CH607330A5 - - Google Patents

Info

Publication number
CH607330A5
CH607330A5 CH1638275A CH1638275A CH607330A5 CH 607330 A5 CH607330 A5 CH 607330A5 CH 1638275 A CH1638275 A CH 1638275A CH 1638275 A CH1638275 A CH 1638275A CH 607330 A5 CH607330 A5 CH 607330A5
Authority
CH
Switzerland
Application number
CH1638275A
Inventor
Larry Ford Templeton
Roger Browning Gault
Original Assignee
Accelerators Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Accelerators Inc filed Critical Accelerators Inc
Publication of CH607330A5 publication Critical patent/CH607330A5/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1638275A 1975-02-11 1975-12-17 CH607330A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/549,082 US3951695A (en) 1975-02-11 1975-02-11 Automatic end station for ion implantation system

Publications (1)

Publication Number Publication Date
CH607330A5 true CH607330A5 (fr) 1978-12-15

Family

ID=24191584

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1638275A CH607330A5 (fr) 1975-02-11 1975-12-17

Country Status (5)

Country Link
US (1) US3951695A (fr)
JP (1) JPS5838932B2 (fr)
CH (1) CH607330A5 (fr)
DE (1) DE2556456A1 (fr)
GB (1) GB1514290A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140961A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd ウエ−ハ搬送装置
US4672210A (en) * 1985-09-03 1987-06-09 Eaton Corporation Ion implanter target chamber
JPH044518A (ja) * 1990-04-20 1992-01-09 Yazaki Corp 誘導防止テープ電線
CN116631916B (zh) * 2023-07-14 2024-01-12 深圳快捷芯半导体有限公司 一种半导体硅片局部掺杂装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2860251A (en) * 1953-10-15 1958-11-11 Rauland Corp Apparatus for manufacturing semi-conductor devices
NL276412A (fr) * 1961-03-30
US3684904A (en) * 1969-04-24 1972-08-15 Gennady Vasilievich Galutva Device for precision displacement of a solid body
US3887811A (en) * 1971-10-08 1975-06-03 Radiant Energy Systems Electro mechanical alignment apparatus for electron image projection systems

Also Published As

Publication number Publication date
JPS5194773A (fr) 1976-08-19
DE2556456A1 (de) 1976-08-19
JPS5838932B2 (ja) 1983-08-26
DE2556456C2 (fr) 1987-04-09
US3951695A (en) 1976-04-20
GB1514290A (en) 1978-06-14

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Legal Events

Date Code Title Description
PL Patent ceased