CN100391700C - Four freedom degree vacuum tuner - Google Patents
Four freedom degree vacuum tuner Download PDFInfo
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- CN100391700C CN100391700C CNB2005100958810A CN200510095881A CN100391700C CN 100391700 C CN100391700 C CN 100391700C CN B2005100958810 A CNB2005100958810 A CN B2005100958810A CN 200510095881 A CN200510095881 A CN 200510095881A CN 100391700 C CN100391700 C CN 100391700C
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- vacuum
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Abstract
The invention discloses a four-DOF vacuum tuner. It includes the vacuum chamber with transparent window and the tuning tools and controller installed in the vacuum chamber. Manage the controller out of the vacuum chamber, said tuning tools could make four degree-of-freedom movement in the vacuum chamber, and vacuum sealing devices are fixed on the controller to maintaining the vacuum chamber is vacuum; the invention simulates handiwork, the operator drives handrails out of the vacuum and operates the tuner making four degrees of freedom movement and completes the tuning process of the superconducting filter under the conditions of low-temperature and vacuum accurately and expediently.
Description
Technical field
The invention belongs to the vacuum engineering field, relate to a kind ofly under the cryogenic vacuum condition, superconductive microwave filter is implemented tuning device.
Background technology
Prefabricated many tuning screws to filters to test the time, are regulated the height of these screws on the shielding box cover of super conductive filter, just can finish the tuning work of wave filter.Yet the vacuum environment that refrigeration machine is strict, and tuning process comprises the motion of four frees degree at least, the problem that needs to solve is how to guarantee the four-degree-of-freedom motion and can keep vacuum state again.
Figure 1 shows that the schematic diagram that tuning support 1 moves on four-degree-of-freedom, in refrigeration machine vacuum (-tight) housing 5, be provided with cold head heat transfer plate 4, filter hut 3, tuning screwdriver 2 and tuning support 1, the tuning support 1 that is loaded with tuning screwdriver 2 should freely-movable on the xy plane, tuning screwdriver 2 not only can rotate freely but also can move along the Z axle, simulates the tuning action of staff with this.The difficulty of developing such device is: thus these translations and rotation all must must well seal various transmission devices at the spatial operation beyond the vacuum, definitely can not be owing to these motions are leaked gas.
Summary of the invention
The object of the present invention is to provide a kind of easy and simple to handle and in tuning process refrigeration machine can keep the four freedom degree vacuum tuner of strict vacuum environment.
For achieving the above object, a kind of four freedom degree vacuum tuner of the present invention, comprise the vacuum chamber that has transparent window and be arranged on vacuum chamber interior tuning instrument and control device, by at this control device of vacuum chamber external control, described tuning instrument can move by four-degree-of-freedom in vacuum chamber, and control device is provided with the vacuum sealing device of the vacuum state that keeps vacuum chamber.
Further, described tuning instrument is tuning screwdriver, and described control device comprises tuning support, motion, two dimensional motion driver and flexible shaft operation device, and this tuning screwdriver is installed on the tuning support; Motion links to each other with the two dimensional motion driver with tuning support respectively, and the flexible shaft operation device drives tuning screwdriver and makes movement in vertical direction and rotate around vertical line, and the two dimensional motion driver is controlled tuning support by motion and done the two dimensional surface motion.
Further, described tuning support comprises Executive Head assembly, Executive Head fixed arm, flexible axle and guide pipe, be provided with traveller in the Executive Head assembly, Executive Head fixed arm and guide pipe are installed on the executive module respectively, guide pipe is enclosed within on the flexible axle, the two ends of traveller link to each other with flexible axle with described tuning screwdriver respectively, and the other end of flexible axle links to each other with soft all operators.
Further, described motion comprises leading screw, gear train and x and y traversing guide; Wherein gear train is made up of two umbrella shape shape gears that are mutually 90 degree, and gear train links to each other with leading screw and described two-dimentional driver respectively, and leading screw passes described Executive Head fixed arm.
Further, described two-dimentional driver comprises interior rotating shaft, interior shaft sleeve, interior axle handle, outer shaft cover handle, outer shaft, anti-tube and outer shaft sleeve pipe; Wherein, interior axle handle and outer shaft cover are being arranged on described vacuum chamber outside, interior rotating shaft links to each other with interior axle handle, interior shaft sleeve rotates with interior rotating shaft and can be along the axial translation of interior rotating shaft, the end of interior shaft sleeve links to each other with described gear train, and this gear train changes interior rotating shaft into around described leading screw axial rotation around its axial rotation; Outer shaft cover handle is fixedlyed connected with outer shaft and can be rotated synchronously, and the outer shaft sleeve pipe is arranged in the outer shaft, and anti-rotation management and control system outer shaft sleeve pipe can only be along its axial translation; The end of outer shaft sleeve pipe is connected with the end of interior pivoted housing pipe.
Further, described flexible shaft operation device comprises flat handle, center-pole and flexible axle core, and wherein, flat handle is arranged on outside the described vacuum chamber, and an end of center-pole is fixed with flat handle, the other end links to each other with the flexible axle core, and the other end of flexible axle core links to each other with described traveller.
Further, described vacuum sealing device comprises the triple seal device, the first resealing device is for being provided with sealing ring on all rotating cylinders of described two-dimentional driver and described flexible shaft operation device, bull stick, the second resealing device comprises two vacuum adapters, a vacuum is taken over be used for being tightly connected two-dimentional driver and vacuum chamber, another vacuum is taken over be used for being tightly connected flexible axle controller and vacuum chamber, on two-dimentional driver and flexible shaft operation device, also be provided with the seal head that has the O circle, utilize the clip sealing between seal head and vacuum are taken over; The triple seal device is to utilize the sealing of O circle between vacuum adapter and the vacuum chamber.
Four freedom degree vacuum tuner of the present invention, the action of anthropomorphic dummy's hand tuning, the operator just can realize the motion of four frees degree of tuning instrument by maneuvering motion transmission handle vacuum chamber outside, the accurate tuning technology of finishing easily under vacuum, cryogenic conditions super conductive filter.
Description of drawings
Fig. 1 is the schematic diagram that tuning support moves on four-degree-of-freedom;
Fig. 2 is the structural representation of tuning support and motion;
Fig. 3 is the structural representation of the x direction transmission in the two-dimentional driver;
Fig. 4 is the structural representation of the y direction transmission in the two-dimentional driver;
Fig. 5 is the structural representation of flexible shaft operation device;
Fig. 6 is the installation diagram of tuning support;
Fig. 7 is the installation diagram of flexible shaft operation device;
Fig. 8 is two-dimentional driver installation diagram;
Fig. 9 is the general assembly drawing of tuning support and x, y motion;
Figure 10 is the general assembly drawing of four freedom degree vacuum tuner.
The specific embodiment
Four freedom degree vacuum tuner comprises the vacuum chamber that has transparent window and is arranged on the tuning screwdriver in the vacuum chamber and controls the control device that tuning screwdriver is done the four-degree-of-freedom motion, control device comprises tuning support, motion, two dimensional motion driver and flexible shaft operation device, the flexible shaft operation device drives tuning screwdriver and does vertical direction (Z axle) motion and rotate around vertical line (Z axle), and the two dimensional motion driver is controlled tuning support by motion and done two dimensional surface (XY axle) motion.
Shown in Figure 2, tuning support is made up of Executive Head assembly 8, Executive Head fixed arm 9, flexible axle 6 and guide pipe 7, be provided with traveller in the Executive Head assembly 8, Executive Head fixed arm 9 is installed in respectively on the executive module 8 with guide pipe 7, guide pipe 7 is enclosed within on the flexible axle 6, the two ends of traveller link to each other with flexible axle 6 with tuning screwdriver 10 respectively, and the other end of flexible axle 6 links to each other with flexible shaft operation device (not shown).Tuning screwdriver 10 is tuning instruments, and other all parts all are its service, and under the promotion of flexible axle 6, tuning screwdriver 10 can move up and down on (Z axle), also can rotate around the Z axle with flexible axle 6, finishes the action that the simulation staff uses tuning screwdriver 10.
Among Fig. 2, motion is made up of leading screw 15, gear train 16, x traversing guide 11, x traversing guide seat 12 and y traversing guide 13.Wherein, gear train 16 is made up of two umbrella shape shape gears that are mutually 90 degree, and gear train 16 links to each other with leading screw 15 and two-dimentional driver 14 respectively, and leading screw 15 passes Executive Head fixed arm 9.When bevel gear drives leading screw 15 rotations, Executive Head fixed arm 9 drives whole tuning support along moving on the x traversing guide 11, when the two-dimentional driver 14 of operation, two-dimentional driver 14 will order about gear train 16, leading screw 15 and tuning support and slide along y traversing guide 13 together.Like this, under the promotion of two-dimentional driver 14, motion makes the tuning screwdriver 10 on the tuning support can be in any point on superconducting resonator lid plane, thereby has finished the location of tuning screwdriver 10 operating points.
Two dimensional motion driver 14 is a kind of coaxial sealing manual overvides, and Fig. 3 is an x axle motion work schematic diagram, and x axle motion work comprises interior rotating shaft 18, interior shaft sleeve 19 and interior axle handle 17.Fig. 4 is the schematic diagram of y direction motion work, y axle motion work comprise outer shaft cover 24, outer shaft 27, prevent tube 31 and outer shaft sleeve pipe 28.Wherein, the end of the end of outer shaft sleeve pipe 28 and interior shaft sleeve 19 is stuck by end socket and advances and retreat jointly.The interior axle handle 17 of x axle motion work is fixed with interior rotating shaft 18 usefulness screws, and interior axle handle 17 is arranged on the vacuum chamber outside.When operator's axle during handle 17 in the vacuum chamber inner rotary, interior rotating shaft 18 rotations.Interior shaft sleeve 19 and interior rotating shaft 18 are connected by pin, on the one hand in rotating shaft pipe 19 can together rotate with outer shaft 27, also may stretch along the y direction of principal axis in other words on the other hand along the endwisely slipping of interior rotating shaft pipe 19.The other end of interior shaft sleeve 19 links to each other with gear train 16, because one of them umbrella gear is installed in an end of leading screw 15, thus rotating band movable wire thick stick 15 rotations of interior shaft sleeve 19, thus tuning support is finished along the slip of x direction.
The outer shaft of y axle motion work cover 24 and outer shaft 27 be fixed together by screw, can rotate synchronously.Outer shaft 27 is actual to be a metal cylinder, in the tube inboard screw thread is arranged.Be placed with outer shaft sleeve pipe 28 in outer shaft 27, also there is the threads engaged of screw thread and outer shaft 27 on the surface of outer shaft sleeve pipe 28.When outer shaft 27 rotations, outer shaft sleeve pipe 28 also may be turned at the drive backspin of screw thread, in order to prevent that outer shaft sleeve pipe 28 from rotating under the drive of screw thread, be provided with anti-tube 31 specially, anti-tube 31 is exactly axially grooved in the tube wall upper edge, has pin to link to each other with outer shaft sleeve pipe 28 in the groove, and outer shaft sleeve pipe 28 has been subjected to the constraint that can only move vertically like this, that is to say that outer shaft sleeve pipe 28 can only be along y direction (axially) translation under spiral promotes when the operation outer shaft rotates to 24.
After the position of tuning support was determined, tuning work was mainly undertaken by the flexible shaft operation device.Tens tuning screws are arranged on the super conductive filter lid, they are distributed in different places, tuning support will take tuning screwdriver 10 respectively to the top of these positions, operating the axle of tuning screwdriver 10 motions so also should follow thereunto, yet the starting point of axle is fixed, therefore this axle can only be soft, rather than rigidity.Fig. 5 is the structural representation of flexible shaft operation device, the flexible shaft operation device comprises flat handle 33, seal head 36, center-pole 35 and flexible axle core 39, flexible axle core 39 is to form by steel wire strand is stranded, flexible axle core 39 outsides are soft sleeve pipe stay pipes 38, flat handle 33 is fixed together with center-pole 35 usefulness screws, the end of center-pole 35 and flexible axle core 39 fix, and the other end of flexible axle core 39 links to each other with the traveller (not shown) of tuning support, and flat handle 33 is arranged on outside the vacuum chamber.Leave the space between flat handle 33 and the seal head 36, when flat handle 33 is pushed ahead,, also still can promote tuning screwdriver 10 (not shown)s and move downward although flexible axle core 39 is in case of bending.
For having gas leakage when working, the assurance system do not keep vacuum state, vacuum sealing device comprises the triple seal device, the first resealing device is all rotating cylinders at two-dimentional driver 14 and flexible shaft operation device, be provided with sealing ring on the bull stick, the second resealing device comprises two vacuum adapters, a vacuum is taken over be used for being tightly connected two-dimentional driver and vacuum chamber, another vacuum is taken over be used for being tightly connected flexible axle controller and vacuum chamber, on two-dimentional driver 14 and flexible shaft operation device, also be provided with the seal head that has the O circle, utilize the clip sealing between seal head and vacuum are taken over; The triple seal device is to utilize the sealing of O circle between vacuum adapter and the vacuum chamber.
After design is determined, design size depends on the size of tuning area, the maximum area of supposing wave filter is 50*50mm2, considers the factors such as space that tuning support and motion occupy, and the effective area in the vacuum chamber is got 143*143mm2, the height of vacuum chamber is got 120mm, the vacuum chamber flange is got the fillet square, and the vacuum chamber loam cake adopts the lucite of waiting 10mm, and area is identical with outward flange, the Kong Weiyu aperture is also identical, vacuum chamber with monoblock alloy aluminum car, mill and form.
Fig. 6 is the installation diagram of tuning support, and table 1 has been listed the title of associated components.
Fig. 7 is the installation diagram of flexible shaft operation device, and table 2 has been listed the title of associated components.
Fig. 8 is the installation diagram of two-dimentional driver, and table 3 has been listed the title of associated components.
Fig. 9 is the sectional arrangement drawing of tuning support and xy motion, and section is equivalent to the ABCD direction of general assembly drawing among Figure 10.Be with Fig. 6 difference, drawn the position and the assembling mode of x and y guide rail among this figure.Table 4 has been listed the title of associated components.
Figure 10 is the tuning general assembly drawing of four freedom degree vacuum, and table 5 has been listed each component names.
Because the stack shell of two dimension sealing driver 14 and flexible shaft operation device is longer, and the vacuum interior space is limited, vacuum seal divides three parts to carry out, and the seal operation of each movable rotating shaft and rotating cylinder in the first pipe has all marked in above-mentioned figure; It two is sealings at the end of handle, has marked two vacuum among Fig. 9 and has taken over, and the end that vacuum is taken over and the end of handle join, and utilize O circle and KF25 clip to seal; It three is sealings of the sidewall of vacuum chamber, and the other end that vacuum is taken over is done quadrate, and installs O circle (see figure 10) additional, uses screw in compression, reaches the effect of sealing.In addition, the last lower flange of vacuum chamber all adopts the sealing of rectangular rubber sealing strip, as shown in Figure 9.
Table 1
| Piece number | Title | | Title | |
| 39 | |
9 | The Executive Head fixed |
|
| 62 | The flexible axle axle sleeve | 69 | Pin | |
| 63 | The axle sleeve clip | 60 | The thermal resistance pipe | |
| 64 | The axle sleeve street corner | 61 | Lock screw | |
| 65 | The |
10 | Tuning screwdriver | |
| 66 | Slide rod sleeve | 68 | Steel ball | |
| 67 | Traveller |
Table 2
| Piece number | Title | | Title | |
| 33 | |
77 | |
|
| 72 | Screw | 78 | Connect |
|
| 35 | Center- |
79 | |
|
| 74 | The |
39 | |
|
| 36 | The KF25 |
71 | The flexible |
|
| 38 | Stay |
62 | The flexible axle axle sleeve |
Table 3
| Piece number | Title | Piece number | Title |
| 18 | Interior rotating shaft | 31 | Anti-tube |
| 17 | Interior rotating shaft handle | 87′ | Pin |
| 83 | Screw | 19 | Interior shaft sleeve |
| 84 | The intermediate seal body | 28 | The outer shaft sleeve pipe |
| 85 | Spacer ring | 86 | End socket |
| 24 | The outer shaft grip | 89′ | The end socket bearing |
| 87 | Screw | 80′ | Snap ring |
| 88 | Axle sleeve | 81′ | Snap ring |
| 89 | The KF25 seal receptacle | 82′ | Pin |
| 80 | The O circle | 83′ | Pin |
| 81 | The O circle | 84′ | Screw |
| 82 | The O circle | 85′ | Connect bridge |
| 27 | Outer shaft | 86′ | Screw |
Table 4
| Piece number | Title | | Title | |
| 13 | The Y- |
92′ | The KF25 |
|
| 92 | Two |
14 | The two |
|
| 93 | |
94′ | The Y- |
|
| 15 | |
95′ | Leading screw right bearing |
|
| 95 | The leading screw |
96′ | |
|
| 96 | Conical gear A | 97′ | Vacuum is taken over |
|
| 97 | The gear |
98′ | The KF25 |
|
| 98 | Ball bearing | 99′ | |
|
| 99 | Push-and- |
90′ | The |
|
| 90 | |
91′ | The flexible |
|
| 91 | Vacuum is taken over A |
Table 5
| Piece number | Title | | Title | |
| 41 | Depending on |
47 | Vacuum- |
|
| 42 | Hexagon socket |
48 | Flange at the bottom of the |
|
| 43 | Hexagon socket |
49 | |
|
| 44 | Sealing |
8 | The |
|
| 6 | |
11 | The |
|
| 7 | |
9 | The Executive Head fixed |
|
| 13 | The Y-direction guide rail |
Claims (6)
1. four freedom degree vacuum tuner, it is characterized in that, comprise the vacuum chamber that has transparent window and be arranged on vacuum chamber interior tuning instrument and control device, by at this control device of vacuum chamber external control, described tuning instrument is tuning screwdriver, and this tuning instrument can move by four-degree-of-freedom in vacuum chamber; Described control device comprises tuning support, motion, two dimensional motion driver and flexible shaft operation device, and described tuning screwdriver is installed on the tuning support; Motion links to each other with the two dimensional motion driver with tuning support respectively, the flexible shaft operation device drives tuning screwdriver and makes movement in vertical direction and rotating around vertical line, the two dimensional motion driver is controlled tuning support by motion and is done the two dimensional surface motion, also is provided with the vacuum sealing device of the vacuum state that keeps vacuum chamber on control device.
2. tuner according to claim 1, it is characterized in that, described tuning support comprises Executive Head assembly, Executive Head fixed arm, flexible axle and guide pipe, be provided with traveller in the Executive Head assembly, Executive Head fixed arm and guide pipe are installed on the executive module respectively, guide pipe is enclosed within on the flexible axle, and the two ends of traveller link to each other with flexible axle with described tuning screwdriver respectively, and the other end of flexible axle links to each other with the flexible shaft operation device.
3. tuner according to claim 2 is characterized in that, described motion comprises leading screw, gear train and x and y traversing guide; Wherein gear train is made up of two umbrella shape shape gears that are mutually 90 degree, and gear train links to each other with leading screw and described two-dimentional driver respectively, and leading screw passes described Executive Head fixed arm.
4. tuner according to claim 3 is characterized in that, described two-dimentional driver comprises interior rotating shaft, interior shaft sleeve, interior axle handle, outer shaft cover handle, outer shaft, anti-tube and outer shaft sleeve pipe; Wherein, interior axle handle and outer shaft cover are being arranged on described vacuum chamber outside, interior rotating shaft links to each other with interior axle handle, interior shaft sleeve rotates with interior rotating shaft and can be along the axial translation of interior rotating shaft, the end of interior shaft sleeve links to each other with described gear train, and this gear train changes interior rotating shaft into around described leading screw axial rotation around its axial rotation; Outer shaft cover handle is fixedlyed connected with outer shaft and can be rotated synchronously, and the outer shaft sleeve pipe is arranged in the outer shaft, and anti-rotation management and control system outer shaft sleeve pipe can only be along its axial translation; The end of outer shaft sleeve pipe is connected with the end of interior pivoted housing pipe.
5. tuner according to claim 4 is characterized in that, described flexible shaft operation device comprises flat handle, center-pole and flexible axle core, wherein, flat handle is arranged on outside the described vacuum chamber, and an end of center-pole is fixed with flat handle, the other end links to each other with the flexible axle core, and the other end of flexible axle core links to each other with described traveller.
6. tuner according to claim 5, it is characterized in that, described vacuum sealing device comprises the triple seal device, the first resealing device is all rotating cylinders at described two-dimentional driver and described flexible shaft operation device, be provided with sealing ring on the bull stick, the second resealing device comprises two vacuum adapters, a vacuum is taken over be used for being tightly connected two-dimentional driver and vacuum chamber, another vacuum is taken over be used for being tightly connected flexible axle controller and vacuum chamber, on two-dimentional driver and flexible shaft operation device, also be provided with the seal head that has the O circle, utilize the clip sealing between seal head and vacuum are taken over; The triple seal device is to utilize the sealing of O circle between vacuum adapter and the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100958810A CN100391700C (en) | 2005-09-06 | 2005-09-06 | Four freedom degree vacuum tuner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100958810A CN100391700C (en) | 2005-09-06 | 2005-09-06 | Four freedom degree vacuum tuner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1927552A CN1927552A (en) | 2007-03-14 |
| CN100391700C true CN100391700C (en) | 2008-06-04 |
Family
ID=37857770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100958810A Active CN100391700C (en) | 2005-09-06 | 2005-09-06 | Four freedom degree vacuum tuner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100391700C (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3636514A1 (en) * | 1986-10-27 | 1988-05-05 | Fraunhofer Ges Forschung | Screwing device |
| JPH0724774A (en) * | 1993-07-08 | 1995-01-27 | Bridgestone Corp | Robot |
| JP2004090174A (en) * | 2002-08-30 | 2004-03-25 | Ishikawajima Harima Heavy Ind Co Ltd | Glove box |
-
2005
- 2005-09-06 CN CNB2005100958810A patent/CN100391700C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3636514A1 (en) * | 1986-10-27 | 1988-05-05 | Fraunhofer Ges Forschung | Screwing device |
| JPH0724774A (en) * | 1993-07-08 | 1995-01-27 | Bridgestone Corp | Robot |
| JP2004090174A (en) * | 2002-08-30 | 2004-03-25 | Ishikawajima Harima Heavy Ind Co Ltd | Glove box |
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| Publication number | Publication date |
|---|---|
| CN1927552A (en) | 2007-03-14 |
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