CN100366444C - Laser internal engraving equipment for transparent material - Google Patents
Laser internal engraving equipment for transparent material Download PDFInfo
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- CN100366444C CN100366444C CNB2004100134159A CN200410013415A CN100366444C CN 100366444 C CN100366444 C CN 100366444C CN B2004100134159 A CNB2004100134159 A CN B2004100134159A CN 200410013415 A CN200410013415 A CN 200410013415A CN 100366444 C CN100366444 C CN 100366444C
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Abstract
The present invention provides laser internal carving equipment of transparent materials, which comprises a laser device, a ray-expanding mirror, two light beam deflection mirrors, a focusing mirror and a computer, wherein the laser device comprises a full-reflecting mirror, a sound and light Q-adjusting device, a semiconductor pumping module, a frequency doubling crystal and an outputting mirror; the full-reflecting mirror is coated with a fundamental frequency full-reflecting membrane layer or is coated with fundamental frequency and multiplier frequency double full-reflecting membrane layer; the outputting mirror is coated with a membrane layer, the transmissivity of the membrane layer to fundamental frequency light is from 4% to 10%, and the transmissivity of the membrane layer to multiplier frequency light is full; the power source of the sound and light Q-adjusting device adjusts the driving frequency of the sound and light Q-adjusting device and produces 1 to 10 kilohertz Q-adjusting multiplier frequency laser pulse to be outputted; the computer controls an XY working bench to realize motion in the X direction and the Y direction of the first light beam deflection mirror, the second light beam deflection mirror and the focusing mirror, and controls a one-dimensional electrical controlling displacement platform to realize the motion in the Z direction of the focusing mirror and the transparent material. The present invention has the advantages of good laser outputting mode, steady and efficient light power and fast carving ratio, and the present invention is suitable for carving the transparent material with big breadth.
Description
Technical field
The present invention relates to the inner engraving equipment of a kind of transparent material laser.
Background technology
The inside engraving equipment of simple glass and other transparent materials has become an emerging developing direction of the inner engraving of laser.At present, the inner engraving equipment of laser is mainly used in quartzy quartz glass, and the shortcoming of the inner engraving equipment of this laser is: mainly adopt the pulse laser of flash lamp pumping, beam quality is relatively poor, and it is big to focus on after-explosion point, and carved image is not meticulous; Adopt electric-optically Q-switched, laser pulse repetition frequency low (having only about hundred hertz), speed is slow, is not suitable for carrying out the inside engraving of large format simple glass and other transparent materials; Because adopt flash lamp pumping, the life-span of laser pump source is shorter, make troubles for the maintenance and the use of equipment.Therefore, present body laser inner carving product only limits to a limited number of, small-sized handicraft scope, has limited the use field expansion of laser-light transparent material internal engraving and has extended.
Summary of the invention
The objective of the invention is to overcome the weak point of the inner engraving equipment of above-mentioned laser, provide a kind of transparent material laser inner engraving equipment.This equipment adopts high repetition frequency 1～10 KHz, semiconductor pumped total solidifying laser device light source as the laser-light transparent material, has promoted the performance indications of body laser inner carving equipment comprehensively.
For achieving the above object, the technical solution used in the present invention is: the inner engraving equipment of a kind of transparent material laser comprises laser instrument, beam expanding lens, first beam-deflecting mirror, second beam-deflecting mirror, focus lamp and computer; Laser instrument comprises total reflective mirror, A-O Q-switch device and power supply thereof, semiconductor pumping module, frequency-doubling crystal, outgoing mirror, total reflective mirror, outgoing mirror and semiconductor pumping module constitute laserresonator, power supply and A-O Q-switch device join, A-O Q-switch device places between total reflective mirror and the semiconductor pumping module, frequency-doubling crystal places between semiconductor pumping module and the outgoing mirror, or A-O Q-switch device places between semiconductor pumping module and the outgoing mirror, frequency-doubling crystal places between A-O Q-switch device and the outgoing mirror, total reflective mirror is coated with fundamental frequency light all-trans film, perhaps be coated with fundamental frequency light and the frequency doubled light anti-rete of enjoying a double blessing simultaneously, it is 4%～10% and to the rete of frequency doubled light full impregnated that outgoing mirror is coated with the fundamental frequency light transmission rate simultaneously, the driving frequency of power adjustment A-O Q-switch device produces the output of 1～10 KHz q-multiplier laser pulse at 1～10 KHz; Beam expanding lens enlarges the lasing beam diameter of laser instrument output, and angle of divergence compression is dwindled the spot diameter after laser beam focuses on by focus lamp, obtains little focal beam spot; First beam-deflecting mirror is installed on the x axle of xy workbench, will be deflected into the laser beam that is parallel to the y axle through the laser beam that is parallel to the x axle behind the beam expanding lens; Second beam-deflecting mirror is installed on the y axle of xy workbench, and the laser beam of the above-mentioned y of being parallel to axle is deflected into the laser beam that is parallel to the z axle; The optical axis of focus lamp is parallel to the z axle, and is installed on the y axle of xy workbench with the automatically controlled displacement platform of one dimension, and the laser beam of the above-mentioned z of being parallel to axle is focused in the transparent material; Computer control xy workbench is realized the motion of first beam-deflecting mirror on directions X, the motion on x, y direction of second beam-deflecting mirror and focus lamp; The automatically controlled displacement platform of computer controlled one-dimensional is realized condenser lens or the motion of transparent material on the z direction.
The invention has the advantages that:
(1) adopt the mode of continuous semiconductor pumping, efficient height, life-span are long, and plant maintenance makes things convenient for.
(2) adopt the acousto-optic Q modulation mode, the frequency of output laser pulse can reach 1～10 KHz, and carving speed is fast, can be fit to carry out the inner engraving of large format transparent material greater than 12 meters/minute.
(3) adopt the outgoing mirror that is coated with fundamental frequency light transmission rate 4%～10% and frequency doubled light total transmissivity rete simultaneously, when determining pump power, can obtain the double-frequency laser output of maximum conversion efficiency.
(4) the laser output mode is good, light power stabilising.
(5) compare with existing interior carving equipment, carving speed has improved more than 10 times, therefore, can utilize large format xy workbench, at high speed large tracts of land simple glass, quartzy quartz and other transparent class materials is carried out the inside engraving.
Description of drawings
Fig. 1 is the structural representation of an embodiment of the present invention.
Fig. 2 is the structural representation of a kind of embodiment of laser instrument among Fig. 1.
Fig. 3 is the structural representation of the another kind of embodiment of laser instrument among Fig. 1.
The specific embodiment
As shown in Figure 1, the inner engraving equipment of a kind of transparent material laser comprises laser instrument 1, beam expanding lens 2, first beam-deflecting mirror 3, second beam-deflecting mirror 4, focus lamp 5 and computer 6.
First beam-deflecting mirror 3 is installed on the x axle of xy workbench 7, and mirror surface is parallel to the z axle, perpendicular to the xy plane, is 45 degree with the angle of x axle and y axle, will be deflected into the laser beam that is parallel to the y axle through the laser beam that is parallel to the x axle behind the beam expanding lens 2;
Second beam-deflecting mirror 4 is installed on the y axle of xy workbench 7, mirror surface is parallel to the x axle, perpendicular to the yz plane, be 45 degree with the angle of y axle and z axle, will be deflected into the laser beam that is parallel to the z axle through the laser beam that is parallel to the y axle behind first beam-deflecting mirror 3;
The optical axis of focus lamp 5 is parallel to the z axle, and is installed on the y axle of xy workbench 7 with the automatically controlled displacement platform 8 of one dimension, and focus lamp 5 is by the motion on xy and three directions of z, and the laser beam that will be parallel to the z axle focuses in the transparent material on the laser work platform;
By shown in Figure 2, laser instrument 1 can comprise total reflective mirror 9, A-O Q-switch device 10 and power supply 14 thereof, semiconductor pumping module 11, frequency-doubling crystal 12, outgoing mirror 13.Total reflective mirror 9, outgoing mirror 13 constitute laserresonator with semiconductor pumping module 11, power supply 14 joins with A-O Q-switch device 10, A-O Q-switch device 10 places between total reflective mirror 9 and the semiconductor pumping module 11, frequency-doubling crystal 12 places between semiconductor pumping module 11 and the outgoing mirror 13, total reflective mirror 9 is coated with fundamental frequency light all-trans film, perhaps is coated with fundamental frequency light and the frequency doubled light anti-rete of enjoying a double blessing simultaneously.It is 4%～10% and to the rete of frequency doubled light full impregnated that outgoing mirror 13 is coated with fundamental frequency light transmission rate scope simultaneously.Frequency-doubling crystal 12 can be crystal such as KTP, BBO.Semiconductor pumping module 11 comprises semiconductor pumping sources and laser crystal, it and total reflective mirror 9, outgoing mirror 13 constitute basic laserresonator, the laser output of vibrating between total reflective mirror 9, A-O Q-switch device 10, semiconductor pumping module 11, frequency-doubling crystal 12 and outgoing mirror 13 produces frequency doubled light.The driving frequency that power supply 14 is regulated A-O Q-switch device 10 produces the output of 1～10 KHz q-multiplier laser pulse at 1～10 KHz.
Laserresonator of the present invention does not use the outgoing mirror that is coated with fundamental frequency light total reflection and frequency doubled light total transmissivity film, but according to continuous wave laser under a certain pump power condition, outgoing mirror has the principle of optimum transmission, the shg efficiency of nonlinear crystal in the resonator etc. is all the part of outgoing mirror transmitance, design the transmitance of the outgoing mirror fundamental frequency light when active resonant cavity gain coefficient and power dissipation optimal coupling operating point, operate in maximum light-light conversion efficiency scope to guarantee continuous wave laser.At this moment, the power of frequency doubled light also reaches maximum.
The triggering signal that computer 6 produces according to engraving pattern, the opening and closing of control A-O Q-switch device power supply 14, thus the duty of control A-O Q-switch device 10 can make resonator be in high loss or low-loss state, therefore, can control resonator and have or not laser output.
By shown in Figure 3, laser instrument 1 can comprise total reflective mirror 9, semiconductor pumping module 11, A-O Q-switch device 10 and power supply 14 thereof, frequency-doubling crystal 12, outgoing mirror 13, total reflective mirror 9, outgoing mirror 13 constitutes laserresonator with semiconductor pumping module 11, power supply 14 joins with A-O Q-switch device 10, A-O Q-switch device 10 places between semiconductor pumping module 11 and the outgoing mirror 13, frequency-doubling crystal 12 places between A-O Q-switch device 10 and the outgoing mirror 13, total reflective mirror 9 is coated with fundamental frequency light all-trans film, perhaps be coated with fundamental frequency light and the frequency doubled light anti-rete of enjoying a double blessing simultaneously, it is 4%～10% and to the rete of frequency doubled light full impregnated that outgoing mirror 13 is coated with the fundamental frequency light transmission rate simultaneously, the driving frequency that power supply 14 is regulated A-O Q-switch device 10 produces the output of 1～10 KHz q-multiplier laser pulse.
Claims (1)
1. the inner engraving equipment of transparent material laser comprises laser instrument (1), beam expanding lens (2), first beam-deflecting mirror (3), second beam-deflecting mirror (4), focus lamp (5) and computer (6); Beam expanding lens (2) enlarges the lasing beam diameter of laser instrument (1) output, angle of divergence compression, the spot diameter that laser beam is passed through after focus lamp (5) focuses on dwindles, obtain little focal beam spot: first beam-deflecting mirror (3) is installed on the x axle of xy workbench (7), will be deflected into the laser beam that is parallel to the y axle through the laser beam that is parallel to the x axle behind the beam expanding lens (2); Second beam-deflecting mirror (4) is installed on the y axle of xy workbench (7), and the laser beam of the above-mentioned y of being parallel to axle is deflected into the laser beam that is parallel to the z axle; The optical axis of focus lamp (5) is parallel to the z axle, and is installed on the y axle of xy workbench (7) with the automatically controlled displacement platform of one dimension (8), and the laser beam of the above-mentioned z of being parallel to axle is focused in the transparent material; Computer (6) control xy workbench (7) is realized the motion of first beam-deflecting mirror (3) on the x direction, second beam-deflecting mirror (4) and the motion of focus lamp (5) on x, y direction;
It is characterized in that:
Laser instrument (1) comprises total reflective mirror (9), A-O Q-switch device (10) and power supply (14) thereof, semiconductor pumping module (11), frequency-doubling crystal (12), outgoing mirror (13), total reflective mirror (9), outgoing mirror (13) constitutes laserresonator with semiconductor pumping module (11), power supply (14) joins with A-O Q-switch device (10), A-O Q-switch device (10) places between total reflective mirror (9) and the semiconductor pumping module (11), frequency-doubling crystal (12) places between semiconductor pumping module (11) and the outgoing mirror (13), or A-O Q-switch device (10) places between semiconductor pumping module (11) and the outgoing mirror (13), frequency-doubling crystal (12) places between A-O Q-switch device (10) and the outgoing mirror (13), total reflective mirror (9) is coated with fundamental frequency light all-trans film, perhaps be coated with fundamental frequency light and the frequency doubled light anti-rete of enjoying a double blessing simultaneously, it is 4%～10% and to the rete of frequency doubled light full impregnated that outgoing mirror (13) is coated with the fundamental frequency light transmission rate simultaneously, power supply (14) is regulated the driving frequency of A-O Q-switch device (10), produces the output of 1～10 KHz q-multiplier laser pulse;
Computer (6) the control automatically controlled displacement platform of one dimension (8) is realized condenser lens (5) or the motion of transparent material on the z direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100134159A CN100366444C (en) | 2004-07-04 | 2004-07-04 | Laser internal engraving equipment for transparent material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100134159A CN100366444C (en) | 2004-07-04 | 2004-07-04 | Laser internal engraving equipment for transparent material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1593942A CN1593942A (en) | 2005-03-16 |
| CN100366444C true CN100366444C (en) | 2008-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100134159A Expired - Fee Related CN100366444C (en) | 2004-07-04 | 2004-07-04 | Laser internal engraving equipment for transparent material |
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| CN (1) | CN100366444C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101152819B (en) * | 2006-09-28 | 2010-07-21 | 深圳市大族激光科技股份有限公司 | Device with internal laser carving |
| CN106112271B (en) * | 2016-08-22 | 2017-08-25 | 首都师范大学 | A kind of Multifunctional laser engraving machine system and engraving process |
| CN107378254A (en) * | 2017-06-06 | 2017-11-24 | 北京莱泽光电技术有限公司 | Multiwavelength laser marking device and multiwavelength laser marking method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278852A (en) * | 1990-10-11 | 1994-01-11 | Kigre, Inc. | Intra-cavity high order harmonic laser |
| CN2178642Y (en) * | 1993-12-23 | 1994-10-05 | 孟广君 | Seal carving machine with gas laser |
| CN1256211A (en) * | 1998-12-07 | 2000-06-14 | 大连星山电器有限公司 | Application equipment and technology for laser carved picture and writing |
| CN2723224Y (en) * | 2004-07-04 | 2005-09-07 | 华中科技大学 | Laser internal carving device for transparent material |
-
2004
- 2004-07-04 CN CNB2004100134159A patent/CN100366444C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278852A (en) * | 1990-10-11 | 1994-01-11 | Kigre, Inc. | Intra-cavity high order harmonic laser |
| CN2178642Y (en) * | 1993-12-23 | 1994-10-05 | 孟广君 | Seal carving machine with gas laser |
| CN1256211A (en) * | 1998-12-07 | 2000-06-14 | 大连星山电器有限公司 | Application equipment and technology for laser carved picture and writing |
| CN2723224Y (en) * | 2004-07-04 | 2005-09-07 | 华中科技大学 | Laser internal carving device for transparent material |
Non-Patent Citations (1)
| Title |
|---|
| 二极管侧面泵浦倍频固体激光技术研究. 赵鸿.中国科学院博士学位研究生学位论文. 2001 * |
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| CN1593942A (en) | 2005-03-16 |
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Granted publication date: 20080206 Termination date: 20130704 |