CN100357718C - Multifunctional sensor with sound and vibration integration and producing method thereof - Google Patents
Multifunctional sensor with sound and vibration integration and producing method thereof Download PDFInfo
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- CN100357718C CN100357718C CNB2004100137848A CN200410013784A CN100357718C CN 100357718 C CN100357718 C CN 100357718C CN B2004100137848 A CNB2004100137848 A CN B2004100137848A CN 200410013784 A CN200410013784 A CN 200410013784A CN 100357718 C CN100357718 C CN 100357718C
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Abstract
The present invention provides a sound-vibration integrated multifunctional sensor and a manufacturing method thereof. The sound-vibration integrated multifunctional sensor comprises a tube support, a tube shell arranged on the tube support and pins connected with the tube support, wherein the upper part of the tube shell is provided with sound penetrating holes, and electret microphones are arranged in corresponding positions in the tube shell to the sound penetrating holes; a circuit board of which the middle part is provided with a vibration structure sensing element is arranged on the tube support, and a sound interface circuit and a vibration interface circuit are respectively arranged on both sides of the vibration structure sensing element; the electret microphones are connected with the sound interface circuit via flexible conducting wires, and the vibration structure sensing element is welded with the vibration interface circuit. The present invention has the advantages of simple structure, simultaneous measurement of the sound and the vibration signals, no mutual effect between the sound and the vibration signals, high reliability, easy mass production, high sensitivity, wide band range, etc.
Description
(1) technical field
What the present invention relates to is a kind of sensor.Specifically a kind of sound and vibration integrated multifunction sensor.The invention still further relates to the method for making of this sensor.
(2) background technology
Sensor cans be compared to people's face, is the important tool of obtaining information.Along with the development of TT﹠C system robotization, require sensor accuracy height, reliability height, good stability, and possess certain data processing capability, and can self check, self-correcting, self compensation.Traditional sensor can not satisfy such requirement, and some occasion need be measured the little Multifunction Sensor (can either change the sensor of two or more different physical quantities) of volume of a plurality of parameters simultaneously.For example, use special pottery that the temperature and humidity sensitive element is integrated, make Temperature Humidity Sensor; The sensitive element that detects sodion and potassium ion is integrated on the substrate, makes the sensor of measuring blood intermediate ion composition; To detect several gas with various sensitive elements and do on same substrate, and make and detect H with the thick film manufacturing process
2S, C
8H
18, NH
3, C
20H
20The Multifunction Sensor of four kinds of gases of O; Make strainometer and temperature-sensing element (device) on same silicon chip, make the Multifunction Sensor of while gaging pressure and temperature, this sensor can also be realized temperature compensation.In addition, Japanese scholar also develops other Multifunction Sensor, as measuring humiture and wind speed, the sensor of Measuring Object surface smoothness and temperature.Some Multifunction Sensor is hybrid-type, makes several sensors respectively and assembles.These Multifunction Sensors are because function is strong, the integrated level height, volume is little, therefore can significantly reduce the quantity of sensor and the weight of stube cable line, this just is that aircraft such as guided missile, satellite, spaceship are needed, so they play important effect in aerospace field.
At present, countries in the world are all at development and the various Multifunction Sensors of exploitation, wherein the most successful is the DSTJ-3000 pressure reduction pressure transducer of U.S. Honeywell company development, has spread pressure reduction, static pressure and three sensitive elements of temperature with the ion implantation configuration on same block semiconductor substrate.1000 series digit formula quartz transducers of Par Scientific company development.The FDAC Research Institute can discern four kinds of gas olfactory sensor.As mentioned above, more existing at present Multifunction Sensors occur, but can but not build report by the moving Multifunction Sensor of vibration measuring again by survey sound.
(3) summary of the invention
The object of the present invention is to provide a kind of simple in structurely, be easy to produce in batches integrated sound and vibration Multifunction Sensor.The present invention also aims to provide the method for making of this integrated sound and vibration Multifunction Sensor.
The composition of product of the present invention comprises base, be installed in shell and the pin that is connected on the base on the base, shell top has sound penetrating hole, with the sound penetrating hole corresponding section electret microphone is installed in the shell, circuit board is installed on the base, the centre of circuit board is the vibrational structure sensitive element, be respectively acoustic interface circuit and vibration interface circuit in the both sides of vibrational structure sensitive element, electret microphone links to each other by flexible wire with the acoustic interface circuit, weld between vibrational structure sensitive element and the vibration interface circuit, described vibrational structure sensitive element is positioned on the base axis, acoustic interface circuit and the shared power supply of vibration interface circuit.
Product of the present invention can also comprise: be provided with insulation course between circuit board and base.
Product of the present invention is to adopt such method to make:
(1) sensitive element that adopts the standard electret microphone to make a sound on the sensor shell, and has sound penetrating hole with its elastic adhesive;
(2) integrated interface circuit with sonic transducer is fixed on the sensor base, and flexibly connects by lead with electret microphone;
(3) the vibrational structure sensitive element is fixed on the sensor base axis;
(4) integrated interface circuit with vibration transducer is fixed on the sensor base, and connects by ultra-sonic welded in the vibrational structure sensitive element;
(5) with the vibration transducer structure of sonic transducer, MEMS fabrication techniques, integrate with the corresponding interface circuit chip, make vibration transducer be positioned at axis central authorities, forms a sound and vibrate multi-functional dynamic sensor.
The invention has the advantages that:
1, simple in structure, measurement sound and vibration signal simultaneously;
2, sound and vibration signal not influence mutually;
3, reliability height is easy to produce in batches;
4, highly sensitive, frequency band range is wide.
The application of product of the present invention is very extensive, and certain application background is particularly militarily arranged.
(4) description of drawings
Fig. 1 is an external structure synoptic diagram of the present invention;
Fig. 2 is the cut-open view of Fig. 1;
Fig. 3 is the structural representation of base of the present invention.
(5) embodiment
For example the present invention is done description in more detail below in conjunction with accompanying drawing:
(1) sensitive element that adopts standard small electret microphone 6 to make a sound, select highly sensitive and electret microphone high conformity, earlier shell 1 is carried out ultrasonic cleaning, and the aperture that to bore a radius be the 1-3 millimeter, adopt glass cement or organic silica gel elastic adhesive layer 5 with the electret microphone elastic adhesive and be fixed on above the inner wall of tube shell then, and make sound penetrating hole and electret microphone keep passage unimpeded.
(2) will have acoustic interface circuit 9 and be welded on the base, and between pcb board and base, add insulation course 8 with the pcb board that vibrates interface circuit 11.
(3) electret microphone is connected by flexible wire with the acoustic interface circuit.
(4) vibrational structure sensitive element 10 usefulness 508 glue are fixed on the base axis, make its sensitivity maximum to axial vibration.To vibrate interface circuit then is connected by ultra-sonic welded with the vibrational structure sensitive element.
(5) with the vibration transducer structure of sonic transducer, MEMS fabrication techniques, integrate with the corresponding interface circuit chip, make vibration transducer be positioned at axis central authorities, forms a sound and vibrate multi-functional dynamic sensor.Then the sensor housing pressure welding is integral.
The pin that has on the base comprises+5V single power supply 12, earth potential 13, vibration output 14,15, sound output 16,17 and standby pin 18.
Claims (2)
1, a kind of sound and vibration integrated multifunction sensor, it comprises base, be installed in shell and the pin that is connected on the base on the base, it is characterized in that: shell top has sound penetrating hole, with the sound penetrating hole corresponding section electret microphone is installed in the shell, circuit board is installed on the base, the centre of circuit board is the vibrational structure sensitive element, be respectively acoustic interface circuit and vibration interface circuit in the both sides of vibrational structure sensitive element, electret microphone links to each other by flexible wire with the acoustic interface circuit, weld between vibrational structure sensitive element and the vibration interface circuit, described vibrational structure sensitive element is positioned on the base axis, acoustic interface circuit and the shared power supply of vibration interface circuit are provided with insulation course between circuit board and base.
2, the method for making of a kind of sound and vibration integrated multifunction sensor is characterized in that:
(1) sensitive element that adopts the standard electret microphone to make a sound with its elastic adhesive, be fixed on above the sensor shell, and has sound penetrating hole;
(2) integrated interface circuit with sonic transducer is fixed on the sensor base, and flexibly connects by lead with electret microphone;
(3) the vibrational structure sensitive element is fixed on the sensor base axis;
(4) integrated interface circuit with vibration transducer is fixed on the sensor base, and connects by ultra-sonic welded in the vibrational structure sensitive element;
(5) with the vibration transducer structure of sonic transducer, MEMS fabrication techniques, integrate with the corresponding interface circuit chip, make vibration transducer be positioned at axis central authorities, forms a sound and vibrate multi-functional dynamic sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100137848A CN100357718C (en) | 2004-05-28 | 2004-05-28 | Multifunctional sensor with sound and vibration integration and producing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100137848A CN100357718C (en) | 2004-05-28 | 2004-05-28 | Multifunctional sensor with sound and vibration integration and producing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1584518A CN1584518A (en) | 2005-02-23 |
| CN100357718C true CN100357718C (en) | 2007-12-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100137848A Expired - Fee Related CN100357718C (en) | 2004-05-28 | 2004-05-28 | Multifunctional sensor with sound and vibration integration and producing method thereof |
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| Country | Link |
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| CN (1) | CN100357718C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU198634U1 (en) * | 2020-02-06 | 2020-07-21 | Общество с ограниченной ответственностью «Виавейв» | Vibration measuring device |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4523879B2 (en) * | 2005-06-20 | 2010-08-11 | 株式会社日立製作所 | Electrical / acoustic transducers, array-type ultrasonic transducers and ultrasonic diagnostic equipment |
| CN103344319B (en) * | 2013-06-12 | 2015-10-07 | 西安费斯达自动化工程有限公司 | The array Detection and estimation method of neighbourhood noise field strength and distribution |
| TWI681371B (en) * | 2018-03-31 | 2020-01-01 | 鈺紳科技股份有限公司 | Vibration and sound wave integrated sensing system and method |
| CN109839180B (en) * | 2019-02-20 | 2020-11-13 | 中国电子科技集团公司第四十九研究所 | Resonant high-sensitivity acoustic sensor |
| JP7112740B2 (en) * | 2019-08-08 | 2022-08-04 | アイリスオーヤマ株式会社 | lighting equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5035247A (en) * | 1987-12-31 | 1991-07-30 | Jochen Heimann | Sensor for non-invasive measurement of sound, pressure and vibration on the human body |
| CN2110234U (en) * | 1991-04-23 | 1992-07-15 | 王升贵 | Earthquake predictor |
| CN1113567A (en) * | 1994-01-20 | 1995-12-20 | 塞比卢斯有限公司 | Structure-borne sound detector for an intruder alarm system |
| CN2404171Y (en) * | 1999-11-12 | 2000-11-01 | 彭建国 | Vibrating sound recording and playing antitheft alarmer |
| US6178820B1 (en) * | 1996-11-20 | 2001-01-30 | Vtt | Sensor for measuring acceleration and sound pressure |
-
2004
- 2004-05-28 CN CNB2004100137848A patent/CN100357718C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5035247A (en) * | 1987-12-31 | 1991-07-30 | Jochen Heimann | Sensor for non-invasive measurement of sound, pressure and vibration on the human body |
| CN2110234U (en) * | 1991-04-23 | 1992-07-15 | 王升贵 | Earthquake predictor |
| CN1113567A (en) * | 1994-01-20 | 1995-12-20 | 塞比卢斯有限公司 | Structure-borne sound detector for an intruder alarm system |
| US6178820B1 (en) * | 1996-11-20 | 2001-01-30 | Vtt | Sensor for measuring acceleration and sound pressure |
| CN2404171Y (en) * | 1999-11-12 | 2000-11-01 | 彭建国 | Vibrating sound recording and playing antitheft alarmer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU198634U1 (en) * | 2020-02-06 | 2020-07-21 | Общество с ограниченной ответственностью «Виавейв» | Vibration measuring device |
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| Publication number | Publication date |
|---|---|
| CN1584518A (en) | 2005-02-23 |
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