CH613771A5 - Method and arrangement for the photographic or photolithographic production of divided circles - Google Patents

Method and arrangement for the photographic or photolithographic production of divided circles

Info

Publication number
CH613771A5
CH613771A5 CH350477A CH350477A CH613771A5 CH 613771 A5 CH613771 A5 CH 613771A5 CH 350477 A CH350477 A CH 350477A CH 350477 A CH350477 A CH 350477A CH 613771 A5 CH613771 A5 CH 613771A5
Authority
CH
Switzerland
Prior art keywords
photographic
arrangement
photolithographic production
divided circles
circles
Prior art date
Application number
CH350477A
Other languages
English (en)
Inventor
Hermann Dipl Chem Leipold
Kurt Veit
Heinz Schroeder
Original Assignee
Zeiss Carl Veb Jena
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Veb Jena filed Critical Zeiss Carl Veb Jena
Publication of CH613771A5 publication Critical patent/CH613771A5/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/201—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CH350477A 1976-03-22 1977-03-21 Method and arrangement for the photographic or photolithographic production of divided circles CH613771A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD19195076A DD125687A1 (fr) 1976-03-22 1976-03-22

Publications (1)

Publication Number Publication Date
CH613771A5 true CH613771A5 (en) 1979-10-15

Family

ID=5503982

Family Applications (1)

Application Number Title Priority Date Filing Date
CH350477A CH613771A5 (en) 1976-03-22 1977-03-21 Method and arrangement for the photographic or photolithographic production of divided circles

Country Status (3)

Country Link
CH (1) CH613771A5 (fr)
DD (1) DD125687A1 (fr)
DE (1) DE2703857A1 (fr)

Also Published As

Publication number Publication date
DE2703857A1 (de) 1977-10-06
DD125687A1 (fr) 1977-05-11

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Legal Events

Date Code Title Description
PL Patent ceased