CH588086A5 - - Google Patents
Info
- Publication number
- CH588086A5 CH588086A5 CH149276A CH149276A CH588086A5 CH 588086 A5 CH588086 A5 CH 588086A5 CH 149276 A CH149276 A CH 149276A CH 149276 A CH149276 A CH 149276A CH 588086 A5 CH588086 A5 CH 588086A5
- Authority
- CH
- Switzerland
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24455—Transmitted particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
- H01J2237/24465—Sectored detectors, e.g. quadrants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24571—Measurements of non-electric or non-magnetic variables
- H01J2237/24578—Spatial variables, e.g. position, distance
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7503798A FR2300414A2 (en) | 1975-02-07 | 1975-02-07 | DEVICE FOR MONITORING THE P |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH588086A5 true CH588086A5 (en) | 1977-05-31 |
Family
ID=9150889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH149276A CH588086A5 (en) | 1975-02-07 | 1976-02-06 |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5823704B2 (en) |
| CA (1) | CA1067624A (en) |
| CH (1) | CH588086A5 (en) |
| DE (1) | DE2604672C2 (en) |
| FR (1) | FR2300414A2 (en) |
| GB (1) | GB1558601A (en) |
| NL (1) | NL7601175A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7804037A (en) * | 1978-04-17 | 1979-10-19 | Philips Nv | ELECTRONIC MICROSKOP WITH UNDIFFERENTIATED PHASE IMAGE. |
| US4347547A (en) * | 1980-05-22 | 1982-08-31 | Siemens Medical Laboratories, Inc. | Energy interlock system for a linear accelerator |
| GB8415709D0 (en) * | 1984-06-20 | 1984-07-25 | Dubilier Scient Ltd | Scanning microscope |
| JPH0610001U (en) * | 1992-07-14 | 1994-02-08 | 正雄 宮前 | Trolley |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2133318A5 (en) * | 1971-04-16 | 1972-11-24 | Thomson Csf | |
| FR2215701B1 (en) * | 1973-01-26 | 1978-10-27 | Cgr Mev |
-
1975
- 1975-02-07 FR FR7503798A patent/FR2300414A2/en active Granted
-
1976
- 1976-02-04 GB GB445776A patent/GB1558601A/en not_active Expired
- 1976-02-05 NL NL7601175A patent/NL7601175A/en not_active Application Discontinuation
- 1976-02-06 CH CH149276A patent/CH588086A5/xx not_active IP Right Cessation
- 1976-02-06 CA CA245,763A patent/CA1067624A/en not_active Expired
- 1976-02-06 DE DE19762604672 patent/DE2604672C2/en not_active Expired
- 1976-02-07 JP JP1186076A patent/JPS5823704B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA1067624A (en) | 1979-12-04 |
| JPS51102800A (en) | 1976-09-10 |
| DE2604672C2 (en) | 1984-09-27 |
| JPS5823704B2 (en) | 1983-05-17 |
| GB1558601A (en) | 1980-01-09 |
| FR2300414B2 (en) | 1978-12-01 |
| DE2604672A1 (en) | 1976-08-19 |
| NL7601175A (en) | 1976-08-10 |
| FR2300414A2 (en) | 1976-09-03 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |