US4103267A
(en)
*
|
1977-06-13 |
1978-07-25 |
Burr-Brown Research Corporation |
Hybrid transformer device
|
US4304641A
(en)
*
|
1980-11-24 |
1981-12-08 |
International Business Machines Corporation |
Rotary electroplating cell with controlled current distribution
|
US4509024A
(en)
*
|
1983-01-26 |
1985-04-02 |
Safetran Systems Corporation |
Impedance bond
|
EP0188095A1
(en)
*
|
1984-12-13 |
1986-07-23 |
East Rock Technology Inc. |
Process for the manufacture of a toroidal ballast choke and machine for use in such process
|
US4696729A
(en)
*
|
1986-02-28 |
1987-09-29 |
International Business Machines |
Electroplating cell
|
FR2656951A1
(en)
*
|
1990-01-05 |
1991-07-12 |
Scherrer Fernand |
TORQUE TYPE TRANSFORMER.
|
DE4027994A1
(en)
*
|
1990-09-04 |
1992-03-05 |
Gw Elektronik Gmbh |
HF MAGNETIC COIL ARRANGEMENT AND METHOD FOR THEIR PRODUCTION
|
US5312532A
(en)
*
|
1993-01-15 |
1994-05-17 |
International Business Machines Corporation |
Multi-compartment eletroplating system
|
US5421987A
(en)
*
|
1993-08-30 |
1995-06-06 |
Tzanavaras; George |
Precision high rate electroplating cell and method
|
US5597469A
(en)
*
|
1995-02-13 |
1997-01-28 |
International Business Machines Corporation |
Process for selective application of solder to circuit packages
|
US5516412A
(en)
*
|
1995-05-16 |
1996-05-14 |
International Business Machines Corporation |
Vertical paddle plating cell
|
US5522975A
(en)
*
|
1995-05-16 |
1996-06-04 |
International Business Machines Corporation |
Electroplating workpiece fixture
|
US6946716B2
(en)
*
|
1995-12-29 |
2005-09-20 |
International Business Machines Corporation |
Electroplated interconnection structures on integrated circuit chips
|
US6709562B1
(en)
|
1995-12-29 |
2004-03-23 |
International Business Machines Corporation |
Method of making electroplated interconnection structures on integrated circuit chips
|
US6001235A
(en)
*
|
1997-06-23 |
1999-12-14 |
International Business Machines Corporation |
Rotary plater with radially distributed plating solution
|
US6103096A
(en)
*
|
1997-11-12 |
2000-08-15 |
International Business Machines Corporation |
Apparatus and method for the electrochemical etching of a wafer
|
US6106687A
(en)
*
|
1998-04-28 |
2000-08-22 |
International Business Machines Corporation |
Process and diffusion baffle to modulate the cross sectional distribution of flow rate and deposition rate
|
US6919010B1
(en)
|
2001-06-28 |
2005-07-19 |
Novellus Systems, Inc. |
Uniform electroplating of thin metal seeded wafers using rotationally asymmetric variable anode correction
|
US6251251B1
(en)
|
1998-11-16 |
2001-06-26 |
International Business Machines Corporation |
Anode design for semiconductor deposition
|
US6358392B1
(en)
*
|
1998-11-18 |
2002-03-19 |
The Johns Hopkins University |
Bismuth thin films structure and method of construction
|
US6113759A
(en)
*
|
1998-12-18 |
2000-09-05 |
International Business Machines Corporation |
Anode design for semiconductor deposition having novel electrical contact assembly
|
US6261426B1
(en)
|
1999-01-22 |
2001-07-17 |
International Business Machines Corporation |
Method and apparatus for enhancing the uniformity of electrodeposition or electroetching
|
US6454918B1
(en)
*
|
1999-03-23 |
2002-09-24 |
Electroplating Engineers Of Japan Limited |
Cup type plating apparatus
|
KR19990064747A
(en)
*
|
1999-05-06 |
1999-08-05 |
이종구 |
Manufacturing method of Ni-Fe alloy thin plate and its apparatus
|
US6547937B1
(en)
*
|
2000-01-03 |
2003-04-15 |
Semitool, Inc. |
Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
|
US8308931B2
(en)
*
|
2006-08-16 |
2012-11-13 |
Novellus Systems, Inc. |
Method and apparatus for electroplating
|
US8475636B2
(en)
*
|
2008-11-07 |
2013-07-02 |
Novellus Systems, Inc. |
Method and apparatus for electroplating
|
US6527920B1
(en)
|
2000-05-10 |
2003-03-04 |
Novellus Systems, Inc. |
Copper electroplating apparatus
|
US7622024B1
(en)
|
2000-05-10 |
2009-11-24 |
Novellus Systems, Inc. |
High resistance ionic current source
|
US6669833B2
(en)
*
|
2000-10-30 |
2003-12-30 |
International Business Machines Corporation |
Process and apparatus for electroplating microscopic features uniformly across a large substrate
|
US6869515B2
(en)
|
2001-03-30 |
2005-03-22 |
Uri Cohen |
Enhanced electrochemical deposition (ECD) filling of high aspect ratio openings
|
US7682498B1
(en)
|
2001-06-28 |
2010-03-23 |
Novellus Systems, Inc. |
Rotationally asymmetric variable electrode correction
|
US7569131B2
(en)
*
|
2002-08-12 |
2009-08-04 |
International Business Machines Corporation |
Method for producing multiple magnetic layers of materials with known thickness and composition using a one-step electrodeposition process
|
US6955747B2
(en)
*
|
2002-09-23 |
2005-10-18 |
International Business Machines Corporation |
Cam driven paddle assembly for a plating cell
|
DE10247051A1
(en)
*
|
2002-10-09 |
2004-04-22 |
Polymer Latex Gmbh & Co Kg |
Latex and process for its manufacture
|
US20040084318A1
(en)
*
|
2002-11-05 |
2004-05-06 |
Uri Cohen |
Methods and apparatus for activating openings and for jets plating
|
KR20060024792A
(en)
*
|
2003-06-06 |
2006-03-17 |
세미툴,인크 |
Methods and systems for processing microfeature workpieces with flow agitators and/or multiple electrodes
|
US20050063798A1
(en)
*
|
2003-06-06 |
2005-03-24 |
Davis Jeffry Alan |
Interchangeable workpiece handling apparatus and associated tool for processing microfeature workpieces
|
US20050035046A1
(en)
*
|
2003-06-06 |
2005-02-17 |
Hanson Kyle M. |
Wet chemical processing chambers for processing microfeature workpieces
|
US20050050767A1
(en)
*
|
2003-06-06 |
2005-03-10 |
Hanson Kyle M. |
Wet chemical processing chambers for processing microfeature workpieces
|
US7390382B2
(en)
*
|
2003-07-01 |
2008-06-24 |
Semitool, Inc. |
Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods
|
US7393439B2
(en)
*
|
2003-06-06 |
2008-07-01 |
Semitool, Inc. |
Integrated microfeature workpiece processing tools with registration systems for paddle reactors
|
US6881437B2
(en)
*
|
2003-06-16 |
2005-04-19 |
Blue29 Llc |
Methods and system for processing a microelectronic topography
|
US20070144912A1
(en)
*
|
2003-07-01 |
2007-06-28 |
Woodruff Daniel J |
Linearly translating agitators for processing microfeature workpieces, and associated methods
|
US7100954B2
(en)
*
|
2003-07-11 |
2006-09-05 |
Nexx Systems, Inc. |
Ultra-thin wafer handling system
|
US8623193B1
(en)
|
2004-06-16 |
2014-01-07 |
Novellus Systems, Inc. |
Method of electroplating using a high resistance ionic current source
|
JP4992428B2
(en)
|
2004-09-24 |
2012-08-08 |
イビデン株式会社 |
Plating method and plating apparatus
|
US7931786B2
(en)
*
|
2005-11-23 |
2011-04-26 |
Semitool, Inc. |
Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces
|
WO2008088682A2
(en)
*
|
2007-01-11 |
2008-07-24 |
Keyeye Communications |
Wideband planar transformer
|
US20080178460A1
(en)
*
|
2007-01-29 |
2008-07-31 |
Woodruff Daniel J |
Protected magnets and magnet shielding for processing microfeature workpieces, and associated systems and methods
|
US7799684B1
(en)
|
2007-03-05 |
2010-09-21 |
Novellus Systems, Inc. |
Two step process for uniform across wafer deposition and void free filling on ruthenium coated wafers
|
US20090134039A1
(en)
*
|
2007-11-28 |
2009-05-28 |
Mehlin Dean Matthews |
System and method for isotope selective chemical reacations
|
US8177944B2
(en)
|
2007-12-04 |
2012-05-15 |
Ebara Corporation |
Plating apparatus and plating method
|
US7964506B1
(en)
|
2008-03-06 |
2011-06-21 |
Novellus Systems, Inc. |
Two step copper electroplating process with anneal for uniform across wafer deposition and void free filling on ruthenium coated wafers
|
US8513124B1
(en)
|
2008-03-06 |
2013-08-20 |
Novellus Systems, Inc. |
Copper electroplating process for uniform across wafer deposition and void free filling on semi-noble metal coated wafers
|
US8703615B1
(en)
|
2008-03-06 |
2014-04-22 |
Novellus Systems, Inc. |
Copper electroplating process for uniform across wafer deposition and void free filling on ruthenium coated wafers
|
JP5155755B2
(en)
*
|
2008-07-10 |
2013-03-06 |
株式会社荏原製作所 |
Magnetic film plating apparatus and plating equipment
|
US20120261254A1
(en)
|
2011-04-15 |
2012-10-18 |
Reid Jonathan D |
Method and apparatus for filling interconnect structures
|
US8475637B2
(en)
*
|
2008-12-17 |
2013-07-02 |
Novellus Systems, Inc. |
Electroplating apparatus with vented electrolyte manifold
|
US8262871B1
(en)
|
2008-12-19 |
2012-09-11 |
Novellus Systems, Inc. |
Plating method and apparatus with multiple internally irrigated chambers
|
US9151782B2
(en)
*
|
2009-07-31 |
2015-10-06 |
Pulse Electronics, Inc. |
Current sensing devices and methods
|
US9664711B2
(en)
*
|
2009-07-31 |
2017-05-30 |
Pulse Electronics, Inc. |
Current sensing devices and methods
|
US9823274B2
(en)
*
|
2009-07-31 |
2017-11-21 |
Pulse Electronics, Inc. |
Current sensing inductive devices
|
US8795480B2
(en)
|
2010-07-02 |
2014-08-05 |
Novellus Systems, Inc. |
Control of electrolyte hydrodynamics for efficient mass transfer during electroplating
|
US10094034B2
(en)
|
2015-08-28 |
2018-10-09 |
Lam Research Corporation |
Edge flow element for electroplating apparatus
|
US9624592B2
(en)
|
2010-07-02 |
2017-04-18 |
Novellus Systems, Inc. |
Cross flow manifold for electroplating apparatus
|
US10233556B2
(en)
|
2010-07-02 |
2019-03-19 |
Lam Research Corporation |
Dynamic modulation of cross flow manifold during electroplating
|
US9523155B2
(en)
|
2012-12-12 |
2016-12-20 |
Novellus Systems, Inc. |
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating
|
FR2966282B1
(en)
|
2010-10-18 |
2013-02-15 |
Nexcis |
CONTROL OF LAYER I-III-VI STOICHIOMETRY FOR PHOTOVOLTAIC APPLICATIONS FROM IMPROVED ELECTROLYSIS CONDITIONS.
|
US20120249107A1
(en)
*
|
2011-04-01 |
2012-10-04 |
Cowley Nicholas P |
Coupled inductor to facilitate integrated power delivery
|
US9304149B2
(en)
|
2012-05-31 |
2016-04-05 |
Pulse Electronics, Inc. |
Current sensing devices and methods
|
US8920616B2
(en)
*
|
2012-06-18 |
2014-12-30 |
Headway Technologies, Inc. |
Paddle for electroplating for selectively depositing greater thickness
|
US20140125446A1
(en)
|
2012-11-07 |
2014-05-08 |
Pulse Electronics, Inc. |
Substrate inductive device methods and apparatus
|
US9670588B2
(en)
|
2013-05-01 |
2017-06-06 |
Lam Research Corporation |
Anisotropic high resistance ionic current source (AHRICS)
|
US9449808B2
(en)
|
2013-05-29 |
2016-09-20 |
Novellus Systems, Inc. |
Apparatus for advanced packaging applications
|
US9677190B2
(en)
|
2013-11-01 |
2017-06-13 |
Lam Research Corporation |
Membrane design for reducing defects in electroplating systems
|
JP6411943B2
(en)
*
|
2014-05-26 |
2018-10-24 |
株式会社荏原製作所 |
Substrate electrolytic treatment apparatus and paddle used for the substrate electrolytic treatment apparatus
|
US9816194B2
(en)
|
2015-03-19 |
2017-11-14 |
Lam Research Corporation |
Control of electrolyte flow dynamics for uniform electroplating
|
DE102015104838B4
(en)
*
|
2015-03-30 |
2018-07-19 |
Harting Electric Gmbh & Co. Kg |
Sensor module of a modular connector
|
US10014170B2
(en)
|
2015-05-14 |
2018-07-03 |
Lam Research Corporation |
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
|
DE102015213499B4
(en)
*
|
2015-07-17 |
2024-07-04 |
SUMIDA Components & Modules GmbH |
Coil body
|
US10364505B2
(en)
|
2016-05-24 |
2019-07-30 |
Lam Research Corporation |
Dynamic modulation of cross flow manifold during elecroplating
|
US10573458B2
(en)
*
|
2016-10-05 |
2020-02-25 |
The Boeing Company |
Superconducting air core inductor systems and methods
|
DE102017109499A1
(en)
*
|
2017-05-03 |
2018-11-08 |
Valeo Siemens Eautomotive Germany Gmbh |
inverter
|
US11001934B2
(en)
|
2017-08-21 |
2021-05-11 |
Lam Research Corporation |
Methods and apparatus for flow isolation and focusing during electroplating
|
US10781527B2
(en)
|
2017-09-18 |
2020-09-22 |
Lam Research Corporation |
Methods and apparatus for controlling delivery of cross flowing and impinging electrolyte during electroplating
|
JP6790016B2
(en)
*
|
2018-04-10 |
2020-11-25 |
上村工業株式会社 |
Surface treatment equipment, surface treatment method and paddle
|
CN108893771B
(en)
*
|
2018-07-25 |
2020-01-17 |
河南理工大学 |
Regular polygonal cylinder anode and method for preparing large-area metal microstructure through electrodeposition
|