CN100357773C - Mocro mechanical optical fiber locator - Google Patents
Mocro mechanical optical fiber locator Download PDFInfo
- Publication number
- CN100357773C CN100357773C CNB200510030975XA CN200510030975A CN100357773C CN 100357773 C CN100357773 C CN 100357773C CN B200510030975X A CNB200510030975X A CN B200510030975XA CN 200510030975 A CN200510030975 A CN 200510030975A CN 100357773 C CN100357773 C CN 100357773C
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- optical fiber
- metal base
- flexible
- flexible strip
- locating slot
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- Mechanical Coupling Of Light Guides (AREA)
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Abstract
The present invention relates to a micro mechanical optical fiber locator which belongs to the technical field of micro machinery and optics. The present invention comprises a locating slot and a flexible clip, wherein the flexible clip is arranged above the locating slot. The locating slot comprises a monocrystal silicon substrate and a section slot, wherein the section slot is arranged on the monocrystal silicon substrate. The flexible clip comprises a metal base and a flexible piece, wherein the metal base and the flexible piece are arranged in the same plane, and are in integration structure. The bottom surfaces of the metal base and the flexible piece are both clung to the top surface of the monocrystal silicon substrate, and the metal base is arranged on the surface of the monocrystal silicon substrate. The metal base is fixed to the monocrystal silicon substrate by adhesive force generated by metal sputtering, and optical fiber is fixed in the locator by elastic deforming force in the flexible piece. The present invention is easy for mass production, and realizes the quick, reliable and accurate locating of fiber, and fiber with active modules.
Description
Technical field
What the present invention relates to is the device of a kind of micromechanics and optical technical field, specifically, is a kind of micromechanical optical fiber positioner.
Background technology
At present, passive positioning (passive alignment) technology has become and has reduced one of the most key technology of packaging cost in the integrated optical device preparation.Its main thought is to utilize the V-type groove for preparing on the monocrystalline silicon to realize optical fiber and optical fiber, and the accurate of parts such as optical fiber and laser diode tube core are aimed at.At present, how after finishing aligning optical fiber to be fixed in the V-type groove is a great problem that needs to be resolved hurrily, existing technology mainly adopts gluing or metallization packaged, the former is because creep can take place in glue in solidification process, perhaps owing to the different reason of thermal expansivity, make optical fiber in the process of solidifying, depart from the initial alignment position, make that coupling efficiency might be far below initial value.The latter then needs the optical fiber of coupling is done metalized, and needs the laser spot welder dedicated treatment facility, has increased packaging cost greatly.In order to address the above problem, people begin to consider to utilize the principle and the method for the micro mechanical technology that occurs in recent years.
Find through literature search prior art, people such as MartinHoffman are at " Photonics TechnologyLetters " (photoelectron technology wall bulletin) VOL.12, NO.7,2000, write articles " Fiber ribbonalignment structures based on rhombus-shaped channels in silicon (based on the fibre ribbon align structures of silicon rhombus groove) " on pp828 ~ 830, this article has been introduced a kind of wet etching method of machine cut cooperation silicon that utilizes and has been prepared optical fiber locator: on 100 silicon chips, earlier on silicon chip, mark the narrow groove of square-section with machine cut, utilize the method for wet etching again, utilize the anisotropy of monocrystalline silicon corrosion to form the diamond-shaped cross-section groove.Utilize four sides of rhombus groove that optical fiber is fixed in the groove.Its weak point is: very poor with existing semiconducter process compatibility, be difficult to satisfy requirement of mass production; The size Control precision of machine cut is difficult to guarantee, can have influence on the alignment precision of follow-up formed rhombus groove, and then the coupling efficiency of optical fiber is reduced greatly, also has big difficulty aspect practicability.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of micromechanical optical fiber positioner is provided, make it be easy to making in enormous quantities, realize optical fiber and optical fiber, optical fiber and quick, reliable, the accurate location of source module is arranged.
The present invention is achieved by the following technical solutions, the present invention includes: locating slot and flexible clip, flexible clip are located at the top of locating slot.Described locating slot comprises: monocrystalline substrate and section slot, section slot is located on the monocrystalline substrate, described flexible clip comprises: metal base and flexible strip, metal base and flexible strip are located in the same plane, metal base and flexible strip are integrated, all fit with the end face of monocrystalline substrate in the bottom surface of metal base and flexible strip, metal base is located on the monocrystalline substrate surface, metal base and monocrystalline substrate are fixed, and utilize the elastic deformation force of flexible strip inside that optical fiber is fixed in the steady arm.
Described flexible strip is unsettled above locating slot.
Described section slot is V-type groove or rectangle, U type section slot.
Described metal base and flexible strip are made of same block of metal material.
When flexible strip is subjected to upwards acting force, as stiff end, produce elastic deformation upwards with metal base, innerly simultaneously produce downward elastic deformation force, size is relevant with the elastic deformation amount.Change material, shape and/or the thickness of flexible strip, can change the rigidity of flexible strip, thus the elastic deformation force who is produced when changing flexible strip generation elastic deformation.Utilize the elastic deformation force of flexible strip inside, can be fixed on optical fiber in the locating slot reliably.
Overlooking pattern with flexible strip is that the flexible clip of V font is an example, and the principle of work of optical fiber locator is described.When optical fiber was sent into locating slot, optical fiber surface leaned against on the detent groove surface, thereby by partial fixing, was example with the V-type locating slot, this moment optical fiber can't be downwards, left, play to the right, but still the play that can make progress.
If make when optical fiber leans against on the detent groove surface, the cylindrical upper surface peak of optical fiber is higher than monocrystalline silicon village basal surface, the bottom surface that promptly is higher than flexible clip, then when optical fiber when the most advanced and sophisticated direction of V-arrangement flexible strip enters the locating slot of flexible clip below, the cylindrical upper surface of optical fiber is with flexible strip jack-up, make flexible strip that elastic deformation upwards take place, thereby flexible strip is straddled above optical fiber, flexible strip produces downward acting force to the optical fiber that is positioned at the below, make the optical fiber play that can't make progress, thereby optical fiber is fixed in the locating slot reliably.The axis of optical fiber is consistent with the axis direction of locating slot, thereby realizes the reliable location and accurate aligning of optical fiber.It is many more that optical fiber upper surface peak exceeds the monocrystalline substrate surface, it is just big more that flexible strip upwards takes place by the elastic deformation amount, the acting force that optical fiber is applied is just big more, change the degree of depth of locating slot, can change the height that optical fiber right cylinder upper surface exceeds the flexible clip bottom surface, thus the clamping force of corrective action on optical fiber.Also can change the clamping force that acts on the optical fiber and change to constitute flexible clip material, thickness, shape.
The invention has the beneficial effects as follows: at first the present invention is convenient to realize making in enormous quantities, the locating slot structure can directly adopt existing integrated optical device semiconducter process, can make flexible clip and in existing integrated optical device semiconductor fabrication processes, insert simple operation, do not need existing integrated optical device semiconducter process is additionally inserted doping, diffusion or ion implantation technology, do big adjustment and change, compatible fully with it.On the other hand, can satisfy the requirement of dissimilar device package, coupling by changing the clamping force of the flexible corrective action of material, thickness, shape on optical fiber of flexible strip.
Description of drawings
Fig. 1 is a structural representation of the present invention
Embodiment
As shown in Figure 1, the present invention includes: locating slot 1 and flexible clip 2, flexible clip 2 is located at the top of locating slot 1.Described locating slot 1 comprises: monocrystalline substrate 5 and section slot 6, section slot 6 is located on the monocrystalline substrate 5, described flexible clip 2 comprises: metal base 3 and flexible strip 4, metal base 3 and flexible strip 4 are located in the same plane, metal base 3 and flexible strip 4 are integrated, all fit with the end face of monocrystalline substrate 5 in the bottom surface of metal base 3 and flexible strip 4, metal base 3 is located on monocrystalline substrate 5 surfaces, the adhesion that produces during by splash-proofing sputtering metal between metal base 3 and the monocrystalline substrate 5 is fixed, and utilizes the elastic deformation force of flexible strip 4 inside that optical fiber 7 is fixed in the steady arm.
Described flexible strip 4 is unsettled above locating slot 1.
Described section slot 6 is V-type groove or rectangle, U type section slot.
Described metal base 3 and flexible strip 4 are made of same block of metal material.
Claims (4)
1. micromechanical optical fiber positioner, comprise: locating slot (1) and flexible clip (2), it is characterized in that, described locating slot (1) comprising: monocrystalline substrate (5) and section slot (6), section slot (6) is located on the monocrystalline substrate (5), described flexible clip (2) comprising: metal base (3) and flexible strip (4), metal base (3) and flexible strip (4) are located in the same plane, metal base (3) flexible strip (4) is integrated, all fit with the end face of monocrystalline substrate (5) in the bottom surface of metal base (3) and flexible strip (4), metal base (3) is located on monocrystalline substrate (5) surface, and flexible clip (2) is located at the top of locating slot (1); Described flexible strip (4) is unsettled in locating slot (1) top, and described metal base (3) is fixing with monocrystalline substrate (5).
2. micromechanical optical fiber positioner according to claim 1 is characterized in that, described section slot (6) is V-type groove or rectangle, U type section slot.
3. micromechanical optical fiber positioner according to claim 1 is characterized in that, described metal base (3) and flexible strip (4) are made of same block of metal material.
4. micromechanical optical fiber positioner according to claim 1 is characterized in that, described flexible strip (4) is fixed on optical fiber (7) in the steady arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510030975XA CN100357773C (en) | 2005-11-03 | 2005-11-03 | Mocro mechanical optical fiber locator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510030975XA CN100357773C (en) | 2005-11-03 | 2005-11-03 | Mocro mechanical optical fiber locator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1760705A CN1760705A (en) | 2006-04-19 |
| CN100357773C true CN100357773C (en) | 2007-12-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200510030975XA Expired - Fee Related CN100357773C (en) | 2005-11-03 | 2005-11-03 | Mocro mechanical optical fiber locator |
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| Country | Link |
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| CN (1) | CN100357773C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102073105A (en) * | 2010-12-07 | 2011-05-25 | 福州高意通讯有限公司 | Optical fiber holder |
| CN107161803A (en) * | 2017-06-30 | 2017-09-15 | 华中科技大学鄂州工业技术研究院 | A kind of multifunctional optical fiber coiling apparatus |
| CN112130251A (en) * | 2020-09-21 | 2020-12-25 | 中国科学院长春光学精密机械与物理研究所 | Optical fiber positioner and positioning method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09152522A (en) * | 1995-11-30 | 1997-06-10 | Sumitomo Electric Ind Ltd | Structure for connecting optical fiber aligning parts and optical waveguide substrate |
| CN1386207A (en) * | 2000-07-10 | 2002-12-18 | 住友电气工业株式会社 | Optical fiber wire holder, fused connection device, cutting device, and method of connecting optical fiber |
| GB2381325A (en) * | 2001-10-26 | 2003-04-30 | Bookham Technology Plc | Mounting an optical fibre to an optical chip using a resilient portion |
| CN1131454C (en) * | 2000-12-19 | 2003-12-17 | 上海交通大学 | Electromagnetically driven micromechanical variable light attenuator |
| US20040170362A1 (en) * | 2001-04-05 | 2004-09-02 | Jan-Ake Engstrand | Method and arrangement for fixing of optical fibers |
-
2005
- 2005-11-03 CN CNB200510030975XA patent/CN100357773C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09152522A (en) * | 1995-11-30 | 1997-06-10 | Sumitomo Electric Ind Ltd | Structure for connecting optical fiber aligning parts and optical waveguide substrate |
| CN1386207A (en) * | 2000-07-10 | 2002-12-18 | 住友电气工业株式会社 | Optical fiber wire holder, fused connection device, cutting device, and method of connecting optical fiber |
| CN1131454C (en) * | 2000-12-19 | 2003-12-17 | 上海交通大学 | Electromagnetically driven micromechanical variable light attenuator |
| US20040170362A1 (en) * | 2001-04-05 | 2004-09-02 | Jan-Ake Engstrand | Method and arrangement for fixing of optical fibers |
| GB2381325A (en) * | 2001-10-26 | 2003-04-30 | Bookham Technology Plc | Mounting an optical fibre to an optical chip using a resilient portion |
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| Publication number | Publication date |
|---|---|
| CN1760705A (en) | 2006-04-19 |
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Granted publication date: 20071226 Termination date: 20101103 |