CH482119A - Turbo molecular pump - Google Patents

Turbo molecular pump

Info

Publication number
CH482119A
CH482119A CH1500167A CH1500167A CH482119A CH 482119 A CH482119 A CH 482119A CH 1500167 A CH1500167 A CH 1500167A CH 1500167 A CH1500167 A CH 1500167A CH 482119 A CH482119 A CH 482119A
Authority
CH
Switzerland
Prior art keywords
molecular pump
turbo molecular
turbo
pump
molecular
Prior art date
Application number
CH1500167A
Other languages
German (de)
Inventor
Becker Dr H C Willi
Original Assignee
Pfeiffer Vakuumtechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik
Publication of CH482119A publication Critical patent/CH482119A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CH1500167A 1966-12-30 1967-10-26 Turbo molecular pump CH482119A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEP0041123 1966-12-30

Publications (1)

Publication Number Publication Date
CH482119A true CH482119A (en) 1969-11-30

Family

ID=7377592

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1500167A CH482119A (en) 1966-12-30 1967-10-26 Turbo molecular pump

Country Status (5)

Country Link
US (1) US3477381A (en)
CH (1) CH482119A (en)
DE (1) DE1503704C3 (en)
FR (1) FR1582018A (en)
GB (1) GB1155700A (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (en) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Impeller for a turbo molecular pump
DE2654055B2 (en) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor and stator disks for turbo molecular pumps
AU3706778A (en) * 1977-10-03 1979-12-20 Rockwell International Corp Axial slurry pump
DE3507274A1 (en) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar DISC WITH SHOVELS HIGH STABILITY FOR TURBOMOLECULAR PUMPS
JPH0261387A (en) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd Turbomolecular pump
IT1241177B (en) * 1990-02-16 1993-12-29 Varian Spa STATOR FOR TURBOMOLECULAR PUMP.
DE4401596A1 (en) * 1994-01-20 1995-07-27 Ekato Ruehr Mischtechnik Stirrer
DE10010371A1 (en) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolecular pump
DE10052637B4 (en) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 02/16/2001 Discs for a turbo molecular pump
US6554564B1 (en) 2001-11-14 2003-04-29 United Technologies Corporation Reduced noise fan exit guide vane configuration for turbofan engines
DE102007006915A1 (en) * 2007-02-13 2008-08-14 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pump rotor element, has reinforcement element connecting parts of pinions with each other and providing improved distribution of loads during operation of rotor element
DE102014102681A1 (en) * 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh stator
EP3034880B1 (en) * 2014-12-15 2019-10-16 Pfeiffer Vacuum Gmbh Rotor assembly for a vacuum pump and method for producing the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US764230A (en) * 1902-03-20 1904-07-05 Metropolitan Trust & Savings Bank Wheel for steam-turbines.
GB190620818A (en) * 1906-09-19 1907-09-19 William Llyod Wise Improvements in or relating to Steam Turbines.
US941411A (en) * 1908-05-07 1909-11-30 Westinghouse Machine Co Turbine-blade-holding means.
US1072233A (en) * 1912-11-07 1913-09-02 Emil Imle Steam-turbine blade.
US1347327A (en) * 1920-01-15 1920-07-20 Gen Electric Elastic-fluid turbine
US2357279A (en) * 1938-10-24 1944-08-29 Rendelstein Max Blower
US2405190A (en) * 1943-03-05 1946-08-06 Peerless Turbine Corp Fluid turbine
FR1121516A (en) * 1953-05-26 1956-08-20 Propellers and distributors for axial fans and turbines
FR81075E (en) * 1962-01-23 1963-07-26 Snecma Advanced Turbomolecular Vacuum Pump
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement

Also Published As

Publication number Publication date
GB1155700A (en) 1969-06-18
DE1503704A1 (en) 1970-07-30
US3477381A (en) 1969-11-11
FR1582018A (en) 1969-09-26
DE1503704C3 (en) 1972-03-23
DE1503704B2 (en) 1971-08-19

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Legal Events

Date Code Title Description
PL Patent ceased