CN100383952C - Lifting apparatus with function of regulating length used for semiconductor apparatus - Google Patents
Lifting apparatus with function of regulating length used for semiconductor apparatus Download PDFInfo
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- CN100383952C CN100383952C CNB2005101263876A CN200510126387A CN100383952C CN 100383952 C CN100383952 C CN 100383952C CN B2005101263876 A CNB2005101263876 A CN B2005101263876A CN 200510126387 A CN200510126387 A CN 200510126387A CN 100383952 C CN100383952 C CN 100383952C
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- sleeve
- guide post
- lifting
- lifting device
- pin
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Abstract
The present invention relates to a technical field of microelectronics, particularly to a mechanical device for lifting a semiconductor wafer from a wafer seat positioned in a semiconductor processing room. The lifting device for semiconductor devices and having the function of length regulation, which is disclosed by the present invention, comprises a sleeve barrel, a lifting needle in the sleeve barrel, a cylinder, a clamping disk arranged on a piston rod of the cylinder, and a linear reciprocating transmission mechanism connected with the clamping disk in an adjustable mode. The present invention has the advantages of simple structure and convenient and flexible installation, is capable of finishing the lifting or the falling of the wafer nicely, and is capable of regulating the length of the lifting device conveniently. The mechanical device can be maintained conveniently.
Description
Technical field
The present invention relates to microelectronics technology, be specifically related to semiconductor wafer from being arranged in the mechanical device of the indoor wafer holder lifting of semiconductor machining.
Background technology
A kind of lifting device with the line transmission was once invented by Lam company (U.S.), promptly by the tensioning of steel wire rope and rise and the landing that relaxes and finish pin, as shown in Figure 1.It is made up of members such as rising pin 1 ', jacking apparatus matrix 2 ', tightening knob 3 ', adjusting knob and pull rope 4 '.This device can be finished the motion action that makes the wafer lifting equally, simultaneously, can adjust the length of lifting device and cleaning and replacing and use the frequent pin 1 ' that rises under the situation of needs.
Because this device is to utilize the line transmission principle to finish the rise of pin and fall, then also need one transmission device of realizing the thimble motion be installed at the end of pull rope, as shown in Figure 2.It is regulated members such as stop nut 8 ', stroke adjustment knob 9, stroke adjustment stop nut 10 ', positioning knob 11 ', pullover 12 ', rope sling 13 ' and forms by vacuum cylinder 5 ', tightening knob 6 ', adjusting nut 7 ', tightening.Could realize therefore on transmission device, needing lifting to wafer three cover lifting mechanisms are installed because three cover lifting devices need to be installed, again they are fixed on the pedestal, and by the cylinder drive, haulage cable tensioning or relax, thus finish the lifting that rises pin.
From the mechanical device of the above, though can finish some functions that a cover lifting device will be finished, but because mechanism restriction itself, promptly to utilize the rope drive principle, just must introduce the steel wire rope of three parcel plastic layers, simultaneously, also to consider fastening, spacing with them, thereby cause structural design too complicated, in addition, reciprocally twine the also feasible difficulty relatively that becomes of safeguarding between the steel wire rope.
Summary of the invention
(1) technical problem that will solve
It is simple to the purpose of this invention is to provide a kind of mechanism, and installation and maintenance are easy flexibly, the lifting device with adjusting length function easy to use.
(2) technical scheme
In order to achieve the above object, the present invention takes following scheme:
The present invention includes and rise pin, cylinder in the sleeve, sleeve, be installed in chuck on the cylinder piston rod and adjustable ground and be connected to linear reciprocation transmission mechanism on the chuck, described linear reciprocation transmission mechanism comprise the guide post that is arranged on position, described sleeve axis, be sleeved on the guide pad on the described guide post and be installed in guide pad and sleeve between inner sleeve, be tightly connected between the outer end of cover letter and the sleeve wherein, guide post is provided with bulge loop, and a bellows is tightly connected between described bulge loop and the inner sleeve.
Wherein, in described guide post rearward end the threaded adjusting knob is housed, the threaded adjusting knob is engaged in the installing hole of chuck, and locknut is equipped with at its both ends respectively.
Wherein, in described guide post leading section fixing hole, be plugged with and rise pin.
Wherein, the described pin that rises links together by ring spring and guide post.
(3) beneficial effect
Compared with the prior art the present invention owing to take above technical scheme, has the following advantages: 1) realize the lifting of wafer by whole lifting device; 2) by the threaded adjusting knob length of free adjustment lifting device within the specific limits; 3) can tightly lock the length that rises pin after adjusting, it is loosening to prevent that it from taking place in the lifting process; 4) can conveniently dismantle, make cleaning, replacing become convenient syringe needle; 5) a whole set of lifting device is simple in structure, and is easy to maintenance.
Description of drawings
Fig. 1 is the prior art products stereogram;
Fig. 2 is a prior art products work installment state stereogram;
Fig. 3 is a linear reciprocation transmission mechanism structural representation of the present invention;
Fig. 4 is a kind of state stereogram of installing and using of the present invention;
Fig. 5 is the structural representation of bellows components of the present invention.
Among the figure:
1 ', rise pin; 2 ', the jacking apparatus matrix; 3 ', tightening knob; 4 ', pull rope; 5 ', vacuum cylinder; 6 ', tightening knob; 7 ', adjusting nut; 8 ', tightening is regulated and is loosened nut; 9 ', stroke threaded adjusting knob; 10 ', stroke adjustment loosens nut; 11 ', positioning knob; 12 ', pullover; 13 ', rope sling; 1, rises pin; 2, sleeve; 3, bellows; 4, guide pad; 5, threaded adjusting knob; 6, locknut; 7, scroll chuck; 8, cylinder; 9, guide post; 10, inner sleeve; 11, bulge loop; 12, fixing hole.
Embodiment
Following examples are used to illustrate the present invention, but are not used for limiting the scope of the invention.
A kind of semiconductor equipment that is used for has the lifting device of regulating the length function, as shown in Figure 3, comprises rising pin 1 and sleeve 2 threaded adjusting knob 5, locknut 6, linear reciprocation transmission mechanism, scroll chuck 7, cylinder 8.Described linear reciprocation transmission mechanism comprise guide post 9, the guide pad 4 that is sleeved on that is arranged on position, described sleeve axis and be installed in guide pad 4 and sleeve 2 between inner sleeve 10, wherein be tightly connected between the outer end of inner sleeve 10 and the sleeve 2; Guide post 9 is provided with bulge loop 11, an end of bellows 3 and 11 welding of the bulge loop on the guide post 9, the other end and inner sleeve 10 welding.
Threaded adjusting knob 5 is connected with scroll chuck 7 by locknut 6 in linear reciprocation transmission mechanism lower end, and scroll chuck 7 is connected with cylinder 8.
Rise pin 1 and can adopt the type of attachment of pegging graft with the linear reciprocation transmission mechanism, promptly fixing by the fixing hole on the guide post 9 12; Also can adopt the type of attachment of ring spring.Described linear reciprocation transmission mechanism can adopt guide tracked transmission mechanism.
The present invention can play the effect of wafer lift.As shown in Figure 4, specifically, at first the linear reciprocation transmission mechanism is fixed on the scroll chuck 7, can adjust threaded adjusting knob 5 according to the needs that reality is used then, make the length of whole lowering or hoisting gear reach instructions for use, again the locknut 6 of threaded adjusting knob 5 both sides is locked, and the identical linear reciprocation transmission mechanism of three covers is fixed on the scroll chuck 7 that connects mutually with cylinder 8.At this moment, this three covers linear reciprocation transmission mechanism just can be finished lifting action under the effect of cylinder 8.Sleeve mechanism can be realized the rise or the landing of wafer.
After the present invention uses a period of time, rise pin 1 part and may take place to stain or wearing and tearing, produce a certain amount of particle, pollute wafer.At this moment, can from the guide post fixing hole, extract and rise pin 1, finish the cleaning or the replacing that rise pin 1, and, can guarantee to rise being connected of pin 1 and guide post fixing hole well, it is loosening to be unlikely to rise pin 1.
By threaded adjusting knob 5 free adjustment length of the present invention within the specific limits; Can tightly lock the length of adjusted lifting device; Rise being connected of grafting between pin and the guide post fixing hole or ring spring, can prevent that it from taking place to become flexible in the lifting process; Can conveniently dismantle, make cleaning, replacing become convenient rising pin.
Claims (4)
1. one kind is used for the lifting device that semiconductor equipment has adjusting length function, comprise sleeve (2), rise pin (1) in the sleeve, cylinder (8), be installed in the chuck (7) on cylinder (8) piston rod, and adjustable ground is connected to the linear reciprocation transmission mechanism on the chuck (7), it is characterized in that: described linear reciprocation transmission mechanism comprises the guide post (9) that is arranged on described sleeve (2) position, axis, be sleeved on the guide pad (4) on the described guide post (9), and be installed in inner sleeve (10) between guide pad (4) and the sleeve (2), wherein be tightly connected between the outer end of inner sleeve (10) and the sleeve (2), guide post (9) is provided with bulge loop (11), and a bellows (3) is tightly connected between described bulge loop (11) and the inner sleeve (10).
2. the described a kind of semiconductor equipment that is used for of claim 1 has the lifting device of regulating the length function, it is characterized in that: threaded adjusting knob (5) is housed in described guide post (9) rearward end, threaded adjusting knob (5) is engaged in the installing hole of chuck (7), and locknut (6) is equipped with at its both ends respectively.
3. the described a kind of semiconductor equipment that is used for of claim 2 has the lifting device of regulating the length function, it is characterized in that: be plugged with in described guide post (9) leading section fixing hole and rise pin (1).
4. the described a kind of semiconductor equipment that is used for of claim 2 has the lifting device of regulating the length function, and it is characterized in that: the described pin (1) that rises links together by ring spring and guide post (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101263876A CN100383952C (en) | 2005-12-08 | 2005-12-08 | Lifting apparatus with function of regulating length used for semiconductor apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101263876A CN100383952C (en) | 2005-12-08 | 2005-12-08 | Lifting apparatus with function of regulating length used for semiconductor apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1851899A CN1851899A (en) | 2006-10-25 |
| CN100383952C true CN100383952C (en) | 2008-04-23 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101263876A Active CN100383952C (en) | 2005-12-08 | 2005-12-08 | Lifting apparatus with function of regulating length used for semiconductor apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN100383952C (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0774231A (en) * | 1993-08-31 | 1995-03-17 | Tokyo Electron Ltd | Treatment apparatus and its usage method |
| JPH08139084A (en) * | 1994-11-04 | 1996-05-31 | Kokusai Electric Co Ltd | Substrate heating device |
| JPH1076211A (en) * | 1996-09-03 | 1998-03-24 | Dainippon Screen Mfg Co Ltd | Device for drying under reduced pressure |
| US6231716B1 (en) * | 1998-11-09 | 2001-05-15 | Applied Materials, Inc. | Processing chamber with rapid wafer exchange |
| CN1525528A (en) * | 2003-02-07 | 2004-09-01 | 东京毅力科创株式会社 | Base plate processing device and method |
-
2005
- 2005-12-08 CN CNB2005101263876A patent/CN100383952C/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0774231A (en) * | 1993-08-31 | 1995-03-17 | Tokyo Electron Ltd | Treatment apparatus and its usage method |
| JPH08139084A (en) * | 1994-11-04 | 1996-05-31 | Kokusai Electric Co Ltd | Substrate heating device |
| JPH1076211A (en) * | 1996-09-03 | 1998-03-24 | Dainippon Screen Mfg Co Ltd | Device for drying under reduced pressure |
| US6231716B1 (en) * | 1998-11-09 | 2001-05-15 | Applied Materials, Inc. | Processing chamber with rapid wafer exchange |
| CN1525528A (en) * | 2003-02-07 | 2004-09-01 | 东京毅力科创株式会社 | Base plate processing device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1851899A (en) | 2006-10-25 |
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| C06 | Publication | ||
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| C14 | Grant of patent or utility model | ||
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| CP03 | Change of name, title or address |
Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |