CH688294A5 - Semiconductor device manipulation appts. - Google Patents

Abstract

The semiconductor device (2) handling appts. (1) has devices to manipulate the devices or attached tools (6). The appts. (1) is a compact module with a housing (7) and sliders (19,20) operate in the y-axis to manipulate the semiconductor devices. In the X-axis an actuator (21) is positioned so that control curves in which the locating follower of the sliders locate and control their motion. One slider (19) manipulates the semiconductor SMD-device and the other (20) manipulates the tool.

Description

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description

The invention relates to a device according to the preamble of claim 1.

Components in the sense of the present invention are, in particular, semiconductor components and in particular also so-called SMD components with extremely small dimensions, i.e. with dimensions in the order of 2 mm and smaller.

In devices for processing such components, in particular also in devices in which these components (SMD components) are punched out of a lead frame, it is, inter alia, necessary to measure or check these components electrically and / or bend the connections of the components in a prescribed manner, etc.

Already the electrical measurement of the components has hitherto caused difficulties in practice, in particular also when high performance is required when processing the components (large numbers of components per unit of time).

The object of the invention is to show a device which enables reliable treatment of components, in particular also of electrical components with extremely small dimensions, with relatively simple means.

To solve this problem, a device is designed according to the characterizing part of patent claim 1.

The particular advantage of the device according to the invention includes in that this device forms a fully functional unit, can be installed as such in a larger system and can also be quickly replaced in the event of a repair.

In the device according to the invention, the actuation of the at least one first slide and the at least one second slide takes place via a common control slide, forcibly by means of a control cam on this control slide in such a way that in each case the component in question is first clamped in before it is over the working slide the tool is actuated.

In one embodiment of the invention, the tool is a measuring contact and is preferably a leaf spring-shaped measuring contact, the design preferably being such that each measuring contact forms a contact pair together with a further measuring contact and the measuring contacts of each pair are synchronously from two sides by a second slide be moved here to a measuring plane in which the connection of the relevant component is located, on which the measuring contacts are to act. The movement of the control slide takes place transversely or perpendicular to the movement of the measuring contacts when opening and closing, which also has the advantage that vibrations, which could cause the measuring contacts to bounce when measuring, are avoided in the machine or device.

A particular advantage of the invention is that the device has a compact,

is a fully functional unit and can be designed such that the at least one control slide can be operated in a plunger-like manner, i.e. by an outer drive element which only exerts an axial pressure on the control slide.

However, the device according to the invention is also suitable for other stations, for example for bending stations, etc.

Further developments of the invention are the subject of the dependent claims.

The invention is explained in more detail below with reference to the figures using exemplary embodiments. Show it:

1 shows an enlarged representation and section of a measuring station for the electrical measurement of electrical components (SMD semiconductor components) according to the invention;

Fig. 2 is a section along the line A-A of Fig. 1;

Fig. 3 is a section along the line B-B of Fig. 1;

FIG. 4 shows a greatly enlarged illustration of one of the components, together with two measuring contacts applied to a connection of the component;

Fig. 5 is a plan view of the illustration of Fig. 4;

6 in positions a) -c) the course of control curves;

7 and 8 in a representation similar to FIGS. 1 and 2, a bending station for forming the connections of an electrical component (SMD semiconductor component);

9 shows a representation similar to FIG. 7, another station with adjusting elements or sliders for adjusting the electrical component;

Fig. 10 is a top view of the station of Fig. 9;

11 is a detailed view of FIG. 10.

The device 1 shown in FIGS. 1-6 is used to measure electrical parameters of semiconductor components 2, which in the embodiment shown are SMD components with very small dimensions. In detail, each component 2 consists, in a known manner, of an approximately cuboid housing 3 made of plastic, in which the actual semiconductor chip is accommodated and from which the connections 4 punched out of a lead frame protrude on two longitudinal sides and are S-shaped are bent so that each terminal 4 forms a contact surface 5 with its free end. The contact surfaces 5 of all connections 4 lie in a common plane E, which runs somewhat below the underside of the housing 3. The housing 3 typically has, for example, a length of the order of 1.5 mm and a width of the order of less than 1 mm, the length of each contact surface 5 running parallel to the underside of the housing being of the order of 0.15 mm.

The device 1 is, for example, a workstation in a processing line in which the components 2 and others. punched out of the lead frame

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and the connections 4 are bent in the manner shown in FIG. 4 and described above, then measured with the device 1 in order then to be sorted and / or separated out.

Each component 2 is measured on the device 1 with the aid of measuring contacts 6, each of which is designed like a leaf spring and is provided in pairs. For the measurement, each component 2 is first centered and clamped on the device 1 in a shape or die 7 provided there and adapted to the shape of the housing 3. in such a way that the plane E, in which the contact surfaces 5 are arranged, lies in the horizontal measurement plane. Then the free ends 6 'of the measuring contacts 6 of each pair of measuring contacts are moved towards each other, namely the end 6' of the upper measuring contact of the pair above the level E from above onto the level E and the end 6 'below the level E. of the lower measuring contact from below to level E.

The measuring contacts 6 not only of each pair of measuring contacts, but all measuring contacts 6 are moved in the same direction, namely by the fact that these measuring contacts between the free ends 6 ′ and the clamped ends 6 ″ drivers 8 (onto the upper measuring contacts 6 from above) or Act driver 9 (on the lower measuring contacts 6 from below) so that each measuring contact 6 rests elastically deformed in the manner of a leaf spring with its end 6 'resting against the contact surface 5 above or below 6 opened or moved away from the contact surfaces 5. Only then is the clamped component released.

The measuring contacts 6 have the advantage that forces acting on the connections 4, the component 2 possibly disorienting and / or bending the connections 4 are avoided by their movement in the same direction when the measuring contacts are closed. Because the measuring contacts 6 are designed like leaf springs, a reproducible contact force is achieved when the measuring contacts are closed. It is also achieved that at the end of the closing of the measuring contacts, i.e. after the first contact of the respective end 6 'and during the subsequent movement of the associated driver 8 or 9, a sliding movement of the end 6' along the contact surface 5 also occurs, as a result of which dirt, oxides, etc. on the contact surface 5 are removed and an optimal measurement is achieved.

The various movements for clamping and releasing the component in the die 7 and for opening and closing the measuring contacts 6, i.e. for moving the carriers 8 downwards and upwards and for moving the carriers 9 upwards and downwards are realized in the device shown in FIGS. 1-6.

In these figures, 10 is a pipette-like holder which is subjected to a negative pressure, as a result of which, at the lower end 10 ′ of each holder 10, a component 2 on the top of its housing 3

can be held. The holders 10 are part of a transport system with which these holders in the horizontal direction, i.e. 1 (in a Z-axis) are gradually moved in the direction of the arrow TR (FIGS. 2 and 3) perpendicular to the plane of the drawing. For this purpose, each holder 10 is arranged in a support piece 11, namely by a predetermined stroke in the vertical direction against the action of a spring from an upper to a lower position. The support pieces 11 are provided on an endless conveyor belt 12, which rotates clocked by a drive. With 13 and 14 lateral guides for the conveyor belt or the support pieces 11 are designated, the guide 13 is also formed for the vacuum supply of the pipette-like holder 10. Each holder 10 also has at its upper end a roller 15 which bears against a stationary counter surface 16 in the area of the device 1 from below in such a way that the holder 10 has a defined height.

The device 1 also has a housing 17, on the upper side of which clamping elements 18 are provided for clamping or holding the measuring contacts 6 at the ends 6 ″.

On each side of the path of movement of the pipette-like holder 10, two slides are provided in the housing 17 in the vertical direction (Y axis), namely a slide 19 and a slide 20. Each slide 19 carries the driver 8 and each slide 20 the Driver 9. In the embodiment shown, the drivers are each made of plastic, which are freely rotatably mounted on the relevant slide 19 or 20, respectively about a horizontal axis (Z axis) perpendicular to the longitudinal extension of the measuring contacts 6 or in transport or Direction of movement of the holder 10. In the embodiment shown, a total of four slides 19 and 20 are provided, i.e. a slide on each side of the path of movement of the holder 10

19 and a slide 20.

In the housing 17 is still in the horizontal direction, i.e. in an axial direction (X axis) perpendicular to the direction of movement of the slider 19 and

20 and perpendicular to the direction of movement of the holder 10, a control slide 21 is slidably provided, namely against the action of a spring 22 in the illustration selected for FIG. 1 from the first position there (with the spring 22 relieved) to the right into a second position, in the spring 22 is tensioned. The movement of the control slide 21 takes place via a plunger 23 which can be displaced in the same axial direction (X axis) in the housing 17 and which has one end on the end of the control slide facing away from the spring 22

21 acts and acts on the other, protruding from the housing 17, a pivot or actuating lever 24 (rocker arm) of an otherwise not shown drive with a head piece 25 to move the movement of the control slide 21 between its two positions. The actuating lever 24 is, for example, pivotally mounted at its end remote from the head 25 about an axis parallel to the Z axis

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and is pivoted by an eccentric drive against the action of a return spring in the direction of arrow S in order to move the control slide 21 against the action of the spring 22 via the plunger 23 from the first position into the second position.

In the embodiment shown, the two slides 19 are located on one side of the control slide 21 and the two slides 20 on the other side of the control slide 21, which is offset in the direction of the Z-axis. Between the two sliders 19 there is a further slider 26 in the vertical direction on the housing 17, i.e. slidably provided in the Y axis. In the central plane of the control slide 12, which includes the X-axis and the Y-axis, a receptacle 27 in the vertical direction, i.e. Slidable in the direction of the Y-axis by a limited stroke, but provided against rotation about this axis. The receptacle 27 is biased upward in the Y-axis by a spring 28 and forms at its upper end the die 7, which in the embodiment shown in FIG. 3 is formed by a recess which extends upwards and in the direction of the X. -Axis is open on two sides, so that on the one hand each component 2 can be received by the die or by the recess forming this die, but at the same time the connections 4 for the measuring contacts 6 are accessible.

At the upper end of the slider 26 is attached an arm or block 29 which serves as a driver for the receptacle 27, i.e. then when the slide 26 moves down, the receptacle 27 is also lowered against the spring 26. Conversely, the receptacle 27 is raised by the spring 28 when the slider 26 moves upwards, the movement of the slider 26 being set such that the die 7 already lies against the underside of a component 2 held on a holder 10 before the Slider 2 reaches its upper position.

The slides 19, 20 and 26 are positively controlled with the control slide 21. For this purpose, the control slide 21 points on the two sides which are offset with respect to one another in the direction of the Z axis and which each lie in a plane including the X axis and the Y axis. Control cams, namely on one of these sides the control cams 30 and 31 for the two slides 19 and on the other surface the control cams 32 and 33 for the two slides 20. A control curve 34 for the additional slide 26 is also provided on one surface.

Carriers 35 (rollers) are provided on the slides 19, 20 and 26, each of which fits exactly into the associated control cam 30-34

The control cams 30 and 31 are each offset in the direction of the X axis, but also in the direction of the Y axis, but are otherwise similar. The same applies to the control cams 32 and 33, with the control cams 30 and 32 and the control cams 31 and 33 in the illustrated embodiment

each offset in the direction of the Z axis, i.e. are provided on the two different sides of the control slide 21.

As shown in Fig. 6 in the enlarged representation a) for the control curve 32 (with solid lines) and the control curve 30 (with broken lines), each control curve consists of a first section extending in the direction of the X axis 30 'or 32' which corresponds to the starting position of the respective slide 19 or 20 and from a section 3 "or 32" which corresponds to the working position of the respective slide (section 30 "lowered position of the slide 19 - section 32" raised position of the Slider 20) corresponds.

The sections 30 'and 32' lie in the viewing direction corresponding to the Z-axis one after the other on the different sides of the control slide 21. As shown in FIG. 6 in position b), the same conditions are present for the two control cams 31 and 33, whereby the course of the control curve 31 is identical to that of the control curve 30 and the course of the control curve 33 is identical to that of the control curve 32. Due to the offset in the direction of the X axis and for reasons of the simplest possible implementation of the control cams, the sections 31 "and 33" have a greater length than the sections 30 'and 32 ".

The sections 30 ', 32', 33 "and 32" each extend in the X axis, the sections 30 'and 30 "and also the sections 32' and 32" each offset in the Y axis and over connect an inclined transition to each other.

As Figure c) of Fig. 6 shows, the control curve 34 has a course that corresponds to the course of the control curve 32, for example, i.e. the control cam 34 has the two sections 34 'and 34 "which extend in the X axis, are offset in the Y axis and of which the section 34' of the lower starting position of the slide 26 and the section 34" of the upper Correspond to the position of this slide. However, the sections 34 'and 34 "and the transition between these sections are selected such that only when the control slide 21 moves the driver 35 of the slide 26 from section 34' into section 34" does the driver 35 the Sliders 19 and 20 leave section 30-33 'and this slider is actuated.

The operation of the device 1 can be described as follows:

The control slide 21 is in its initial position, in which the slide 19 is raised and the slide 20 and 26 are lowered.

The pivot lever 24 is actuated in synchronism with the movement of the holder 10. Whenever there is a holder 10 with a component 2 above the die 7, the drive of the conveyor belt 12 is stopped and the pivot lever 24 is actuated, whereby the control slide 21 moves into the working position. Here, the slide 26 increasingly releases the receptacle 27, so

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that the die 7 rests with the force of the spring 28 against the underside of the component 2 and clamps this or its housing 3 between the lower end 10 'of the holder 10 and the die 7. When the control slide 21 moves further in the working position, the slides 19 are then moved downwards and the slides 20 upwards, specifically to close the measuring contacts 6. after the measurement has taken place, the control slide 21 moves again in the direction of its starting position by means of the spring 22, as a result of which the slides 19 and 20 for opening the measuring contacts 6 and only after the contacts 26 have been completely opened, the slide 26 are moved downward, so as to remove the die 7 from the component 2 still held on the holder 10.

The advantages of the device 1 can be summarized as follows:

Symmetrical movement of the measuring contacts 6; Movement of the control slide 21 transversely to the direction of transport TR, which in particular prevents vibrations causing the measuring contacts 6 from bouncing; rubbing movement of the measuring contacts or their ends 6 'when closing and thus ensuring perfect contacting; Clamping and centering the respective component 2 before closing the measuring contacts and opening the measuring contacts before releasing the respective component 2, so that the required exact positioning of the component 2 on the holder 10 is not lost.

Another significant advantage is that the device 1 forms a fully functional assembly that is easy to install, but can also be easily removed or replaced. It is also particularly advantageous here that tolerances of the outer drive (pivot lever 24 and its drive) are irrelevant for the function of the device. All that is required is a certain minimum size for the pivoting stroke of the pivoting lever 24, deviations being compensated for by the fact that the control cams 30-34 or their sections have a specific length.

7 shows a further embodiment of a device 1a, which corresponds in its basic structure to device 1, but not for electrical measurement of components 2, but for bending connections 4, i.e. to perform two successive steps in this bending.

The device 1a in turn also has the control slide 21, which in turn actuates two pairs of vertical slides 19a and 20a which are displaced in the direction of the Z-axis or in the transport direction TR, namely in the device 19a in the same direction again by means of control cam 36 or 37 provided on different sides of the control slide 21a. The two slides 19a are assigned to a first work station and the two slides 20a to a second work station. Each work station is assigned a further slide 37 which can be displaced in the Y axis and which is moved by a

Control curve 38 of the control slide 21a is positively controlled and acts via a spring 39 on a receptacle 40 for each component 2. The receptacle 40 is designed as a bending shape. Outer bending tools 41 and 42 are fastened to the slides 19a and 20a, respectively. The course of the control cams 36, 37, 38, in which the slides engage with their driver elements 35, are in turn designed so that each time the control slider 21a is actuated, the additional slides 37 for clamping the respective component between the lower end of a holder 10 and of the receptacle 40 is moved upward and only then are the slides 19a and 20a moved downward in order to carry out the bending process on the clamped component 2 centered in the receptacle 40.

9-11 show a device 1b which is used to adjust the components 2 on the respective holder 10 so that these components can be fed to a further station in an exact position.

For adjustment, two sliders 50 which can be moved back and forth in the horizontal direction are provided, which move in opposite directions but synchronously in the horizontal direction, i.e. can be moved in the direction of the X axis to the central plane lying in the Y-Z plane or to the central axis M there and away from this central plane. The central axis M extends in the Y axis.

Each slide 50 has two recesses 51 on its side facing the other slide. When the slide 50 moves towards one another, two recesses 51 complement each other to form a die that is precisely adapted to the shape of the housing 3. The two slides 50 are provided on the top of a housing 52. A vertical slide 26b can be moved up and down in the housing in the direction of the Y-axis and in the center plane M, specifically controlled by the control slide 21 which can be moved back and forth in the housing 52 in the direction of the X-axis. The slide 26b also forms its upper side a contact surface for the underside of the housing 3 in such a way that in the raised position of the slide 26b, the components 2 are each clamped between this contact surface 53 and the holder 10.

A further control slide 54 is provided in the housing 52 so as to be displaceable in the direction of the X axis. This control slide 54 has a driver 55 which engages in a control groove 56 of a ring 57 which is freely rotatable in the region of the upper side of the housing 2 about the central axis M of the housing 52 lying in the Y axis and is arranged below the slide 50.

On the top of the ring 57, two control grooves 58 are introduced into the ring 57, offset by 180 ° about the central axis M. Each control groove has at one end a section 58 'which has a smaller radial distance from the central axis M, and at the other end a section 58' 'which has a larger radial distance from the central axis M, the two sections merging with one another and each these sections extend over a certain angular range of the rotation

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movement of the ring 57 extends. On the underside of each slide 50, a guide piece 59 is provided which engages in a control groove 58, so that when the ring 57 is rotated or pivoted about the central axis, the two slides 50 are moved in opposite directions towards or away from one another. The respective end positions of the slide 50 are determined by the radial distance between the sections 58 'and 58 ". Since these sections each extend in a circle around the central axis M by an angular amount, tolerances in the rotary or pivoting movement of the ring 57 have no influence on the End positions of the slide 50. It is only necessary to ensure that the ring 57 is pivoted so far that the drivers 59 actually reach the sections 58 'and 58 ". This also means that any play between the driver 55 and the control groove 56 and tolerances in the movement of the control slide 54 have no influence on the accuracy of the movement of the slide 50.

The control slide 54 is moved against the action of a spring 60 from a starting position into a working position, so that the slide 54 can in turn be controlled by an external pressure piece, for example by an external pivot lever 24 or an external plunger.

A special feature of the invention is that the device as a fully functional compact unit, i.e. is designed as a fully functional compact module, which can be used as a workstation or as part of such a workstation in an overall system or in a system for treating electrical semiconductor components. The invention has been described above using exemplary embodiments. It goes without saying that numerous changes and modifications are possible without thereby departing from the inventive concept on which the invention is based.

Claims (23)

Claims 1. Device for use in a system or in a system for treating components, in particular electrical semiconductor components (2), with means for clamping one component (2) each and / or for actuating at least one on the component (2) attacking tool (6, 41, 42, 50), characterized in that the device (1, 1a, 1b) is designed as a fully functional compact unit and in a housing (17, 52) at least one in a first axial direction (Y- Axis) between at least one starting position and a working position displaceable slide (19, 20, 19a, 20a, 26, 37, 26b), which clamps the component (2) and / or actuates the tool in the housing (17th ) in a second, perpendicular to the first axial direction (X-axis), a control slide (21, 21a) is slidably provided between an initial position and at least one working position, and that the control slide r (21, 21a) Control cams (30-34, 36, 36 '), engage in the drivers (35) of the slide (19, 20, 19a, 20a, 26, 37, 26b) for their positive control. 2. Device according to claim 1, characterized in that in the housing (17) at least two slides (19, 20, 19a, 20a, 26, 37) are provided, of which at least one first slider is clamping or bending the connections (4th ) of the component (2) and at least a second one actuates the tool. 3. Device according to claim 2, characterized in that the control cams (30-34, 36, 36 ') are designed such that each time the control slide (21, 21a) moves from the starting position into the working position before the tool is actuated the component (2) is clamped. 4. Device according to one of the preceding claims, characterized in that the control slide (21, 21a, 54) can be operated in a plunger-like manner. 5. Device according to one of claims 2 to 4, characterized in that the first slide (26, 37) cooperates with a preferably designed as a die holder (27, 40) to the respective component (2) between this receptacle and a preferably of the mating surface formed by a holder (10) of a conveyor (12). 6. The device according to claim 5, characterized in that the component (2) held with its upper side on the holder (10) is clamped on the underside through the die or receptacle (7, 27, 40). 7. Device according to one of the preceding claims, characterized in that the components (2) with a conveyor (12) on the device (1, 1a) in an axial direction (Z-axis) can be moved, and that the direction of movement of the control slide ( 21, 21a) is perpendicular to this axis direction of movement (Z axis). 8. The device according to claim 7, characterized in that the movement of the slide (19, 20, 19a, 20a, 26, 37) and the direction of movement (X-axis) of the control slide (21, 21a) lie in a common plane which perpendicular to the direction of movement (Z axis) of the conveyor (12) for the components (2). 9. Device according to one of the preceding claims, characterized in that the control slide (21, 21a, 54) is biased into its starting position by at least one return spring (22). 10. Device according to one of the preceding claims, characterized by a drive (24) for actuating the control slide (21, 21a), the drive having a pivoted lever (24) moved by a drive. 11. Device according to one of the preceding claims, characterized by a plunger (23) which can be displaced in the housing (17) and via which the control slide (21, 21a) can be moved. 12. Device according to one of the preceding claims, characterized in that the tools are measuring contacts (6). 5 10th 15 20th 25th 30th 35 40 45 50 55 60 65 6 11 CH 688 294 A5 12th 13. The apparatus according to claim 12, characterized in that each measuring contact is designed like a leaf spring and has a free, measuring end (6 ') and a clamped end (6 "), and that each measuring contact (6) on a second slide (19, 20) provided driver (8, 9) is assigned, which acts on the measuring contact (6) between the two ends (6 ', 6 ") in order to move it from a starting position against its inherent elasticity into a working position. 14. The apparatus according to claim 13, characterized in that each driver (8, 9) is assigned a plurality of measuring contacts (6). 15. The apparatus of claim 13 or 14, characterized in that at least two measuring contacts forming a pair of measuring contacts are provided on both sides of a measuring plane (E), and that the measuring contact (6) on one side of the plane on a second slide (19) provided driver (8) and the measuring contact (6) on the other side of the plane a driver (9) is assigned to a further second slide (20), and that the two slides (19, 20) by the control slide (21) in opposite directions are movable. 16. Device according to one of claims 2 to 15, characterized in that all the second slides (19, 20) can be moved synchronously by the control slide (21). 17. Device according to one of claims 13 to 16, characterized in that a plurality of measuring contacts (6) are actuated with a driver (8, 9) provided on a first slide (19, 20). 18. Device according to one of claims 5 to 17, characterized in that the die (7) or the receptacle forming this die (27) is biased by a spring (28) into the position clamping the component (2), and that the first slide (26) is in the working position releases the receptacle (27) and retains it in the starting position against the action of the clamping spring (28). 19. Device according to one of claims 2 to 18, characterized in that a bending tool (41, 42) is provided on the at least one first slide (19a, 20a) for bending the connections of the component (2). 20. Device according to one of the preceding claims, characterized in that two first slides (19, 20; 19a, 20a) are provided on both sides of a movement path of a holder (10) for the components (2). 21. Device according to one of claims 2 to 20, characterized in that a common control slide (21, 21a) is provided for all first and second slides. 22. The device according to one of claims 5 to 21, characterized in that the holder is a vacuum holder, a gripper or a magnet holder. 23. Device according to one of the preceding claims, characterized by a further control slide (54) and a control ring (57) pivoted back and forth by this control slide about an axis (Y axis) with control grooves (58) for controlling at least one forming a tool Slider. 5 10th 15 20th 25th 30th 35 40 45 50 55 60 65 7