CH566843A5 - - Google Patents
Info
- Publication number
- CH566843A5 CH566843A5 CH1797473A CH1797473A CH566843A5 CH 566843 A5 CH566843 A5 CH 566843A5 CH 1797473 A CH1797473 A CH 1797473A CH 1797473 A CH1797473 A CH 1797473A CH 566843 A5 CH566843 A5 CH 566843A5
- Authority
- CH
- Switzerland
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00319563A US3850105A (en) | 1972-12-29 | 1972-12-29 | Apparatus for transferring articles through various processing sectors of a manufacturing system |
| US329920A US3889355A (en) | 1973-02-05 | 1973-02-05 | Continuous processing system |
| US00329494A US3845286A (en) | 1973-02-05 | 1973-02-05 | Manufacturing control system for processing workpieces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH566843A5 true CH566843A5 (US08063081-20111122-C00115.png) | 1975-09-30 |
Family
ID=27406059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1797473A CH566843A5 (US08063081-20111122-C00115.png) | 1972-12-29 | 1973-12-20 |
Country Status (6)
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4571685A (en) * | 1982-06-23 | 1986-02-18 | Nec Corporation | Production system for manufacturing semiconductor devices |
| JPS60184678A (ja) * | 1984-03-02 | 1985-09-20 | Canon Inc | 真空処理装置 |
| EP0162703A3 (en) * | 1984-05-23 | 1987-02-04 | Machine Technology Inc. | Modular processing apparatus and modules for use therewith |
| JPS6126229A (ja) * | 1984-07-16 | 1986-02-05 | Oki Electric Ind Co Ltd | 半導体装置の製造装置 |
| GB2191310A (en) * | 1986-05-29 | 1987-12-09 | Ford Motor Co | Conveying system |
| JP2598305B2 (ja) * | 1988-06-06 | 1997-04-09 | 日東電工株式会社 | 半導体ウエハの処理システム |
| DE19821389B4 (de) * | 1998-02-12 | 2010-02-18 | Claas Fertigungstechnik Gmbh | Verfahren und Vorrichtung zum Handling von Werkstücken |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL297192A (US08063081-20111122-C00115.png) * | 1962-07-20 | |||
| AT288112B (de) * | 1966-05-12 | 1971-02-25 | Molins Machine Co Ltd | Werkzeugmaschinenanlage mit einem zentralen Steuergerät |
| US3543392A (en) * | 1967-12-15 | 1970-12-01 | Cincinnati Milacron Inc | Machine tools having conveyor means extending therebetween and carrying pallet means which are selectively connectable to the machine tools |
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1973
- 1973-11-28 FR FR7343094A patent/FR2212965A5/fr not_active Expired
- 1973-12-07 GB GB5680673A patent/GB1451668A/en not_active Expired
- 1973-12-20 CH CH1797473A patent/CH566843A5/xx not_active IP Right Cessation
- 1973-12-27 DE DE19732364790 patent/DE2364790C2/de not_active Expired
- 1973-12-28 NL NL7317755A patent/NL184986C/xx not_active IP Right Cessation
- 1973-12-28 ES ES421844A patent/ES421844A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1451668A (en) | 1976-10-06 |
| DE2364790C2 (de) | 1985-11-28 |
| DE2364790A1 (de) | 1974-07-04 |
| AU6308273A (en) | 1975-06-05 |
| NL7317755A (US08063081-20111122-C00115.png) | 1974-07-02 |
| NL184986B (nl) | 1989-07-17 |
| FR2212965A5 (US08063081-20111122-C00115.png) | 1974-07-26 |
| NL184986C (nl) | 1989-12-18 |
| ES421844A1 (es) | 1976-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |