CH566399A5 - - Google Patents

Info

Publication number
CH566399A5
CH566399A5 CH760273A CH760273A CH566399A5 CH 566399 A5 CH566399 A5 CH 566399A5 CH 760273 A CH760273 A CH 760273A CH 760273 A CH760273 A CH 760273A CH 566399 A5 CH566399 A5 CH 566399A5
Authority
CH
Switzerland
Application number
CH760273A
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH760273A priority Critical patent/CH566399A5/xx
Priority to NL7309573.A priority patent/NL156860B/xx
Priority to GB1835274A priority patent/GB1420545A/en
Priority to DE2420656A priority patent/DE2420656C3/de
Priority to DE19747414979U priority patent/DE7414979U/de
Priority to US05/471,134 priority patent/US3949187A/en
Priority to FR7417413A priority patent/FR2230755B1/fr
Publication of CH566399A5 publication Critical patent/CH566399A5/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24405—Faraday cages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
CH760273A 1973-05-26 1973-05-26 CH566399A5 (sv)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CH760273A CH566399A5 (sv) 1973-05-26 1973-05-26
NL7309573.A NL156860B (nl) 1973-05-26 1973-07-09 Inrichting voor het verdampen met behulp van een elektronenstraal.
GB1835274A GB1420545A (en) 1973-05-26 1974-04-26 Evaporation by electron beans
DE2420656A DE2420656C3 (de) 1973-05-26 1974-04-29 Vorrichtung zur Elektronenstrahlverdampfung
DE19747414979U DE7414979U (de) 1973-05-26 1974-04-29 Anordnung zur elektronenstrahlverdampfung
US05/471,134 US3949187A (en) 1973-05-26 1974-05-17 Electron-beam evaporation apparatus
FR7417413A FR2230755B1 (sv) 1973-05-26 1974-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH760273A CH566399A5 (sv) 1973-05-26 1973-05-26

Publications (1)

Publication Number Publication Date
CH566399A5 true CH566399A5 (sv) 1975-09-15

Family

ID=4327704

Family Applications (1)

Application Number Title Priority Date Filing Date
CH760273A CH566399A5 (sv) 1973-05-26 1973-05-26

Country Status (6)

Country Link
US (1) US3949187A (sv)
CH (1) CH566399A5 (sv)
DE (2) DE7414979U (sv)
FR (1) FR2230755B1 (sv)
GB (1) GB1420545A (sv)
NL (1) NL156860B (sv)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634061B1 (fr) * 1988-07-06 1991-04-05 Commissariat Energie Atomique Evaporateur a bombardement electronique muni de moyens de recuperation des electrons retrodiffuses
DE4430534A1 (de) * 1994-08-27 1996-04-11 Hell Ag Linotype Elektronenstrahl-Erzeuger
CN1119829C (zh) * 1996-09-17 2003-08-27 浜松光子学株式会社 光电阴极及装备有它的电子管
DE19745771B4 (de) * 1997-10-16 2005-12-22 Unaxis Deutschland Holding Gmbh Verfahren für den Betrieb eines Hochleistungs-Elektronenstrahls
SE0400582D0 (sv) * 2004-03-05 2004-03-05 Forskarpatent I Uppsala Ab Method for in-line process control of the CIGS process
DE102009013310B4 (de) 2009-03-18 2013-10-10 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Vakuumbedampfung unter Kontrolle der Beschichtungsrate und Messeinrichtung dafür

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3390249A (en) * 1965-09-20 1968-06-25 Air Reduction Vaporization monitoring apparatus
DE1915933B2 (de) * 1969-03-28 1975-10-16 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur Steuerung oder Regelung der Aufdampfrate beim Aufdampfen von Metallen im Vakuum
US3690635A (en) * 1969-05-16 1972-09-12 Air Reduction Condensate collection means
US3756193A (en) * 1972-05-01 1973-09-04 Battelle Memorial Institute Coating apparatus

Also Published As

Publication number Publication date
GB1420545A (en) 1976-01-07
NL156860B (nl) 1978-05-16
DE2420656C3 (de) 1979-04-12
DE2420656A1 (de) 1974-12-12
DE2420656B2 (de) 1978-08-03
FR2230755B1 (sv) 1978-12-29
NL7309573A (sv) 1974-11-28
US3949187A (en) 1976-04-06
FR2230755A1 (sv) 1974-12-20
DE7414979U (de) 1979-04-19

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Legal Events

Date Code Title Description
PL Patent ceased