CH593478A5 - - Google Patents

Info

Publication number
CH593478A5
CH593478A5 CH62576A CH62576A CH593478A5 CH 593478 A5 CH593478 A5 CH 593478A5 CH 62576 A CH62576 A CH 62576A CH 62576 A CH62576 A CH 62576A CH 593478 A5 CH593478 A5 CH 593478A5
Authority
CH
Switzerland
Application number
CH62576A
Original Assignee
Prolizenz Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prolizenz Ag filed Critical Prolizenz Ag
Priority to CH62576A priority Critical patent/CH593478A5/xx
Priority to DE19762606024 priority patent/DE2606024A1/de
Priority to NL7700025A priority patent/NL7700025A/xx
Priority to JP480577A priority patent/JPS5290266A/ja
Priority to FR7701596A priority patent/FR2339167A1/fr
Publication of CH593478A5 publication Critical patent/CH593478A5/xx
Priority to US05/887,516 priority patent/US4194127A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CH62576A 1976-01-20 1976-01-20 CH593478A5 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH62576A CH593478A5 (de) 1976-01-20 1976-01-20
DE19762606024 DE2606024A1 (de) 1976-01-20 1976-02-14 Verfahren und vorrichtung zum pruefen von substratplaettchen
NL7700025A NL7700025A (nl) 1976-01-20 1977-01-04 Werkwijze voor het controleren van substraat- plaatjes en inrichting voor het toepassen van deze werkwijze.
JP480577A JPS5290266A (en) 1976-01-20 1977-01-19 Method and apparatus for testing substrate wafers
FR7701596A FR2339167A1 (fr) 1976-01-20 1977-01-20 Procede et dispositif pour tester de petites plaques utilisees comme substrat
US05/887,516 US4194127A (en) 1976-01-20 1978-03-17 Process and device for checking substrate wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH62576A CH593478A5 (de) 1976-01-20 1976-01-20

Publications (1)

Publication Number Publication Date
CH593478A5 true CH593478A5 (de) 1977-11-30

Family

ID=4191366

Family Applications (1)

Application Number Title Priority Date Filing Date
CH62576A CH593478A5 (de) 1976-01-20 1976-01-20

Country Status (5)

Country Link
JP (1) JPS5290266A (de)
CH (1) CH593478A5 (de)
DE (1) DE2606024A1 (de)
FR (1) FR2339167A1 (de)
NL (1) NL7700025A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0439669A2 (de) * 1990-02-01 1991-08-07 Identigrade Verfahren zur Erkennung von Münzen

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4456374A (en) * 1981-12-11 1984-06-26 Johnson & Johnson Detecting the presence or absence of a coating on a substrate
DE3422143A1 (de) * 1984-06-14 1985-12-19 Josef Prof. Dr. Bille Geraet zur wafer-inspektion

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1498814A1 (de) * 1963-09-16 1969-04-30 Halbleiterwerk Frankfurt Oder Verfahren zur Bestimmung der Guete der Struktur von Einkristallen durch lichtoptische Registrierung
US3558814A (en) * 1968-03-08 1971-01-26 Zeiss Stiftung Method and apparatus for plotting a specific area of an object under an observation instrument

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0439669A2 (de) * 1990-02-01 1991-08-07 Identigrade Verfahren zur Erkennung von Münzen
EP0439669A3 (en) * 1990-02-01 1992-12-23 Identigrade Systems and methods for grading and identifying coins

Also Published As

Publication number Publication date
JPS5290266A (en) 1977-07-29
DE2606024A1 (de) 1977-07-21
NL7700025A (nl) 1977-07-22
FR2339167A1 (fr) 1977-08-19

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Legal Events

Date Code Title Description
PL Patent ceased