CH616484A5 - Component of turboengines. - Google Patents

Component of turboengines. Download PDF

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Publication number
CH616484A5
CH616484A5 CH206777A CH206777A CH616484A5 CH 616484 A5 CH616484 A5 CH 616484A5 CH 206777 A CH206777 A CH 206777A CH 206777 A CH206777 A CH 206777A CH 616484 A5 CH616484 A5 CH 616484A5
Authority
CH
Switzerland
Prior art keywords
layer
base material
blades
coating
exposed
Prior art date
Application number
CH206777A
Other languages
German (de)
Inventor
Klemens Werner
Original Assignee
Mtu Muenchen Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mtu Muenchen Gmbh filed Critical Mtu Muenchen Gmbh
Publication of CH616484A5 publication Critical patent/CH616484A5/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635Carbides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/081Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01DNON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12Blades
    • F01D5/28Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288Protective coatings for blades

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Control Of Turbines (AREA)

Description

616484 616484

Claims (4)

PATENTANSPRÜCHEPATENT CLAIMS 1. Dem Einfluss aggressiver Medien ausgesetztes Bauteil von Triebwerken, das aus einem inneren Grundmaterial und einer das Grundmaterial umhüllenden Werkstoffschicht besteht, dadurch gekennzeichnet, dass die Werkstoffschicht (lb) im Sputteringverfahren auf das Grundmaterial (la) aufgebracht worden ist.1. The influence of aggressive media exposed component of engines, which consists of an inner base material and the base material enveloping layer of material, characterized in that the material layer (lb) in the sputtering process on the base material (la) has been applied. 2. Bauteil nach Anspruch 1, dadurch gekennzeichnet, dass die Werkstoffschicht aus einem Oxid oder Karbid besteht.2. Component according to claim 1, characterized in that the material layer consists of an oxide or carbide. 3. Bauteil nach Anspruch 2, dadurch gekennzeichnet, dass das Oxid aus SÌO2 oder AI2O3 oder Im O3 besteht.3. Component according to claim 2, characterized in that the oxide consists of SÌO2 or Al2O3 or ImO3. 4. Bauteil nach Anspruch 2, dadurch gekennzeichnet, dass das Karbid aus Cr2C2 besteht.4. Component according to claim 2, characterized in that the carbide consists of Cr2C2. Die Erfindung betrifft ein dem Einfluss aggressiver Medien ausgesetztes Bauteil von Triebwerken, das aus einem inneren Grundmaterial und einer das Grundmaterial umhüllenden Werkstoffschicht besteht.The invention relates to an engine component which is exposed to the influence of aggressive media and consists of an inner base material and a material layer encasing the base material. Es ist bekannt, die Oberfläche von Bauteilen, die hohen Temperaturen, aggressiven Medien o. dgl. ausgesetzt sind, in geeigneter Weise zu beschichten. Zum Beschichten von Bauteilen von Turbinenstrahltriebwerken, die Temperaturen bis zu 600° ausgesetzt sind, insbesondere der Schaufeln, ist es bekannt, die Beschichtung richtungsbedingt aufzutragen und im Ofen einzubrennen. Dieses Verfahren ist wenig geeignet, wenn eine extreme Oberflächengüte von komplizierten Bauteilen verlangt wird. Bekannt ist auch Plasmaspritzen und Diffusionsbehandlung, die aber das Grundmaterial beeinflussen.It is known to suitably coat the surface of components that are exposed to high temperatures, aggressive media or the like. For coating components of turbine jet engines that are exposed to temperatures of up to 600°, in particular the blades, it is known to apply the coating in a direction-dependent manner and to bake it in the oven. This method is not very suitable when an extreme surface quality is required for complicated components. Plasma spraying and diffusion treatment are also known, but they affect the base material. Aufgabe der Erfindung ist die Schaffung einer Beschichtung für komplizierte Bauteile von Turbinentriebwerken, die eine extreme Oberflächengüte hat.The object of the invention is to create a coating for complicated components of turbine engines which has an extreme surface quality. Die Aufgabe ist dadurch gelöst, dass die Werkstoffschicht im Sputteringverfahren auf das Grundmaterial aufgebracht worden ist.The object is achieved in that the layer of material has been applied to the base material using the sputtering process. Vorzugsweise besteht die Werkstoffschicht aus SÌO2. Es kann aber auch ein anderes Oxid verwendet werden, wie z.B. AI2O3 oder In2 O3. Auch ein Karbid, wie z.B. Cr2 C2 kann Anwendung finden.The material layer preferably consists of SÌO2. However, another oxide can also be used, such as Al2O3 or In2 O3. A carbide such as Cr2 C2 can also be used. Die Vorteile der Erfindung sind zahlreich:The advantages of the invention are numerous: a) Eine extrem glatte Oberfläche mit einem Rauhigkeitsgrad Ra gegen O.a) An extremely smooth surface with a roughness grade Ra to O. b) Eine günstige Relation zwischen Werkstück, insbesondere Schaufeldicke, und Beschichtungsdicke.b) A favorable relation between the workpiece, in particular the blade thickness, and the coating thickness. c) Die Verwendung unterschiedlicher Grundmaterialien ist möglich.c) The use of different base materials is possible. d) Die Haftfestigkeit unter Schwingungsbelastungen ist absolut gewährleistet.d) The adhesive strength under vibration loads is absolutely guaranteed. e) Die Schicht ist widerstandsfähig gegen Korrosion und Erosion.e) The layer is resistant to corrosion and erosion. f) Eine Rissbildung in der Oberfläche des Grundmaterials wird nicht gefördert.f) Cracking in the surface of the base material is not promoted. g) Die Schutzschicht ist dicht und führt nicht dazu, dass korrosive Medien das Grundmaterial angreifen.g) The protective layer is tight and does not cause corrosive media to attack the base material. h) Die Temperaturbeständigkeit ist extrem hoch.h) The temperature resistance is extremely high. i) Die Aufbringung mehrerer Arten von Elementen ist mit dem gleichen Verfahren möglich.i) The application of several types of elements is possible with the same process. j) Die Festigkeit bezüglich schwingungsdämpfender Wirkung bei niedrigen Temperaturen wird erhöht.j) Strength in terms of anti-vibration effect at low temperatures is increased. k) Das Sputteringverfahren ist wirtschaftlich durchzuführen.k) The sputtering process is to be carried out economically. Das Sputteringverfahren basiert auf atomarem bzw. molekularem Abbau eines Materials von einem Formteil der von einer Kathode ausgehenden Energie, wobei die Anode die zu beschichtende Probe darstellt. Durch einen hochfrequenten, von einer Kathode ausgehenden Wechselstrom werden die Atome von dem Formteil (Target) ausgelöst und bewegen sich mit hoher Geschwindigkeit auf die Probe, auf welcher sich somit eine Schicht aufbaut (indirekte Methode).The sputtering process is based on the atomic or molecular breakdown of a material from a molded part by the energy emanating from a cathode, with the anode being the sample to be coated. The atoms are released from the molded part (target) by a high-frequency alternating current emanating from a cathode and move at high speed onto the sample, on which a layer is built up (indirect method). Nachfolgend wird anhand der Zeichnung ein Ausführungsbeispiel der Erfindung näher dargestellt. Dabei zeigtAn exemplary embodiment of the invention is illustrated in more detail below with reference to the drawing. while showing Fig. 1 einen Schnitt durch eine Beschichtungskammer mit darin eingehängten Schaufeln und1 shows a section through a coating chamber with blades suspended therein and Fig. 2 einen Schnitt durch eine beschichtete Schaufel.2 shows a section through a coated blade. Im Vakuum sind mehrere Kränze von Verdichterstatoroder Laufschaufeln 1 des Hochdrackverdichters eines Turbinentriebwerks, deren Oberfläche erfindungsgemäss zu beschichten ist, in geeigneter Weise eingehängt. Das abzubauende und an den Schaufeln 1 anzulagernde Material ist als Formteil 2 in der Mitte eines das Vakuum umschliessenden Behälters 3 gelagert. Zwischen dem Formteil 2 und den Schaufeln 1 ist ein Anodengitter 4 angeordnet. Durch hochfrequenten Wechselstrom wird ein Energiestrom von der Kathode zum Formteil 2 ausgelöst, durch den Atome von dem Formteil ausgelöst und als Schicht auf den Triebwerkschaufeln aufgebracht werden (Fig. 1).Several rings of compressor stator or moving blades 1 of the high-pressure compressor of a turbine engine, the surface of which is to be coated according to the invention, are suspended in a suitable manner in the vacuum. The material to be broken down and deposited on the blades 1 is stored as a molded part 2 in the middle of a container 3 enclosing the vacuum. An anode grid 4 is arranged between the molded part 2 and the blades 1 . High frequency alternating current induces a flow of energy from the cathode to the molding 2, causing atoms to be detached from the molding and deposited as a layer on the engine blades (Figure 1). Eine in dieser Weise beschichtete Schaufel ist in Fig. 2 dargestellt. Der Grandkörper la ist von einer extrem glatten dichten Schicht lb aus SÌO2 allseits umschlossen. Die Schicht ist extrem dünn und so bemessen, dass sie weder von den Schwingungen, denen die Schaufeln im Betrieb ausgesetzt sind, abgelöst wird noch durch ihre Beschaffenheit den Wirkungsgrad des Triebwerks beeinträchtigt, sondern diesen vielmehr durch die unveränderte Geschlossenheit der Beschichtung unabhängig von der Einsatzdauer begünstigt.A blade coated in this manner is shown in FIG. The grand body la is surrounded on all sides by an extremely smooth, dense layer lb of SÌO2. The layer is extremely thin and dimensioned in such a way that it is neither detached by the vibrations to which the blades are exposed during operation nor does its nature impair the efficiency of the engine, but rather promotes it through the unchanged closedness of the coating regardless of the period of use . 22 55 1" 1515 2020 2525 3030 3535 4040 4545 BB 1 Blatt Zeichnungen1 sheet of drawings
CH206777A 1976-02-21 1977-02-18 Component of turboengines. CH616484A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2607172 1976-02-21

Publications (1)

Publication Number Publication Date
CH616484A5 true CH616484A5 (en) 1980-03-31

Family

ID=5970582

Family Applications (1)

Application Number Title Priority Date Filing Date
CH206777A CH616484A5 (en) 1976-02-21 1977-02-18 Component of turboengines.

Country Status (7)

Country Link
JP (1) JPS52119703A (en)
BE (1) BE851479A (en)
CH (1) CH616484A5 (en)
FR (1) FR2341740A1 (en)
IT (1) IT1081709B (en)
NO (1) NO770540L (en)
SE (1) SE7701530L (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3762888D1 (en) * 1986-09-25 1990-06-28 Union Carbide Corp SUBSTRATE WITH ZIRCONNITRIDE COATING AND METHOD FOR PRODUCING THIS COATING.
CN102062121B (en) * 2010-09-16 2013-03-27 格兰富水泵(苏州)有限公司 Axial flow impeller

Also Published As

Publication number Publication date
FR2341740B3 (en) 1979-10-19
JPS52119703A (en) 1977-10-07
SE7701530L (en) 1977-08-22
IT1081709B (en) 1985-05-21
FR2341740A1 (en) 1977-09-16
NO770540L (en) 1977-08-23
BE851479A (en) 1977-06-16

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