CH523972A - Verfahren und Vorrichtung zum Polieren von Silicium-Oberflächen - Google Patents

Verfahren und Vorrichtung zum Polieren von Silicium-Oberflächen

Info

Publication number
CH523972A
CH523972A CH271170A CH271170A CH523972A CH 523972 A CH523972 A CH 523972A CH 271170 A CH271170 A CH 271170A CH 271170 A CH271170 A CH 271170A CH 523972 A CH523972 A CH 523972A
Authority
CH
Switzerland
Prior art keywords
silicon surfaces
polishing silicon
polishing
silicon
Prior art date
Application number
CH271170A
Other languages
English (en)
Inventor
Regh Joseph
Avonne Silvey Gene
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of CH523972A publication Critical patent/CH523972A/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/12—Preparing bulk and homogeneous wafers
    • H10P90/129—Preparing bulk and homogeneous wafers by polishing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means
    • C23F3/04—Heavy metals
    • C23F3/06—Heavy metals with acidic solutions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • ing And Chemical Polishing (AREA)
CH271170A 1969-02-28 1970-02-25 Verfahren und Vorrichtung zum Polieren von Silicium-Oberflächen CH523972A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80473969A 1969-02-28 1969-02-28

Publications (1)

Publication Number Publication Date
CH523972A true CH523972A (de) 1972-06-15

Family

ID=25189706

Family Applications (1)

Application Number Title Priority Date Filing Date
CH271170A CH523972A (de) 1969-02-28 1970-02-25 Verfahren und Vorrichtung zum Polieren von Silicium-Oberflächen

Country Status (6)

Country Link
US (1) US3615955A (de)
JP (1) JPS4824664B1 (de)
CH (1) CH523972A (de)
DE (1) DE2007865C2 (de)
FR (1) FR2031154A5 (de)
GB (1) GB1244463A (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3857123A (en) * 1970-10-21 1974-12-31 Monsanto Co Apparatus for waxless polishing of thin wafers
US3841031A (en) * 1970-10-21 1974-10-15 Monsanto Co Process for polishing thin elements
US3818649A (en) * 1972-12-18 1974-06-25 H Klievoneit Method for fabricating a discfile
US4010757A (en) * 1974-02-19 1977-03-08 Jula James L Auxiliary tool for removing electrode from holder
US3979239A (en) * 1974-12-30 1976-09-07 Monsanto Company Process for chemical-mechanical polishing of III-V semiconductor materials
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
US4357204A (en) * 1981-06-01 1982-11-02 Honeywell Inc. Chemically machined spectral grating
US4435247A (en) 1983-03-10 1984-03-06 International Business Machines Corporation Method for polishing titanium carbide
US4910155A (en) 1988-10-28 1990-03-20 International Business Machines Corporation Wafer flood polishing
US5104828A (en) * 1990-03-01 1992-04-14 Intel Corporation Method of planarizing a dielectric formed over a semiconductor substrate
US5527423A (en) * 1994-10-06 1996-06-18 Cabot Corporation Chemical mechanical polishing slurry for metal layers
JP2616736B2 (ja) * 1995-01-25 1997-06-04 日本電気株式会社 ウエーハ研磨装置
US5617631A (en) * 1995-07-21 1997-04-08 Xerox Corporation Method of making a liquid ink printhead orifice plate
US6056851A (en) * 1996-06-24 2000-05-02 Taiwan Semiconductor Manufacturing Company Slurry supply system for chemical mechanical polishing
US6386960B1 (en) 1996-10-16 2002-05-14 Taiwan Semiconductor Manufacturing Company Chemical-mechanical polishing method and apparatus
US6336845B1 (en) 1997-11-12 2002-01-08 Lam Research Corporation Method and apparatus for polishing semiconductor wafers
US6431959B1 (en) * 1999-12-20 2002-08-13 Lam Research Corporation System and method of defect optimization for chemical mechanical planarization of polysilicon
AU2001253308A1 (en) * 2000-04-11 2001-10-23 Cabot Microelectronics Corporation System for the preferential removal of silicon oxide

Also Published As

Publication number Publication date
US3615955A (en) 1971-10-26
JPS4824664B1 (de) 1973-07-23
GB1244463A (en) 1971-09-02
FR2031154A5 (de) 1970-11-13
DE2007865A1 (de) 1970-09-10
DE2007865C2 (de) 1982-04-22

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Legal Events

Date Code Title Description
PL Patent ceased