discloses a spin valve giant magnet resistor which comprises a pinning layer, a pinned layer, a nonmagnetic spacing layer and a free layer, wherein the free layer comprises nickel iron molybdenum manganese alloy (NiFeMoMn) materials. The present invention also provides a magnetic head sensor of a money checker. The present invention comprises an electrode and a magnetic sensor, wherein the magnetic sensor is the spin valve giant magnet resistor. Because the NiFeMoMn materials are adopted to replace NiFe in the free layer, spin valve giant magnet materials with low coercive force are obtained. The NiFeMoMn materials meet the special requirements of a magnetic field sensor, and can be used for manufacturing the magnetic head sensor of the money checker and other magnetic field sensors. The spin valve giant magnet resistor has high sensitivity, can solve the problem of low finished product rate of the magnetic sensor made of compound semiconductor materials, and can reduce composition parts in an added circuit, and thus, the performance of the magnetic head sensor of the money checker is further improved, the production efficiency is improved, and the production cost is lowered.
Description
Technical field:
The present invention relates to a kind of Spin Valve giant magnetoresistance and contain the cash inspecting machine magnetic head sensor of this giant magnetoresistance.
Background technology:
At present, common cash inspecting machine magnetic head has two classes.The inductive type Magnetic Sensor of the similar head that one class is made up of coil and iron core.Its principle of work is: when the magnetisable material on the bank note passes through the gathering throat of magnetic head, cause the variation in magnetic field in the magnetic head iron core, thereby in the coil of magnetic head, produce induced electromotive force, induced electromotive force is judged to have or not magnetic signal to carry out false distinguishing to bank note through amplifying the back as magnetic signal output.The Decree of Patent Office of China, the patent No. is 92212125.7 " currency Discr. "; The patent No. is 93216994.5 " pen type counterfeit money recognizer "; The patent No. is 93229879.6 " miniature difunctional counterfeit money recognizer ", has all put down in writing the technical scheme of this class magnetic head detection bank note magnetisable material, and is not high but their disadvantage is sensitivity.The patent No. is 00211346.5 " paper money Magnetic Sensor ", the cash inspecting machine head technology scheme that provides a kind of magnetizing apparatus to add the remanent magnetism detecting device.Bank note is earlier through magnetizing apparatus, again by the remanent magnetism detecting device.Because magnetizing apparatus has improved the magnetization of magnetisable material on the bank note, thereby improved the confidence level of false distinguishing.But the shortcoming of this design proposal is: increased magnetizing apparatus on the one hand, made the volume of cash inspecting machine magnetic head increase, improved technical complexity; This scheme can not really improve the sensitivity of measuring magnetic signal on the other hand.
Another kind of is the Magnetic Sensor of being made by compound semiconductor materials.It has two kinds of forms, and the first is utilized the Magnetic Sensor of Hall effect.This Hall element is to utilize general semiconductor forming technique to form semiconductive thin film on silicon chip, and semiconductor material can be a kind of of InAs, GaAs, InGaAs, InSb, InGaSb, and that commonly used is InSb.This class principle of sensors is: when electric current flows through conductor, if have external magnetic field to exist,, can produce an electric potential difference perpendicular to magnetic field and sense of current according to Hall effect, this electric potential difference is judged to have or not magnetic signal to carry out false distinguishing to bank note through amplifying the back as magnetic signal output.The major defect of this class sensor is: (1) is because the electron mobility of semiconductor material is little, so Magnetic Sensor is low to the sensitivity in magnetic field; (2) be subject to the influence of external stress, the sensitivity in magnetic field is changed; (3) influenced by ambient temperature big, the Magnetic Sensor of semiconductor PN type for example, when being higher than 125 degrees centigrade, it is unstable that work becomes, even can not work fully.It two is magnetoelectricity resistance type Magnetic Sensors.This magnetoresistive element is that InSb is cut into slices, be bonded on glass then, make it thickness with machinery and chemical method again and become 5 to 10 microns, insert metal electrode and metal boundary with the way of photoetching at last, become a complete magnetoresistive element by predetermined frame line shaping.Its shortcoming is a complex manufacturing technology, and yield rate is low, and InSb material temperature effect is obvious, and the remolding sensitivity Hall element in magnetic field is increased, and reaches 0.2%/Oe, but still is in lower level.Therefore the Magnetic Sensor of this compounds semiconductor material is when practical application, usually to add circuit and other devices of a complexity, eliminating the influence of external stress and temperature to Magnetic Sensor sensitivity, referring to the Decree of Patent Office of China, the patent No. is 98802893.X " Magnetic Sensor ";
Therefore, concerning the cash inspecting machine magnetic head, be desirable to provide a kind of like this Magnetic Sensor: it has high magnetic field sensitivity, and sensitivity seldom is subjected to external stress and Temperature Influence.Just because of the discovery of giant magnetoresistance effect, and feasible the addressing this problem of development of giant magnetic resistor material becomes possibility in recent years.
Usually magneto-resistor is the variation of the resistivity of material that caused by magnetic field, and quantificational expression is:
Wherein R is R (O) or R (H), adopts R (O) definition in the patent specification.The MR value in the sensitivity S unit of being defined as magnetic field.Promptly
Wherein, HS is a saturation field, and Δ H is the work magnetic field range.To anisotropic magnetoresistance (AMR), though its MR is bigger, because saturation field is generally higher, sensitivity is not high.
1988, Paris, FRA College Physics scholar Albert Fert etc. are in replacing the made magnetic metal multilayer film of overlapping Armco magnetic iron film and non magnetic chromium film (Fe/Cr), when the thickness of chromium layer is 9 dusts and be in antiferromagnetic coupling between the adjacent iron layer this moment, the resistance that is surprised to find that this structured material can reduce by more than 50 in magnetic field unexpectedly.Big rate of change like this is tens times of the former amr effect of finding in the NiFe alloy.So, be called for short GMR with its called after giant magnetoresistance (Giant Magneto Resistance) effect.So-called antiferromagnetism is coupled in other words, and the magnetic moment of adjacent ferromagnetic (M) interacts by the Cr layer and is in the antiparallel distribution.The magnetic moment that externally-applied magnetic field at first influences adjacent magnetic distributes, and the angle between the adjacent magnetic moment is changed with externally-applied magnetic field.The change of angle just causes the variation of resistance (R) with externally-applied magnetic field (H) between the adjacent just magnetic moment.The physical mechanism of GMR effect is to originate from electron spin dependent scattering at the interface.
After the giant magnetoresistance phenomenon is found, invention Spin Valve (SV) type multi-layer film structure again in 1992, simple spin valve structure is made up of pinning layer, nailed layer, nonmagnetic spacer-layer, free layer etc.Wherein pinning layer is that inverse ferric magnetosphere (AFM), nailed layer and free layer all are that ferromagnetic layer (FM), nonmagnetic spacer-layer (NM) generally are made of non-magnetic materials such as copper, gold, silver.If pinning layer is called top spin valve above nonmagnetic spacer-layer; If pinning layer is called end Spin Valve below nonmagnetic spacer-layer.Nailed layer also can be a FM/NM/FM sandwich structure, since antiparallel in this moment nailed layer near direction of magnetization and external magnetic field (pinning field) direction in the ferromagnetic layer of nonmagnetic spacer-layer, so be called the antiparallel spin valve.The MR of typical Spin Valve material is about 4～6%, and resistance variations is basically near null field.Because its magnetic field sensitivity height (than highly sensitive 1～2 order of magnitude of semiconductor magnetic resistance type Magnetic Sensor), Heat stability is good, preparation is simple and be widely used in the magnetic recording systems such as playback head, random access memory of computer hard disc driver, makes storage density bring up to tens Gb/ square inches.But the Spin Valve giant magnetic resistor material is applied to cash inspecting machine magnetic head sensor, and the check forge or true or paper money does not at home and abroad appear in the newspapers at present as yet.
General spin valve structure, free layer is made up of materials such as CoFe, NiFe, and coercive force is higher.The Spin Valve of this class material is mainly used in the playback head of computer hard disc driver, because reading head is very not high to coercitive requirement with pulse mode work, if but being used for the coercitive influence of cash inspecting machine sensor just must consider.
Summary of the invention:
Purpose of the present invention is exactly in order to overcome the above problems, a kind of Spin Valve giant magnetoresistance is provided and contains the cash inspecting machine magnetic head sensor of this giant magnetoresistance, reduce the coercive force of Spin Valve giant magnetoresistance, and increase cash inspecting machine magnetic head transducer sensitivity height, yield rate, it is low to reduce cost.
For achieving the above object, the present invention proposes a kind of Spin Valve giant magnetoresistance, comprises pinning layer, nailed layer, nonmagnetic spacer-layer and free layer, and described free layer contains the NiFeMoMn material.And a kind of cash inspecting machine magnetic head sensor, it comprises electrode and Magnetic Sensor, it is characterized in that: described Magnetic Sensor is the Spin Valve giant magnetoresistance, and this Spin Valve giant magnetoresistance comprises pinning layer, nailed layer, nonmagnetic spacer-layer and free layer, and described free layer contains the ferronickel molybdenum manganese alloy.
Owing to adopted above scheme, we have selected ferronickel molybdenum manganese alloy (NiFeMoMn for use, domestic a plurality of production of units) material has replaced the NiFe in the free layer, has obtained the Spin Valve giant magnetic resistor material of low-coercivity, has promptly satisfied the special requirement of magnetic field sensor.This Spin Valve giant magnetoresistance can be used for making cash inspecting machine magnetic head sensor and other magnetic field sensors.Because the Spin Valve giant magnetoresistance is highly sensitive, can reduce because the low problem of compound semiconductor materials Magnetic Sensor yield rate can also be cut down the constituent part in the adjunct circuit, therefore can further improve the performance of cash inspecting machine magnetic head, enhance productivity, reduce production costs.
Description of drawings:
Fig. 1 is simple spin valve structure synoptic diagram;
The magnetic hysteresis loop performance diagram of Fig. 2 Spin Valve giant magnetic resistor material of the present invention;
Fig. 3 a is cash inspecting machine magnetic head principle of sensors figure of the present invention;
Fig. 3 b is the output detection signal oscillogram of cash inspecting machine magnetic head sensor of the present invention;
Fig. 4 is the synoptic diagram of first kind of embodiment of cash inspecting machine magnetic head sensor of the present invention;
Embodiment:
Also the present invention is described in further detail in conjunction with the accompanying drawings below by specific embodiment.
Be illustrated in figure 1 as spin valve structure of the present invention, it comprises pinning layer 1, nailed layer 2, nonmagnetic spacer-layer 3 and free layer 4.In the free layer of spin valve structure, used the ferromagnetic material NiFeMoMn of low-coercivity, thereby obtained a kind of Spin Valve giant magnetic resistor material that has than low-coercivity.It can satisfy the special requirement of magnetic field sensor.This material can be used for making cash inspecting machine magnetic head sensor and other magnetic field sensors.At present, do not see the report that in spin valve structure, uses the NiFeMoMn material in the world as yet.
Be illustrated in figure 2 as the magnetic hysteresis loop performance diagram of Spin Valve giant magnetic resistor material of the present invention.This material magnetic field sensitivity is up to 7%/Oe, and coercive force has obvious reduction than the Spin Valve that free layer contains CoFe, NiFe material, is the ideal material of making Magnetic Sensor; Spin Valve was all obtained better effects at the bottom of the present invention was used for top spin valve, end Spin Valve, antiparallel top spin valve and antiparallel.
Shown in Fig. 3 a, cash inspecting machine magnetic head sensor comprises first measuring resistance (R1) and the second measuring resistance R2, and first measuring resistance (R1) and the second measuring resistance R2 are the Spin Valve giant magnetoresistance, and the distance between the two can be selected as requested.As shown in Figure 4, in order to reduce coercive force and effective characteristic of adjusting output signal curve, first measuring resistance (R1), the second measuring resistance R2 are composed in parallel by two identical magnetic resistance bars 5,6,7,8 respectively, and first measuring resistance (R1) and the second measuring resistance R2 be symmetry structurally, and promptly magnetic resistance bar number and shape are identical.The width of magnetic resistance bar is 1～90 micron, and the spacing 9,11 between the two magnetic resistance bars in parallel is 1～100 micron.The spacing 10 of the contiguous magnetic resistance bar of first measuring resistance (R1), the second measuring resistance R2 is 3 microns～1 millimeter.
Replace one wide can play the coercitive effect of reduction with a plurality of fillets.But, select thinner magnetic resistance bar can reduce the sensitivity to magnetic field of magneto-resistor.Therefore, take all factors into consideration width and the quantity of selecting magnetic resistance bar in the measuring resistance (R1) (or R2);
The width of the spacing 9,11 of magnetic resistance bar is relevant with two factors among first measuring resistance (R1) or the second measuring resistance R2, and one is the yardstick of measured object, and another is the width of magnetic resistance bar itself.In general, in order to guarantee the sensitivity of measuring resistance, to the testee of micro-scale, the yardstick of the spacing 9,11 of magnetic resistance bar should be suitable with the yardstick of testee; To the testee of macro-scale, the yardstick of the spacing 9,11 of magnetic resistance bar should be with suitable by the width of magnetic resistance bar.
For the present invention, first measuring resistance (R1) or/and the second measuring resistance R2 also can compose in parallel by plural magnetic resistance bar, the size of magnetic resistance bar and spacing and do not require in full accord, as long as (R1) satisfy symmetric relation (being that magnetic resistance bar number and shape are identical) with the structure of R2.
Because invention cash inspecting machine magnetic head sensor is made by the Spin Valve giant magnetic resistor material.This invention has overcome the shortcoming of the inductance type magnetic head or the compound semiconductor Magnetic Sensor of traditional cash inspecting machine, have highly sensitive, Heat stability is good, be not subjected to extraneous stress influence, strong interference immunity, simple in structure firm, applicable to contactless or contact cash inspecting machine, both detection of dynamic can be used for, also Static Detection can be used for.
Shown in Fig. 3 a, the principle of work of the cash inspecting machine magnetic head sensor of making by Spin Valve giant magnetoresistance (GMR): when detected object has the magnetic mark thing, when it successively during the magnetic resistance bar of first measuring resistance (R1) by cash inspecting machine magnetic head sensor, the second measuring resistance R2, spacing 10 by suitable adjustment two magnetic resistance bars, produce a similar sinusoidal output signal at output terminal, shown in Fig. 3 b, this output signal can be judged the true and false of bank note through amplification, comparator circuit.Among Fig. 3 a, 12 is input end, and 13 is output terminal; Among Fig. 3 b, X is a displacement, and Y is an output voltage.
Fig. 4 is an embodiment, and the first measuring resistance R1 and the second measuring resistance R2 by two thinner magnetic resistance bars 5,6 and 7,8 parallel connections, see structure shown in Figure 4 respectively.The length and width of magnetic resistance bar equate that width is 6 microns, and the spacing 9,11 of two magnetic resistance bars equates to be 6 microns; The spacing 10 of two magnetic resistance bars that the first measuring resistance R1 and the second measuring resistance R2 are contiguous is 30 microns.
Claims (9)
1. a Spin Valve giant magnetoresistance comprises pinning layer, nailed layer, nonmagnetic spacer-layer and free layer, it is characterized in that: described free layer contains the ferronickel molybdenum manganese alloy.
2. Spin Valve giant magnetoresistance as claimed in claim 1 is characterized in that: described giant magnetoresistance is composed in parallel by two or more magnetic resistance bars.
3. Spin Valve giant magnetoresistance as claimed in claim 2 is characterized in that: described giant magnetoresistance magnetic resistance bar is two identical magnetic resistance bars; The width of magnetic resistance bar is 1～90 micron, and the spacing between the two magnetic resistance bars in parallel (9,11) is 1～100 micron.
4. Spin Valve giant magnetoresistance as claimed in claim 1 or 2 is characterized in that: described Spin Valve is a Spin Valve at the bottom of top spin valve, end Spin Valve, antiparallel top spin valve or the antiparallel
5. cash inspecting machine magnetic head sensor, comprise electrode and Magnetic Sensor, it is characterized in that: described Magnetic Sensor is the Spin Valve giant magnetoresistance, this Spin Valve giant magnetoresistance comprises pinning layer (1), nailed layer (2), nonmagnetic spacer-layer (3) and free layer (4), and described free layer contains the ferronickel molybdenum manganese alloy.
6. cash inspecting machine magnetic head sensor as claimed in claim 5 is characterized in that: described Spin Valve giant magnetoresistance comprises first measuring resistance (R1) and second measuring resistance (R2), and (10) at regular intervals between them.
7. cash inspecting machine magnetic head sensor as claimed in claim 6 is characterized in that: described first measuring resistance (R1) and second measuring resistance (R2) both one of or all compose in parallel and first measuring resistance by two or more magnetic resistance bars
(R1)
Structurally symmetrical with second measuring resistance (R2), promptly magnetic resistance bar number and shape are identical.
8. cash inspecting machine magnetic head sensor as claimed in claim 7, it is characterized in that: first measuring resistance (R1), second measuring resistance (R2) are composed in parallel by two identical magnetic resistance bars (5,6,7,8) respectively, the width of magnetic resistance bar is 1～90 micron, and the spacing between the two magnetic resistance bars in parallel (9,11) is 1～100 micron; First measuring resistance
(R1)
The spacing (10) of the contiguous magnetic resistance bar of second measuring resistance (R2) is 3 microns～1 millimeter.
9. as claim 5,6,7 or 8 described cash inspecting machine magnetic head sensors, it is characterized in that: described Spin Valve is a Spin Valve at the bottom of top spin valve, end Spin Valve, antiparallel top spin valve or the antiparallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021476950A CN100394450C (en) | 2002-10-26 | 2002-10-26 | Spin valve giant magnet resistor and magnetic head sensor of bank-note tester with said giant magnet resistor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021476950A CN100394450C (en) | 2002-10-26 | 2002-10-26 | Spin valve giant magnet resistor and magnetic head sensor of bank-note tester with said giant magnet resistor |
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| Publication Number | Publication Date |
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| CN1492383A CN1492383A (en) | 2004-04-28 |
| CN100394450C true CN100394450C (en) | 2008-06-11 |
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| CNB021476950A Expired - Fee Related CN100394450C (en) | 2002-10-26 | 2002-10-26 | Spin valve giant magnet resistor and magnetic head sensor of bank-note tester with said giant magnet resistor |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101004416B (en) * | 2007-01-16 | 2012-01-04 | 中山大学 | Method and system for detecting spin valve magnetic marked immunity biosensor array, and system |
| US11506732B2 (en) | 2010-10-20 | 2022-11-22 | Infineon Technologies Ag | XMR sensors with serial segment strip configurations |
| CN102901940B (en) * | 2012-10-26 | 2015-07-15 | 苏州大学 | Sensor element based on magneto-thermoelectric effect and implementation method thereof |
| CN111063796B (en) * | 2019-11-22 | 2021-10-15 | 西安交通大学 | Local strain controlled spin valve structure unit, device and control method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0612627A (en) * | 1992-06-25 | 1994-01-21 | Hitachi Ltd | Magneto-resistance effect type head |
| CN1124866A (en) * | 1994-07-26 | 1996-06-19 | 国际商业机器公司 | Spin valve magne toresistive sensor with free layer exchange biasing, process for making the sensor, and magnetic recording system using the sensor |
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2002
- 2002-10-26 CN CNB021476950A patent/CN100394450C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0612627A (en) * | 1992-06-25 | 1994-01-21 | Hitachi Ltd | Magneto-resistance effect type head |
| CN1124866A (en) * | 1994-07-26 | 1996-06-19 | 国际商业机器公司 | Spin valve magne toresistive sensor with free layer exchange biasing, process for making the sensor, and magnetic recording system using the sensor |
Non-Patent Citations (2)
| Title |
|---|
| 巨磁电阻材料的研究与应用. 钟喜春等.金属功能材料，第9卷第3期. 2002 * |
| 自旋阀型【NiFe/Cu/Co/Cu】多层膜的磁电阻、矫顽力和稳定性研究. 方瑞宜等.物理学报，第46卷第9期. 1997 * |
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