CH704728A2 - Vacuum valve for gas-tight closure of a flow path by means of a linear movement of a closure member. - Google Patents

Abstract

The invention relates to a vacuum transfer valve (1) for gas-tight closing of a flow path (F) by means of a linear movement, with a closure member (5) which is linearly displaceable along an adjustment axis (6) extending transversely to the opening axis (4), one of the Opening (3) enclosing, perpendicular or obliquely in an opening direction (9) facing first sealing surface (10) of the valve housing (2) and with the first sealing surface (10) corresponding second sealing surface (11) of the closure member (5). A first and a second main section of the first sealing surface (10) have a geometrical offset relative to one another in the direction of the opening axis (4). Lateral U-shaped side portions (14L, 14R) each having a first leg, a second leg, and a base connect the main portions to each other. The respective base connects the respective first leg and second leg and bridges the geometric offset in the direction of the opening axis (4). The left base is on a left first level and the right base is on a right first level. The two planes each run non-parallel to a middle horizontal plane (19), to which the adjustment axis (6) forms a geometric surface normal, and are each inclined with respect to this with a first inclination angle of at least 45 °. In addition, the invention relates to a corresponding closure member (5).

Description

The invention relates to a vacuum transfer valve for gas-tight closure of a flow path by means of a linear movement according to the preamble of claim 1 and a corresponding closure member according to the preamble of claim 13.

Vacuum transfer valves according to the preamble of claim 1 and closure members according to the preamble of claim 13 are known in particular in the form of designed as rectangular valve transfer valve with the product name «MONOVAT series 02 and 03» of the company VAT Vacuum valves AG in Haag, Switzerland. The structure and operation of such a valve are described, for example, in US 4,809,950 (Geiser) and US 4,881,717 (Geiser) in a schematic manner.

In general, vacuum valves for substantially gas-tight closure of a flow path, which leads through an opening formed in a valve housing, in various embodiments known from the prior art. Vacuum slide valves are used in particular in the field of IC and semiconductor and in particular the OLED and solar panel production, which must take place in a protected atmosphere as possible without the presence of contaminating particles used. For example, in a manufacturing plant for semiconductor wafers or liquid crystal substrates, the highly sensitive semiconductor or liquid crystal elements sequentially undergo a plurality of process chambers in which the semiconductor elements located within the process chamber are processed by means of one processing device each. Both during the processing process within the process chamber, as well as during transport from process chamber to process chamber, the highly sensitive semiconductor elements must always be in a protected atmosphere - especially in a vacuum. The process chambers are connected to one another, for example, via connecting passages, the process chambers being able to be opened by means of vacuum slide valves for transferring the parts from one to the next process chamber and subsequently sealed gas-tight in order to carry out the respective production step. Such valves are also referred to as a vacuum transfer valves and due to their rectangular opening cross section as a rectangular slide due to the described application.

Transfer valves are characterized by a relatively large, usually rectangular or oval or round opening cross-section. Because of the mostly flat and wide cross-section of semiconductor wafer plates or liquid crystal substrates, such as liquid crystal displays, or solar panels transfer valves usually have an elongated, slot-like opening cross-section whose width is a multiple, in particular at least twice, three times, five times or eight times the amount is. In the field of research, however, transfer valves with a round opening cross-section are also used.

Since transfer valves are used in particular in the production of highly sensitive semiconductor elements, the particle generation caused in particular by the actuation of the valve and the number of free particles in the valve space must be kept as low as possible. Particle generation is primarily a result of friction, for example, metal-to-metal contact and abrasion.

The requirements for the coming into use in vacuum valves seals are very high. On the one hand, in the closed state of the valve, the tightness of the valve must be ensured. This is a major challenge, above all because of the high differential pressures in the vacuum range, in particular in the range of approximately 1 bar, and the large forces thus occurring, which act on the valve closure. Since the seals used are subject to above-average wear at excessively high crimping or are destroyed, the structure of the valve must be such that the differential pressure forces can not or only to a limited extent affect the seals. In addition, lateral loads and longitudinal loads on the seal are to be kept as low as possible. Especially with transverse loads transverse to the longitudinal direction of the seal with O-ring seals the danger that they are torn from their holder, in particular the groove in which they are fixed. Even vulcanised seals may only be exposed to very limited lateral forces. In the open state of the valve, the seals are sometimes exposed to aggressive media and therefore must either be such that they can withstand the Einfüssen, and / or be moved out of the flow path of the medium, also to avoid abrasion. Excessively high wear of the seal is an uncertainty factor for process safety and requires regular replacement of the seal, which in turn leads to increased downtime in the process.

Different embodiments of vacuum valves, in particular their sealing and drive technologies, are known from the prior art, which, inter alia, as an objective to increase the life of the seals used and improved process safety.

Depending on the particular drive technologies, a distinction is made in particular between slide valves, also known as valve slides or rectangular slides, and shuttle valves, the closing and opening in the prior art usually taking place in two steps. In a first step, a valve closure member, in particular a closure member, in the case of a slide valve, as known for example from US 6,416,037 (Geiser) or US 6,056,266 (Blecha), in particular the L-type, linear over an opening substantially parallel to the valve seat shifted or in the case of a shuttle valve, as known for example from US 6,089,537 (Olmsted), pivoted about a pivot axis over the opening, without this taking place a contact between the closure plate and the valve seat of the valve housing. In a second step, the closure plate is pressed with its closure side onto the valve seat of the valve housing, so that the opening is sealed gas-tight. The seal may e.g. either via a seal arranged on the closure side of the closure member, which is pressed onto the valve seat revolving around the opening, or via a sealing ring on the valve seat, against which the closure side of the closure adjuster is pressed. The seal, in particular the sealing ring, can be held in a groove and / or vulcanized.

Different sealing devices are known from the prior art, for example from US 6,629,682 B2 (Duelli). A suitable material for sealing rings is, for example, the elastic sealing material known under the trade name Viton®.

The two-stage movement described, in which the closure member is first pushed across the opening, without causing the seal to come into contact with the valve seat, and the closure member is subsequently pressed substantially perpendicularly to the valve seat, in addition to Possibility of precise control of the flow especially the advantage that the seal is almost exclusively pressed vertically, without causing a transverse or longitudinal loading of the seal. However, a disadvantage is the relatively complex structure of the drive, which is formed in particular either by a single drive, which allows an L-shaped movement of the closure member, or by a plurality of drives, for example two linear drives or a linear and a spreading. Spreizantriebe, which are usually arranged immediately behind the shutter and these adjust relative to the shaft on which they are located in the vertical direction on the valve seat, also have the disadvantage that a plurality of mechanical parts, which perform relative movements to each other, inside the valve are arranged. This increases the complexity of the construction and the generation of process-damaging friction particles. Another disadvantage of the multi-stage movement is the limited adjustment speed of the closure member between the fully open and the fully closed state. Although wedge valves, which are only adjusted in a linear manner, allow a high adjustment speed, they are in some cases hardly suitable for the vacuum area due to the transverse stress of the seal, and if so, then for only a few adjustment cycles.

This problem is solved by means of slide valves, in which the closing and sealing process takes place via a single linear movement, however, the sealing geometry is such that a transverse stress of the seal is largely or completely avoided. Such a valve is, for example, the transfer valve of the company VAT Vakuumventile AG in Haag, Switzerland, which is known under the product designation "MONOVAT series 02 and 03" and designed as a rectangular insert valve. The structure and operation of such a valve are described for example in US 4,809,950 (Geiser) and US 4,881,717 (Geiser).

The valve described therein has in its housing a sealing surface, seen in the direction of the axis of the valve passage opening, has successive sections which merge in laterally outwardly extending, flat sealing surface sections on continuously extending curvatures, the imaginary generators of this one-piece but having a plurality of portions sealing surface parallel to the axis of the valve passage opening. The sealing surface is processed. The closure member has a corresponding bearing surface for the circumferentially closed seal. Described in more detail, the so-called valve slide has a slide housing and a slide passage opening, which can be closed with a sliding in its plane closure member. In the region of the slide passage opening a sealing surface is provided, against which in the closed position of the closure member a arranged on this, circumferentially closed seal, wherein the imaginary, straight generatrix of the sealing surface are parallel to the axis of the slide passage opening. The circumferentially closed, one-piece seal has portions of different lengths and / or shapes lying in different planes, with two major portions of the circumferentially closed seal lying in planes which are perpendicular to the axis of the slider passage and spaced apart. The two main sections of the seal are connected by side sections. The closure member has the course of the sealing surface of the housing a correspondingly extending, the circumferentially closed seal-bearing surface. The side portions of the circumferentially closed seal are U-shaped. In each case the legs of these U-shaped extending side sections lie in a plane. The successive seen in the axial direction of the slide passage opening portions of the sealing surface go for the system of the main sections of the seal in that area in which they have a common, straight, paraxial generatrix, in laterally outwardly extending planar sealing surface sections. These flat sealing surface portions lie in mutually parallel and to the axis of the slide passage opening parallel planes.

A suitable drive for such a closable by means of a linear movement transfer valve is shown in JP 6241344 (Buriida Fuuberuto). The drive described therein has eccentrically mounted levers for linear displacement of the push rods on which the closure member is mounted.

The valve slide known from the prior art and described in US 4,809,950 (Geiser) will be described below with reference to FIGS. 6A and 6B. The valve slide shown purely schematically there has a round opening cross section for better illustration of the course of the sealing surfaces, while the known under the product name «MONOVAT series 02 and 03» and configured as rectangular valve transfer valve of VAT vacuum valves AG in Hague, Switzerland a rectangular, slit-like opening cross-section has, whose width is substantially greater than its height.

The valve 101 for gas-tight closing of a flow path by means of a linear movement has a valve housing 102 with an opening 103 for the flow path, wherein the opening 103 has a geometric opening axis 104 along the flow path, as shown in Fig. 6Agege. A closure member 105 shown in FIG. 6B is linear along a geometric adjustment axis 106 transverse to the opening axis 104 in a closure member plane 107 from an open position releasing the opening 103 into a closed position linearly pushed over the opening 103 into a closing direction 108 and vice versa displaceable back in an opening direction 109, as shown in Fig. 6A.

6A and 6B, the valve housing 102 and the closure member 105 are shown separately in the disassembled state, in particular the adjustment axis 106, the relative position and adjustability of the two parts 102 and 105 illustrates.

A curved first sealing surface 110 surrounds the opening 103 of the valve housing 102. On the closure member 105 is a corresponding with the first sealing surface 110 second sealing surface 111 of the closure member 105, which has a corresponding shape of the first sealing surface 110 arranged. In the following, the structure of the first sealing surface 110 of the valve housing 102 will be described in particular. Due to the corresponding, corresponding to the first sealing surface 110 construction can be dispensed with a detailed description of the corresponding second sealing surface III.

Preferably, on the second sealing surface 111, and / or on the first sealing surface 110, a seal, not shown, for example in the form of a vulcanized seal or an O-ring, which extends along the respective sealing surface, in particular the illustrated dotted line , For simplification, the sealing surfaces 110 and 111 are considered below as sealing surfaces, ie the seal or the valve seat.

The first sealing surface 110 is composed of differently shaped, in each case to the adjustment axis 106 non-parallel portions 112a, 112b, 114a, 114b together. The surface normals 120 of the sections 112a, 112b, 114a, 114b of the first sealing surface 110 have directional components that are parallel to the adjustment axis 106, respectively. In other words, all of the surface normals 120 of the first sealing surface 110 are at least partially, that is to say with a directional component, in the opening direction 109, as shown in FIG. 6A by means of the surface normal 120 illustrated by means of short dashes. Again, in other words, the first sealing surface 110 is perpendicular or oblique in the opening direction 109 and extends in any section parallel to the adjustment axis 106. Thus, none of the surface normals 120 of the first sealing surface is parallel to a geometric normal plane which is pierced perpendicularly by the adjustment axis 106 ,

A first main section 112a of the first sealing surface 110, FIG. 6A, and a corresponding first main section 112a 'of the second sealing surface 111, FIG. 6B, run along a geometric first main plane 113a. The surface normals 120 of the first main section 112a lie in the first main plane 113a. A second main section 112b of the first sealing surface 110, FIG. 6A, as well as a corresponding second main section 112b 'of the second sealing surface 111, FIG. 6B, run along a geometric second main plane 113b. The surface normals 120 of this second main section 112b lie in the second main plane 113b. The first main plane 113a and the second main plane 113b are mutually spaced, parallel to each other and parallel to the shutter member plane 107. Thus, the first main section 112a and the opposite second main section 112b have a geometrical offset to each other transverse to the adjustment axis 106 and in the direction of the opening axis 104 on. Between the two opposing main sections 112a and 112b in the region extending along the adjustment axis 106, the opening 103 is arranged.

A lateral first U-shaped side portion 114a of the first sealing surface 110 connects the first main portion 112a and the second main portion 112b on the one side of the first sealing surface 110, while a lateral second U-shaped side portion 114b of the first sealing surface 110 connects the first main portion 112a and the second main portion 112b on the other side of the first sealing surface 110 connects.

The first U-shaped side portion 114a and the second U-shaped side portion 114b each have a first leg 115a associated with the first main portion 112a, a second leg 115b associated with the second main portion 112b, and a base 115c. The first two limbs 115a each extend along first limb planes which are parallel to the adjustment axis 6 and lie respectively on the first main plane 113a. In other words, the two first legs 115a and the first main portion 112a extend along a plane, namely the first main plane 113a, wherein the surface normals of the first legs 115a and the first main portion 112a lie in this first main plane 113a. The two second legs 115b in turn each extend along the adjustment axis 6 parallel second leg levels, each lying on the second main plane 113b. In other words, the second legs 115b and the second main section 112b extend along a plane, namely the second main plane 113b, wherein the surface normals of the two second legs 115b and the second main section 112b lie in this second main plane 113b. Like the first main section 112a and the second main section 112b, the two first legs 115a to the two second legs 115b thus have a geometric offset transversely to the adjustment axis 106 and in the direction of the opening axis 104.

The respective base 115c of the first U-shaped side portion 114a and the second U-shaped side portion 114b respectively interconnects the first leg 115a and the second leg 115b and bridges the geometric offset transverse to the adjustment axis 106 in the direction parallel to the opening axis 104. The two bases 115c lie on a common geometric plane E, which is pierced vertically by the adjustment axis 106 and lies parallel to the opening axis 104.

The second sealing surface 111 can be brought by linear displacement of the closure member 105 along the adjustment axis 106 in the closed direction 108 in the closed position in which the second sealing surface III presses on the first sealing surface 110 in the closing direction 8 and thus in a sealing Contact with the first sealing surface 110 is, whereby the closure member 105 closes with its lateral closure surface 119, the opening 103 gas-tight.

This known from the prior art, closable by a single linear movement vacuum valve has many advantages over the lockable by means of two movements transfer valves that require a relatively complex drive structure, or with respect to the wedge valves, in which the seals are claimed transversely. Since the closure member of the vacuum valve described above is one-piece, it can be subjected to high acceleration forces, so that this valve can also be used for quick and emergency closures. The closing and sealing can be done by means of a single linear movement, so that a very fast closing and opening of the valve is possible. The circumferential seal finds in all its sections clearly reproducible conditions in the various closing operations. Since the seal when closing and the occurrence of the closing pressure is essentially only in the direction of linear closing movement in the vertical direction on the seal or partially in the longitudinal direction, but not claimed transversely to its longitudinal extent, so that lateral forces are avoided on the seal, is suitable This vacuum valve for highly qualified sealing tasks in the vacuum and high vacuum range. The sealing surfaces can also be machined to meet the high sealing requirements. The closure member itself has as few as possible against each other moving parts, whereby the production of process-damaging particles, which can be largely avoided in particular by friction, especially by metal friction and abrasion particles of the metal and plastic elements.

However, as can be seen from FIGS. 6A and 6B, the valve 101 described has the disadvantage that the two side sections 114a and 114b arranged laterally next to the opening 103 increase the width of the valve housing 102 in relation to the width of the opening 103. The U-shaped transition regions of the two sealing surfaces 110 and 111 thus increase the extent of the valve housing 102 in the width. Compared to L-type slide valves having an L-shaped movement, the described linearly variable valve 101 is relatively wide. In many applications, this is not a problem, but there are areas of application in particular of transfer valves, in which the opening width should be as large as possible while maintaining a given housing width.

Although it would be possible to let the lateral flanks of the main sections 112a and 112b to rise much steeper and thus to increase the angle between the surface normal 120 and the adjustment axis 106 in the flank region, whereby the orientations of the sealing surfaces 110 and 111 of a parallel Alignment approach to the adjustment axis 106, but this would increase the longitudinal load of the seal along its longitudinal course in the region of the steep flanks in one direction. As a result of this unidirectional longitudinal loading of the seal along its longitudinal course in the region of the steep flanks, the seal would become particularly significant in the region of the transition from the legs 115a and 115b to the base 115c, which extends substantially perpendicular to the respective legs 115a and 115b be charged. In the respective transition region from the legs 115a and 115b to the base 115c, the seal extending there at least in a directional component parallel to the opening axis 104 would be cross-loaded. Again, by this transverse load, the seal would be significantly burdened in this particular arcuate transition region and subject to massive wear. The width of the valve in relation to the opening width would be reduced at the expense of the reliability of the valve and the life of the seal.

The seal concept described in US Pat. No. 4,809,950 (Geiser) and especially in the valve slide series of the company VAT Vakuumventile AG in Haag, Switzerland, which is known under the product name "MONOVAT series 02 and 03", has become established on the market and stands out in particular high reliability, high tightness, fast adjustability and low particle generation. However, reducing the width of the valve relative to the opening width would be desirable for some applications.

In CH 518474 (Von Roll AG), a liquid gate valve is described, the housing has a flow channel, which can be locked with a perpendicular to the axis of the flow channel closing body, the closure body with a seal for sealing support on in the flow channel and in the housing neck arranged sealing surfaces is provided. The sealing surfaces are partially inclined to a direction perpendicular to the direction of movement of the closing body level. According to this disclosure, the end body of such a full-seal gate valve must have its resilient seal on sealing surfaces that form a closed contour transverse to the direction of the flow channel. Accordingly, if the contour of the elastic seal of the closing body is carried out in undeformed state equal to the contour of the sealing surfaces, so the elastic seal at the same time closing the gate valve on all sealing surfaces and begins to seal. A defective or no seal takes place in those parts which are parallel to the direction of movement of the closing body, if no special measures, such as the deformation of the elastic seal when using a two-part closing body, provided.

According to the teaching of CH 518474 (Von Roll AG) can avoid this phenomenon in a known manner by avoiding lying parallel to the direction of movement of the end body sealing surfaces and a more stretched than round sealing surface contour used, which is not parallel to the direction of movement of the closing body has lying lots. Since sealing is best on such sealing surface portions which are perpendicular to the direction of movement, it would be desirable to use a lower and elongated sealing surface contour transverse to the axis of the flow channel. However, there are limits to this endeavor, since unfavorable flow conditions and corresponding detachment of the flow occur with a strong deviation of the sealing surface contour from the cross-sectional shape of the flow channel or with strong changes in the cross-sectional area. In addition, the housing could not have any width at this point. Also according to the CH 518474 (Von Roll AG) is a gate valve is known, which represents a compromise with respect to the sealing surface contour in consideration of these aspects. He has a to a perpendicular to the direction of movement of the closing body and in the axis of the flow channel lying reference plane symmetrical sealing surface contour whose boundary is formed by inclined at 45 ° to this plane sealing surface parts, which are connected in the apex and at the bottom by circular arcs. Although this sealing surface contour extends in width considerably beyond the actual cross section of the flow channel, but only on the plane mentioned inclined and in the apex and in the ground circular arc-shaped surface areas. Although sealing surfaces lying parallel to the direction of movement of the end body are thus avoided, the conditions for sealing are by no means ideal, in particular with the surfaces inclined to the reference plane mentioned. In other words, strongly inclined sealing surfaces which are inclined at less than 45 ° to the direction of movement, to be considered problematic, since the pressing force exerted on the seal in the inclined portions of the sealing surface is correspondingly lower than in the transverse to the direction of movement portions of the sealing surface. After applying the elastic seal of the end body to the sealing surfaces, the pressing force at the apex and at the bottom of the sealing surface contour is proportional to the distance by which the end body is moved after contacting the sealing surfaces. However, this is not true in the inclined sealing surfaces, since there the movement of the closing body is not perpendicular, but at an angle to the inclined sealing surface, so that the exerted pressing force only proportional to the path component perpendicular to the sealing surface, ie correspondingly lower than in the apex and in the Reason the sealing surface contour is. In order to allow sealing contours with more inclined sections, it is according to the teaching of CH 518474 (Von Roll AG) required to vary the contour of the sealing surfaces of the housing from the contour of the support of the elastic seal of the closing body in such a way that Closing the slide, contact inclined surface parts of the sealing surface contour and touch inclined support parts of the elastic seal in front of the parts in the vertex and in the bottom. This can be achieved so that the inclined bearing parts relative to the sealing surface contour of the housing have a material allowance, or the inclined surface portions relative to the support contour of the elastic seal have a material allowance. The inclined sealing surfaces should in this case have different inclination, wherein the addition of material at the more inclined sealing surfaces or on the bearing parts of the elastic seal is greater than at the weaker inclined sealing surfaces or bearing parts. This could be achieved regardless of the inclination of the sealing surfaces at all points of the sealing surface contour a constant pressing force.

In CH 518474 (Von Roll AG) is also proposed that conveniently pass the inclined sealing surfaces in the housing neck by means of a curvature in the inclined sealing surfaces in the flow channel, the inclined sealing surface parts of the curvature or cooperating with these parties support parts of the elastic Seal have a material allowance. As a result, a point of discontinuity of the sealing surface contour is avoided and at the same time a uniform pressing force is achieved.

In other words, CH 518474 (Von Roll AG) teaches that more inclined surface areas, in particular over 45 ° inclined surface areas, which are thus inclined less than 45 ° to the direction of movement, should be avoided in principle or such inclined surface areas for a sufficient sealing would require a material addition to the more inclined sealing surfaces or on the support parts of the elastic seal. The contour of the sealing surfaces of the housing must therefore deviate from the contour of the support of the elastic seal of the end body in such a way that touched when closing the slide inclined surface portions of the sealing surface contour and inclined bearing parts of the elastic seal before the games in the vertex and the bottom. It is essential that the sealing surface contour formed by the sealing surfaces of the closure body does not coincide with the contour of the sealing parts of the valve seat.

According to CH 518474 (Von Roll AG) is therefore assumed an extraordinary compression and deformation of the seal, as is common in liquid and vapor valves, which are loaded with pressures in the order of 4 to more than 8 bar. The vulcanized free-form seal has completely different sealing widths and thicknesses along its sealing line, which leads to a different compression. The seal also has transverse strained portions which are transverse to the valve's direction of translation, as may liquid valves, because particle generation is not critical in the art and vacuum-tight sealing is not relevant. The sealing body has a lenticular cross-section transverse to the adjustment axis and two opposite upper sealing portions to meet the requirements of a liquid and vapor valves. Furthermore, the creation of a contour difference of the seal in practice is associated with a very high production cost, which is why the teaching according to CH 518474 (Von Roll AG) could not prevail.

The object of the invention is to provide a vacuum transfer valve of the type mentioned above and a corresponding closure member, which is characterized by a simple construction, a reduced width by a small width of the valve housing in relation to the width of the opening, a high Adjustment speed, a low stress on the seal and increased resilience is characterized.

This object is achieved by the realization of the features of the independent claims. Features which further develop the invention in an alternative or advantageous manner can be found in the dependent claims.

The inventive vacuum transfer valve for gas-tight closure of a flow path by means of a linear movement comprises a valve housing having an opening for the flow path and a linearly displaceable along an adjustment closure member. Such a vacuum transfer valve is used in particular in the field of IC and semiconductor and in particular the OLED and solar panel production, which must take place in a protected atmosphere as possible without the presence of contaminating particles used.

Under the flow path is generally to be closed opening path between two areas - especially between two coating systems of any kind, for example, for solar or other applications, or between a process chamber for semiconductor manufacturing and either another process chamber or the outside world - to understand. The flow path is, for example, a connecting passage between two interconnected process chambers, wherein the process chambers can be opened by means of the vacuum valve for transferring the semiconductor parts from one to the next process chamber and subsequently gas-tightly closed to carry out the respective production step. Such valves are also called a rectangular slide due to their usually rectangular opening cross-section. Of course, however, any other application of the inventive vacuum valve for substantially gas-tight closure of any flow path is possible.

The opening may have any, in particular rectangular, oval or round cross-section. Preferably, the vacuum valve is formed as a transfer valve having an elongated, in particular substantially rectangular opening cross-section, wherein the width of the opening perpendicular to the adjustment axis preferably at least twice or at least three times or at least five times or at least eight times the height of the opening parallel to the Adjustment axis is.

The opening has a central axis in the form of a geometric opening axis which extends in the region of the opening in the middle of the flow path parallel to this. This geometric opening axis is, for example, perpendicular to the surface spanned by the opening and extends along the flow path. The geometric opening axis lies on a geometric middle vertical plane and a geometric middle horizontal plane perpendicular to the middle vertical plane. The intersection of the middle vertical plane and the middle horizontal plane, which are perpendicular to each other, forms the geometric opening axis. The terms "horizontal" and "vertical" and "horizontal plane" and "vertical plane" are not related to an absolute horizon of the world coordinate system, but relative to the valve body, its opening and the closure member and the respective width and height extension of the same elements ,

The closure member is generally the closure, by means of which the opening can be closed in a gastight manner. The closure member, which may be formed as a valve plate, is linearly displaceable along a transverse to the opening axis, geometric adjustment axis in a closure member plane between an open position and a closed position. The geometric adjustment axis lies on the middle vertical plane and forms a geometric normal to the middle horizontal plane. In other words, the adjustment axis is perpendicular to the middle horizontal plane and extends on the middle vertical plane. Thus, the adjustment axis is perpendicular to the opening axis and lies on a plane which is pierced perpendicularly from the opening axis. The geometric adjustment axis lies on the geometric closure element plane. The closure member plane can run parallel to a closure surface defined by the closure member and is preferably substantially parallel to the surface spanned by the opening. The closure element plane is generally to be understood as a geometric plane on which the adjustment axis lies and to which the opening axis forms a surface normal, regardless of the actual shape of the closure surface, which does not necessarily have to form a plane.

In the open position of the closure member selbiges the opening partially or completely free by it is partially or completely outside the projection region of the opening. In the closed position, the closure member is located completely in the projection region of the opening, wherein the closure surface of the closure member faces the opening and preferably completely covers it. The adjustment direction of the closure member along the adjustment axis from the open to the closed position is referred to as the closing direction, whereas the opposite adjustment direction is defined from the closed position to the open position as the opening direction.

The opening is enclosed by an at least partially curved first sealing surface which is associated with the valve housing. This means that a first sealing surface is arranged around the opening. On the closure member is a second sealing surface whose shape corresponds to the first sealing surface. The second sealing surface thus corresponds to the first sealing surface, wherein the sealing surfaces have a corresponding shape, so that the second sealing surface on the first sealing surface, preferably with a substantially constant gap distance in the direction of the adjustment axis, come to rest, the sealing surfaces along their course have a substantially or exactly constant distance in the direction parallel to the adjustment axis. The second sealing surface of the closure member encloses the closure surface of the closure member, which is dimensioned such that it can completely cover the opening.

The first sealing surface and the second sealing surface are opposite to each other, wherein the distance of the opposing layer can be reduced or increased by adjusting the closure member along the closure axis.

In the closed position of the closure member, the second sealing surface is located on the first sealing surface, wherein a gas-tight contact between the sealing surfaces prevails by pressing the second sealing surface on the first sealing surface in the closing direction.

The first sealing surface and the second sealing surface are each composed of differently shaped sections, each non-parallel to the adjustment axis. In other words, the surface normals of the sections of the first sealing surface and the second sealing surface each have directional components that are parallel to the adjustment axis. Thus, the first sealing surface perpendicular or obliquely in the opening direction and the second sealing surface perpendicular or obliquely in the closing direction. In a specific development, the surface normals of the sections of the first sealing surface extend parallel to the closure element plane. Are the sealing surfaces in the closed position to each other and pressed in the closing direction to each other, the gasket between them is not only longitudinally or even transversely stressed, but always at least partially compressed vertically. The individual sections of the first and second sealing surfaces correspond to one another in that they rest on one another in the closed position. Therefore, only the respective section of the first sealing surface will be described below in part.

As sealing surfaces are generally those surfaces of the valve housing and the closure member to understand that lie in the closed position on each other and form the sealing contact. The one sealing surface can thus be formed by the vertically outwardly facing portion of a seal, in particular an O-ring seal or a vulcanized seal, and the other sealing surface of a valve seat, so a bearing surface for the seal. The sealing surfaces are thus those surfaces which actually effect the gas-tight seal by mutual contact in the closed position.

Preferably, the particular elastic seal is arranged on the second sealing surface of the closure member. Alternatively, the seal is located on the first sealing surface of the valve housing. The seal is preferably of a cord-like or band-like design and / or preferably has a cross-section which is substantially constant along the sealing line of the seal and which may be circular, oval, angular, lip-like or free-formed. In particular, this seal can either be held in a groove or vulcanized onto the sealing surface.

The first sealing surface and the second sealing surface each have a first main portion which extends substantially along a geometric first main plane. In other words, the first main section respectively extends longitudinally along the first main plane. The first main section may extend in the first main plane or substantially along the first main plane. In addition, the first main section extends substantially rectilinearly on a first horizontal plane parallel to the middle horizontal plane. The first main section does not necessarily have to be geometrically exact in the first main plane and in the first horizontal plane. It is possible that it extends only substantially along the first main plane and the first horizontal plane, ie geometrically not exactly parallel to these planes, for example as an elongated, but substantially straight arc along these planes.

In addition, the first sealing surface and the second sealing surface each have a second main portion, which may correspond to the first main portion in its shape substantially in a specific embodiment. However, it is also possible that the first main sections and the second main sections have different shapes or lengths. The respective second main portion of the first and second sealing surface extends along a common geometric second main plane, where, like the first main portion, it lies either exactly in the second main plane or only extends substantially along it. In addition, the second main section extends substantially rectilinearly on a second horizontal plane parallel to the first horizontal plane.

The geometric first major plane and the geometric second major plane are substantially parallel to each other, with a slight skew is possible, and have a distance to each other. The first and second main planes lie substantially parallel to the shutter member plane, so that the opening axis forms a surface normal to these main planes. Thus, the main planes are perpendicular to the horizontal planes and vertical planes. The closure axis thus runs substantially parallel to the first and second main planes. Due to the spacing of the two principal planes, the first main section and the opposite second main section have a geometrical offset to one another transversely to the adjustment axis, essentially in the direction of the opening axis.

To achieve the broad, slit-like opening cross-section whose width is substantially greater than its height, the length of the substantially straight on the first horizontal plane extending first main portion of the first sealing surface and the length of the substantially rectilinearly extending on the second horizontal plane second Main section of the first sealing surface in each case preferably at least 50%, in particular at least 75 ° of the width of the opening.

Between the first main portion and the opposite second main portion of the first sealing surface of the valve housing, the opening is arranged in the region extending along the adjustment axis. Between the first and the second main portion of the second sealing surface is the closure surface of the closure member.

A side left substantially U-shaped side portion of the first sealing surface connects the first main portion and the second main portion on the one side of the first sealing surface with each other, while a side right substantially U-shaped side portion of the first sealing surface, the first main portion and the second main portion on the other side of the first sealing surface with each other, whereby the first sealing surface is closed. Corresponding U-shaped side sections are arranged on the second sealing surface.

The terms "left" and "right" are used in the invention only to distinguish one side of the vacuum transfer valve from the other side of the vacuum transfer valve and the closure member, wherein the space on one side of the central vertical planes generally defined as "left" and the space on the other side of the middle vertical planes generally as "right," regardless of their perspective and view.

The first U-shaped side portion and the second U-shaped side portion are each composed of a first leg, a second leg and a base. The first leg extends along the first main plane and passes the first major portion, while the second leg extends along the second major level and merges into the second major portion. In other words, the left first leg, the right first leg, and the first main portion extend along the first main plane, while the left second leg, the right second leg, and the second main portion extend along the second main plane. Thus, the first legs to the respective second legs to each other substantially the same geometric offset in the direction of the opening axis as the main sections. As in the case of the main sections, it is not necessarily required that the first and second legs lie exactly on the first or second main plane. For example, a slightly curved course of the legs along the main planes is possible.

In the left base, the left first leg and the left second leg go over. The left base extends at least partially parallel to the opening axis and thus connects the spaced apart in the direction of the opening axis left leg with each other by bridging the geometric offset in the direction of the opening axis. Likewise, the right first leg and the right second leg pass into the right base. The right base also extends at least partially parallel to the opening axis and thus connects the spaced apart in the direction of the opening axis right leg with each other by bridging the geometric offset in the direction of the opening axis. The two bases are formed, for example, as a two-dimensional arc, in particular as a circular arc whose ends merge into the limbs, or as a flat surface into which the gifts are inserted, or as a web running at least partially parallel to the opening axis. The flat left base lies on a left first level while the flat right base lies on a right first level.

Thus, the first main portion, the first left first leg adjacent thereto, the left base adjacent thereto, the left second leg adjacent thereto, the second main portion adjacent thereto, the right second leg adjacent thereto, the right base adjacent thereto, and the first adjoining right first leg, which in turn adjoins the first main portion, the self-contained first sealing surface on the valve housing and the self-contained second sealing surface on the closure member.

The two first legs and the two second legs extend between the first horizontal plane and the second horizontal plane and thus at least partially bridge the distance between the first horizontal plane and the second horizontal plane.

According to the invention, the left first plane, in which extends the first base, non-parallel to the central horizontal plane and is inclined relative to this with a left first inclination angle of at least 45 °. Also, the right first plane on which extends the right base, non-parallel to the central horizontal plane and is inclined relative to this with a right first inclination angle of at least 45 °. In other words, the two flat bases are folded out of the middle horizontal plane, by at least 45 °.

It is possible that both bases are folded on the same side, so both up or both down, but it is according to the invention also possible that the two bases are folded on different sides. In particular, the angle of inclination is at least 55 °, in particular substantially 70 °.

The geometric section line of the left first plane with the middle horizontal plane preferably runs parallel to the opening axis. Likewise, the geometric section line of the right first plane with the middle horizontal plane preferably runs parallel to the opening axis.

If the two bases are folded on the same side, the left first plane and the right first plane are non-parallel to each other and intersect in a cutting line, which is preferably parallel to the opening axis. In the case of identical first inclination angle of the intersection angle between the first two planes is at most 90 °, in particular at most 70 °, in particular substantially 40 °. If the left first inclination angle of the left first plane with respect to the middle horizontal plane is equal to the right first inclination angle of the right first plane with respect to the middle horizontal plane, and the first sealing surface of the valve housing and the second sealing surface of the closure member are each mirror-symmetrical to the central vertical plane this intersection on the middle vertical plane.

Due to the inclination of the first planes, on which the bases extend, the width extension of the transition region of the sealing surfaces from the first main plane to the second main plane decreases considerably. Thus, it is possible to implement a larger opening width with the same valve width. Due to the gained width in the valve housing, it is also possible to use the lateral space for installation of the linear drive. The linear drive is thus led out of the critical particle area, so that the particle generation is further reduced. The valve is characterized by this arrangement of the drives also by a compact design. Through a direct transmission of motion high accelerations are possible.

Surprisingly, it has been shown that this flap of the bases up or down numerous other significant benefits. Thus, the described extension of the sealing surface proves to be a particularly rigid embodiment of the closure member and the valve housing, so that it is possible to implement an even greater length expansion, with deformations at high pressure differences can be largely avoided. Thus, the opening width can be significantly increased, which is particularly advantageous especially for transfer valves for the transfer of broad semiconductor and substrate units. In addition, the flaps of the bases upwards or downwards causes the closure member to be centered and stabilized in width when closing the valve and pressing the closure member onto the first sealing surface transversely to the opening axis. Due to the inclined bases, the closure member hooks laterally like a hook and is thus stabilized in the direction of the surface normal to the middle vertical plane.

Due to the inclined inclination of the bases, the seal in the transition region from the first main plane to the second main plane is inevitably transversely loaded. This appears to be a disadvantage at first, since lateral loads of the seals are to be avoided as far as possible. However, it has surprisingly been found that due to the U-shaped configuration of this inclined transition region, the transverse load of the seal in the U region is compensated by the longitudinal load of the seal in the adjacent leg region.

If the base on which the elastic seal is arranged, inclined outwardly, so that the seal in the region of the base away from the central vertical plane, the elastic sealing material is in pressing the seal by the outward longitudinal loading of the sealing material pushed in both sides in the area of the base in the thighs. In the area of the base thus creates a small excess of sealing material. Due to the transverse load of the seal in the transition region between the legs, the seal is transversely charged to the outside and gives way slightly. Due to the transverse load, the seal length in the region of the base increases slightly, the excess of sealing material in the base, which is caused by the longitudinal load in the legs, compensating for the increased seal length resulting from the transverse load. Thus, the seal can withstand the transverse load due to the subsequent longitudinal load by the adjacent sealing material.

Conversely, it behaves when the base on which the elastic seal is arranged, is inclined inwards, so that the seal in the region of the base points to the central vertical plane. In this case, the sealing material is pulled out in the region of the legs by the longitudinal load from the base. However, the transverse load in the transition region of the seal between the legs, the seal length is shortened because the seal is pressed by the transverse load to the inside.

Thus, the sealing material can flow from the transition region of the base into the leg region.

The inclined position of the bases has the consequence that the leading into the respective base two legs are formed asymmetrically. A particular advantage of the inclined position of the base is that one of the two legs can run straight into the base and thus a portion of the leg and the base lie in a common plane, resulting in reduced manufacturing costs.

In a corresponding development of the invention, the left first leg on a flat left first leg portion and an arcuate left first curvature portion. The flat left first leg portion lies on the left first level of the left base and just merges into the left base. In other words, both the left base, and the left first leg portion are planar and inclined with respect to the central horizontal plane with the left first angle of inclination, which is at least 45 °. The arcuate left first curvature portion connects the left first leg portion with the first main portion. The left first curved portion is curved inwards. For example, the left first curvature section is an arcuate section that forms a smooth transition between the left first plane and the first horizontal plane.

Additionally or alternatively, the right first leg has a corresponding structure, with a flat right first leg portion which extends on the right first plane and just merges into the right base, and an arcuate right first curvature portion which the right first leg portion with connects to the first main section.

In a further development of the invention, the left second leg has a flat left second leg portion, an arcuate left second curvature portion and an arcuate left third curvature portion. The flat left second leg portion extends on a left second level. This left second plane preferably runs non-parallel to the middle horizontal plane and is inclined with respect to this each with a left second inclination angle of at least 45 °, in particular at least 55 °, in particular substantially 70 °, in the opposite direction of the respective first inclination angle. Thus, the planar left second leg portion of the left second leg and the flat left first leg portion of the first leg have in opposite vertical directions. The arcuate left second curvature portion of the left second leg connects the flat left second leg portion with the second main portion. For example, the arcuate left second curvature section represents a particular arcuate, smooth transition between the left second plane and the second horizontal plane. The arcuate left third curvature section in turn connects the left second leg section to the left base. For example, the arcuate left third curvature portion represents a particular arcuate, smooth transition between the left second level of the left second leg portion and the left first level of the left base. The arcuate left second curvature portion and the arcuate left third curvature portion are thus curved in different directions, wherein the left second leg portion lies between these curvatures. Here, the left second curvature portion is curved inwards and the arcuate left third curvature portion to the outside. The length of the left second leg portion may also be reduced to zero, in which case the vertex between the two curvature portions forms the left second leg portion.

Additionally or alternatively, the right second leg has a corresponding construction, with a planar right second leg portion extending on a right second plane, an arcuate right second curvature portion connecting the right second leg portion to the second main portion, and an arcuate one right third curved portion connecting the right second leg portion to the right base. This right second plane also preferably runs non-parallel to the middle horizontal plane and is inclined with respect to this each with a right second inclination angle of at least 45 °, in particular at least 55 °, in particular substantially 70 °, in the opposite direction of the respective first inclination angle. Thus, the planar right second leg portion of the right second leg and the flat right first leg portion of the first leg in opposite vertical directions.

The arcuate left third bend portion and / or the arcuate right third bend portion extend in a development of the invention each substantially in the region of the central horizontal plane, which lies centrally parallel between the first horizontal plane and the second horizontal plane.

In a specific embodiment, the left first tilt angle, the right first tilt angle, the right second tilt angle, and the left second tilt angle are substantially the same.

If the two bases are folded on the same side, and the left second plane and the right second plane are non-parallel to each other and intersect in a section line, which is preferably parallel to the opening axis. In the case of identical second inclination angle, the intersection angle between the two second planes in the development of the invention is at most 90 °, in particular at most 70 °, in particular substantially 40 °. If the left second inclination angle of the left second plane relative to the middle horizontal plane is equal to the right second inclination angle of the right second plane relative to the middle horizontal plane, and the first sealing surface of the valve housing and the second sealing surface of the closure member are each formed mirror-symmetrically to the central vertical plane also this section line on the middle vertical plane. Preferably, the first cutting line of the first planes and the second cutting line of the second planes extend on opposite sides of the valve housing, in particular on the geometric middle vertical plane.

The mentioned embodiments of the left first leg, the right first leg, the left second leg and the right second leg can each be combined freely with each other.

In a specific embodiment of the invention, the first sealing surface of the valve housing and the second sealing surface of the closure member are each formed mirror-symmetrically to the central vertical plane, so that the structure of the left leg mirrored that of the right leg.

In addition, the invention comprises a closure member, in particular the vacuum valve according to the invention described above. Since the features of the closure member and the second sealing surface has already been described directly or indirectly in connection with the vacuum valve whose first sealing surface and its different developments according to the invention, reference is made to the statements made above.

Generally designed for a vacuum transfer valve of the inventive type closure member for gas-tight closure of a flow path by means of a linear movement comprises a geometric adjustment axis, which lies on a geometric mean vertical plane and which forms a geometric surface normal to a central horizontal plane, a closure member plane on which is the geometric adjustment axis, and a second sealing surface. The second sealing surface is composed of differently shaped sections, each non-parallel to the adjustment axis. The surface normals of the sections of the second sealing surface each have parallel direction components to the adjustment axis. Thus, the second sealing surface is perpendicular or oblique in an opening direction of the adjustment axis. In particular, the surface normals of the sections of the first sealing surface run parallel to the closure element plane. However, it is also possible that they are oblique to this. A first main section of the second sealing surface runs along a geometrical first main plane and substantially rectilinearly on a first horizontal plane parallel to the middle horizontal plane. Furthermore, a second main section of the second sealing surface extends along a geometric second main plane and substantially rectilinearly on a second horizontal plane parallel to the first horizontal plane. The first main plane and the second main plane are spaced apart parallel to the shutter member plane. Thus, the first main portion and the opposite second main portion to each other have a geometric offset perpendicular to the adjustment axis. Between the two opposing main sections, a closure surface, in particular running substantially parallel to the closure element plane, of the closure member is arranged for closing an opening of a vacuum transfer valve. Preferably, the width of the closure surface, in particular having a substantially rectangular cross section, perpendicular to the adjustment axis is at least twice, in particular at least three times, in particular at least five times, the height of the closure surface parallel to the adjustment axis.

A side left substantially U-shaped side portion of the second sealing surface connects the first main portion and the second main portion on the one side of the second sealing surface with each other, while a side right substantially U-shaped side portion of the second sealing surface, the first main portion and the second main portion on the other side of the second sealing surface interconnects. The left U-shaped side portion and the right U-shaped side portion each have a first leg, a second leg, and a base. The left and right first leg respectively runs along the first main plane and merges into the first main section. The left and right second legs each extend along the second main plane and each transition into the second main section. In the left and right base of the respective first leg and the respective second leg go over. In this case, the respective base connects the respective first leg and the respective second leg with one another, so that the geometric offset is bridged transversely to the adjustment axis.

The two first legs and the two second legs extend between the first horizontal plane and the second horizontal plane and at least partially bridge the distance between the first horizontal plane and the second horizontal plane. The left base is on a left first level while the right base is on a right first level. These first levels of the closure member substantially coincide with the first levels of the valve housing in the closed position of the valve.

By means of the second sealing surface is in a closed position of the closure member, a sealing contact with a first sealing surface of a vacuum transfer valve for gas-tight closure of an opening of the vacuum transfer valve produced by the second sealing surface linearly on the first sealing surface in a closing direction of the adjustment axis is pressed. The first sealing surface has a shape corresponding to the second sealing surface and corresponding to the second sealing surface. In this closed position, the closure member closes the opening in a gastight manner with a closure surface.

According to the invention, the left first plane of the left base of the closure member and the right first plane of the right base of the closure member each non-parallel to the central horizontal plane and are opposite to this each with a first left angle of inclination and a first right angle of inclination of, respectively inclined at least 45 °. In other words, the two flat bases are folded out of the middle horizontal plane, by at least 45 °. It is possible that both bases are folded on the same side, so both up or both down, but it is according to the invention also possible that the two bases are folded on different sides. In particular, the angle of inclination is at least 55 °, in particular substantially 70 °.

The closure member has the same inventive development variants, which have already been described in connection with the vacuum valve. Reference is made to the embodiments and developments of the first sealing surface of the valve housing, which corresponds to the second sealing surface of the closure member.

In a further development of the closure member, the left first leg of the closure member has a flat left first leg portion, which extends on the left first level and just merges into the left base, and an arcuate left first curvature portion which the left first leg portion with the first main section connects. Alternatively or additionally, the right first leg of the closure member has a planar right first leg portion extending on the right first plane and just merging into the right base and an arcuate right first curvature portion connecting the right first leg portion to the first main portion.

A development of the inventive closure member also provides that the left second leg a flat left second leg portion extending on a left second level, an arcuate left second curved portion which connects the left second leg portion with the second main portion, and a arcuate left third curved portion connecting the left second leg portion to the left base. Alternatively or additionally, the right second leg can be constructed accordingly. Thus, in this case, the right second leg has a flat right second leg portion extending on a right second plane, an arcuate right second curvature portion connecting the right second leg portion to the second main portion, and an arcuate right third curvature portion connecting the right one second leg portion connects to the right base.

Further developments, which have already been described in connection with the vacuum transfer valve, are likewise encompassed by the invention, which relates to the closure member, and reference is made to the above statements.

The vacuum valve according to the invention and the closure member according to the invention will be described in more detail below purely by way of example with reference to specific exemplary embodiments shown schematically in the drawings.

In detail: <Tb> FIG. 1 <sep> an oblique view of the vacuum transfer valve and on the back of its closure member in the disassembled state; <Tb> FIG. Fig. 2A is a front view of the vacuum transfer valve of Fig. 1 in the closed state of the closure member; <Tb> FIG. Fig. 2B is a rear view of the vacuum transfer valve of Fig. 1; <Tb> FIG. 3A is an oblique view of the front side of the closure member of FIG. 1; <Tb> FIG. Figure 3B is a detail oblique view of a right portion of the closure member of Figure 3A with a second sealing surface; <Tb> FIG. 4A is a schematic front view of a left portion of the valve housing of the vacuum transfer valve of FIG. 1 with a first sealing surface; <Tb> FIG. 4B <sep> is a schematic front view of a right portion of the valve housing of the vacuum transfer valve of FIG. 1 with the first sealing surface; <Tb> FIG. Fig. 5A is a schematic rear view of a left portion of the closure member of Fig. 1 with the second sealing surface; and <Tb> FIG. 5B <sep> is a schematic side view of the right section of the closure member of the vacuum transfer valve of FIG. 1 with the second sealing surface.

FIGS. 1 to 5B each show a common, exemplary embodiment of a vacuum transfer valve or a closure member according to the invention in different states, from different views and in different degrees of detail. Therefore, these figures will be described together. In some cases, reference numbers and features already explained in previous figures are not discussed again. Figs. 6A and 6B have already been discussed in connection with the description of the prior art.

In FIGS. 1 to 5B, a possible embodiment of the vacuum valve 1 and its closure member 5 is shown. By means of the vacuum valve 1, a flow path F, which leads through an opening 3 of a valve housing 2, are closed in a gastight manner by means of a linear movement of the closure member 5. In the valve housing 2, the opening 3 for the flow path F in the form of a rectangular passage is formed, wherein the width w of the opening 3 in the illustrated embodiment is about five times the height h of the opening 3, as shown in Fig. 2Bshown. The vacuum valve 1 is designed as a vacuum transfer valve.

The opening 3 has a geometric opening axis 4 which lies on a geometrical average vertical plane 23 and a geometric mean horizontal plane 19 perpendicular to the average vertical plane 23, as shown in Figs. 1 and 4A. The opening axis 4 extends along the course of the opening 3 centrally through the valve housing 2 and along the flow path F, as shown in Fig. 1.

The closure member 5 is linear along a geometric axis 6 transverse to the opening axis 4 from an open position 0 as shown in FIG. 1 and a closed position C as shown in FIG a closure member level 7 in a closing direction 8 adjustable. The adjustment axis 6 lies on the central vertical plane 23 and forms a geometric surface normal to the central horizontal plane 19, as shown in FIGS. 1, 4A and 5A. In the open position 0, the opening 3 is released, while the closure member 5 is pushed in the closed position C via the opening 3 linearly in a closing direction 8. Conversely, the shutter member 5 for opening the vacuum transfer valve 1 in an opening direction 9 from the closed position C to the open position 0 are linearly displaced. The displacement can be done by means of a linear drive, which is not shown in the figures.

As shown in FIG. 2B, the width w of the opening 3, which has a substantially rectangular cross section, perpendicular to the adjustment axis 6, is approximately five times the height h of the opening 3 parallel to the adjustment axis 6.

The opening 3 of the valve housing 2 is enclosed by an at least partially curved first sealing surface 10 of the valve housing 2, as shown in FIGS. 1, 4 and 4B. The closure member 5 has a second sealing surface 11 corresponding to this first sealing surface 10, which has a shape corresponding to the first sealing surface 10, as shown in FIGS. 1, 3A, 3B, 5A and 5B.

A gas-tight contact can be produced between the second sealing surface 11 and the first sealing surface 10 in the closed position C by pressing the second sealing surface 11 in the closing direction 8 onto the first sealing surface 10, so that the closure member 5 with its closure surface 24, Fig. 3A, the opening 3 gas-tightly closes, as shown in Fig. 2Ashown. The sealing contact is made possible, for example, by one of the two sealing surface as an elastic seal, for example, as a 0-ring or vulcanized seal is formed or carries such a seal. This seal can be arranged either on the closure member 5, as shown in the figures, or on the valve housing 2. In other words, either the first sealing surface 10, the seal and the second sealing surface 11, the valve seat, on which the sealing surface can rest gas-tight form, or vice versa. Different sealing materials and types of seals are known from the prior art need not be further explained at this point. In the embodiment shown, the seal 25, Fig. 3B and 5B, formed on the second sealing surface 11 in the form of a vulcanized sealing strip. The seal 25 is formed in a cord-like or band-like manner and has a cross-section which is substantially constant along the sealing line of the seal and which is circular, oval, angular, lip-like or free-formed. This seal 25 is vulcanized onto the sealing surface.

The first sealing surface 10 of the valve housing 2 is formed mirror-symmetrically to the central vertical plane 23, Fig. 1, 4A and 4B. Likewise, the second sealing surface 11 of the closure member 5 is mirror-symmetrical to the central vertical plane 23, Figs. 1 and 5A.

The first sealing surface 10 is composed of differently shaped sections 12a, 12b, 14L, 14R, which are each non-parallel to the adjustment axis 6, as shown in FIGS. 4A and 4B. The surface normals of the sections 12a, 12b, 14L, 14R of the first sealing surface 10 have in each case parallel direction components to the adjustment axis 6. Thus, the first sealing surface 10 is perpendicular or oblique in the opening direction 9. The surface normal of these sections 12a, 12b, 14L and 14R of the first sealing surface 10 are parallel to the closure member plane. 7

The second sealing surface 11 is made up of differently shaped sections 12a ', 12b', 14L ', 14R' which are non-parallel to the adjustment axis 6, wherein the surface normals of the sections 12a ', 12b', 14L ', 14R' the second sealing surface 11 to the adjustment axis 6 each have parallel direction components and thus the second sealing surface 11 perpendicular or obliquely in an opening direction 9 of the adjustment axis 6, as shown in Figs. 3A, 3B and 5A. The surface normals of these sections 12a ', 12b', 14L ', 14R' of the second sealing surface 11 run parallel to the closure element plane 7.

A first main section 12a of the first sealing surface 10 extends in a dimension along a geometric first main plane 13a as well as in a further dimension substantially rectilinearly on a first horizontal plane 19a, FIGS. 4A, 4B and 5B parallel to the central horizontal plane 19 , The length L of the first main section 12a of the first sealing surface 10, which extends substantially rectilinearly on the first horizontal plane 19a, amounts to at least 50% of the width w of the opening 3, in the present case about 80% to 90%. A second main section 12b of the first sealing surface 10 extends both in one dimension along a geometric second main plane 13b, as well as in a further dimension substantially rectilinearly on a second horizontal plane 19b parallel to the first horizontal plane 19a. The length L of the second main section 12b of the first sealing surface 10, which runs substantially rectilinearly on the second horizontal plane 19b, is likewise at least 50% of the width w of the opening 3, in the present case also about 80% to 90%. The first main plane 13a and the second main plane 13b are spaced from each other parallel to the shutter member plane 7 as illustrated in FIG. 5B. Thus, the first main portion 12a and the opposite second main portion 12b to each other a geometric offset in the direction of the opening axis 4, as shown in Fig. 1 can be seen. Between the two opposite main sections 12a and 12b, the opening 3 is arranged, Fig. 4A and 4B.

The same applies to the closure member 5. A first main portion 12a 'of the second sealing surface 11 extends along the geometric first main plane 13a and substantially rectilinearly on the first horizontal plane 19a parallel to the central horizontal plane 19, as in FIGS. 5A and Fig. 5B. A second main section 12b 'of the second sealing surface 11 extends along the geometric second main plane 13b and lies substantially rectilinearly on the second horizontal plane 19b, which is parallel to the first horizontal plane 19a. Between the two opposing main sections 12a 'and 12b', the closure surface 24 of the closure member 5 extending substantially parallel to the closure member plane 7 is arranged for closing the opening 3 of the vacuum transfer valve 1, Figure 24. The width w of a substantially rectangular cross-section Closure surface 24 perpendicular to the adjustment axis 6 is approximately five times the height h of the closure surface 24 parallel to the adjustment axis 6, as shown in FIGS. 2B and 3A. The length L of the first main section 12a 'of the first sealing surface 11 running substantially straight on the first horizontal plane 19a and the length L of the second main section 12b' of the second sealing surface 11 running essentially rectilinearly on the second horizontal plane 19b are each at least 50% of that Width w of the opening 3, in the present case about 80 to 90%, Fig. 3A.

A left lateral substantially U-shaped side portion 14L of the first sealing surface 10 connects the first main portion 12a and the second main portion 12b on the one side of the first sealing surface 10, Fig. 4A, while a lateral right substantially U-shaped side portion 14R of the first sealing surface 10 connects the first main portion 12a and the second main portion 12b on the other side of the first sealing surface 10, as shown in Fig. 4B. The left U-shaped side portion 14L and the right U-shaped side portion 14R each have a first leg 15L and 15R, respectively, extending along the first main plane 13a and merging with the first main portion 12a, a second leg 16L and 16R, respectively of the second main plane 13b and merges into the second main section 12b, and a base 17L and 17R, respectively, into which the first legs 15L and 15R and the second legs 16L and 16R respectively pass. The respective base 17L or 17R connects the first leg 15L or 15R and the second leg 16L or 16R to one another and thus bridges the geometric offset in the direction of the opening axis 4. The left base 17L lies on a left first plane 18L, FIG. 4A, whereas the right base 17R lies on a right first plane 18R, Fig. 4B. The two first legs 15L and 15R and the two second legs 16L and 16R extend between the first horizontal plane 19a and the second horizontal plane 19b and bridge the distance between the first horizontal plane 19a and the second horizontal plane 19b, as shown in Figs. 4A and 4B ,

Also, the second sealing surface 11 is formed accordingly. A left side substantially U-shaped side portion 14L 'of the second sealing surface 11 connects the first main portion 12a' to the second main portion 12b 'on the one side of the second sealing surface 11, Fig. 5A, while a lateral right substantially U-shaped side portion 14R 'of the second sealing surface 11 connects the first main portion 12a' and the second main portion 12b 'on the other side of the second sealing surface 11, Fig. 3B. The left U-shaped side portion 14L 'and the right U-shaped side portion 14R' each have a first leg 15L 'and 15R', respectively, extending along the first main plane 13a and merging with the first main portion 12a ', a second leg 16L'. or 16R ', which extends along the second main plane 13b and merges into the second main section 12b', and a base 17L 'and 17R', respectively. The left base 17L 'lies on the left first level 18L, while the right base 17R' lies on a right first level 18R. The respective first legs 15L 'and 15R' and the second legs 16L 'and 16R' respectively transition into the respective bases 17L 'and 17R'. Further, the respective bases 17L 'and 17R', respectively, connect the first leg 15L 'and 15R' and the second leg 16L 'and 16R', respectively, so that the geometric displacement is bridged across the pitch axis 6, as in Figs. 3B 5A and 5B. The two first legs 15L 'and 15R' and the two second legs 16L 'and 16R' extend between the first horizontal plane 19a and the second horizontal plane 19b, Fig. 5A, and thus bridge the distance between the first horizontal plane 19a and the second horizontal plane 19b at least partially.

According to the invention, both the geometric left first plane 18L, on which the respective left base 17L, 17L 'lies, and the geometrically right first plane 18R, on which the respective right base 17R, 17R' lies, do not run in each case parallel to the central horizontal plane 19. The first planes 18L and 18R are respectively inclined relative to this central horizontal plane 19 with a first inclination angle aL or aR of at least 45 °. In Figs. 4A and 5A, the left first inclination angle aL and in Fig. 4B the right first inclination angle aR are shown. These first inclination angles aL and aR are each about 70 ° in the illustrated embodiment. In other words, first planes 18L and 18R are inclined by 60 ° with respect to the central horizontal plane 19, the lines of intersection of the first planes 18L and 18R and the middle horizontal plane 19 each extending parallel to the opening axis 4.

The left first leg 15L of the first sealing surface 10 of the valve housing 2, Fig. 4A, has a flat left first leg portion 15aL, which extends on the left first level 18L and just merges into the left base 17L, and also an arcuate left first curved portion 15bL connecting the left first leg portion 15aL with the first main portion 12a. Also, the right first leg 15R, Fig. 4B, has a flat right first leg portion 15aR extending on the right first plane 18R and passing straight into the right base 17R, and an arcuate right first curvature portion 15bR which is the right first leg portion 15aR connects to the first main section 12a.

The left first leg 15L 'of the second sealing surface 11 of the closure member 5, Fig. 5A, also has a flat left first leg portion 15aL' which extends on the left first level 18L and just merges into the left base 17L ', and an arcuate left first curvature portion 15bL 'connecting the left first leg portion 15aL' to the first main portion 12a '. Likewise, the right first leg 15R ', Fig. 3B, has a planar right first leg portion 15aR' extending on the right first plane 18R and passing straight into the right base 17R 'and an arcuate right first bending portion 15bR 'which connects the right first leg portion 15aR' to the first main portion 12a '.

The left second leg 16L of the left U-shaped side portion 14L of the first sealing surface 10 of the valve housing 2 has, according to FIG. 4A, a planar left second leg portion 16aL extending on a left second plane 20L, an arcuate left second bending portion 16bL the left second leg portion 16aL connects to the second main portion (12b), and an arcuate left third curvature portion 16cL connecting the left second leg portion 16aL to the left base 17L. Also, the right second leg 16R, Fig. 4B, firstly has a flat right second leg portion 16aR running on a right second plane 20R, secondly an arcuate right second curved portion 16bR connecting the right second leg portion 16aR to the second main portion 12b, and thirdly, a right arcuate third curvature portion 16cR connecting the right second leg portion 16aR to the right base 17R. The arcuate left third curvature portion 16cL and the arcuate right third curvature portion 16cR each extend substantially in the region of the central horizontal plane 19 centered in parallel between the first horizontal plane 19a and the second horizontal plane 19b, as shown in FIGS. 4A and 4B.

Corresponding to the construction of the first sealing surface 10, the left second leg 16L 'of the left U-shaped side portion 14L' of the second sealing surface 11 of the closure member 5, Fig. 5A, firstly has a flat left second leg portion 16aL 'located on the second left-hand plane 20L, secondly an arcuate left second curve section 16bL 'connecting the left second leg section 16aL' to the second main section 12b ', and thirdly an arcuate left third curve section 16cL' connecting the left second leg section 16aL 'to the left Base 17L '. Also, because of the symmetrical shape of the closure member 5 to the medial vertical plane, the right second leg 16R 'has first a flat right second leg portion 16aR' extending on a right second plane 20R, second an arcuate right second curvature portion 16bR 'which is the right second leg portion 16aR 'connects to the second main portion 12b', and thirdly, an arcuate right third curvature portion 16cR 'which connects the right second leg portion 16aR' to the right base 17R '.

Both the left second plane 20L and the right second plane 20R are each non-parallel to the central horizontal plane 19, as shown in Figs. 4A and 4B. Both second planes 20L and 20R are inclined with respect to this central horizontal plane 19, each with a second inclination angle ssL and ssR of at least 45 ° in the opposite direction of the respective first inclination angle aL and aR, Figs. 4A and 4B. The two second angles of inclination ssL and ssR are each substantially 70 °.

In other words, the left first inclination angle aL, the right first inclination angle aR, the right second inclination angle ssR and the left second inclination angle ssL are substantially equal in the illustrated embodiment, namely about 70 °, FIGS. 4A, 4B and 5A ,

Of course, it is possible to combine the individual specific features of this embodiment with those of other embodiments, and vice versa. In particular, it is possible to design only one of the two first and second planes inclined. It is also possible that the left and right planes have different angles of inclination, possibly even different inclination directions.

Claims (15)

1. Vacuum transfer valve (1) for gas-tight closing of a flow path (F) by means of a linear movement, with - A valve housing (2) having an opening (3) for the flow path (F), wherein the opening (3) has a geometric opening axis (4) on a geometric central vertical plane (23) and one to the central vertical plane (23) vertical geometric middle horizontal plane (19), along the flow path (F), - a closure member (5) which is linear along a to the opening axis (4) transversely extending, geometric adjustment axis (6) which lies on the central vertical plane (23) and which forms a geometric surface normal to the central horizontal plane (19) a closure member plane (7) of - one of the opening (3) releasing, open position (0) in A closed position (C) pushed linearly over the opening (3) is displaceable in a closing direction (8) and vice versa back into an opening direction (9), in particular wherein the width (w) of the substantially rectangular cross-section opening (3) perpendicular to the adjustment axis (6) at least twice, in particular at least three times, in particular at least five times, the height (h) of the opening (3) in parallel to the adjustment axis (6), - An opening (3) enclosing, at least partially curved first sealing surface (10) of the valve housing (2) and A second sealing surface (11) of the closure member (5) corresponding to the first sealing surface (10) and having a shape corresponding to the first sealing surface (10), in which The first sealing surface (10) is composed of differently shaped sections (12a, 12b, 14L, 14R) which are not parallel to the adjustment axis (6), The surface normals of the sections (12a, 12b, 14L, 14R) of the first sealing surface (10) to the adjustment axis (6) each have parallel direction components and thus the first sealing surface (10) perpendicular or obliquely in the opening direction (9), A first main section (12a) of the first sealing surface (10) extends along a first geometric plane (13a) and extends substantially rectilinearly on a first horizontal plane (19a) parallel to the central horizontal plane (19), A second main section (12b) of the first sealing surface (10) runs along a geometric second main plane (13b) and extends substantially rectilinearly on a second horizontal plane (19b) spaced parallel to the first horizontal plane (19a), The first main plane (13a) and the second main plane (13b) extend at a distance parallel to the closure element plane (7) and thus the first main section (12a) and the opposite second main section (12b) mutually offset geometrically in the direction of the opening axis (4 ) exhibit, - between the two opposite main portions (12a, 12b), the opening (3) is arranged, A lateral left substantially U-shaped side section (14L) of the first sealing surface (10) connects the first main section (12a) and the second main section (12b) on one side of the first sealing surface (10), A lateral right substantially U-shaped side portion (14R) of the first sealing surface (10) connects the first main portion (12a) and the second main portion (12b) on the other side of the first sealing surface (10), The left U-shaped side portion (14L) and the right U-shaped side portion (14R), respectively A first leg (15L, 15R) extending along the first main plane (13a) and merging into the first main section (12a), A second leg (16L, 16R) extending along the second main plane (13b) and merging into the second main section (12b), and - A base (17 L, 17 R), in each of which the first leg (15 L, 15 R) and the second leg (16 L, 16 R), which connects the first leg (15 L, 15 R) and the second leg (16 L, 16 R) and thus bridges the geometric offset in the direction of the opening axis (4), having, - The two first legs (15L, 15R) and the two second legs (16L, 16R) between the first horizontal plane (19a) and the second horizontal plane (19b) extend and the distance between the first horizontal plane (19a) and the second horizontal plane (19b) at least partially bridge, The left base (17L) lies on a left first plane (18L), The right base (17R) lies on a right first plane (18R), and - The second sealing surface (11) in the closed position (C) in a on the first sealing surface (10) in the closing direction (8) oppressive, sealing contact with the first sealing surface (10) and the closure member (5) with a closure surface (24) closes the opening (3) gas-tight, characterized in that - The left first plane (18L) and the right first plane (18R) each non-parallel to the central horizontal plane (19) extend and opposite to this in each case with a first inclination angle (aL, aR) of at least 45 ° inclined. 2. Vacuum transfer valve (1) according to claim 1, characterized in that the first inclination angle (αL, αR) is in each case at least 55 °, in particular substantially 70 °. 3. Vacuum transfer valve (1) according to claim 1 or 2, characterized in that - the left first leg (15L) A flat left first leg portion (15aL) extending on the left first plane (18L) and just merging into the left base (17L), and An arcuate left first curvature portion (15bL) connecting the left first leg portion (15aL) to the first main portion (12a), and / or The right first leg (15R) A flat right first leg portion (15aR) extending on the right first plane (18R) and just merging into the right base (17R), and An arcuate right first curvature portion (15bR) connecting the right first leg portion (15aR) to the first main portion (12a), having. 4. Vacuum transfer valve (1) according to one of claims 1 to 3, characterized in that The left second leg (16L) A flat left second leg portion (16aL) extending on a left second plane (20L), - An arcuate left second curved portion (16bL) which connects the left second leg portion (16aL) with the second main portion (12b), and An arcuate left third curvature portion (16cL) connecting the left second leg portion (16aL) to the left base (17L), and / or The right second leg (16R) A flat right second leg portion (16aR) extending on a right second plane (20R), An arcuate right second curvature portion (16bR) connecting the right second leg portion (16aR) to the second main portion (12b), and An arcuate right third curvature portion (16cR) connecting the right second leg portion (16aR) to the right base (17R), having. 5. Vacuum transfer valve (1) according to claim 4, characterized in that - The arcuate left third curved portion (16cL) and / or The arcuate right third curvature section (16cR) each substantially in the region of the central horizontal plane (19) which lies centrally parallel between the first horizontal plane (19a) and the second horizontal plane (19b) extends. 6. Vacuum transfer valve (1) according to claim 4 or 5, characterized in that - The arcuate left third curved portion (16cL) and / or The arcuate right third curvature section (16cR) are each formed as a circular arc. 7. Vacuum transfer valve (1) according to one of claims 4 to 6, characterized in that the left second plane (20L) and / or the right second plane (20R) each extend non-parallel to the central horizontal plane (19) and opposite to this each with a second inclination angle (βL, βR) of at least 45 ° in the opposite direction of the respective first inclination angle (αL, αR) are inclined. 8. vacuum transfer valve (1) according to claim 7, characterized in that the second inclination angle (βL, βR) is at least 55 °, in particular substantially 70 °. 9. Vacuum transfer valve (1) according to one of claims 1 to 8, characterized in that the left first inclination angle (αL), the right first inclination angle (αR), the right second inclination angle (βR), and the left second inclination angle (βL) are substantially equal. 10. Vacuum transfer valve (1) according to one of claims 1 to 9, characterized in that the first sealing surface (10) of the valve housing (2) and the second sealing surface (11) of the closure member (5) are each formed mirror-symmetrically to the central vertical plane (23). 11. Vacuum transfer valve (1) according to one of claims 1 to 10, characterized in that the surface normals of the sections (12a, 12b, 14L, 14R) of the first sealing surface (10) extend parallel to the closure element plane (7). 12. Vacuum transfer valve (1) according to one of claims 1 to 11, characterized in that - The length (L) of the substantially straight on the first horizontal plane (19 a) extending first main portion (12 a) of the first sealing surface (10) and - The length (L) of the substantially straight on the second horizontal plane (19b) extending second main portion (12b) of the first sealing surface (10) is at least 50% of the width (w) of the opening (3). 13. closure member (5) for gas-tight closure of a flow path (F) by means of a linear movement, in particular for a vacuum transfer valve (1) according to one of claims 1 to 12, with - A geometric adjustment axis (6) which lies on a geometric central vertical plane (23) and which forms a geometric surface normal to a central horizontal plane (19), - A closure member plane (7) on which the geometric adjustment axis (6) lies, and - A second sealing surface (11), wherein The second sealing surface (11) is composed of differently shaped sections (12a ', 12b', 14L ', 14R') which are not parallel to the adjustment axis (6), - The surface normal of the sections (12a ', 12b', 14L ', 14R') of the second sealing surface (11) to the adjustment axis (6) each have parallel direction components and thus the second sealing surface (11) perpendicular or obliquely in an opening direction (9 ) of the adjustment axis (6), A first main section (12a ') of the second sealing surface (11) extends along a first geometric first plane (13a) and substantially rectilinearly on a first horizontal plane (19a) parallel to the central horizontal plane (19), A second main section (12b ') of the second sealing surface (11) runs along a geometrical second main plane (13b) and extends substantially rectilinearly on a second horizontal plane (19b) spaced parallel to the first horizontal plane (19a), - The first main plane (13 a) and the second main plane (13 b) spaced from each other parallel to the closure member plane (7) and thus the first main portion (12 a ') and the opposite second main portion (12 b') to each other a geometric offset perpendicular to the adjustment axis (6) have, - Between the two opposing main sections (12a ', 12b') a in particular substantially parallel to the closure member plane (7) extending closure surface (24) of the closure member (5) for closing an opening (3) of a vacuum transfer valve (1) is arranged . - In particular, the width (w) of a substantially rectangular cross-section having closure surface (24) perpendicular to the adjustment axis (6) at least twice, in particular at least three times, in particular at least five times, the height (h) of the closure surface (24) parallel to the adjustment axis (6), A lateral left substantially U-shaped side portion (14L ') of the second sealing surface (11) connects the first main portion (12a') and the second main portion (12b ') on one side of the second sealing surface (11), A lateral right substantially U-shaped side portion (14R ') of the second sealing surface (11) connects the first main portion (12a') and the second main portion (12b ') on the other side of the second sealing surface (11), The left U-shaped side portion (14L ') and the right U-shaped side portion (14R'), respectively A first leg (15L ', 15R') extending along the first main plane (13a) and merging into the first main section (12a '), A second leg (16L ', 16R') extending along the second main plane (13b) and merging into the second main section (12b '), and A base (17L ', 17R'), into which in each case the first leg (15L ', 15R') and the second leg (16L ', 16R') merge, which the first leg (15L ', 15R') and the second leg (16L ', 16R') connects and thus bridges the geometric offset transversely to the adjustment axis (6), having, The two first legs (15L ', 15R') and the two second legs (16L ', 16R') extend between the first horizontal plane (19a) and the second horizontal plane (19b) and the distance between the first horizontal plane (19a) and the second horizontal plane (19b) at least partially bridge, The left base (17L ') lies on a left first level (18L), The right base (17R ') lies on a right first plane (18R), and - By means of the second sealing surface (11) in a closed position (C) of the closure member (5) has a sealing contact with a first sealing surface (10) of a vacuum transfer valve (1) for gas-tight closure of an opening (3) of the vacuum transfer valve ( 1) by linear pressing of the second sealing surface (11) on the first sealing surface (10) in a closing direction (8) of the adjustment axis (6) can be produced, wherein the first sealing surface (10) with the second sealing surface (11) corresponding one the second sealing surface (11) corresponding shape, and in a closed position (C), the closure member (5) with a closure surface (24) the opening (3) gas-tightly closes, characterized in that - The left first plane (18L) and the right first plane (18R) each non-parallel to the central horizontal plane (19) extend and opposite to this in each case with a first inclination angle (aL, aR) of at least 45 ° inclined. 14. Closure member (5) according to claim 13, characterized in that The left first leg (15L ') A flat left first leg portion (15aL ') extending on the left first plane (18L) and just merging into the left base (17L'), and An arcuate left first curvature portion (15bL ') connecting the left first leg portion (15aL') to the first main portion (12af), and / or The right first leg (15R ') A flat right first leg portion (15aR ') extending on the right first plane (18R) and passing straight into the right base (17R'), and An arcuate right first curvature portion (15bR ') connecting the right first leg portion (15aR') to the first main portion (12a '), having. 15. closure member (5) according to claim 13 or 14, characterized in that The left second leg (16L ') A flat left second leg portion (16aL ') extending on a left second plane (20L), An arcuate left second curvature portion (16bL ') connecting the left second leg portion (16aL' to the second main portion (12b '), and An arcuate left third curvature portion (16cL ') connecting the left second leg portion (16aL') to the left base (17L '), and / or the right second leg (16R ') A flat right second leg portion (16aR ') running on a right second plane (20R), An arcuate right second curvature portion (16bR ') connecting the right second leg portion (16aR') to the second main portion (12b '), and An arcuate right third curvature portion (16cR ') connecting the right second leg portion (16aR') to the right base (17R '), having.