CH490515A - Process for producing crystalline deposits in the form of a pattern on an electrically insulating amorphous, poly- or monocrystalline substrate - Google Patents

Process for producing crystalline deposits in the form of a pattern on an electrically insulating amorphous, poly- or monocrystalline substrate

Info

Publication number
CH490515A
CH490515A CH1636267A CH1636267A CH490515A CH 490515 A CH490515 A CH 490515A CH 1636267 A CH1636267 A CH 1636267A CH 1636267 A CH1636267 A CH 1636267A CH 490515 A CH490515 A CH 490515A
Authority
CH
Switzerland
Prior art keywords
poly
pattern
electrically insulating
monocrystalline substrate
producing crystalline
Prior art date
Application number
CH1636267A
Other languages
German (de)
Inventor
Haidinger Walter
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Priority to CH1636267A priority Critical patent/CH490515A/en
Priority to DE19681806578 priority patent/DE1806578A1/en
Priority to GB1250201D priority patent/GB1250201A/en
Priority to FR1592287D priority patent/FR1592287A/fr
Priority to NL6816693A priority patent/NL6816693A/xx
Publication of CH490515A publication Critical patent/CH490515A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
CH1636267A 1967-11-22 1967-11-22 Process for producing crystalline deposits in the form of a pattern on an electrically insulating amorphous, poly- or monocrystalline substrate CH490515A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH1636267A CH490515A (en) 1967-11-22 1967-11-22 Process for producing crystalline deposits in the form of a pattern on an electrically insulating amorphous, poly- or monocrystalline substrate
DE19681806578 DE1806578A1 (en) 1967-11-22 1968-11-02 Process for the production of crystalline deposits in the form of a pattern on an electrically insulating single-crystal substrate
GB1250201D GB1250201A (en) 1967-11-22 1968-11-05
FR1592287D FR1592287A (en) 1967-11-22 1968-11-18
NL6816693A NL6816693A (en) 1967-11-22 1968-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1636267A CH490515A (en) 1967-11-22 1967-11-22 Process for producing crystalline deposits in the form of a pattern on an electrically insulating amorphous, poly- or monocrystalline substrate

Publications (1)

Publication Number Publication Date
CH490515A true CH490515A (en) 1970-05-15

Family

ID=4416688

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1636267A CH490515A (en) 1967-11-22 1967-11-22 Process for producing crystalline deposits in the form of a pattern on an electrically insulating amorphous, poly- or monocrystalline substrate

Country Status (5)

Country Link
CH (1) CH490515A (en)
DE (1) DE1806578A1 (en)
FR (1) FR1592287A (en)
GB (1) GB1250201A (en)
NL (1) NL6816693A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4477308A (en) * 1982-09-30 1984-10-16 At&T Bell Laboratories Heteroepitaxy of multiconstituent material by means of a _template layer
FR2572219B1 (en) * 1984-10-23 1987-05-29 Efcis METHOD FOR MANUFACTURING INTEGRATED CIRCUITS ON AN INSULATING SUBSTRATE
GB2183090B (en) * 1985-10-07 1989-09-13 Canon Kk Method for selective formation of deposited film
JPH0732124B2 (en) * 1986-01-24 1995-04-10 シャープ株式会社 Method for manufacturing semiconductor device
JPH0828357B2 (en) * 1986-04-28 1996-03-21 キヤノン株式会社 Method of forming multilayer structure
US5427630A (en) * 1994-05-09 1995-06-27 International Business Machines Corporation Mask material for low temperature selective growth of silicon or silicon alloys

Also Published As

Publication number Publication date
DE1806578A1 (en) 1969-06-12
GB1250201A (en) 1971-10-20
NL6816693A (en) 1969-05-27
FR1592287A (en) 1970-05-11

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Legal Events

Date Code Title Description
PL Patent ceased