CH618298A5 - - Google Patents
Download PDFInfo
- Publication number
- CH618298A5 CH618298A5 CH665577A CH665577A CH618298A5 CH 618298 A5 CH618298 A5 CH 618298A5 CH 665577 A CH665577 A CH 665577A CH 665577 A CH665577 A CH 665577A CH 618298 A5 CH618298 A5 CH 618298A5
- Authority
- CH
- Switzerland
- Prior art keywords
- quartz crystal
- plate
- electrodes
- crystal oscillator
- etching
- Prior art date
Links
- 239000010453 quartz Substances 0.000 claims description 76
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 76
- 239000013078 crystal Substances 0.000 claims description 72
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000001259 photo etching Methods 0.000 claims 1
- 230000010355 oscillation Effects 0.000 description 18
- 238000005530 etching Methods 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6313576A JPS52146588A (en) | 1976-05-31 | 1976-05-31 | Quartz oscillator |
| US05/801,982 US4205248A (en) | 1976-05-31 | 1977-05-31 | Quartz crystal vibrator electrode configuration |
| US05/900,222 US4176030A (en) | 1976-05-31 | 1978-04-26 | Method for forming a quartz crystal vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH618298A5 true CH618298A5 (ja) | 1980-07-15 |
Family
ID=27298053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH665577A CH618298A5 (ja) | 1976-05-31 | 1977-05-31 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US4205248A (ja) |
| JP (1) | JPS52146588A (ja) |
| CH (1) | CH618298A5 (ja) |
| DE (1) | DE2724082A1 (ja) |
| FR (1) | FR2353961A1 (ja) |
| GB (1) | GB1560846A (ja) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5357786A (en) * | 1976-11-04 | 1978-05-25 | Seiko Epson Corp | Production of crystal vibrator |
| US4232109A (en) * | 1979-02-14 | 1980-11-04 | Citizen Watch Co., Ltd. | Method for manufacturing subminiature quartz crystal vibrator |
| US4421621A (en) * | 1979-07-17 | 1983-12-20 | Kabushiki Kaisha Suwa Seikosha | Quartz crystal oscillator |
| FR2467487A1 (fr) * | 1979-10-15 | 1981-04-17 | Ebauches Sa | Resonateur piezoelectrique |
| US4531073A (en) * | 1983-05-31 | 1985-07-23 | Ohaus Scale Corporation | Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity |
| US4725994A (en) * | 1984-06-14 | 1988-02-16 | Kabushiki Kaisha Toshiba | Ultrasonic transducer with a multiple-folded piezoelectric polymer film |
| WO2000005812A1 (fr) * | 1998-07-24 | 2000-02-03 | Seiko Epson Corporation | Oscillateur piezoelectrique et son procede de production |
| JP3887137B2 (ja) * | 1999-01-29 | 2007-02-28 | セイコーインスツル株式会社 | 圧電振動子の製造方法 |
| JP3989663B2 (ja) * | 2000-02-17 | 2007-10-10 | セイコーインスツル株式会社 | 圧電振動子と圧電振動子の製造方法 |
| US6915548B2 (en) * | 2002-03-06 | 2005-07-12 | Piedek Technical Laboratory | Method for manufacturing quartz crystal tuning fork resonator, quartz crystal unit having quartz crystal tuning fork resonator, and quartz crystal oscillator having quartz crystal unit |
| US10199556B2 (en) | 2003-06-30 | 2019-02-05 | Piedek Technical Laboratory | Unit, oscillator and electronic apparatus |
| JP4026074B2 (ja) * | 2003-06-30 | 2007-12-26 | 有限会社ピエデック技術研究所 | 水晶振動子と水晶ユニットと水晶発振器 |
| US11563406B2 (en) | 2003-06-30 | 2023-01-24 | Piedek Technical Laboratory | Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator |
| US7768179B2 (en) * | 2003-06-30 | 2010-08-03 | Piedek Technical Laboratory | Quartz crystal unit, quartz crystal oscillator having quartz crystal unit and electronic apparatus having quartz crystal oscillator |
| US9209381B2 (en) | 2003-06-30 | 2015-12-08 | Piedek Technical Laboratory | Quartz crystal unit, quartz crystal oscillator and electronic apparatus |
| WO2009143492A1 (en) * | 2008-05-23 | 2009-11-26 | Statek Corporation | Piezoelectric resonator |
| JP5445114B2 (ja) * | 2009-03-02 | 2014-03-19 | セイコーエプソン株式会社 | 振動片および発振器 |
| FR3108728B1 (fr) * | 2020-03-26 | 2022-04-22 | Office National Detudes Rech Aerospatiales | Detecteur de champ electrique |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5635329B2 (ja) * | 1973-10-03 | 1981-08-17 | ||
| DE2504552A1 (de) * | 1974-07-01 | 1976-01-22 | Citizen Watch Co Ltd | Mikroresonator |
| JPS51100693A (en) * | 1975-03-04 | 1976-09-06 | Citizen Watch Co Ltd | Atsudenshindoshino denkyokumakukoseiho |
| JPS5224485A (en) * | 1975-08-20 | 1977-02-23 | Morio Onoe | Quartz vibrator |
| JPS5263093A (en) * | 1975-11-19 | 1977-05-25 | Seiko Instr & Electronics Ltd | Method of manufacturing piezo-electric oscillator |
| JPS5323589A (en) * | 1976-08-18 | 1978-03-04 | Seiko Epson Corp | Crystal vibrator |
-
1976
- 1976-05-31 JP JP6313576A patent/JPS52146588A/ja active Pending
-
1977
- 1977-05-25 FR FR7715915A patent/FR2353961A1/fr active Granted
- 1977-05-27 DE DE19772724082 patent/DE2724082A1/de not_active Withdrawn
- 1977-05-27 GB GB22515/77A patent/GB1560846A/en not_active Expired
- 1977-05-31 US US05/801,982 patent/US4205248A/en not_active Expired - Lifetime
- 1977-05-31 CH CH665577A patent/CH618298A5/de not_active IP Right Cessation
-
1978
- 1978-04-26 US US05/900,222 patent/US4176030A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR2353961A1 (fr) | 1977-12-30 |
| DE2724082A1 (de) | 1977-12-22 |
| JPS52146588A (en) | 1977-12-06 |
| US4176030A (en) | 1979-11-27 |
| FR2353961B1 (ja) | 1983-10-21 |
| US4205248A (en) | 1980-05-27 |
| GB1560846A (en) | 1980-02-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |