CH565454A5 - - Google Patents

Info

Publication number
CH565454A5
CH565454A5 CH1750273A CH1750273A CH565454A5 CH 565454 A5 CH565454 A5 CH 565454A5 CH 1750273 A CH1750273 A CH 1750273A CH 1750273 A CH1750273 A CH 1750273A CH 565454 A5 CH565454 A5 CH 565454A5
Authority
CH
Switzerland
Application number
CH1750273A
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of CH565454A5 publication Critical patent/CH565454A5/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/611—Combinations of BJTs and one or more of diodes, resistors or capacitors
    • H10D84/613—Combinations of vertical BJTs and one or more of diodes, resistors or capacitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/02—Contacts, special
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/037—Diffusion-deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/053—Field effect transistors fets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/136—Resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Power Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CH1750273A 1972-12-29 1973-12-13 CH565454A5 (OSRAM)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31958672A 1972-12-29 1972-12-29
US477871A US3922707A (en) 1972-12-29 1974-06-10 DC testing of integrated circuits and a novel integrated circuit structure to facilitate such testing

Publications (1)

Publication Number Publication Date
CH565454A5 true CH565454A5 (OSRAM) 1975-08-15

Family

ID=26982071

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1750273A CH565454A5 (OSRAM) 1972-12-29 1973-12-13

Country Status (5)

Country Link
US (1) US3922707A (OSRAM)
CA (1) CA997481A (OSRAM)
CH (1) CH565454A5 (OSRAM)
FR (1) FR2212650B1 (OSRAM)
GB (1) GB1454415A (OSRAM)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1563193A (en) * 1975-08-02 1980-03-19 Ferranti Ltd Semiconductor devices
US4161742A (en) * 1975-08-02 1979-07-17 Ferranti Limited Semiconductor devices with matched resistor portions
US4032962A (en) * 1975-12-29 1977-06-28 Ibm Corporation High density semiconductor integrated circuit layout
US4057894A (en) * 1976-02-09 1977-11-15 Rca Corporation Controllably valued resistor
US4228450A (en) * 1977-10-25 1980-10-14 International Business Machines Corporation Buried high sheet resistance structure for high density integrated circuits with reach through contacts
JPS5553462A (en) * 1978-10-13 1980-04-18 Int Rectifier Corp Mosfet element
US4219797A (en) * 1979-03-19 1980-08-26 National Semiconductor Corporation Integrated circuit resistance ladder having curvilinear connecting segments
FR2473789A1 (fr) * 1980-01-09 1981-07-17 Ibm France Procedes et structures de test pour circuits integres a semi-conducteurs permettant la determination electrique de certaines tolerances lors des etapes photolithographiques.
US4272882A (en) * 1980-05-08 1981-06-16 Rca Corporation Method of laying out an integrated circuit with specific alignment of the collector contact with the emitter region
JPS57100755A (en) * 1980-12-15 1982-06-23 Fujitsu Ltd Semiconductor device
EP0128986B1 (en) * 1982-12-23 1991-02-27 Sumitomo Electric Industries Limited Monolithic microwave integrated circuit and method for selecting it
US4547724A (en) * 1983-02-07 1985-10-15 Tektronix, Inc. Method and apparatus for detection of non-linear electrical devices
US4902916A (en) * 1988-11-14 1990-02-20 International Business Machines Corporation Identification of defects in emitter-coupled logic circuits
US5101152A (en) * 1990-01-31 1992-03-31 Hewlett-Packard Company Integrated circuit transfer test device system utilizing lateral transistors
US5095267A (en) * 1990-03-19 1992-03-10 National Semiconductor Corporation Method of screening A.C. performance characteristics during D.C. parametric test operation
US5039602A (en) * 1990-03-19 1991-08-13 National Semiconductor Corporation Method of screening A.C. performance characteristics during D.C. parametric test operation
US5196802A (en) * 1990-04-23 1993-03-23 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for characterizing the quality of electrically thin semiconductor films
US5072175A (en) * 1990-09-10 1991-12-10 Compaq Computer Corporation Integrated circuit having improved continuity testability and a system incorporating the same
US6750527B1 (en) * 1996-05-30 2004-06-15 Kabushiki Kaisha Toshiba Semiconductor integrated circuit device having a plurality of wells, test method of testing the semiconductor integrated circuit device, and test device which executes the test method
JP4739467B2 (ja) * 1997-04-03 2011-08-03 ローム株式会社 光電気変換ｉｃ
JP3244057B2 (ja) * 1998-07-16 2002-01-07 日本電気株式会社 基準電圧源回路
KR100575619B1 (ko) * 2003-10-08 2006-05-03 매그나칩 반도체 유한회사 테스트 패턴
US8258806B2 (en) 2007-12-24 2012-09-04 Texas Instruments Incorporated Self-isolating mixed design-rule integrated yield monitor
US9252202B2 (en) * 2011-08-23 2016-02-02 Wafertech, Llc Test structure and method for determining overlay accuracy in semiconductor devices using resistance measurement
CN119380798B (zh) * 2024-12-27 2025-04-29 碳芯微电子科技(深圳)有限公司 测试装置、测试系统及测试方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL282779A (OSRAM) * 1961-09-08
US3363154A (en) * 1965-06-28 1968-01-09 Teledyne Inc Integrated circuit having active and passive components in same semiconductor region
US3644802A (en) * 1968-05-31 1972-02-22 Rca Corp Ratio-compensated resistors for integrated circuit
US3558992A (en) * 1968-06-17 1971-01-26 Rca Corp Integrated circuit having bonding pads over unused active area components
CH484521A (de) * 1968-07-06 1970-01-15 Foerderung Forschung Gmbh Elektronische Schaltungsanordnung mit mindestens einem integrierten Schaltkreis
JPS492796B1 (OSRAM) * 1969-02-28 1974-01-22
US3629667A (en) * 1969-03-14 1971-12-21 Ibm Semiconductor resistor with uniforms current distribution at its contact surface
NL161923C (nl) * 1969-04-18 1980-03-17 Philips Nv Halfgeleiderinrichting.
US3689803A (en) * 1971-03-30 1972-09-05 Ibm Integrated circuit structure having a unique surface metallization layout
US3676713A (en) * 1971-04-23 1972-07-11 Ibm Saturation control scheme for ttl circuit
US3751680A (en) * 1972-03-02 1973-08-07 Signetics Corp Double-clamped schottky transistor logic gate circuit

Also Published As

Publication number Publication date
DE2364787A1 (de) 1974-07-11
GB1454415A (en) 1976-11-03
US3922707A (en) 1975-11-25
FR2212650B1 (OSRAM) 1977-09-30
FR2212650A1 (OSRAM) 1974-07-26
CA997481A (en) 1976-09-21
DE2364787B2 (de) 1977-03-17

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Legal Events

Date Code Title Description
PL Patent ceased
PL Patent ceased