CH532963A - Beschichtungsvorrichtung - Google Patents

Beschichtungsvorrichtung

Info

Publication number
CH532963A
CH532963A CH1667370A CH1667370A CH532963A CH 532963 A CH532963 A CH 532963A CH 1667370 A CH1667370 A CH 1667370A CH 1667370 A CH1667370 A CH 1667370A CH 532963 A CH532963 A CH 532963A
Authority
CH
Switzerland
Prior art keywords
coating device
coating
Prior art date
Application number
CH1667370A
Other languages
English (en)
Inventor
Richard Skinner James
Nmn Jr Lang Albert
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH532963A publication Critical patent/CH532963A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1667370A 1969-11-12 1970-11-11 Beschichtungsvorrichtung CH532963A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87565769A 1969-11-12 1969-11-12

Publications (1)

Publication Number Publication Date
CH532963A true CH532963A (de) 1973-01-31

Family

ID=25366150

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1667370A CH532963A (de) 1969-11-12 1970-11-11 Beschichtungsvorrichtung

Country Status (5)

Country Link
JP (1) JPS4912838B1 (de)
CH (1) CH532963A (de)
DE (1) DE2054161A1 (de)
FR (1) FR2067256B1 (de)
GB (1) GB1326570A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH664303A5 (de) * 1985-04-03 1988-02-29 Balzers Hochvakuum Haltevorrichtung fuer targets fuer kathodenzerstaeubung.

Also Published As

Publication number Publication date
JPS4912838B1 (de) 1974-03-27
GB1326570A (en) 1973-08-15
FR2067256B1 (de) 1973-02-02
FR2067256A1 (de) 1971-08-20
DE2054161A1 (de) 1971-05-19

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Legal Events

Date Code Title Description
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