CH476313A - Prüfeinrichtung - Google Patents

Prüfeinrichtung

Info

Publication number
CH476313A
CH476313A CH1150366A CH1150366A CH476313A CH 476313 A CH476313 A CH 476313A CH 1150366 A CH1150366 A CH 1150366A CH 1150366 A CH1150366 A CH 1150366A CH 476313 A CH476313 A CH 476313A
Authority
CH
Switzerland
Prior art keywords
test facility
facility
test
Prior art date
Application number
CH1150366A
Other languages
English (en)
Inventor
Wiesler Mordechai
Goren Avigdor
Original Assignee
Transistor Automation Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Transistor Automation Corp filed Critical Transistor Automation Corp
Publication of CH476313A publication Critical patent/CH476313A/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H35/00—Gearings or mechanisms with other special functional features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
CH1150366A 1965-08-11 1966-08-10 Prüfeinrichtung CH476313A (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US47890265A 1965-08-11 1965-08-11
DE19691908061 DE1908061A1 (de) 1965-08-11 1969-02-18 Vorrichtung zum Hin- und Herverschieben eines Gegenstandes auf einer gegebenen Achse
GB00557/69A GB1247797A (en) 1965-08-11 1969-02-27 A device for reciprocating an article along a given axis
FR6911574A FR2040836A5 (de) 1965-08-11 1969-04-15

Publications (1)

Publication Number Publication Date
CH476313A true CH476313A (de) 1969-07-31

Family

ID=27430853

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1150366A CH476313A (de) 1965-08-11 1966-08-10 Prüfeinrichtung

Country Status (6)

Country Link
US (1) US3446065A (de)
CH (1) CH476313A (de)
DE (1) DE1908061A1 (de)
FR (1) FR2040836A5 (de)
GB (1) GB1247797A (de)
NL (1) NL6611314A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0220830A2 (de) * 1985-09-26 1987-05-06 Tektronix, Inc. Sondenkopf für Wafer und Verfahren zum Montieren eines Sondenkopfes für Wafer
DE4115680A1 (de) * 1990-05-23 1991-12-05 Solid State Measurements Inc Geraet zum bestimmen der elektrischen eigenschaften von halbleitern
DE19680091T1 (de) * 1995-01-27 1997-04-24 Advantest Corp Mehrfach-Halbleitertestsystem

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2094479B (en) * 1978-01-30 1983-03-16 Texas Instruments Inc Determining probe contact in testing integrated circuits
US4219771A (en) * 1978-02-21 1980-08-26 Texas Instruments Incorporated Four-quadrant, multiprobe-edge sensor for semiconductor wafer probing
US4201939A (en) * 1978-06-26 1980-05-06 Texas Instruments Incorporated Multiprobe contact monitor and control system
US4888550A (en) * 1981-09-14 1989-12-19 Texas Instruments Incorporated Intelligent multiprobe tip
US4414438A (en) * 1982-06-04 1983-11-08 International Jensen Incorporated Video game controller
US4749942A (en) * 1985-09-26 1988-06-07 Tektronix, Inc. Wafer probe head
US4904933A (en) * 1986-09-08 1990-02-27 Tektronix, Inc. Integrated circuit probe station
KR0138754B1 (ko) * 1990-08-06 1998-06-15 이노우에 아키라 전기회로측정용 탐침의 접촉검지장치 및 이 접촉검지장치를 이용한 전기회로 측정장치
US5557214A (en) * 1995-02-06 1996-09-17 Barnett; C. Kenneth Micro beam probe semiconductor test interface
US5635848A (en) * 1995-03-10 1997-06-03 International Business Machines Corporation Method and system for controlling high-speed probe actuators
US5804982A (en) * 1995-05-26 1998-09-08 International Business Machines Corporation Miniature probe positioning actuator
US5532611A (en) * 1995-05-26 1996-07-02 International Business Machines Corporation Miniature probe positioning actuator
JP4490521B2 (ja) * 1999-01-29 2010-06-30 東京エレクトロン株式会社 回転駆動機構及び被検査体の載置機構並びに検査装置
SE524092C2 (sv) 2002-10-28 2004-06-22 Billy Palmius Ett schabrak för placering mellan sadel och ett djur som skall ridas

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2330801A (en) * 1939-12-26 1943-10-05 Physicists Res Company Tracer mechanism for investigating surface irregularities
US2345022A (en) * 1940-02-29 1944-03-28 Donald E Williamson Tracer mechanism
US2621224A (en) * 1949-10-08 1952-12-09 Physicists Res Company Mechanical-electrical displacement converter
US2703007A (en) * 1952-03-15 1955-03-01 Gen Motors Corp Surface smoothness gauge
US3074175A (en) * 1960-03-14 1963-01-22 Ryan Aeronautical Co Displacement transducer
DE1250135B (de) * 1963-04-01 1967-09-14
DE1274804B (de) * 1963-07-08 1968-08-08 Siemens Ag Torsionsstab zur Umwandlung eines Drehwinkels in einen elektrischen Wert nach dem Dehnungswiderstandsprinzip
US3212325A (en) * 1963-07-30 1965-10-19 Katz Lester Force measuring instrument
FR1375135A (fr) * 1963-08-09 1964-10-16 Realisations D Installations D Potentiomètre à jauges à fils résistants

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0220830A2 (de) * 1985-09-26 1987-05-06 Tektronix, Inc. Sondenkopf für Wafer und Verfahren zum Montieren eines Sondenkopfes für Wafer
EP0220830A3 (de) * 1985-09-26 1987-10-21 Tektronix, Inc. Sondenkopf für Wafer und Verfahren zum Montieren eines Sondenkopfes für Wafer
DE4115680A1 (de) * 1990-05-23 1991-12-05 Solid State Measurements Inc Geraet zum bestimmen der elektrischen eigenschaften von halbleitern
DE19680091T1 (de) * 1995-01-27 1997-04-24 Advantest Corp Mehrfach-Halbleitertestsystem

Also Published As

Publication number Publication date
NL6611314A (de) 1967-02-13
US3446065A (en) 1969-05-27
GB1247797A (en) 1971-09-29
DE1908061A1 (de) 1970-09-03
FR2040836A5 (de) 1971-01-22

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Legal Events

Date Code Title Description
PL Patent ceased