CH547549A - Anordnung zur erzeugung von ionen. - Google Patents

Anordnung zur erzeugung von ionen.

Info

Publication number
CH547549A
CH547549A CH547549DA CH547549A CH 547549 A CH547549 A CH 547549A CH 547549D A CH547549D A CH 547549DA CH 547549 A CH547549 A CH 547549A
Authority
CH
Switzerland
Prior art keywords
arrangement
generating ions
ions
generating
Prior art date
Application number
Other languages
German (de)
English (en)
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Publication of CH547549A publication Critical patent/CH547549A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
CH547549D 1972-01-24 1972-01-24 Anordnung zur erzeugung von ionen. CH547549A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH102772 1972-01-24

Publications (1)

Publication Number Publication Date
CH547549A true CH547549A (de) 1974-03-29

Family

ID=4200740

Family Applications (1)

Application Number Title Priority Date Filing Date
CH547549D CH547549A (de) 1972-01-24 1972-01-24 Anordnung zur erzeugung von ionen.

Country Status (4)

Country Link
CH (1) CH547549A (enrdf_load_html_response)
DE (1) DE2263478A1 (enrdf_load_html_response)
FR (1) FR2169071B3 (enrdf_load_html_response)
NL (1) NL7203301A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE505807T1 (de) * 2005-02-10 2011-04-15 Thailand Res Fund Ionenquelle mit hoher stromdichte

Also Published As

Publication number Publication date
DE2263478A1 (de) 1973-08-02
FR2169071A1 (enrdf_load_html_response) 1973-09-07
NL7203301A (enrdf_load_html_response) 1973-07-26
FR2169071B3 (enrdf_load_html_response) 1976-01-16

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Legal Events

Date Code Title Description
PL Patent ceased