CN100385705C - Initiative driving type organic electric excitation lighting equipment - Google Patents
Initiative driving type organic electric excitation lighting equipment Download PDFInfo
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- CN100385705C CN100385705C CNB02141050XA CN02141050A CN100385705C CN 100385705 C CN100385705 C CN 100385705C CN B02141050X A CNB02141050X A CN B02141050XA CN 02141050 A CN02141050 A CN 02141050A CN 100385705 C CN100385705 C CN 100385705C
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Abstract
The present invention relates to an active driving organic electric excitation light emitting panel which comprises a basal plate, a plurality of first conductive wires, a plurality of second conductive wires, a plurality of functional elements, a cathode, an anode and an organic electric excitation light medium, wherein the first conductive wires are positioned on the surface of the base plate; the second conductive wires are also positioned on the surface of the base plate, and the second conductive wires and the first conductive wires are staggered; the functional elements are positioned at the staggered points of the first conductive wires and the second conductive wires, and each of the functional elements comprises an electric crystal element which is provided with a drawing electrode, a source electrode and a gate electrode; the cathode which is positioned on the surface of the base plate is connected with the drawing electrode, the anode is positioned above the cathode; the organic electric excitation light medium is clamped between the cathode and the anode; main constituents of the cathode are identical with those of each of the first conducting wires; the first conductive wires and the second conductive wires are not directly connected and switched on at the staggered points; the source electrode is connected with each of the first conductive wires; the gate electrode is connected with each of the second conductive wires; the drawing electrode which corresponds to the source electrode is conducted with the source electrode when current flows through the gate electrode; the source electrode, the gate electrode and the drawing electrode are not directly connected and switched on at the staggered points.
Description
Technical field
The present invention relates to the organic electric-excitation luminescent technology, relate in particular to a kind of Organic Light-Emitting Device that is applicable to active drive.
Background technology
Information display is most important man-machine interface, along with the scientific and technological civilization progress mankind lifting also relative to the requirement of information display.Flat-panel screens (FPD) replaces cathode ray tube gradually because have compact advantage, becomes the main flow of display gradually.But flourish along with Information technology, follow the demand of the higher parsing and the information capacity of display, the usefulness that tradition amorphous silicon membrane electric crystal drives LCD (a-SiTFTLCD) has not conformed to practicality, so industry begins to develop the low temperature polycrystalline silicon active drive technology (LTPSTFTs) with more excellent element function, to adapt to the demand in FPD market.Utility model and Organic Light-Emitting Device are because have in light weightly, and high contrast, answer speed height, the low brightness advantages of higher that reaches of power consumption become in recent years and enjoy the flat-panel screens of new generation of gazing at.Yet, organic electroluminescent element is because its technology is new, development is compared to other displays evenings, the techniques of mass production is full maturity not as yet, so have only breadboard sample at present more, particularly low temperature polycrystalline silicon active drive Organic Light-Emitting Device is in commercialization process and a large amount of production process, and it is to be overcome to also have many obstacles to have.
At present aspect LTPSTFTs and OLED Integration Design, be on existing component structure, continuation is by the anode substrate of the ITO layer on the LTPSTFTs as OLED, the hole injection layer of the follow-up OLED that grows up, hole transmission layer, luminescent layer, electron transfer layer, electron injecting layer and negative electrode.Yet, the simple merging design of this kind traditional TFT-LCDarray of continuity and OLED, the number of plies is too much, so that complex procedures, the Integration Design of real non-the best.
Summary of the invention
Main purpose of the present invention provides a kind of active drive formula Organic Light-Emitting Device, and can utilize conductive connection (Busline) to be incorporated into same one procedure with cathode material and low tempterature poly silicon, to promote interface matching properties between cathode material and conductive connection, to slow down residual stress.
Another object of the present invention is that a kind of active drive formula Organic Light-Emitting Device is being provided, and can utilize aluminium or the low-resistance characteristic of silver-colored tool, to reach the effect that reduces resistance capacitance late effect (RCdelay).
Another purpose of the present invention provides a kind of active drive formula Organic Light-Emitting Device, and can utilize the design of negative electrode near base material (top light emitting), with significantly reduce the cancellation effect of the light that the sent interference that produced, scattering and refraction in the traveling distance of element film, promote luminous utilization ratio and aperture opening ratio (apertureratio).
Another purpose of the present invention provides a kind of method for making of active drive formula Organic Light-Emitting Device, and can utilize conductive connection (Busline) to be incorporated into same one procedure with cathode material and low tempterature poly silicon, promoting interface matching properties between cathode material and conductive connection, to slow down residual stress, even and then reduce at one extra negative electrode filming process of Organic Light-Emitting Device (OLED).
For achieving the above object, active drive formula organic electroluminescence panel of the present invention comprises; One substrate; Many first conductor wires are the surfaces that are positioned at substrate; Many second conductor wires are positioned at the surface of substrate, and second conductor wire and first conductor wire are staggered; A plurality of functional elements are to be positioned at first conductor wire and the second conductor wire staggered place, and comprise one and have drain, the transistor element of source electrode and gate; One negative electrode is the surface that is positioned at substrate, and is connected with drain; One anode is the top that is positioned at negative electrode; One organic electric-excitation luminescent medium is to be folded between negative electrode and the anode; Wherein negative electrode is identical with the material of first conductor wire; First conductor wire directly is not connected conducting with second conductor wire in the staggered place; Source electrode is connected with first conductor wire; Gate is to be connected with second conductor wire; Drain is to correspond to source electrode, with when the gate circulating current and the source electrode conducting; And source electrode, gate and drain directly do not connect conducting in the staggered place.
The manufacture method of active drive formula organic electroluminescence panel of the present invention comprises following step; One substrate is provided earlier; That continues forms an amorphous silicon layer in substrate; Then in regular turn in amorphous silicon layer with photo-mask process, ion doping and excite state laser (excimerlaser) tempering form a plurality of tool source electrodes, the transistor element of drain gate pattern; Form the many second conductive coil samples that are connected with gate in substrate surface; On gate and part second conductor wire, form the medium protective layer of a tool pattern; Form many first conductor wires of a tool pattern and the negative electrode of tool pattern simultaneously on substrate, wherein be gripped with medium protective layer between first conductor wire and second conductor wire, first lead is connected with source electrode, and negative electrode is connected with drain; On negative electrode, form at least one organic electric-excitation luminescent layer; And on the organic electric-excitation luminescent layer, form an anode;
Wherein negative electrode is identical with the material of first conductor wire; First conductor wire and second conductor wire are staggered, and directly do not connect conducting in the staggered place.
The substrate material of active drive formula organic electroluminescence panel of the present invention can be existing substrate material, is preferably glass substrate, plastic substrate or transparent resin film substrate.The plastic substrate material can be existing plastic substrate material, is preferably Merlon (PC), PET, cyclic olefine copolymer (COC), metallic cyclic olefine copolymer (m-COC).The material of the negative electrode of active drive formula organic electroluminescence panel of the present invention can be existing electrode material, is preferably resistance metal; The best is aluminium, aluminium-magnesium alloy (Al-Mg), silver or silver-magnesium alloy (Ag-Mg).The anode of active drive formula organic electroluminescence panel of the present invention can be existing electrode material, is preferably the transparency electrode material, and the best is indium tin oxide (ITO) or aluminium zinc oxide (AZO).It is made that active drive formula organic electroluminescence panel source electrode of the present invention and drain are preferably identical material, best for source electrode and drain be low temperature polycrystalline silicon.The organic electric-excitation luminescent medium of active drive formula organic electroluminescence panel of the present invention can be existing organic electric-excitation luminescent medium, be preferably and more include an electron transfer layer, electron injecting layer, luminescent layer, the organic electric-excitation luminescent medium of hole transmission layer or hole injection layer, and electron transfer layer, electron injecting layer, luminescent layer, hole transmission layer or hole injection layer are between negative electrode and anode.Between second conductor wire and first conductor wire of active drive formula organic electroluminescence panel of the present invention, and this part negative electrode on, preferable have at least one media protection (passivation) layer.
Media protection (passivation) layer can be existing protection (passivation) layer material, is preferably media protection (passivation) layer and is polyimide, acryl resin layer, fluororesin layer, epoxy resin layer or silicon oxide layer.The gate of active drive formula organic electroluminescence panel of the present invention, the relative altitude configuration of source electrode and drain can be existing configuration, is preferably source electrode and drain between gate and substrate (that is configuration of top-gate).Be preferably between the source electrode of active drive formula organic electroluminescence panel of the present invention and the gate and have an insulating barrier, and be preferably between source electrode and the gate and also have an insulating barrier.Active drive formula organic electroluminescence panel of the present invention can optionally more comprise a resilient coating, and resilient coating is the surface that is positioned at substrate, in order to isolated extraneous aqueous vapor, oxygen or ion, the function of tool protective substrate.The material of resilient coating can be aqueous vapor, oxygen or the ion material in the existing isolated external world, is preferably silicon nitride, silica or silicon oxynitride.In the manufacture method of active drive formula organic electroluminescent substrate of the present invention, the step that forms amorphous silicon on substrate can be existing amorphous silicon and forms step, is preferably with chemical vapour sedimentation method and forms amorphous silicon on substrate.In the manufacture method of active drive formula organic electroluminescent substrate of the present invention, the formation of source electrode, drain, light dope circle electricity (LDD) layer and channel layer (channel) pattern is to form with existing step, be preferably with photo-mask process, ion doping (iondoping), the step of implanting ions forms; Be more preferred from through photo-mask process, ion doping (iondoping), after the step of implanting ions, with excite state laser (excimerlaser) to source electrode, drain, light dope circle electricity (LDD) layer and channel layer carry out tempering and activation (activation).
The manufacture method of active drive formula organic electroluminescent substrate of the present invention is preferably and more is contained in each tool source electrode, forms the insulating barrier of a tool pattern on the element of drain pattern; And the step that on each layer insulating, forms the gate of tool pattern.
Active drive formula organic electroluminescent element display of the present invention is preferably the display floater with red, green and blue plural light emitting pixel (pixel) array, with show image; Organic electroluminescent element display of the present invention can certainly be the display floater of monochromatic plural light emitting pixel (pixel) array because of needs.The active drive formula organic electric-excitation luminescent displaying panel of manufacturing of the present invention can be applicable to any image, picture, purposes or equipment that symbol and literal show are preferably TV, computer; printer; screen; the display panel of transport carrier (vehicle); signal machine; communication apparatus; phone; light fixture; car light; conversation type e-book; micro-display (microdisplay); the demonstration of fishing (fishing) equipment; personal digital assistant (personaldigitalassistant); game machine (game); the demonstration of the demonstration of aircraft (airplane) equipment and recreation eyeshade etc.
Because the present invention constructs novelty, can provide on the industry and utilize, and truly have the enhancement effect, so apply for patent of invention in accordance with the law.
Description of drawings
Fig. 1 is the cutaway view of active drive formula organic electroluminescence panel functional element of the present invention and pixel;
Fig. 2 is the schematic diagram of active drive formula organic electroluminescence panel of the present invention;
Fig. 3 is the schematic diagram of active drive formula organic electroluminescent substrate pixel display unit of the present invention.
Embodiment
For more understanding technology contents of the present invention, be described as follows especially exemplified by Organic Light-Emitting Device and method for making preferred embodiment thereof.
Please refer to Fig. 1 of the present invention, 2 and 3, the active driving Organic Light-Emitting Device of the present invention is one to have the substrate 100 of a plurality of pixel display units 110.Each pixel display unit 110 has a transistor element 200 and a show electrode element 300.Transistor element 200 is for having source electrode 210, the membrane transistor of gate 230 and drain 220.Transistor element 200 is with photo-mask process in this preferred embodiment, the COMS operation manufacturing of doping impurity.Wherein source electrode 210 and drain 220 are through the low temperature polycrystalline silicon operation, and form through excimer laser tempering and activation processing.And the show electrode element 300 of pixel then for being positioned at substrate 100 surfaces, and includes at least two electrode layers 310,320 and organic light emitting medium layer 330.
Wherein in the electrode layer, being positioned at substrate surface is negative electrode 310, is anode 320 on this negative electrode 310.Organic motor luminescence medium layer 330 then is folded between negative electrode 310 and the anode 320.In this preferred embodiment, negative electrode 310 is aluminium, aluminium-magnesium alloy, silver or silver-magnesium alloy (Ag-Mg), and anode 320 is transparent indium-tin-oxide (ITO) electrode or aluminium zinc oxide (AZO).And this negative electrode 310 of the show electrode element 300 of pixel is connected with the drain 220 of the transistor element 200 of pixel, with in electric current when source electrode 210 is circulated to drain 220, provide enough electric current luminous with the organic motor luminescence medium layer 330 that drives the show electrode element.
Panel between each pixel display unit 110 is provided with many conductor wires.Conductor wire, rough two conductor wires that are divided into.First conductor wire is a source electrode conductor wire 410, is many parallel conductor wires, and is the vertical bar shaped conductor wire that is parallel to each other in this preferred embodiment.Each first conductor wire is to be connected with the source electrode 210 of the transistor element 200 of a plurality of pixel display units 110, with transmitting display signal therefor; Wherein first conductor wire is identical with the material of the negative electrode 310 of show electrode element 300.In this preferred embodiment, the material of first conductor wire and negative electrode 310 is aluminium or aluminium-magnesium alloy, silver or silver-magnesium alloy (Ag-Mg).
And second conductor wire is a gate conductor wire 420.Gate conductor wire 420 is many parallel conductor wires, and is the vertical bar shaped conductor wire that is parallel to each other in this preferred embodiment.Each second conductor wire is to be connected with the gate 230 of the transistor element 200 of a plurality of pixel display units 110, with transmission signals.The method for making of Organic Light-Emitting Device of the present invention is prior to forming an amorphous silicon layer on the substrate 100, is to form an amorphous silicon layer with chemical vapour deposition technique in glass baseplate surface in this preferred embodiment.On the amorphous silicon substrate, form polysilicon membrane transistor element 200 with the CMOS operation more afterwards.The formation of CMOS process forming film transistor element 200 comprises and utilizes sputter or evaporation, and the coating photoresistance, the light shield exposure, and photo-mask process pattern (pattern) steps such as development and etching form source electrode pattern (pattern).Afterwards again with the photo-mask process step, doping impurity or implanting ions, the source electrode pattern that has formed succeeded by excite state laser (excimerlaser) temper, and reach simultaneously amorphous silicon is converted into silicon metal and impurity activation to improve conductance.Thereupon, repeat sputter or evaporation, the coating photoresistance, the light shield exposure, photo-mask process patterns (pattern) such as development and etching, doping impurity or implanting ions succeeded by similar steps such as excite state laser (excimerlaser) temper, form drain and light dope dielectric layer (LDD) pattern respectively.Then deposit the gate material, and form the pattern of gate and gate conductor wire (second conductor wire) with photo-mask process.Deposit source electrode line conductive layer 410 and negative electrode 310 materials again, wherein source electrode line conductive layer 410 and negative electrode 310 material principal components are identical, this source electrode conductor wire 410 and negative electrode 310 materials are aluminium or silver simultaneously in this preferred embodiment, and form the pattern of source electrode conductor wire 410 and negative electrode 310 with photo-mask process.Wherein source electrode conductor wire 410 (first conductor wire) is connected with polysilicon source electrode 210, and drain 220 is connected with negative electrode.So form a plurality of tool gates 230, source electrode 210, the transistor element of drain 220 patterns be in substrate, and form the negative electrode 310 of pixel electrode simultaneously, and the source electrode conductor wire 410 of panel and gate electric lead 420 are in substrate.
Form a protective layer 340 patterns in substrate surface deposition one adhesion interface layer 350 and a protective layer 340 (passivationlayer) and with photo-mask process afterwards,, form protective layer 340 with outside predetermined pixel electrode position.Carry out the formation of organic functional basic unit in the surface of the negative electrode 310 of pixel electrode thereupon, for example in present embodiment, form hole injection layer, hole transmission layer, organic light emitting medium layer, electron transfer layer and electron injecting layer with evaporation coating method.And after finishing organic functional basic unit, the mode with sputter or evaporation forms an anode in organic functional basic unit uppermost surface again.Anode is the indium tin oxide transparency electrode in present embodiment.
Organic Light-Emitting Device of the present invention, the conductive connection (Busline) of cathode material and low tempterature poly silicon is incorporated into same one procedure, than the operation of traditional low tempterature poly silicon membrane transistor, can reduce at one extra negative electrode filming process of organic electroluminescence panel.Organic Light-Emitting Device of the present invention and manufacture method thereof, utilize the low-resistance characteristic of aluminium tool, select aluminium (or almag), silver (or silver-colored magnesium alloy) as lead and cathode material, the Cr that is adopted than traditional low tempterature poly silicon membrane transistor, Mobusline can reach the effect that reduces resistance capacitance late effect (RCdelay).At last, Organic Light-Emitting Device of the present invention adopts the design of negative electrode near base material (top light emitting), than traditional active organic electroluminescent device, can significantly reduce the cancellation effect of the light that the sends interference that produces, scattering and refraction in the traveling distance of element film, promote luminous utilization ratio and aperture opening ratio.
It should be noted that above-mentioned many embodiment only give an example for convenience of explanation, the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.
Claims (15)
1. the manufacture method of an active drive formula organic electroluminescence panel is characterized in that, comprises following step;
One substrate is provided;
Form an amorphous silicon layer in substrate;
With photo-mask process, ion doping and excite state laser tempering form a plurality of tool source electrodes in amorphous silicon layer, drain, and the transistor element of gate pattern;
Form the many second conductor wire patterns that are connected with gate in substrate surface;
On gate and part second conductor wire, form the insulating barrier of a tool pattern;
Form many first conductor wires of a tool pattern and the negative electrode of tool pattern simultaneously on substrate, wherein be gripped with medium protective layer between first conductor wire and second conductor wire, first conductor wire is connected with source electrode, and negative electrode is connected with drain;
On negative electrode, form at least one organic electric-excitation luminescent layer; And
On the organic electric-excitation luminescent layer, form an anode;
Wherein negative electrode is identical with the principal component of first conductor wire;
First conductor wire and second conductor wire are staggered, and directly do not connect conducting in the staggered place.
2. manufacture method as claimed in claim 1 is characterized in that, more is included in to form a resilient coating on the substrate earlier, forms an amorphous silicon layer afterwards again.
3. manufacture method as claimed in claim 2 is characterized in that, the material of resilient coating is silicon nitride, silica or silicon oxynitride.
4. manufacture method as claimed in claim 1 is characterized in that, negative electrode is aluminium or aluminium-magnesium alloy.
5. manufacture method as claimed in claim 1 is characterized in that, negative electrode is silver or silver-magnesium alloy.
6. manufacture method as claimed in claim 1 is characterized in that amorphous silicon is to form on substrate with chemical vapour sedimentation method.
7. the method for claim 1 is characterized in that, wherein anode is a transparency electrode.
8. manufacture method as claimed in claim 1 is characterized in that, anode is an indium tin oxide.
9. manufacture method as claimed in claim 1 is characterized in that, anode is the aluminium zinc oxide.
10. manufacture method as claimed in claim 1 is characterized in that, on this negative electrode, form at least one organic electric-excitation luminescent layer before, should be prior to forming at least one medium protective layer of tool pattern on the part negative electrode.
11. manufacture method as claimed in claim 10 is characterized in that, medium protective layer is polyimide, acryl resin layer, fluororesin layer, epoxy resin layer or silicon oxide layer.
12. manufacture method as claimed in claim 1 is characterized in that, more is contained in before anode forms, and forms an electron transfer layer, electron injecting layer, hole transmission layer or hole injection layer on negative electrode.
13. manufacture method as claimed in claim 1 is characterized in that, the material of substrate is glass, plastic cement or transparent resin film.
14. manufacture method as claimed in claim 1 is characterized in that, the material of substrate is Merlon, PET or cyclic olefine copolymer.
15. manufacture method as claimed in claim 1 is characterized in that, the material of substrate is metallic cyclic olefine copolymer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB02141050XA CN100385705C (en) | 2002-07-12 | 2002-07-12 | Initiative driving type organic electric excitation lighting equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB02141050XA CN100385705C (en) | 2002-07-12 | 2002-07-12 | Initiative driving type organic electric excitation lighting equipment |
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| Publication Number | Publication Date |
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| CN1468037A CN1468037A (en) | 2004-01-14 |
| CN100385705C true CN100385705C (en) | 2008-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB02141050XA Expired - Fee Related CN100385705C (en) | 2002-07-12 | 2002-07-12 | Initiative driving type organic electric excitation lighting equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102881835A (en) * | 2012-09-26 | 2013-01-16 | 深圳市华星光电技术有限公司 | Active matrix type organic electroluminescent diode and preparation method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5670792A (en) * | 1993-10-12 | 1997-09-23 | Nec Corporation | Current-controlled luminous element array and method for producing the same |
| EP1087448A2 (en) * | 1999-09-24 | 2001-03-28 | Sel Semiconductor Energy Laboratory Co., Ltd. | Light-emitting organic compound with a low concentration of ionic impurities |
| CN1353464A (en) * | 2000-11-10 | 2002-06-12 | 株式会社半导体能源研究所 | Luminous device |
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2002
- 2002-07-12 CN CNB02141050XA patent/CN100385705C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5670792A (en) * | 1993-10-12 | 1997-09-23 | Nec Corporation | Current-controlled luminous element array and method for producing the same |
| EP1087448A2 (en) * | 1999-09-24 | 2001-03-28 | Sel Semiconductor Energy Laboratory Co., Ltd. | Light-emitting organic compound with a low concentration of ionic impurities |
| CN1353464A (en) * | 2000-11-10 | 2002-06-12 | 株式会社半导体能源研究所 | Luminous device |
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| CN1468037A (en) | 2004-01-14 |
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