CN100341260C - Laser receiving device for laser alignment system with zone plate - Google Patents
Laser receiving device for laser alignment system with zone plate Download PDFInfo
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- CN100341260C CN100341260C CNB2003101051106A CN200310105110A CN100341260C CN 100341260 C CN100341260 C CN 100341260C CN B2003101051106 A CNB2003101051106 A CN B2003101051106A CN 200310105110 A CN200310105110 A CN 200310105110A CN 100341260 C CN100341260 C CN 100341260C
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- 238000003384 imaging method Methods 0.000 claims description 35
- 210000001747 pupil Anatomy 0.000 claims description 6
- 238000005259 measurement Methods 0.000 abstract description 17
- 230000003287 optical effect Effects 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 description 12
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 2
- 210000003128 head Anatomy 0.000 description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000023077 detection of light stimulus Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a receiving device for a laser wave zone plate collimating system, which belongs to the technical filed of measurement for optics, photoelectric detection and geometric positions. The present invention is characterized in that the present invention is composed of a convergent mirror, a zoom lens, a video camera and a calibrating mechanism. The present invention achieve the purposes of changeable distance from the measured point and a receiving device and different requirements for spatial resolution for receivers existing in the zone plate collimating system of area array camera waves, and the purpose of system calibration. The present invention has the effect and the advantages that because the video camera is used as a photoelectric receiving device, and a plurality of optical sensitive units are adopted, output images are convenient to carry out computer digital image processing; because changeable measuring ranges and space resolution are realized, the precision and the reliability of measurement are enhanced. Because no two-dimensional scanning mechanism is arranged in the device, the receiving device has the advantages of simple and compact structure and convenient sealed installation. Because the device does not need to carry out two-dimension point-by-point scanning, the measuring time is reduced, and the measuring speed is raised.
Description
Technical field
The invention belongs to optics, Photoelectric Detection and geometric position field of measuring technique, relate to a kind of laser receiver that is used for laser wave band plate colimated light system.
Background technology
Laser wave band plate colimated light system is made up of point-blank the LASER Light Source of arranging successively, zone plate and laser receiver etc.The laser beam directive zone plate that LASER Light Source is sent, under the effect of zone plate, can on laser receiver, form a luminous point, under ideal conditions, the LASER Light Source center, zone plate center and optical spot centre are point-blank, utilize this principle can realize high accuracy collimation and displacement measurement.Usually LASER Light Source and laser receiver are installed on two datum marks, zone plate is fixed on therebetween the measured point, when the measured point is subjected to displacement, the position of the luminous point on receiver will change, by measuring the variation of light spot position, just can realize measurement to the displacement of measured point.Laser wave band plate colimated light system is commonly used to realize the high accuracy Dam Deformation Measurement.
In laser wave band plate colimated light system, the effect of laser receiver is that the positional information with luminous point converts the signal of telecommunication to.Adopt by a photoelectricity reception of two-dimension translational sweep mechanism drive head of existing laser receiver done two-dimensional scan more in the receiving area, seek and the position of definite optical spot centre, photoelectricity receives normally one four picture limit photocell (or four lens and four photoelectric tubes splice and combine) of head, because the detection of light spot position is finished by scanning, thereby measuring speed is slow, when luminous point flicker appears, rock or the luminous point translational speed when very fast, occur omission easily, cause difficulty for the automation that detects.
Also there is the area array camera of employing photosurface directly to replace the photronic reception head of four picture limits, because the photosensitive unit of video camera is more, and can adopt computer image processing technology to carry out analyzing and processing to receiving image, thereby the influence that can eliminate the luminous point flicker and rock, with respect to adopting four picture limit photocells to have certain superiority.
But because the moving range of luminous point, still needs camera is installed in exploring spot position on the two-dimension translational sweep mechanism so can not directly utilize the whole moving area imaging of video camera to luminous point much larger than the photosurface of video camera.
If directly adopt the video camera of general band camera lens, then since the direction of luminous point light near directional light, have only the light of camera lens entrance pupil scope can enter video camera, even and enter video camera, luminous point for diverse location all can converge on the focus of camera lens, can not imaging, so can not directly use the video camera of general band camera lens, need special design one cover optical system be used for laser receiver.
In addition, because measurement point is near LASER Light Source during away from receiver, luminous point is bigger, big with time point with respect to the displacement of measurement point, requirement has bigger measuring range and relatively low spatial resolution, and when measurement point away from LASER Light Source during near receiver, luminous point is less, luminous point is less with respect to the displacement of measurement point, at this moment require video camera that less measuring range and higher spatial resolution are arranged, so just require receiving system that the measuring range and the spatial resolution of a variation can be provided.
Because laser receiver is to be used for accurately measuring spot displacement, be not subjected to the influence of the optical parametric of device for making measurement result, device is necessary can self-calibration.
Summary of the invention
The object of the invention provides a kind of laser receiver that is used for laser wave band plate colimated light system, adopt the video camera and the corresponding optical facilities of fixed-site, can carry out two-dimensional scan, just can accurately detect the position of luminous point, and be convenient to demarcate, can satisfy laser wave band plate colimated light system to the different resolution of laser receiver and the requirement of measuring range, reach simplied system structure, improve certainty of measurement and reduce the purpose of Measuring Time.
Technical scheme of the present invention, shown in Figure of description, a kind of laser receiver that is used for laser wave band plate colimated light system, this laser receiver be by convergent lens 1, video camera 3, imaging lens 2, semi-transparent semi-reflecting lens 4, scaling board 5 combines.Wherein, the luminous point of determining is at interval arranged on the scaling board 5, imaging lens 2 is a zoom lens or compound lens that can the multiple focal length of conversion.Close the position of each part: the entrance pupil of imaging lens 2 is positioned at the back focal plane F of convergent lens 1; The object plane U of imaging lens 2 overlaps with the primary flat of convergent lens 1; The picture plane V of imaging lens 2 overlaps with the photosurface of video camera; The placement of semi-transparent semi-reflecting lens 4 makes the picture of scaling board 5 overlap with the primary flat U of convergent lens 1.
The operation principle of this laser receiver is as follows: after light enters receiving system, the primary flat U that at first reaches convergent lens 1 goes up and forms luminous point a, light changes the entrance pupil F of direction post-concentration at imaging lens 2 through convergent lens 1, and enter imaging lens 2, because the primary flat U of convergent lens 1 also is imaging lens 2 object planes, and it is the photosurface of video camera 3 as plane V, so luminous point a will form a picture point b at the photosurface of video camera 3.When the change in location of luminous point a, the position of picture point b will change thereupon, and its correlation is by the optical parametric decision of imaging lens 2, utilize video camera with the image output of picture point b and handle, and just can utilize COMPUTER CALCULATION to go out the position of luminous point a.
The demarcation of device realizes by semi-transparent semi-reflecting lens 4 and scaling board 5, the luminous dot matrix that on scaling board 5, has spacing to determine, the luminous dot matrix of scaling board 5 is through semi-transparent semi-reflecting lens 4, be imaged on the convergent lens 1 primary flat U reference coordinate system that one of formation is a coordinate with these luminous dot matrix on primary flat U.Video camera 3 is by measuring the each point position of these luminous dot matrix, and the position of luminous point a compared with the position of these luminous dot matrix, just can determine the relative coordinate position in this reference coordinate system of luminous point a, this relative coordinate value can be because of the change of the optical parametric of imaging lens 2 and is changed.
In the less demanding place of certainty of measurement, can be placed on the position of convergent lens 1 primary flat U with the in-plane scatter screen, replace convergent lens 1, play the effect that changes the incident light direction equally, just the utilance of light is lower, be subjected to the Influence of Speckle that in-plane scatter screen causes simultaneously certainty of measurement is reduced, at this moment imaging lens 2 distance of shielding to in-plane scatter is 2～8 times of maximum measured zone size
By changing the focal length of imaging lens 2, can change the optical magnification of imaging lens 2, because the size of video camera 3 photosurfaces is changeless, the change of optical magnification will be positioned at convergent lens 1 primary flat U measured zone size and to the spatial resolution of relative coordinate.So just can make laser receiver reach best measuring range and spatial resolution by adjusting the focal length of imaging lens 2.
Effect of the present invention and benefit are owing to adopt video camera as photoelectric receiving device, photosensitive unit is many, the image of its output is convenient to carry out the computer digital image processing, and owing to can change measuring range and spatial resolution makes it reach optimum value, and have calibrating function, thereby certainty of measurement and reliability have been improved.Owing to do not have two-dimentional scanning mechanism in this device, make receiving system simple for structure, compact, be convenient to sealing and install.Because this device needn't carry out two-dimentional point by point scanning, has reduced Measuring Time, has improved measuring speed.
Description of drawings
It among the figure laser receiver structural representation of laser alignment measurement provided by the invention system.
Among the figure: 1 convergent lens, 2 imaging lens, 3 area array cameras, 4 semi-transparent semi-reflecting lens and 5 scaling boards.
U is the primary flat of convergent lens 1, and F is the focal plane of the entrance pupil and the convergent lens 1 of imaging lens 2, and V is the photosurface of video camera 3.A is the incident luminous point, the position of the b picture point that is luminous point a on photosensitive of video camera.
Embodiment
Below with reference to embodiment invention is described in further detail:
Convergent lens 1 in the laser receiver, imaging lens 2, and area array camera 3, five parts such as semi-transparent semi-reflecting lens 4 and scaling board 5 can be selected following parameter: convergent lens 1 is that 200 millimeters of diameters, focal length are 1000 millimeters lens.Imaging lens 2 is that focal length is the motorized zoom lens of 32-160mm.Video camera 3 is 1/2 inch CCD Bs, and its photosurface is of a size of 7.95 millimeters * 6.45 millimeters, and image pixel is 795 (H) * 596 (V).Semi-transparent semi-reflecting lens 4 adopts one 200 millimeters * 300 millimeters, and thick 5 millimeters plate glass only utilizes its reflecting surface imaging down.Scaling board 5 is one 220 millimeters * 220 millimeters, thick 0.3 millimeter metallic plate, being evenly equipped with diameter above is 0.5 millimeter little hole matrix, the vertical and horizontal distance between the aperture is 10.00 millimeters, light-emitting diode is arranged as light source behind the aperture, can form luminous dot matrix.
Above-mentioned five parts are arranged in the following manner and adjusted: convergent lens 1 is arranged in the rightmost side, and its primary flat U is the plane of light incidence of laser receiver.About 1000 millimeters in convergent lens 1 left side of imaging lens 2, the position of adjusting imaging lens 2 makes its entrance pupil overlap with the back focal plane F of convergent lens 1.Video camera 3 is fixed on the left side of imaging lens 2, adjust the relative position between video camera 3 and the imaging lens 2 and adjust the focusing of imaging lens 2, make the luminous point on the primary flat U that is positioned at convergent lens 1 can pass through imaging lens 2 blur-free imaging on the photosurface V of video camera 3.Semi-transparent semi-reflecting lens 4 is arranged between convergent lens 1 and the imaging lens, its centre distance convergent lens 1 about 150 millimeters, and with the fixed angle of upper left bottom right 45 degree, the main shaft of the poly-lens 1 of its center participant overlaps.Scaling board 5 be fixed in a horizontal manner semi-transparent semi-reflecting lens 4 under, apart from semi-transparent semi-reflecting lens 4 about 150 millimeters, the careful position of adjusting scaling board 5 and semi-transparent semi-reflecting lens 4, make from camera direction and observe, the aperture matrix overlaps with the primary flat U of convergent lens 1 through semi-transparent semi-reflecting lens 4 imagings on the scaling board 5, and the center of picture and convergent lens 1 center-aligned, when these luminous point lattice points on the scaling board 5 are bright, can on the light receiving surface of laser receiver, form spacing and be 10 millimeters luminous dot matrix, as the reference coordinate system.
When measuring, at first light the luminous dot matrix on the scaling board 5, measure the position of each luminous point, because the separation criteria of these luminous points, can be with these luminous points as the reference coordinate, calculating optical parameter and corrective system optical aberration.Close the luminous dot matrix on the scaling board 5 then, measure and calculate the laser spots that enters on the receiving plane relatively and the relative position of these luminous dot matrix, just can obtain laser spots coordinate accurately in reference frame.
In said system, when the focal length of zoom lens was adjusted to the shortest 32 millimeters, it is maximum that the measured zone of device reaches, be about 200 millimeters, and resolution is minimum, is about 0.33 millimeter/pixel, in laser wave band plate colimated light system, be applicable to the situation that measurement point is far away apart from laser receiver.When the focal length of zoom lens was adjusted to the longest 160 millimeters, the measured zone of device was minimum, is about 40 millimeters, but it is the highest that resolution reaches, be about 0.06 millimeter/pixel, in laser wave band plate colimated light system, be applicable to the situation that measurement point is nearer apart from laser receiver.
Claims (2)
1. a laser receiver that is used for laser wave band plate colimated light system utilizes video camera (3) as receiving device, and laser receiver is by convergent lens (1), video camera (3), imaging lens (2), semi-transparent semi-reflecting lens (4), scaling board (5) combines, and it is characterized in that:
A) entrance pupil of imaging lens (2) is positioned at the back focal plane F of convergent lens (1);
B) the object plane U of imaging lens (2) overlaps with the primary flat of convergent lens (1);
C) the image plane V of imaging lens (2) overlaps with the photosurface of video camera;
D) placement of semi-transparent semi-reflecting lens (4) makes the picture of scaling board (5) overlap with the primary flat U of convergent lens (1).
2. a kind of laser receiver that is used for laser wave band plate colimated light system according to claim 1, it is characterized in that being placed on the position of convergent lens (1) primary flat U with the in-plane scatter screen, replace convergent lens (1), the distance that imaging lens (2) shields to in-plane scatter is 2～8 times of maximum measured zone size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101051106A CN100341260C (en) | 2003-11-12 | 2003-11-12 | Laser receiving device for laser alignment system with zone plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101051106A CN100341260C (en) | 2003-11-12 | 2003-11-12 | Laser receiving device for laser alignment system with zone plate |
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| Publication Number | Publication Date |
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| CN1545221A CN1545221A (en) | 2004-11-10 |
| CN100341260C true CN100341260C (en) | 2007-10-03 |
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| CNB2003101051106A Expired - Fee Related CN100341260C (en) | 2003-11-12 | 2003-11-12 | Laser receiving device for laser alignment system with zone plate |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100359286C (en) * | 2004-07-08 | 2008-01-02 | 武汉理工大学 | Method for improving laser measuring accuracy in image processing |
| CN100492940C (en) * | 2005-04-21 | 2009-05-27 | 中国科学院半导体研究所 | Optical receiving interface of optical channel inspection module |
| EP2607951B1 (en) * | 2011-12-19 | 2013-12-11 | Axis AB | Method for setting up a monitoring camera |
| CN110625378B (en) * | 2019-09-19 | 2021-03-02 | 中铁大桥局第七工程有限公司 | Concentric bearing installation method |
Citations (6)
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|---|---|---|---|---|
| US5483065A (en) * | 1993-10-12 | 1996-01-09 | Seiko Instruments Inc. | Electron beam microanalyzer |
| US5963326A (en) * | 1996-11-25 | 1999-10-05 | Masao; Katsuya | Ellipsometer |
| CN1282564A (en) * | 1999-07-30 | 2001-02-07 | 中国科学院光电技术研究所 | Adaptive optical retina imaging system (1) |
| WO2003042728A2 (en) * | 2001-11-09 | 2003-05-22 | Xradia, Inc. | Achromatic fresnel optics for ultraviolet and x-ray radiation |
| JP2003202302A (en) * | 1993-05-13 | 2003-07-18 | Olympus Optical Co Ltd | Surface defect-inspecting apparatus |
| WO2003076872A1 (en) * | 2002-03-12 | 2003-09-18 | Nikon Corporation | Shape measuring method, interference measuring device, porduction method for projection optical system, and porjectionj aligner |
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2003
- 2003-11-12 CN CNB2003101051106A patent/CN100341260C/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003202302A (en) * | 1993-05-13 | 2003-07-18 | Olympus Optical Co Ltd | Surface defect-inspecting apparatus |
| US5483065A (en) * | 1993-10-12 | 1996-01-09 | Seiko Instruments Inc. | Electron beam microanalyzer |
| US5963326A (en) * | 1996-11-25 | 1999-10-05 | Masao; Katsuya | Ellipsometer |
| CN1282564A (en) * | 1999-07-30 | 2001-02-07 | 中国科学院光电技术研究所 | Adaptive optical retina imaging system (1) |
| WO2003042728A2 (en) * | 2001-11-09 | 2003-05-22 | Xradia, Inc. | Achromatic fresnel optics for ultraviolet and x-ray radiation |
| WO2003076872A1 (en) * | 2002-03-12 | 2003-09-18 | Nikon Corporation | Shape measuring method, interference measuring device, porduction method for projection optical system, and porjectionj aligner |
Non-Patent Citations (1)
| Title |
|---|
| 用于大马力柴油机制造及安装中的波带板激光准直仪及其精度分析 魏乐林，实用测试技术，第3期 1999 * |
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